Aerodynamic lens automatic calibration system and calibration method thereof

Abstract

The invention discloses an aerodynamic lens automatic calibration system, which obtains two-dimensional / three-dimensional space distribution of beam spots through probe scanning and signal fitting, realizes visual and quantitative monitoring of a particle beam state, and is convenient to judge alignment quality or beam shape abnormity. The system can autonomously identify beam center offset and angle error, and drive the lens platform to carry out submillimeter fine tuning, so that automatic alignment without manual intervention is realized; signal acquisition, fitting analysis, driving adjustment and data updating are carried out in real time, a complete feedback adjustment mechanism is formed, the debugging time is effectively shortened, and the calibration efficiency is improved; the parameter automatic storage and callback function ensures that multiple experiment conditions are consistent, human error interference is avoided, and the overall experiment reliability and result comparability are improved.

Description

Technical Field

[0001] This invention relates to the field of particle beam adjustment technology, and more specifically to an automatic calibration system for aerodynamic lenses. Background Technology

[0002] Aerodynamic lenses (ADLs), as core components for particle beam collimation and focusing, are widely used in instruments such as aerosol mass spectrometry (AMS) and single-particle aerosol mass spectrometry (SPA-MS), as well as in online monitoring of atmospheric particulate matter and aerospace particle analysis. Traditional ADLs utilize a series of coaxially mounted lenses with sequentially contracting and expanding apertures to achieve radial focusing and axial collimation of the particle beam through the relative motion between the carrier gas and the particles.

[0003] In aerosol mass spectrometry, ADL (Advanced Dynamic Ligament) is primarily used to effectively focus micron and submicron particles in environmental aerosols into the ionization region, ensuring high ionization efficiency and stable signal intensity. Furthermore, ADL is frequently used in various fields such as pollution source emission monitoring, online sampling of combustion particulate matter, vapor deposition of nanomaterials, path control of sprayed drug delivery, and particle behavior studies under microgravity. Any experimental system requiring collimation, shaping, and guidance of particle beams can utilize an ADL structure.

[0004] Existing technologies rely on manually moving the aerodynamic lens and combining this with the trend of single-point ion signal changes to determine whether it is aligned with the center of the mass spectrometry ion source. However, this method has the following drawbacks: it lacks real-time monitoring of the spatial distribution of the particle beam, making it difficult to determine beam distortion or positional shift; it lacks an automatic feedback adjustment mechanism, allowing only rough adjustments by manual means, resulting in a time-consuming calibration process with poor repeatability; it lacks a system capable of acquiring high-resolution particle beam cross-sectional information and driving the aerodynamic lens for fine alignment; and it cannot achieve automatic alignment of the particle beam center and the ion source center in multiple degrees of freedom (including translation and angle). Therefore, we propose an automatic aerodynamic lens calibration system. Summary of the Invention

[0005] The purpose of this invention is to provide an automatic aerodynamic lens calibration system to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention specifically adopts the following technical solution: An automatic calibration system for an aerodynamic lens includes: an aerodynamic lens (102) and a mass spectrometry cavity (106); characterized in that, The aerodynamic lens (102) is used to focus the input sample airflow (101) step by step into fine aerosol particle beams (108). A mass spectrometer (114) is provided on the output side of the mass spectrometer cavity (106). A set of controllable movable probes (110) are arranged in the ion source inlet area downstream of the aerodynamic lens (102). The probes (110) are connected to the particle beam detection three-dimensional platform (111). The probes (110) are connected to the host computer (115) through the FPGA processing module (116). The FPGA processing module (116) is connected to the angle adjustment two-dimensional platform (103) and the position adjustment two-dimensional platform (104) through network signals. Both the angle adjustment two-dimensional platform (103) and the position adjustment two-dimensional platform (104) are connected to the aerodynamic lens (102). The host computer (115) is connected to the mass spectrometer (114).

[0007] Furthermore, the aerodynamic lens is fixed to the mass spectrometer cavity by a fixing clamp.

[0008] Furthermore, a buffer pad is provided between the fixing clamp and the aerodynamic lens.

[0009] Furthermore, the angle adjustment two-dimensional platform and the position adjustment two-dimensional platform are used to adjust the position and angle of the ion beam.

[0010] Furthermore, the mass spectrometer chamber is also equipped with multiple molecular pumps, which are used to maintain the vacuum level of the mass spectrometer chamber.

[0011] Furthermore, the particle beam detection 3D platform supports fine and stable movement in the X / Y / Z axis directions to achieve high spatial resolution scanning of the particle beam cross-section.

[0012] Furthermore, the mass spectrometer includes an ion source receiving area and an ion lens, wherein the ion source receiving area is used to ionize the ion beam, and the ion lens is used to shape the ionized ion beam.

[0013] A calibration method for an automatic aerodynamic lens calibration system includes the following steps: Step 1: The host computer records the X / Y plane scanning results at different Z-axis positions and determines whether the offset value of the particle beam center in multiple scanning results is within the threshold. Step 2: If the offset value exceeds the threshold, use a software algorithm to convert the offset value into the distance that the angle adjustment 2D platform needs to move in the X / Y direction; Step 3: The host computer sends the distance information to be moved to the FPGA processing module and sends the adjustment parameters to the angle adjustment two-dimensional platform. The angle of the aerodynamic lens is adjusted with the fixed clamp as the fulcrum until the feedback offset value is within the threshold. Step 4: The host computer determines the distance between the particle beam center and the center of the ion source receiving area, and converts it into the distance that the aerodynamic lens needs to move in the X / Y direction according to the algorithm. Step 5: The host computer sends the distance information to be moved to the FPGA processing module and simultaneously sends the adjustment parameters to the angle adjustment two-dimensional platform and the position adjustment two-dimensional platform to ensure that the particle beam is horizontally incident. Step 6: The angle adjustment two-dimensional platform and the position adjustment two-dimensional platform make minute adjustments to the X / Y axis position of the aerodynamic lens until the host computer determines that the center of the particle beam coincides with the geometric center of the ion source inlet. Step 7: After calibration, the host computer automatically saves the position parameters and supports reading historical calibration data.

[0014] Furthermore, the number of scans in step 1 is 5.

[0015] The beneficial effects of this invention are as follows: This invention acquires the two-dimensional / three-dimensional spatial distribution of the beam spot through probe scanning and signal fitting, enabling intuitive quantitative monitoring of the particle beam state and facilitating the judgment of alignment quality or beam shape anomalies. The system can autonomously identify beam center offset and angular error, driving the lens platform to perform sub-millimeter-level fine adjustments, achieving automatic alignment without manual intervention. Real-time signal acquisition, fitting analysis, driving adjustments, and data updates form a complete feedback adjustment mechanism, effectively reducing debugging time and improving calibration efficiency. The automatic parameter saving and callback functions ensure consistent experimental conditions across multiple experiments, avoiding human error interference and improving overall experimental reliability and result comparability. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the embodiments will be briefly introduced below. The drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a structural diagram of the main body of the present invention; Figure 2 This is a schematic diagram of the L-shaped inert probe blocking part of the particle beam at different positions in this invention; Figure 3 This is a scanning process diagram obtained by the L-shaped inert probe in the X / Y axis direction in this invention; Figure 4This is a scanning process diagram obtained by the L-shaped inert probe in the Z-axis direction in this invention.

[0018] Figure reference numerals: 101, Sample gas flow; 102, Aerodynamic lens; 103, Angle-adjustable two-dimensional platform; 104, Position-adjustable two-dimensional platform; 105, Fixing clamp; 106, Mass spectrometer chamber; 107, Buffer pad; 108, Aerosol particle beam; 109, Pressure differential isolation orifice; 110, L-shaped inert probe rod; 111, Particle beam detection three-dimensional platform; 112, Ion source receiving area; 113, Ion lens; 114, Mass spectrometer analyzer; 115, Host computer; 116, FPGA processing module; 117, Molecular pump. Detailed Implementation

[0019] The present invention will now be described in further detail with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0020] It should be noted that the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0021] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "fixation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between the components; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0022] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0023] In the above description, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0024] Please see Figure 1 The present invention provides an automatic calibration system for an aerodynamic lens, comprising: a sample airflow 101, an aerodynamic lens 102, and a mass spectrometry cavity 106; the aerodynamic lens 102 is used to focus the sample airflow 101 stepwise into fine aerosol particle beams 108. The mass spectrometer cavity 106 has a pressure difference isolation hole 109 inside, and the output side of the mass spectrometer cavity 106 is provided with an ion source receiving area 112 and an ion lens 113. A set of controllable L-shaped inert probes 110 are arranged in the ion source inlet area downstream of the aerodynamic lens 102. The L-shaped inert probes 110 are connected to the particle beam detection three-dimensional platform 111. The L-shaped inert probes 110 are connected to the FPGA processing module 116 via network signals. The FPGA processing module 116 is connected to the host computer 115 via network signals. The stepping information of the L-shaped inert probes 110 is recorded by the FPGA processing module 116 and returned to the host computer 115. The FPGA processing module 116 is connected to the angle adjustment two-dimensional platform 103 and the position adjustment two-dimensional platform 104 via network signals. Both the angle adjustment two-dimensional platform 103 and the position adjustment two-dimensional platform 104 are connected to the aerodynamic lens 102. The host computer 115 is also connected to a mass spectrometer 114, and the mass spectrometry information collected by the mass spectrometer 114 is also uploaded to the host computer 115 in real time.

[0025] By integrating a surface inert metal probe assembly into the sampling path, a two-dimensional scanning of the particle beam is achieved through obstruction. The L-shaped inert probe 110 is fixed to the three-dimensional particle beam detection platform 111 to achieve planar scanning in the X / Y directions and height adjustment in the Z-axis. The cross-sectional distribution of the particle beam is established by measuring the signal intensity changes of the obstructed particle beam at different positions. Beam shape fitting calculations are performed in the processor to obtain the particle beam center position, divergence angle, and beam width parameters. The aerodynamic lens is controlled to finely adjust in the X / Y axis directions and angles to ensure that the particle beam output is accurately aligned with the sampling port.

[0026] When the instrument is turned on for sampling, the sample gas flow 101 is focused step by step into a fine collimated aerosol particle beam 108 by the aerodynamic lens 102. The aerodynamic lens 102 is fixed to the mass spectrometer cavity 106 by the fixing clamp 105. A buffer pad 107 is provided between the fixing clamp 105 and the aerodynamic lens 102 to facilitate the adjustment of the lens position / angle. The mass spectrometer cavity 106 is a vacuum environment. The pressure is gradually reduced through the pressure difference isolation hole 109 and the vacuum degree is maintained by the molecular pump 117. After the particle beam reaches the ion source receiving area 112, it is ionized and then shaped by the ion lens 113 before entering the mass spectrometer analyzer 114 to form a mass spectrometry signal, which is finally transmitted to the host computer 115.

[0027] A set of controllable L-shaped inert probes 110 are arranged in the ion source inlet region downstream of the aerodynamic lens 102. The probes are L-shaped, made of inert metal material, and have good chemical stability and surface characteristics that do not easily adsorb aerosols. The L-shaped inert probes 110 are connected to a particle beam detection three-dimensional platform 111 composed of a three-axis motor. The platform supports fine and stable movement in the X / Y / Z axis directions, thereby realizing high spatial resolution scanning of the particle beam cross section.

[0028] like Figure 2 , Figure 3 , Figure 4 During the scanning process shown, the L-shaped inert probe 110 partially blocks the particle beam at different positions. Its stepping information is recorded by the FPGA processing module 116 and returned to the host computer 115. Simultaneously, the mass spectrometry information acquired by the mass spectrometer detector is also uploaded to the host computer 115 in real time. The host computer 115 combines the two information to detect the change in ion signal intensity corresponding to the position of the L-shaped inert probe 110. Figure 3 The diagram shows the scanning process acquired by the L-shaped inert probe 110 in the X / Y axis directions, which can obtain information on the beam width and concentration distribution of the aerosol particle beam 108. Figure 4 The diagram shows the scanning process obtained by the L-shaped inert probe 110 in the Z-axis direction, repeated at different Z-axis positions (1), (2), and (3). Figure 3 The motion trajectory shown can be used to obtain the divergence and deflection angle information of the aerosol particle beam 108 by the offset value of the particle beam center and the particle beam broadening in three scans. By recording the data of each detection point as the "occlusion response value" of that location, sampling at multiple locations and combining the signal intensity distribution, key parameters such as the center position, beam width and deflection angle of the particle beam can be deduced by the upper computer software algorithm. In order to improve the imaging accuracy, the system has a built-in two-dimensional or three-dimensional fitting algorithm to automatically process the particle beam detection data and output the particle beam intensity distribution image.

[0029] By scanning with probes and fitting signals, the two-dimensional / three-dimensional spatial distribution of the beam spot is obtained, enabling intuitive quantitative monitoring of the particle beam state and facilitating the judgment of alignment quality or beam shape anomalies. The system can autonomously identify beam center offset and angular error, driving the lens platform to perform sub-millimeter-level fine adjustments, achieving automatic alignment without manual intervention. Real-time signal acquisition, fitting analysis, driving adjustments, and updating data form a complete feedback adjustment mechanism, effectively reducing debugging time and improving calibration efficiency. The automatic parameter saving and callback functions ensure consistent experimental conditions across multiple experiments, avoiding human error interference and improving overall experimental reliability and result comparability.

[0030] In this embodiment, preferably, the aerodynamic lens 102 is fixed to the mass spectrometer cavity 106 by a fixing clamp 105.

[0031] In this embodiment, preferably, a buffer pad 107 is provided between the fixing clamp 105 and the aerodynamic lens 102.

[0032] In this embodiment, preferably, the angle adjustment two-dimensional platform 103 and the position adjustment two-dimensional platform 104 are used to realize the position and angle adjustment of the ion beam.

[0033] In this embodiment, preferably, the mass spectrometer chamber 106 is also equipped with a plurality of molecular pumps 117, which are used to maintain the vacuum level of the mass spectrometer chamber 106.

[0034] In this embodiment, preferably, the particle beam detection three-dimensional platform 111 supports fine and stable movement in the X / Y / Z axis directions to achieve high spatial resolution scanning of the particle beam cross-section.

[0035] In this embodiment, preferably, the ion source receiving area 112 is used to ionize the ion beam, and the ion lens 113 is used to shape the ion beam after ionization.

[0036] The calibration method of the automatic aerodynamic lens calibration system of the present invention includes the following steps: Step 1: The host computer 115 records the X / Y plane scanning results at different Z-axis positions and determines whether the offset value of the particle beam center in the results of multiple default 5 scans is within the threshold, such as 0.2mm to 0.5mm. Step 2: If the offset value exceeds the threshold, the software algorithm is used to convert the offset value into the distance that the angle adjustment two-dimensional platform 103 needs to move in the X / Y direction; Step 3: The host computer 115 sends the distance information to be moved to the FPGA processing module 116 and sends the adjustment parameters to the angle adjustment two-dimensional platform 103. The angle of the aerodynamic lens 102 is adjusted with the fixed clamp 105 as the fulcrum until the feedback offset value is within the threshold. Step 4: The host computer 115 determines the distance offset between the particle beam center and the center of the ion source receiving area 112, and converts it into the distance that the aerodynamic lens 102 needs to move in the X / Y direction according to the algorithm. Step 5: The host computer 115 sends the distance information to be moved to the FPGA processing module 116 and simultaneously sends the adjustment parameters to the angle adjustment two-dimensional platform 103 and the position adjustment two-dimensional platform 104 to ensure that the particle beam is horizontally incident. Step 6: The angle adjustment two-dimensional platform 103 and the position adjustment two-dimensional platform 104 make slight adjustments to the X / Y axis position of the aerodynamic lens 102 until the host computer 115 determines that the center of the particle beam coincides with the geometric center of the ion source inlet. Step 7: After calibration, the host computer 115 automatically saves the position parameters and supports reading historical calibration data.

[0037] The above descriptions are merely some embodiments of the present invention. Those skilled in the art can make various modifications and improvements without departing from the inventive concept of the present invention, and these all fall within the scope of protection of the present invention.

Claims

1. An automatic aerodynamic lens calibration system, comprising: An aerodynamic lens (102) and a mass spectrometry cavity (106); characterized in that, The aerodynamic lens (102) is used to focus the input sample airflow (101) step by step into fine aerosol particle beams (108). A mass spectrometer (114) is provided on the output side of the mass spectrometer cavity (106). A set of controllable movable probes (110) are arranged in the ion source inlet area downstream of the aerodynamic lens (102). The probes (110) are connected to the particle beam detection three-dimensional platform (111). The probes (110) are connected to the host computer (115) through the FPGA processing module (116). The FPGA processing module (116) is connected to the angle adjustment two-dimensional platform (103) and the position adjustment two-dimensional platform (104) through network signals. Both the angle adjustment two-dimensional platform (103) and the position adjustment two-dimensional platform (104) are connected to the aerodynamic lens (102). The host computer (115) is connected to the mass spectrometer (114).

2. The automatic aerodynamic lens calibration system according to claim 1, characterized in that, The aerodynamic lens (102) is fixed to the mass spectrometer cavity (106) by a fixing clamp (105).

3. The automatic aerodynamic lens calibration system according to claim 2, characterized in that, A buffer pad (107) is provided between the fixing clamp (105) and the aerodynamic lens (102).

4. The automatic aerodynamic lens calibration system according to claim 1, characterized in that, The angle adjustment two-dimensional platform (103) and the position adjustment two-dimensional platform (104) are used to adjust the position and angle of the ion beam.

5. The automatic aerodynamic lens calibration system according to claim 1, characterized in that, The mass spectrometer chamber (106) is also equipped with a plurality of molecular pumps (117) for maintaining the vacuum level of the mass spectrometer chamber (106).

6. The automatic aerodynamic lens calibration system according to claim 1, characterized in that, The particle beam detection three-dimensional platform (111) supports fine and stable movement in the X / Y / Z axis directions to achieve high spatial resolution scanning of the particle beam cross section.

7. The automatic aerodynamic lens calibration system according to claim 1, characterized in that, The mass spectrometer (114) includes an ion source receiving area (112) and an ion lens (113), wherein the ion source receiving area (112) is used to ionize the ion beam and the ion lens (113) is used to shape the ionized ion beam.

8. A calibration method for an automatic aerodynamic lens calibration system according to any one of claims 1-7, characterized in that, Includes the following steps: Step 1: The host computer (115) records the X / Y plane scanning results at different Z-axis positions and determines whether the offset value of the particle beam center in multiple scanning results is within the threshold. Step 2: If the offset value exceeds the threshold, the software algorithm is used to convert the offset value into the distance that the angle adjustment two-dimensional platform (103) needs to move in the X / Y direction; Step 3: The host computer (115) sends the distance information to be moved to the FPGA processing module (116) and sends the adjustment parameters to the angle adjustment two-dimensional platform (103). The angle of the aerodynamic lens (102) is adjusted with the fixed clamp (105) as the fulcrum until the feedback offset value is within the threshold. Step 4: The host computer (115) determines the distance between the particle beam center and the center of the ion source receiving area (112), and converts it into the distance that the aerodynamic lens (102) needs to move in the X / Y direction according to the algorithm. Step 5: The host computer (115) sends the distance information to be moved to the FPGA processing module (116) and simultaneously sends the adjustment parameters to the angle adjustment two-dimensional platform (103) and the position adjustment two-dimensional platform (104) to ensure that the particle beam is horizontally incident. Step 6: The angle adjustment two-dimensional platform (103) and the position adjustment two-dimensional platform (104) make slight adjustments to the X / Y axis position of the aerodynamic lens (102) until the host computer (115) determines that the center of the particle beam and the geometric center of the ion source entrance are highly coincident. Step 7: After calibration, the host computer (115) automatically saves the position parameters and supports reading historical calibration data.

9. The calibration method for an automatic aerodynamic lens calibration system according to claim 8, characterized in that, The number of scans in step 1 is 5.

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