Method for converting picture into GDS file

Abstract

The invention discloses a method for converting a picture into a GDS file. The method mainly comprises the following steps: graying an original color picture; carrying out binarization processing on the grey-scale map based on an adaptive threshold method; and in a python environment, using numpy and gdspy libraries to convert the binary image into a file in a GDS format. The method is convenient and practical, and pictures in any format can be converted into GDS files which can be recognized by an exposure system.

Description

Technical Field

[0001] This invention relates to the field of photolithography, and in particular to a method for converting images into GDS files. Background Technology

[0002] In electron beam lithography (EBL), to expose a target image for graphic processing, a GDS (Graphic Data System) format file needs to be imported into the exposure system because the system cannot recognize image formats. Therefore, to achieve graphic exposure of images of any format, the image format must be converted to a GDS format file that the exposure system can recognize. Summary of the Invention

[0003] This disclosure provides a method for converting an image into a GDS file, which can convert an image requiring exposure into a GDS format file that the device can recognize.

[0004] The method for converting images to GDS files disclosed herein mainly includes the following steps:

[0005] S1 converts the original color image to grayscale;

[0006] S2, perform binarization on the obtained grayscale image;

[0007] S3. In the Python environment, the NumPy library (an open-source numerical computation extension library in Python) and the GDS-Py library (an open-source Python library for creating, manipulating, and analyzing geometric data in GDSII format) are used to convert the binarized image obtained in step S2 into a GDS geometric structure, and then the standard GDS format file is generated by using GDS-Py.

[0008] Furthermore, in step S2, binarization is performed based on an adaptive threshold, that is, different appropriate thresholds are selected for each part of the grayscale image obtained in step S1 according to the actual situation.

[0009] Furthermore, step S3 specifically includes:

[0010] a. Flip the image vertically to ensure that the graphics in the generated GDS file are spatially consistent with the original image;

[0011] b. Extract the height and width of the image, create a cell and add it to the GDS library, convert the image data into a rectangle and add it to this cell, and finally write the entire library into a GDS file;

[0012] c. Calculate the scaling ratio of the graphic in the horizontal and vertical directions to ensure that the graphic maintains its original aspect ratio after scaling;

[0013] d. For graphics of different complexities, customize the total number of graphics and finally output a GDS format file.

[0014] Furthermore, step S3 also includes the following steps:

[0015] Klayout software was used to refine the graphic details to match the final exposure result.

[0016] Furthermore, the method also includes the following steps:

[0017] Based on the obtained GDS file, the desired image can be exposed.

[0018] Compared with the prior art, the beneficial effects of this disclosure are: (1) it can convert any format image into a GDS file; (2) it can refine the GDS file according to actual needs; and (3) the method is simple and practical. Attached Figure Description

[0019] The above and other objects, features and advantages of this disclosure will become more apparent from the more detailed description of exemplary embodiments of this disclosure taken in conjunction with the accompanying drawings, in which the same reference numerals generally represent the same components.

[0020] Figure 1 A flowchart illustrating an exemplary embodiment of this disclosure;

[0021] Figure 2 This is an example grayscale image;

[0022] Figure 3 This is a binary image;

[0023] Figure 4 The image is a GDS format file;

[0024] Figure 5 This is the final exposure result for the graphic. Detailed Implementation

[0025] Preferred embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While preferred embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure will be thorough and complete, and will fully convey the scope of the present disclosure to those skilled in the art.

[0026] This disclosure provides a method for converting an image into a GDS file. A flowchart illustrating an exemplary embodiment of this disclosure is attached. Figure 1 As shown, the main steps include:

[0027] 1) Convert the original color image to grayscale, as shown in the attached image. Figure 2 As shown;

[0028] 2) Select appropriate thresholds for each part of the grayscale image based on the actual situation, and perform binarization processing on the grayscale image, as shown in the attached figure. Figure 3 As shown;

[0029] 3) In a Python environment, use the "numpy" and "gdspy" libraries to convert the above binarized image into a GDS format file, as shown in the attached image. Figure 4 As shown, the specific steps are as follows:

[0030] a. Flip the image vertically to ensure that the graphics in the generated GDS file are spatially consistent with the original image;

[0031] b. Extract the height and width of the image, create cells and add them to the GDS library, convert the image data into rectangles and add them to these cells, and finally write the entire library into a GDS file;

[0032] c. Calculate the scaling ratio of the graphic in the horizontal and vertical directions to ensure that the graphic maintains its original aspect ratio after scaling;

[0033] d. Customize the total number of graphics for graphics of varying complexity, and finally output a GDS format file;

[0034] e. As a preferred option, Klayout software can be used to refine the graphic details to match the final exposure result.

[0035] Based on this GDS document, the attached document can be exposed. Figure 5 The result.

[0036] The above technical solutions are merely exemplary embodiments of the present invention. For those skilled in the art, based on the application methods and principles disclosed in the present invention, it is easy to make various types of improvements or modifications, and not limited to the methods described in the specific embodiments of the present invention. Therefore, the methods described above are merely preferred and not restrictive.

Claims

1. A method for converting an image into a GDS file, characterized in that, Includes the following steps: S1 converts the original color image to grayscale; S2, perform binarization on the obtained grayscale image; S3. In the Python environment, using the NumPy and GDSPy libraries, the binarized image obtained in step S2 is converted into a GDS geometric structure, and then a standard GDS format file is generated using GDSPy.

2. The method according to claim 1, characterized in that, In step S2, binarization is performed based on an adaptive threshold, that is, different appropriate thresholds are selected for each part of the grayscale image obtained in step S1 according to the actual situation.

3. The method according to claim 1, characterized in that, Step S3 specifically includes: a. Flip the image vertically to ensure that the graphics in the generated GDS file are spatially consistent with the original image; b. Extract the height and width of the image, create a cell and add it to the GDS library, convert the image data into a rectangle and add it to this cell, and finally write the entire library into a GDS file; c. Calculate the scaling ratio of the graphic in the horizontal and vertical directions to ensure that the graphic maintains its original aspect ratio after scaling; d. For graphics of different complexities, customize the total number of graphics and finally output a GDS format file.

4. The method according to claim 1, characterized in that, Step S3 further includes the following steps: Klayout software was used to refine the graphic details to match the final exposure result.

5. The method according to any one of claims 1-4, characterized in that, It also includes the following steps: Based on the obtained GDS file, the desired image can be exposed.

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