Method for iteratively generating matrix from base elements

By optimizing the arrangement of the sensor array and iterative operator processing, the error problem of polarization sensors under non-uniform illumination conditions was solved, and higher precision polarization measurement was achieved.

CN121013968APending Publication Date: 2025-11-25PURDY MICROELECTRONICS CO LTD
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Patent Information

Application Number
CN202380095106.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-01-01
Filing Date
2023-12-29
Publication Date
2025-11-25

AI Technical Summary

Technical Problem

Existing polarization sensors are prone to errors under non-uniform lighting conditions, making it difficult to effectively distinguish between brightness gradients and polarization information, especially under non-linear lighting conditions such as LED lighting.

Method used

By iteratively applying modified and extended operators, the arrangement of the sensor array is optimized to form a matrix arrangement with the minimum error signal. The matrix characteristics are evaluated by combining virtual experiments, and the optimal arrangement is selected to reduce the sensitivity to local interference.

Benefits of technology

This effectively reduces the error of the sensor array under non-uniform lighting conditions and improves the accuracy and stability of polarization measurement.

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Abstract

The invention relates to a method for generating a matrix from basic elements (sensors, antennas, electronics). According to the invention, a base matrix is first formed, which contains at least all base elements once, modification operators, such as rotation and mirroring, are applied iteratively, by means of which the base matrix or a matrix derived from the base matrix can be converted into a modified matrix, expansion operators are applied iteratively, and the modified matrix is converted into a modified matrix, such as rotation and mirroring, by means of which expansion operators, such as rotation and mirroring, by means of rotation and mirroring, by means of rotation and mirroring. The expansion operator forms a larger matrix from a plurality of optionally modified matrices of previous iterations by copying, rotating or mirroring by filling portions of the larger matrix with optionally modified smaller matrices, performing a virtual experiment, and performing a virtual experiment. Wherein the properties of the generated matrix are researched by systematically generating pertinently erroneous values from which error signals can be derived, in order to generate a complex matrix, first all permutations of the next larger matrix are formed by an extension operator and evaluated by a virtual experiment, and then all permutations of the next larger matrix are evaluated by a virtual experiment. Subsequently, a next larger matrix with the minimum error signal is selected, and then the next larger matrix is gradually formed from these matrices by an expansion operator and evaluated by a virtual experiment until the error signal does not exceed a predetermined limit.
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Description

TECHNICAL FIELD

[0001] The invention relates to a method for iteratively generating matrices from elementary elements according to the preamble of claim 1 and to an arrangement of four different elementary elements to an 8x8 matrix according to claim 2 and to an arrangement of four different elementary elements to a 16x16 matrix according to claim 3 and to an arrangement of four different elementary elements to a 32x32 matrix according to claim 4 and to an integrated circuit for measuring the polarization of light according to claim 7 and to an integrated circuit for measuring the polarization of light according to claim 8 and to an integrated circuit for measuring the polarization of light according to claim 9 and to an integrated circuit for measuring the polarization of light according to claim 10 and to an integrated circuit for measuring the polarization of light according to claim 11. BACKGROUND

[0002] The known prior art on which the invention is based (DE 102005031966 A1, EP 1902334 A1 ) relates to a method for iteratively generating matrices according to the preamble of claim 1.

[0003] The invention relates to an arrangement of elements, in particular sensors, which has a reduced influence of undesired parameters such as spatially inhomogeneous signal strength or manufacturing gradients, and to a method for generating such an arrangement. The use of such an arrangement can be found, for example, in the field of polarization, color and magnetic field measurements.

[0004] With respect to optical encoders, polarization angle sensors have the great advantage that they are insensitive to mechanical tolerances and vibrations by using unstructured polarization filters as rotary encoders. The basic measurement principle based on Malus' law can already be demonstrated with a single sensor which is sensitive to polarization. This measurement principle only becomes practically usable in the case of the use of at least two sensors which respond to different polarization directions, respectively. An especially advantageous arrangement results from four filters which are twisted by 45° each (DE 102005031966 A1, EP 1902334 A1 ). The advantage results therefrom that the four signals form a differential quadrature signal. Thus, upon rotation of the polarization plane of the incident light, a sine and a cosine signal occur which can be evaluated independently of the brightness of the incident light.

[0005] However, this simple arrangement still has disadvantages: the arrangement provides an erroneous signal in the case of inhomogeneous illumination, since the differently oriented sensor fields are then illuminated differently strongly. This effect cannot be distinguished without problems from the corresponding polarization information. With the aid of surrounding brightness sensors it is possible, for example, to determine a linear brightness gradient and its strength and direction and to take this into account in the signal evaluation. However, this is not successful in the case of very inhomogeneous illumination with a non-linear gradient, for example the illumination profile of an LED.

[0006] In order to reduce the errors caused by brightness gradients, it is possible to divide the desired overall sensor area into smaller sub-sensors and to distribute the different sub-sensors appropriately. This is an absolutely common procedure in electronics, which is used, for example, also for the placement of cross-coupled pairs or for the arrangement of current sources in a DAC. There it is a matter of production-determined gradients in the component parameters or of system-determined temperature gradients, voltages on printed conductors, etc.

[0007] Similar but not identical rules apply for the distribution of the sub-sensors as for the placement of, for example, matching transistors. What applies for the placement of, for example, current sources of a DAC or transistors of a differential amplifier is: minimize the influence of the production, such as gradients on the wafer. These often remain constant over the service life under constant operating conditions. It is also generally assumed that the circuit is small and that weak gradients extend over large areas, so that only linear gradients are mostly compensated. In particular, it is often not assumed that local maxima with variable positions are reached on the circuit area to be compensated. However, this is often the case in the case of sensors.

[0008] In the case of polarization sensors, firstly the influence of an unknown brightness distribution on the sensor area is involved, i.e. a quantity which can also change in the course of the individual measurement. In particular in the case of miniaturized construction, for example when the light of a light-emitting diode illuminates only slightly more than the sensor area, the illumination means are not correctly aligned (misalignment), or structural features of the light source (for example the central bond wire of an LED) or of the optics lead to locally limited brightness variations, much greater variations can be expected over small spaces. Dust particles at any location in the system can also cause comparable errors.

[0009] Therefore, in order to optimize the construction of the sensor or of other elements in the array, it can be based partly on other criteria. In order to illuminate with LEDs, for example, its beam profile is of interest, and the question of how strongly the illumination of the sensor by the LED varies with the location and how the sensor signal can be distributed as uniformly as possible is of interest.

[0010] Here, improving the known prior art is a challenge. SUMMARY

[0011] The problem underlying the present application is to design and improve known methods for iteratively generating matrices such that further optimization is achieved in terms of the challenges mentioned.

[0012] The above problem is solved by the features of the characterizing part of claim 1.

[0013] It is important to the basic idea to arrange the different elementary elements of an arrangement, for example a sensor array, such that the sensitivity to local disturbances, for example intensity fluctuations, is minimized. For this purpose a method is also described by means of which such an arrangement can be efficiently generated.

[0014] Exemplarily, a sensor array of a polarization-based rotation angle sensor can consist of N elementary element types, for example N = 1, 2, 3, 4, whose individual orientations with respect to the polarization axis of a chosen reference, for example 0°, 45°, 90° and 135°, are such that differential quadrature signals are generated. Similar configurations are derived for various magnetic sensors according to the magnetoresistance effect, as long as these are 180° periodic like the polarization measurement. In the case of elementary elements that derive 360° periodic signals, for example Hall sensors, it will be more likely to choose individual orientations of 0°, 90°, 180° and 270°. In view of the matrix shown here, elements 1, 3 or 2, 4 should preferably be oriented orthogonally to each other. However, in general, the assignment of numbers to the chosen orientations or sensor types is arbitrary. Different color filters can also be arranged according to the present application such that the color measurement is as insensitive as possible with respect to the structure of the incident light. This concept can also be applied even in the case of the Bayer pattern (BGGR), where the green filter is present twice and is therefore assigned two indices.

[0015] In particular it is proposed,

[0016] First a base matrix is formed which contains at least all elementary elements once, however the base matrix can also contain empty elements, i.e. positions not occupied by one of the elementary elements,

[0017] A modification operator is iteratively applied by means of which the base matrix or a matrix derived from the base matrix can be transformed into a modified matrix, the modification operator being a rotation and a mirror image,

[0018] An expansion operator is iteratively applied, the expansion operator forming a larger matrix from the plurality of matrices of the previous iteration, if necessary modified, in that the larger matrix is filled with the smaller matrices, if necessary modified,

[0019] performing a virtual experiment in which the properties of the generated matrix are investigated by systematically generating values with targeted errors from which an error signal can be derived,

[0020] In order to generate complex matrices, first of all all permutations of the next larger matrix are formed from the extension operator and evaluated by means of a virtual experiment, then the next larger matrix with the smallest error signal is selected, then the next larger matrix is gradually formed from these matrices by means of the extension operator and evaluated by means of a virtual experiment until the error signal does not exceed a predefined limit.

[0021] According to further teaching according to claim 2, which is also of independent significance, an arrangement of four different basic elements (1, 2, 3, 4) is claimed as an 8 x 8 matrix.

[0022] Reference can be made to all the explanations regarding the method for iteratively generating matrices according to the proposal.

[0023] According to further teaching according to claim 3, which is also of independent significance, an arrangement of four different basic elements (1, 2, 3, 4) is claimed as a 16 x 16 matrix.

[0024] Reference can be made to all the explanations regarding the method for iteratively generating matrices according to the proposal and the arrangement according to the proposal.

[0025] According to further teaching according to claim 4, which is also of independent significance, an arrangement of four different basic elements (1, 2, 3, 4) is claimed as a 32 x 32 matrix.

[0026] Reference can be made to all the explanations regarding the method for iteratively generating matrices according to the proposal and the corresponding arrangement according to the proposal.

[0027] According to the design according to claim 5, it can be provided that a larger arrangement is generated from a smaller arrangement in the case of an application of an operation copy, rotation or mirror image.

[0028] According to the design according to claim 6, it can be provided that the individual positions of the matrix-shaped arrangement remain unoccupied.

[0029] According to further teaching according to claim 7, which is also of independent significance, an integrated circuit for measuring the polarization of light is claimed, the integrated circuit

[0030] - has a polarization-sensitive sensor, which has at least two different orientations of the plane of polarization,

[0031] - wherein in the integrated circuit there is a device configured for making a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors,

[0032] - having at least one sensing element, which as a structural unit jointly with the polarization filter is arranged as one of the polarization-sensitive sensors,

[0033] - wherein the polarization-sensitive filters of the polarization-sensitive sensors arranged as a structural unit have a targeted extension and orientation,

[0034] - wherein the polarization filters have a grating structure produced with a photolithographic method in at least one manufacturing level,

[0035] - wherein the polarization-sensitive sensors are arranged with different orientations of the polarization plane according to the proposal.

[0036] Reference can be made to all the explanations regarding the method for iteratively producing matrices according to the proposal and the corresponding arrangement according to the proposal.

[0037] According to further teachings according to claim 8, which also leads to independent significance, an integrated circuit for measuring the polarization of light is claimed, which integrated circuit

[0038] - having at least two polarization-sensitive sensors with different orientations of the polarization plane,

[0039] - wherein in the integrated circuit there is a device configured for making a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors,

[0040] - having at least one sensing element, which as a structural unit jointly with the polarization filter is arranged as one of the polarization-sensitive sensors,

[0041] - wherein the polarization-sensitive filters of the polarization-sensitive sensors arranged as a structural unit have a targeted extension and orientation,

[0042] - wherein the polarization filters have a grating structure produced with a photolithographic method in at least one manufacturing level and / or wiring level

[0043] - wherein between the areas with grating structures there are light-impermeable walls, which in the case of oblique light incidence prevent influencing adjacent sensors

[0044] - wherein the light-impermeable walls are produced by vias or contacts,

[0045] - wherein the polarization-sensitive sensors are arranged with different orientations of the polarization plane according to the proposal.

[0046] Reference can be made to all the explanations regarding the method for iteratively generating a matrix according to the proposal, the corresponding arrangement according to the proposal and the corresponding integrated circuit according to the proposal.

[0047] According to further teachings according to claim 9, which also get independent meaning, a further integrated circuit for measuring light polarization is claimed.

[0048] Reference can be made to all the explanations regarding the method for iteratively generating a matrix according to the proposal, the corresponding arrangement according to the proposal and the corresponding integrated circuit according to the proposal.

[0049] According to further teachings according to claim 10, which also get independent meaning, a further integrated circuit for measuring light polarization is claimed.

[0050] Reference can be made to all the explanations regarding the method for iteratively generating a matrix according to the proposal, the corresponding arrangement according to the proposal and the corresponding integrated circuit according to the proposal.

[0051] According to further teachings according to claim 11, which also get independent meaning, a further integrated circuit for measuring light polarization is claimed.

[0052] Reference can be made to all the explanations regarding the method for iteratively generating a matrix according to the proposal, the corresponding arrangement according to the proposal and the corresponding integrated circuit according to the proposal. BRIEF DESCRIPTION OF DRAWINGS

[0053] The application is explained in more detail below on the basis of the drawings, which merely show embodiments:

[0054] Figure 1 : Rectangular 8x8 matrix composed of 4 basic elements (EP 2 523 960, Figure 1), which has a symmetry breaking in the corner points and a non-overlapping barycenter of single elements, since by pure copy and shear operation of the 4x1 array, a pure copy operation of the asymmetric 4x4 base matrix is combined, Figure 2

[0055] Figure 2 : Arrangement with 32x32 elements for a polarization sensor with 4 basic elements twisted each by 45° according to the application. It can be seen that the array is based on smaller basic cells, from which the higher-order pattern is formed. The generation sequence of the expansion operator for generating the matrix is OP4-OP1-OP4-OP4,

[0056] Figure 3 : Segment with 8x8 sub-matrices. It can be clearly seen the mirror symmetry with respect to the center, by which the barycenter of the single components is ensured to fall on the same point,

[0057] Figure 4 : From​Figure 2 a matrix with numbered basic elements for easier recognition,

[0058] Figure 5 : Virtual exposure experiment for determining the quality of a matrix for a polarization sensor. The light source is shifted over the matrix and tilted and changed, for example in pitch, to such an extent that the desired error limit (for example 2:1 brightness difference) is just reached. The light intensity of the individual basic elements is then determined and the intensities of similar elements are added. From the four values obtained the error size can be determined. Suitably shifted with observance of the Nyquist criterion, that is to say with as many half basic units or less steps as possible, in order to be able to detect local maxima,

[0059] Figure 6 : Results of a virtual illumination experiment of a 32x32 matrix of Figure 2 or Figure 3 . It can be seen that periodic errors occur when the light source is shifted, however these are relatively evenly distributed. Different matrices of the same order of magnitude are typically equally good for a large number of positions, however with larger errors occurring sporadically,

[0060] Figure 7 : Example of filling a larger matrix with forbidden zones in the corner points, tending to fill with 2x2 matrices. In addition to (ordinarily) post-hoc deleting the elements of the square matrix, replacing all sub-matrices on the remaining surface can also lead to different and better solutions,

[0061] Figure 8: Selection of the best 16x16 matrix for 4 basic elements and the resolution belonging to it (logarithm to the base 2 of the inverse of the error), Figure 8a ) 12.5487888882, Figure 8b ) 12.5922011498, Figure 8c ) 12.6634934402, Figure 8d ) 12.8591702292,

[0062] Figure 9: Selection of the best 32x32 matrix for 4 basic elements and the resolution belonging to it (logarithm to the base 2 of the inverse of the error). It can be seen that patterns with a clearly extended structure obtain poorer results (in a and c, for example, the extended diagonal lines can be seen, in e (corresponding to Figure 3 ) there is a more complex pattern with shorter segments), Figure 9a ) 15.2186402865, Figure 9b ) 15.3346640828, Figure 9c ) 15.4301443917, Figure 9d ) 15.520219736, Figure 9e) 15.5323944499. DETAILED DESCRIPTION

[0063] The embodiment shown in the figures and preferred in this regard relates to a method for iteratively generating matrices from elementary elements, wherein the elementary elements can be sensors or antennas with special properties or different orientations and electronics with different wiring.

[0064] It is now important that

[0065] First, a basic matrix is formed which contains at least all elementary elements once, however, the basic matrix can also contain empty elements, i.e. positions which are not occupied by one of the elementary elements,

[0066] A modification operator is iteratively applied, such as a rotation and a mirror image, by means of which the basic matrix or a matrix derived from the basic matrix can be transformed into a modified matrix,

[0067] An expansion operator is iteratively applied, which forms larger matrices from the matrices of the previous iteration, if necessary modified, by copying, rotating or mirroring, in such a way that the larger matrix is filled with the smaller matrices, if necessary modified,

[0068] A virtual experiment is carried out in which the properties of the generated matrices are investigated by systematically generating values with targeted errors from which an error signal can be derived,

[0069] In order to generate complex matrices, first all permutations of the next larger matrix are formed by the expansion operator and evaluated by the virtual experiment, then the next larger matrix with the smallest error signal is selected, so that from these next larger matrices the next larger matrix is gradually formed by the expansion operator and evaluated by the virtual experiment until the error signal does not exceed a predefined limit.

[0070] A plurality of permutations of four different basic elements (1, 2, 3, 4) into an 8x8 matrix is proposed, wherein the basic elements have the permutation [1, 2, 3, 4, 2, 1, 4, 3] in the first row of the 8x8 matrix, the permutation [4, 3, 2, 1, 3, 4, 1, 2] in the second row of the 8x8 matrix, the permutation [3, 4, 1, 2, 4, 3, 2, 1] in the third row of the 8x8 matrix, the permutation [2, 1, 4, 3, 1, 2, 3, 4] in the fourth row of the 8x8 matrix, the permutation [4, 3, 2, 1, 3, 4, 1, 2] in the fifth row of the 8x8 matrix, the permutation [1, 2, 3, 4, 2, 1, 4, 3] in the sixth row of the 8x8 matrix, the permutation [2, 1, 4, 3, 1, 2, 3, 4] in the seventh row of the 8x8 matrix, and the permutation [3, 4, 1, 2, 4, 3, 2, 1] in the eighth row of the 8x8 matrix.

[0071] Reference can be made to all the explanations regarding the method for iteratively generating a matrix according to the proposal.

[0072] A plurality of permutations of four different basic elements (1, 2, 3, 4) into a 16x16 matrix is proposed, wherein

[0073] a) the base elements have the arrangement [1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4] in the first row of the 16 x 16 matrix, the arrangement [4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2] in the second row of the 16 x 16 matrix, the arrangement [3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1] in the third row of the 16 x 16 matrix, the arrangement [2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3] in the fourth row of the 16 x 16 matrix, the arrangement [3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2] in the fifth row of the 16 x 16 matrix, the arrangement [1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3] in the sixth row of the 16 x 16 matrix, the arrangement [2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4] in the seventh row of the 16 x 16 matrix, the arrangement [4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1] in the eighth row of the 16 x 16 matrix, the arrangement [1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4] in the ninth row of the 16 x 16 matrix, the arrangement [4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2] in the tenth row of the 16 x 16 matrix, the arrangement [3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1] in the eleventh row of the 16 x 16 matrix, the arrangement [2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3] in the twelfth row of the 16 x 16 matrix, the arrangement [3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2] in the thirteenth row of the 16 x 16 matrix, the arrangement [1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3] in the fourteenth row of the 16 x 16 matrix, the arrangement [2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4] in the fifteenth row of the 16 x 16 matrix, the arrangement [4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1] in the sixteenth row of the 16 x 16 matrix,

[0074] or b) the base element has the permutation [1, 2, 3, 4, 2, 3, 4, 1, 1, 4, 3, 2, 4, 3, 2, 1] in the first row of the 16x16 matrix, the permutation [4, 3, 2, 1, 1, 4, 3, 2, 2, 3, 4, 1, 1, 2, 3, 4] in the second row of the 16x16 matrix, the permutation [3, 4, 1, 2, 4, 1, 2, 3, 3, 2, 1, 4, 2, 1, 4, 3] in the third row of the 16x16 matrix, the permutation [2, 1, 4, 3, 3, 2, 1, 4, 4, 1, 2, 3, 3, 4, 1, 2] in the fourth row of the 16x16 matrix, the permutation [4, 1, 2, 3, 3, 4, 1, 2, 2, 1, 4, 3, 3, 2, 1, 4] in the fifth row of the 16x16 matrix, the permutation [3, 2, 1, 4, 2, 1, 4, 3, 3, 4, 1, 2, 4, 1, 2, 3] in the sixth row of the 16x16 matrix, the permutation [2, 3, 4, 1, 1, 2, 3, 4, 4, 3, 2, 1, 1, 4, 3, 2] in the seventh row of the 16x16 matrix, the permutation [1, 4, 3, 2, 4, 3, 2, 1, 1, 2, 3, 4, 2, 3, 4, 1] in the eighth row of the 16x16 matrix, the permutation [1, 4, 3, 2, 4, 3, 2, 1, 1, 2, 3, 4, 2, 3, 4, 1] in the ninth row of the 16x16 matrix, the permutation [2, 3, 4, 1, 1, 2, 3, 4, 4, 3, 2, 1, 1, 4, 3, 2] in the tenth row of the 16x16 matrix, the permutation [3, 2, 1, 4, 2, 1, 4, 3, 3, 4, 1, 2, 4, 1, 2, 3] in the eleventh row of the 16x16 matrix, the permutation [4, 1, 2, 3, 3, 4, 1, 2, 2, 1, 4, 3, 3, 2, 1, 4] in the twelfth row of the 16x16 matrix, the permutation [2, 1, 4, 3, 3, 2, 1, 4, 4, 1, 2, 3, 3, 4, 1, 2] in the thirteenth row of the 16x16 matrix, the permutation [3, 4, 1, 2, 4, 1, 2, 3, 3, 2, 1, 4, 2, 1, 4, 3] in the fourteenth row of the 16x16 matrix, the permutation [4, 3, 2, 1, 1, 4, 3, 2, 2, 3, 4, 1, 1, 2, 3, 4] in the fifteenth row of the 16x16 matrix, the permutation [1, 2, 3, 4, 2, 3, 4, 1, 1, 4, 3, 2, 4, 3, 2, 1] in the sixteenth row of the 16x16 matrix,

[0075] or c) the base element has the arrangement [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the first row of the 16x16 matrix, the arrangement [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1 ] in the second row of the 16x16 matrix, the arrangement [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] in the third row of the 16x16 matrix, the arrangement [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3] in the fourth row of the 16x16 matrix, the arrangement [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the fifth row of the 16x16 matrix, the arrangement [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1 ] in the sixth row of the 16x16 matrix, the arrangement [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] in the seventh row of the 16x16 matrix, the arrangement [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3] in the eighth row of the 16x16 matrix, the arrangement [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the ninth row of the 16x16 matrix, the arrangement [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1 ] in the tenth row of the 16x16 matrix, the arrangement [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] in the eleventh row of the 16x16 matrix, the arrangement [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3] in the twelfth row of the 16x16 matrix, the arrangement [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the thirteenth row of the 16x16 matrix, the arrangement [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1 ] in the fourteenth row of the 16x16 matrix, the arrangement [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] in the fifteenth row of the 16x16 matrix, the arrangement [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3] in the sixteenth row of the 16x16 matrix,

[0076] or d) the basic elements have the arrangement [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the first row of the 16x16 matrix, the arrangement [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the second row of the 16x16 matrix, the arrangement [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the third row of the 16x16 matrix, the arrangement [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the fourth row of the 16x16 matrix, the arrangement [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the fifth row of the 16x16 matrix, the arrangement [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the sixth row of the 16x16 matrix, the arrangement [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the seventh row of the 16x16 matrix, the arrangement [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the eighth row of the 16x16 matrix, the arrangement [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the ninth row of the 16x16 matrix, the arrangement [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the tenth row of the 16x16 matrix, the arrangement [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the eleventh row of the 16x16 matrix, the arrangement [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the twelfth row of the 16x16 matrix, the arrangement [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the thirteenth row of the 16x16 matrix, the arrangement [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the fourteenth row of the 16x16 matrix, the arrangement [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the fifteenth row of the 16x16 matrix, the arrangement [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the sixteenth row of the 16x16 matrix.

[0077] Reference can be made to all the elucidations regarding the method for iteratively generating a matrix according to the proposal and the arrangement of the basic elements according to the proposal.

[0078] A number of four different basic elements (1, 2, 3, 4) are proposed to become arranged in a 32x32 matrix, wherein

[0079] a) the base element has the permutation [12341234 23412341 12341234 23412341] in the first row, the permutation [43214321 14321432 43214321 14321432] in the second row of the 32x32 matrix, the permutation [34123412 41234123 34123412 41234123] in the third row of the 32x32 matrix, the permutation [21432143 32143214 21432143 32143214] in the fourth row of the 32x32 matrix, the permutation [12341234 23412341 12341234 23412341] in the fifth row of the 32x32 matrix, the permutation [43214321 14321432 43214321 14321432] in the sixth row of the 32x32 matrix, the permutation [34123412 41234123 34123412 41234123] in the seventh row of the 32x32 matrix, the permutation [21432143 32143214 21432143 32143214] in the eighth row of the 32x32 matrix, the permutation [41234123 34123412 41234123 34123412] in the ninth row of the 32x32 matrix, the permutation [32143214 21432143 32143214 21432143] in the tenth row of the 32x32 matrix, the permutation [23412341 12341234 23412341 12341234] in the eleventh row of the 32x32 matrix, the permutation [14321432 43214321 14321432 43214321] in the twelfth row of the 32x32 matrix, the permutation [41234123 34123412 41234123 34123412] in the 13th row of the 32x32 matrix, the permutation [32143214 21432143 32143214 21432143] in the 14th row of the 32x32 matrix, the permutation [23412341 12341234 23412341 12341234] in the 15th row of the 32x32 matrix, the permutation [14321432 43214321 14321432 43214321] in the 16th row of the 32x32 matrix, the permutation [12341234 23412341 12341234 23412341] in the 17th row of the 32x32 matrix, the permutation [43214321 14321432 43214321 14321432] in the 18th row of the 32x32 matrix,[21432143 32143214 21432143 32143214] in the 24th row of the 32 x 32 matrix, [41234123 34123412 41234123 34123412] in the 29th row of the 32 x 32 matrix, [32143214 21432143 32143214 21432143] in the 30th row of the 32 x 32 matrix, [23412341 12341234 23412341 12341234] in the 27th row of the 32 x 32 matrix, [14321432 43214321 14321432 43214321] in the 28th row of the 32 x 32 matrix, [41234123 34123412 41234123 34123412] in the 29th row of the 32 x 32 matrix, [32143214 21432143 32143214 21432143] in the 30th row of the 32 x 32 matrix, [23412341 12341234 23412341 12341234] in the 27th row of the 32 x 32 matrix, [14321432 43214321 14321432 43214321] in the 28th row of the 32 x 32 matrix, [41234123 34123412 41234123 34123412] in the 29th row of the 32 x 32 matrix, [32143214 21432143 32143214 21432143] in the 30th row of the 32 x 32 matrix, [23412341 12341234 23412341 12341234] in the 27th row of the 32 x 32 matrix, [14321432 43214321 14321432 43214321] in the 28th row of the 32 x 32 matrix, [41234123 34123412 41234123 34123412] in the 29th row of the 32 x 32 matrix, [32143214 21432143 32143214 21432143] in the 30th row of the 32 x 32 matrix, [23412341 12341234 23412341 12341234] in the 27th row of the 32 x 32 matrix, [14321432 43214321 14321432 43214321] in the 28th row of the 32 x 32 matrix, [41234123 34123412 41234123 34123412] in the 29th row of the 32 x 32 matrix, [32143214 21432143 32143214 21432143] in the 30th row of the 32 x 32 matrix,

[0080] or b) the base element has the arrangement [12342341 14324321 12342341 14324321] in the first row of the 32x32 matrix, the arrangement [43211432 23411234 43211432 23411234] in the second row of the 32x32 matrix, the arrangement [34124123 32142143 34124123 32142143] in the third row of the 32x32 matrix, the arrangement [21433214 41233412 21433214 41233412] in the fourth row of the 32x32 matrix, the arrangement [41233412 21433214 41233412 21433214] in the fifth row of the 32x32 matrix, the arrangement [32142143 34124123 32142143 34124123] in the sixth row of the 32x32 matrix, the arrangement [23411234 43211432 23411234 43211432] in the seventh row of the 32x32 matrix, the arrangement [14324321 12342341 14324321 12342341] in the eighth row of the 32x32 matrix, the arrangement [14324321 12342341 14324321 12342341] in the ninth row of the 32x32 matrix, the arrangement [23411234 43211432 23411234 43211432] in the tenth row of the 32x32 matrix, the arrangement [32142143 34124123 32142143 34124123] in the eleventh row of the 32x32 matrix, the arrangement [41233412 21433214 41233412 21433214] in the twelfth row of the 32x32 matrix, the arrangement [21433214 41233412 21433214 41233412] in the thirteenth row of the 32x32 matrix, the arrangement [34124123 32142143 34124123 32142143] in the fourteenth row of the 32x32 matrix, the arrangement [43211432 23411234 43211432 23411234] in the fifteenth row of the 32x32 matrix, the arrangement [12342341 14324321 12342341 14324321] in the sixteenth row of the 32x32 matrix, the arrangement [12342341 14324321 12342341 14324321] in the seventeenth row of the 32x32 matrix, the arrangement [43211432 23411234 43211432 23411234] in the eighteenth row of the 32x32 matrix,[23411234 43211432 2341123443211432] in the 26th row of the 32 x 32 matrix, [32142143 34124123 3214214334124123] in the 27th row of the 32 x 32 matrix, [41233412 21433214 4123341221433214] in the 28th row of the 32 x 32 matrix, [21433214 41233412 2143321441233412] in the 29th row of the 32 x 32 matrix, [34124123 3214214334124123 32142143] in the 30th row of the 32 x 32 matrix, [4321143223411234 43211432 23411234] in the 31st row of the 32 x 32 matrix, [12342341 14324321 12342341 14324321] in the 32nd row of the 32 x 32 matrix,

[0081] or c) the base element has the arrangement [12341234 2143214312341234 21432143] in the first row of the 32x32 matrix, the arrangement [43214321 34123412 4321432134123412] in the second row of the 32x32 matrix, the arrangement [34123412 43214321 3412341243214321] in the third row of the 32x32 matrix, the arrangement [21432143 12341234 2143214312341234] in the fourth row of the 32x32 matrix, the arrangement [12341234 2143214312341234 21432143] in the fifth row of the 32x32 matrix, the arrangement [4321432134123412 43214321 34123412] in the sixth row of the 32x32 matrix, the arrangement [34123412 43214321 34123412 43214321] in the seventh row of the 32x32 matrix, the arrangement [21432143 12341234 21432143 12341234] in the eighth row of the 32x32 matrix, the arrangement [43214321 34123412 43214321 34123412] in the ninth row of the 32x32 matrix, the arrangement [1234123421432143 1234123421432143] in the tenth row of the 32x32 matrix, the arrangement [214321431234123421432143 12341234] in the eleventh row of the 32x32 matrix, the arrangement [341234124321432134123412 43214321] in the twelfth row of the 32x32 matrix, the arrangement [43214321 34123412 4321432134123412] in the 13th row of the 32x32 matrix, the arrangement [12341234 21432143 1234123421432143] in the 14th row of the 32x32 matrix, the arrangement [21432143 12341234 2143214312341234] in the 15th row of the 32x32 matrix, the arrangement [34123412 43214321 3412341243214321] in the 16th row of the 32x32 matrix, the arrangement [12341234 2143214312341234 21432143] in the 17th row of the 32x32 matrix, the arrangement [4321432134123412 43214321 34123412] in the 18th row of the 32x32 matrix,[21432143 12341234 21432143 12341234] in the 20th row of the 32x32 matrix, [12341234 21432143 12341234 21432143] in the 21st row of the 32x32 matrix, [43214321 34123412 43214321 34123412] in the 22nd row of the 32x32 matrix, [21432143 12341234 21432143 12341234] in the 23rd row of the 32x32 matrix, [43214321 34123412 43214321 34123412] in the 24th row of the 32x32 matrix, [12341234 21432143 12341234 21432143] in the 25th row of the 32x32 matrix, [43214321 34123412 43214321 34123412] in the 26th row of the 32x32 matrix, [12341234 21432143 12341234 21432143] in the 27th row of the 32x32 matrix, [21432143 12341234 21432143 12341234] in the 28th row of the 32x32 matrix, [43214321 34123412 43214321 34123412] in the 29th row of the 32x32 matrix, [12341234 21432143 12341234 21432143] in the 30th row of the 32x32 matrix, [21432143 12341234 21432143 12341234] in the 31st row of the 32x32 matrix, and [34123412 43214321 34123412 43214321] in the 32nd row of the 32x32 matrix,

[0082] or d) the base element has the arrangement [12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 123423[21433214 21433214 21433214 21433214] in the 20th row of the 32 x 32 matrix, [41233412 41233412 41233412 41233412] in the 21st row of the 32 x 32 matrix, [3214214332142143 3214214332142143] in the 22nd row of the 32 x 32 matrix, [234112342341123423411234 23411234] in the 23rd row of the 32 x 32 matrix, [143243211432432114324321 14324321] in the 24th row of the 32 x 32 matrix, [12342341 12342341 1234234112342341] in the 25th row of the 32 x 32 matrix, [43211432 43211432 4321143243211432] in the 26th row of the 32 x 32 matrix, [34124123 34124123 3412412334124123] in the 27th row of the 32 x 32 matrix, [21433214 21433214 2143321421433214] in the 28th row of the 32 x 32 matrix, [41233412 4123341241233412 41233412] in the 29th row of the 32 x 32 matrix, [3214214332142143 32142143 32142143] in the 30th row of the 32 x 32 matrix, [23411234 23411234 23411234 23411234] in the 31st row of the 32 x 32 matrix, and [14324321 14324321 14324321 14324321] in the 32nd row of the 32 x 32 matrix,

[0083] Or, as in e), the basic elements are arranged in the following order: [12342143 1234214312342143 12342143] in the first row of the 32×32 matrix, [43213412 43213412 4321341243213412] in the second row, [34124321 34124321 3412432134124321] in the third row, [34124321 34124321 3412432134124321] in the fourth row, [21431234 21431234 2143123421431234] in the fourth row, and [43213412 4321341243213412] in the fifth row. The matrix [43213412] has the following permutations in the sixth row of a 32×32 matrix: [1234214312342143 12342143 12342143], [21431234 21431234 21431234 21431234], [34124321 34124321 34124321 34124321], [12342143 12342143 12342143 12342143], and [4321341243213412] in the tenth row of a 32×32 matrix. The permutation [4321341243213412] exists in the eleventh row of a 32×32 matrix, [341243213412432134124321 34124321] exists in the twelfth row, [214312342143123421431234 21431234] exists in the thirteenth row, [43213412 43213412 4321341243213412] exists in the thirteenth row, [12342143 12342143 1234214312342143] exists in the fourteenth row, and [21431234] exists in the fifteenth row. The matrix 21431234 2143123421431234 has the following permutations in the 16th row of a 32×32 matrix: [34124321 34124321 3412432134124321]; in the 17th row of a 32×32 matrix: [12342143 1234214312342143 12342143]; and in the 18th row of a 32×32 matrix: [4321341243213412 43213412 43213412].in the 19th row of the 32x32 matrix has the arrangement [34124321 34124321 34124321 34124321], in the 20th row of the 32x32 matrix has the arrangement [21431234 21431234 21431234 21431234], in the 21st row of the 32x32 matrix has the arrangement [43213412 43213412 43213412 43213412], in the 22nd row of the 32x32 matrix has the arrangement [1234214312342143 1234214312342143], in the 23rd row of the 32x32 matrix has the arrangement [214312342143123421431234 21431234], in the 24th row of the 32x32 matrix has the arrangement [341243213412432134124321 34124321], in the 25th row of the 32x32 matrix has the arrangement [12342143 12342143 1234214312342143], in the 26th row of the 32x32 matrix has the arrangement [43213412 43213412 4321341243213412], in the 27th row of the 32x32 matrix has the arrangement [34124321 34124321 3412432134124321], in the 28th row of the 32x32 matrix has the arrangement [21431234 21431234 2143123421431234], in the 29th row of the 32x32 matrix has the arrangement [43213412 4321341243213412 43213412], in the 30th row of the 32x32 matrix has the arrangement [1234214312342143 12342143 12342143], in the 31st row of the 32x32 matrix has the arrangement [21431234 21431234 21431234 21431234], in the 32nd row of the 32x32 matrix has the arrangement [34124321 34124321 34124321 34124321].

[0084] Reference can be made to all the explanations regarding the method for iteratively generating matrices according to the proposal and the corresponding arrangements according to the proposal.

[0085] Furthermore it is provided here and preferably provided that in case of applying an operation copy, rotate or mirror, a larger arrangement is generated from a smaller arrangement.

[0086] Furthermore it is provided here and preferably provided that each position of the matrix-like arrangement remains unoccupied.

[0087] An integrated circuit for measuring the polarization of light is proposed, the integrated circuit

[0088] - having polarization-sensitive sensors with at least two different orientations of the plane of polarization,

[0089] - wherein there is a device in the integrated circuit which is configured to make a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors,

[0090] - having at least one sensing element which, as a structural unit, is arranged together with a polarization filter into one of the polarization-sensitive sensors,

[0091] - wherein the polarization-sensitive filters of the polarization-sensitive sensors arranged as a structural unit have a targeted extent and orientation,

[0092] - wherein the polarization filters have a grating structure produced with a photolithographic method in at least one manufacturing level,

[0093] - wherein the polarization-sensitive sensors are arranged according to any one of claims 2 to 6 with different orientations of the plane of polarization.

[0094] Reference can be made to all the explanations regarding the method for iteratively producing matrices according to the proposal and the corresponding arrangement according to the proposal.

[0095] An integrated circuit for measuring the polarization of light is proposed, the integrated circuit - having at least two polarization-sensitive sensors with different orientations of the plane of polarization,

[0096] - wherein there is a device in the integrated circuit which is configured to make a statement about the polarization of the incident light from the signals of the polarization-sensitive sensors,

[0097] - having at least one sensing element which, as a structural unit, is arranged together with a polarization filter into one of the polarization-sensitive sensors,

[0098] - wherein the polarization-sensitive filters of the polarization-sensitive sensors arranged as a structural unit have a targeted extent and orientation,

[0099] - wherein the polarization filters have a grating structure produced with a photolithographic method in at least one manufacturing level and / or wiring level,

[0100] - wherein there are light-impermeable walls between the areas with grating structures, which light-impermeable walls prevent an influence on adjacent sensors in the case of oblique light incidence,

[0101] - wherein the light-impermeable walls are produced by vias or contacts,

[0102] - wherein the polarization sensitive sensors are arranged with different orientations of the plane of polarization according to any of the requirements 2 to 6.

[0103] Reference can be made to all the explanations regarding the method according to the proposal for iteratively generating matrices, the corresponding arrangement according to the proposal and the integrated circuit according to the proposal.

[0104] The following explanations can be transferred to arrangements with a different number of basic elements different from each other, such as systems with 2 basic elements (transistors of a differential sensor or differential amplifier) or more than 4 basic elements. The resulting pattern is here different, however the methodological approach remains the same. The following exemplary considers arrangements of 4 different basic elements, as these arrangements are of interest for numerous applications. Besides the polarization measurement with 4 quadrants for generating a differential quadrature signal, comparable arrangements with magnetoresistive sensors can be envisaged for example. Color sensors with e.g. a Bayer matrix also fall into this scheme.

[0105] Arrangements of 4 basic elements or single sensors can be made linearly or in a 2x2 matrix. In order to minimize the influence of the gradient, as compact an arrangement as possible is advantageous, so that a 2x2 arrangement (base matrix) is preferred. Larger arrangements of these basic elements can now easily be generated by a repeated arrangement of the same base matrix (see Figure 1 , which corresponds to Figure 2 in EP 2 523 960 A1 ). Such an arrangement already has better properties compared to a single base matrix with e.g. a larger total area, but has systematic errors. Thus in particular the position of the individual basic elements is not centered with respect to each other, so that a residual error remains in the case of a non-uniform illumination of the optical sensor. This can easily be seen in Figure 1 in the corner points (Ecken), as the elements in the upper left and in the lower right are identical, while different elements are placed in the upper right and in the lower left, respectively.

[0106] This problem cannot be eliminated even by a linear displacement in a small part of the base matrix, as finally only a superposition or a shear of this regular matrix with similar errors is involved. This can also easily be seen in Figure 1 , as the marked 4x1 base matrix has been composed to an 8x8 matrix under 4-fold identical copy of the rows and column-wise copy with 1 / 4 displacement. The thus generated matrix has different properties along its two diagonal lines.

[0107] Therefore, there is a need for an arrangement which reduces this systematic error. For this purpose, as large a number of as small basic elements is obviously advantageous. Here first the problem of a large number of possible solutions arises. If one starts from 4 basic elements arranged in a matrix with 32x32 = 1024 elements, this number is already at 4 1024Of course, most of these possible arrangements are not suitable. Thus, in order to generate a differential quadrature signal it is easily conceivable that all four basic elements occur with the same frequency. Also a solution in which each of the basic elements predominantly lies in a corner point of the array is not suitable. However, as already set out, a simple periodic arrangement of the basic elements also has disadvantages, such as a lack of mirror symmetry, rotational symmetry and in particular a deviating center of gravity of the basic elements' position. Thus, the optimization of such an array is a complex problem for which a solution with limited resources requires a systematic approach and an exact investigation of the properties of all found candidates.

[0108] To this end, first a base matrix is generated which contains all N basic elements. From this base matrix more complex arrangements are gradually generated and the best candidates are selected from these arrangements until a sufficient resolution is achieved with respect to a predetermined test scenario.

[0109] For the case of a Gaussian-shaped intensity distribution it is derived for an arrangement of four basic elements that with an arrangement of at least 16 x 16 basic elements a gut 12-bit accuracy can be achieved, whereas for nearly 16 bits an arrangement of at least 32 x 32 basic elements is required, the Gaussian-shaped intensity distribution not exceeding a 2-fold difference between maximum and minimum on the whole area, but can otherwise assume any position on the sensor.

[0110] The simplest arrangement of four single sensors giving two differential signal pairs is a 2 x 2 matrix, in which the sensor pairs (1, 3) and (2, 4) forming the differential pairs, respectively, are arranged as far as possible such that these sensor pairs have a common center of gravity. In this case a radial symmetric illumination aligned to this center of gravity does not lead to errors caused by the intensity. This arrangement can thus be described as where all rotations and mirrors of this matrix are equivalent.

[0111] A linear arrangement of these basic elements with a common center of gravity is (1 2 4 3) or (2 1 3 4), in which here also rotations and mirrors do not play a role. However, the 2 x 2 matrix arrangement is superior to the linear arrangement, since a typical signal source or light source can most likely be described as a point source. In the radial fall-off of the signal strength typical for a point source, the outer sensor pairs are disadvantaged in the case of a linear arrangement. This disadvantage is cancelled in the case of a 2 x 2 matrix arrangement. Larger basic elements with empty cells or multiple single elements of the same type can also be used, however no advantages result therefrom for the cases described here.

[0112] These simple arrangements (base matrices) have the disadvantage that even linear gradients cannot be compensated. In order to realize a differential amplifier with transistors A and B, the person skilled in the art either uses the arrangement (A B B A) or the arrangement where the transistors are broken down into smaller parts and arranged in such a way that one element is more strongly involved and one element is more weakly involved, respectively. In the case of the assumption that the effect of the parallel elements can be described by a linear operation (summing of the signals), the linear gradient is effectively compensated. However, this is to be achieved here with, for example, 4 basic elements. The matching principle for the differential pair cannot therefore be transferred completely simply. In particular, it makes no sense to copy the 2x2 base matrix or unit cell described above into a 4x4 matrix, because in this case the common center of gravity is cancelled out. Therefore, a mirroring or rotation of several base matrices should additionally be carried out in order to maintain the common center of gravity, because otherwise the tolerance to the radially symmetrical intensity profile would be disturbed.

[0113] It can already be seen from this explanation that the further enlargement of the matrix (doubling of the number of elements in each dimension) in particular in binary steps from the previously formed smaller unit leads to good results, because in this way the existing tolerances to specific effects can be preserved and expanded by further advantages relatively simply, because the already existing symmetries are supplemented by additional, more complex symmetries on different scales.

[0114] The repetition of the thus formed sub-matrices at different positions of the total matrix also contributes to the total matrix becoming insensitive with respect to signal maxima at different positions in the matrix, because for each sub-matrix there is already a point that is insensitive with respect to radially symmetrical errors. In the edge region, all basic elements should be present equally in order to compensate linear gradients. For a certain number of basic elements, an ideal base matrix with the greatest symmetry is derived from which larger matrices can also be produced by copying. In the case of 4 basic elements forming two differential pairs, an 8x8 matrix is such a basic arrangement. There can be various basic arrangements among such basic arrangements with very similar properties.

[0115] As long as special requirements are made of the total matrix in terms of its shape, individual positions of the total matrix can be identified as blocked, i.e. the positions remain unoccupied or are used in another way using the faces that remain free. In this way, for example, a light source can be positioned in the free area in the center of the optical sensor (e.g. LED-on-chip), so that this light source lies exactly in the center of the sensor. This occurs, for example, in combination with gallium nitride on silicon (GaN-on-Si) or with micro transfer printing. In order to disturb the optimization as little as possible, here sub-areas of the base matrix size should be left free at least respectively.

[0116] Only in the case of very small matrices can it still make sense to generate and analyze the distribution by "brute force", i.e. for example to try all possible meaningful permutations. In this way, for example, it can be proven a posteriori that there is no better sub-matrix than the previously optimized sub-matrix, as long as this sub-matrix is small enough (e.g. 4x4).

[0117] In order to form larger matrices, the basic operations such as copying, rotating and mirroring can be applied repeatedly to the base matrix or to sub-matrices. The best candidates are determined by gradually analyzing the matrices thus newly formed respectively, and from these candidates larger matrices are formed again if necessary. According to this scheme, the optimization of matrices even with 32x32 = 1024 or more elements can be achieved in an acceptable computing time, although all possible permutations with 4^1024 are immeasurably numerous. Just in the case of more complex forms of the total matrix (e.g. with free positions in the center or in the corner points), it makes sense to act in such a way that smaller matrices (the base matrix itself or combined lower-order matrices) are placed on the larger target matrix, rather than using the matrices newly formed respectively to gradually produce a binary magnification. In the case of placing sub-matrices in the larger matrix to be newly formed, symmetry can be taken into account from the outset in order to reduce the number of virtual experiments. The subsequent analysis of each newly formed matrix excludes arrangements with poor symmetry in any case, since these inevitably lead to larger measurement errors in the case of uneven illumination.

[0118] In order to analyze the sub-matrices or the total matrix formed according to the scheme with respect to their suitability, at least one realistic intensity profile (for example the beam profile of an LED) is determined and a virtual exposure experiment is carried out, in which for example the position of the light source or its orientation is changed with respect to the sensor. Certain limits to be predefined should be observed or set here, for example the measure of the displacement over the entire sensor array and the measure of the intensity variation. For each possible lighting situation in the virtual experiment, the total signal is determined (for example the sum of all similar sensor fields is determined separately) and the relative deviation from one another is determined. The worst value (the largest deviation) determined thereby determines the maximum precision that the sensor can guarantee in the selected case. Different matrices can thus be compared with one another, from which a matrix that is gradually further enlarged can be produced by the best one respectively. The prerequisite in this case is that the errors of the small matrices that differ do not become an advantage for the larger matrix formed thereby, which is formed from the small matrices.

[0119] The determined generalized intensities I1 to I4 for the distributed elementary elements 1..4 lead for example from the following that an error signal can be used, namely determine (max(I1,..,I4)-min(I1,..,I4)) / average(I1,..,I4), which is 0 in the ideal case and positive in the error case. This relative error thus determined can already be used in the first approximation for estimating the angle precision of a polarization angle sensor for example. A value of 1% corresponds roughly to 7 bits or nearly 2°.

[0120] Instead of a virtual exposure experiment, other experiments can of course be carried out equivalently in a meaningful manner in the case of magnetic sensors or for example transistor arrangements. Thus for example instead of the assumed exposure, a thermal distribution or a manufacturing-dependent gradient in the manufacturing parameters can also be used. Nothing changes thereby in terms of systematics, however in the case of an assumed other profile, it is possible that a matrix that differs from the one assumed in the case of the LED illumination is set as optimal.

[0121] In principle there is a tendency: a larger number of single elements on the same face leads to significantly smaller errors. In the case investigated, making the number four times larger on the same face leads to an accuracy gain of nearly 2.7 bits. However, it should be considered that the elements must be isolated from one another and wired in such a way that, while observing the minimum size for a single element, the number can also increase with increasing total area. In this case it should additionally be clarified whether larger total matrices in general do not suffer from larger gradients, so that the computational gain from the optimization can not actually be achieved. For example, with a given small spacing between light source and sensor it is clear that a sensor face that is chosen too large cannot be illuminated completely with a predefined beam profile of the LED. In this case the criteria chosen previously in the optimization, for example a factor 2 Helligkeitsunterschied (brightness difference), can not be observed in the application. The synthesis of suitable sub-matrices can be performed systematically. First, when arranging square single elements in as much symmetry as possible in a row, a suitable array structure is derived. It is therefore advisable to combine point, axis, mirror and rotational symmetries as much as possible. This can lead to problems at specific positions, for example in the center. It is therefore possible that it is advisable to leave individual positions in the array out of consideration or to fill them with other functions. This applies to the corner points of a square matrix in addition to the center. Opposite corner points will have the largest deviation of light intensity in the case of non-centered illumination and can therefore contribute to the measurement error to a special extent. A basic unit of a sensor (unit cell EZ) consisting of 4 single sensors can therefore most likely be formed by a square matrix, while larger arrays can more likely be faced approximately circular, that is to say the corner points can remain unused or be filled with other functions. This is achieved particularly well with high-order arrays.

[0122] By means of simple basic operations it is possible to construct progressively larger matrices from the given base matrices or unit cells. These basic operations are, for example, vertical and horizontal mirroring, diagonal mirroring via two diagonals and 90° rotation of the elements (transposition).

[0123] From the base matrix By progressively applying modification operators if necessary, different variants of the base matrix are derived from which larger matrices can be formed by expansion operators. Suitable modification operators for a unit cell consisting of 4 elements are, for example:

[0124] With regard to horizontal line mirroring (up-dn-flip):

[0125] With regard to vertical line mirroring (left-right-flip):

[0126] Diagonal flip:

[0127] Rotate to the right: (The first row becomes the last column, the second row becomes the second to last column, and so on, until the last row becomes the first column).

[0128] An initial matrix EZ with n*n elements can now be easily generated, for example, into a new matrix M with 2n*2n elements by applying an expansion operator. The expansion operator, when a modification operator is applied, fills the new matrix with a variant of the initial matrix (M1..M4). Some examples of expansion operators should be given:

[0129]

[0130] In the first step, the initial matrix has the dimension of the fundamental matrix (e.g., 2×2 for 4 fundamental elements). In subsequent steps, instead of this, the best matrix from the determined new matrix is ​​used as the new initial matrix, such that, for example, a matrix with 32×32 fundamental elements can be obtained with 4 traversals.

[0131] This includes the unit cell or fundamental matrix EZ and matrices M1-M4 that are modified from the unit cell by fundamental operators (OP). Meaningful operators include, for example:

[0132] Extended operator OP1:

[0133] {M1 = EZ, M2 = EZ as a vertical mirror image, M3 = EZ as a horizontal mirror image, M4 = EZ as a diagonal mirror image}

[0134] Extended operator OP2:

[0135] {M1=EZ, M2=EZ, M3=EZ, M4=EZ}

[0136] Extended operator OP3: (rotates 90° continuously clockwise or counterclockwise)

[0137] {M1 = EZ, M2 = rotated M1, M4 = rotated M2, M3 = rotated M4}

[0138] Extended operator OP4:

[0139] {M1 = EZ, M2 = EZ as a diagonal mirror image, M3 = EZ as a diagonal mirror image, M4 = EZ}

[0140] Since it is not obvious which operators in which position lead to the best results, a systematic generation and analysis is required. This leads to a continued large number of experiments (thousands of variants and subsequent virtual exposure experiments for determining the optimal 32x32 matrix), which, however, can be done in a matter of hours on common computers.

[0141] It should be noted that matrices generated in different ways (with different operators) can provide equivalent results, even if these results appear different at first glance. This is because, in principle, sensor fields of the same type can be exchanged with one another, in particular, the basic elements belonging to one differential pair can be exchanged with one another - while a cross-exchange of the basic elements of the I and Q signals is not advisable. Furthermore, a copy generated by rotation is equivalent to the original. Displacement operations by a multiple of the basic cell are mostly also harmless.

[0142] In principle, this approach can be further generalized, i.e. applied to non-square matrices, or the extension can also be performed in larger and non-binary steps. However, the variant with square matrices and binary extension presented here can be implemented particularly simply.

[0143] In Figure 1 The 8x8 matrix shown in (prior art) can also be generated from a smaller base matrix in the manner described here. Obviously, a 4x4 matrix is the size from which larger matrices can be generated by simple copying (OP2) from this size. However, this 4x4 matrix cannot be formed from the same 2x2 matrix, because Figure 1 None of the 2x2 matrices in does contain all 4 basic elements. This contradicts the approach to the problem that all elements should be placed as close to one another as possible. However, it will be conceivable and also in the sense of the invention that an 8x8 matrix or a larger matrix is generated from the same 4x4 base matrix by appropriate operators. Thus, a more advantageous 8x8 matrix will be obtained in the case of an application of, for example, OP1, for which there is mirror symmetry at least in larger dimensions, and the barycenters of the single elements thus also coincide with one another again.

[0144] The corresponding figures accordingly also show an integrated circuit for measuring the polarization of light, which has

[0145] - has polarization-sensitive sensors as basic elements in the preferred four different orientations (1, 2, 3, 4), which have different orientations of the plane of polarization,

[0146] - has sensing elements, which are each arranged as a structural unit together with a polarization filter as one of the polarization-sensitive sensors,

[0147] - the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a targeted extension and orientation,

[0148] - the polarization filter has a grating structure produced using a photolithographic method in at least one manufacturing level,

[0149] - the polarization-sensitive sensors of different orientations consist of a plurality of individual sensor elements, which are arranged in a matrix,

[0150] - there is a device in the integrated circuit, which is configured to make a statement about the polarization of the incident light from the signal of the polarization-sensitive sensor,

[0151] - the basic elements (1, 2, 3, 4) with different orientations are arranged in an 8x8 matrix,

[0152] - the basic elements have the arrangement [1, 2, 3, 4, 2, 1, 4, 3] in the first row of the 8x8 matrix, the arrangement [4, 3, 2, 1, 3, 4, 1, 2] in the second row of the 8x8 matrix, the arrangement [3, 4, 1, 2, 4, 3, 2, 1] in the third row of the 8x8 matrix, the arrangement [2, 1, 4, 3, 1, 2, 3, 4] in the fourth row of the 8x8 matrix, the arrangement [4, 3, 2, 1, 3, 4, 1, 2] in the fifth row of the 8x8 matrix, the arrangement [1, 2, 3, 4, 2, 1, 4, 3] in the sixth row of the 8x8 matrix, the arrangement [2, 1, 4, 3, 1, 2, 3, 4] in the seventh row of the 8x8 matrix, and the arrangement [3, 4, 1, 2, 4, 3, 2, 1] in the eighth row of the 8x8 matrix.

[0153] The respective figure accordingly also shows an integrated circuit for measuring the polarization of light, which integrated circuit

[0154] - has polarization-sensitive sensors as basic elements (1, 2, 3, 4) in preferably four different orientations, which have different orientations of the plane of polarization,

[0155] - has sensing elements, which are respectively jointly acting as a structural unit arranged with the polarization filter as one of the polarization-sensitive sensors,

[0156] - the polarization-sensitive filter of the polarization-sensitive sensor arranged as a structural unit has a targeted extension and orientation,

[0157] - the polarization filter has a grating structure produced using a photolithographic method in at least one manufacturing level,

[0158] - the polarization-sensitive sensors of different orientations consist of a plurality of individual sensor elements, which are arranged in a matrix,

[0159] - wherein in the integrated circuit there is a device configured for making a statement about the polarization of the incident light from the signal of the polarization-sensitive sensor,

[0160] - wherein the elementary elements (1, 2, 3, 4) with different orientations are arranged in a 16x16 matrix,

[0161] - wherein

[0162] a) the base elements have the arrangement [1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4] in the first row of the 16x16 matrix, the arrangement [4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2] in the second row of the 16x16 matrix, the arrangement [3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1] in the third row of the 16x16 matrix, the arrangement [2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3] in the fourth row of the 16x16 matrix, the arrangement [3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2] in the fifth row of the 16x16 matrix, the arrangement [1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3] in the sixth row of the 16x16 matrix, the arrangement [2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4] in the seventh row of the 16x16 matrix, the arrangement [4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1] in the eighth row of the 16x16 matrix, the arrangement [1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4] in the ninth row of the 16x16 matrix, the arrangement [4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2] in the tenth row of the 16x16 matrix, the arrangement [3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3, 2, 1] in the eleventh row of the 16x16 matrix, the arrangement [2, 1, 3, 4, 1, 2, 4, 3, 2, 1, 3, 4, 1, 2, 4, 3] in the twelfth row of the 16x16 matrix, the arrangement [3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2] in the thirteenth row of the 16x16 matrix, the arrangement [1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3] in the fourteenth row of the 16x16 matrix, the arrangement [2, 1, 4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4] in the fifteenth row of the 16x16 matrix, and the arrangement [4, 3, 1, 2, 3, 4, 2, 1, 4, 3, 1, 2, 3, 4, 2, 1] in the sixteenth row of the 16x16 matrix,

[0163] or b) the base element has the permutation [1, 2, 3, 4, 2, 3, 4, 1, 1, 4, 3, 2, 4, 3, 2, 1] in the first row of the 16x16 matrix, the permutation [4, 3, 2, 1, 1, 4, 3, 2, 2, 3, 4, 1, 1, 2, 3, 4] in the second row of the 16x16 matrix, the permutation [3, 4, 1, 2, 4, 1, 2, 3, 3, 2, 1, 4, 2, 1, 4, 3] in the third row of the 16x16 matrix, the permutation [2, 1, 4, 3, 3, 2, 1, 4, 4, 1, 2, 3, 3, 4, 1, 2] in the fourth row of the 16x16 matrix, the permutation [4, 1, 2, 3, 3, 4, 1, 2, 2, 1, 4, 3, 3, 2, 1, 4] in the fifth row of the 16x16 matrix, the permutation [3, 2, 1, 4, 2, 1, 4, 3, 3, 4, 1, 2, 4, 1, 2, 3] in the sixth row of the 16x16 matrix, the permutation [2, 3, 4, 1, 1, 2, 3, 4, 4, 3, 2, 1, 1, 4, 3, 2] in the seventh row of the 16x16 matrix, the permutation [1, 4, 3, 2, 4, 3, 2, 1, 1, 2, 3, 4, 2, 3, 4, 1] in the eighth row of the 16x16 matrix, the permutation [1, 4, 3, 2, 4, 3, 2, 1, 1, 2, 3, 4, 2, 3, 4, 1] in the ninth row of the 16x16 matrix, the permutation [2, 3, 4, 1, 1, 2, 3, 4, 4, 3, 2, 1, 1, 4, 3, 2] in the tenth row of the 16x16 matrix, the permutation [3, 2, 1, 4, 2, 1, 4, 3, 3, 4, 1, 2, 4, 1, 2, 3] in the eleventh row of the 16x16 matrix, the permutation [4, 1, 2, 3, 3, 4, 1, 2, 2, 1, 4, 3, 3, 2, 1, 4] in the twelfth row of the 16x16 matrix, the permutation [2, 1, 4, 3, 3, 2, 1, 4, 4, 1, 2, 3, 3, 4, 1, 2] in the thirteenth row of the 16x16 matrix, the permutation [3, 4, 1, 2, 4, 1, 2, 3, 3, 2, 1, 4, 2, 1, 4, 3] in the fourteenth row of the 16x16 matrix, the permutation [4, 3, 2, 1, 1, 4, 3, 2, 2, 3, 4, 1, 1, 2, 3, 4] in the fifteenth row of the 16x16 matrix, the permutation [1, 2, 3, 4, 2, 3, 4, 1, 1, 4, 3, 2, 4, 3, 2, 1] in the sixteenth row of the 16x16 matrix,

[0164] or c) the base element has the arrangement [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the first row of the 16x16 matrix, the arrangement [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1 ] in the second row of the 16x16 matrix, the arrangement [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] in the third row of the 16x16 matrix, the arrangement [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3] in the fourth row of the 16x16 matrix, the arrangement [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the fifth row of the 16x16 matrix, the arrangement [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1 ] in the sixth row of the 16x16 matrix, the arrangement [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] in the seventh row of the 16x16 matrix, the arrangement [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3] in the eighth row of the 16x16 matrix, the arrangement [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the ninth row of the 16x16 matrix, the arrangement [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1 ] in the tenth row of the 16x16 matrix, the arrangement [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] in the eleventh row of the 16x16 matrix, the arrangement [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3] in the twelfth row of the 16x16 matrix, the arrangement [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the thirteenth row of the 16x16 matrix, the arrangement [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1 ] in the fourteenth row of the 16x16 matrix, the arrangement [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] in the fifteenth row of the 16x16 matrix, the arrangement [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3] in the sixteenth row of the 16x16 matrix,

[0165] or d) the base elements have the arrangement [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the first row of the 16x16 matrix, the arrangement [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2] in the second row of the 16x16 matrix, the arrangement [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the third row of the 16x16 matrix, the arrangement [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4] in the fourth row of the 16x16 matrix, the arrangement [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2] in the fifth row of the 16x16 matrix, the arrangement [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the sixth row of the 16x16 matrix, the arrangement [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4] in the seventh row of the 16x16 matrix, the arrangement [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the eighth row of the 16x16 matrix, the arrangement [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the ninth row of the 16x16 matrix, the arrangement [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2] in the tenth row of the 16x16 matrix, the arrangement [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the eleventh row of the 16x16 matrix, the arrangement [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4] in the twelfth row of the 16x16 matrix, the arrangement [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2] in the thirteenth row of the 16x16 matrix, the arrangement [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3,2,1 ] in the fourteenth row of the 16x16 matrix, the arrangement [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4] in the fifteenth row of the 16x16 matrix, the arrangement [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1 ] in the sixteenth row of the 16x16 matrix.

[0166] The corresponding figures accordingly also show an integrated circuit for measuring the polarization of light, which integrated circuit

[0167] - has polarization-sensitive sensors as base elements (1, 2, 3, 4) in preferably four different orientations, which polarization-sensitive sensors have different orientations of the plane of polarization,

[0168] - having sensing elements which as structural units jointly act as one of the polarization sensitive sensors arranged with polarization filters,

[0169] - wherein the polarization sensitive filters of the polarization sensitive sensors arranged as structural units have a targeted extension and orientation,

[0170] - wherein the polarization filters have in at least one manufacturing level a grating structure produced with a photolithographic method,

[0171] - wherein the differently oriented polarization sensitive sensors consist of a plurality of individual sensor elements which are arranged in a matrix,

[0172] - wherein in the integrated circuit there is a device which is configured for making a statement about the polarization of the incident light from the signals of the polarization sensitive sensors,

[0173] - wherein the basic elements (1, 2, 3, 4) with different orientations are arranged in a matrix of 32 x 32,

[0174] - wherein

[0175] a) the base element has the permutation [12341234 23412341 12341234 23412341] in the first row, the permutation [43214321 14321432 43214321 14321432] in the second row of the 32x32 matrix, the permutation [34123412 41234123 34123412 41234123] in the third row of the 32x32 matrix, the permutation [21432143 32143214 21432143 32143214] in the fourth row of the 32x32 matrix, the permutation [12341234 23412341 12341234 23412341] in the fifth row of the 32x32 matrix, the permutation [43214321 14321432 43214321 14321432] in the sixth row of the 32x32 matrix, the permutation [34123412 41234123 34123412 41234123] in the seventh row of the 32x32 matrix, the permutation [21432143 32143214 21432143 32143214] in the eighth row of the 32x32 matrix, the permutation [41234123 34123412 41234123 34123412] in the ninth row of the 32x32 matrix, the permutation [32143214 21432143 32143214 21432143] in the tenth row of the 32x32 matrix, the permutation [23412341 12341234 23412341 12341234] in the eleventh row of the 32x32 matrix, the permutation [14321432 43214321 14321432 43214321] in the twelfth row of the 32x32 matrix, the permutation [41234123 34123412 41234123 34123412] in the 13th row of the 32x32 matrix, the permutation [32143214 21432143 32143214 21432143] in the 14th row of the 32x32 matrix, the permutation [23412341 12341234 23412341 12341234] in the 15th row of the 32x32 matrix, the permutation [14321432 43214321 14321432 43214321] in the 16th row of the 32x32 matrix, the permutation [12341234 23412341 12341234 23412341] in the 17th row of the 32x32 matrix, the permutation [43214321 14321432 43214321 14321432] in the 18th row of the 32x32 matrix,[21432143 32143214 21432143 32143214] in the 24th row of the 32 x 32 matrix, [41234123 34123412 41234123 34123412] in the 29th row of the 32 x 32 matrix, [32143214 21432143 32143214 21432143] in the 30th row of the 32 x 32 matrix, [23412341 12341234 23412341 12341234] in the 27th row of the 32 x 32 matrix, [14321432 43214321 14321432 43214321] in the 28th row of the 32 x 32 matrix, [41234123 34123412 41234123 34123412] in the 29th row of the 32 x 32 matrix, [32143214 21432143 32143214 21432143] in the 30th row of the 32 x 32 matrix, [23412341 12341234 23412341 12341234] in the 27th row of the 32 x 32 matrix, [14321432 43214321 14321432 43214321] in the 28th row of the 32 x 32 matrix, [41234123 34123412 41234123 34123412] in the 29th row of the 32 x 32 matrix, [32143214 21432143 32143214 21432143] in the 30th row of the 32 x 32 matrix, [23412341 12341234 23412341 12341234] in the 27th row of the 32 x 32 matrix, [14321432 43214321 14321432 43214321] in the 28th row of the 32 x 32 matrix, [41234123 34123412 41234123 34123412] in the 29th row of the 32 x 32 matrix, [32143214 21432143 32143214 21432143] in the 30th row of the 32 x 32 matrix, [23412341 12341234 23412341 12341234] in the 27th row of the 32 x 32 matrix, [14321432 43214321 14321432 43214321] in the 28th row of the 32 x 32 matrix, [41234123 34123412 41234123 34123412] in the 29th row of the 32 x 32 matrix, [32143214 21432143 32143214 21432143] in the 30th row of the 32 x 32 matrix,

[0176] or b) the base element has the arrangement [12342341 14324321 12342341 14324321] in the first row of the 32x32 matrix, the arrangement [43211432 23411234 43211432 23411234] in the second row of the 32x32 matrix, the arrangement [34124123 32142143 34124123 32142143] in the third row of the 32x32 matrix, the arrangement [21433214 41233412 21433214 41233412] in the fourth row of the 32x32 matrix, the arrangement [41233412 21433214 41233412 21433214] in the fifth row of the 32x32 matrix, the arrangement [32142143 34124123 32142143 34124123] in the sixth row of the 32x32 matrix, the arrangement [23411234 43211432 23411234 43211432] in the seventh row of the 32x32 matrix, the arrangement [14324321 12342341 14324321 12342341] in the eighth row of the 32x32 matrix, the arrangement [14324321 12342341 14324321 12342341] in the ninth row of the 32x32 matrix, the arrangement [23411234 43211432 23411234 43211432] in the tenth row of the 32x32 matrix, the arrangement [32142143 34124123 32142143 34124123] in the eleventh row of the 32x32 matrix, the arrangement [41233412 21433214 41233412 21433214] in the twelfth row of the 32x32 matrix, the arrangement [21433214 41233412 21433214 41233412] in the 13th row of the 32x32 matrix, the arrangement [34124123 32142143 34124123 32142143] in the 14th row of the 32x32 matrix, the arrangement [43211432 23411234 43211432 23411234] in the 15th row of the 32x32 matrix, the arrangement [12342341 14324321 12342341 14324321] in the 16th row of the 32x32 matrix, the arrangement [12342341 14324321 12342341 14324321] in the 17th row of the 32x32 matrix, the arrangement [43211432 23411234 43211432 23411234] in the 18th row of the 32x32 matrix,[23411234 43211432 2341123443211432] in the 26th row of the 32x32 matrix, [32142143 34124123 3214214334124123] in the 27th row of the 32x32 matrix, [41233412 21433214 4123341221433214] in the 28th row of the 32x32 matrix, [21433214 4123341221433214 41233412] in the 29th row of the 32x32 matrix, [3412412332142143 34124123 32142143] in the 30th row of the 32x32 matrix, [43211432 23411234 43211432 23411234] in the 31st row of the 32x32 matrix, [12342341 14324321 12342341 14324321] in the 32nd row of the 32x32 matrix,

[0177] or c) the base element has the arrangement [12341234 2143214312341234 21432143] in the first row of the 32x32 matrix, the arrangement [43214321 34123412 4321432134123412] in the second row of the 32x32 matrix, the arrangement [34123412 43214321 3412341243214321] in the third row of the 32x32 matrix, the arrangement [21432143 12341234 2143214312341234] in the fourth row of the 32x32 matrix, the arrangement [12341234 2143214312341234 21432143] in the fifth row of the 32x32 matrix, the arrangement [4321432134123412 43214321 34123412] in the sixth row of the 32x32 matrix, the arrangement [34123412 43214321 34123412 43214321] in the seventh row of the 32x32 matrix, the arrangement [21432143 12341234 21432143 12341234] in the eighth row of the 32x32 matrix, the arrangement [43214321 34123412 43214321 34123412] in the ninth row of the 32x32 matrix, the arrangement [1234123421432143 1234123421432143] in the tenth row of the 32x32 matrix, the arrangement [214321431234123421432143 12341234] in the eleventh row of the 32x32 matrix, the arrangement [341234124321432134123412 43214321] in the twelfth row of the 32x32 matrix, the arrangement [43214321 34123412 4321432134123412] in the 13th row of the 32x32 matrix, the arrangement [12341234 21432143 1234123421432143] in the 14th row of the 32x32 matrix, the arrangement [21432143 12341234 2143214312341234] in the 15th row of the 32x32 matrix, the arrangement [34123412 43214321 3412341243214321] in the 16th row of the 32x32 matrix, the arrangement [12341234 2143214312341234 21432143] in the 17th row of the 32x32 matrix, the arrangement [4321432134123412 43214321 34123412] in the 18th row of the 32x32 matrix,[21432143 12341234 21432143 12341234] in the 20th row of the 32x32 matrix, [12341234 21432143 12341234 21432143] in the 21st row of the 32x32 matrix, [43214321 34123412 43214321 34123412] in the 22nd row of the 32x32 matrix, [21432143 12341234 21432143 12341234] in the 23rd row of the 32x32 matrix, [43214321 34123412 43214321 34123412] in the 24th row of the 32x32 matrix, [12341234 21432143 12341234 21432143] in the 25th row of the 32x32 matrix, [43214321 34123412 43214321 34123412] in the 26th row of the 32x32 matrix, [12341234 21432143 12341234 21432143] in the 27th row of the 32x32 matrix, [21432143 12341234 21432143 12341234] in the 28th row of the 32x32 matrix, [43214321 34123412 43214321 34123412] in the 29th row of the 32x32 matrix, [12341234 21432143 12341234 21432143] in the 30th row of the 32x32 matrix, [21432143 12341234 21432143 12341234] in the 31st row of the 32x32 matrix, and [34123412 43214321 34123412 43214321] in the 32nd row of the 32x32 matrix,

[0178] or d) the base element has the arrangement [12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 12342341 123423[21433214 21433214 21433214 21433214] in the 20th row of the 32 x 32 matrix, [41233412 41233412 41233412 41233412] in the 21st row of the 32 x 32 matrix, [3214214332142143 3214214332142143] in the 22nd row of the 32 x 32 matrix, [234112342341123423411234 23411234] in the 23rd row of the 32 x 32 matrix, [143243211432432114324321 14324321] in the 24th row of the 32 x 32 matrix, [12342341 12342341 1234234112342341] in the 25th row of the 32 x 32 matrix, [43211432 43211432 4321143243211432] in the 26th row of the 32 x 32 matrix, [34124123 34124123 3412412334124123] in the 27th row of the 32 x 32 matrix, [21433214 21433214 2143321421433214] in the 28th row of the 32 x 32 matrix, [41233412 4123341241233412 41233412] in the 29th row of the 32 x 32 matrix, [3214214332142143 32142143 32142143] in the 30th row of the 32 x 32 matrix, [23411234 23411234 23411234 23411234] in the 31st row of the 32 x 32 matrix, and [14324321 14324321 14324321 1432432] in the 32nd row of the 32 x 32 matrix,

[0179] or e) the base element has the arrangement [12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 12342143 123421has the arrangement [34124321 34124321 34124321 34124321] in the 19th row of the 32x32 matrix, has the arrangement [21431234 21431234 21431234 21431234] in the 20th row of the 32x32 matrix, has the arrangement [43213412 43213412 43213412 43213412] in the 21st row of the 32x32 matrix, has the arrangement [1234214312342143 1234214312342143] in the 22nd row of the 32x32 matrix, has the arrangement [214312342143123421431234 21431234] in the 23rd row of the 32x32 matrix, has the arrangement [341243213412432134124321 34124321] in the 24th row of the 32x32 matrix, has the arrangement [12342143 12342143 1234214312342143] in the 25th row of the 32x32 matrix, has the arrangement [43213412 43213412 4321341243213412] in the 26th row of the 32x32 matrix, has the arrangement [34124321 34124321 3412432134124321] in the 27th row of the 32x32 matrix, has the arrangement [21431234 21431234 2143123421431234] in the 28th row of the 32x32 matrix, has the arrangement [43213412 4321341243213412 43213412] in the 29th row of the 32x32 matrix, has the arrangement [1234214312342143 12342143 12342143] in the 30th row of the 32x32 matrix, has the arrangement [21431234 21431234 21431234 21431234] in the 31st row of the 32x32 matrix, has the arrangement [34124321 34124321 34124321 34124321] in the 32nd row of the 32x32 matrix.

[0180] The corresponding figure accordingly also shows an integrated circuit for measuring the polarization of light, wherein the individual positions of the matrix-shaped arrangement remain unoccupied.

[0181] The corresponding figure accordingly also shows an integrated circuit for measuring the polarization of light,

[0182] - wherein the polarization filter has a grating structure produced using a photolithographic method in at least one manufacturing level and / or wiring level,

[0183] - wherein between the regions with the grating structure there are light- opaque walls which, in the case of oblique light incidence, prevent influencing adjacent sensors,

[0184] - wherein the light-opaque walls are made by vias or contacts.

Claims

1. A method for iteratively generating a matrix from basic elements, wherein the basic elements can be sensors or antennas with special characteristics or different orientations, as well as electronic devices with different wiring. Its features are, First, a fundamental matrix is ​​formed, which contains all basic elements at least once; however, the fundamental matrix can also contain empty elements, that is, spaces not occupied by any of the basic elements. By iteratively applying modification operators, such as rotation and mirroring, the fundamental matrix, or a matrix derived from the fundamental matrix, can be transformed into a modified matrix. An expansion operator is applied iteratively, which forms a larger matrix from multiple matrices of previous iterations, modified as needed, by copying, rotating, or mirroring, in such a way that portions of the larger matrix are filled with smaller matrices, modified as needed. A virtual experiment is conducted in which the characteristics of the resulting matrix are studied by systematically generating targeted values ​​with errors, from which the error signal can be derived. To generate complex matrices, all permutations of the next larger matrix are first formed by the expansion operator and evaluated through virtual experiments. Then, the next larger matrix with the minimum error signal is selected. The next larger matrix is ​​then gradually formed from these matrices by the expansion operator and evaluated through virtual experiments until the error signal does not exceed a pre-given limit.

2. A permutation of multiple four-different-basic-elements (1, 2, 3, 4) forming an 8×8 matrix, wherein the basic-elements have the permutation [1,2,3,4,2,1,4,3] in the first row of the 8×8 matrix, [4,3,2,1,3,4,1,2] in the second row of the 8×8 matrix, [3,4,1,2,4,3,2,1] in the third row of the 8×8 matrix, and [3,4,1,2,4,3,2,1] in the fourth row of the 8×8 matrix. There is a permutation [2,1,4,3,1,2,3,4]. In the fifth row of the 8×8 matrix, there is a permutation [4,3,2,1,3,4,1,2]. In the sixth row of the 8×8 matrix, there is a permutation [1,2,3,4,2,1,4,3]. In the seventh row of the 8×8 matrix, there is a permutation [2,1,4,3,1,2,3,4]. In the eighth row of the 8×8 matrix, there is a permutation [3,4,1,2,4,3,2,1].

3. A permutation of multiple sets of four distinct basic elements (1, 2, 3, 4) into a 16×16 matrix, where a) The basic elements are arranged in the following order in the first row of a 16×16 matrix: [1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4]; in the second row: [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2]; in the third row: [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1]; and in the fourth row: [2,1,3,4,1,2,4,3,2,1,3,4,1,2]. The numbers 4,3] have the following permutations in the fifth row of a 16×16 matrix: [3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2]; in the sixth row: [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3]; in the seventh row: [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4]; and in the eighth row: [4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1]. The 16×16 matrix has the following permutations in its ninth row: [1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4]; in its tenth row: [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2]; in its eleventh row: [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1]; and in its twelfth row: [2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3]. The 13th row of the 16×16 matrix contains the permutation [3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2], the 14th row contains the permutation [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3], the 15th row contains the permutation [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4], and the 16th row contains the permutation [4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1]. Alternatively, the basic elements described in b) have the following arrangement in the first row of a 16×16 matrix: [1,2,3,4,2,3,4,1,1,4,3,2,4,3,2,1]; in the second row: [4,3,2,1,1,4,3,2,2,3,4,1,1,2,3,4]; in the third row: [3,4,1,2,4,1,2,3,3,2,1,4,2,1,4,3]; and in the fourth row: [2,1,4,3,3,2,1,4,4,1,2,3,3,4]. The permutation [4,1,2,3,3,4,1,2,2,1,4,3,3,2,1,4] exists in the fifth row of a 16×16 matrix, [3,2,1,4,2,1,4,3,3,4,1,2,4,1,2,3] exists in the sixth row of a 16×16 matrix, [2,3,4,1,1,2,3,4,4,3,2,1,1,4,3,2] exists in the seventh row of a 16×16 matrix, and [1,4,3,2,4,3,2,1,1,2,3,4,2,3,4,1] exists in the eighth row of a 16×16 matrix. The following permutations exist in the 16×16 matrix: [1,4,3,2,4,3,2,1,1,2,3,4,2,3,4,1] in the ninth row, [2,3,4,1,1,2,3,4,4,3,2,1,1,4,3,2] in the tenth row, [3,2,1,4,2,1,4,3,3,4,1,2,4,1,2,3] in the eleventh row, and [4,1,2,3,3,4,1,2,2,1,4,3,3,2,1,4] in the twelfth row. The 13th row of a 16×16 matrix contains the permutation [2,1,4,3,3,2,1,4,4,1,2,3,3,4,1,2], the 14th row contains the permutation [3,4,1,2,4,1,2,3,3,2,1,4,2,1,4,3], the 15th row contains the permutation [4,3,2,1,1,4,3,2,2,3,4,1,1,2,3,4], and the 16th row contains the permutation [1,2,3,4,2,3,4,1,1,4,3,2,4,3,2,1]. Alternatively, the basic elements described in c) have the following arrangement: [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the first row of the 16×16 matrix, [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1] in the second row, [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] in the third row, and [2,1,4,3,2,1,4,3,2,1] in the fourth row. The permutation [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] exists in the fifth row of a 16×16 matrix, [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1] exists in the sixth row of a 16×16 matrix, [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] exists in the seventh row of a 16×16 matrix, and [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3] exists in the eighth row of a 16×16 matrix. The following permutations exist in the 16×16 matrix: [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the ninth row, [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1] in the tenth row, [3,4,1,2,3,4,1,2,3,4,1,2] in the eleventh row, and [2,1,4,3,2,1,4,3,2,1,4,3] in the twelfth row. The 13th row of a 16×16 matrix contains the permutation [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4], the 14th row contains the permutation [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1], the 15th row contains the permutation [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2], and the 16th row contains the permutation [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3]. Or, as described in d), the basic elements have the following arrangement in the first row of a 16×16 matrix: [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3]; in the second row: [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2]; in the third row: [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1]; and in the fourth row: [2,1,4,3,1,2,3,4,2,1,4,3,1,2]. The permutation [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2] exists in the fifth row of a 16×16 matrix, [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3] exists in the sixth row of a 16×16 matrix, [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4] exists in the seventh row of a 16×16 matrix, and [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1] exists in the eighth row of a 16×16 matrix. The following permutations exist in the 16×16 matrix: [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3] in the ninth row, [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2] in the tenth row, [3,4,1,2,4,3,2,1,3,4,1,2] in the eleventh row, and [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4] in the twelfth row. The 13th row of the 16×16 matrix contains the permutation [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2], the 14th row contains the permutation [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3], the 15th row contains the permutation [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4], and the 16th row contains the permutation [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1].

4. A permutation of multiple sets of four distinct basic elements (1, 2, 3, 4) into a 32×32 matrix, where a) The basic elements are arranged in the following order: [12341234 2341234112341234 23412341] in the first row of the 32×32 matrix, [43214321 14321432 43214321 14321432] in the second row of the 32×32 matrix, [34123412 41234123 34123412 41234123] in the third row of the 32×32 matrix, [21432143 32143214 2143214332143214] in the fourth row of the 32×32 matrix, and [1234123423412341 12341234] in the fifth row of the 32×32 matrix. The matrix [23412341] has the following permutations in the sixth row of a 32×32 matrix: [4321432114321432 43214321 14321432], [34123412 4123412334123412 41234123], [21432143 321432142143214332143214], [4123412334123412], [4123412334123412 4123412334123412], and [32143214 21432143] in the ninth row and [32143214 21432143] in the tenth row. The matrix 32×32 has the following permutations: [3214321421432143] in the eleventh row, [23412341 12341234 2341234112341234] in the twelfth row, [14321432 432143211432143214321] in the thirteenth row, [41234123 34123412 4123412334123412] in the thirteenth row, [32143214 21432143 3214321421432143] in the fourteenth row, and [23412341] in the fifteenth row. The sequence [12341234 2341234112341234] has the following permutations in the 16th row of a 32×32 matrix: [1432143243214321 14321432 43214321]; in the 17th row of a 32×32 matrix: [12341234 2341234 12341234 23412341]; and in the 18th row of a 32×32 matrix: [43214321 14321432 43214321 14321432].The 19th row of the 32×32 matrix contains the permutation [34123412 41234123 3412341241234123], the 20th row contains the permutation [2143214332143214 21432143 32143214], the 21st row contains the permutation [1234123423412341 12341234 23412341], the 22nd row contains the permutation [43214321 1432143243214321 14321432], and the 23rd row contains the permutation [34123412]. The matrix 412341233412341241234123 has the following permutations in its 24th row: [2143214332143214 2143214332143214]; in its 25th row: [41234123 34123412 4123412334123412]; in its 26th row: [32143214 21432143 3214321421432143]; and in its 27th row: [23412341 12341234]. The matrix 2341234112341234 has the following permutations: [1432143243214321 14321432 43214321] in row 28 of a 32×32 matrix; [41234123 34123412 41234123 34123412] in row 29 of a 32×32 matrix; [32143214 21432143 32143214 21432143] in row 30 of a 32×32 matrix; and [23412341 12341234] in row 31 of a 32×32 matrix. The permutation [2341234112341234] in the 32nd row of a 32×32 matrix has the following arrangement: [1432143243214321 14321432 43214321]. Alternatively, the basic elements described in b) are arranged in the following order: [12342341 1432432112342341 14324321] in the first row of the 32×32 matrix, [43211432 23411234 4321143223411234] in the second row, [34124123 32142143 3412412332142143] in the third row, [2143321441233412 21433214 41233412] in the fourth row, and [41233412 21433214 41233412] in the fifth row. The matrix [21433214] has the following permutations in the sixth row of a 32×32 matrix: [32142143 34124123 32142143 34124123], [23411234 43211432 2341123443211432], [1432432112342341 14324321 12342341], [1432432112342341 14324321 12342341], [1432432112342341 14324321 12342341], and [23411234] in the tenth row of a 32×32 matrix. The permutation [4321143223411234 43211432] exists in the eleventh row of a 32×32 matrix, [32142143 341241233214214334124123] exists in the twelfth row, [4123341221433214 4123341221433214] exists in the thirteenth row, [21433214 41233412 2143321441233412] exists in the thirteenth row, and [34124123 32142143] exists in the fourteenth row. The matrix 3412412332142143 has the following permutations: [43211432 23411234 4321143223411234] in the 15th row of the 32×32 matrix, [1234234114324321 12342341 14324321] in the 16th row of the 32×32 matrix, [12342341 14324321 12342341 14324321] in the 17th row of the 32×32 matrix, and [43211432 23411234 43211432 23411234] in the 18th row of the 32×32 matrix.The 19th row of the 32×32 matrix contains the permutation [34124123 32142143 3412412332142143], the 20th row contains the permutation [2143321441233412 21433214 41233412], the 21st row contains the permutation [4123341221433214 41233412 21433214], the 22nd row contains the permutation [32142143 3412412332142143 34124123], and the 23rd row contains the permutation [23411234]. The matrix 432114322341123443211432 has the following permutations in its 24th row: [1432432112342341 1432432112342341], [14324321 12342341 1432432112342341], [23411234 43211432 2341123443211432], and [32142143 34124123], and [32142143 34124123], respectively. The matrix 32×32 has the following permutations: [4123341221433214 41233412 21433214] in row 28, [21433214 41233412 21433214 41233412] in row 29, [21433214 41233412 21433214 41233412] in row 30, [34124123 32142143 34124123 32142143] in row 30, and [43211432 23411234] in row 31. The permutation [4321143223411234] in the 32nd row of a 32×32 matrix has the following arrangement: [1234234114324321 12342341 14324321]. Or, as in c), the basic elements are arranged in the following order: [12341234 2143214312341234 21432143] in the first row of the 32×32 matrix, [43214321 34123412 4321432134123412] in the second row, [34123412 43214321 34123412] in the third row, [34123412 43214321 3412341243214321] in the fourth row, [2143214312341234 21432143 12341234] in the fourth row, and [12341234 21432143 12341234] in the fifth row. The permutations [21432143] in the sixth row of the 32×32 matrix are [43214321 34123412 43214321 34123412], [34123412 43214321 3412341243214321], [2143214312341234 21432143 12341234], [4321432134123412 43214321 34123412], and [12341234] in the tenth row of the 32×32 matrix. The permutation [2143214312341234 21432143] exists in the eleventh row of a 32×32 matrix, [21432143 123412342143214312341234] exists in the twelfth row, [3412341243214321 3412341243214321] exists in the thirteenth row, [43214321 34123412 4321432134123412] exists in the thirteenth row, and [12341234 21432143] exists in the fourteenth row. The numbers 1234123421432143] have the following permutations in the 15th row of a 32×32 matrix: [21432143 12341234 214321431234], [3412341243214321 34123412 43214321], [12341234 21432143 12341234 21432143], and [43214321 34123412 43214321 34123412], respectively.The 19th row of the 32×32 matrix contains the permutation [34123412 43214321 3412341243214321], the 20th row contains the permutation [2143214312341234 21432143 12341234], the 21st row contains the permutation [1234123421432143 12341234 21432143], the 22nd row contains the permutation [43214321 3412341243214321 34123412], and the 23rd row contains the permutation [34123412]. The matrix 432143213412341243214321 has the following permutations in the 24th row of a 32×32 matrix: [2143214312341234 2143214312341234]; in the 25th row of a 32×32 matrix: [43214321 34123412 4321432134123412]; in the 26th row of a 32×32 matrix: [12341234 21432143 1234123421432143]; and in the 27th row of a 32×32 matrix: [21432143 12341234]. The matrix 2143214312341234 has the following permutations: [3412341243214321 34123412 43214321] in row 28 of a 32×32 matrix; [43214321 34123412 43214321 34123412] in row 29 of a 32×32 matrix; [12341234 21432143 12341234 21432143] in row 30 of a 32×32 matrix; and [21432143 12341234] in row 31 of a 32×32 matrix. The permutation [2143214312341234] in the 32nd row of a 32×32 matrix has the following arrangement: [3412341243214321 34123412 43214321]. Or, as described in d), the basic elements are arranged in the first row of a 32×32 matrix as [12342341 1234234112342341 12342341], in the second row as [43211432 43211432 4321143243211432], in the third row as [34124123 34124123 3412412334124123], in the fourth row as [2143321421433214 21433214 21433214], and in the fifth row as [41233412 41233412 41233412] The matrix [41233412] has the following permutations in the sixth row of a 32×32 matrix: [32142143 32142143 32142143 32142143]; in the seventh row: [23411234 23411234 2341123423411234]; in the eighth row: [1432432114324321 14324321 14324321]; in the ninth row: [1234234112342341 12342341 12342341]; and in the tenth row: [43211432]. The permutation [4321143243211432 43211432] exists in the eleventh row of a 32×32 matrix, [34124123 341241233412412334124123] exists in the twelfth row, [2143321421433214 2143321421433214] exists in the thirteenth row, [41233412 41233412 4123341241233412] exists in the thirteenth row, and [32142143 32142143] exists in the fourteenth row. The matrix 32×32 has the following permutations: [23411234 23411234 2341123423411234] in the 15th row, [1432432114324321 14324321 14324321] in the 16th row, [12342341 12342341 12342341 12342341] in the 17th row, and [43211432 43211432 43211432 43211432] in the 18th row.The 19th row of the 32×32 matrix contains the permutation [34124123 34124123 3412412334124123], the 20th row contains the permutation [2143321421433214 21433214 21433214], the 21st row contains the permutation [4123341241233412 41233412 41233412], the 22nd row contains the permutation [32142143 3214214332142143 32142143], and the 23rd row contains the permutation [23411234]. The matrix 234112342341123423411234 has the following permutations: [1432432114324321 1432432114324321] in the 24th row of a 32×32 matrix; [12342341 12342341 1234234112342341] in the 25th row of a 32×32 matrix; [43211432 43211432 4321143243211432] in the 26th row of a 32×32 matrix; and [34124123 34124123] in the 27th row of a 32×32 matrix. The matrix 3412412334124123 has the following permutations in its 28th row: [2143321421433214 21433214 21433214]; in its 29th row: [41233412 41233412 41233412 41233412]; in its 30th row: [32142143 32142143 32142143 32142143]; and in its 31st row: [23411234 23411234]. The permutation [2341123423411234] in the 32nd row of a 32×32 matrix has the pattern [1432432114324321 14324321 14324321]. Or, as in e), the basic elements are arranged in the following order: [12342143 1234214312342143 12342143] in the first row of the 32×32 matrix, [43213412 43213412 4321341243213412] in the second row, [34124321 34124321 3412432134124321] in the third row, [2143123421431234 21431234 21431234] in the fourth row, and [43213412 43213412 43213412] in the fifth row. The matrix [43213412] has the following permutations in the sixth row of a 32×32 matrix: [12342143 12342143 12342143 12342143], [21431234 21431234 2143123421431234], [3412432134124321 34124321 34124321], [1234214312342143 12342143 12342143], and [43213412] in the tenth row. The permutations [4321341243213412 43213412] exist in the eleventh row of a 32×32 matrix, [34124321 3412432134124321], [2143123421431234 2143123421431234], [43213412 43213412 4321341243213412], and [12342143 12342143] exist in the thirteenth row of a 32×32 matrix, and [12342143 12342143] exist in the fourteenth row of a 32×32 matrix. The numbers 1234214312342143 have the following permutations in the 15th row of a 32×32 matrix: [21431234 21431234 2143123421431234], [3412432134124321 34124321 34124321], [12342143 12342143 12342143 12342143], and [43213412 43213412 43213412 43213412] in the 18th row of a 32×32 matrix.The 19th row of the 32×32 matrix contains the permutation [34124321 34124321 3412432134124321], the 20th row contains the permutation [21431234 21431234 21431234 21431234], the 21st row contains the permutation [4321341243213412 43213412 43213412], the 22nd row contains the permutation [12342143 1234214312342143 12342143], and the 23rd row contains the permutation [21431234]. The matrix 214312342143123421431234 has the following permutations: [3412432134124321 3412432134124321] in row 24 of a 32×32 matrix; [12342143 12342143 1234214312342143] in row 25 of a 32×32 matrix; [43213412 43213412 4321341243213412] in row 26 of a 32×32 matrix; and [34124321 34124321] in row 27 of a 32×32 matrix. The matrix 3412432134124321 has the following permutations: [2143123421431234 21431234 21431234] in row 28 of a 32×32 matrix; [43213412 43213412 43213412 43213412] in row 29 of a 32×32 matrix; [12342143 12342143 12342143 12342143] in row 30 of a 32×32 matrix; and [21431234 21431234] in row 31 of a 32×32 matrix. The matrix 2143123421431234 has the permutation [3412432134124321 34124321 34124321] in the 32nd row of a 32×32 matrix.

5. The arrangement according to any one of claims 2 to 4 forms a complex matrix, characterized in that, When applying operations such as copying, rotating, or mirroring, a larger arrangement is generated from a smaller arrangement.

6. The arrangement according to any one of claims 2 to 5, characterized in that, Each position in the matrix arrangement remains unoccupied.

7. An integrated circuit for measuring optical polarization, said integrated circuit - It has a polarization-sensitive sensor, which has at least two different orientations of the polarization plane. -The integrated circuit contains a device configured to make a statement about the polarization of the incident light based on the signal from the polarization-sensitive sensor. - It has at least one sensing element, which, as a structural unit, is arranged together with a polarization filter to form one of the polarization-sensitive sensors. -Among them, the polarization-sensitive filters of the polarization-sensitive sensors, arranged as structural units, have targeted extension and orientation. -The polarizing filter described herein has a grating structure generated using photolithography at least in one manufacturing layer. -The polarization-sensitive sensor described in any one of claims 2 to 6 is arranged with different orientations of the polarization plane.

8. An integrated circuit for measuring optical polarization, said integrated circuit - It has at least two polarization-sensitive sensors, which have different orientations of their polarization planes. -The integrated circuit contains a device configured to make a statement about the polarization of the incident light based on the signal from the polarization-sensitive sensor. - It has at least one sensing element, which, as a structural unit, is arranged together with a polarization filter to form one of the polarization-sensitive sensors. -Among them, the polarization-sensitive filters of the polarization-sensitive sensors, arranged as structural units, have targeted extension and orientation. -The polarizing filter has a grating structure generated by photolithography in at least one manufacturing layer and / or wiring layer. - In this design, there are opaque walls between regions with grating structures, which prevent interference with adjacent sensors when light is incident at an angle. -The opaque wall is manufactured using through holes or contact elements. -The polarization-sensitive sensor described in any one of claims 2 to 6 is arranged with different orientations of the polarization plane.

9. An integrated circuit for measuring optical polarization, particularly according to claim 7 or 8, wherein the integrated circuit... - It has polarization-sensitive sensors as basic elements (1, 2, 3, 4) in four preferred different orientations, the polarization-sensitive sensors having different orientations of the polarization plane. - It has sensing elements, which are arranged together with a polarization filter as structural units to form one of the polarization-sensitive sensors. -Among them, the polarization-sensitive filters of the polarization-sensitive sensors, arranged as structural units, have targeted extension and orientation. -The polarizing filter described herein has a grating structure generated using photolithography at least in one manufacturing layer. -The polarization-sensitive sensors with different orientations are composed of multiple individual sensor elements, which are arranged in a matrix. -The integrated circuit contains a device configured to make a statement about the polarization of the incident light based on the signal from the polarization-sensitive sensor. -The basic elements (1, 2, 3, 4) with different orientations are arranged in an 8×8 matrix. -The basic elements are arranged as follows: [1,2,3,4,2,1,4,3] in the first row of the 8×8 matrix, [4,3,2,1,3,4,1,2] in the second row of the 8×8 matrix, [3,4,1,2,4,3,2,1] in the third row of the 8×8 matrix, [2,1,4,3,1,2,3,4] in the fourth row of the 8×8 matrix, [4,3,2,1,3,4,1,2] in the fifth row of the 8×8 matrix, [1,2,3,4,2,1,4,3] in the sixth row of the 8×8 matrix, [2,1,4,3,1,2,3,4] in the seventh row of the 8×8 matrix, and [3,4,1,2,4,3,2,1] in the eighth row of the 8×8 matrix.

10. An integrated circuit for measuring optical polarization, particularly according to claim 7 or 8, wherein the integrated circuit... - It has polarization-sensitive sensors as basic elements (1, 2, 3, 4) in four preferred different orientations, the polarization-sensitive sensors having different orientations of the polarization plane. - It has sensing elements, which are arranged together with a polarization filter as structural units to form one of the polarization-sensitive sensors. -Among them, the polarization-sensitive filters of the polarization-sensitive sensors, arranged as structural units, have targeted extension and orientation. -The polarizing filter described herein has a grating structure generated using photolithography at least in one manufacturing layer. -The polarization-sensitive sensors with different orientations are composed of multiple individual sensor elements, which are arranged in a matrix. -The integrated circuit contains a device configured to make a statement about the polarization of the incident light based on the signal from the polarization-sensitive sensor. -The basic elements (1, 2, 3, 4) with different orientations are arranged in a 16×16 matrix. -in a) The basic elements are arranged in the following order in the first row of a 16×16 matrix: [1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4]; in the second row: [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2]; in the third row: [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1]; and in the fourth row: [2,1,3,4,1,2,4,3,2,1,3,4,1,2]. The numbers 4,3] have the following permutations in the fifth row of a 16×16 matrix: [3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2]; in the sixth row: [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3]; in the seventh row: [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4]; and in the eighth row: [4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1]. The 16×16 matrix has the following permutations in its ninth row: [1,2,4,3,2,1,3,4,1,2,4,3,2,1,3,4]; in its tenth row: [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2]; in its eleventh row: [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1]; and in its twelfth row: [2,1,3,4,1,2,4,3,2,1,3,4,1,2,4,3]. The 13th row of the 16×16 matrix contains the permutation [3,4,2,1,4,3,1,2,3,4,2,1,4,3,1,2], the 14th row contains the permutation [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3], the 15th row contains the permutation [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4], and the 16th row contains the permutation [4,3,1,2,3,4,2,1,4,3,1,2,3,4,2,1]. Alternatively, the basic elements described in b) have the following arrangement in the first row of a 16×16 matrix: [1,2,3,4,2,3,4,1,1,4,3,2,4,3,2,1]; in the second row: [4,3,2,1,1,4,3,2,2,3,4,1,1,2,3,4]; in the third row: [3,4,1,2,4,1,2,3,3,2,1,4,2,1,4,3]; and in the fourth row: [2,1,4,3,3,2,1,4,4,1,2,3,3,4]. The permutation [4,1,2,3,3,4,1,2,2,1,4,3,3,2,1,4] exists in the fifth row of a 16×16 matrix, [3,2,1,4,2,1,4,3,3,4,1,2,4,1,2,3] exists in the sixth row of a 16×16 matrix, [2,3,4,1,1,2,3,4,4,3,2,1,1,4,3,2] exists in the seventh row of a 16×16 matrix, and [1,4,3,2,4,3,2,1,1,2,3,4,2,3,4,1] exists in the eighth row of a 16×16 matrix. The following permutations exist in the 16×16 matrix: [1,4,3,2,4,3,2,1,1,2,3,4,2,3,4,1] in the ninth row, [2,3,4,1,1,2,3,4,4,3,2,1,1,4,3,2] in the tenth row, [3,2,1,4,2,1,4,3,3,4,1,2,4,1,2,3] in the eleventh row, and [4,1,2,3,3,4,1,2,2,1,4,3,3,2,1,4] in the twelfth row. The 13th row of a 16×16 matrix contains the permutation [2,1,4,3,3,2,1,4,4,1,2,3,3,4,1,2], the 14th row contains the permutation [3,4,1,2,4,1,2,3,3,2,1,4,2,1,4,3], the 15th row contains the permutation [4,3,2,1,1,4,3,2,2,3,4,1,1,2,3,4], and the 16th row contains the permutation [1,2,3,4,2,3,4,1,1,4,3,2,4,3,2,1]. Alternatively, the basic elements described in c) have the following arrangement: [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the first row of the 16×16 matrix, [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1] in the second row, [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] in the third row, and [2,1,4,3,2,1,4,3,2,1] in the fourth row. The permutation [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] exists in the fifth row of a 16×16 matrix, [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1] exists in the sixth row of a 16×16 matrix, [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2] exists in the seventh row of a 16×16 matrix, and [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3] exists in the eighth row of a 16×16 matrix. The following permutations exist in the 16×16 matrix: [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4] in the ninth row, [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1] in the tenth row, [3,4,1,2,3,4,1,2,3,4,1,2] in the eleventh row, and [2,1,4,3,2,1,4,3,2,1,4,3] in the twelfth row. The 13th row of a 16×16 matrix contains the permutation [1,2,3,4,1,2,3,4,1,2,3,4,1,2,3,4], the 14th row contains the permutation [4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1], the 15th row contains the permutation [3,4,1,2,3,4,1,2,3,4,1,2,3,4,1,2], and the 16th row contains the permutation [2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3,2,1,4,3]. Or, as described in d), the basic elements have the following arrangement in the first row of a 16×16 matrix: [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3]; in the second row: [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2]; in the third row: [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1]; and in the fourth row: [2,1,4,3,1,2,3,4,2,1,4,3,1,2]. The permutation [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2] exists in the fifth row of a 16×16 matrix, [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3] exists in the sixth row of a 16×16 matrix, [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4] exists in the seventh row of a 16×16 matrix, and [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1] exists in the eighth row of a 16×16 matrix. The following permutations exist in the 16×16 matrix: [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3] in the ninth row, [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2] in the tenth row, [3,4,1,2,4,3,2,1,3,4,1,2] in the eleventh row, and [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4] in the twelfth row. The 13th row of the 16×16 matrix contains the permutation [4,3,2,1,3,4,1,2,4,3,2,1,3,4,1,2], the 14th row contains the permutation [1,2,3,4,2,1,4,3,1,2,3,4,2,1,4,3], the 15th row contains the permutation [2,1,4,3,1,2,3,4,2,1,4,3,1,2,3,4], and the 16th row contains the permutation [3,4,1,2,4,3,2,1,3,4,1,2,4,3,2,1].

11. An integrated circuit for measuring optical polarization, particularly according to claim 7 or 8, wherein the integrated circuit... - It has polarization-sensitive sensors as basic elements (1, 2, 3, 4) in four preferred different orientations, the polarization-sensitive sensors having different orientations of the polarization plane. - It has sensing elements, which are arranged together with a polarization filter as structural units to form one of the polarization-sensitive sensors. -Among them, the polarization-sensitive filters of the polarization-sensitive sensors, arranged as structural units, have targeted extension and orientation. -The polarizing filter described herein has a grating structure generated using photolithography at least in one manufacturing layer. -The polarization-sensitive sensors with different orientations are composed of multiple individual sensor elements, which are arranged in a matrix. -The integrated circuit contains a device configured to make a statement about the polarization of the incident light based on the signal from the polarization-sensitive sensor. -The basic elements (1, 2, 3, 4) with different orientations are arranged in a 32×32 matrix. -in a) The basic elements are arranged in the following order: [12341234 2341234112341234 23412341] in the first row of the 32×32 matrix, [43214321 14321432 43214321 14321432] in the second row of the 32×32 matrix, [34123412 41234123 34123412 41234123] in the third row of the 32×32 matrix, [21432143 32143214 2143214332143214] in the fourth row of the 32×32 matrix, and [1234123423412341 12341234] in the fifth row of the 32×32 matrix. The matrix [23412341] has the following permutations in the sixth row of a 32×32 matrix: [4321432114321432 43214321 14321432], [34123412 4123412334123412 41234123], [21432143 321432142143214332143214], [4123412334123412], [4123412334123412 4123412334123412], and [32143214 21432143] in the ninth row and [32143214 21432143] in the tenth row. The matrix 32×32 has the following permutations: [3214321421432143] in the eleventh row, [23412341 12341234 2341234112341234] in the twelfth row, [14321432 432143211432143214321] in the thirteenth row, [41234123 34123412 4123412334123412] in the thirteenth row, [32143214 21432143 3214321421432143] in the fourteenth row, and [23412341] in the fifteenth row. The sequence [12341234 2341234112341234] has the following permutations in the 16th row of a 32×32 matrix: [1432143243214321 14321432 43214321]; in the 17th row of a 32×32 matrix: [12341234 2341234 12341234 23412341]; and in the 18th row of a 32×32 matrix: [43214321 14321432 43214321 14321432].The 19th row of the 32×32 matrix contains the permutation [34123412 41234123 3412341241234123], the 20th row contains the permutation [2143214332143214 21432143 32143214], the 21st row contains the permutation [1234123423412341 12341234 23412341], the 22nd row contains the permutation [43214321 1432143243214321 14321432], and the 23rd row contains the permutation [34123412]. The matrix 412341233412341241234123 has the following permutations in its 24th row: [2143214332143214 2143214332143214]; in its 25th row: [41234123 34123412 4123412334123412]; in its 26th row: [32143214 21432143 3214321421432143]; and in its 27th row: [23412341 12341234]. The matrix 2341234112341234 has the following permutations: [1432143243214321 14321432 43214321] in row 28 of a 32×32 matrix; [41234123 34123412 41234123 34123412] in row 29 of a 32×32 matrix; [32143214 21432143 32143214 21432143] in row 30 of a 32×32 matrix; and [23412341 12341234] in row 31 of a 32×32 matrix. The permutation [2341234112341234] in the 32nd row of a 32×32 matrix has the following arrangement: [1432143243214321 14321432 43214321]. Alternatively, the basic elements described in b) are arranged in the following order: [12342341 1432432112342341 14324321] in the first row of the 32×32 matrix, [43211432 23411234 4321143223411234] in the second row, [34124123 32142143 3412412332142143] in the third row, [2143321441233412 21433214 41233412] in the fourth row, and [41233412 21433214 41233412] in the fifth row. The matrix [21433214] has the following permutations in the sixth row of a 32×32 matrix: [32142143 34124123 32142143 34124123], [23411234 43211432 2341123443211432], [1432432112342341 14324321 12342341], [1432432112342341 14324321 12342341], [1432432112342341 14324321 12342341], and [23411234] in the tenth row of a 32×32 matrix. The permutation [4321143223411234 43211432] exists in the eleventh row of a 32×32 matrix, [32142143 341241233214214334124123] exists in the twelfth row, [4123341221433214 4123341221433214] exists in the thirteenth row, [21433214 41233412 2143321441233412] exists in the thirteenth row, and [34124123 32142143] exists in the fourteenth row. The matrix 3412412332142143 has the following permutations: [43211432 23411234 4321143223411234] in the 15th row of the 32×32 matrix, [1234234114324321 12342341 14324321] in the 16th row of the 32×32 matrix, [12342341 14324321 12342341 14324321] in the 17th row of the 32×32 matrix, and [43211432 23411234 43211432 23411234] in the 18th row of the 32×32 matrix.The 19th row of the 32×32 matrix contains the permutation [34124123 32142143 3412412332142143], the 20th row contains the permutation [2143321441233412 21433214 41233412], the 21st row contains the permutation [4123341221433214 41233412 21433214], the 22nd row contains the permutation [32142143 3412412332142143 34124123], and the 23rd row contains the permutation [23411234]. The matrix 432114322341123443211432 has the following permutations in its 24th row: [1432432112342341 1432432112342341], [14324321 12342341 1432432112342341], [23411234 43211432 2341123443211432], and [32142143 34124123], and [32142143 34124123], respectively. The matrix 32×32 has the following permutations: [4123341221433214 41233412 21433214] in row 28, [21433214 41233412 21433214 41233412] in row 29, [21433214 41233412 21433214 41233412] in row 30, [34124123 32142143 34124123 32142143] in row 30, and [43211432 23411234] in row 31. The permutation [4321143223411234] in the 32nd row of a 32×32 matrix has the following arrangement: [1234234114324321 12342341 14324321]. Or, as in c), the basic elements are arranged in the following order: [12341234 2143214312341234 21432143] in the first row of the 32×32 matrix, [43214321 34123412 4321432134123412] in the second row, [34123412 43214321 34123412] in the third row, [34123412 43214321 3412341243214321] in the fourth row, [2143214312341234 21432143 12341234] in the fourth row, and [12341234 21432143 12341234] in the fifth row. The permutations [21432143] in the sixth row of the 32×32 matrix are [43214321 34123412 43214321 34123412], [34123412 43214321 3412341243214321], [2143214312341234 21432143 12341234], [4321432134123412 43214321 34123412], and [12341234] in the tenth row of the 32×32 matrix. The permutation [2143214312341234 21432143] exists in the eleventh row of a 32×32 matrix, [21432143 123412342143214312341234] exists in the twelfth row, [3412341243214321 3412341243214321] exists in the thirteenth row, [43214321 34123412 4321432134123412] exists in the thirteenth row, and [12341234 21432143] exists in the fourteenth row. The numbers 1234123421432143] have the following permutations in the 15th row of a 32×32 matrix: [21432143 12341234 214321431234], [3412341243214321 34123412 43214321], [12341234 21432143 12341234 21432143], and [43214321 34123412 43214321 34123412], respectively.The 19th row of the 32×32 matrix contains the permutation [34123412 43214321 3412341243214321], the 20th row contains the permutation [2143214312341234 21432143 12341234], the 21st row contains the permutation [1234123421432143 12341234 21432143], the 22nd row contains the permutation [43214321 3412341243214321 34123412], and the 23rd row contains the permutation [34123412]. The matrix 432143213412341243214321 has the following permutations in the 24th row of a 32×32 matrix: [2143214312341234 2143214312341234]; in the 25th row of a 32×32 matrix: [43214321 34123412 4321432134123412]; in the 26th row of a 32×32 matrix: [12341234 21432143 1234123421432143]; and in the 27th row of a 32×32 matrix: [21432143 12341234]. The matrix 2143214312341234 has the following permutations: [3412341243214321 34123412 43214321] in row 28 of a 32×32 matrix; [43214321 34123412 43214321 34123412] in row 29 of a 32×32 matrix; [12341234 21432143 12341234 21432143] in row 30 of a 32×32 matrix; and [21432143 12341234] in row 31 of a 32×32 matrix. The permutation [2143214312341234] in the 32nd row of a 32×32 matrix has the following arrangement: [3412341243214321 34123412 43214321]. Or, as described in d), the basic elements are arranged in the first row of a 32×32 matrix as [12342341 1234234112342341 12342341], in the second row as [43211432 43211432 4321143243211432], in the third row as [34124123 34124123 3412412334124123], in the fourth row as [2143321421433214 21433214 21433214], and in the fifth row as [41233412 41233412 41233412] The matrix [41233412] has the following permutations in the sixth row of a 32×32 matrix: [32142143 32142143 32142143 32142143]; in the seventh row: [23411234 23411234 2341123423411234]; in the eighth row: [1432432114324321 14324321 14324321]; in the ninth row: [1234234112342341 12342341 12342341]; and in the tenth row: [43211432]. The permutation [4321143243211432 43211432] exists in the eleventh row of a 32×32 matrix, [34124123 341241233412412334124123] exists in the twelfth row, [2143321421433214 2143321421433214] exists in the thirteenth row, [41233412 41233412 4123341241233412] exists in the thirteenth row, and [32142143 32142143] exists in the fourteenth row. The matrix 32×32 has the following permutations: [23411234 23411234 2341123423411234] in the 15th row, [1432432114324321 14324321 14324321] in the 16th row, [12342341 12342341 12342341 12342341] in the 17th row, and [43211432 43211432 43211432 43211432] in the 18th row.The 19th row of the 32×32 matrix contains the permutation [34124123 34124123 3412412334124123], the 20th row contains the permutation [2143321421433214 21433214 21433214], the 21st row contains the permutation [4123341241233412 41233412 41233412], the 22nd row contains the permutation [32142143 3214214332142143 32142143], and the 23rd row contains the permutation [23411234]. The matrix 234112342341123423411234 has the following permutations: [1432432114324321 1432432114324321] in the 24th row of a 32×32 matrix; [12342341 12342341 1234234112342341] in the 25th row of a 32×32 matrix; [43211432 43211432 4321143243211432] in the 26th row of a 32×32 matrix; and [34124123 34124123] in the 27th row of a 32×32 matrix. The matrix 3412412334124123 has the following permutations in its 28th row: [2143321421433214 21433214 21433214]; in its 29th row: [41233412 41233412 41233412 41233412]; in its 30th row: [32142143 32142143 32142143 32142143]; and in its 31st row: [23411234 23411234]. The permutation [2341123423411234] in the 32nd row of a 32×32 matrix has the pattern [1432432114324321 14324321 14324321]. Or, as in e), the basic elements are arranged in the following order: [12342143 1234214312342143 12342143] in the first row of the 32×32 matrix, [43213412 43213412 4321341243213412] in the second row, [34124321 34124321 3412432134124321] in the third row, [2143123421431234 21431234 21431234] in the fourth row, and [43213412 43213412 43213412] in the fifth row. The matrix [43213412] has the following permutations in the sixth row of a 32×32 matrix: [12342143 12342143 12342143 12342143], [21431234 21431234 2143123421431234], [3412432134124321 34124321 34124321], [1234214312342143 12342143 12342143], and [43213412] in the tenth row. The permutations [4321341243213412 43213412] exist in the eleventh row of a 32×32 matrix, [34124321 3412432134124321], [2143123421431234 2143123421431234], [43213412 43213412 4321341243213412], and [12342143 12342143] exist in the thirteenth row of a 32×32 matrix, and [12342143 12342143] exist in the fourteenth row of a 32×32 matrix. The numbers 1234214312342143 have the following permutations in the 15th row of a 32×32 matrix: [21431234 21431234 2143123421431234], [3412432134124321 34124321 34124321], [12342143 12342143 12342143 12342143], and [43213412 43213412 43213412 43213412] in the 18th row of a 32×32 matrix.The 19th row of the 32×32 matrix contains the permutation [34124321 34124321 3412432134124321], the 20th row contains the permutation [21431234 21431234 21431234 21431234], the 21st row contains the permutation [4321341243213412 43213412 43213412], the 22nd row contains the permutation [12342143 1234214312342143 12342143], and the 23rd row contains the permutation [21431234]. The matrix 214312342143123421431234 has the following permutations: [3412432134124321 3412432134124321] in row 24 of a 32×32 matrix; [12342143 12342143 1234214312342143] in row 25 of a 32×32 matrix; [43213412 43213412 4321341243213412] in row 26 of a 32×32 matrix; and [34124321 34124321] in row 27 of a 32×32 matrix. The matrix 3412432134124321 has the following permutations: [2143123421431234 21431234 21431234] in row 28 of a 32×32 matrix; [43213412 43213412 43213412 43213412] in row 29 of a 32×32 matrix; [12342143 12342143 12342143 12342143] in row 30 of a 32×32 matrix; and [21431234 21431234] in row 31 of a 32×32 matrix. The matrix 2143123421431234 has the permutation [3412432134124321 34124321 34124321] in the 32nd row of a 32×32 matrix.

12. The integrated circuit for measuring optical polarization according to any one of claims 9 to 11, characterized in that, Each position in the matrix arrangement remains unoccupied.

13. The integrated circuit for measuring optical polarization according to any one of claims 9 to 12, -The polarizing filter has a grating structure generated by photolithography in at least one manufacturing layer and / or wiring layer. - In this design, there are opaque walls between regions with grating structures, which prevent interference with adjacent sensors when light is incident at an angle. -The opaque wall is manufactured by means of through holes or contacts.

Citation Information

Patent Citations

  • Manufacture of a polarization-sensitive filter with targeted expansion and orientation for CCD or CMOS image sensors

    DE102005031966A1

  • Method for producing polarisation filters and use of polarisation-sensitive photo-sensors and polarisation-generating reproduction devices

    EP1902334A1

  • Method and device for measuring the relative angle of two objects which can be rotated relative to each other

    EP2522960A1