Lighting device, lighting method, and semiconductor optical detection system

Abstract

The application relates to an illumination device, an illumination method and a semiconductor optical detection system. The illumination device comprises a light source, an optical assembly and an out-light module. The light source is configured to emit an illumination light beam in response to an illumination request. The optical assembly is located on a transmission path of the illumination light beam and is configured to convert the illumination light beam into a bright-field illumination light beam in a bright-field illumination mode and convert the illumination light beam into a dark-field illumination light beam in a dark-field illumination mode. The out-light module is located on an out-light side of the optical assembly and is configured to transmit the bright-field illumination light beam to a detection area in the bright-field illumination mode and transmit the dark-field illumination light beam to the detection area in the dark-field illumination mode. The application can realize high-precision and high-efficiency illumination mode switching.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing equipment technology, and in particular to an illumination device, illumination method and semiconductor optical testing system. Background Technology

[0002] In semiconductor optical inspection, switching between bright and dark field illumination is a key technology, and it is usually achieved using an aperture rotundum. For example, when switching to bright field illumination, the central aperture of the aperture rotundum allows light to directly hit the sample along the optical axis (i.e., light passes through the center and is blocked from the sides), which is suitable for detecting surface undulations and defects. When switching to dark field illumination, the annular aperture of the aperture rotundum allows light to enter from all sides (i.e., light passes through the sides and is blocked from the center), and the light illuminates the sample at a large angle, which is suitable for detecting microscopic defects such as surface scratches and particles.

[0003] However, the mechanical structure of the aperture turntable is complex, requiring a precision rotating mechanism. This not only occupies a large space but is also susceptible to vibration, which can easily lead to insufficient switching accuracy. Furthermore, the aperture also blocks some light, reducing the utilization rate of light energy, especially in dark-field illumination, where the central light source is wasted, resulting in limited illumination uniformity and brightness. The rotation of the mechanical turntable in the aperture turntable takes time, resulting in a slow switching speed, which is difficult to meet the real-time switching requirements of high-speed inspection (such as wafer scanning). Summary of the Invention

[0004] Based on this, embodiments of this application provide an illumination device, illumination method, and semiconductor optical inspection system, which are compact in structure, have no mechanical obstruction, have fast switching speed and high light energy utilization, and can achieve high-precision and efficient illumination mode switching to improve the efficiency and accuracy of semiconductor optical inspection.

[0005] To achieve the above objectives, some embodiments of this application provide an illumination device for semiconductor optical inspection. The illumination device includes a light source, optical components, and a light-emitting module.

[0006] The light source is configured to emit an illumination beam in response to a lighting request.

[0007] The optical components are located in the transmission path of the illumination beam and are configured to convert the illumination beam into a bright field illumination beam in bright field illumination mode and into a dark field illumination beam in dark field illumination mode.

[0008] The light-emitting module is located on the light-emitting side of the optical component and is configured to: transmit a bright field illumination beam to the area to be detected in bright field illumination mode; and transmit a dark field illumination beam to the area to be detected in dark field illumination mode.

[0009] In some embodiments of the present application, the optical assembly comprises: a first concave tapered lens, a first displaceable profiled tapered lens, and a second concave tapered lens.

[0010] The first concave tapered lens is located on the light emitting side of the light source and is configured to convert the illumination light beam into a ring-shaped light beam.

[0011] The first displaceable profiled tapered lens is located on the light emitting side of the first concave tapered lens and is disposed coaxially with the first concave tapered lens, and is configured to be displaced to a first position along the optical axis in a dark field illumination mode to convert the ring-shaped light beam into a dark field illumination light beam, and to be displaced to a second position along the optical axis in a bright field illumination mode to convert the ring-shaped light beam into a converging light beam.

[0012] The second concave tapered lens is located on the light emitting side of the first displaceable profiled tapered lens and is disposed coaxially with the first displaceable profiled tapered lens, and is configured to convert the converging light beam into a bright field illumination light beam in the bright field illumination mode.

[0013] Exemplarily, the surface of the first displaceable profiled tapered lens close to the first concave tapered lens is a variable-angle tapered surface; the variable-angle tapered surface comprises: a first tapered surface and a second tapered surface.

[0014] The first tapered surface is located in a middle region and has a first taper angle, and the second tapered surface is located in an edge region and is connected to the first tapered surface and has a second taper angle, wherein the first taper angle is smaller than the second taper angle, and the distance from the first position to the first concave tapered lens is smaller than the distance from the second position to the first concave tapered lens.

[0015] Correspondingly, in the dark field illumination mode, the ring-shaped light beam is converted into a dark field illumination light beam via the first tapered surface.

[0016] In the bright field illumination mode, the ring-shaped light beam is converted into a converging light beam via the second tapered surface.

[0017] Exemplarily, the first concave tapered lens has a third taper angle, and the first taper angle is equal to the third taper angle.

[0018] In other embodiments of the present application, the optical assembly comprises: a first concave tapered lens and a second displaceable profiled tapered lens.

[0019] The first concave tapered lens is located on the light emitting side of the light source and is configured to convert the illumination light beam into a ring-shaped light beam.

[0020] The second movable irregular-shaped conical lens is located on the light-emitting side of the first concave conical lens and is arranged on the same optical axis as the first concave conical lens. The surface of the second movable irregular-shaped conical lens near the first concave conical lens is a variable-angle conical surface, and the surface of the second movable irregular-shaped conical lens away from the first concave conical lens is a concave conical surface. The second movable irregular-shaped conical lens is configured such that: in dark field illumination mode, it moves along the optical axis to a first position and converts the annular beam into a dark field illumination beam via the variable-angle conical surface; in bright field illumination mode, it moves along the optical axis to a second position and converts the annular beam into a bright field illumination beam via the variable-angle conical surface and the concave conical surface. The distance from the first position to the first concave conical lens is greater than the distance from the second position to the first concave conical lens.

[0021] In some embodiments of this application, the optical components include: a first concave conical lens, a third movable irregular conical lens, and a reflection component.

[0022] The first concave conical lens is located on the light-emitting side of the light source and is configured to convert the illumination beam into a ring beam.

[0023] The third movable irregular cone lens is located on the light-emitting side of the first concave cone lens and is set on the same optical axis as the first concave cone lens. It is configured to: move along the optical axis to the first position in dark field illumination mode to convert the ring beam into a dark field illumination beam; and move along the optical axis to the second position in bright field illumination mode.

[0024] The reflective component is located on the light-emitting side of the first concave conical lens and is configured to convert the ring beam into a bright field illumination beam in bright field illumination mode.

[0025] For example, the surface of the third movable irregular cone lens near the first concave cone lens is a frustum; the frustum includes a plane and an edge cone surface. The plane is located in the middle region. The edge cone surface is located in the edge region and connects to the plane.

[0026] Accordingly, the distance from the first position to the first concave conical lens is less than the distance from the second position to the first concave conical lens. In dark field illumination mode, the ring beam is converted into a dark field illumination beam via the edge cone surface.

[0027] For example, the reflective component includes a ring-shaped reflector and a reflective prism.

[0028] The annular reflector and the first concave conical lens are set on the same optical axis, and are configured to reflect the annular beam into a reflected beam that propagates along the direction perpendicular to the optical axis in bright field illumination mode.

[0029] The reflecting prism is located on the side of the third movable irregular cone lens away from the first concave cone lens along the optical axis and is opposite to the ring mirror along the direction perpendicular to the optical axis. It is configured to convert the reflected beam into a bright field illumination beam in bright field illumination mode.

[0030] In some embodiments of this application, the lighting device further includes a control module and a linear motion mechanism.

[0031] The control module is configured to respond to lighting requests, generate dark field lighting control commands in dark field lighting mode, and generate bright field lighting control commands in bright field lighting mode.

[0032] The linear motion mechanism is connected to the control module and the corresponding movable irregular cone lens, and is configured to: move the movable irregular cone lens to the first position in response to the dark field illumination control command; and move the movable irregular cone lens to the second position in response to the bright field illumination control command.

[0033] In some embodiments of this application, the lighting device further includes a collimation module.

[0034] The collimation module is located between the light source and the first concave conical lens, and is set on the same optical axis as the first concave conical lens, and is configured to collimate the illumination beam.

[0035] In some embodiments of this application, the light-emitting module includes: a beam splitter, an objective lens, and a reflector sleeved on the outside of the objective lens.

[0036] Correspondingly, the central region of the objective lens forms a brightfield illumination beam transmission channel.

[0037] The space between the tubes of the mirror and the objective lens forms the transmission channel for the dark field illumination beam.

[0038] The beam splitter is configured to transmit the bright field illumination beam to the bright field illumination beam transmission channel in bright field illumination mode and to transmit the dark field illumination beam to the dark field illumination beam transmission channel in dark field illumination mode.

[0039] For example, the light-emitting module also includes a converging lens.

[0040] The converging lens is located on the light-emitting side of the optical assembly and is configured to converge the bright-field illumination beam to the focal plane of the objective lens in bright-field illumination mode; wherein the focal plane of the objective lens is also located on the beam splitter.

[0041] In some embodiments of this application, the lighting device further includes an imaging module.

[0042] The imaging module is located on the side of the objective lens away from the area to be detected, and is configured to acquire the detection light signal collected by the objective lens and form a detection image based on the detection light signal.

[0043] For example, the axis of the objective lens is orthogonal to the optical axis of the optical component.

[0044] For example, the imaging module includes a tube mirror and a detector.

[0045] The tube lens is positioned on the side of the beam splitter away from the objective lens and is coaxial with the objective lens. It is configured to converge the detection light signal collected by the objective lens to form a detection beam.

[0046] The detector is located on the side of the tube mirror away from the objective lens and is configured to receive the detection beam and form a detection image based on the detection beam.

[0047] On the other hand, some embodiments of this application also provide a lighting method applied to the lighting device described in any of the foregoing embodiments. This lighting method includes the following steps:

[0048] The light source emits an illumination beam in response to an illumination request;

[0049] In bright field illumination mode, the optical components convert the illumination beam into a bright field illumination beam, and the light output module transmits the bright field illumination beam to the area to be detected;

[0050] In dark field illumination mode, the optical components convert the illumination beam into a dark field illumination beam, and the light output module transmits the dark field illumination beam to the area to be detected.

[0051] In some embodiments of this application, the optical components include: a first concave conical lens, a first movable irregular conical lens, and a second concave conical lens arranged coaxially.

[0052] Accordingly, in the dark field illumination mode, the optical component converts the illumination beam into a dark field illumination beam, including: a first concave conical lens converting the illumination beam into a ring beam; and a first movable irregular conical lens moving along the optical axis to a first position to convert the ring beam into a dark field illumination beam.

[0053] In the bright field illumination mode, the optical components convert the illumination beam into a bright field illumination beam, including: a first concave conical lens converting the illumination beam into a ring beam; a first movable irregular conical lens moving along the optical axis to a second position to convert the ring beam into a converging beam; and a second concave conical lens converting the converging beam into a bright field illumination beam.

[0054] In other embodiments of this application, the optical component includes: a first concave conical lens and a second movable irregular conical lens arranged coaxially. The surface of the second movable irregular conical lens near the first concave conical lens is a variable-angle conical surface, and the surface of the second movable irregular conical lens away from the first concave conical lens is a concave conical surface.

[0055] Accordingly, in the dark field illumination mode, the optical components convert the illumination beam into a dark field illumination beam, including: a first concave conical lens converting the illumination beam into a ring beam; and a second movable irregular conical lens moving along the optical axis to a first position, converting the ring beam into a dark field illumination beam via a variable-angle conical surface.

[0056] In the bright field illumination mode, the optical components convert the illumination beam into a bright field illumination beam, including: a first concave conical lens converting the illumination beam into a ring beam; and a second movable irregular conical lens moving along the optical axis to a second position, converting the ring beam into a bright field illumination beam via a variable-angle conical surface and a concave conical surface; wherein the distance from the first position to the first concave conical lens is greater than the distance from the second position to the first concave conical lens.

[0057] In some embodiments of this application, the optical component includes: a first concave conical lens and a third movable irregular conical lens arranged coaxially, and a reflective component located on the light-emitting side of the first concave conical lens. The surface of the third movable irregular conical lens near the first concave conical lens is a frustum, the frustum including a plane in the middle region and an edge conical surface in the edge region and connected to the plane.

[0058] Accordingly, in the dark field illumination mode, the optical components convert the illumination beam into a dark field illumination beam, including: a first concave conical lens converting the illumination beam into a ring beam; and a third movable irregular conical lens moving along the optical axis to a first position, converting the ring beam into a dark field illumination beam via an edge conical surface.

[0059] In the bright field illumination mode, the optical component converts the illumination beam into a bright field illumination beam, including: a first concave conical lens converting the illumination beam into a ring beam; a third movable irregular conical lens moving along the optical axis to a second position, and a reflection component converting the ring beam into a bright field illumination beam; wherein the distance from the first position to the first concave conical lens is less than the distance from the second position to the first concave conical lens.

[0060] In some embodiments of this application, the light-emitting module includes: a beam splitter, an objective lens, and a reflector sleeved on the outside of the objective lens.

[0061] Accordingly, the light-emitting module transmits the dark field illumination beam to the area to be detected by transmitting the dark field illumination beam to the area to be detected via the spaced channel between the tubes of the reflector and the objective lens.

[0062] The light-emitting module transmits a bright-field illumination beam to the area to be detected, including transmitting the bright-field illumination beam to the area to be detected via the central region of the objective lens.

[0063] In another aspect, some embodiments of this application also provide a semiconductor optical inspection system, including the lighting device as described in any of the preceding embodiments.

[0064] The embodiments of this application may have, or at least have, the following advantages:

[0065] In this embodiment, an optical component is placed along the transmission path of the illumination beam between the light source and the light-emitting module. This component can convert the illumination beam into a bright-field illumination beam in bright-field illumination mode and into a dark-field illumination beam in dark-field illumination mode, thus achieving illumination switching between bright and dark fields. This optical component, as a module capable of controlling, converting, transmitting, and detecting light, can be composed of optical elements (such as lenses, prisms, and mirrors). Compared to the aperture turntable in related technologies, this optical component offers advantages such as compact structure, no mechanical obstruction, rapid switching, and high light energy utilization. Therefore, by setting this optical component, this embodiment can achieve dynamic control of the illumination light path in bright and dark fields based on the principle of optical refraction, realizing high-precision and efficient illumination mode switching. This overcomes the shortcomings of aperture turntables in related technologies in terms of mechanical switching, thereby improving the efficiency and accuracy of semiconductor detection.

[0066] Details of one or more embodiments of this application are set forth in the following drawings and description. Other features, objects, and advantages of this application will become apparent from the specification, drawings, and claims. Attached Figure Description

[0067] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0068] Figure 1 This is a schematic diagram of the structure of a lighting device provided in some embodiments;

[0069] Figure 2 This is a schematic diagram of the structure of a first concave cone lens provided in some embodiments;

[0070] Figure 3 This is a schematic diagram of the structure of a first movable irregular cone lens provided in some embodiments;

[0071] Figure 4 for Figure 3 The image shows an enlarged view of the optical path of the first movable irregular cone lens in dark field illumination mode.

[0072] Figure 5 for Figure 3 The image shows an enlarged view of the optical path of the first movable irregular cone lens in bright field illumination mode.

[0073] Figure 6 This is a schematic diagram of the structure of a second concave cone lens provided in some embodiments;

[0074] Figure 7 This is a schematic diagram of another lighting device provided in some embodiments;

[0075] Figure 8 This is a schematic diagram of the structure of yet another lighting device provided in some embodiments;

[0076] Figure 9 This is a flowchart illustrating a lighting method provided in some embodiments;

[0077] Figure 10 for Figure 1 A schematic diagram of the lighting device in dark field lighting mode;

[0078] Figure 11 for Figure 1 A schematic diagram of the lighting device in bright field lighting mode;

[0079] Figure 12 for Figure 7 A schematic diagram of the lighting device in dark field lighting mode;

[0080] Figure 13 for Figure 7 A schematic diagram of the lighting device in bright field lighting mode;

[0081] Figure 14 for Figure 8 A schematic diagram of the lighting device in dark field lighting mode;

[0082] Figure 15 for Figure 8 The diagram shows the state of the lighting device in bright field lighting mode.

[0083] Explanation of reference numerals in the attached figures:

[0084] 10-Light source, 20-Optical components, 30-Light emission module, 40-Collimation module, 50-Imaging module, 60-Sample to be tested; 21-First concave conical lens, 22-First movable irregular conical lens, 23-Second concave conical lens, 24-Second movable irregular conical lens, 25-Third movable irregular conical lens, 26-Reflection component, 261-Ring mirror, 262-Reflection prism, 31-Beam splitter, 32-Objective lens, 33-Mirror, 34-Converging lens, 51-Tube mirror, 52-Detector;

[0085] SS - Variable angle cone, S1 - First cone, S2 - Second cone, SA - Concave cone, ST - Frustum, S3 - Plane, S4 - Edge cone, α1 - First cone angle, α2 - Second cone angle, α3 - Third cone angle, α4 - Fourth cone angle, L1 - First position, L2 - Second position, β - Diffusion angle, δL - Moving distance, θ1 - First included angle, θ2 - Second included angle, θ3 - Third included angle, θ4 - Fourth included angle, θ5 - Fifth included angle, θ6 - Sixth included angle. Detailed Implementation

[0086] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate preferred embodiments of the application. However, this application may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0087] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0088] It should be understood that when an element or layer is referred to as being "on," "adjacent to," or "connected to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. It should be understood that although the terms "first," "second," etc., may be used to describe various elements, components, regions, layers, doping types, and / or portions, these elements, components, regions, layers, doping types, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer, doping type, or portion from another element, component, region, layer, doping type, or portion. Therefore, without departing from the teachings of this application, the first element, component, region, layer, doping type, or portion discussed below may be referred to as a second element, component, region, layer, or portion.

[0089] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that when the terms “comprise” and / or “comprising” are used in this specification, the presence of the stated feature, integer, step, operation, element, and / or part is established, but the presence or addition of one or more other features, integers, steps, operations, elements, parts, and / or groups is not excluded. Meanwhile, when used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0090] Please see Figure 1This application provides an illumination device for semiconductor optical inspection. The illumination device includes a light source 10, an optical component 20, and a light-emitting module 30.

[0091] The light source 10 is configured to emit an illumination beam in response to an illumination request. The light source 10 includes, but is not limited to, LED (Light-Emitting Diode) light sources, halogen lamps, or laser light sources.

[0092] The optical component 20 is located on the transmission path of the illumination beam and is configured to convert the illumination beam into a bright field illumination beam in bright field illumination mode and to convert the illumination beam into a dark field illumination beam in dark field illumination mode.

[0093] Here, the optical assembly 20, as a module capable of controlling, converting, transmitting, and detecting light, can be composed of optical elements (such as lenses, prisms, mirrors, etc.). These optical elements are made of optical materials and can have specific shapes, surface characteristics, and optical properties for controlling, altering, and manipulating the propagation of light beams. The number, type, optical parameters, and optical properties of each optical element in the optical assembly 20 can be designed to match its interaction with other optical elements to ensure the achievement of the corresponding functions.

[0094] The light-emitting module 30 is located on the light-emitting side of the optical component 20 and is configured to: transmit a bright field illumination beam to the area to be detected in bright field illumination mode; and transmit a dark field illumination beam to the area to be detected in dark field illumination mode.

[0095] In this embodiment, an optical component 20 is provided on the transmission path of the illumination beam between the light source 10 and the light-emitting module 30. This optical component 20 can convert the illumination beam into a bright field illumination beam in bright field illumination mode and into a dark field illumination beam in dark field illumination mode, thereby achieving illumination switching between bright and dark fields. Compared with the aperture turntable in related technologies, this optical component 20 has advantages such as compact structure, no mechanical obstruction, rapid switching, and high light energy utilization. Therefore, by setting this optical component 20, this embodiment can achieve dynamic control of the illumination light path in bright and dark fields based on the principle of optical refraction, realizing high-precision and efficient illumination mode switching, thereby solving the defects of aperture turntables in related technologies in mechanical switching, and thus improving the efficiency and accuracy of semiconductor detection.

[0096] The following embodiments of this application provide some possible implementations of the optical component 20, but are not limited thereto.

[0097] For some possible implementations, please refer to Figure 1The optical component 20 includes: a first concave conical lens 21, a first movable irregular conical lens 22, and a second concave conical lens 23.

[0098] Please combine Figure 1 and Figure 2 It is understood that the first concave conical lens 21 is located on the light-emitting side of the light source 10, and the concave surface of the first concave conical lens 21 faces the first movable irregular conical lens 22. The first concave conical lens 21 is configured to convert the illumination beam into a ring beam.

[0099] For example, the ring beam is a hollow ring, the center line of the ring beam is the optical axis of the optical component 20, and the optical signal of the ring beam is transmitted outward at a small cone angle β, that is, β is the diffusion angle of the first concave cone lens 21.

[0100] For example, if the angle between the concave surface of the first concave conical lens 21 and the optical axis is taken as the first included angle θ1, then:

[0101] ;

[0102] Where, n 21 Let be the refractive index of the first concave conical lens 21.

[0103] For example, the material of the first concave conical lens 21 includes, but is not limited to, fused silica.

[0104] For example, the first concave conical lens 21 is suitable for illumination beams in the ultraviolet and visible light bands.

[0105] Please combine Figures 1-5 It is understood that the first movable irregular cone lens 22 is located on the light-emitting side of the first concave cone lens 21 and is set on the same optical axis as the first concave cone lens 21. It is configured to: move along the optical axis to the first position L1 in dark field illumination mode to convert the ring beam into a dark field illumination beam; and move along the optical axis to the second position L2 in bright field illumination mode to convert the ring beam into a converging beam.

[0106] For example, such as Figure 3 As shown, the surface of the first movable irregular cone lens 22 near the first concave cone lens 21 is a variable-angle cone surface SS, which includes a first cone surface S1 and a second cone surface S2. The first cone surface S1 is located in the middle region of the first movable irregular cone lens 22 and has a first cone angle α1. The second cone surface S2 is located in the edge region of the first movable irregular cone lens 22 and connects to the first cone surface S1, and has a second cone angle α2. The first cone angle α1 is, for example, smaller than the second cone angle α2.

[0107] For example, the difference between the second cone angle α2 and the first cone angle α1 is greater than or equal to 15°.

[0108] For example, the first concave conical lens 21 has a third cone angle α3. The first cone angle α1 of the first conical surface S1 in the first movable irregular conical lens 22 is matched with the third cone angle α3 of the first concave conical lens 21, for example, the first cone angle α1 is equal to the third cone angle α3, that is, α1=α3.

[0109] Based on this, the distance from the first position L1 to the first concave conical lens 21 is less than the distance from the second position L2 to the first concave conical lens 21. The first movable irregular conical lens 22 moves a distance δL between the first position L1 and the second position L2, and this distance δL can be, for example, greater than or equal to 5mm.

[0110] Accordingly, please combine Figure 3 and Figure 4 Under the dark field illumination mode, the ring beam is converted into a dark field illumination beam via the first conical surface S1. For example, if the ring beam is incident on the first conical surface S1 at a second angle θ2, it can be refracted by the first conical surface S1 into a parallel collimated beam (i.e., a dark field illumination beam). The angle between this parallel collimated beam and the first conical surface S1 is a third angle θ3, and the beam diameter of this parallel collimated beam matches the entrance pupil of the objective lens 32 in the light output module 30; wherein:

[0111] ;

[0112] ;

[0113] Where, n 22 is the refractive index of the first movable irregular cone lens 22.

[0114] Accordingly, please combine Figure 3 and Figure 5 Under bright-field illumination, the ring beam is converted into a converging beam via the second conical surface S2. The center of this converging beam is focused towards the optical axis, forming a solid spot. For example, if the ring beam is incident on the second conical surface S2 at a fourth angle θ4, it undergoes one refraction at the second conical surface S2, and then a second refraction at the surface of the first movable irregular conical lens 22 towards the second concave conical lens 23, exiting as a converging beam at a fifth angle θ5. If the angle between the second conical surface S2 and the optical axis is defined as the sixth angle θ6, then:

[0115] ;

[0116] ;

[0117] Where, n 22 is the refractive index of the first movable irregular cone lens 22.

[0118] Please combine Figure 1 and Figure 6It is understood that the second concave conical lens 23 is located on the light-emitting side of the first movable irregular conical lens 22 and is coaxially arranged with the first movable irregular conical lens 22. The concave surface of the second concave conical lens 23 faces the first movable irregular conical lens 22, and the second concave conical lens 23 is configured to convert the converging beam into a bright field illumination beam in bright field illumination mode. The bright field illumination beam is a parallel collimated beam.

[0119] For example, if the converging beam is incident on the second concave conical lens 23 at a seventh included angle θ7, and the angle between the concave surface of the second concave conical lens 23 and the optical axis is an eighth included angle θ8, then:

[0120] ;

[0121] Where, n 23 is the refractive index of the second concave conical lens 23.

[0122] In some other possible implementations, please refer to Figure 7 The optical component 20 includes: a first concave cone lens 21 and a second movable irregular cone lens 24.

[0123] Here, the structure of the first concave conical lens 21 can be referred to the relevant descriptions in some of the foregoing embodiments. In this application embodiment, only the key structural parts that differ from the foregoing embodiments are illustrated in detail.

[0124] Please see Figure 7 The second movable irregular-shaped conical lens 24 is located on the light-emitting side of the first concave conical lens 21 and is arranged coaxially with the first concave conical lens 21. The surface of the second movable irregular-shaped conical lens 24 near the first concave conical lens 21 is a variable-angle conical surface SS, and the surface of the second movable irregular-shaped conical lens 24 away from the first concave conical lens 21 is a concave conical surface SA. The second movable irregular-shaped conical lens 24 is configured to: move along the optical axis to a first position L1 in dark field illumination mode, and convert the ring beam into a dark field illumination beam via the variable-angle conical surface SS; move along the optical axis to a second position L2 in bright field illumination mode, and convert the ring beam into a bright field illumination beam via the variable-angle conical surface SS and the concave conical surface SA. The distance from the first position L1 to the first concave conical lens 21 is greater than the distance from the second position L2 to the first concave conical lens 21.

[0125] For example, such as Figure 7As shown, the variable-angle conical surface SS of the second movable irregular conical lens 24 includes: a first conical surface S1 and a second conical surface S2; wherein, the first conical surface S1 is located in the middle region of the second movable irregular conical lens 24, and the second conical surface S2 is located in the edge region of the second movable irregular conical lens 24 and connects to the first conical surface S1, and the cone angle of the first conical surface S1 is, for example, greater than the second cone angle α2 of the second conical surface S2. Accordingly, in dark field illumination mode, the second movable irregular conical lens 24 moves along the optical axis to the first position L1, and converts the ring beam into a dark field illumination beam via the second conical surface S2. In bright field illumination mode, the second movable irregular conical lens 24 moves along the optical axis to the second position L2, and converts the ring beam into a bright field illumination beam via the first conical surface S1 and the concave conical surface SA.

[0126] In some other possible implementations, please refer to Figure 8 The optical component 20 includes: a first concave conical lens 21, a third movable irregular conical lens 25, and a reflection component 26.

[0127] Here, the structure of the first concave conical lens 21 can be referred to the relevant descriptions in some of the foregoing embodiments. In this application embodiment, only the key structural parts that differ from the foregoing embodiments are illustrated in detail.

[0128] like Figure 8 As shown, the third movable irregular cone lens 25 is located on the light-emitting side of the first concave cone lens 21 and is set on the same optical axis as the first concave cone lens 21. It is configured to: move along the optical axis to the first position L1 in dark field illumination mode to convert the ring beam into a dark field illumination beam; and move along the optical axis to the second position L2 in bright field illumination mode.

[0129] like Figure 8 As shown, the reflective component 26 is located on the light-emitting side of the first concave conical lens 21, for example, on the side of the third movable irregular conical lens 25 away from the first concave conical lens 21 along the optical axis, and is configured to convert the ring beam into a bright field illumination beam in bright field illumination mode.

[0130] For example, such as Figure 8 As shown, the surface of the third movable irregular cone lens 25 near the first concave cone lens 21 is a frustum ST, which includes a plane S3 and an edge cone surface S4. The plane S3 is located in the middle region of the third movable irregular cone lens 25. The edge cone surface S4 is located in the edge region of the third movable irregular cone lens 25 and connects to the aforementioned plane S3. Accordingly, the distance from the first position L1 to the first concave cone lens 21 is less than the distance from the second position L2 to the first concave cone lens. In dark field illumination mode, the ring beam is converted into a dark field illumination beam via the edge cone surface S4 of the third movable irregular cone lens 25.

[0131] For example, such asFigure 8 As shown, the reflecting assembly 26 includes an annular reflector 261 and a reflecting prism 262. The annular reflector 261 is coaxially arranged with the first concave conical lens 21 and configured to reflect the annular beam into a reflected beam that propagates along the perpendicular optical axis in bright-field illumination mode. The reflecting prism 262 is located along the optical axis on the side of the third movable irregular conical lens 25 opposite to the first concave conical lens 21 and is opposite to the annular reflector 261 along the perpendicular optical axis. It is configured to convert the reflected beam into a bright-field illumination beam in bright-field illumination mode.

[0132] In summary, the optical component 20 provided in this application embodiment has a compact structure and can achieve the switching between bright and dark field illumination beams (i.e., dynamic conversion between ring light and solid light) by moving a corresponding movable irregularly shaped conical lens along the optical axis. For example, it can be based on the variable-angle conical surface SS or frustum surface ST of the movable irregularly shaped conical lens, that is, selective control of the optical path can be achieved by the angle of the same lens in different aperture regions, so that the volume of the optical component 20 can be reduced by more than 50% compared with the aperture turntable in related technologies, making it suitable for integrated semiconductor optical detection systems. Furthermore, the optical component 20 in this application embodiment has a high light energy utilization rate. For example, there is no central light beam obstruction in dark field illumination mode, while it can converge and utilize edge light in bright field illumination mode. This light energy utilization rate can be effectively improved by more than 30% compared with the aperture turntable in related technologies. In addition, the optical component 20 in this application embodiment does not require the setting of mechanical rotating parts, which also helps to reduce the impact of wear and vibration. The lifespan of the optical component 20 can be increased by more than 3 times compared with the aperture turntable in related technologies, and it has high reliability.

[0133] It is worth mentioning that, in some embodiments of this application, the lighting device further includes: a control module and a linear motion mechanism ( Figure 1 , Figure 7 and Figure 8 (Not shown in the image). The control module is configured to: generate dark field lighting control commands in dark field lighting mode and generate bright field lighting control commands in bright field lighting mode in response to lighting requests. The linear motion mechanism is connected to the control module and the corresponding movable irregular cone lens, and is configured to: move the movable irregular cone lens to a first position in response to dark field lighting control commands; and move the movable irregular cone lens to a second position in response to bright field lighting control commands.

[0134] For example, the control module in the lighting device is connected to a host computer. The user can select either a bright field detection mode or a dark field detection mode through the software on the host computer to generate a lighting request and cause the control module to generate corresponding bright field control commands or dark field control commands.

[0135] Optionally, the control module includes, but is not limited to, a programmable logic controller (PLC) or a motion control card.

[0136] For example, the linear motion mechanism includes, but is not limited to, servo motors and high-precision guide rail mechanisms.

[0137] Optionally, the positioning accuracy of the high-precision guide rail mechanism is ±1μm.

[0138] Optionally, the servo motor is a voice coil motor, which has no backlash and can respond quickly.

[0139] In this embodiment, the position of the corresponding movable irregular cone lens is controlled by an axial movement switching mechanism, which can achieve rapid switching without mechanical vibration and with sub-micron precision. For example, the switching time of the bright and dark field illumination mode can be controlled to be less than 10ms.

[0140] In some embodiments of this application, please refer to Figure 1 , Figure 7 and Figure 8 If the illumination beam emitted by the light source 10 is divergent, the illumination device also includes a collimation module 40. The collimation module 40 is located between the light source 10 and the first concave conical lens 21, and is set on the same optical axis as the first concave conical lens 21. It is configured to collimate the illumination beam to convert the divergent light of the illumination beam into parallel collimated light.

[0141] For example, the collimation module 40 includes, but is not limited to, a collimating lens.

[0142] In some embodiments of this application, please refer to Figure 1 , Figure 7 and Figure 8 The light-emitting module 30 includes a beam splitter 31, an objective lens 32, and a reflecting mirror 33 fitted onto the outside of the objective lens 32. Correspondingly, the central region of the objective lens 32 constitutes a bright-field illumination beam transmission channel. The spacer between the reflector 33 and the objective lens 32 constitutes a dark-field illumination beam transmission channel. The beam splitter 31 is configured to transmit the bright-field illumination beam to the bright-field illumination beam transmission channel in bright-field illumination mode and to transmit the dark-field illumination beam to the dark-field illumination beam transmission channel in dark-field illumination mode.

[0143] For example, please continue reading Figure 1 , Figure 7 and Figure 8 The light-emitting module 30 also includes a converging lens 34. The converging lens 34 is located on the light-emitting side of the optical component 20 and is configured to converge the bright-field illumination beam to the focal plane of the objective lens 32 in bright-field illumination mode; wherein the focal plane of the objective lens 32 is also located on the beam splitter 31.

[0144] Please refer to some embodiments of this application. Figure 1 , Figure 7 and Figure 8 The illumination system also includes an imaging module 50. The imaging module 50 is located on the side of the objective lens 32 away from the area to be detected, and is configured to: acquire the detection light signal collected by the objective lens 32, and form a detection image based on the detection light signal.

[0145] For example, the axis of objective lens 32 is orthogonal to the optical axis of optical component 20.

[0146] For example, the detection light signal collected by objective lens 32 includes reflected light and / or scattered light.

[0147] For example, please continue reading Figure 9 , Figures 10-15 and Figure 10 The imaging module 50 includes a tube mirror 51 and a detector 52. The tube mirror 51 is disposed on the side of the beam splitter 31 away from the objective lens 32 and is coaxially arranged with the objective lens 32. It is configured to converge the detection light signal collected by the objective lens 32 to form a detection beam. The detector 52 is disposed on the side of the tube mirror 51 away from the objective lens 32 and is configured to receive the detection beam and form a detection image based on the detection beam.

[0148] It is understandable that the imaging module 50 is triggered and started after the switching between bright and dark field illumination modes is completed, enabling high-speed detection.

[0149] In bright-field illumination mode, the central region of objective lens 32 can transmit a bright-field illumination beam to the sample surface of the area to be detected, for example, the bright-field illumination beam can be incident perpendicularly on the sample surface. After objective lens 32 collects the detection light signal (i.e., reflected light) formed by the undulations of the sample surface (such as steps, grooves, etc.), detector 52 can detect and obtain a detection image of the sample surface morphology.

[0150] In dark field illumination mode, the spacer between the reflector 33 and the objective lens 32 can transmit the dark field illumination beam to the sample surface of the area to be inspected. For example, the dark field illumination beam can be incident at a large angle (e.g., an angle ≥45° relative to the optical axis) on the sample surface through the tilted reflective surface of the reflector 33 near the area to be inspected. In this way, defects on the sample surface (such as particles or scratches) will scatter light into the objective lens 32, while the reflected light from the smooth areas of the sample surface will return along the original path and will not enter the objective lens 32. The detector 52 can detect and obtain a comparative image of defects on the sample surface.

[0151] Optionally, the area to be detected is the surface of the wafer stage. Switching between bright and dark field illumination modes can be performed while the wafer stage is moving.

[0152] Some embodiments of this application also provide a lighting method applied to the lighting device described in any of the foregoing embodiments. This lighting method also possesses all the technical advantages of the aforementioned lighting device, and will not be detailed here. Furthermore, the components of the lighting device involved in this lighting method can also be found in the relevant descriptions in the foregoing embodiments.

[0153] Please see Figure 11 The lighting method provided in this application includes the following steps S100~S300.

[0154] S100, the light source emits an illumination beam in response to an illumination request.

[0155] For example, please refer to Figure 10 The illumination beam emitted from the light source 10 can be directly incident on the optical component 20, or the illumination beam emitted from the light source 10 can be collimated by the collimation module 40 before being incident on the optical component 20.

[0156] In S200, under bright field illumination mode, the optical components convert the illumination beam into a bright field illumination beam, and the light output module transmits the bright field illumination beam to the area to be detected.

[0157] In the dark field illumination mode, the optical components convert the illumination beam into a dark field illumination beam, and the light output module transmits the dark field illumination beam to the area to be detected.

[0158] Please refer to some embodiments of this application. Figure 11 and Figures 10-15 The optical component 20 includes: a first concave conical lens 21, a first movable irregular conical lens 22, and a second concave conical lens 23 arranged coaxially.

[0159] Accordingly, such as Figure 10 As shown, in step S300, in dark field illumination mode, the optical component 20 converts the illumination beam into a dark field illumination beam, including: the first concave conical lens 21 converts the illumination beam into a ring beam; the first movable irregular conical lens 22 moves along the optical axis to the first position L1 and converts the ring beam into a dark field illumination beam.

[0160] like Figure 11 As shown, in step S200, in bright field illumination mode, the optical component 20 converts the illumination beam into a bright field illumination beam, including: the first concave conical lens 21 converts the illumination beam into a ring beam; the first movable irregular conical lens 22 moves along the optical axis to the second position L2 and converts the ring beam into a converging beam; and the second concave conical lens 23 converts the converging beam into a bright field illumination beam.

[0161] In some examples, the surface of the first movable irregular cone lens 22 near the first concave cone lens 21 is a variable-angle cone surface SS, which includes a first cone surface S1 and a second cone surface S2. The first cone surface S1 is located in the middle region of the first movable irregular cone lens 22 and has a first cone angle α1. The second cone surface S2 is located in the edge region of the first movable irregular cone lens 22 and connects to the first cone surface S1, and has a second cone angle α2. The first cone angle α1 is, for example, smaller than the second cone angle α2. The distance from the first position L1 to the first concave cone lens 21 is smaller than the distance from the second position L2 to the first concave cone lens 21. Accordingly, in dark-field illumination mode, the ring beam is converted into a dark-field illumination beam via the first cone surface S1. In bright-field illumination mode, the ring beam is converted into a converging beam via the second cone surface S2.

[0162] In some embodiments of this application, please refer to Figure 12 It is understood that the light-emitting module 30 includes: a beam splitter 31, an objective lens 32, and a reflector 33 sleeved on the outside of the objective lens 32.

[0163] Accordingly, such as Figure 13 As shown, in step S200, the light output module 30 transmits the dark field illumination beam to the area to be detected, including: the beam splitter 31 receives the dark field illumination beam and transmits the dark field illumination beam to the area to be detected through the spaced channel between the mirror 33 and the objective lens 32.

[0164] In step S300, the light-emitting module 30 transmits a bright-field illumination beam to the area to be detected, including: the beam splitter 31 receiving the bright-field illumination beam and transmitting the bright-field illumination beam through the central region of the objective lens 32 to the area to be detected.

[0165] Please refer to some embodiments of this application. Figure 12 The light-emitting module 30 also includes a converging lens 34. The illumination method further includes: in bright-field illumination mode, the converging lens 34 focuses the bright-field illumination beam onto the focal plane of the objective lens 32, i.e., the beam splitter 31.

[0166] In other embodiments of this application, please refer to Figure 13 and Figure 14 The optical component 20 includes a first concave conical lens 21 and a second movable irregular conical lens 24 arranged coaxially. The surface of the second movable irregular conical lens 24 near the first concave conical lens 21 is a variable-angle conical surface SS, and the surface of the second movable irregular conical lens 24 away from the first concave conical lens 21 is a concave conical surface SA.

[0167] Accordingly, such as Figure 15As shown, in step S300, in the dark field illumination mode, the optical component 20 converts the illumination beam into a dark field illumination beam, including: the first concave conical lens 21 converts the illumination beam into a ring beam; the second movable irregular conical lens 24 moves along the optical axis to the first position L1, and converts the ring beam into a dark field illumination beam via the variable angle conical surface SS.

[0168] like Figure 14 As shown, in step S200, in bright field illumination mode, the optical component 20 converts the illumination beam into a bright field illumination beam, including: the first concave conical lens 21 converts the illumination beam into a ring beam; the second movable irregular conical lens 24 moves along the optical axis to the second position L2, and converts the ring beam into a bright field illumination beam via the variable angle conical surface SS and the concave conical surface SA; wherein, the distance from the first position L1 to the first concave conical lens 21 is greater than the distance from the second position L2 to the first concave conical lens 21.

[0169] In some examples, the variable-angle conical surface SS of the second movable irregular conical lens 24 includes: a first conical surface S1 and a second conical surface S2; wherein the first conical surface S1 is located in the middle region of the second movable irregular conical lens 24, and the second conical surface S2 is located in the edge region of the second movable irregular conical lens 24 and connects to the first conical surface S1, and the cone angle of the first conical surface S1 is, for example, greater than the second cone angle α2 of the second conical surface S2. Accordingly, in dark-field illumination mode, the second movable irregular conical lens 24 moves along the optical axis to a first position L1, converting the annular beam into a dark-field illumination beam via the second conical surface S2. In bright-field illumination mode, the second movable irregular conical lens 24 moves along the optical axis to a second position L2, converting the annular beam into a bright-field illumination beam via the first conical surface S1 and the concave conical surface SA.

[0170] In some embodiments of this application, please refer to Figure 15 and Figures 10-15 The optical component 20 includes a first concave conical lens 21 and a third movable irregular conical lens 25 arranged coaxially, and a reflective component 26 located on the light-emitting side of the first concave conical lens 21. The surface of the third movable irregular conical lens 25 near the first concave conical lens 21 is a frustum ST, which includes a plane S3 located in the middle region and an edge conical surface S4 located in the edge region and connected to the plane S3.

[0171] Accordingly, such as ​ As shown, in step S300, in the dark field illumination mode, the optical component 20 converts the illumination beam into a dark field illumination beam, including: the first concave conical lens 21 converts the illumination beam into a ring beam; the third movable irregular conical lens 25 moves along the optical axis to the first position L1 and converts the ring beam into a dark field illumination beam via the edge conical surface S4.

[0172] In some examples, the surface of the third movable irregular cone lens 25 near the first concave cone lens 21 is a frustum ST, which includes a plane S3 and an edge cone surface S4. The plane S3 is located in the middle region of the third movable irregular cone lens 25. The edge cone surface S4 is located in the edge region of the third movable irregular cone lens 25 and connects to the aforementioned plane S3. Accordingly, the distance from the first position L1 to the first concave cone lens 21 is less than the distance from the second position L2 to the first concave cone lens. In dark field illumination mode, the ring beam is converted into a dark field illumination beam via the edge cone surface S4 of the third movable irregular cone lens 25.

[0173] like ​ As shown, in step S200, in bright field illumination mode, the optical component 20 converts the illumination beam into a bright field illumination beam, including: the first concave conical lens 21 converts the illumination beam into a ring beam; the third movable irregular conical lens 25 moves along the optical axis to the second position L2, and the reflection component 26 converts the ring beam into a bright field illumination beam; wherein, the distance from the first position L1 to the first concave conical lens 21 is less than the distance from the second position L2 to the first concave conical lens 21.

[0174] Some embodiments of this application also provide a semiconductor optical inspection system, including the illumination device as described in any of the preceding embodiments. This illumination method also possesses the technical advantages of the aforementioned illumination device, and will not be detailed here.

[0175] For example, semiconductor optical inspection systems include, but are not limited to, high-precision optical inspection systems such as wafer surface defect inspection systems or integrated circuit microscopic imaging inspection systems.

[0176] It is worth mentioning that, in some examples, the aforementioned lighting device can be constructed based on existing components in the semiconductor optical inspection system. For example, the light source 10, objective lens 32, tube lens 51, and detector 52 in the lighting device can be correspondingly used with existing light sources, objective lenses, tube lenses, and detectors in the semiconductor optical inspection system.

[0177] Some embodiments of this application also provide a semiconductor optical detection method. Please refer to [link to relevant documentation]. ​ The illumination device also includes an imaging module 50, which is located on the side of the objective lens 32 away from the area to be detected, and includes a tube lens 51 and a detector 52. The semiconductor optical detection method includes: the tube lens 51 converging the detection light signal collected by the objective lens 32 to form a detection beam; and the detector 52 receiving the detection beam and forming a detection image based on the detection beam.

[0178] In the description of this specification, references to terms such as "some embodiments," "some examples," "exemplarily," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative descriptions of the above terms do not necessarily refer to the same embodiments or examples.

[0179] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features of the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0180] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A lighting device, characterized in that, The illumination device, used in semiconductor optical inspection, includes: The light source is configured to emit an illumination beam in response to a lighting request; An optical component, located in the transmission path of the illumination beam, is configured to: convert the illumination beam into a bright field illumination beam in bright field illumination mode; and convert the illumination beam into a dark field illumination beam in dark field illumination mode. The light-emitting module, located on the light-emitting side of the optical component, is configured to: transmit the bright-field illumination beam to the area to be detected in the bright-field illumination mode; and transmit the dark-field illumination beam to the area to be detected in the dark-field illumination mode. The optical components include: The first concave conical lens, located on the light-emitting side of the light source, is configured to convert the illumination beam into a ring beam. A first movable irregular cone lens, located on the light-emitting side of the first concave cone lens and coaxial with the first concave cone lens, is configured to: move along the optical axis to a first position in the dark field illumination mode to convert the annular beam into the dark field illumination beam; and move along the optical axis to a second position in the bright field illumination mode to convert the annular beam into a converging beam. The second concave conical lens is located on the light-emitting side of the first movable irregular conical lens and is arranged on the same optical axis as the first movable irregular conical lens. It is configured to convert the converging beam into the bright field illumination beam in the bright field illumination mode.

2. The lighting device according to claim 1, characterized in that, The surface of the first movable irregular cone lens near the first concave cone lens is a variable-angle cone surface; the variable-angle cone surface includes: The first conical surface, located in the middle region, has the first conical angle; The second conical surface, located in the edge region and connected to the first conical surface, has a second conical angle; Wherein, the first cone angle is smaller than the second cone angle; the distance from the first position to the first concave cone lens is smaller than the distance from the second position to the first concave cone lens; In the dark field illumination mode, the annular beam is converted into the dark field illumination beam via the first conical surface; In the bright field illumination mode, the annular beam is converted into the converging beam via the second conical surface.

3. A lighting device, characterized in that, The illumination device, used in semiconductor optical inspection, includes: The light source is configured to emit an illumination beam in response to a lighting request; An optical component, located in the transmission path of the illumination beam, is configured to: convert the illumination beam into a bright field illumination beam in bright field illumination mode; and convert the illumination beam into a dark field illumination beam in dark field illumination mode. The light-emitting module, located on the light-emitting side of the optical component, is configured to: transmit the bright-field illumination beam to the area to be detected in the bright-field illumination mode; and transmit the dark-field illumination beam to the area to be detected in the dark-field illumination mode. The optical components include: The first concave conical lens, located on the light-emitting side of the light source, is configured to convert the illumination beam into a ring beam. The second movable irregular cone lens is located on the light-emitting side of the first concave cone lens and is arranged on the same optical axis as the first concave cone lens; the surface of the second movable irregular cone lens close to the first concave cone lens is a variable-angle cone surface, and the surface of the second movable irregular cone lens away from the first concave cone lens is a concave cone surface. The second movable irregular cone lens is configured to: move along the optical axis to a first position in the dark field illumination mode, and convert the annular beam into the dark field illumination beam via the variable angle cone surface; move along the optical axis to a second position in the bright field illumination mode, and convert the annular beam into the bright field illumination beam via the variable angle cone surface and the concave cone surface; the distance from the first position to the first concave cone lens is greater than the distance from the second position to the first concave cone lens.

4. A lighting device, characterized in that, The illumination device, used in semiconductor optical inspection, includes: The light source is configured to emit an illumination beam in response to a lighting request; An optical component, located in the transmission path of the illumination beam, is configured to: convert the illumination beam into a bright field illumination beam in bright field illumination mode; and convert the illumination beam into a dark field illumination beam in dark field illumination mode. The light-emitting module, located on the light-emitting side of the optical component, is configured to: transmit the bright-field illumination beam to the area to be detected in the bright-field illumination mode; and transmit the dark-field illumination beam to the area to be detected in the dark-field illumination mode. The optical components include: The first concave conical lens, located on the light-emitting side of the light source, is configured to convert the illumination beam into a ring beam. A third movable irregular cone lens is located on the light-emitting side of the first concave cone lens and is set on the same optical axis as the first concave cone lens. It is configured to: move along the optical axis to a first position in the dark field illumination mode to convert the ring beam into the dark field illumination beam; and move along the optical axis to a second position in the bright field illumination mode. The reflective component, located on the light-emitting side of the first concave conical lens, is configured to convert the annular beam into the bright field illumination beam in the bright field illumination mode.

5. The lighting device according to claim 4, characterized in that, The surface of the third movable irregular cone lens near the first concave cone lens is a frustum; the frustum includes: A plane, located in the middle area; An edge cone surface, located in the edge region and connecting the plane; Wherein, the distance from the first position to the first concave conical lens is less than the distance from the second position to the first concave conical lens; in the dark field illumination mode, the annular beam is converted into the dark field illumination beam via the edge conical surface.

6. The lighting device according to claim 4, characterized in that, The reflective component includes: The annular reflector, coaxial with the first concave conical lens, is configured to reflect the annular beam into a reflected beam that propagates along the direction perpendicular to the optical axis in the bright field illumination mode. The reflecting prism, located along the optical axis on the side of the third movable irregular cone lens away from the first concave cone lens and opposite to the annular reflector along the direction perpendicular to the optical axis, is configured to convert the reflected beam into the bright field illumination beam in the bright field illumination mode.

7. The lighting device according to any one of claims 1 to 6, characterized in that, The light-emitting module includes: a beam splitter, an objective lens, and a reflecting mirror sleeved on the outside of the objective lens; The central region of the objective lens constitutes a bright-field illumination beam transmission channel; The spacer channel between the tubes of the reflector and the objective lens constitutes a dark field illumination beam transmission channel. The beam splitter is configured to: transmit the bright field illumination beam to the bright field illumination beam transmission channel in the bright field illumination mode; and transmit the dark field illumination beam to the dark field illumination beam transmission channel in the dark field illumination mode.

8. A lighting method, characterized in that, The lighting method, applied to any one of claims 1 to 7, comprises: The light source emits an illumination beam in response to an illumination request; In bright field illumination mode, the optical component converts the illumination beam into a bright field illumination beam, and the light output module transmits the bright field illumination beam to the area to be detected; In dark field illumination mode, the optical component converts the illumination beam into a dark field illumination beam, and the light output module transmits the dark field illumination beam to the area to be detected.

9. A semiconductor optical inspection system, characterized in that, include: The lighting device as described in any one of claims 1 to 7.

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