Angular displacement table

Abstract

The invention provides an angular displacement table, relates to the technical field of motion platforms, and aims to solve the problem of low motion precision of the angular displacement table. The angular displacement table comprises a base, a sliding table and a driving module; the driving module is mounted on the base; the driving module comprises a linear driving mechanism and a guiding mechanism, the guiding mechanism is connected to the sliding table, the guiding mechanism is installed at the power output end of the linear driving mechanism, the guiding mechanism comprises a first guiding part, a second guiding part, an elastic piece and a guiding roller, and the first guiding part and the second guiding part are oppositely arranged; the first guide part and the power output end of the linear driving mechanism are oppositely and fixedly arranged, the guide roller is in rolling connection with the first guide part and the second guide part, and the elastic piece is used for driving the second guide part to be close to the first guide part. The motion precision of the angular displacement table can be improved.

Description

Technical Field

[0001] This application relates to the field of motion platform technology, and more specifically, to an angular displacement stage. Background Technology

[0002] The rapid advancement of modern industrial technology and socio-economic development has led to increasingly higher demands on the precision and transmission efficiency of precision engineering applications such as machining, testing, and scanning. Multi-dimensional worktables are frequently used in various precision instruments and mechanical devices for multi-dimensional adjustments, including position and orientation adjustments. Many devices require motion, and precision motion equipment incorporates high-precision motion and repeatability positioning functions.

[0003] With the continuous development of precision manufacturing and testing technologies, the market demand for precision angular displacement stages is increasing, especially in the following fields: optical systems, which require rapid adjustment of the position of optical components (such as lenses and mirrors) while ensuring high-precision positioning; and semiconductor manufacturing, which requires both rapid movement and high-precision positioning in processes such as wafer alignment and chip packaging.

[0004] To meet market demands, the technological development of precision angular displacement stages exhibits the following trends: Rx and Ry operation, achieving a combination of rapid movement and high-precision positioning; high-precision feedback systems: employing high-precision sensors such as encoders to achieve closed-loop control and improve positioning accuracy; intelligent control: integrating automated control systems, supporting programmable control, and improving ease of use.

[0005] Existing angular displacement stages typically use worm gears for positioning. However, backlash exists between worm gears, causing slippage and slight vibrations during dynamic-to-static transitions. The idle stroke during reverse motion can easily lead to slippage or offset, affecting positioning stability and repeatability. Over time, wear and tear on mechanical components reduces accuracy; maintenance costs are high, requiring regular calibration. Precision slides need frequent calibration to maintain accuracy, increasing maintenance costs and time; and component wear, particularly on key components like pulleys and lead screws, necessitates replacement or repair after prolonged use. Summary of the Invention

[0006] The first aspect of this application aims to provide an angular displacement stage to solve the technical problem of low motion accuracy of existing angular displacement stages.

[0007] The first aspect of this application provides an angular displacement stage, including a base, a slide, and a drive module. The drive module is mounted on the base. The drive module includes a linear drive mechanism and a guide mechanism. The guide mechanism is connected to the slide and mounted on the power output end of the linear drive mechanism. The guide mechanism includes a first guide portion, a second guide portion, an elastic element, and guide rollers. The first guide portion and the second guide portion are arranged facing each other. The first guide portion is fixedly arranged relative to the power output end of the linear drive mechanism. The guide rollers are tactilely connected to the first guide portion and the second guide portion respectively. The elastic element is used to drive the second guide portion closer to the first guide portion.

[0008] The beneficial effects of the angular displacement stage in this application are:

[0009] By using an elastic element to drive the second guide part closer to the first guide part, when the guide roller moves within the guide space formed by the first and second guide parts, both sides of the guide roller can fit against the first or second guide part, thereby eliminating the gap in the operation of the guide mechanism, making the rotation of the slide table relative to the base more stable and improving the motion accuracy of the slide table.

[0010] In an optional technical solution, the guide roller includes two pairs of guide rollers, each pair of guide rollers including a first guide roller and a second guide roller. The first guide roller is in rolling connection with the first guide portion, and the second guide roller is in rolling connection with the second guide portion. The forces exerted by the first guide portion and the second guide portion on each pair of guide rollers are opposite, and the torques exerted by the first guide portion and the second guide portion on the two pairs of guide rollers cancel each other out.

[0011] In an optional technical solution, the guide rollers of each pair of guide wheels are rotatably mounted on a wheel axle.

[0012] In an optional technical solution, the guiding mechanism further includes a guiding support member, which is fixedly connected to the slide table and positioned with the slide table by a positioning pin.

[0013] In an optional technical solution, the first guide portion is the surface of the first guide member facing the second guide member, and the second guide portion is the surface of the second guide member facing the first guide member; the guiding mechanism includes a fixed connector, which is fixedly connected to the power output end of the linear drive mechanism; the first guide member is fixedly installed on the fixed connector, and the elastic member is provided between the second guide member and the fixed connector, the elastic member being used to drive the second guide member closer to the first guide member.

[0014] In an optional technical solution, the linear drive mechanism includes a lead screw transmission assembly, which includes a transmission lead screw and a lead screw nut that cooperate with each other. The lead screw nut is mounted on a lead screw nut seat, and the guide mechanism is mounted on the lead screw nut seat. One end of the transmission lead screw is rotatably mounted on a first lead screw support seat, and the first lead screw support seat and the lead screw nut seat are connected by a constant force spring.

[0015] In an optional technical solution, the other end of the transmission screw is rotatably mounted on the second screw support seat. Both ends of the transmission screw are fixed with screw limiting nuts. One screw limiting nut is located on the side of the first screw support seat away from the second screw support seat, and the other screw limiting nut is located on the side of the second screw support seat away from the first screw support seat.

[0016] In an optional technical solution, the linear drive mechanism further includes a stepper motor, which is connected to an encoder and is driven by the lead screw.

[0017] In an optional technical solution, the power output end of the stepper motor is connected to the transmission screw via a flexible diaphragm coupling.

[0018] In an optional technical solution, the drive module further includes a guide component, which includes a linear guide rail and a slider that cooperate with each other. The guide component is located on both sides of the lead screw transmission component, and the slide is fixedly connected to the fixed connector. The angular displacement stage further includes a cross-ball arc guide rail, which is located on both sides of the lead screw transmission component. The plane in which the cross-ball arc guide rail is located is parallel to the linear guide rail and the lead screw transmission component. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments or background art of this application, the drawings used in the description of the embodiments or background art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the angular displacement stage provided in an embodiment of this application.

[0021] Figure 2 This is a schematic diagram of the angular displacement stage provided in an embodiment of this application, omitting the slide.

[0022] Figure 3 This is a schematic diagram of the structure of part of the guide mechanism and the linear drive mechanism in the angular displacement stage provided in the embodiments of this application.

[0023] Figure 4 This is a schematic diagram of another part of the guide mechanism in the angular displacement stage provided in the embodiments of this application.

[0024] Figure 5 This is a schematic diagram of the structure of part of the guide mechanism and the linear drive mechanism in the angular displacement stage provided in the embodiments of this application.

[0025] Figure 6 The schematic diagram shows the structure of the angular displacement stage provided in this application embodiment, which includes two bases and two slides.

[0026] Explanation of reference numerals in the attached figures:

[0027] 100 - Base; 110 - Sealing plate;

[0028] 200-Slide;

[0029] 300 - Linear drive mechanism; 310 - Transmission screw; 320 - Screw nut; 330 - First screw support; 340 - Second screw support; 350 - Constant force spring; 360 - Screw limit nut; 370 - Stepper motor; 371 - Motor mounting base; 380 - Flexible diaphragm coupling; 390 - Linear guide rail;

[0030] 400 - Guide mechanism; 410 - First guide component; 411 - First guide section; 420 - Second guide component; 421 - Second guide section; 430 - Guide space; 440 - Guide roller; 441 - First guide wheel; 442 - Second guide wheel; 450 - Fixed connector; 451 - Slider connector; 460 - Guide support; 461 - Axle; 462 - Locating pin hole; 463 - Bearing fixing component; 470 - Elastic component; 480 - Locating pin;

[0031] 500-Cross ball bearing arc guide rail. Detailed Implementation

[0032] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0033] Figure 1 This is a schematic diagram of the angular displacement stage provided in an embodiment of this application. Figure 2 This is a schematic diagram of the angular displacement stage provided in an embodiment of this application, omitting the slide. Figure 3 This is a schematic diagram of the structure of part of the guide mechanism and the linear drive mechanism in the angular displacement stage provided in the embodiments of this application. Figures 1-3As shown, the angular displacement stage provided in Embodiment 1 of this application includes a base 100, a slide 200, and a drive module. The drive module is installed on the base 100. The drive module includes a linear drive mechanism 300 and a guide mechanism 400. The slide 200 is connected to the guide mechanism 400. The guide mechanism 400 is installed on the power output end of the linear drive mechanism 300. The guide mechanism 400 includes a first guide portion 411, a second guide portion 421, an elastic element 470, and a guide roller 440. The first guide portion 411 and the second guide portion 421 are arranged facing each other. The first guide portion 411 is fixedly arranged relative to the power output end of the linear drive mechanism 300. The guide roller 440 is tactilely connected to the first guide portion 411 and the second guide portion 421 respectively. The elastic element 470 is used to drive the second guide portion 421 to move closer to the first guide portion 411.

[0034] By using the elastic element 470 to drive the second guide portion 421 closer to the first guide portion 411, when the guide roller 440 moves within the guide space 430 formed by the first guide portion 411 and the second guide portion 421, both sides of the guide roller 440 can fit against the first guide portion 411 or the second guide portion 421, thereby eliminating the gap in the operation of the guide mechanism 400, making the rotation of the slide table 200 relative to the base 100 more stable and improving the motion accuracy of the slide table 200.

[0035] Furthermore, even if one of the first guide portion 411 and the second guide portion 421 wears out, an elastic element 470 is provided to drive the first guide portion 411 closer to the second guide portion 421, thereby eliminating the gap caused by wear. Moreover, the guide roller 440 is rolledly connected to the first guide portion 411 and the second guide portion 421 respectively, which also significantly reduces the rate of wear.

[0036] Specifically, in this embodiment, the first guide portion 411 and the second guide portion 421 can form a guide space 430 that is generally shaped like a groove and extends in a generally vertical direction. The first guide portion 411 is located on one of the opposite sidewalls of the guide space 430, and the second guide portion 421 is located on the other opposite sidewall of the guide space 430. The bottom of the guide space 430, which is generally shaped like a groove, can be the sidewall of the fixing member 450 described later, and it is open in a direction away from the fixing member 450. In this embodiment, both ends of the guide roller 440 in the direction of movement are open in the guide space 430.

[0037] Figure 4 This is a schematic diagram of another part of the guide mechanism in the angular displacement stage provided in an embodiment of this application. (See attached diagram.) Figures 2 to 4As shown, optionally, the guide roller 440 includes two pairs of guide rollers, each pair of guide rollers including a first guide roller 441 and a second guide roller 442. The first guide roller 441 is rolledly connected to the first guide portion 411, and the second guide roller 442 is rolledly connected to the second guide portion 421. The forces exerted by the first guide portion 411 and the second guide portion 421 on each pair of guide rollers are opposite, and the torques exerted by the first guide portion 411 and the second guide portion 421 on the two pairs of guide rollers cancel each other out.

[0038] In each pair of guide wheels, each guide wheel is used for frictional connection with the first guide part 411 or the second guide part 421. A guide wheel only undergoes rolling friction on one side and does not contact the other side, so there is no sliding friction. This not only reduces motion resistance, but also reduces the wear of the first guide part 411, the second guide part 421 and the guide roller 440, thereby increasing service life.

[0039] The two can be completely misaligned in a direction perpendicular to both their opposing orientation and the direction of movement of the guide roller 440. For example, in Figure 2 As shown, the guide roller 440 moves roughly in the up-down direction, while the first guide portion 411 and the second guide portion 421 face each other in the left-right direction. The first guide portion 411 and the second guide portion 421 can be offset in the front-back direction. The guide roller 440 is described as moving roughly in the up-down direction because the slide 200 rotates relative to the base 100. Therefore, when the slide 200 rotates away from its lowest position, the guide roller 440 will deviate from the vertical direction by a certain angle. However, since the rotation angle of the slide 200 is small, for example less than 30° or less than 35°, the movement direction of the guide roller 440 also deviates slightly from the vertical direction, remaining roughly in the up-down direction.

[0040] Specifically, in this embodiment, the first guide wheel 441 of each pair of guide wheels is located closer to the fixed connector 450 described later, and is guided by the first guide portion 411. Figure 2 and Figure 3 The force is shown as acting from right to left. The second guide wheel 442 of each pair of guide wheels is located relatively far from the fixed connector 450 and is subjected to the force along the second guide portion 421. Figure 2 and Figure 3The force applied from left to right is as follows: The pair of guide wheels at the front of the fixed connector 450 in the diagram receives a counter-clockwise torque in the top view, while the pair of guide wheels at the rear of the fixed connector 450 receives a clockwise torque in the top view. Therefore, in each pair of guide wheels, the first guide wheel 441 experiences a force from the first guide portion 411, and the second guide wheel 442 experiences a force from the second guide portion 421, forming a torque. In this embodiment, the torques experienced by the two guide wheel pairs cancel each other out.

[0041] like Figure 2 and Figure 4 As shown, optionally, the guide rollers 440 of each pair of guide wheels are rotatably mounted on a wheel axle 461.

[0042] With this configuration, the two guide wheels in each guide wheel pair can be set coaxially. When the linear drive mechanism 300 drives the guide mechanism 400 to move along the power output direction of the linear drive mechanism 300, the center of the guide roller 440 is the rotation center of the power output end of the guide mechanism 400, which is the end connected to the slide table 200, thereby improving the sliding accuracy of the slide table 200.

[0043] Specifically, in this embodiment, a first guide wheel 441 and a second guide wheel 442 are mounted on each axle 461, and the rotation axes of the first guide wheel 441 and the second guide wheel 442 are collinear. The axles 461 on the front and rear sides of the fixed connector 450 (described later) are also collinear, meaning that the first guide wheel 441 and the second guide wheel 442 of both pairs of guide wheels are coaxial. Specifically, in this embodiment, the guide roller 440 can be a rolling bearing, further, a radial bearing, and even further, a deep groove ball bearing. Using a rolling bearing directly as the guide roller 440 not only allows the inner ring of the bearing to be interference-fitted with the axle 461 for direct fixation, but also provides the outer ring of the rolling bearing with higher hardness and stronger wear resistance, which is beneficial for improving the service life of the angular displacement stage.

[0044] On the axle 461, near the free end of the axle 461, a bearing fixing component 463 can be set to fix the rolling bearing. For example, a nut threaded onto the free end of the axle 461 can be used, or a shaft retaining ring, commonly known as a shaft snap ring, can be used to fix the axial position of the rolling bearing on the axle 461.

[0045] like Figure 2 and Figure 4 As shown, optionally, the guide mechanism 400 also includes a guide support 460, which is fixedly connected to the slide table 200 and positioned with the slide table 200 by a positioning pin 480.

[0046] By positioning the guide support 460 and the slide table 200 with the positioning pin 480, the connection accuracy of the guide support 460 to the slide table 200 can be improved, and the transmission accuracy from the linear drive mechanism 300 to the slide table 200 can be improved, thereby improving the motion accuracy of the slide table 200.

[0047] Specifically, in this embodiment, the guide support 460 can be approximately U-shaped with a downward opening. The top of the U-shape is used to connect to the slide table 200, while the lower part of the two side walls of the U-shape is provided with the aforementioned wheel axle 461. A positioning pin hole 462 is provided at the top of the U-shape. The positioning pin hole 462 can be an oblong hole, with its length direction being... Figure 2 The front-back direction shown is perpendicular to the power output direction of the linear drive mechanism 300. The width direction of the oblong hole matches the locating pin hole 462 to position the locating pin hole 462 in that direction. This arrangement ensures that the position of the slide 200 in the front-back direction is entirely limited by the crossed ball bearing arc guide 500 (described later), preventing the crossed ball bearing arc guide 500 from jamming due to assembly accuracy issues. Alternatively, the guide support 460 can also be provided with a threaded hole for a male threaded connector passing through the slide 200 to connect to the threaded hole, thus achieving a fixed connection between the guide support 460 and the slide 200.

[0048] like Figures 2 to 3 As shown, optionally, the first guide portion 411 is the surface of the first guide member 410 facing the second guide member 420, and the second guide portion 421 is the surface of the second guide member 420 facing the first guide member 410; the guide mechanism 400 includes a fixed connector 450, which is fixedly connected to the power output end of the linear drive mechanism 300; the first guide member 410 is fixedly installed on the fixed connector 450, and an elastic member 470 is provided between the second guide member 420 and the fixed connector 450, which is used to drive the second guide member 420 closer to the first guide member 410.

[0049] With this configuration, the first guide 410 and the second guide 420 can contact the guide roller 440 respectively. If the first guide 410 and / or the second guide 420 are worn, only the corresponding first guide 410 and / or second guide 420 need to be replaced, without replacing the fixed connector 450, thereby reducing maintenance costs.

[0050] Specifically, in this embodiment, the fixed connector 450 is from Figure 3 Viewed from above, it is roughly H-shaped. The grooves on the left and right sides of the H-shape are the locations for the first guide 410 and the second guide 420. The first guide 410 is cubic in shape, and the cubic shape faces... Figure 3The partial left side shown is the first guide portion 411. The second guide member 420 is positioned on the opposite side of the groove. The second guide block is also a cubic block, and the right side shown (as shown in section 3) of the second guide block is the second guide portion 421. The second guide member 420... Figure 3 An elastic element 470 is provided between the left side and the fixed connector 450. Specifically, the elastic element 470 can be a cylindrical helical compression spring. At least one of the surfaces of the fixed connector 450 and the second guide 420 is provided with a countersunk hole to accommodate the spring. A threaded hole can be provided on the second guide 420, in which a screw is connected. The screw also extends along... Figure 2 The screw passes through the fixed connector 450 in a left-right direction, while the screw head is located on the left side of the fixed connector 450, thereby restricting the second guide block from moving towards... Figure 2 The extreme position for rightward movement is shown. If the threaded hole on the second guide member 420 is a through hole, the width of the second guide wheel 442 in the front-to-back direction should be greater than the diameter of the threaded hole in the second guide member 420 to prevent the second guide wheel 442 from sinking into the threaded hole and losing its positioning function when rolling along the second guide portion 421. Furthermore, an adjustment hole can be provided on the base 100, which is covered by a sealing plate 110. The sealing plate 110 is detachably connected to the base 100. When it is necessary to adjust the pressure of the second guide member 420 on the second guide wheel 442, the sealing plate 110 can be removed from the base 100, a screwdriver can be inserted from the outside of the adjustment hole, and the screw can be rotated to change the screw thread length into the threaded hole of the second guide member 420, thereby changing the maximum distance of the second guide member 420 relative to the left end of the fixed connector 450, and thus changing the pressure of the second guide portion 421 on the guide roller 440.

[0051] Figure 5 This is a schematic diagram of the structure of part of the guide mechanism and the linear drive mechanism in the angular displacement stage provided in the embodiments of this application. Figure 2 , Figure 3 and Figure 5 As shown, optionally, the linear drive mechanism 300 includes a lead screw drive assembly, which includes a drive lead screw 310 and a lead screw nut (not shown) that cooperate with each other. The lead screw nut is mounted on a lead screw nut seat 320, and the guide mechanism 400 is mounted on the lead screw nut seat 320. One end of the drive lead screw 310 is rotatably mounted on a first lead screw support seat 330, and the first lead screw support seat 330 and the lead screw nut seat 320 are connected by a constant force spring 350.

[0052] A constant force spring 350 is provided between the first lead screw support 330 and the lead screw nut support 320. The constant force spring 350 can continuously apply a nearly constant force to the lead screw nut support 320, thereby ensuring that the lead screw nut is subjected to a nearly constant force that presses it against the transmission lead screw 310, so as to reduce the impact of the gap between the lead screw nut and the lead screw on the transmission accuracy.

[0053] In this embodiment, in order to ensure uniform force, constant force springs 350 can be installed on both the front and rear sides of the transmission screw 310.

[0054] Figure 5 This is a schematic diagram of the structure of part of the guide mechanism and the linear drive mechanism in the angular displacement stage provided in the embodiments of this application. Figure 2 , Figure 3 and Figure 5 As shown, optionally, the other end of the transmission screw 310 is rotatably mounted on the second screw support 340. Both ends of the transmission screw 310 are fixed with screw limit nuts 360. One screw limit nut 360 is located on the side of the first screw support 330 away from the second screw support 340, and the other screw limit nut 360 is located on the side of the second screw support 340 away from the first screw support 330.

[0055] Screw limit nuts 360 are provided at both ends of the transmission screw 310, and the screw limit nuts 360 are located outside the first screw support 330 and the second screw support 340, which can prevent the transmission screw 310 from axially moving during operation.

[0056] Optionally, the linear drive mechanism 300 also includes a stepper motor 370, which is connected to an encoder and is driven by a lead screw 310.

[0057] Using a stepper motor 370 in conjunction with an encoder to drive the transmission screw 310 can improve the positioning accuracy of the screw nut 320, thereby improving the positional accuracy of the guide mechanism 400, and ultimately improving the motion accuracy of the slide table 200.

[0058] Specifically, in this embodiment, the stepper motor 370 is located outside the first lead screw support 330, and the stepper motor 370 can be mounted on the base 100 via the motor mounting bracket 371. The combination of the stepper motor 370 and the encoder in this embodiment can achieve a positioning accuracy at the micrometer level. When the stepper motor 370 receives a motion command and forms it, the stepper motor 370 drives the transmission lead screw 310 to rotate. The transmission lead screw 310 rotates relative to the lead screw nut 320, thereby driving the guide mechanism 400 to move, ultimately changing the angle of the slide 200 and achieving the positioning of the slide 200.

[0059] In addition, the stepper motor 370 is also connected to an electronic locking system. The electronic locking system achieves locking and unlocking through electronic control. When the stepper motor 370 receives a travel command and completes the corresponding travel, the control unit detects the signal and drives the actuator of the electronic locking system to complete the locking command. The motor automatically stops and is locked, and the sensor feeds back a locking signal to ensure successful locking. Upon receiving an unlocking command, the control unit verifies the signal's validity, the actuator actuates, the locking state is released, and the unlocking is completed.

[0060] like Figure 2 and Figure 3 As shown, optionally, the power output end of the stepper motor 370 is connected to the transmission screw 310 via a flexible diaphragm coupling 380.

[0061] Using a flexible diaphragm coupling 380 to connect the power output end of the transmission screw 310 and the stepper motor 370 helps to reduce the output fluctuation of the stepper motor 370 and reduce the wobbling of the transmission screw 310.

[0062] like Figure 2 As shown, optionally, the drive module also includes a guide assembly, which includes a cooperating linear guide rail 390 and a slider (not shown). The guide assembly is located on both sides of the lead screw drive assembly, and the slide 200 is fixedly connected to the fixed connector 450. The angular displacement stage also includes a cross ball arc guide rail 500, which is located on both sides of the lead screw drive assembly. The plane in which the cross ball arc guide rail 500 is located is parallel to the linear guide rail 390 and the lead screw drive assembly.

[0063] By incorporating a linear guide rail 390 and a slider guide assembly, the motion accuracy of the lead screw transmission assembly can be improved and its vibration reduced. The cross ball arc guide rail 500 can be directly used to position the rotation of the slide table 200 relative to the base 100, thereby ensuring the stable operation of the slide table 200.

[0064] Specifically, in this embodiment, the portion of the fixed connector 450 near the first lead screw support 330 is provided with a slider connecting portion 451. If the slide table 200 is located above the base 100, the slider connecting portion 451 is located at the lower part of the fixed connector 450, and a slider connecting portion 451 is provided on both the front and rear sides of the fixed connector 450 to connect the corresponding slider, thereby making the slider fixed connector 450 uniformly stressed.

[0065] The cross-ball curved guide rails 500 are fixed to the base 100 and the slide table 200 respectively. A dial indicator is used to adjust the straightness of the cross-ball curved guide rails 500 to ensure the straightness of each set of cross-ball curved guide rails 500. Set screws are screwed into the set screw holes on the side of the slide table 200 to lock the cross-ball curved guide rails 500. Threadlocker is applied to the set screws for fixation. During the operation of the slide table 200, the distance between the transmission screw 310 and the cross-ball curved guide rails 500 remains at a constant value to ensure the straightness of the slide table 200's operation.

[0066] Furthermore, in this application, the control system can control the operation of the stepper motor 370 via a PLC and motion control card to achieve motion control of the slide table 200. Additionally, a photoelectric limit sensor (not shown) can be installed for safety protection to ensure the safe and stable operation of the slide table 200. An emergency stop button is also provided for rapid shutdown in emergency situations.

[0067] Of course, the above describes the use of a base 100 to rotatably connect a slide 200 to form angular displacement. Figure 6 The schematic diagram shows a structure of an angular displacement stage provided in this application, comprising two bases and two slides. (See attached diagram.) Figure 6 As shown, in practice, one of the bases 100 can be fixedly connected to the slide 200 below it, and the slide 200 is rotatably connected to the base 100. The rotation axes of the slides 200 and the base 100 in the two sets are orthogonal, so that the uppermost slide 200 can move on two orthogonal axes, and the uppermost slide 200 can output rotation on two orthogonal axes.

[0068] While this application discloses the above information, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of this application; therefore, the scope of protection of this application shall be determined by the scope defined in the claims.

[0069] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variations thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0070] In the above embodiments, descriptions of directions such as "up" and "down" are based on the accompanying drawings.

[0071] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application.

[0072] Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An angular displacement stage, characterized in that, The device includes a base (100), a slide (200), and a drive module. The drive module is mounted on the base (100). The drive module includes a linear drive mechanism (300) and a guide mechanism (400). The guide mechanism (400) is connected to the slide (200) and is mounted on the power output end of the linear drive mechanism (300). The guide mechanism (400) includes a first guide portion (411), a second guide portion (421), an elastic element (470), and a guide roller (440). The first guide portion (411) and the second guide portion (421) are arranged facing each other. The first guide portion (411) is fixedly arranged relative to the power output end of the linear drive mechanism (300). The guide roller (440) is tactilely connected to the first guide portion (411) and the second guide portion (421) respectively. The elastic element (470) is used to drive the second guide portion (421) to move closer to the first guide portion (411).

2. The angular displacement stage according to claim 1, characterized in that, The guide roller (440) includes two pairs of guide rollers, each pair of guide rollers including a first guide roller (441) and a second guide roller (442). The first guide roller (441) is rolledly connected to the first guide portion (411), and the second guide roller (442) is rolledly connected to the second guide portion (421). The forces exerted on each pair of guide rollers by the first guide portion (411) and the second guide portion (421) are opposite, and the torques exerted on the two pairs of guide rollers by the first guide portion (411) and the second guide portion (421) cancel each other out.

3. The angular displacement stage according to claim 2, characterized in that, The guide rollers (440) of each pair of guide wheels are rotatably mounted on a wheel axle (461).

4. The angular displacement stage according to claim 1, characterized in that, The guiding mechanism (400) further includes a guiding support (460), which is fixedly connected to the slide (200) and is positioned with the slide (200) by a positioning pin (480).

5. The angular displacement stage according to any one of claims 1-4, characterized in that, The first guide portion (411) is the surface of the first guide member (410) facing the second guide member (420), and the second guide portion (421) is the surface of the second guide member (420) facing the first guide member (410); the guide mechanism (400) includes a fixed connector (450), which is fixedly connected to the power output end of the linear drive mechanism (300); the first guide member (410) is fixedly installed on the fixed connector (450), and the elastic member (470) is provided between the second guide member (420) and the fixed connector (450), which is used to drive the second guide member (420) to move closer to the first guide member (410).

6. The angular displacement stage according to claim 5, characterized in that, The linear drive mechanism (300) includes a lead screw drive assembly, which includes a drive screw (310) and a lead screw nut that cooperate with each other. The lead screw nut is mounted on a lead screw nut seat (320), and the guide mechanism (400) is mounted on the lead screw nut seat (320). One end of the drive screw (310) is rotatably mounted on a first lead screw support seat (330), and the first lead screw support seat (330) and the lead screw nut seat (320) are connected by a constant force spring (350).

7. The angular displacement stage according to claim 6, characterized in that, The other end of the transmission screw (310) is rotatably mounted on the second screw support (340). Both ends of the transmission screw (310) are fixed with screw limiting nuts (360). One screw limiting nut (360) is located on the side of the first screw support (330) away from the second screw support (340), and the other screw limiting nut (360) is located on the side of the second screw support (340) away from the first screw support (330).

8. The angular displacement stage according to claim 6, characterized in that, The linear drive mechanism (300) further includes a stepper motor (370), which is connected to an encoder and is driven by the lead screw (310).

9. The angular displacement stage according to claim 8, characterized in that, The power output end of the stepper motor (370) is connected to the transmission screw (310) via a flexible diaphragm coupling (380).

10. The angular displacement stage according to claim 6, characterized in that, The drive module further includes a guide assembly, which includes a linear guide rail (390) and a slider that cooperate with each other. The guide assembly is located on both sides of the lead screw drive assembly. The slide table (200) is fixedly connected to the fixed connector (450). The angular displacement stage also includes a cross ball arc guide rail (500), which is located on both sides of the lead screw drive assembly. The plane in which the cross ball arc guide rail (500) is located, the linear guide rail (390), and the lead screw drive assembly are arranged in parallel.

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