Fluid control module capable of weakening noise and heat dissipation device

Abstract

The invention relates to the technical field of heat dissipation devices, in particular to a fluid control module capable of weakening noise and a heat dissipation device.The fluid control module capable of weakening noise comprises a fluid generator, an opposite plate and a splitter plate. At least one splitter plate is stacked in an open partition cavity formed between the opposed plate and the fluid generator, and two sides of each splitter plate are provided with splitter channels which are communicated with the outside of the periphery of the partition cavity, the first hole part, the second hole part and the third hole part. A single partition cavity for introducing external gas as a fluid control module is divided into a plurality of flow dividing channels, so that the number of wall surfaces to which the introduced gas is adhered is increased, a large flow of gas flowing close to the wall is divided into a plurality of small flows of gas flowing close to the wall, and the flow rate of the gas is also reduced; and the strength of random pressure pulsation generated by airflow to the wall surface is weakened as much as possible, so that noise is reduced and even suppressed.

Description

Technical Field

[0001] This invention relates to the field of heat dissipation device technology, and in particular to a fluid control module and heat dissipation device that can reduce noise. Background Technology

[0002] Applying jet actuators to heat dissipation within the confined spaces of smart terminal products is considered to offer significant thermal benefits. Piezoelectric-driven jet actuators are widely studied due to their ease of miniaturization and low power consumption. A typical piezoelectric jet actuator comprises a piezoelectric actuator, a spacer, and a diaphragm, stacked sequentially and positioned to form a chamber. An aperture connecting the chamber is penetrated through the diaphragm in the region opposite to the chamber. When the piezoelectric element is excited by an electrical signal, it causes the piezoelectric actuator to vibrate, resulting in periodic volume changes within the chamber. Gas is drawn into the chamber through the aperture and ultimately discharged through it, forming a jet. The jet discharged from the aperture further entrains gas from the surrounding area, increasing the flow rate.

[0003] When this jet generator is used for heat source heat dissipation, in order to prevent the gas carrying heat formed by the jet impacting the heat source surface from being re-entrained by the gas jet discharged from the orifice and forming a local hot gas circulation, which would affect the heat dissipation efficiency, a counter plate is usually set between the diaphragm and the heat source to guide the gas to flow in one direction, which can effectively suppress the hot gas circulation. The gap between the diaphragm and the counter plate forms a channel for external gas to flow from the outer periphery of the gap between the diaphragm and the counter plate toward the area of ​​the gap opposite to the orifice.

[0004] However, further research revealed that during this process, on the one hand, the gas flows along the wall at a high velocity, creating random and continuous turbulent vortices that generate random pressure fluctuations and noise. On the other hand, although the gas carrying heat is effectively prevented from being entrained by the jet again by the opposing plate, the lack of a drainage mechanism between the opposing plate and the heat source to guide the hot gas to flow quickly out into the environment means that the hot gas will still accumulate for a long time in the area near the holes of the opposing plate opposite the heat source, making it difficult to dissipate quickly and affecting the heat dissipation effect. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a fluid control module and heat dissipation device that can reduce noise in order to overcome the shortcomings of the prior art.

[0006] The technical solution adopted by this invention to solve its technical problem is: a fluid control module that can reduce noise, comprising: A fluid generator has a piezoelectric actuator, a spacer, and a diaphragm, the diaphragm being joined to the piezoelectric actuator via the spacer, the piezoelectric actuator, the spacer, and the diaphragm forming a chamber, and at least one first hole communicating with the chamber being passed through the diaphragm. A counter plate is spaced apart on the side of the diaphragm away from the piezoelectric actuator, so that a cavity is formed between the counter plate and the fluid generator, and a second hole is correspondingly passed through the part of the counter plate opposite to the first hole. And a flow divider plate, wherein at least one flow divider plate is provided in the cavity to form at least two flow divider channels distributed sequentially along the thickness direction of the piezoelectric actuator, and each flow divider plate is located between two adjacent flow divider channels; A third hole is provided on the diversion plate at the location opposite to the first hole, which connects two adjacent diversion channels. The diversion channels are connected to the external environment. The first hole is connected to the diversion channel on the side where the diaphragm is located, and the second hole is connected to the diversion channel on the side where the opposing plate is located.

[0007] Furthermore, the diversion plate includes a diversion baffle layer that is fixedly connected to or integrally formed with each other and at least one diversion support layer; The diversion support layer has a diversion opening, the orthographic projection of the diversion opening on the diaphragm at least covers the first hole, the orthographic projection of the diversion opening on the opposing plate at least covers the second hole, and the orthographic projection of the diversion opening on the diversion partition layer at least covers the third hole, the third hole being located on the diversion partition layer; A flow divider is provided between the diaphragm and the opposing plate. Flow divider support layers are provided on both sides of the flow divider layer and between the diaphragm and the opposing plate, so as to form flow divider channels at the flow divider openings on both sides of the flow divider. Alternatively, two or more diversion plates may be provided between the diaphragm and the opposing plate, and the diversion support layer may be provided between the diversion plate layer and the diaphragm, between two adjacent diversion plate layers, and between the diversion plate layer and the opposing plate, so as to form diversion channels at the diversion openings on both sides of each diversion plate.

[0008] Furthermore, the diversion support layer is an annular structure with a first outer peripheral opening, and the diversion support layer surrounds the diversion opening; The diversion opening extends to one side of the outer periphery of the cavity to form a first peripheral opening. The diversion opening connects to the external environment through the first peripheral opening. The diversion opening and the first peripheral opening together form the diversion channel.

[0009] Furthermore, the diversion support layer consists of a plurality of diversion support portions discretely arranged in a ring shape, with the plurality of diversion support portions forming a diversion opening; The gap between two adjacent diversion support parts forms a first peripheral opening, which connects to the external environment. The diversion opening and the first peripheral opening together form the diversion channel.

[0010] Furthermore, the diversion support layer is a continuous closed annular structure, the diversion support layer surrounds a diversion opening, and the diversion opening forms a diversion channel; The diversion opening is connected to the external environment through a fluid channel port; The flow divider layer is provided with the fluid channel port, or both the flow divider layer and the opposing plate are provided with the fluid channel port.

[0011] Furthermore, the area of ​​the diaphragm opposite to the diversion opening is formed as a movable part that can vibrate and deform. When the piezoelectric actuator vibrates under the excitation of an electrical signal, it transmits vibration energy to the diaphragm to cause the movable part of the diaphragm to vibrate.

[0012] Furthermore, the cross-sectional area of ​​the first hole, the cross-sectional area of ​​each of the third holes formed on each of the diverter plates, and the cross-sectional area of ​​the second hole gradually increase in the direction from the first hole toward the second hole.

[0013] Furthermore, the minimum flow cross-sectional area of ​​each flow channel formed on both sides of each of the aforementioned flow dividers may be the same or different.

[0014] Furthermore, the piezoelectric actuator includes a vibrating plate and a piezoelectric sheet. The vibrating plate has a vibrating part and a frame part surrounding the vibrating part. At least one piezoelectric sheet is attached to one or both surfaces of the vibrating part in the thickness direction. Under the excitation of an electrical signal, the piezoelectric sheet causes the vibrating part to vibrate, thereby causing the piezoelectric actuator to vibrate.

[0015] The present invention also provides a heat dissipation device, including the above-described fluid control module that can reduce noise.

[0016] Furthermore, it also includes at least one drainage plate; The drain plate is disposed between the opposing plate and the heat source, such that the space between the opposing plate and the heat source forms at least two drain channels that are sequentially distributed along the thickness direction of the piezoelectric actuator due to the presence of at least one drain plate. Each drain plate is located between two adjacent drain channels, and the drain channels are connected to the external environment. Each of the aforementioned drainage plates has a fourth hole that connects two adjacent drainage channels at the location opposite to the second hole.

[0017] Furthermore, the drainage plate includes a drainage partition layer and a drainage support layer that are fixedly connected to each other or integrally formed; The drainage support layer has a drainage opening, the orthographic projection of the drainage opening on the opposing plate at least covers the second hole, the orthographic projection of the drainage opening on the drainage partition layer at least covers the fourth hole, and the fourth hole is located on the drainage partition layer; A diversion plate is provided between the opposing plate and the heat source. The diversion support layer is provided between the opposing plate and the heat source on both sides of the diversion partition layer, so as to form a diversion channel at the diversion opening on both sides of the diversion plate. Alternatively, two or more diversion plates may be provided between the opposing plate and the heat source, and diversion support layers may be provided between the diversion partition layer and the opposing plate, between two adjacent diversion partition layers, and between the diversion partition layer and the heat source, so as to form diversion channels at the diversion openings on both sides of each diversion plate.

[0018] Furthermore, the diversion support layer is an annular structure with a second outer peripheral opening, and the drainage support layer surrounds the drainage opening; The drainage opening extends to one side of the outer periphery of the drainage plate to form a second peripheral opening. The drainage opening connects to the external environment through the second peripheral opening. The drainage opening and the second peripheral opening together form the drainage channel.

[0019] Furthermore, the drainage support layer consists of a plurality of drainage support portions discretely arranged in a ring shape, with the plurality of drainage support portions forming a drainage opening; The gap between two adjacent drainage support portions forms a second peripheral opening, through which the drainage opening connects to the external environment, and the drainage opening and the second peripheral opening together form the drainage channel.

[0020] Furthermore, the extension direction of the second peripheral opening is offset from the extension direction of the first peripheral opening in the peripheral direction of the drain plate.

[0021] Furthermore, the drainage support layer is a continuous closed annular structure, and the drainage support layer forms a drainage opening; The drainage opening is connected to the external environment through a flow port; The drainage partition layer is provided with the flow port, or both the drainage partition layer and the opposing plate are provided with the flow port.

[0022] Furthermore, the cross-sectional area of ​​the second hole and the cross-sectional area of ​​each of the fourth holes formed on each of the drainage plates gradually decrease in the direction from the second hole toward the fourth hole.

[0023] Furthermore, the minimum flow cross-sectional area of ​​each flow channel formed on both sides of each of the aforementioned flow channels may be the same or different.

[0024] The beneficial effects of this invention are: 1) The noise-reducing fluid control module of the present invention, by stacking at least one flow divider plate in an open cavity formed between the opposing plate and the fluid generator, and forming flow divider channels on both sides of each flow divider plate that connect the outer periphery of the cavity and the first, second, and third holes, divides the single cavity that introduces external gas as a fluid control module into multiple flow divider channels, thereby increasing the number of wall surfaces on which the introduced gas can adhere. The large flow of gas flowing against the wall is divided into several small flow of gas flowing against the wall, and the gas velocity is reduced accordingly, thereby weakening the intensity of random pressure pulsations generated by the airflow on the wall as much as possible, thereby reducing or even suppressing noise.

[0025] 2) The heat dissipation device of the present invention, by stacking at least one guide plate between the opposing plate and the heat source, forms a guide channel on both sides of each guide plate that connects the outside of the heat dissipation device and the second and fourth holes. That is, a single exhaust channel for the heat-carrying gas formed by the heat dissipation device is divided into multiple guide channels, thereby increasing the number of wall surfaces on which the exhaust gas can adhere. Utilizing the wall adhesion effect of the gas flow, the hot gas is promptly and quickly dissipated from the area adjacent to the second hole of the opposing plate, opposite to the heat source, into the external environment, preventing heat accumulation and improving heat dissipation efficiency.

[0026] 3) The heat dissipation device of the present invention, by stacking at least one diversion plate between the opposing plate and the heat source, is equivalent to setting a heat sink between the opposing plate and the heat source, which increases the heat exchange and heat dissipation area between the heat dissipation device and the heat source, and is conducive to further improving the heat dissipation efficiency.

[0027] Other features and advantages of this application will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0028] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0029] Figure 1 This is a schematic diagram of a vibrating plate; Figure 2 This is a schematic diagram of the partition; Figure 3 This is a schematic diagram of a noise-reducing fluid control module with a single flow divider in Embodiment 1; Figure 4 This is a three-dimensional view of one side of the splitter plate in Embodiment 1; Figure 5 This is a three-dimensional view of the other side of the splitter in Embodiment 1; Figure 6 This is a top view of the splitter plate in Example 1; Figure 7This is a schematic diagram of a noise-reducing fluid control module with multiple flow dividers as shown in Embodiment 1. Figure 8 This is a schematic diagram of a fluid control module that can reduce noise when the spacer and the vibrating part are combined in Embodiment 1. Figure 9 This is a schematic diagram of any cross section passing through the centers of the first, third, and second holes that are arranged opposite to each other; Figure 10 This is a schematic diagram of the noise-reducing fluid control module in Embodiment 2; Figure 11 This is a three-dimensional view of one side of the splitter plate in Embodiment 2; Figure 12 This is a three-dimensional view of the other side of the splitter plate in Embodiment 2; Figure 13 This is a top view of the splitter plate in Example 2; Figure 14 This is a schematic diagram of the noise-reducing fluid control module in Embodiment 3; Figure 15 This is a top view of the splitter plate in Example 3; Figure 16 This is a schematic diagram of the noise-reducing fluid control module in Example 4; Figure 17 This is a top view of the splitter plate in embodiment 4 or 7; Figure 18 This is a schematic diagram of a vibrating plate in Example 4, where the elastic connection part is a continuous annular elastic thin plate; Figure 19 This is a schematic diagram of a vibrating plate in Embodiment 4, where the elastic connection part is a plurality of discretely arranged elastic connecting beams; Figure 20 This is a schematic diagram of the noise-reducing fluid control module in Example 5; Figure 21 This is a top view of the splitter plate in embodiment 5 or 8; Figure 22 This is a schematic diagram of the noise-reducing fluid control module in Example 6; Figure 23 This is a top view of the splitter plate in embodiment 6 or 9; Figure 24 This is a schematic diagram of the noise-reducing fluid control module in Embodiment 7; Figure 25 This is a schematic diagram of the noise-reducing fluid control module in Example 8; Figure 26 This is a schematic diagram of a noise-reducing fluid control module in Embodiment 9, where the fluid channel port is directly connected to the outside of the cavity. Figure 27 This is a schematic diagram of a noise-reducing fluid control module in Embodiment 9, in which the fluid channel port is indirectly connected to the outside of the cavity. Figure 28 This is a schematic diagram of the fluid channel opening provided in the flow divider plate in Embodiment 9; Figure 29 This is a schematic diagram of a heat dissipation device with a single diverter plate in Embodiment 11; Figure 30 This is a top view of the drainage plate in Example 11; Figure 31 This is a schematic diagram of a heat dissipation device with multiple diversion plates in Embodiment 11; Figure 32 This is a schematic diagram of the heat dissipation device in Embodiment 12; Figure 33 This is a top view of the splitter plate in Example 12; Figure 34 This is a top view of the drainage plate in Example 12.

[0030] In the figure: 1. Piezoelectric actuator, 11. Vibrating plate, 111. Frame, 112. Vibrating part, 113. Elastic connection part, 12. Piezoelectric sheet; 2. Spacer section; 21. Spacer body; 3. Diaphragm; 31. First orifice; 4. Chamber; 5. Opposing plate; 51. Second hole; 6. Diverter plate; 61. Diverter baffle layer; 611. Third hole; 62. Diverter support layer; 62-1. Diverter support part; 621. Diverter opening; 622. First outer peripheral opening. 7. Diversion channel; 71. Fluid channel inlet; 8. Drainage plate; 81. Drainage baffle layer; 811. Fourth hole; 82. Drainage support layer; 82-1. Drainage support part; 821. Drainage opening; 822. Second outer peripheral opening; 9. Drainage channel; 10. Heat source.

[0031] α, jet angle; L, the leader line. Detailed Implementation

[0032] The invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention in a schematic manner. Therefore, they only show the components relevant to the invention. Orientations and references (e.g., up, down, left, right, etc.) are only used to aid in the description of the features in the drawings. Therefore, the following specific embodiments are not intended to be restrictive, and the scope of the claimed subject matter is defined solely by the appended claims and their equivalents.

[0033] Example 1, such as Figure 1-10 As shown, a noise-reducing fluid control module, which can be used in a heat dissipation device, includes a fluid generator, an opposing plate 5, and a flow divider 6. The fluid generator has a piezoelectric actuator 1, a spacer 2 and a diaphragm 3. The diaphragm 3 is connected to the piezoelectric actuator 1 through the spacer 2. The piezoelectric actuator 1, the spacer 2 and the diaphragm 3 form a chamber 4. At least one first hole 31 communicating with the chamber 4 is passed through the diaphragm 3. The piezoelectric actuator 1 includes a vibrating plate 11 and a piezoelectric sheet 12. The vibrating plate 11 has a vibrating part 112 and a frame part 111 surrounding the vibrating part 112. At least one piezoelectric sheet 12 is attached to one or both surfaces of the vibrating part 112 in the thickness direction. Under the excitation of an electrical signal, the piezoelectric sheet 12 causes the vibrating part 112 to vibrate, thereby causing the piezoelectric actuator 1 to vibrate. The piezoelectric sheet 12 can be a piezoelectric ceramic sheet. The vibrating plate 11 and the piezoelectric sheet 12 attached to the vibrating part 112 of the vibrating plate 11 can be, but are not limited to, circular, rectangular, polygonal, or elliptical shapes. In this embodiment, the vibrating plate 11 and the piezoelectric sheet 12 are both circular plates for illustration. Figure 1 As shown.

[0034] The spacer portion 2 has a ring-shaped structure. One end of the spacer portion 2 near the piezoelectric actuator 1 is engaged with the piezoelectric actuator 1. That is, the spacer portion 2 can be engaged with either the area of ​​the piezoelectric actuator 1 opposite to the frame portion 111 of the vibrating plate 11, or the area of ​​the piezoelectric actuator 1 opposite to the vibrating portion 112 of the vibrating plate 11. In addition, the spacer portion 2 can be engaged with either the vibrating plate 11 constituting the piezoelectric actuator 1 or the piezoelectric sheet 12 constituting the piezoelectric actuator 1. In this embodiment, the spacer portion 2 is described as being engaged with the vibrating plate 11 constituting the piezoelectric actuator 1, but this does not constitute a limitation of the present invention.

[0035] As described above, the spacer 2 is engaged with the vibrating plate 11. This can be either the spacer 2 being engaged with the frame portion 111 of the vibrating plate 11, or the spacer 2 being engaged with the vibrating portion 112 of the vibrating plate 11.

[0036] When the spacer 2 is joined to the frame 111, the joining between the spacer 2 and the frame 111 can be by bonding, welding or integral molding, etc. The inner peripheral wall of the spacer 2 and the vibrating plate 11 of the piezoelectric actuator 1 form an annular groove with an opening at one end away from the piezoelectric actuator 1. The diaphragm 3 covers the opening of the groove and forms a chamber 4 between the piezoelectric actuator 1, the groove and the diaphragm 3. At least one first hole 31 is passed through the diaphragm 3 to communicate with the chamber 4. The cross-sectional shape of the first hole 31 can be circular, square, rectangular, elliptical or other shapes, and is not limited here. In this embodiment, the cross-sectional shape of the first hole 31 is circular, but this does not constitute a limitation of the present invention.

[0037] The piezoelectric element 12 is excited by an electrical signal, which causes the vibrating part 112 to vibrate, which in turn causes the piezoelectric actuator 1 to vibrate, causing the chamber 4 to undergo periodic volume changes. Gas is drawn into the chamber 4 through the first hole 31 and finally discharged through the first hole 31 to form a jet.

[0038] It should be noted that the end of the spacer 2 facing away from the piezoelectric actuator 1 is wholly or partially engaged with the diaphragm 3 along the annular path around the groove; or, the spacer 2 has a plurality of discrete, annularly distributed spacers 21, such as Figure 2 As shown, multiple spacers 21 are spaced apart along an annular path around the chamber 4 to form a groove with the piezoelectric actuator 1. The end of each spacer 21 facing away from the piezoelectric actuator 1 is wholly or partially connected to the diaphragm 3. That is, the piezoelectric actuator 1, the diaphragm 3, and the spacers 2 form the chamber 4. The spacers 2 form the inner peripheral wall of the chamber 4. The inner peripheral wall of the chamber 4 can be closed, without any channels communicating with the outside, and the spacers 2 can be annular. Alternatively, the inner peripheral wall of the chamber 4 can be open, with multiple spacers 21 discretely arranged in an annular pattern. The gaps between the multiple spacers 21 form channels communicating with the outside. The passage connects to chamber 4. Although external gas can enter chamber 4 through the passage and flow toward the center of chamber 4, the pressure change in the area of ​​chamber 4 opposite to the first hole 31 is more drastic than that in the passage formed on the periphery of chamber 4. The fluid is mainly drawn in and discharged through the first hole 31. The fluid entering chamber 4 through the passage does not have time to reach the area of ​​chamber 4 opposite to and adjacent to the first hole 31 before its flow direction is reversed and it flows out of chamber 4 along the original path. Therefore, it does not have a substantial or very small impact on the fluid's intake and discharge from the first hole 31. So the inner periphery of chamber 4 can be open.

[0039] The opposing plates 5 are spaced apart on the side of the diaphragm 3 facing away from the piezoelectric actuator 1, forming a cavity between the opposing plates 5 and the fluid generator. A second hole 51 is correspondingly inserted through the opposing plates 5 at the location opposite to the first hole 31. Similarly, the cross-sectional shape of the second hole 51 can be circular, square, rectangular, elliptical, or other shapes, without limitation. In this embodiment, a circular cross-sectional shape is used for illustration, but this does not constitute a limitation of the invention. Preferably, the first hole 31 and the second hole 51 correspond one-to-one and are coaxially arranged. More preferably, the flow area of ​​the second hole 51 is larger than the flow area of ​​its corresponding first hole 31. For example, the flow area of ​​the second hole 51 can be 1.1 to 10 times that of its corresponding first hole 31, so that the gas jet ejected from the first hole 31 can be contained by the second hole 51, avoiding flow loss caused by wall reflection. Figure 3 As shown.

[0040] The cavity is provided with at least one flow divider plate 6 to form at least two flow divider channels 7 distributed sequentially along the thickness direction of the piezoelectric actuator 1, and each flow divider plate 6 is located between two adjacent flow divider channels 7; a third hole 611 is provided through the part of the flow divider plate 6 opposite to the first hole 31 to connect the two adjacent flow divider channels 7; similarly, the cross-sectional shape of the third hole 611 can be circular, square, rectangular, elliptical or other shapes, and is not limited here. In this embodiment, the cross-sectional shape of the third hole 611 is circular, but this does not constitute a limitation of the present invention. Preferably, the third hole 611, the first hole 31 and the second hole 51 correspond to each other one by one and are coaxially arranged with each other; The diversion channel 7 is connected to the external environment. The diversion channel 7 on the side where the first hole 31 is located is connected to the diversion channel 7 on the side where the diaphragm 3 is located, and the diversion channel 7 on the side where the second hole 51 is located is connected to the diversion channel 7 on the side where the opposing plate 5 is located, so that the cavity is provided with at least one diversion plate 6, and diversion channels 7 are formed on both sides of each diversion plate 6, connecting the outside of the cavity (the outside of the cavity is equivalent to the external environment) and the first hole 31, the second hole 51, and the third hole 611. External gas must be introduced into the vicinity of the first orifice 31 through the gap between the diaphragm 3 and the opposing plate 5, thereby being drawn into the chamber 4 by the first orifice 31 and finally discharged from the first orifice 31. That is, the chamber is not closed, but is an open chamber that allows fluid to flow.

[0041] At least one diverter plate 6, which is stacked, is attached to the side surface of the diaphragm 3 facing away from the partition 2 at one end near the diaphragm 3, and at least one diverter plate 6, which is attached to the side surface of the opposing plate 5 facing the diaphragm 3 at the other end facing away from the diaphragm 3.

[0042] The diversion plate 6 includes a diversion baffle layer 61 that is fixedly connected to each other or integrally formed, and at least one diversion support layer 62. The diversion baffle layer 61 and the diversion support layer 62 are integrally formed to form the diversion plate 6, or the diversion baffle layer 61 and the diversion support layer 62 are separately formed and fixedly connected to form the diversion plate 6. To simplify the manufacturing process, it is more ideal that the diversion baffle layer 61 and the diversion support layer 62 are separately formed and fixedly connected by means of bonding, welding or other methods to form the diversion plate 6, but this is not a limitation. The diversion support layer 62 has a diversion opening 621. The orthographic projection of the diversion opening 621 on the diaphragm 3 at least covers the first hole 31. The orthographic projection of the diversion opening 621 on the opposing plate 5 at least covers the second hole 51. The orthographic projection of the diversion opening 621 on the diversion partition layer 61 at least covers the third hole 611. The third hole 611 is located on the diversion partition layer 61. When a diversion plate 6 is provided between the diaphragm 3 and the opposing plate 5, diversion support layers 62 are respectively provided on both sides of the diversion plate layer 61 between the diaphragm 3 and the opposing plate 5, so that diversion channels 7 connecting to the outside of the cavity (equivalent to the external environment) are respectively formed at the diversion openings 621 on both sides of the diversion plate 6. Figures 3-6 As shown; When two or more diversion plates 6 are provided between the diaphragm 3 and the opposing plate 5, diversion support layers 62 are provided between the diversion plate layer 61 and the diaphragm 3, between two adjacent diversion plate layers 61, and between the diversion plate layer 61 and the opposing plate 5, so that diversion channels 7 connecting to the outside of the cavity are formed at the diversion openings 621 on both sides of each diversion plate 6. Figure 7 As shown.

[0043] The specific configuration of the flow divider 6 and the establishment of the flow channel connection relationship between the flow divider channel 7 formed on both sides of each flow divider 6 and the outside of the partition cavity and the flow channel formed by the first hole 31, the second hole 51 and the third hole 611 can be achieved in a variety of ways.

[0044] In this embodiment, each diversion support layer 62 is a continuous open annular structure. For example, the diversion support layer 62 is an annular structure with a first outer peripheral opening 622, and the diversion support layer 62 surrounds the diversion opening 621. The diversion opening 621 extends towards the outer periphery of the cavity to form the first outer peripheral opening 622. The diversion opening 621 communicates with the external environment through the first outer peripheral opening 622. The diversion opening 621 and the first outer peripheral opening 622 together form the diversion channel 7, such as... Figures 3-7 As shown.

[0045] When the spacer 2 and the vibrating part 112 are engaged, it is easy to understand that the area of ​​the vibrating part 112 opposite to the spacer 2 is connected to the opposing plate 5 through the spacer 2, the diaphragm 3, and the diverter plate 6 to form a fixed constraint, such as Figure 8As shown, this essentially reduces the size of the vibrating section 112, inevitably weakening the actuation efficiency of the piezoelectric actuator 1. Therefore, in practical engineering, it is preferable that the spacer 2 is joined to the frame 111 constituting the vibrating plate 11.

[0046] Ideally, the cross-sectional area of ​​the first orifice 31, the cross-sectional area of ​​each third orifice 611 formed on each of the flow dividers 6, and the cross-sectional area of ​​the second orifice 51 gradually increase in the direction from the first orifice 31 to the second orifice 51. More ideally, in any cross-section passing through the center of the relatively disposed first orifice 31, third orifice 611, and second orifice 51, the included angle formed by the two guide lines L for the diameter changes of the first orifice 31, the diameters of each of the third orifice 611, and the diameter of the second orifice 51 is the same as or approximately the same as the injection angle α of the gas jet formed by the gas exiting from the first orifice 31. Furthermore, the two guide lines L for the diameter changes are as close as possible to the angle line of the injection angle α, or the two guide lines L for the diameter changes coincide with the angle line of the injection angle α, so that the airflow ejected from the first orifice 31 can be contained by the second orifice 51, avoiding flow loss caused by wall reflection. Figure 9 As shown.

[0047] The minimum flow cross-sectional area of ​​each flow channel 7 formed on both sides of each flow divider 6 may be the same or different.

[0048] It should be noted that, given the trend towards thinner and lighter 3C electronic terminal products, the internal space is relatively small, which places stringent requirements on the structural dimensions of the built-in heat dissipation devices. In this embodiment, the gap between the opposing plate 5 and the diaphragm 3 is preferably no more than 5mm. Based on this, the gap formed between the diversion partition layer 61 and the diaphragm 3, or / and between two adjacent diversion partition layers 61, or / and between the diversion partition layer 61 and the opposing plate 5 can ideally be 0.1mm to 3mm. Of course, this does not constitute a limitation on the scope of protection of this invention.

[0049] By stacking at least one flow divider plate 6 in the open cavity formed between the opposing plate 5 and the fluid generator, and forming flow divider channels 7 on both sides of each flow divider plate 6 that connect the external environment and the first hole 31, the second hole 51, and the third hole 611, the single cavity that introduces external gas as a fluid control module is divided into multiple flow divider channels 7. This increases the number of walls on which the introduced gas can adhere, and the large flow of gas flowing against the wall is divided into several small flow of gas flowing against the wall. The gas flow rate is also reduced, which weakens the intensity of random pressure pulsation generated by the airflow on the wall as much as possible, thereby reducing or even suppressing noise.

[0050] Example 2, the difference between this example and Example 1 is that each diversion support layer 62 is provided with multiple diversion support parts 62-1 arranged in a ring shape, and the multiple diversion support parts 62-1 surround the diversion opening 621; The gap between two adjacent diversion support portions 62-1 forms a first outer peripheral opening 622. The diversion opening 621 connects to the external environment through the first outer peripheral opening 622. The diversion opening 621 and the first outer peripheral opening 622 together form a diversion channel 7, such as... Figures 10-13 As shown.

[0051] The discrete arrangement of multiple diversion support parts 62-1 makes it easier to form more first outer peripheral openings 622, which is beneficial for the diversion channel 7 to connect with the external environment with a larger flow area.

[0052] Example 3 differs from Example 1 in that each diversion support layer 62 is a continuous closed annular structure. Specifically, the diversion support layer 62 is annular; the diversion support layer 62 surrounds the diversion opening 621, which forms a diversion channel 7. The diversion opening 621 connects to the external environment through the fluid channel opening 71; The flow divider layer 61 is provided with a fluid channel port 71, or both the flow divider layer 61 and the opposing plate 5 are provided with a fluid channel port 71.

[0053] It is easy to understand that external gas must be introduced into the vicinity of the first orifice 31 through the gap between the diaphragm 3 and the opposing plate 5, so that it is drawn into the chamber 4 by the first orifice 31 and finally discharged from the first orifice 31. That is, the diaphragm is not closed, but is an open chamber that allows fluid to flow.

[0054] When the flow divider support layer 62 constituting the flow divider plate 6 is formed as a continuous closed annular structure, the flow divider baffle layer 61 must be provided with a fluid channel port 71 that connects the outside of the baffle cavity and the flow divider channel 7 to ensure that external gas can be introduced.

[0055] The fluid channel openings 71 provided on the flow divider layer 61 can directly communicate with the outside of the cavity. For example, one or multiple fluid channel openings 71 can be provided on the outer periphery of each flow divider layer 61. These fluid channel openings 71 extend inward from the outer periphery of the flow divider layer 61 to a region further inward than the inner periphery of the flow divider support layer 62, so as to achieve communication between the outside of the cavity and the flow divider channel 7. Figures 14-15 As shown.

[0056] Example 4 differs from Example 1 in that the vibrating plate 11 further includes an elastic connecting portion 113. The elastic connecting portion 113 is disposed between the vibrating part 112 and the frame part 111, connecting the vibrating part 112 to the frame part 111 and elastically supporting the vibrating part 112 on the frame part 111. That is, the elastic connecting portion 113 does not hinder the vibration of the vibrating part 112. Figures 16-17 As shown, the frame 111, the elastic connection 113 and the vibration part 112 can be set separately or integrally formed. The separate setting method helps to reduce the processing difficulty of each component, while the integral forming method can improve the overall structure.

[0057] The elastic connection portion 113 can be formed as a continuous annular elastic thin plate, such as... Figure 18 As shown; the elastic connection portion 113 can also be formed as a plurality of discretely arranged elastic connection beams, which are uniformly arranged on the outer periphery of the vibrating portion 112, or the plurality of elastic connection beams are uniformly arranged in pairs on the outer periphery of the vibrating portion 112. There are gaps between the discretely arranged elastic connection beams, so that the frame portion 111 surrounds the vibrating portion 112 with gaps in areas other than the elastic connection portion 113, such as... Figure 19 As shown.

[0058] The vibrating part 112 has at least one piezoelectric sheet 12 joined to one or both surfaces in the thickness direction. The piezoelectric sheet 12 is joined to the vibrating plate 11 to form a piezoelectric actuator 1. Similarly, in this embodiment, preferably, the spacer 2 is joined to the frame portion 111 of the vibrating plate 11 constituting the piezoelectric actuator 1. The joining between the spacer 2 and the frame portion 111 can be by bonding, welding, or integral molding. The inner peripheral wall of the spacer 2 and the vibrating plate 11 of the piezoelectric actuator 1 form an annular groove with an opening at one end opposite to the piezoelectric actuator 1. The diaphragm 3 seals the opening of the groove and forms a chamber 4 between the piezoelectric actuator 1, the groove, and the diaphragm 3. At least one first hole 31 communicating with the chamber 4 is penetrating through the diaphragm 3.

[0059] At least one diverter plate 6, arranged in a stacked configuration, can be joined at one end near the diaphragm 3 to the side surface of the diaphragm 3 facing away from the spacer 2, and at least one end of the diverter plate 6 facing away from the diaphragm 3 is joined to the side surface of the opposing plate 5 facing the diaphragm 3, such as... Figure 16 As shown.

[0060] It should be noted that in this structure, when the elastic connecting part 113 is formed as a plurality of discretely arranged elastic connecting beams, although there are gaps between the elastic connecting beams, allowing external gas to enter the chamber 4 through these gaps and flow toward the center of the chamber 4, the pressure fluctuation in the area of ​​the chamber 4 opposite to the first hole 31 is more drastic compared to the area formed on the outer periphery of the chamber 4 because the elastic connecting beams are located on the outer periphery of the vibrating part 112 constituting the vibrating plate 11. Fluid is mainly drawn in and discharged through the first hole 31, while fluid entering the chamber 4 through the gaps experiences a reverse flow before reaching the area of ​​the chamber 4 opposite to or adjacent to the first hole 31, flowing out of the chamber 4 along its original path. Therefore, it does not substantially affect the drawing in and discharging of fluid from the first hole 31, or has only a minimal impact. Furthermore, the structural forms of the elastic connecting beams are diverse and cannot all be listed here; no limitation is made here. Any structure that can elastically support the vibrating part 112 in a substantially unconstrained manner on the frame part 111 should be considered within the scope of protection of this invention.

[0061] Example 5: The difference between this example and Example 4 is that each diversion support layer 62 is provided with multiple diversion support parts 62-1 arranged in a ring shape. The multiple diversion support parts 62-1 surround the diversion opening 621. The diversion opening 621 can be square. There can be four diversion support parts 62-1 in the same diversion support layer 62, which are distributed at the four corners of the square. The gap between two adjacent diversion support portions 62-1 forms a first outer peripheral opening 622. The diversion opening 621 connects to the external environment through the first outer peripheral opening 622. The diversion opening 621 and the first outer peripheral opening 622 together form a diversion channel 7, such as... Figures 20-21 As shown.

[0062] Example 6: The difference between this example and Example 4 is that each diversion support layer 62 is a continuous closed ring structure. The diversion support layer 62 can be a ring structure with a circular inner contour and a square outer contour. The diversion support layer 62 surrounds the diversion opening 621, and the diversion opening 621 forms a diversion channel 7. The diversion opening 621 connects to the external environment through the fluid channel opening 71; The flow divider layer 61 is provided with a fluid channel port 71, or both the flow divider layer 61 and the opposing plate 5 are provided with fluid channel ports 71; When the flow divider support layer 62 constituting the flow divider plate 6 is formed as a continuous closed annular structure, the flow divider baffle layer 61 must be provided with a fluid channel port 71 that connects the outside of the baffle cavity and the flow divider channel 7 to ensure that external gas can be introduced.

[0063] The fluid channel openings 71 provided on the flow divider layer 61 can directly communicate with the outside of the cavity. For example, one or multiple fluid channel openings 71 can be provided on the outer periphery of each flow divider layer 61. The fluid channel openings 71 extend inward from the outer periphery of the flow divider layer 61 to a region further inward than the inner periphery of the flow divider support layer 62, so as to achieve communication between the outside of the cavity and the flow divider channel 7. Figures 22-23 As shown.

[0064] Example 7 differs from Example 4 in that at least one diverter plate 6 stacked together is joined at one end near the diaphragm 3 to the side surface of the frame portion 111 facing the opposing plate 5, and at least one diverter plate 6 away from the diaphragm 3 is joined to the side surface of the opposing plate 5 facing the diaphragm 3. At this time, the spacer portion 2 is joined to the vibrating portion 112 of the vibrating plate 11 constituting the piezoelectric actuator 1. When the piezoelectric actuator 1 vibrates under the excitation of the electrical signal, it transmits the vibration energy to the diaphragm 3 to cause the diaphragm 3 to vibrate.

[0065] The connection between the spacer 2 and the vibrating part 112 can be achieved by bonding, welding, or integral molding. The inner peripheral wall of the spacer 2 and the vibrating plate 11 of the piezoelectric actuator 1 form an annular groove with an opening at one end opposite to the piezoelectric actuator 1. The diaphragm 3 seals the opening of the groove, thereby forming a chamber 4 between the piezoelectric actuator 1, the groove, and the diaphragm 3. At least one first hole 31 communicating with the chamber 4 is penetrating the diaphragm 3. Figure 17 and 24 As shown.

[0066] Example 8: The difference between this example and Example 7 is that each diversion support layer 62 is provided with multiple diversion support parts 62-1 arranged in a ring shape. The multiple diversion support parts 62-1 surround the diversion opening 621. The diversion opening 621 can be square. There can be four diversion support parts 62-1 in the same diversion support layer 62, which are distributed at the four corners of the square. The gap between two adjacent diversion support portions 62-1 forms a first outer peripheral opening 622. The diversion opening 621 connects to the external environment through the first outer peripheral opening 622. The diversion opening 621 and the first outer peripheral opening 622 together form a diversion channel 7, such as... Figure 21 and 25 As shown.

[0067] Example 9: The difference between this example and Example 7 is that each diversion support layer 62 is a continuous closed ring structure. The diversion support layer 62 can be a ring structure with a circular inner contour and a square outer contour. The diversion support layer 62 surrounds the diversion opening 621, and the diversion opening 621 forms a diversion channel 7. The diversion opening 621 connects to the external environment through the fluid channel opening 71; The flow divider layer 61 is provided with a fluid channel port 71, or both the flow divider layer 61 and the opposing plate 5 are provided with fluid channel ports 71; The fluid channel openings 71 provided on the flow divider layer 61 can directly communicate with the outside of the cavity. For example, one or multiple fluid channel openings 71 can be provided on the outer periphery of each flow divider layer 61. The fluid channel openings 71 extend inward from the outer periphery of the flow divider layer 61 to a region further inward than the inner periphery of the flow divider support layer 62, so as to achieve communication between the outside of the cavity and the flow divider channel 7. Figure 23 and 26 As shown.

[0068] Of course, the fluid channel openings 71 provided on the diversion baffle layer 61 can also indirectly communicate with the outside of the cavity. For example, one or more through fluid channel openings 71 can be provided in the outer peripheral area of ​​each diversion baffle layer 61, which is opposite to the diversion opening 621. In this case, the elastic connection part 113 of the vibrating plate 11 is a plurality of elastic connecting beams provided in a discrete manner, and the gap between two adjacent elastic connecting beams is formed as a notch, so as to realize the connection between the outside of the cavity and the diversion channel 7. That is, the diversion channel 7 is connected to the external environment through the fluid channel openings 71 and the notches. Figures 27-28 As shown.

[0069] Example 10: The difference between this example and Examples 1-9 is that the area of ​​the diaphragm 3 opposite to the diversion opening 621 is formed as a movable part that can vibrate and deform. When the piezoelectric actuator 1 vibrates under the excitation of the electrical signal, it transmits the vibration energy to the diaphragm 3 to cause the movable part of the diaphragm 3 to vibrate.

[0070] The vibration generated by the movable part of the diaphragm 3 can be, for example, the vibration mode generated by the diaphragm in a high-order resonance fluid generating device disclosed in patent announcement number CN118979867B. The arrangement of the first hole 31 is the same as the arrangement of the hole in the patent document. The diaphragm in that patent corresponds to the diaphragm 3 in this embodiment, and the hole in that patent corresponds to the first hole 31 in this embodiment. The technical effect that can be achieved is that the piezoelectric actuator 1 vibrates under excitation and transmits the vibration energy to the diaphragm 3, thereby causing the movable part of the diaphragm 3 to generate a high-order resonance mode vibration with at least two antinodes. At least one first hole 31 is formed at or near the positions of at least two antinodes of the movable part vibration. At this time, the effective working space of the chamber 4 between the piezoelectric actuator 1 and the movable part is expanded to a larger area than the central area, and the utilization rate of vibration energy is higher.

[0071] The movable part of the diaphragm 3 may also be provided with a partition, for example, it may be the diaphragm structure of a fluid generating device disclosed in patent announcement number CN119084287B. The diaphragm in that patent corresponds to the diaphragm 3 in this embodiment, and the hole in that patent corresponds to the first hole 31 in this embodiment. That is, the movable part of the diaphragm 3 is also provided with a partition, which divides the movable part into at least two vibration zones. At least a portion of the partition is located between two adjacent vibration zones, so that the area of ​​the movable part opposite to the partition has a greater ability to resist elastic deformation when subjected to force than the area of ​​the vibration zone of the movable part when subjected to force. Regarding the ability to resist elastic deformation, the arrangement of the first hole 31 is the same as that of the hole in the patent document. The technical effect achieved is that by setting a partition on the movable part, the partition separates the movable part, forming at least two vibration zones. When the area of ​​the movable part opposite to the partition is subjected to force, its ability to resist elastic deformation is greater than that of the vibration zone of the movable part. This allows the vibration energy transmitted from the piezoelectric actuator 1 to the diaphragm 3 to mainly act on the vibration zone of the movable part, causing the vibration zone to generate a larger amplitude vibration, reducing the energy loss of the movable part at the partition, and improving the utilization rate of vibration energy.

[0072] Additionally, a localized area of ​​the movable part of the diaphragm 3 can be plasticized, causing the antinodes and adjacent areas of the vibrating movable part to protrude from the surface of the diaphragm 3, forming a convex portion. This convex portion is formed by a recess on one side of the movable part and a protrusion on the other side. The first hole 31 penetrates the convex portion. For details, please refer to the diaphragm structure in a fluid generator disclosed in patent CN120362060A. The diaphragm in that patent corresponds to the diaphragm 3 in this embodiment, and the first hole in that patent corresponds to the first hole 31 in this embodiment. The achievable technical effect is that the antinodes and adjacent areas of the vibrating movable part protrude from the surface of the movable part, forming a convex portion. This breaks the continuity of the movable part's stiffness, creating a sudden change in stiffness at the outer periphery of the convex portion. When the movable part vibrates, the stiffness changes from the antinodes and adjacent areas towards... The amplitude of the region further outward from the antinodes does not exhibit a continuous gradient distribution, and the vibration energy is relatively concentrated. The region opposite the movable part and the convex part can obtain greater vibration energy and generate a larger amplitude. The region of chamber 4 opposite to the first hole 31 has a larger volume change during the air intake and exhaust process, thereby increasing the output flow rate. In addition, since the movable part forms a stiffness abrupt change at the outer periphery of the convex part, the vibration mode of the movable part changes relative to the vibration mode of the plate-shaped diaphragm 3 with continuous stiffness. When the movable part generates a high-order resonance mode with at least two antinodes, it has the same vibration mode as the region of the movable part opposite to each convex part at the same time. That is to say, at the same time, the first hole 31 located in the region of the movable part opposite to each convex part is simultaneously in or tends to be in the exhaust stroke or exhaust stroke, and the output flow rate is further improved.

[0073] Of course, the molding method and vibration mode of the movable part are not limited to this.

[0074] It should be noted that, in this embodiment, the gap between the diversion baffle layer 61 adjacent to the diaphragm 3 and the diaphragm 3 must be at least greater than the vibration displacement of the movable part of the diaphragm 3 toward the side away from the piezoelectric actuator 1, so as to avoid motion interference between the movable part of the diaphragm 3 and the adjacent diversion baffle layer 61.

[0075] In this embodiment, the diaphragm 3 is preferably made of a polymer material, such as PET, PI, PPS, PEI, FEP or other polymer membrane materials, or the diaphragm 3 is made of a composite material composed of polymer materials and other metal materials, such as PI copper-clad laminate / film, PET copper-clad laminate / film, PET nickel-plated laminate / film, carbon fiber metal composite board / film, etc.; whether it is a polymer material or a composite material composed of polymer materials and other materials, compared with metal materials, it exhibits the characteristics of being lightweight and having a high elastic strain limit. The limiting amplitude at resonance is usually much higher than that of metal materials, which is especially suitable for applications with high flow output requirements, such as heat dissipation of smart 3C terminal products.

[0076] Example 11, as Figures 29-31 As shown, a heat dissipation device has a fluid control module that can reduce noise, as described in any one of Embodiments 1 to 10. It also includes at least one drainage plate 8; The drain plate 8 is disposed between the opposing plate 5 and the heat source 10, so that the space between the opposing plate 5 and the heat source 10 forms at least two drain channels 9 distributed sequentially along the thickness direction of the piezoelectric actuator 1 due to the presence of at least one drain plate 8. Each drain plate 8 is located between two adjacent drain channels 9, and the drain channels 9 are connected to the external environment. Each of the drainage plates 8 has a corresponding fourth hole 811 at the location opposite to the second hole 51, connecting two adjacent drainage channels 9. The cross-sectional shape of the fourth hole 811 can be circular, square, rectangular, elliptical, or other shapes, and is not limited here. In this embodiment, the cross-sectional shape of the fourth hole 811 is circular, but this does not constitute a limitation of the present invention. Preferably, the fourth hole 811 and the second hole 51 correspond one-to-one and are coaxially arranged, so that due to the presence of at least one drainage plate 8, drainage channels 9 connecting the outside of the heat dissipation device and the second hole 51 and the fourth hole 811 are formed on both sides of each drainage plate 8.

[0077] The gas jet ejected from the second hole 51, after impacting the surface of the heat source 10, forms a heat-carrying gas that eventually dissipates into the air outside the heat dissipation device. In other words, the space between the opposing plate 5 and the heat source 10 is an open space.

[0078] At least one of the stacked drainage plates 8 is attached to the side surface of the opposing plate 5 away from the diaphragm 3 at one end near the diaphragm 3, and at least one of the drainage plates 8 is attached to the surface of the heat source 10 at the other end away from the diaphragm 3.

[0079] The drainage plate 8 includes a drainage baffle layer 81 that is fixedly connected to each other or integrally formed and a drainage support layer 82; The drainage baffle layer 81 and the drainage support layer 82 are integrally formed to form the drainage plate 8, or the drainage baffle layer 81 and the drainage support layer 82 are separately formed and fixedly connected to form the drainage plate 8. In order to simplify the manufacturing process, it is more ideal that the drainage baffle layer 81 and the drainage support layer 82 are separately formed and fixedly connected by means of bonding, welding or other methods to form the drainage plate 8, but it is not limited to this. The drainage support layer 82 has a drainage opening 821. The orthographic projection of the drainage opening 821 on the opposing plate 5 at least covers the second hole 51. The orthographic projection of the drainage opening 821 on the drainage partition layer 81 at least covers the fourth hole 811. The fourth hole 811 is located on the drainage partition layer 81. When a diversion plate 8 is installed between the opposing plate 5 and the heat source 10, diversion support layers 82 are installed on both sides of the diversion partition layer 81 between the opposing plate 5 and the heat source 10, respectively, so as to form diversion channels 9 at the diversion openings 821 on both sides of the diversion plate 8. Figures 29-30 As shown; When two or more diversion plates 8 are provided between the opposing plate 5 and the heat source 10, diversion support layers 82 are provided between the diversion partition layer 81 and the opposing plate 5, between two adjacent diversion partition layers 81, and between the diversion partition layer 81 and the heat source 10, so as to form diversion channels 9 at the diversion openings 821 on both sides of each diversion plate 8. Figure 31 As shown; The specific configuration of the flow guide plate 8 and the establishment of the flow channel connection between the flow channel 9 formed on both sides of each flow guide plate 8 and the external heat dissipation device and the flow channel formed by the second hole 51 and the fourth hole 811 can be achieved in various ways.

[0080] For example, in this embodiment, each drainage support layer 82 is a continuous open ring structure, the drainage support layer 82 is a ring structure with a second outer peripheral opening 822, and the drainage support layer 82 surrounds the drainage opening 821. The drainage opening 821 extends to one side of the outer periphery of the drainage plate 8 to form a second peripheral opening 822. The drainage opening 821 connects to the external environment through the second peripheral opening 822. The drainage opening 821 and the second peripheral opening 822 together form a drainage channel 9. Figures 29-31 As shown.

[0081] Ideally, the extension direction of the second peripheral opening 822 in this embodiment is offset from the extension direction of the first peripheral opening 622 in Embodiment 1, such as... Figure 29 , Figure 31 As shown, this aims to keep the fresh gas inlet and hot gas outlet as far apart as possible, thus preventing hot gas circulation from affecting heat dissipation efficiency.

[0082] Ideally, the cross-sectional area of ​​the second hole 51 and the cross-sectional area of ​​the fourth holes 811 formed on each of the flow guide plates 8 gradually decrease in the direction from the second hole 51 to the fourth hole 811. That is, the flow area of ​​the second holes 51 and the fourth holes 811 formed on each of the flow guide plates 8 gradually decreases in the direction from the second hole 51 to the fourth hole 811, so that while the outer periphery of the airflow ejected from the second hole 51 scours each flow guide baffle layer 81, the high-speed airflow formed at the center of the airflow impacts the surface of the heat source 10 to enhance heat exchange.

[0083] The minimum flow cross-sectional area of ​​each flow channel 9 formed on both sides of each flow plate 8 may be the same or different.

[0084] Similarly, given the trend towards thinner and lighter 3C electronic terminal products, the internal space is relatively small, thus imposing stringent requirements on the structural dimensions of the built-in heat dissipation devices. In this embodiment, the gap between the opposing plate 5 and the heat source 10 should not be too large, preferably not exceeding 5mm. Based on this, the gap formed between the flow-guiding baffle layer 81 and the opposing plate 5, or / and between two adjacent flow-guiding baffle layers 81, or / and between the flow-guiding baffle layer 81 and the heat source 10 can ideally be 0.1mm to 3mm. Of course, this does not constitute a limitation on the scope of protection of this invention.

[0085] By stacking at least one guide plate 8 between the opposing plate 5 and the heat source 10, and forming guide channels 9 on both sides of each guide plate 8 that connect the exterior of the heat dissipation device and the second hole 51 and the fourth hole 811, the single exhaust channel of the heat-carrying gas formed by the heat dissipation device is divided into multiple guide channels 9. This increases the number of wall surfaces on which the exhaust gas can adhere. Utilizing the wall adhesion effect of the gas flow, the hot gas is promptly and quickly dissipated from the area adjacent to the second hole 51 of the opposing plate 5 and the area opposite to the heat source 10 into the external environment, avoiding the accumulation of hot gas and improving heat dissipation efficiency. In addition, by stacking at least one guide plate 8 between the opposing plate 5 and the heat source 10, it is equivalent to setting a heat sink between the opposing plate 5 and the heat source 10, increasing the heat exchange and heat dissipation area between the heat dissipation device and the heat source 10, which is beneficial to further improve heat dissipation efficiency.

[0086] Example 12, the difference between this example and Example 11 is that each drainage support layer 82 is provided with multiple drainage support parts 82-1 arranged in a ring shape, and the multiple drainage support parts 82-1 form a drainage opening 821; The gap between two adjacent drainage support portions 82-1 forms a second peripheral opening 822. The drainage opening 821 communicates with the external environment through the second peripheral opening 822. The drainage opening 821 and the second peripheral opening 822 together form a drainage channel 9.

[0087] Ideally, the extension direction of the second opening in this embodiment is offset from the extension direction of the first opening in Embodiment 1, such as... Figures 32-34 As shown; thus, the fresh gas inlet and hot gas outlet are kept as far apart as possible. This avoids hot gas recirculation affecting heat dissipation efficiency. Example 13: The difference between this example and Example 11 is that the drainage support layer 82 is a continuous closed annular structure, and the drainage support layer 82 forms a drainage opening 821. Drainage opening 821 connects to the external environment through the flow port; The drainage baffle layer 81 is provided with a flow port, or the diversion baffle layer 61 and the opposing plate 5 are both provided with flow ports.

[0088] The gas jet ejected from the second hole 51, after impacting the surface of the heat source 10, forms a heat-carrying gas that eventually dissipates into the air outside the heat dissipation device. In other words, the gap between the opposing plate 5 and the heat source 10 is an open gap.

[0089] When the drainage support layer 82 constituting the drainage plate 8 is formed as a continuous closed ring structure, the drainage baffle layer 81 must be provided with a flow port that connects the outside of the heat dissipation device and the drainage channel 9 to ensure that hot air can be discharged.

[0090] The flow port provided on the flow-guiding baffle layer 81 can be directly connected to the outside of the heat dissipation device. For example, one or more flow ports can be provided on the outer periphery of each flow-guiding baffle layer 81. The flow port extends from the outer periphery of the flow-guiding baffle layer 81 to the inner side of the region that is closer to the inner periphery than the inner periphery of the flow-guiding support layer 82, so as to connect the outside of the heat dissipation device and the flow channel 9. The arrangement of the flow port can be analogous to the arrangement of the fluid channel port 71 in Embodiments 3, 6 and 9. Adaptively, when it is necessary to provide a notch on the opposing plate 5 to connect the flow port, the notch on the opposing plate 5 can avoid the position of the heat source 10 and penetrate the opposing plate 5, but it is not limited to this and will not be described in detail here.

[0091] The above description, based on the preferred embodiments of the present invention, provides inspiration. Those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification but must be determined according to the claims.

Claims

1. A fluid control module that can reduce noise, characterized in that: include: A fluid generator has a piezoelectric actuator (1), a spacer (2) and a diaphragm (3), the diaphragm (3) being joined to the piezoelectric actuator (1) through the spacer (2), the piezoelectric actuator (1), the spacer (2) and the diaphragm (3) forming a chamber (4), and the diaphragm (3) having at least one first hole (31) through which the chamber (4) is communicated. The opposing plate (5) is spaced apart on the side of the diaphragm (3) away from the piezoelectric actuator (1), so that a cavity is formed between the opposing plate (5) and the fluid generator. A second hole (51) is correspondingly passed through the part of the opposing plate (5) opposite to the first hole (31). And a flow divider (6), wherein at least one flow divider (6) is provided in the cavity to form at least two flow divider channels (7) distributed sequentially along the thickness direction of the piezoelectric actuator (1), and each flow divider (6) is located between two adjacent flow divider channels (7); A third hole (611) is provided on the part of the diversion plate (6) opposite to the first hole (31) to connect two adjacent diversion channels (7). The diversion channels (7) are connected to the external environment. The first hole (31) is connected to the diversion channel (7) on the side where the diaphragm (3) is located, and the second hole (51) is connected to the diversion channel (7) on the side where the opposing plate (5) is located.

2. The noise-reducing fluid control module according to claim 1, characterized in that: The diversion plate (6) includes a diversion partition layer (61) that is fixedly connected to each other or integrally formed, and at least one diversion support layer (62). The diversion support layer (62) has a diversion opening (621), the orthographic projection of the diversion opening (621) on the diaphragm (3) at least covers the first hole (31), the orthographic projection of the diversion opening (621) on the opposing plate (5) at least covers the second hole (51), and the orthographic projection of the diversion opening (621) on the diversion partition layer (61) at least covers the third hole (611), the third hole (611) being located on the diversion partition layer (61); A diversion plate (6) is provided between the diaphragm (3) and the opposing plate (5). Diversion support layers (62) are provided on both sides of the diversion plate layer (61) between the diaphragm (3) and the opposing plate (5) respectively, so as to form diversion channels (7) at the diversion openings (621) on both sides of the diversion plate (6). Alternatively, two or more diversion plates (6) are provided between the diaphragm (3) and the opposing plate (5), and the diversion support layer (62) is provided between the diversion plate layer (61) and the diaphragm (3), between two adjacent diversion plate layers (61), and between the diversion plate layer (61) and the opposing plate (5), so as to form diversion channels (7) at the diversion openings (621) on both sides of each diversion plate (6).

3. The noise-reducing fluid control module according to claim 2, characterized in that: The diversion support layer (62) is an annular structure with a first outer peripheral opening (622), and the diversion support layer (62) surrounds the diversion opening (621). The diversion opening (621) extends toward the outer periphery of the cavity to form a first peripheral opening (622). The diversion opening (621) connects to the external environment through the first peripheral opening (622). The diversion opening (621) and the first peripheral opening (622) together form the diversion channel (7).

4. The noise-reducing fluid control module according to claim 2, characterized in that: The diversion support layer (62) consists of a plurality of diversion support parts (62-1) arranged discretely in a ring shape, and the plurality of diversion support parts (62-1) surround the diversion opening (621). The gap between two adjacent diversion support parts (62-1) forms a first peripheral opening (622). The diversion opening (621) is connected to the external environment through the first peripheral opening (622). The diversion opening (621) and the first peripheral opening (622) together form the diversion channel (7).

5. The noise-reducing fluid control module according to claim 2, characterized in that: The diversion support layer (62) is a continuous closed annular structure, and the diversion support layer (62) surrounds the diversion opening (621), which forms a diversion channel (7). The diversion opening (621) is connected to the external environment through the fluid channel opening (71); The flow divider layer (61) is provided with the fluid channel port (71), or both the flow divider layer (61) and the opposing plate (5) are provided with the fluid channel port (71).

6. The noise-reducing fluid control module according to any one of claims 2-5, characterized in that: The area of ​​the diaphragm (3) opposite to the diversion opening (621) is formed as a movable part that can vibrate and deform. When the piezoelectric actuator (1) vibrates under the excitation of the electrical signal, it transmits vibration energy to the diaphragm (3) to cause the movable part of the diaphragm (3) to vibrate.

7. The noise-reducing fluid control module according to claim 1, characterized in that: The cross-sectional area of ​​the first hole (31), the cross-sectional area of ​​each of the third holes (611) formed on each of the diversion plates (6) and the cross-sectional area of ​​the second hole (51) gradually increase in the direction from the first hole (31) toward the second hole (51).

8. The noise-reducing fluid control module according to claim 1, characterized in that: The minimum flow cross-sectional area of ​​each flow channel (7) formed on both sides of each of the aforementioned flow dividers (6) may be the same or different.

9. The noise-reducing fluid control module according to claim 1, characterized in that: The piezoelectric actuator (1) includes a vibrating plate (11) and a piezoelectric sheet (12). The vibrating plate (11) has a vibrating part (112) and a frame part (111) surrounding the vibrating part (112). At least one piezoelectric sheet (12) is attached to one or both surfaces of the vibrating part (112) in the thickness direction. Under the excitation of an electrical signal, the piezoelectric sheet (12) causes the vibrating part (112) to vibrate, thereby causing the piezoelectric actuator (1) to vibrate.

10. A heat dissipation device, characterized in that: Includes a noise-reducing fluid control module as described in any one of claims 1-9.

11. The heat dissipation device according to claim 10, characterized in that: It also includes at least one drainage plate (8); The drain plate (8) is disposed between the opposing plate (5) and the heat source (10), so that the space between the opposing plate (5) and the heat source (10) is formed by the presence of at least one drain plate (8) and at least two drain channels (9) distributed sequentially along the thickness direction of the piezoelectric actuator (1). Each drain plate (8) is located between two adjacent drain channels (9), and the drain channels (9) are connected to the external environment. Each of the drainage plates (8) has a fourth hole (811) that connects two adjacent drainage channels (9) at the location opposite to the second hole (51).

12. The heat dissipation device according to claim 11, characterized in that: The drainage plate (8) includes a drainage partition layer (81) and a drainage support layer (82) that are fixedly connected to each other or integrally formed. The drainage support layer (82) has a drainage opening (821), the orthographic projection of the drainage opening (821) on the opposing plate (5) at least covers the second hole (51), the orthographic projection of the drainage opening (821) on the drainage partition layer (81) at least covers the fourth hole (811), the fourth hole (811) is located on the drainage partition layer (81); A diversion plate (8) is provided between the opposing plate (5) and the heat source (10). The diversion partition layer (81) is provided with a diversion support layer (82) between the opposing plate (5) and the heat source (10) on both sides, so as to form a diversion channel (9) at the diversion opening (821) on both sides of the diversion plate (8). Alternatively, two or more drainage plates (8) are provided between the opposing plate (5) and the heat source (10), and drainage support layers (82) are provided between the drainage partition layer (81) and the opposing plate (5), between two adjacent drainage partition layers (81), and between the drainage partition layer (81) and the heat source (10), so as to form drainage channels (9) at the drainage openings (821) on both sides of each drainage plate (8).

13. The heat dissipation device according to claim 12, characterized in that: The drainage support layer (82) is an annular structure with a second outer peripheral opening (822), and the drainage support layer (82) surrounds the drainage opening (821). The drainage opening (821) extends to one side of the outer periphery of the drainage plate (8) to form a second peripheral opening (822). The drainage opening (821) connects to the external environment through the second peripheral opening (822). The drainage opening (821) and the second peripheral opening (822) together form the drainage channel (9).

14. The heat dissipation device according to claim 12, characterized in that: The drainage support layer (82) consists of a plurality of drainage support parts (82-1) arranged discretely in a ring shape, and the plurality of drainage support parts (82-1) form a drainage opening (821). The gap between two adjacent drainage support parts (82-1) forms a second peripheral opening (822). The drainage opening (821) is connected to the external environment through the second peripheral opening (822). The drainage opening (821) and the second peripheral opening (822) together form the drainage channel (9).

15. The heat dissipation device according to claim 13 or 14, characterized in that: The extension direction of the second peripheral opening (822) is offset from the extension direction of the first peripheral opening (622) in the peripheral direction of the drain plate (8).

16. The heat dissipation device according to claim 12, characterized in that: The drainage support layer (82) is a continuous closed annular structure, and the drainage support layer (82) forms a drainage opening (821). The drainage opening (821) is connected to the external environment through the flow port; The drainage baffle layer (81) is provided with the flow port, or both the drainage baffle layer (81) and the opposing plate (5) are provided with the flow port.

17. The heat dissipation device according to claim 12, characterized in that: The cross-sectional area of ​​the second hole (51) and the cross-sectional area of ​​each of the fourth holes (811) formed on each of the drainage plates (8) gradually decrease in the direction from the second hole (51) toward the fourth hole (811).

18. The heat dissipation device according to claim 10, characterized in that: The minimum flow cross-sectional area of ​​each flow channel (9) formed on both sides of each of the aforementioned flow plates (8) may be the same or different.

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