Chemical reagent container cleaning device and using method

Abstract

The invention provides a chemical reagent container cleaning device and a use method, and relates to the technical field of chemical reagent container cleaning, and the chemical reagent container cleaning device comprises a cleaning fluid preparation system, a container cleaning system, a cleaning quality detection system and a control system which are connected in sequence. The cleaning fluid preparation system comprises a cleaning fluid water tank, a plurality of solution storage tanks and an ultrapure water storage tank, and the cleaning fluid water tank is connected with the solution storage tanks and the ultrapure water storage tank. The container cleaning system comprises a water flow nozzle, a container fixing base, a driving motor and a transmission mechanism connected with the driving motor and the container fixing base, the container fixing base is arranged on the transmission mechanism, the water flow nozzle is arranged on the container fixing base and connected with the cleaning liquid water tank, and the transmission mechanism is used for driving the container fixing base to rotate. Full automation of electronic-grade chemical reagent container cleaning is achieved, and the cleaning precision and efficiency are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chemical reagent container cleaning, in particular to a chemical reagent container cleaning device and a use method thereof. BACKGROUND

[0002] Electronic-grade chemical reagents are a general term for chemicals used in the production process of electronic components. Compared with general industry, the performance requirements are higher than ever before. Electronic-grade chemical reagents have more stringent requirements for metal impurity content, particle content, and filling environment. Due to the above reasons, the cleaning of the containers for electronic-grade chemical reagents requires a more stringent procedure. Manual cleaning often requires a lot of manpower and resources, and it is not accurate and timely to determine whether the container is clean, which reduces the cleaning efficiency.

[0003] The existing manual cleaning method has many limitations. First, the cleaning process is highly dependent on the experience and skill level of the operator, and the cleaning effect of different operators often varies greatly, making it difficult to achieve standardized operation. Second, manual cleaning cannot accurately control the key parameters such as the ratio of cleaning solution, temperature, and cleaning time, which can lead to incomplete cleaning or over-cleaning. Third, manual cleaning cannot objectively and timely assess the cleaning effect, mainly relying on experience to determine whether the container is clean, lacking scientific detection means.

[0004] Some existing automatic cleaning equipment has improved cleaning efficiency to some extent, but still has many shortcomings. These devices often have single functions and cannot adjust cleaning parameters according to the characteristics and contamination levels of different containers, making them less adaptable. At the same time, existing devices lack precise control over the preparation and temperature control of cleaning solutions, making it difficult to ensure that the concentration and temperature of the cleaning solution are always at the optimal state. In addition, most existing devices lack effective cleaning quality monitoring mechanisms and cannot determine whether the cleaning has achieved the desired effect in real time.

[0005] In terms of cleaning mechanism, the contaminants on the surface of electronic-grade chemical reagent containers usually include organic substances, inorganic particles, and various metal ions. These contaminants interact with the container surface in complex ways, including physical adsorption, chemical bonding, and other forms. Effective cleaning not only requires appropriate cleaning agents, but also requires appropriate physical forces and temperature conditions. Traditional cleaning methods often only focus on the role of chemical cleaning agents, ignoring the importance of physical factors, resulting in unsatisfactory cleaning results.

[0006] The Chinese patent document CN116116832B discloses an in-situ cleaning method based on conductivity signal and time hybrid control, discloses a technical solution for realizing automatic cleaning of a pipeline system through mixed control of conductivity signal and time parameters, and has the technical effects of improving cleaning efficiency and saving cleaning water, but still has the problems of mainly aiming at pipeline cleaning, being unable to be applied to container cleaning, and lacking special design for special requirements of electronic-grade chemical reagent containers.

[0007] The Chinese patent document CN222365005U discloses a cleaning liquid treatment device of an immune analyzer, discloses a technical solution for realizing automatic preparation of cleaning liquid through a liquid preparation module, and has the technical effects of improving cleaning liquid preparation precision and automation level, but still has the problems of only providing cleaning liquid preparation function and lacking complete cleaning execution mechanism, and being unable to meet the extremely high cleanliness requirements of electronic-grade chemical reagent containers. SUMMARY

[0008] The purpose of the present application is to provide a chemical reagent container cleaning device and use method which realizes automatic and intelligent cleaning, guarantees cleaning quality, improves cleaning efficiency, and reduces production cost.

[0009] To achieve the above purpose, the present application realizes the following technical solutions: A chemical reagent container cleaning device, comprising a cleaning liquid preparation system, a container cleaning system, a cleaning quality detection system and a control system connected in sequence; The cleaning liquid preparation system comprises a cleaning liquid water tank, a solution storage tank and an ultrapure water storage tank, the cleaning liquid water tank is connected with the solution storage tank and the ultrapure water storage tank respectively, the number of the solution storage tanks is multiple, and the container cleaning system is connected with the ultrapure water storage tank and the cleaning liquid water tank respectively; The container cleaning system comprises a water flow nozzle, a container fixing base, a driving motor and a transmission mechanism connecting the driving motor and the container fixing base; the container fixing base is arranged on the transmission mechanism, the water flow nozzle is arranged on the container fixing base, and the water flow nozzle is connected with the cleaning liquid water tank; and the transmission mechanism is used for driving the container fixing base to rotate; The cleaning quality detection system comprises a cleaning liquid collector and a conductivity meter, the conductivity meter is arranged in the cleaning liquid collector, the cleaning liquid collector is connected with the container fixing base through a cleaning liquid outlet pipe, and the cleaning liquid collector is connected with a cleaning liquid drain pipe; The control system comprises a foot pedal switch and a conductivity-driving motor switch interlocking device, the foot pedal switch is connected with the driving motor, and the conductivity-driving motor switch interlocking device is connected with the conductivity meter and the foot pedal switch respectively.

[0010] Further, the cleaning solution preparation system further comprises a heating system, which is arranged between the cleaning solution preparation system and the container cleaning system. The heating system comprises a water heating circulating pump and a water heater, wherein a thermometer is arranged on the water heating circulating pump and connected with the water heater.

[0011] Further, water collecting pumps are arranged on the liquid outlet pipelines of the cleaning solution water tank, the solution storage tank and the ultrapure water storage tank respectively.

[0012] Further, the water flow nozzle is fixed on the container fixing base and is perpendicular to the ground; the cleaning quality detection system further comprises an electric conductivity display instrument, which is connected with the electric conductivity-drive motor switch interlocking device through the electric conductivity display instrument.

[0013] Further, the bottom surface of the container fixing base has a diameter ranging from 10 cm to 50 cm, and the container fixing base is arranged at an angle with the ground, and the angle ranges from 20° to 40°.

[0014] Further, one end of the worm is connected with a drive motor, and the other end is connected with a vertical plate, and the vertical plate is provided with a vertical plate base at the bottom.

[0015] Further, the transmission mechanism comprises a worm, a first worm wheel, a second worm wheel, a third worm wheel, a first transmission pipe and a second transmission pipe, the drive motor drives the first worm wheel to rotate through the worm, and then drives the first transmission pipe arranged on the first worm wheel and the second worm wheel installed at one end of the first transmission pipe to rotate, the second worm wheel drives the third worm wheel to rotate, and the second transmission pipe is arranged on the third worm wheel.

[0016] Further, a time control switch is arranged on the connecting line between the cleaning solution water tank and the container cleaning system, and a switch is arranged on the connecting line between the ultrapure water storage tank and the container cleaning system.

[0017] An electronic grade chemical reagent container cleaning method, comprising the following steps: S1: according to the type of the container to be cleaned, adding corresponding chemical reagents into a plurality of solution storage tanks respectively, injecting ultrapure water into an ultrapure water storage tank, and adjusting the liquid pumping speed of each water pump to prepare the required cleaning solution in the cleaning solution water tank; S2: starting the water heating circulating pump and setting the required temperature, and controlling the cleaning solution temperature through the thermometer; S3: setting the electric conductivity threshold of the electric conductivity-drive motor switch interlocking device; S4: adjusting the container fixing base to adapt to the size of the container to be cleaned, and adjusting the angle of the container fixing base with the ground; S5: Fix the container to be cleaned on the container fixing base, start the foot pedal switch, and drive the motor to rotate the container fixing base through the transmission mechanism; S6: Set the opening time of the time control switch, use the prepared cleaning solution for the first round of cleaning, and use the switch to switch to ultrapure water for the second round of cleaning when the set time is reached; S7: The aqueous solution after the second round of cleaning flows into the cleaning solution collector through the cleaning solution outlet pipe, the conductivity of the cleaning solution is detected using a conductivity meter, and when the conductivity reaches a preset threshold, the conductivity-drive motor switch interlock device automatically closes the drive motor, completing the cleaning.

[0018] Further: The cleaning solution prepared in S1 is an alkaline solution containing hydrogen peroxide and ammonia hydroxide. Hydrogen peroxide is used to oxidize the surface of the container and the particulate contaminants, and the hydroxyl ions in ammonia hydroxide are used to accumulate negative charges on the surface of the container and the particles to achieve charge repulsion removal.

[0019] Compared with the prior art, the present application has the following beneficial effects: I. Compared with the traditional manual cleaning method, the present application realizes full automation of the cleaning of electronic-grade chemical reagent containers. Through the design of multiple storage tanks in the cleaning solution preparation system and the control of the water pump, the most suitable cleaning solution can be prepared according to the pollution characteristics of different containers, with high preparation accuracy and good reproducibility, avoiding errors and inconsistencies in the manual preparation process.

[0020] II. The present application adopts a container rotating cleaning method, in which the drive motor drives the container fixing base to rotate stably through a multi-stage worm gear transmission mechanism, and cooperates with a fixed-angle water jet nozzle to ensure that the cleaning solution can cover every corner of the inner wall of the container, achieving 360-degree omnidirectional cleaning and completely solving the problem of cleaning dead angles existing in traditional static cleaning methods.

[0021] III. The present application uses real-time conductivity monitoring and automatic control system. When the conductivity of the cleaning solution reaches a preset threshold, the conductivity-drive motor switch interlock device automatically stops the cleaning process, avoiding the problem of insufficient or excessive cleaning caused by relying on experience in traditional methods, and ensuring that each cleaning can reach a consistent standard.

[0022] IV. The present application uses the synergistic cleaning mechanism of hydrogen peroxide and ammonia hydroxide. The strong oxidizing action of hydrogen peroxide can effectively decompose organic contaminants, and the charge repulsion action of hydroxyl ions can remove inorganic particles. The two mechanisms cooperate with each other, significantly improving the removal efficiency of various contaminants, and meeting the extremely high cleanliness requirements of electronic-grade chemical reagent containers.

[0023] Fifthly, the application controls the temperature of the cleaning liquid through the heating system, so that the cleaning can be carried out under the most suitable temperature condition, and the activity and decontamination ability of the cleaning agent are improved.

[0024] Sixthly, compared with the existing pipeline cleaning technology, the application is specially designed for the container cleaning requirement, and the adjustable container fixing base is suitable for containers with different specifications, so that the device has high universality. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 A structure schematic view of a chemical reagent container cleaning device provided by the application is provided. Figure 2 A structure schematic view of a transmission motor unit of a chemical reagent container cleaning device provided by the application is provided. Figure 3 A flow chart of a chemical reagent container cleaning method provided by the application is provided. Figure 4 A process schematic view of oxidation and dissolution of particles in hydrogen peroxide is provided. Figure 4 (A) in the figure is a schematic view of particles adsorbed to the surface of a container to be cleaned, Figure 4 (B) in the figure is a schematic view of the surface of the container to be cleaned oxidized by hydrogen peroxide, Figure 4 (C) in the figure is a schematic view of particles dissolved and separated from the surface. Figure 5 A process schematic view of particles removed by repulsion of negative charges is provided. Figure 5 (A) in the figure is a schematic view of particles adsorbed to the surface, Figure 5 (B) in the figure is a schematic view of the surface corroded by hydroxyl in ammonium hydroxide, Figure 5 (C) in the figure is a schematic view of the hydroxyl on the surface forming negative charges to repel the particles.

[0026] In the figure: 1. Cleaning solution tank; 2. Ultrapure water storage tank pump; 3. Ultrapure water storage tank; 4. Cleaning solution tank pump; 5. Second solution storage tank pump; 6. First solution storage tank pump; 7. First solution storage tank; 8. Second solution storage tank; 9. Worm gear; 10. First worm wheel; 11. Vertical plate; 12. Drive motor; 13. First transmission pipe; 14. Second transmission pipe; 15. Second worm wheel; 16. Third worm wheel; 17. Container fixing base; 18. 19. Container to be cleaned; 20. Water nozzle; 21. Cleaning fluid outlet pipe; 22. Conductivity meter; 23. Conductivity display instrument; 24. Conductivity-drive motor switch interlock device; 25. Cleaning fluid collector; 26. Cleaning fluid drain pipe; 27. Foot pedal switch; 28. Vertical plate base; 29. ​​Transmission rod; 30. Motor base; 31. Chassis; 32. Thermometer; 33. Water heating circulation pump; 34. Water heater; 35. Time control switch; 36. Switch. Detailed Implementation

[0027] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] Example 1 like Figures 1-2 As shown, the present invention provides a chemical reagent container cleaning device, comprising a cleaning solution preparation system, a container cleaning system, a cleaning quality detection system, and a control system connected in sequence.

[0030] Specifically, the cleaning solution preparation system comprises a cleaning solution water tank 1, a solution storage tank and an ultrapure water storage tank 3, the cleaning solution water tank 1 is connected with the solution storage tank and the ultrapure water storage tank 3 respectively, the number of the solution storage tank is multiple, in this embodiment, it specifically comprises a first solution storage tank 7 and a second solution storage tank 8, the container cleaning system is connected with the ultrapure water storage tank 3 and the cleaning solution water tank 1 respectively. The container cleaning system comprises a water flow nozzle 19, a container fixing base 17, a driving motor 12 and a transmission mechanism connecting the driving motor and the container fixing base 17, the container fixing base 17 is arranged on the transmission mechanism, the water flow nozzle 19 is arranged on the container fixing base 17, the container to be cleaned 18 is inverted on the container fixing base 17 during cleaning, the water flow nozzle 19 is connected with the cleaning solution water tank 1, and the transmission mechanism is used for driving the container fixing base 17 to rotate. The cleaning quality detection system comprises a cleaning solution collector 24 and a conductivity meter 21, the conductivity meter 21 is arranged in the cleaning solution collector 24, the cleaning solution collector 24 is connected with the container fixing base 17 through a cleaning solution outlet pipe 20, and the cleaning solution collector 24 is connected with a cleaning solution drain pipe 25. The control system comprises a foot switch 27 and a conductivity-driving motor switch interlocking device 23, the foot switch 27 is connected with the driving motor 12, and the conductivity-driving motor switch interlocking device 23 is connected with the conductivity meter 21 and the foot switch 27 respectively. The device can realize automatic preparation of cleaning solution, rotary cleaning of containers, real-time monitoring of cleaning quality and intelligent control of the cleaning process through the coordinated cooperation of the four systems, so that the cleaning efficiency and the cleaning quality are greatly improved, and the more stringent cleaning requirements of electronic-grade chemical reagent containers are met.

[0031] In one specific embodiment of the present embodiment, the cleaning solution preparation system further comprises a heating system, which is arranged between the cleaning solution preparation system and the container cleaning system. Specifically, the heating system comprises a water heating circulating pump 32 and a water heater 33, the water heating circulating pump 32 is provided with a thermometer 31 and is connected with the water heater 33. The water heating circulating pump 32 draws the cleaning solution into the water heater 33 for heating, the thermometer 31 monitors the temperature change of the cleaning solution in real time, so as to ensure that the temperature of the cleaning solution is kept within the temperature range required in actual operation. When the cleaning solution needs to be heated, the water heating circulating pump 32 and the water heater 33 work cooperatively to heat the cleaning solution to the set temperature through the connecting pipeline, and the heated cleaning solution can more effectively dissolve and remove the contaminants on the surface of the container, thereby significantly improving the cleaning effect.

[0032] In one specific embodiment of the present embodiment, a water pump is arranged on the outlet pipeline of the cleaning liquid water tank 1, the solution storage tank and the ultrapure water storage tank 3 respectively. Specifically, a cleaning liquid water tank water pump 4 is arranged on the outlet pipeline of the cleaning liquid water tank 1, a first solution storage tank water pump 6 is arranged on the outlet pipeline of the first solution storage tank 7, a second solution storage tank water pump 5 is arranged on the outlet pipeline of the second solution storage tank 8, and an ultrapure water storage tank water pump 2 is arranged on the outlet pipeline of the ultrapure water storage tank 3. Each storage tank is connected to the cleaning liquid water tank 1 through an independent water pump. The pumping speed of the water pump can be adjusted according to the cleaning requirements to control the delivery speed and ratio of various solutions. By controlling the working time and flow of different water pumps, the required cleaning liquid can be accurately prepared in the cleaning liquid water tank 1. The prepared cleaning liquid is pumped out by the cleaning liquid water tank water pump 4, which better ensures the delivery efficiency of the cleaning liquid.

[0033] In one specific embodiment of the present embodiment, the water flow nozzle 19 is fixed on the container fixing base 17 and is perpendicular to the ground. The cleaning quality detection system further comprises an electric conductivity display instrument 22. The electric conductivity instrument 21 is connected to the electric conductivity-drive motor switch interlocking device 23 through the electric conductivity display instrument 22. Specifically, the vertical arrangement of the water flow nozzle 19 ensures that the cleaning liquid can be sprayed at the best angle to the inner wall of the container, achieving comprehensive and uniform cleaning and reducing the overflow and waste of the cleaning liquid.

[0034] The electric conductivity display instrument 22 displays the electric conductivity value of the cleaning liquid in real time. The operator can directly observe the cleaning quality state. When the electric conductivity reaches the preset standard, the electric conductivity-drive motor switch interlocking device 23 automatically performs the corresponding control action, realizing the visual monitoring and automatic control of the cleaning quality and ensuring the cleaning effect. Specifically, the working principle of the electric conductivity-drive motor switch interlocking device 23 is as follows: first, the preset standard value of the electric conductivity is set in the electric conductivity-drive motor switch interlocking device 23. The electric conductivity-drive motor switch interlocking device 23 receives the detected electric conductivity value signal through the electric conductivity instrument 21. When the received electric conductivity value is lower than the preset standard value, the electric conductivity-drive motor switch interlocking device 23 remains connected to maintain the normal work of the drive motor 12. When the received electric conductivity value reaches the preset standard value, the electric conductivity-drive motor switch interlocking device 23 is disconnected, and the drive motor 12 stops working.

[0035] In one specific embodiment of the present embodiment, the bottom surface working diameter of the container fixing base 17 ranges from 10 cm to 50 cm, and the container fixing base 17 is arranged at an angle with the ground, and the angle ranges from 20° to 40°. Specifically, four elastic fixing clamps are installed on the container fixing base 17, and the elastic fixing clamps are provided with elastic force by springs. According to the size of the to-be-cleaned container 18, the fixing position of the elastic fixing clamp is adjusted by the spring, and the to-be-cleaned container 18 is fixed by using the elastic fixing clamp, so that the bottom surface working diameter of the container fixing base 17 ranges from 10 cm to 50 cm, and the to-be-cleaned container 18 of different specifications in actual production is adjusted and adapted. It should be noted that the specific meaning of the range of the bottom surface working diameter of the container fixing base 17 is that the diameter range of the circular area on the bottom surface of the container fixing base 17 that can be used to fix the to-be-cleaned container 18 of different sizes. The container fixing base 17 is arranged at an angle with the ground, so that the cleaning liquid sprayed by the water flow nozzle 19 can reach the bottom area opposite the feed port of the container, and cooperate with the rotation of the container fixing base 17 to ensure the overall cleaning of the inner wall of the container. The angle range of 20° to 40° is a preferred range value verified by production, which can not only ensure the effective coverage of the cleaning liquid, but also reduce the invalid loss of the cleaning liquid and improve the cleaning efficiency.

[0036] In one specific embodiment of the present embodiment, the transmission mechanism includes a worm 9, a first worm gear 10, a second worm gear 15, a third worm gear 16, a first transmission pipe 13, and a second transmission pipe 14. The drive motor 12 drives the worm 9 to rotate through the transmission rod 28, and then the worm 9 drives the first worm gear 10 to rotate, and then drives the first transmission pipe 13 arranged on the first worm gear 10 and the second worm gear 15 installed on one end of the first transmission pipe 13 to rotate. The second worm gear 15 drives the third worm gear 16 to rotate, the second transmission pipe 14 is arranged on the third worm gear 16, and the container fixing base 17 and the second transmission pipe 14 are fixedly connected. It should be noted that the second worm gear 15 and the third worm gear 16 are provided with fixing structures at the bottom to ensure the stable operation of the second worm gear 15, the third worm gear 16 and other components, and the drive motor 12 is provided with a motor base 29 below. The multi-stage worm and gear transmission mechanism can realize a large speed reduction ratio to ensure that the container fixing base 17 rotates stably at a proper speed. The worm and gear transmission has self-locking performance, which can prevent the container from rotating accidentally during cleaning. The multi-stage transmission design can also increase the output torque to ensure that the container can maintain a uniform rotation speed even in the case of large cleaning resistance, thereby ensuring the cleaning effect.

[0037] In one specific embodiment of the present embodiment, one end of the worm 9 is connected to the driving motor 12, and the other end is connected to the vertical plate 11, and the bottom of the vertical plate 11 is provided with a vertical plate base 27. Specifically, the vertical plate 11 and the vertical plate base 27 provide a stable support structure for the transmission mechanism, ensuring the stability of the transmission system during operation, and the vertical plate base 27 is fixed inside the cabinet 30 to provide a solid foundation for the entire transmission system. The support structure can effectively withstand various forces and torques generated during transmission, preventing the transmission mechanism from loosening or shifting during long-term use, ensuring long-term stable operation of the cleaning device.

[0038] In one specific embodiment of the present embodiment, a time switch 34 is provided on the connection line between the cleaning liquid tank 1 and the container cleaning system, and a switch 35 is provided on the connection line between the ultrapure water storage tank 3 and the container cleaning system. Specifically, the time switch 34 assists in controlling the supply time of the cleaning liquid, realizing automatic switching of the cleaning stages. In the first stage of cleaning, the supply time of the cleaning liquid is set through the time switch 34 to ensure that the container is fully chemically cleaned. When the time set by the time switch 34 reaches, the time switch 34 automatically closes the cleaning liquid supply, and at the same time opens the switch 35 of the ultrapure water storage tank 3, switching to the ultrapure water flushing stage. This design realizes automatic control of the cleaning process, reduces manual intervention, and improves the standardization of the cleaning process.

[0039] Embodiment 2 As shown in Figure 3 The present application also provides an electronic-grade chemical reagent container cleaning method using the above device, comprising the following steps: S1: According to the type of the container to be cleaned, add the corresponding chemical reagent to each solution storage tank, inject ultrapure water into the ultrapure water storage tank, and adjust the liquid pumping speed of each water pump to prepare the required cleaning liquid in the cleaning liquid tank; S2: Start the water heating circulating pump and set the required temperature, and control the cleaning liquid temperature through the thermometer; S3: Set the electrical conductivity threshold of the electrical conductivity-drive motor interlocking device; S4: Adjust the container fixing base to adapt to the size of the container to be cleaned, and adjust the included angle between the container fixing base and the ground; S5: Fix the container to be cleaned on the container fixing base, start the foot pedal switch, and drive the motor to rotate the container fixing base through the transmission mechanism; S6: Set the opening time of the time switch, use the prepared cleaning liquid for the first round of cleaning, and use the switch to switch to ultrapure water for the second round of cleaning when the set time is reached; S7: The aqueous solution after the second round of washing flows into the cleaning solution collector through the cleaning solution outlet pipe, and the conductivity of the cleaning solution is detected using a conductivity meter. When the conductivity reaches a preset threshold, the conductivity-drive motor switch interlocking device automatically closes the drive motor, and the cleaning is completed.

[0040] Specifically, the method realizes the automatic control of the whole process from the preparation before washing to the judgment of the completion of washing through the orderly execution of seven steps. The phased cleaning strategy adopted in the method first removes the main contaminants through chemical cleaning, then removes the residual cleaning agent and fine particles through ultrapure water flushing, and finally confirms the cleaning quality through conductivity detection. The cleaning method significantly improves the cleaning efficiency and ensures that the cleaning quality meets the strict requirements of electronic-grade chemical reagent containers.

[0041] In one specific embodiment of the present embodiment, the cleaning solution prepared in S1 is an alkaline solution containing hydrogen peroxide and ammonia hydroxide. Hydrogen peroxide is used to oxidize the surface of the container and the particle contaminants, and the hydroxyl ions in ammonia hydroxide are used to accumulate negative charges on the surface of the container and the particles to achieve charge repulsion removal. Specifically, as shown in Figure 4 and Figure 5 Hydrogen peroxide, as a strong oxidizing agent, can oxidize organic contaminants and particles on the surface of the container, converting them from a chemically bonded state to an easily removable state. The oxide layer produced during the oxidation process can weaken the adhesion of the contaminants to the surface of the container, facilitating subsequent physical removal. The hydroxyl ions in ammonium hydroxide can slightly erode the surface of the container to be cleaned, while the hydroxyl ions in ammonia hydroxide can accumulate negative charges on the surface of the container and the surface of the contaminated particles, allowing the contaminated particles to detach from the surface of the container and disperse into the cleaning solution through the repulsion between like charges. The oxidation of hydrogen peroxide and the charge repulsion of hydroxyl ions work together to effectively remove various types of contaminants, achieve deep cleaning of the surface of the container, and meet the strict cleanliness requirements of electronic-grade chemical reagents for containers.

[0042] Example 3 The electronic grade hydrogen peroxide solution is added into the first solution storage tank, the electronic grade ammonium hydroxide solution is added into the second solution storage tank, and the ultrapure water storage tank is filled with ultrapure water. The pumping speeds of the corresponding water pumps of the first solution storage tank, the second solution storage tank, and the ultrapure water storage tank are set to be in a ratio of 1:1:5, respectively. The corresponding solutions are configured in the cleaning liquid water tank. The water heating circulating pump is turned on, and the temperature is set to be 50℃. The conductivity-drive motor switch interlocking device is adjusted, and the conductivity value is adjusted to be 0.1 μs / cm. The container to be cleaned is placed on the container fixing base, and the angle between the container fixing base and the ground is adjusted so that the water solution sprayed from the water flow nozzle can be sprayed to the bottom of the container to be cleaned opposite to the feed port. The first round of cleaning time is set to be 10 seconds, and the cleaning work of the cleaning liquid in the cleaning liquid water tank is performed. After the set time is reached, the second round of cleaning is performed using ultrapure water. When the conductivity of the liquid in the cleaning liquid collector reaches the set value (0.1 μs / cm) during the second round of cleaning, the conductivity-drive motor switch interlocking device automatically turns off the drive motor through the foot pedal switch, thereby ending the cleaning process and completing the cleaning of the container to be cleaned. The liquid in the second cleaning liquid collector is sampled and analyzed for particle size distribution by a laser particle instrument.

[0043] Comparative Example 1: The difference from Example 3 is that the pumping speeds of the corresponding water pumps of the first solution storage tank, the second solution storage tank, and the ultrapure water storage tank are set to be in a ratio of 1:1:6, respectively.

[0044] Comparative Example 2: The difference from Example 3 is that the pumping speeds of the corresponding water pumps of the first solution storage tank, the second solution storage tank, and the ultrapure water storage tank are set to be in a ratio of 1:1:7, respectively.

[0045] Comparative Example 3: The difference from Example 3 is that the pumping speeds of the corresponding water pumps of the first solution storage tank, the second solution storage tank, and the ultrapure water storage tank are set to be in a ratio of 1:1:4, respectively.

[0046] Comparative Example 4: The difference from Example 3 is that the pumping speeds of the corresponding water pumps of the first solution storage tank, the second solution storage tank, and the ultrapure water storage tank are set to be in a ratio of 1:1:3, respectively.

[0047] Comparative Example 5: The difference from Example 3 is that the pumping speeds of the corresponding water pumps of the first solution storage tank, the second solution storage tank, and the ultrapure water storage tank are set to be in a ratio of 0:0:1, i.e., only ultrapure water is used to flush the container to be cleaned.

[0048] Comparative Example 6: The difference from Example 3 is that the temperature of the water heating circulating pump is 40℃.

[0049] Comparative Example 7: The difference from Example 3 is that the temperature of the water heating circulating pump is 30℃.

[0050] Comparative Example 8: The difference from Example 3 is that the temperature of the water heating circulation pump is 60°C.

[0051] Comparative Example 9: The difference from Example 3 is that the temperature of the water heating circulation pump is 70°C.

[0052] Comparative Example 10: The difference from Example 3 is that the first round cleaning time is set to 5 seconds.

[0053] Comparative Example 11: The difference from Example 3 is that the first round cleaning time is set to 15 seconds.

[0054] The following is a table of the liquid particle size distribution of the liquid sampled from the second cleaning liquid collector and the time taken for the conductivity of the liquid in the cleaning liquid collector to reach the set value (0.1 μs / cm) during the second round of cleaning for Example 3 and Comparative Examples 1-11.

[0055]

[0056] From the above data comparison, it can be seen that the liquid particle size distribution of the liquid sampled from the second cleaning liquid collector and the time taken for the conductivity of the liquid in the cleaning liquid collector to reach the set value (0.1 μs / cm) during the second round of cleaning for Comparative Example 1 and Comparative Example 2 are worse than Example 3, the liquid particle size distribution of the liquid sampled from the second cleaning liquid collector and the time taken for the conductivity of the liquid in the cleaning liquid collector to reach the set value (0.1 μs / cm) during the second round of cleaning for Comparative Example 3 and Comparative Example 4 are about the same as Example 3. The liquid particle size distribution of the liquid sampled from the second cleaning liquid collector and the time taken for the conductivity of the liquid in the cleaning liquid collector to reach the set value (0.1 μs / cm) during the second round of cleaning for Comparative Example 5 is worse than Example 3. The liquid particle size distribution of the liquid sampled from the second cleaning liquid collector and the time taken for the conductivity of the liquid in the cleaning liquid collector to reach the set value (0.1 μs / cm) during the second round of cleaning for Comparative Example 6, Comparative Example 7, Comparative Example 8 and Comparative Example 9 is worse than Example 3. The liquid particle size distribution of the liquid sampled from the second cleaning liquid collector and the time taken for the conductivity of the liquid in the cleaning liquid collector to reach the set value (0.1 μs / cm) during the second round of cleaning for Comparative Example 10 is worse than Example 3. The liquid particle size distribution of the liquid sampled from the second cleaning liquid collector and the time taken for the conductivity of the liquid in the cleaning liquid collector to reach the set value (0.1 μs / cm) during the second round of cleaning for Comparative Example 11 is about the same as Example 3.

[0057] The above embodiments are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application. Any equivalent transformation or modification according to the spirit and essence of the present application should be covered within the protection scope of the present application.

Claims

1. A chemical reagent container cleaning device, characterized in that: The system comprises a cleaning liquid preparation system, a container cleaning system, a cleaning quality detection system and a control system connected in sequence. The cleaning liquid preparation system comprises a cleaning liquid tank, a solution storage tank and an ultrapure water storage tank, the cleaning liquid tank is connected with the solution storage tank and the ultrapure water storage tank respectively, the number of the solution storage tank is multiple, and the container cleaning system is connected with the ultrapure water storage tank and the cleaning liquid tank respectively. The container cleaning system comprises a water flow nozzle, a container fixing base, a driving motor and a transmission mechanism connecting the driving motor and the container fixing base, the container fixing base is arranged on the transmission mechanism, the water flow nozzle is arranged on the container fixing base, the water flow nozzle is connected with the cleaning liquid tank, and the transmission mechanism is used for driving the container fixing base to rotate. The cleaning quality detection system comprises a cleaning liquid collector and an electric conductivity instrument, the electric conductivity instrument is arranged in the cleaning liquid collector, the cleaning liquid collector is connected with the container fixing base through a cleaning liquid outlet pipe, and the cleaning liquid collector is connected with a cleaning liquid drain pipe. The control system comprises a foot pedal switch and an electric conductivity-driving motor switch interlocking device, the foot pedal switch is connected with the driving motor, and the electric conductivity-driving motor switch interlocking device is connected with the electric conductivity instrument and the foot pedal switch respectively.

2. The chemical reagent container cleaning apparatus according to claim 1, characterized by: The cleaning liquid preparation system further comprises a heating system arranged between the cleaning liquid preparation system and the container cleaning system. The heating system comprises a water heating circulating pump and a water heater, and a thermometer is arranged on the water heating circulating pump and connected with the water heater.

3. The chemical reagent container cleaning apparatus according to claim 1, characterized by: Water pumps are arranged on the liquid outlet pipelines of the cleaning liquid tank, the solution storage tank and the ultrapure water storage tank respectively.

4. The chemical reagent container washing apparatus according to claim 1, characterized by: The water flow nozzle is fixed on the container fixing base and keeps vertical to the ground, and the cleaning quality detection system further comprises an electric conductivity display instrument, the electric conductivity instrument is connected with the electric conductivity-driving motor switch interlocking device through the electric conductivity display instrument.

5. The chemical reagent container washing apparatus according to claim 1, characterized by: The bottom surface working diameter of the container fixing base ranges from 10cm to 50cm, the container fixing base is arranged at an angle with the ground, and the angle ranges from 20° to 40°.

6. The chemical reagent container washing apparatus according to claim 1, wherein: The transmission mechanism comprises a worm, a first worm wheel, a second worm wheel, a third worm wheel, a first transmission pipe and a second transmission pipe, the driving motor drives the first worm wheel to rotate through the worm, and then drives the first transmission pipe arranged on the first worm wheel and the second worm wheel mounted on one end of the first transmission pipe to rotate, the second worm wheel drives the third worm wheel to rotate, the second transmission pipe is arranged on the third worm wheel, and the container fixing base is fixedly connected with the second transmission pipe.

7. A chemical reagent container washing apparatus according to claim 6, characterized by: One end of the worm is connected with the driving motor, and the other end is connected with a vertical plate, and a vertical plate base is arranged at the bottom of the vertical plate.

8. The chemical reagent container washing apparatus according to claim 1, wherein: A time control switch is arranged on the connecting line between the cleaning liquid tank and the container cleaning system, and a switch is arranged on the connecting line between the ultrapure water storage tank and the container cleaning system.

9. A method for cleaning an electronic grade chemical container using the apparatus according to any one of claims 1 to 8, characterized by, The method comprises the following steps: S1: according to the type of the container to be cleaned, adding corresponding chemical reagents into the multiple solution storage tanks, injecting ultrapure water into the ultrapure water storage tank, and adjusting the liquid pumping speed of each water pump to prepare the required cleaning liquid in the cleaning liquid tank. S2: Start the water heating circulating pump and set the required temperature, control the cleaning solution temperature by the thermometer; S3: Set the conductivity threshold of the conductivity-drive motor switch interlock device; S4: Adjust the container fixing base to adapt to the size of the container to be cleaned, adjust the angle between the container fixing base and the ground; S5: Fix the container to be cleaned on the container fixing base, start the foot pedal switch, and drive the motor to rotate the container fixing base through the transmission mechanism; S6: Set the opening time of the time control switch, use the prepared cleaning solution for the first round of cleaning, and use the switch to switch to ultrapure water for the second round of cleaning after reaching the set time; S7: The aqueous solution after the second round of cleaning flows into the cleaning solution collector through the cleaning solution outlet pipe, and the conductivity of the cleaning solution is detected using a conductivity meter. When the conductivity reaches the preset threshold, the conductivity-drive motor switch interlock device automatically closes the drive motor, and the cleaning is completed.

10. The electronic grade chemical container cleaning method according to claim 9, wherein, The cleaning solution prepared in S1 is an alkaline solution containing hydrogen peroxide and ammonia hydroxide. Hydrogen peroxide is used to oxidize the surface of the container and the particulate contaminants, and the hydroxyl ions in ammonia hydroxide are used to accumulate negative charges on the surface of the container and the particles to achieve charge repulsion removal.

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