Parallelism adjusting mechanism and coating equipment

Abstract

A parallelism adjusting mechanism is applied to coating equipment, is used for adjusting the parallelism of a glue outlet, and comprises a first supporting seat and a second supporting seat which are arranged in parallel at an interval, a sliding rail group vertically and fixedly arranged on the first supporting seat and the second supporting seat, and power parts respectively arranged on the first supporting seat and the second supporting seat, one power part drives one end of the coating knife to translate on the sliding rail group according to a difference value of parallelism, so that a glue outlet of the coating knife is positioned in a parallel position; the two power parts respectively drive the two ends of the coating knife to translate on the sliding rail group according to a set distance, so that a glue outlet of the coating knife moves to a set parallel position from an original position; the parallelism adjusting mechanism can adjust the parallelism of the coating knife on a single side and can also adjust the parallelism of the coating knife on the two sides, the coating knife can be driven to move according to the set distance while the parallelism of the coating knife is adjusted on the two sides, the distance between the glue outlet and the semiconductor substrate and the distance between the glue outlet and the glue uniformizing wheel are adjusted, operation is easy, and use is convenient.

Description

TECHNICAL FIELD

[0001] The present application relates to a parallelism adjusting mechanism, and to a coating device having the parallelism adjusting mechanism. BACKGROUND

[0002] In the manufacturing process of semiconductor substrates (such as liquid crystal, plasma display, etc.), the balance between the glue outlet of the coating device and the semiconductor substrate needs to be ensured, so that the glue on the semiconductor substrate coated by the glue outlet is uniform.

[0003] In the prior art, such as Japanese Patent No. 4270344, a slit nozzle parallelism adjusting mechanism is disclosed, which mainly rotates one end of the slit nozzle with the base, and the other end is screwed with the base through a screw rod. The screw rod drives the one end of the slit nozzle to move up and down relative to the base during rotation, so as to adjust the parallelism of the glue outlet.

[0004] However, the screw rod needs to be rotated manually and repeatedly to adjust the glue outlet to the horizontal position of the semiconductor substrate, which is not convenient to operate, and the distance between the glue outlet and the semiconductor substrate cannot be adjusted, which causes the glue on the semiconductor substrate to be uneven.

[0005] Based on the above reasons, there is an urgent need for a parallelism adjusting mechanism to solve the above problems. SUMMARY

[0006] The purpose of the present application is to overcome the shortcomings of the prior art, provide a parallelism adjusting mechanism, which can adjust the parallelism of the coating knife on one side, and can also adjust the parallelism of the coating knife on both sides. When adjusting the parallelism of the coating knife on both sides, the coating knife can also be driven to displace along the Z direction at different positions with a set distance, which is convenient for coating glue with different thicknesses on the semiconductor substrate and adjusting the glue uniformity distance at the glue outlet to a set threshold, and the operation is simple and convenient.

[0007] The present application is realized as follows: a parallelism adjusting mechanism for adjusting the parallelism of a slit glue outlet, the glue outlet being arranged on a coating knife of a coating device, comprising:

[0008] a support part comprising first and second support seats arranged in parallel and at intervals;

[0009] a sliding part comprising a sliding rail group vertically fixed on the first and second support seats, respectively;

[0010] a driving part comprising power components arranged on the first and second support seats, respectively, wherein one power component is used to drive one end of the coating knife to translate on the sliding rail group according to the difference in parallelism, so that the glue outlet of the coating knife is located in a parallel position;

[0011] Or the two power components respectively drive the two ends of the coating knife to move towards each other, so that the glue outlet of the coating knife is located in a parallel position.

[0012] Further, the parallelism adjusting mechanism further comprises:

[0013] A parallelism measuring instrument for detecting the parallelism of the coating knife and outputting a data signal containing parallelism error information externally;

[0014] A drive controller for controlling one of the power components to rotate at a set number of turns, speed and direction according to the received data signal, and then driving the end of the coating knife that needs to be adjusted to translate on the slide rail set for adjusting the glue outlet of the coating knife to the parallel position;

[0015] Or the drive controller controls the two power components to respectively drive the two ends of the coating knife to move towards each other for adjusting the glue outlet of the coating knife to the parallel position.

[0016] Further, the parallelism adjusting mechanism further comprises a grating reader for detecting the displacement distance of one end or both ends of the coating knife, and the grating reader feeds back the detected data information to the drive controller, and the drive controller controls the display to display the current state of the coating knife in real time according to the received information, which includes whether the coating knife is in a state or a parallel position.

[0017] Further, the support part further comprises a plurality of cross beams connected between the first support base and the second support base.

[0018] Preferably, the cross beams are four and symmetrically arranged on both sides of the width direction of the first support base and the second support base, and a passage for the up and down movement of the coating knife is formed between the two symmetrically arranged cross beams; preferably, the cross beam is an aluminum square bar.

[0019] Further, the two power components each comprise a lead screw and a machine body for driving the lead screw to rotate in a set direction;

[0020] A coupling for transmitting torque and motion is sleeved on the connection area of the lead screw and the machine body, and a fixed seat for limiting the radial movement of the lead screw is sleeved on the upper end of the lead screw to reduce the amplitude of the lead screw movement; in this embodiment, preferably, the lower end of the fixed seat is a columnar body, and the upper end of the fixed seat is a square body with a larger size than the columnar body.

[0021] The lower end of the lead screw is screwed with a nut seat that moves up and down with the rotation of the lead screw, and the nut seat is directly or indirectly rotationally connected with the coating knife.

[0022] Further, the parallelism adjusting mechanism further comprises a connecting seat that is directly or indirectly rotationally arranged at the two ends of the coating knife, and the connecting seat is fixedly connected with the nut seat.

[0023] Further, the parallelism adjusting mechanism further comprises a support beam, the coating knife is detachably mounted on the support beam, two ends of the support beam are rotationally connected with the connecting seats through rotating shafts, one of the connecting seats is provided with a guide opening through which the rotating shaft can translate, and the guide opening and the rotating shaft are in clearance fit, when one of the power components drives one end of the coating knife to move up and down to adjust the parallelism of the coating knife, the rotating shaft can rotate and translate in the guide opening.

[0024] Preferably, the first support seat and the second support seat are consistent in shape and structure, and both comprise a hollow frame body;

[0025] The body of the power component is fixedly arranged on the top of the frame body, and the top of the frame body is vertically provided with a through hole in clearance fit with the shaft coupling;

[0026] The frame body is provided with a support arm for supporting the square body, the support arm is provided with a guide hole through which the columnar body can pass, and the guide hole and the columnar body are in clearance fit.

[0027] Further, the outer periphery of the frame body is detachably connected with a transparent cover for sealing the frame body.

[0028] The application further provides a coating device comprising;

[0029] The coating system comprises a platform horizontally arranged for placing a semiconductor substrate and a coating knife in translation relative to the platform, and the coating knife is provided with a slit-shaped glue outlet for coating glue on the semiconductor substrate;

[0030] The glue uniformizing system comprises a glue uniformizing wheel for rotating to carry away excess glue at the glue outlet, and the glue uniformizing wheel rotates along its axis;

[0031] The parallelism adjusting mechanism is further provided, and the parallelism adjusting mechanism drives the coating knife to move up and down at the first position to adjust the glue uniformizing distance between the glue outlet and the glue uniformizing wheel;

[0032] The parallelism adjusting mechanism drives the coating knife to move up and down at the second position to adjust the glue coating distance between the glue outlet and the semiconductor substrate.

[0033] The parallelism adjusting mechanism is applied to a coating device to adjust the parallelism of a glue outlet, comprising a first support seat and a second support seat arranged in parallel and at intervals, a slide rail group fixedly arranged on the first support seat and the second support seat in a vertical direction, and power components arranged on the first support seat and the second support seat respectively, wherein one power component drives one end of a coating knife to translate on the slide rail group according to the difference of the parallelism, so that the glue outlet of the coating knife is located at a parallel position; two power components respectively drive two ends of the coating knife to translate on the slide rail group according to a set distance, so that the glue outlet of the coating knife is moved from an original position to a set parallel position; the parallelism adjusting mechanism can adjust the parallelism of the coating knife on one side or on both sides, and when the parallelism of the coating knife is adjusted on both sides, the coating knife can also be driven to displace up and down at different positions according to a set distance, so as to facilitate coating of glue with different thicknesses on a semiconductor substrate and adjusting the glue uniformizing distance at the glue outlet to be within a set threshold, and the operation is simple and convenient to use. BRIEF DESCRIPTION OF DRAWINGS

[0034] In order to more clearly illustrate the technical solutions of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. Obviously, the drawings described in the following only constitute some embodiments of the present application, and other drawings can also be obtained according to these drawings without creative labor for those skilled in the art.

[0035] Figure 1 is a structure diagram of the parallelism adjusting mechanism in the coating device provided by the embodiment of the present application and the coating knife.

[0036] Figure 2 is a structure diagram of the parallelism adjusting mechanism provided by the embodiment of the present application.

[0037] Figure 3 is a structure diagram of the power component and the support seat in the parallelism adjusting mechanism provided by the embodiment of the present application.

[0038] Figure 4 is a structure diagram of the power component in the parallelism adjusting mechanism provided by the embodiment of the present application.

[0039] Figure 5 is a structure diagram of the support seat in the parallelism adjusting mechanism provided by the embodiment of the present application.

[0040] Figure 6 is a structure diagram of the coating device provided by the embodiment of the present application.

[0041] The implementation, functional features and advantages of the present application will be further described with reference to the embodiments and the drawings. DETAILED DESCRIPTION

[0042] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "in the Z direction", "horizontal", "lateral", "longitudinal", and the like indicate the orientation or state relationship based on the orientation or state relationship shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not intended to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0043] In addition, in addition to indicating the orientation or state relationship, the above-mentioned partial terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. For those skilled in the art, the specific meaning of these terms in the present application can be understood according to the specific circumstances.

[0044] In addition, the terms "mounting", "setting", "provided with", "connected", "connected" should be broadly understood. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or internal communication between two devices, elements or components. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0045] In addition, the terms "first", "second", and the like are mainly used to distinguish different devices, elements or components, and the specific type and structure can be the same or different, and are not intended to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of "multiple" is two or more.

[0046] In order to clearly indicate the direction relationship in the drawing, a coordinate system is appropriately marked with the vertical direction as the Z direction and the horizontal plane as the XY plane.

[0047] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application.

[0048] As shown in Figure 1 and Figure 2 The parallelism adjusting mechanism 100 provided by the embodiments of the present application is applied to a coating device, and is used to adjust the parallelism of a slit glue discharge port 211 (see Y direction in Figure 1 The glue discharge port 211 is arranged on an applicator 210 of the coating device, and the parallelism adjusting mechanism 100 comprises:

[0049] A support part comprising a first support seat 110 and a second support seat 120 arranged in parallel and spaced apart;

[0050] The sliding part comprises slide rail sets (130, 130') respectively fixed on the first support base 110 and the second support base 120 along the Z direction. In the embodiment, each slide rail set (130 or 130') comprises two symmetrical and spaced linear slide rails, which improves the stability of the sliding of the coating knife 210.

[0051] The driving part comprises power components (140, 140') respectively arranged on the first support base 110 and the second support base 120 along the Z direction. One power component 140 is used to drive one end of the coating knife 210 to move on the slide rail set 130 according to the difference of parallelism, so as to adjust the glue outlet 211 of the coating knife 210 to a parallel position.

[0052] Alternatively, the two power components (140, 140') are respectively used to drive the two ends of the coating knife 210 to move towards each other, so as to adjust the glue outlet 211 of the coating knife 210 to a parallel position. Specifically, one power component 140 drives one end of the coating knife 210 to displace by a first distance (i.e. half of the difference of parallelism) in a first direction, and the other power component 140' drives the other end of the coating knife 210 to displace by a second distance (i.e. the other half of the difference of parallelism) in a second direction opposite to the first direction.

[0053] The two power components (140, 140') comprise but are not limited to telescopic motors, screw rod motors or telescopic cylinders. In the embodiment, the power components are preferably screw rod motors. The displacement distance is the product of the number of rotations of the screw rod motor and the pitch of the screw rod. For example, if the displacement distance is 1 mm and the pitch is 0.5 mm, the power component needs to rotate 2 times.

[0054] Further, the parallelism adjusting mechanism further comprises:

[0055] A parallelism measuring instrument (not shown) for detecting the parallelism of the coating knife 210 and outputting a data signal containing parallelism error information to the outside;

[0056] A driving controller (not shown) for controlling one of the power components 140 to rotate according to a set number of rotations, speed and direction according to the received data signal, and then driving the end of the coating knife to be adjusted to move on the slide rail set 130, so as to adjust the glue outlet 211 of the coating knife 210 to a parallel position.

[0057] The driving controller is also used to control the two power components (140, 140') to drive the two ends of the coating knife 210 to move towards each other, so as to adjust the glue outlet 211 of the coating knife 210 to a parallel position.

[0058] Further, the parallelism adjusting mechanism further comprises a grating reader (not shown) for detecting the displacement distance of one end or both ends of the coating knife 210, and the grating reader feeds back the detected data information to the driving controller, and the driving controller controls the display to display the current state of the coating knife 210 in real time according to the received information, so as to facilitate the operator to understand the parallelism information of the coating knife 210 in real time.

[0059] Further, the support part further comprises a plurality of cross beams 150 connected between the first support base 110 and the second support base 120.

[0060] In the embodiment, the cross beams 150 are preferably four, and are symmetrically arranged between the first support base 110 and the second support base 120, and a channel 160 for the movement of the coating knife 210 in the Z direction is formed between the two symmetric cross beams 150. In the embodiment, the cross beams 150 are preferably aluminum square tubes, which are light in weight and stable in performance, and can firmly connect the first support base 110 and the second support base 120, and reduce the weight of the support part.

[0061] As shown in Figure 1 , Figure 3 and Figure 4 , preferably, the lead screws 142 of the two power components (140, 140') are directly or indirectly screwed with connecting seats 180 respectively sliding on the slide rail groups (130, 130'), and the two ends of the coating knife 210 in the length direction (see Y direction in Figure 1 ) are directly or indirectly rotationally connected with the connecting seats 180.

[0062] Further, the coating knife 210 is detachably installed on a support beam 190, and the two ends of the support beam 190 are respectively rotationally connected with the connecting seats 180 through rotation shafts 191, and one of the connecting seats 180 is provided with a guide opening (see Y direction in Figure 1 ) for the translation of the rotation shaft 191, and the guide opening 192 is preferably an elongated waist-shaped slot, and the guide opening 192 and the rotation shaft 191 are in clearance sliding fit, and when one of the power components 140 drives one end of the coating knife 210 to move up and down to adjust the parallelism of the coating knife 210, the rotation shaft 191 can rotate and translate in the guide opening 192, avoiding the phenomenon that one end of the support beam 220 is stuck with one of the connecting seats 180 during the up and down movement.

[0063] Further, the two connecting seats 180 are both provided with openings, and the two ends of the support beam 190 are arranged at the openings of the two connecting seats 180, and the two rotation shafts 191 are respectively arranged in the connecting seats 180 and the support beam 190.

[0064] As shown in Figure 4As shown, further, both power components (140, 140') each include a screw rod 142 and a body 141 driving the screw rod 142 to rotate in a set direction;

[0065] The connecting area of the screw rod 142 and the body 141 is sleeved with a shaft coupling 143 transmitting torque and motion, the upper end of the screw rod 142 is sleeved with a fixed seat 144 limiting the screw rod 142 in the radial direction, the lower end of the fixed seat 144 is a column body 1441, and the upper end of the fixed seat 144 is a square body 1442 with an outer dimension larger than the column body 1441;

[0066] The lower end of the screw rod 142 is screwed with a nut seat 145 moving up and down along the Z direction with the rotation of the screw rod 142, and the nut seat 145 is fixedly connected with the connecting seat 180.

[0067] As shown in Figure 4 and Figure 5 Preferably, the first support seat 110 and the second support seat 120 are consistent in shape and structure, and both include a hollow frame body 170;

[0068] The body 141 of the power component 140 is fixedly arranged on the top of the frame body 170, the top of the frame body 170 is provided with a through hole 171 in the Z direction, which is in clearance sliding fit with the shaft coupling 143, and the through hole 171 limits the radial direction of the outer periphery of the shaft coupling 143, avoiding the shaking of the shaft coupling 143, and being beneficial to the stability between the screw rod 142 and the body 141;

[0069] The frame body 170 is provided with a support arm 172 supporting the square body 1442, the support arm 172 is provided with a guide hole 173 through which the column body 144 passes, the guide hole 173 is in clearance sliding fit with the column body 144, the inner periphery of the guide hole 173 limits the radial direction of the column body 144 and axially guides the column body 144, improving the stability of the screw rod 142 during rotation.

[0070] As shown in Figure 5 Further, the two ends of the support arm 172 are respectively fixedly provided with a plurality of reinforcing ribs 174 connected with the frame body 170, the reinforcing ribs 174 at the two ends of the support arm 172 are preferably two, the two reinforcing ribs 174 are arranged in a triangular shape with the frame body 170, and the reinforcing ribs 174 are beneficial to improving the firmness of the connection between the support arm 172 and the frame body 170.

[0071] Further, the outer periphery of the frame body 170 is detachably connected with a transparent cover (not shown) sealing the frame body 170, and the transparent cover can avoid the phenomenon that the consumption and wear powder caused by the translation of the coating knife on the slide rail group falls and pollutes the semiconductor substrate.

[0072] As shown in Figure 1 and Figure 6The application also provides a coating device, comprising:

[0073] The coating system 200 comprises a platform 300 horizontally arranged for placing a semiconductor substrate and a coating knife 210 which is translated relative to the platform 300, the coating knife 210 having a slit-shaped glue outlet 211 for coating glue on the semiconductor substrate;

[0074] The glue leveling system comprises a glue leveling wheel 400 for rotating to carry away the excess glue at the glue outlet 211, the glue leveling wheel 400 rotating along its axis;

[0075] The parallelism adjusting mechanism is also used to drive the coating knife 210 to move along the Z direction at a first position for adjusting the glue leveling distance between the glue outlet 211 and the glue leveling wheel 400, wherein the first position is a position where the glue outlet 211 is directly above the glue leveling wheel 400, preferably, the center line of the glue outlet 211 is arranged coplanar with the axis of the glue leveling wheel 400;

[0076] The parallelism adjusting mechanism is also used to drive the coating knife 210 to move along the Z direction at a second position for adjusting the glue coating distance between the glue outlet 211 and the semiconductor substrate, wherein the second position is a position where the glue outlet 211 is above the platform 300 and close to the starting end of the semiconductor substrate.

[0077] The coating device provided by the application can adjust the glue leveling distance at the glue outlet 211 to a set threshold by driving the coating knife 210 to move along the Z direction at different positions by the parallelism adjusting mechanism, which is convenient for coating glue of different thicknesses on the semiconductor substrate and is simple and convenient to operate.

[0078] The above is the preferred embodiment of the application, and it should be noted that those skilled in the art can make some improvements and refinements without departing from the principles of the application, and these improvements and refinements are also considered within the protection scope of the application.

Claims

1. A parallelism adjustment mechanism characterized by, The parallelism adjusting mechanism is applied to a coating device for adjusting the parallelism of a slot glue outlet arranged on a coating knife of the coating device, and comprises: a support part including first and second support seats arranged symmetrically in parallel and with a spacing; a sliding part including slide rail groups respectively fixed vertically on the first and second support seats; a driving part including power components respectively arranged on the first and second support seats, wherein one power component drives one end of the coating knife to translate on the slide rail groups by a parallelism difference, so as to adjust the slot glue outlet of the coating knife to a parallel position; or the two power components respectively drive two ends of the coating knife to move towards each other, so as to adjust the slot glue outlet of the coating knife to a parallel position.

2. The parallelism adjusting mechanism according to claim 1, further comprising: a parallelism measuring instrument for detecting the parallelism of the coating knife and externally outputting a data signal containing parallelism error information; a driving controller for controlling one of the power components to rotate by a set number of turns, speed and direction according to the received data signal, and then driving one end of the coating knife to translate on the slide rail groups, so as to adjust the slot glue outlet of the coating knife to a parallel position; or the driving controller controls the two power components to respectively drive two ends of the coating knife to move towards each other, so as to adjust the slot glue outlet of the coating knife to a parallel position. a grating reader for detecting the displacement distance of one end or both ends of the coating knife, the grating reader feeding back the detected data information to the driving controller, and the driving controller controlling a display to display the current state of the coating knife in real time according to the received information. The support part further comprises a plurality of cross beams connected between the first and second support seats, and the cross beams are symmetrically arranged on both sides of the width direction of the first and second support seats in pairs, and a passage for the up-and-down movement of the coating knife is formed between the symmetrically arranged cross beams.

3. The parallelism adjustment mechanism of claim 1, wherein, The two power components each comprise a screw rod and a machine body for driving the screw rod to rotate in a set direction; 4. The parallelism adjustment mechanism of claim 1, wherein, a coupling for transmitting torque and motion is arranged on the connection area of the screw rod and the machine body, a fixed seat for limiting the radial movement of the screw rod is arranged on the upper end of the screw rod, the lower end of the fixed seat is a columnar body, and the upper end of the fixed seat is a square body with a larger size than the columnar body; 5. The parallelism adjustment mechanism of claim 1, wherein, a nut seat moving up and down with the rotation of the screw rod is screwed on the lower end of the screw rod, and the nut seat is directly or indirectly rotationally connected with the coating knife. a connecting seat is directly or indirectly rotationally arranged on both ends of the coating knife, and the connecting seat is detachably fixedly connected with the nut seat. a support beam is arranged, the coating knife is detachably mounted on the support beam, both ends of the support beam are rotationally connected with the connecting seats through shafts, one of the connecting seats is provided with a guide hole for the translation of the shaft, the guide hole and the shaft are clearance-fitted, and the shaft is configured to rotate and translate in the guide hole when one of the power components drives one end of the coating knife to move up and down to adjust the parallelism of the coating knife.

6. The parallelism adjustment mechanism of claim 5, wherein, The first and second support seats are consistent in shape and structure, and both comprise a hollow frame body.

7. The parallelism adjustment mechanism of claim 6, wherein, ​ 8. The parallelism adjustment mechanism of claim 7, wherein, ​ The body of the power component is fixed to the top of the frame body, and the frame body is vertically provided with a through hole which is in clearance fit with the shaft coupling; The frame body is provided with a support arm for supporting the square body, and the support arm is provided with a guide hole through which the columnar body passes, and the guide hole is in clearance fit with the columnar body.

9. The parallelism adjustment mechanism of claim 8, wherein, The frame body is detachably connected with a transparent cover which seals the frame body.

10. A coating apparatus characterized by, Comprising; A glue coating system comprises a platform horizontally arranged for placing a semiconductor substrate and a coating knife which is in translation relative to the platform, the coating knife has a slit glue outlet for coating glue on the semiconductor substrate; A glue leveling system comprises a glue leveling wheel which is configured to rotate along its axis for carrying away the excess glue at the glue outlet; The parallelism adjusting mechanism of any one of claims 1 to 9 is further provided, and the parallelism adjusting mechanism drives the coating knife to move up and down at a first position for adjusting the glue leveling distance between the glue outlet and the glue leveling wheel; The parallelism adjusting mechanism drives the coating knife to move up and down at a second position for adjusting the glue coating distance between the glue outlet and the semiconductor substrate.

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