Thickness gauge and micropore sample thickness measuring method

Abstract

The invention discloses a thickness gauge and a thickness measuring method of a micropore sample, and belongs to the technical field of thickness measurement. The thickness gauge comprises a rack, a thickness measuring mechanism and a film covering mechanism. When the thickness gauge is used for measuring the thickness of the microporous sample, the microporous sample can be placed on the first adsorption part of the first placing table, the surface of the microporous sample is covered with the covering film, and the first adsorption part is opened to tightly suck the covering film on the surface of the microporous sample. Then the laser probe is turned on, so that laser emitted by the laser probe can irradiate the surface of the covering film, the laser can be prevented from entering the hole structure, and the second distance between the covering film and the laser probe can be measured; therefore, the actual thickness of the microporous sample can be reflected more truly by utilizing the first distance between the first adsorption part and the laser probe, the second distance and the third distance between the two surfaces in the thickness direction of the covering film.

Description

Technical Field

[0001] This application relates to the field of thickness measurement technology, and more specifically, to a thickness gauge and a method for measuring the thickness of a microporous sample. Background Technology

[0002] In industrial production, product thickness measurement is a crucial quality control step. For flexible sheets with micropores, such as films of certain special materials and sponge-like materials, traditional thickness measurement methods often suffer from limitations, including low accuracy. Therefore, it is necessary to provide a thickness gauge suitable for measuring the thickness of microporous samples. Summary of the Invention

[0003] To address the aforementioned shortcomings, this application provides a thickness gauge and a method for measuring the thickness of microporous samples, which can measure the thickness of microporous samples and improve measurement accuracy.

[0004] This application is implemented as follows: In a first aspect, an example of this application provides a thickness gauge, including a frame, a thickness measuring mechanism, and a coating mechanism. The thickness measuring mechanism includes at least one laser probe disposed on the frame and a first placement stage, at least a portion of the first placement stage being within the irradiation range of the laser probe. The coating mechanism includes a first adsorption element for placing a microporous sample and disposed on the first placement stage. The first adsorption element is configured to operable to have an adsorption force on the microporous sample and a coating film placed on the surface of the microporous sample in a direction close to the first placement stage.

[0005] In the above implementation process, when measuring the thickness of a microporous sample using the thickness gauge provided in this application embodiment, the microporous sample can be placed on the first adsorption element on the first placement stage, and a covering film can be placed on the surface of the microporous sample. Then, the first adsorption element forms an adsorption force on the microporous sample and the covering film in the direction close to the first placement stage to firmly hold the microporous sample and the covering film together. Then, the laser probe is turned on, and the laser emitted by the laser probe irradiates the covering film to measure the distance between the covering film and the laser probe. The thickness of the microporous sample can then be calculated based on the distance between the surface of the first adsorption element and the laser probe, the thickness of the covering film, and the distance measured by the laser probe. Since the surface of the microporous sample is covered with a covering film, the covering film can form a non-porous test surface, which can prevent the laser from penetrating into the micropores and causing the measurement result to be too low, thereby improving the test accuracy. Furthermore, the first adsorption element can firmly hold the microporous sample and the covering film together, reducing the gap between them, which can further improve the test accuracy.

[0006] In conjunction with the first aspect, in an alternative embodiment, the thickness measuring mechanism includes a first movable member that is drivenly connected to a first placement stage, the travel of which is at least partially within the irradiation range of the laser probe.

[0007] Optionally, the thickness measuring mechanism includes at least two laser probes, with the measurement ranges of two adjacent laser probes overlapping each other.

[0008] Optionally, at least two laser probes are arranged in a line; the first moving member can operate to move the first placement stage back and forth along a first direction, the first direction being staggered with the arrangement direction of the at least two laser probes.

[0009] Optionally, the first moving component is a linear guide rail, and the first placement stage is slidably connected to the linear guide rail via a slider.

[0010] Optionally, the first adsorption element is an adsorption plate disposed in the first placement stage, and the adsorption plate is provided with at least two adsorption holes at even intervals.

[0011] In the above implementation process, the first moving component drives the laser probe to move, so that the laser emitted by the laser probe can irradiate the entire surface of the covering film in sequence. Then, the thickness of each position of the microporous sample can be obtained according to the distance between each position of the covering film and the laser probe. Compared with single-point measurement, it can more realistically reflect the actual thickness of the microporous sample and improve the measurement accuracy.

[0012] By arranging at least two laser probes in a line with the measurement ranges of adjacent laser probes overlapping each other, and by using a first moving component to drive a first placement stage to move longitudinally along the laser probe arrangement direction, all positions in the horizontal and vertical directions of the covering film can be irradiated by laser, thereby improving measurement accuracy.

[0013] The use of the slider and slide rail allows the first placement stage to move smoothly, further improving measurement accuracy.

[0014] The first adsorption element is configured as an adsorption plate structure with adsorption holes. The adsorption plate is placed on the first placement stage, which can stably adsorb the covering film placed on the surface of the microporous sample onto the surface of the microporous sample, so as to facilitate the thickness measurement of the microporous sample.

[0015] In conjunction with the first aspect, in an optional embodiment, the coating mechanism further includes a second movable member disposed on the frame and a second adsorption member tractively connected to the second movable member. The travel of the second movable member at least partially covers the first placement stage, and the second adsorption member is configured to operate to have an adsorption force on the coating film in a direction away from the first placement stage.

[0016] In the above implementation process, when it is necessary to place a covering film on the microporous sample, the second adsorbent can be used to adsorb the covering film, and the second moving component can be used to move the second adsorbent with the adsorbed covering film to the microporous sample at the first placement stage. Then, the second adsorbent is closed, and the covering film is placed on the microporous sample. Then, the second moving component can be used to move the second adsorbent away from the first placement stage to facilitate thickness measurement of the microporous sample. Similarly, after the thickness measurement is completed, the second moving component can be used to move the second adsorbent to the covering film, open the second adsorbent to adsorb the covering film, and then the second moving component can be used to move the second adsorbent with the adsorbed covering film away from the microporous sample.

[0017] In conjunction with the first aspect, in one alternative embodiment, the second suction element includes at least one negative pressure suction nozzle.

[0018] Optionally, the second suction element includes at least two spaced-apart negative pressure nozzles.

[0019] Optionally, at least two negative pressure suction nozzles are arranged circumferentially spaced along the covering film.

[0020] In the above-described process, the negative pressure nozzles generate negative pressure to firmly adhere to the covering film. Furthermore, the second moving member simultaneously moves at least two negative pressure nozzles close to the covering film, facilitating the simultaneous adsorption of the covering film by at least two nozzles, thus improving the adsorption stability of the second adsorption member. Moreover, arranging at least two negative pressure nozzles at circumferential intervals along the covering film allows for adsorption at the circumferential edges of the covering film, reducing the likelihood of deformation, wrinkling, or damage, and further improving testing accuracy.

[0021] In conjunction with the first aspect, in an alternative embodiment, the rack is further provided with a second placement platform for storing the covering film, the travel of the second moving member at least partially covering the first and second placement platforms.

[0022] Optionally, the second moving member includes a rotating member disposed on the frame, the rotating member being operable to rotate the second adsorption member to the first placement stage or the second placement stage.

[0023] Optionally, the second moving member further includes a telescopic member, and the second adsorption member is connected to the rotating member through the telescopic member.

[0024] Optionally, the rotating component includes a rotary cylinder.

[0025] Optionally, the telescopic component includes a telescopic cylinder.

[0026] In the above implementation process, when a covering film needs to be placed, a rotary cylinder or similar rotating component can be used to rotate the telescopic component, positioning the second adsorption component connected to the telescopic component at the second placement stage. Then, the telescopic component, such as the rotary cylinder, moves the second adsorption component closer to the second placement stage, bringing it into contact with the covering film placed on the second placement stage. The second adsorption component is then opened to adsorb the covering film. Next, the telescopic component moves the second adsorption component with the adsorbed covering film away from the second placement stage. The rotary component then rotates the telescopic component to position the second adsorption component at the first placement stage, moving it closer to the first placement stage to bring the covering film into contact with the microporous sample. The second adsorption component is then closed to place the covering film on the surface of the microporous sample. Finally, the telescopic component moves the second adsorption component away from the first placement stage, and the rotary component rotates the telescopic component to move the second adsorption component away from the first placement stage.

[0027] By utilizing the combination of rotating and telescopic components, the covering film can be placed on the microporous sample at the first placement stage, and the covering film can also be placed on the second placement stage. This also reduces the chance of scratching the microporous sample or the covering film deviating from the microporous sample during the transfer of the covering film.

[0028] In conjunction with the first aspect, in an optional embodiment, the thickness gauge further includes a loading and unloading mechanism. The loading and unloading mechanism includes a third moving member disposed on the frame and a third adsorption member pulverizedly connected to the third moving member. The travel of the third moving member at least partially covers the first placement stage, and the third adsorption member is configured to be operable to have an adsorption force on the microporous sample in a direction away from the first placement stage.

[0029] In the above implementation process, when thickness testing of the microporous sample is required, the third moving component in the loading and unloading mechanism can be used to move the third adsorption component to the microporous sample to be tested, open the third adsorption component to adsorb the microporous sample, and then use the third moving component to move the third adsorption component with the adsorbed microporous sample to the first placement stage. The third adsorption component is then closed to place the microporous sample on the first placement stage. Finally, the third moving component moves the third adsorption component outside the first placement stage for loading. After the thickness test is completed, the third moving component can be used to move the third adsorption component to the first placement stage, open the third adsorption component to adsorb the microporous sample, and then use the third moving component to move the third adsorption component with the adsorbed microporous sample outside the first placement stage for unloading.

[0030] In conjunction with the first aspect, in an optional embodiment, the third moving member includes an X-axis linear moving member, a Z-axis linear moving member, and a Y-axis linear moving member connected in sequence, with the third adsorption member disposed on the Y-axis linear moving member.

[0031] In the above implementation process, the third adsorption component is moved by using the X-axis linear moving component, Z-axis linear moving component and Y-axis linear moving component connected in sequence. The third adsorption component can be moved to any position in the three-dimensional space formed by the moving range, making loading and unloading more flexible.

[0032] In conjunction with the first aspect, in an optional embodiment, the third adsorption element includes two spaced-apart first negative pressure suction cups and second negative pressure suction cups, the first negative pressure suction cups being configured to pick up new microporous samples and place them on a first placement stage, and the second negative pressure suction cups being configured to pick up the measured microporous samples from the first placement stage.

[0033] In the above process, two negative pressure suction cups are used for loading and unloading respectively, which can improve the efficiency of loading and unloading and facilitate continuous thickness measurement.

[0034] In conjunction with the first aspect, in an optional embodiment, the frame is further provided with a third placement platform, which has a first placement area, a second placement area, and a third placement area spaced apart. A third movable component operably drives a first negative pressure suction cup to move back and forth between the first placement platform and the first placement area. The third movable component operably drives a second negative pressure suction cup to move back and forth between the first placement platform, the second placement area, or the third placement area.

[0035] Optionally, the first placement area, the second placement area, and the third placement area are each independently provided with a number of limiting columns.

[0036] In the above implementation process, a third placement stage is set at the frame, and a first placement area, a second placement area, and a third placement area are set at the third placement stage, so that the first negative pressure suction cup can be driven by the third moving part to pick up the micropore sample to be tested from the first placement area and place it at the first placement stage. According to the thickness measurement structure, the second negative pressure suction cup can be driven by the third moving part to place the micropore sample after the thickness measurement is completed from the first placement stage into the corresponding second placement area or third placement area.

[0037] Furthermore, several limiting columns are independently set in the first, second, and third placement areas. These columns can limit the stacked microporous samples, making them stacked more neatly, facilitating loading and unloading, and reducing the probability of the microporous samples collapsing and deforming during stacking.

[0038] In a second aspect, an example of this application provides a method for measuring the thickness of a microporous sample. Using the thickness gauge provided in the first aspect, the microporous sample is placed on a first adsorption element, a covering film is placed over the surface of the microporous sample, the first adsorption element is opened, and the covering film is firmly adhered. A laser probe is activated, allowing the laser emitted by the probe to irradiate the surface of the covering film, and a second distance between the covering film and the laser probe is measured. There is a first distance between the first adsorption element and the laser probe, and a third distance between the two surfaces of the covering film in the thickness direction. The thickness of the microporous sample = first distance - second distance - third distance.

[0039] In the above implementation process, when measuring the thickness of a microporous sample using the thickness gauge provided in this application embodiment, the microporous sample can be placed on the first adsorption element of the first placement stage, and a covering film can be placed on the surface of the microporous sample. The first adsorption element is used to firmly hold the microporous sample and the covering film together. Then, the laser probe is turned on, and the second distance between the covering film and the laser probe is measured. Since the first distance between the first placement stage and the laser probe is fixed, and the third distance between the two surfaces of the covering film in the thickness direction is fixed, the thickness of the microporous sample can be obtained by subtracting the first distance from the second distance from the third distance.

[0040] Because a cover film is applied to the surface of the microporous sample, a pore-free test surface is formed, preventing laser penetration into the micropores and thus avoiding lower measurement results, thereby improving test accuracy. Furthermore, the first adsorption element firmly holds the microporous sample and the cover film together, reducing gaps between the structures and further enhancing test accuracy.

[0041] In conjunction with the second aspect, in an optional embodiment, the method for measuring the third distance includes: placing a covering film on a first adsorption member, opening the first adsorption member to firmly adhere the covering film; opening a laser probe so that the laser emitted by the laser probe can irradiate the surface of the covering film; and measuring a fourth distance between the covering film and the laser probe, wherein the third distance = the first distance - the fourth distance.

[0042] In the above implementation process, the actual thickness of the covering film is measured before testing the microporous sample, and the test thickness of the microporous sample is calculated using the measured third distance, which can improve the accuracy of the test results. Attached Figure Description

[0043] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0044] Figure 1 This is a schematic diagram of the thickness gauge provided in the embodiments of this application; Figure 2This is a front view of the thickness gauge provided in an embodiment of this application; Figure 3 A side view of the thickness gauge provided in an embodiment of this application; Figure 4 This is a schematic diagram of the thickness relationship provided for an embodiment of this application.

[0045] Icons: 1-Thickness gauge; 10-Frame; 20-Thickness measuring mechanism; 21-Laser probe; 22-First moving component; 23-First placement stage; 30-Coating mechanism; 31-First suction component; 32-Second moving component; 321-Rotating component; 322-Telescopic component; 33-Second suction component; 34-Second placement stage; 40-Loading / unloading mechanism; 41-Third moving component; 411-X-axis linear moving component; 412-Z-axis linear moving component Component; 413-Y-axis linear moving component; 42-Third adsorption component; 421-First negative pressure suction cup; 422-Second negative pressure suction cup; 43-Third placement stage; 431-First placement area; 432-Second placement area; 433-Third placement area; 44-Limiting column; D1-First direction; D2-Arrangement direction; L1-First distance; L2-Second distance; L3-Third distance; 100-Microporous sample; 200-Covering film. Detailed Implementation

[0046] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0047] In industrial production, product thickness measurement is a crucial quality control step. Currently, conventional measurement methods include contact thickness measurement and non-contact methods such as laser thickness measurement. However, for flexible sheets with micropores, such as films of certain special materials or sponge-like materials, both traditional contact thickness measurement methods and existing laser thickness measurement methods have numerous limitations.

[0048] For example, if a contact-based thickness measurement method is used, it is easy to cause extrusion deformation of the microporous sheet, thus failing to accurately reflect the actual thickness of the sheet and resulting in low test accuracy.

[0049] For example, traditional laser thickness measurement methods typically use laser irradiation on a localized area of ​​the sheet surface to perform single-point thickness measurement. This method cannot reflect the thickness uniformity of the sheet, making it difficult to meet the actual production needs of sheets with high requirements for thickness uniformity. Furthermore, if traditional laser thickness measurement methods are used to test microporous sheets, the laser can easily penetrate into the pores of the microporous sheet, leading to underestimation of the thickness.

[0050] Therefore, this application further improves the thickness gauge, thereby mitigating the problem of low accuracy in measuring the thickness of microporous samples to a certain extent. To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings.

[0051] Please refer to the combination Figure 1 , Figure 2 and Figure 3 This application provides a thickness gauge 1, which includes a frame 10, a thickness measuring mechanism 20 and a coating mechanism 30.

[0052] The thickness measuring mechanism 20 includes at least one laser probe 21 and a first placement stage 23 disposed on the frame 10, with at least a portion of the first placement stage 23 located within the irradiation range of the laser probe 21.

[0053] The coating mechanism 30 includes a first adsorption member 31 for placing a microporous sample 100 and disposed on a first placement stage 23. The first adsorption member is configured to have an adsorption force on the microporous sample and the coating film placed on the surface of the microporous sample in the direction close to the first placement stage.

[0054] The thickness of the microporous sample 100 is measured using the thickness gauge 1 provided in this application embodiment. The microporous sample 100 is placed on the first adsorption member 31 on the first placement stage 23, and a covering film 200 is placed on the surface of the microporous sample 100. The first adsorption member 31 adsorbs the covering film 200 onto the surface of the microporous sample 100. Then, by turning on the laser probe 21, the laser emitted by the laser probe 21 can irradiate the surface of the covering film 200, allowing the distance between the covering film 200 and the laser probe 21 to be measured. The thickness of the microporous sample 100 can then be calculated based on the first distance L1 between the first placement stage 23 and the laser probe 21, the third distance L3 between the two surfaces of the covering film 200 in the thickness direction, and the second distance L2 between the covering film 200 and the laser probe 21 as measured by the laser probe 21. Specifically, the thickness of the microporous sample 100 = first distance L1 - second distance L2 - third distance L3. See the diagram showing the relationship between the first distance L1, the second distance L2, and the third distance L3. Figure 4 .

[0055] When measuring the thickness of the microporous sample 100 using the thickness gauge 1 provided in this application embodiment, since a covering film 200 is applied to the surface of the microporous sample 100, the covering film 200 forms a non-porous test surface, which avoids the laser from penetrating into the micropores and causing the measurement result to be too low, thereby improving the test accuracy. Furthermore, the first adsorption member 31 can firmly adhere the microporous sample and the covering film 200 to the surface of the microporous sample 100, thereby reducing the gap between the covering film 200 and the microporous sample 100, further improving the test accuracy.

[0056] The following description, in conjunction with the accompanying drawings, provides a further detailed description of the frame 10, the thickness measuring mechanism 20, and the coating mechanism 30 in the thickness gauge 1 provided in this application.

[0057] The frame 10 supports the thickness measuring mechanism 20 and the coating mechanism 30, ensuring a relatively stable positional relationship between them and giving the thickness gauge 1 good structural stability. This application does not limit the specific structure of the frame 10; it can be adjusted accordingly based on the installation requirements of the thickness measuring mechanism 20 and the coating mechanism 30.

[0058] As an example, please continue reading Figure 1 The frame 10 includes a machine base, columns set on the machine base, and crossbeams connecting the columns. The machine base can support the first placement platform 23 of the thickness measuring mechanism 20 and the first adsorption member 31 of the coating mechanism 30. The columns or crossbeams support the laser probe 21 and make the irradiation surface of the laser probe 21 face downward, so that the first placement platform 23 and the laser probe 21 have a stable vertical relative position relationship.

[0059] Furthermore, support legs can be installed under the machine to support it, keeping it away from the ground and reducing pollution.

[0060] Furthermore, in some embodiments, the laser probe 21 can illuminate the entire surface of the covering film 200 to obtain the thickness of each position of the microporous sample based on the distance between each position of the covering film 200 and the laser probe 21. Compared with single-point measurement, this can more realistically reflect the actual thickness of each position of the microporous sample 100, reflect the thickness uniformity of the microporous sample 100, and improve the measurement accuracy.

[0061] As an example, a laser probe 21 can be used to illuminate the entire surface of the covering film 200. That is, the measurement range of the laser probe 21 is not less than the size of the covering film 200.

[0062] As an example, when the size of the covering film 200 is large, the entire surface of the covering film 200 can be irradiated using at least two laser probes 21.

[0063] As an example, when the size of the covering film 200 is large, at least one laser probe 21 can be used to irradiate a portion of the surface of the covering film 200, and then the laser probe 21 or the first placement stage 23 can be moved to gradually complete the thickness acquisition of the entire surface of the covering film 200.

[0064] In some embodiments, the thickness measuring mechanism 20 includes a first moving member 22 that is pulsatorically connected to the first placement stage 23. The moving stroke of the first moving member 22 is at least partially within the irradiation range of the laser probe 21, thereby enabling the acquisition of thickness data of the entire surface of the covering film 200 by gradually moving the placement of the covering film 200.

[0065] It is understood that the laser probe 21 described in this application can emit laser light and collect signals reflected from the sample surface, and calculate the distance from the laser probe 21 to the sample surface by measuring the round-trip time or phase difference of the beam. This application does not limit the specific type of laser probe 21, as long as the distance from the laser probe 21 to the sample surface can be measured, a conventional laser probe 21 in the art can be selected.

[0066] This application does not limit the specific number of laser probes 21 or the specific direction of movement of the first moving member 22, as long as the first moving member 22 drives the first placement stage 23, on which the microporous sample 100 is placed, to pass through the irradiation surface of the laser probe 21, and the thickness data of the entire surface of the microporous sample 100 can be obtained. As an example, a laser probe 21 with a measurement range of 0.1 mm to 10 mm and a measurement accuracy of 0.01 mm can be selected.

[0067] In some embodiments, please continue reading Figure 1 The thickness measuring mechanism 20 includes at least two laser probes 21, which are arranged in a line. The measuring ranges of two adjacent laser probes 21 overlap. The first moving part 22 can drive the first placement stage 23 to move back and forth along the first direction D1. The first direction D1 is intersected with the arrangement direction D2 of the at least two laser probes 21.

[0068] Understandably, at least two laser probes 21 are arranged in a line, with the measurement ranges of adjacent laser probes 21 overlapping each other. The measurement range of at least two laser probes 21 along the arrangement direction D2 is not less than the size of the microporous sample 100 along the arrangement direction D2. Assuming the microporous sample 100 is a rectangular microporous sheet, the arrangement direction D2 is the width direction of the microporous sheet, and the first direction D1 is the length direction of the microporous sheet, the total measurement width of at least two laser probes 21 along the arrangement direction D2 is not less than the width of the microporous sample 100. After the first moving component 22 drives the first placement stage 23 to move along the first direction D1, the laser emitted by at least two laser probes 21 can move from a line to a surface, completing the thickness measurement of the entire surface of the microporous sheet.

[0069] As an example, the thickness measuring mechanism 20 may include two, three, four, or five laser probes 21 arranged in a row.

[0070] Furthermore, the embodiments of this application do not limit how at least two laser probes 21 are arranged in a row and fixed on the frame 10. In some embodiments, a crossbeam can be provided above the machine platform of the frame 10 for placing the first moving part 22, a mounting plate can be provided at the crossbeam, and at least two laser probes 21 can be installed at the mounting plate, with the irradiation surface of the laser probes 21 facing downward.

[0071] Furthermore, to facilitate adjusting the arrangement of the laser probes 21 according to the shape or size of the sample to be tested, in some embodiments, at least two mounting positions can be set at intervals on the mounting plate, and different numbers, spacings, or arrangement directions of laser probes 21 can be installed as needed. As an example, when the sample to be tested is a microporous disc, at least two laser probes 21 can be arranged in a line, and the total measurement range of at least two laser probes 21 is not less than the radius or diameter of the microporous disc. The first moving member 22 can drive the first placement stage 23 to rotate 360° or 180° to achieve laser thickness measurement of the entire circular surface.

[0072] Furthermore, this application does not limit the specific type of the first moving part 22, and it can be selected according to the shape of the micropore sample 100 to be tested and the arrangement of the laser probe 21.

[0073] As an example, when the sample to be tested is a rectangular microporous sheet and at least two laser probes 21 are arranged in a line along the width direction of the microporous sheet, the first moving member 22 can be a linear moving member that moves along the length direction of the microporous sheet. The linear moving member can include a linear guide rail and a slider slidably connected to the linear guide rail, and the first placement stage 23 is connected to the slider. The slider can be driven by a motor to slide along the linear guide rail.

[0074] As an example, when the sample to be tested is a microporous disc and at least two laser probes 21 are arranged in a line along the radial direction of the microporous disc, the first moving part 22 can be a rotating shaft, and the first placement stage 23 is coaxially connected to the rotating shaft, which can drive the first placement stage 23 to rotate. The rotating shaft can be driven by a motor to rotate.

[0075] In some embodiments, the first adsorption member 31 is disposed on the first placement stage 23. The first adsorption member 31 is provided with adsorption holes, which can adsorb the covering film 200 located on the microporous sample 100 onto the side of the microporous sample 100 near the laser probe 21, and can also adsorb the microporous sample 100 at the first placement stage 23.

[0076] By adsorbing and covering the surface of the microporous sample 100 with a thin film 200, a non-porous test surface can be formed on the surface of the microporous sample 100, which can prevent the laser emitted by the laser probe 21 from entering the pores and causing the measurement results to be too low.

[0077] It is understood that the covering film 200 described in this application is a non-porous structure relative to the microporous sample 100. The non-porous structure does not mean that the surface of the covering film 200 cannot contain micropores in an absolute sense. The surface of the covering film 200 can have a certain roughness (the presence of tiny pits or protrusions that cause the surface of the covering film 200 to be uneven). The deviation of the measured thickness data caused by this roughness is sufficient to meet the allowable tolerance range of the microporous sample 100.

[0078] Understandably, the covering film 200 can be adsorbed onto the surface of the microporous sample 100. After covering the microporous sample 100, the covering film 200 can change with the undulations of the surface of the microporous sample 100 to reflect the true surface morphology of the covering film 200. Therefore, the covering film 200 needs to have a certain degree of flexibility. As an example, the covering film 200 can be a PET film.

[0079] In some embodiments, the first adsorption member 31 is provided with at least two adsorption holes, which can apply a more uniform adsorption force to the microporous sample 100, reduce the probability of deformation of the microporous sample 100, and more firmly adsorb the covering film 200.

[0080] Furthermore, this application does not limit the specific form of the first adsorption element 31, or how it is positioned on the first placement stage 23. In some embodiments, the first adsorption element 31 is an adsorption plate structure, with a negative pressure chamber and at least two evenly spaced adsorption holes communicating with the negative pressure chamber. The adsorption plate is embedded in the first placement stage 23, and the surface of the adsorption plate with the adsorption holes is flush with the surface of the first placement stage 23. The adsorption plate also has an interface communicating with the negative pressure chamber, which is connected to an external bellows. The other end of the bellows is connected to a vacuum pump, allowing continuous evacuation of the negative pressure chamber through the bellows to adsorb the microporous sample 100 and the covering film 200. Since the bellows can extend and retract with the movement of the first moving element 22, the connection between the vacuum pump and the adsorption plate will not interfere with the movement of the first moving element 22. During the movement of the microporous sample 100 driven by the first moving element 22, a continuous vacuum is created in the negative pressure chamber to form a negative pressure, stably adsorbing the microporous sample 100 and the covering film 200.

[0081] Furthermore, to facilitate the automatic application of the covering film 200 to the surface of the microporous sample 100 and the removal of the covering film 200 using the coating mechanism 30, in some embodiments, please refer to [the documentation / reference needed]. Figure 1The coating mechanism 30 also includes a second movable member 32 disposed on the frame 10 and a second adsorption member 33 pulsatingly connected to the second movable member 32. The travel of the second movable member 32 at least partially covers the first placement stage 23, and the second adsorption member 33 is configured to have an adsorption force on the coating film 200 in a direction away from the first placement stage 23.

[0082] When it is necessary to place a covering film 200 on the microporous sample 100, the second moving member 32 can be used to move the second adsorption member 33 closer to the covering film 200, and then the second adsorption member 33 can adsorb the covering film 200. The second moving member 32 can then move the second adsorption member 33, with the adsorbed covering film 200, to the microporous sample 100 at the first placement stage 23, and then close the second adsorption member 33, causing desorption between the second adsorption member 33 and the covering film 200. The second moving member 32 can then move the second adsorption member 33 away from the first placement stage 23, so that the first moving member 22 can move the first placement stage 23 to measure the thickness of the microporous sample 100. After the thickness measurement is completed, the second moving member 32 can be used to move the second adsorption member 33 to the covering film 200 of the microporous sample 100, open the second adsorption member 33 to adsorb the covering film 200, and then the second moving member 32 can move the second adsorption member 33, with the adsorbed covering film 200, away from the microporous sample 100.

[0083] By utilizing the cooperation of the second moving part 32 and the second adsorption part 33, the automatic covering or removal of the covering film 200 can be achieved, reducing manual operation and improving the automation level of the thickness gauge 1.

[0084] Furthermore, the embodiments of this application do not limit the specific types of the second moving member 32 and the second adsorption member 33.

[0085] In some embodiments, the second suction member 33 includes a negative pressure nozzle or a suction cup.

[0086] In some embodiments, please refer to Figure 1 The second suction member 33 includes at least two negative pressure suction nozzles spaced apart. As an example, at least two negative pressure suction nozzles are connected to the second moving member 32 via a connecting bracket.

[0087] As an example, at least two negative pressure nozzles are arranged at circumferential intervals along the covering film 200. When the covering film 200 is a rectangular film, four negative pressure nozzles can be provided, arranged in a rectangular array. A connecting frame is provided at the second moving member 32. The connecting frame includes two parallel support plates and a connecting plate connecting the two support plates. The connecting plate is connected to the middle of the two support plates. The four negative pressure nozzles are respectively provided at both ends of the two support plates. The support plates are connected to the second moving member 32.

[0088] In some embodiments, please continue reading Figure 3 The second moving member 32 includes a rotating member 321 disposed on the frame 10, which is operable to turn or rotate the second adsorption member 33 away from the first placement stage 23 to place or remove the covering film 200. As an example, the rotating member 321 may be a rotary cylinder.

[0089] For further information, please refer to [link / reference]. Figure 1 or Figure 2 The frame 10 is also provided with a second placement platform 34 for storing the covering film 200, and the travel of the second moving member 32 at least partially covers the first placement platform 23 and the second placement platform 34.

[0090] A second placement stage 34 is provided on the frame 10, which is capable of stacking multiple new cover films 200.

[0091] For example, when testing each new microporous sample 100, the rotating component 321 can drive the second adsorption component 33 to rotate to the second placement stage 34, open the second adsorption component 33 to pick up a new covering film 200, and then rotate the second adsorption component 33 with the covering film 200 adsorbed to the first placement stage 23 by the rotating component 321, and close the second adsorption component 33 to desorb the second adsorption component 33 from the covering film 200.

[0092] Furthermore, a waste film 200 stage can be set at the frame 10. After the thickness of the microporous sample 100 is measured, the rotating component 321 can rotate the second adsorption component 33 to the first placement stage 23, open the second adsorption component 33 to pick up the cover film 200, and then use rotation to rotate the second adsorption component 33 with the waste film 200 adsorbed to the waste film 200 stage, close the second adsorption component 33, and place the waste film 200 on the waste film 200 stage.

[0093] It is understood that this application does not limit the need to replace the cover film 200 every time the thickness of the microporous sample 100 is measured, and a new cover film 200 can be replaced as needed after the old cover film 200 is damaged.

[0094] For further information, please refer to [link / reference]. Figure 3 The second moving member 32 may also include a telescopic member 322, and the second adsorption member 33 is connected to the rotating member 321 through the telescopic member 322.

[0095] Connecting the second adsorbent 33 to the rotating member 321 via the telescopic member 322 prevents friction between the rotating member 321 and the placement stage or the microporous sample 100 when the rotating member 321 rotates the second adsorbent 33 back and forth between the first placement stage 23 and the second placement stage 34. Furthermore, after the rotating member 321 moves the second adsorbent 33 above the corresponding placement stage, the telescopic member 322 can be used to move the second adsorbent 33 closer to the placement stage, allowing for a more stable placement of the covering film 200 on the corresponding placement stage. As an example, the telescopic member 322 includes a telescopic cylinder capable of vertical extension and retraction to adjust the height of the second adsorbent 33.

[0096] To facilitate automated loading and unloading, reduce manual operation, and improve the measurement efficiency of the thickness gauge 1, in some embodiments, please refer to [the relevant documentation]. Figure 1 The thickness gauge 1 provided in this embodiment further includes a loading and unloading mechanism 40. The loading and unloading mechanism 40 includes a third moving member 41 disposed on the frame 10 and a third adsorption member 42 pulsatingly connected to the third moving member 41. The moving stroke of the third moving member 41 at least partially covers the first placement stage 23, and the third adsorption member 42 is configured to operate to have an adsorption force on the microporous sample 100 in a direction away from the first placement stage 23.

[0097] As an example, the third adsorption element 42 can be a negative pressure suction cup, which can continuously generate negative pressure to adsorb microporous sample 100.

[0098] This application does not limit the specific type of the third moving member 41, as long as it can drive the third adsorption member 42 to move closer to or further away from the microporous sample 100. In some embodiments, please refer to [further details]. Figure 1 The third moving member 41 includes an X-axis linear moving member 411, a Z-axis linear moving member 412 and a Y-axis linear moving member 413 connected in sequence, and the third adsorption member 42 is disposed on the Y-axis linear moving member 413.

[0099] During use, the X-axis linear motion component 411 can drive the Z-axis linear motion component 412 and the Y-axis linear motion component 413 connected to the Z-axis linear motion component 412 to move along the X-axis. Since the third adsorption component 42 is located at the Y-axis linear motion component 413, the third adsorption component 42 can move along the X-axis. After the X-axis linear motion component 411 moves the third adsorption component 42 to the target position on the X-axis, the Y-axis linear motion component 413 drives the third adsorption component 42 to move along the Y-axis to the target position on the Y-axis, so that the third adsorption component 42 is above the target microporous sample 100. Then, the Z-axis linear motion component 412 drives the Y-axis linear motion component 413 and the third adsorption component 42 connected to the Y-axis linear motion component 413 to move downward along the Z-axis, so that the third adsorption component 42 is close to the target microporous sample 100, and then the third adsorption component 42 is opened to adsorb the target sample. Then, the X-axis linear moving part 411, the Y-axis linear moving part 413 and the Z-axis linear moving part 412 are used to move the third adsorbent 42 adsorbed on the microporous sample 100 to the corresponding position, and the third adsorbent 42 is closed to separate the third adsorbent 42 from the microporous sample 100, thereby realizing the automatic feeding or automatic unloading of the microporous sample 100.

[0100] Furthermore, in some embodiments, the first moving member 22 is a linear moving member, and the moving direction of the first linear moving member is consistent with the moving direction of the Y-axis linear moving member 413. The third placement stage 43 is disposed on one side of the first placement stage 23 along the X-axis direction.

[0101] Furthermore, in some embodiments, please continue to refer to Figure 1 The third suction element 42 includes two negative pressure suction cups, which can be used for loading or unloading respectively. For ease of description, they are referred to below as the first negative pressure suction cup 421 and the second negative pressure suction cup 422. It is understood that this application is not intended to limit the third suction element 42 to having two negative pressure suction cups; in some embodiments, the third suction element 42 may include a single negative pressure suction cup.

[0102] Furthermore, to facilitate the placement of the microporous samples 100 to be tested and the separate placement of qualified and unqualified samples after testing, in some embodiments, please refer to [the documentation / reference needed]. Figure 1 The third placement stage 43 is provided with a first placement area 431, a second placement area 432, and a third placement area 433 spaced apart. A first negative pressure suction cup 421 is configured to pick up a new microporous sample 100 from the first placement area 431 and place it on the first adsorption element 31. A second negative pressure suction cup 422 is configured to pick up the measured microporous sample 100 from the first adsorption element 31 and place the measured microporous sample 100 in either the second placement area 432 or the third placement area 433. As an example, the second placement area 432 can be used to place qualified products, and the third placement area 433 can be used to place unqualified products.

[0103] Furthermore, in some embodiments, the first placement area 431, the second placement area 432, and the third placement area 433 are distributed at intervals along the Y-axis.

[0104] By connecting the first negative pressure suction cup 421 for loading and the second negative pressure suction cup 422 for unloading through the same set of linear moving parts, loading and unloading can be carried out continuously. This also saves the arrangement cost of the third moving part 41 and reduces the space occupancy rate of the thickness gauge 1.

[0105] As an example, during the thickness measurement process of the thickness measuring mechanism 20 on the microporous sample 100, the third moving component 41 can drive the first negative pressure suction cup 421 to move to the first placement area 431, open the first negative pressure suction cup 421 to pick up the new microporous sample 100 (the second negative pressure suction cup 422 will also move synchronously, but the second negative pressure suction cup 422 will not be opened at this time). After the thickness measurement is completed, the third moving component 41 drives the second negative pressure suction cup 422 to move to the first placement stage 23, open the second negative pressure suction cup 422 to pick up the microporous sample 100, and then the third moving component 41 moves the first negative pressure suction cup 421 to the first placement stage 23, closes the first negative pressure suction cup 421, and places the new microporous sample 100 on the first placement stage 23, realizing automatic feeding. Finally, based on the measurement results, the third moving component 41 moves the second negative pressure suction cup 422 to the corresponding second placement area 432 or third placement area 433, closes the second negative pressure suction cup 422, places the qualified microporous sample 100 in the second placement area 432, and places the unqualified microporous sample 100 in the third placement area 433, thus achieving automatic unloading. This cycle is repeated to achieve automatic loading and unloading of the microporous sample 100.

[0106] Alternatively, in other embodiments, to avoid the negative pressure suction cups damaging the microporous samples 100 during automatic loading and unloading due to height differences caused by inconsistent stacking quantities of microporous samples 100 in different material zones, the Y-axis linear motion component 413 can be connected to the X-axis linear motion component 411, and two Z-axis linear motion components 412 can be set at the Y-axis linear motion component 413. One Z-axis linear motion component 412 is connected to the first negative pressure suction cup 421, and the other Z-axis linear motion component 412 is connected to the second negative pressure suction cup 422. Thus, the heights of the first negative pressure suction cup 421 and the second negative pressure suction cup 422 can be adjusted independently using the two Z-axis linear motion components 412.

[0107] Furthermore, to facilitate the thickness gauge 1 in automatically placing the microporous sample 100 into the corresponding second placement area 432 or third placement area 433 based on the measurement results, in some embodiments, the thickness gauge 1 may also be equipped with a control system, using a programmable logic controller (PLC) as the control core. By writing corresponding control programs, the automatic control of the movement position of the third moving part 41 can be realized. For example, the thickness calculation formula is programmed into the PLC: Thickness = First distance L1 - Second distance L2 - Third distance L3. The first distance L1 is the distance between the first placement stage 23 and the laser probe 21, which can be pre-measured and input as a fixed value; the second distance L2 is the distance between the covering film 200 and the laser probe 21 as measured by the laser probe 21, and the corresponding signal is input from the laser probe 21 to the PLC to convert it into the value of the second distance L2; the third distance L3 is the distance between the two surfaces of the covering film 200 in the thickness direction, which can be pre-measured and input as a fixed value. The PLC is programmed with a range of acceptable values. If the PLC determines that all the measured thicknesses of the microporous sample 100 meet the acceptable range, it will control the third moving part 41 to move the second negative pressure suction cup 422 to the second placement area 432. If the PLC determines that the measured thickness of the microporous sample 100 has a value outside the acceptable range, it will control the third moving part 41 to move the second negative pressure suction cup 422 to the third placement area 433.

[0108] Furthermore, to facilitate the stable placement of the microporous sample 100 in the corresponding placement area, in some embodiments, a plurality of limiting posts 44 may be independently provided in the first placement area 431, the second placement area 432, and the third placement area 433; as an example, please refer to [further details needed]. Figure 1 A limiting post 44 is set at each of the four corners of the first rectangular placement area 431, a limiting post 44 is set at each of the four corners of the second rectangular placement area 432, and a limiting post 44 is set at each of the four corners of the third rectangular placement area 433.

[0109] Furthermore, the control system can also include a data processor and a control panel, employing an industrial-grade computer as the data processing core and equipped with a high-resolution LCD screen as the control panel. The data processor can receive data transmitted from the probe in real time, process the data through specific algorithms, form a thickness data matrix which is displayed on the screen in real time and then transmitted to the PLC. Simultaneously, the system stores the measurement data in a local database, supporting data query, export, and backup functions.

[0110] Furthermore, before each measurement begins, the thickness gauge 1 automatically calibrates, measures the thickness of the covering film 200, and updates the data.

[0111] In a second aspect, embodiments of this application also provide a method for measuring the thickness of a microporous sample 100, comprising: Using the thickness gauge 1 provided in this application embodiment, the microporous sample 100 is placed on the first adsorption member 31, the covering film 200 is covered on the surface of the microporous sample 100, the first adsorption member 31 is opened, and the covering film 200 is sucked tightly.

[0112] Turn on the laser probe 21 so that the laser emitted by the laser probe 21 can illuminate the surface of the covering film 200, and measure the second distance L2 between the covering film 200 and the laser probe 21.

[0113] There is a first distance between the first adsorption element 31 and the laser probe 21, and a third distance L3 between the two surfaces of the covering film 200 in the thickness direction. The thickness of the microporous sample 100 is equal to the first distance - the second distance L2 - the third distance L3.

[0114] Furthermore, before testing the sample, the thickness of the covering film 200 can be measured first, i.e., the third distance L3 can be measured first. The method for measuring the third distance L3 includes: Place the covering film 200 on the first adsorption member 31, open the first adsorption member 31, and then tighten the covering film 200.

[0115] The laser probe 21 is turned on so that the laser emitted by the laser probe 21 can illuminate the surface of the covering film 200, and the fourth distance between the covering film 200 and the laser probe 21 is measured. The third distance L3 = the first distance L1 - the fourth distance. Testing the thickness of the covering film 200 first on the thickness line of the microporous samples 100 in batch testing can improve the accuracy of the measurement results of the microporous samples 100.

[0116] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A thickness gauge, characterized in that, Includes the frame, thickness measuring mechanism, and coating mechanism; The thickness measuring mechanism includes at least one laser probe disposed on the frame and a first placement stage, wherein at least a portion of the first placement stage is located within the irradiation range of the laser probe; The coating mechanism includes a first adsorption element for placing a microporous sample and disposed on the first placement stage. The first adsorption element is configured to have an adsorption force on the microporous sample and a coating film placed on the surface of the microporous sample in a direction close to the first placement stage.

2. The thickness gauge according to claim 1, characterized in that, The thickness measuring mechanism includes a first moving component that is pulsatorically connected to the first placement platform, and the movement stroke of the first moving component is at least partially within the irradiation range of the laser probe. Optionally, the thickness measuring mechanism includes at least two laser probes, and the measuring ranges of two adjacent laser probes overlap each other; Optionally, at least two of the laser probes are arranged in a line; the first movable member is operable to move the first placement platform back and forth along a first direction, the first direction being staggered with the arrangement direction of the at least two laser probes; Optionally, the first moving component is a linear guide rail, and the first placement platform is slidably connected to the linear guide rail via a slider; Optionally, the first adsorption element is an adsorption plate disposed in the first placement platform, and the adsorption plate is provided with adsorption holes.

3. The thickness gauge according to claim 1, characterized in that, The coating mechanism further includes a second movable member disposed on the frame and a second adsorption member pulsatingly connected to the second movable member; the movement stroke of the second movable member at least partially covers the first placement stage, and the second adsorption member is configured to have an adsorption force on the coating film in a direction away from the first placement stage.

4. The thickness gauge according to claim 3, characterized in that, The second adsorption element includes at least one negative pressure suction nozzle; Optionally, the second adsorption element includes at least two negative pressure nozzles spaced apart; Optionally, at least two of the negative pressure nozzles are arranged circumferentially spaced along the covering film.

5. The thickness gauge according to claim 3, characterized in that, The frame is also provided with a second placement platform for storing the covering film, and the travel of the second moving part at least partially covers the first placement platform and the second placement platform; Optionally, the second moving member includes a rotating member disposed on the frame, the rotating member being operable to rotate the second adsorption member to the first placement table or the second placement table; Optionally, the second moving member further includes a telescopic member, and the second adsorption member is connected to the rotating member through the telescopic member; Optionally, the rotating component includes a rotary cylinder; Optionally, the telescopic component includes a telescopic cylinder.

6. The thickness gauge according to claim 1, characterized in that, The thickness gauge further includes a loading and unloading mechanism; the loading and unloading mechanism includes a third moving part disposed on the frame and a third adsorption part pulsatingly connected to the third moving part; the moving stroke of the third moving part at least partially covers the first placement stage, and the third adsorption part is configured to be operable to have an adsorption force on the microporous sample in a direction away from the first placement stage.

7. The thickness gauge according to claim 6, characterized in that, The third moving component includes an X-axis linear moving component, a Z-axis linear moving component, and a Y-axis linear moving component connected in sequence, and the third adsorption component is disposed on the Y-axis linear moving component.

8. The thickness gauge according to claim 6, characterized in that, The third adsorption element includes a first negative pressure suction cup and a second negative pressure suction cup spaced apart. The first negative pressure suction cup is configured to pick up new microporous samples and place them on the first placement stage, and the second negative pressure suction cup is configured to pick up the measured microporous samples from the first placement stage.

9. The thickness gauge according to claim 8, characterized in that, The frame is also provided with a third placement platform, which is provided with a first placement area, a second placement area and a third placement area distributed at intervals; the third moving part can operate to drive the first negative pressure suction cup back and forth between the first placement platform and the first placement area; the third moving part can operate to drive the second negative pressure suction cup back and forth between the first placement platform, the second placement area or the third placement area; Optionally, the first placement area, the second placement area, and the third placement area are each independently provided with a number of limiting columns.

10. A method for measuring the thickness of a microporous sample, characterized in that, Using the thickness gauge according to any one of claims 1 to 9, the microporous sample is placed on the first adsorption member, the covering film is covered on the surface of the microporous sample, the first adsorption member is opened, and the covering film is tightly adsorbed. Turn on the laser probe so that the laser emitted by the laser probe can illuminate the surface of the covering film, and measure the second distance between the covering film and the laser probe; There is a first distance between the first adsorption element and the laser probe, and a third distance between the two surfaces of the covering film in the thickness direction; the thickness of the microporous sample = the first distance - the second distance - the third distance.

11. The measurement method according to claim 10, characterized in that, The method for measuring the third distance includes: Place the covering film on the first adsorption member, open the first adsorption member to firmly adhere the covering film; Turn on the laser probe so that the laser emitted by the laser probe can illuminate the surface of the covering film, and measure the fourth distance between the covering film and the laser probe; The third distance = the first distance - the fourth distance.

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