Spray head and method of processing thereof

Abstract

The present application relates to thin film deposition equipment technical field, disclose a shower head and its processing method, the shower head includes: cover plate has the through hole, the through hole includes first hole section and second hole section;Spray plate is provided with connecting column, connecting column includes thread section and base section;Connecting sleeve, including sleeve, sleeve is matched on the outside of thread section;First sealing structure, between the sleeve and the one end of thread section away from base section, the first sealing structure seals the sleeve and thread section.The present application is matched by the sleeve and connecting column thread connection, realize the connection of cover plate and spray plate, the consistency of thread cooperation is higher than welding, can effectively improve the connection precision, in addition, realize the process of connection without using welding and so on heating means, therefore can avoid the deformation of connecting column and so on connecting structure, in addition, still set up the first sealing structure, the first sealing structure can guarantee the sealing performance between connecting sleeve and connecting column, simple structure, convenient operation.

Description

Technical Field

[0001] This invention relates to the field of thin film deposition equipment technology, specifically to a spray head and its processing method. Background Technology

[0002] The spray head, also known as a gas disperser, is a key component in thin film deposition equipment. Gas is evenly dispersed into the thin film deposition chamber through the spray head, depositing a thin film on the surface of the wafer.

[0003] In related technologies, a spray head typically includes a cover plate and a spray plate, with the periphery of the cover plate connected to the spray plate by welding.

[0004] Currently, some technologies involve setting multiple columns on the spray plate and multiple holes on the cover plate. The columns are inserted into the holes and then welded to them, thus achieving multi-point fixation of the spray plate and the cover plate and improving the stability of the connection between the cover plate and the spray plate. However, when the columns and holes are connected by welding, if the welding time is long, the heat during the welding process is easily conducted to the column, causing the column to deform and affecting the welding accuracy. If the welding time is short, it is easy to cause insufficient melting, affecting the reliability and sealing of the connection. Summary of the Invention

[0005] In view of this, the present invention provides a spray head and its processing method to solve the problems existing in the existing spray heads.

[0006] In a first aspect, the present invention provides a spray head having a first direction. The spray head includes a cover plate and a spray plate. The spray plate has a mixing chamber open along the first direction. The cover plate covers the periphery of the open side to close the mixing chamber. The spray plate also has a spray surface, and the spray plate has a plurality of spray holes communicating with the mixing chamber from the spray surface. The cover plate has a plurality of communicating holes that penetrate the cover plate along the first direction. The communicating holes include a first hole segment and a second hole segment arranged with decreasing diameter along the first direction. The connecting surface of the first hole segment and the second hole segment forms a first stepped surface. The spray plate faces the cover plate. A plurality of connecting posts are provided on one side. Each connecting post includes a threaded section and a base section that are interconnected along a first direction. The threaded section is located on the side of the base section facing the cover plate. The connecting surface of the threaded section and the base section forms a second stepped surface. The threaded section passes through a second hole section and extends into a first hole section. The system also includes a connecting sleeve, which is threadedly fitted to the outside of the threaded section. The sleeve abuts against the first stepped surface and abuts the cover plate against the second stepped surface. The system also includes a first sealing structure, which is located between the sleeve and the end of the threaded section away from the base section. The first sealing structure seals the sleeve and the threaded section.

[0007] Beneficial effects: The connection between the cover plate and the spray plate is achieved through the threaded connection between the sleeve and the connecting column. The threaded connection provides higher consistency than welding, effectively improving the connection accuracy. No heating methods such as welding are required during the connection process, preventing deformation of the connecting column and other connection structures. Furthermore, a first sealing structure is provided to ensure the sealing performance between the connecting sleeve and the connecting column. The spray head structure proposed in this application is simple and easy to process. The connection strength required for reliable connection is achieved by the threaded connection, and the first sealing structure only needs to perform the sealing function. Optionally, the first sealing structure can be welded, as only the sealing function is required, eliminating the need for excessive welding and achieving a balance between welding strength and welding accuracy. Alternatively, it can be bonded, which will not affect the structural strength of the connecting column.

[0008] In one alternative embodiment, a second sealing structure is further included, disposed between the sleeve and the inner wall of the first orifice, for sealing the sleeve and the first orifice.

[0009] Beneficial effects: The second sealing structure can further improve the sealing reliability after the spray head is assembled. Together with the first sealing structure, it forms the sealing function between the connecting column and the connecting hole, thereby more comprehensively and thoroughly preventing gas leakage from the mixing chamber and ensuring the stability and safety of the gas pressure in the mixing chamber.

[0010] In one alternative embodiment, the connecting sleeve further includes a cap disposed at one end of the sleeve away from the base section. The cap is integrally connected to the sleeve, and the portion of the cap's periphery integrally connected to the sleeve forms a first sealing structure.

[0011] Beneficial effects: The cap itself can seal the threaded hole, thereby ensuring the sealing effect at the threaded hole. In addition, the integrated design of the sleeve and the first sealing structure means that the first sealing structure does not need to be completed by welding, which can effectively reduce the amount of welding work in the processing of the spray head. The sealing function can be achieved when the connecting sleeve is screwed in.

[0012] In one optional embodiment, the connecting sleeve further includes a solder sleeve, which is fixedly fitted onto the outer wall of the sleeve. The melting point of the solder sleeve is lower than that of the sleeve. A first gap is left between the sleeve and the inner wall of the first hole section. The solder sleeve is adapted to melt at a preset temperature to fill at least a portion of the first gap and cool to form a second sealing structure.

[0013] Beneficial effects: Due to the integrated design of the solder sleeve and the sleeve, the solder sleeve is positioned as soon as the sleeve is screwed in. No extra effort is needed to arrange the solder during the subsequent welding process, and welding can be performed directly, which greatly reduces the amount of welding work. Furthermore, since the melting point of the solder sleeve is lower than that of the sleeve, only the solder sleeve is melted during the welding process. The heat generated during welding has a lower impact on the sleeve and the threaded post, ensuring welding strength and accuracy.

[0014] In one alternative embodiment, there is a second gap between the threaded section and the second hole section, and the cover plate has a plurality of connecting holes connecting the first gap and the second gap. After the solder sleeve melts, it flows into the second gap through the connecting holes to fill the second gap and form a third sealing structure.

[0015] Beneficial effects: By setting the connecting hole, the solder sleeve can be melted and enter the second gap, and then cooled to form a third sealing structure, which enables the solder sleeve to form a multi-level sealing structure, which further enhances the sealing effect; in addition, the second sealing structure can achieve a tight connection between the connecting sleeve and the first hole section, and the third sealing structure can achieve a tight connection between the threaded section and the second hole section, thereby further improving the connection strength and reliability of the cover plate and the spray plate.

[0016] In one alternative embodiment, the connection hole includes an opening segment and a connecting segment located between the two opening segments, wherein the flow cross-sectional area of ​​the opening segment is larger than the flow cross-sectional area of ​​the connecting segment.

[0017] Beneficial effect: Facilitates the flow of the solder after it melts.

[0018] In one alternative embodiment, the end of the sleeve and / or solder sleeve away from the first step surface is provided with a screw groove.

[0019] Beneficial effects: The addition of a screw-in groove allows assembly tools to be inserted, making it easier to screw in the connecting sleeve.

[0020] In one alternative implementation, along the first direction, the outer diameter of the base segment gradually increases in the direction approaching the threaded segment.

[0021] Beneficial effects: This type of connecting column can effectively increase the area of ​​the second step surface, thereby increasing the contact area when the first plate and the connecting column abut against each other, which can make the base section support the first plate more stably and avoid stress concentration.

[0022] Secondly, the present invention also provides a method for processing a spray head, used in the assembly process of the cover plate and spray plate of the above-mentioned spray head, comprising:

[0023] Align the connecting hole on the cover plate with the corresponding connecting post on the spray plate; move the cover plate and the spray plate toward each other until the cover plate contacts the second step surface; put the connecting sleeve on the threaded section of the connecting post; tighten the connecting sleeve to press the cover plate against the second step surface.

[0024] Beneficial effects: The assembly method is simple and reliable. Compared with the welding fixing method, it can reduce the impact on the connecting column and improve the assembly accuracy and connection consistency of the spray head.

[0025] In an alternative embodiment, after the step of tightening the connecting sleeve to press the cover plate against the second stepped surface, the method further includes:

[0026] The welding laser heats the solder sleeve, causing it to melt and flow into the second gap; heating is then stopped, allowing the molten solder sleeve to cool and form the second and third sealing structures.

[0027] Beneficial effects: The two-stage sealing structure formed by the cooling of the molten solder sleeve can significantly improve the sealing performance at the connection point, and can also connect adjacent connecting parts, further improving the connection strength and stability. Attached Figure Description

[0028] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0029] Figure 1 This is a cross-sectional view of a spray head according to an embodiment of the present invention;

[0030] Figure 2 for Figure 1 The diagram shown is an enlarged view of point A when only the cover plate and the spray plate of the spray head are in contact.

[0031] Figure 3 for Figure 2 The shown is a cross-sectional view of the spray head with the connecting sleeve installed.

[0032] Figure 4 for Figure 3 The shown is a cross-sectional view of the spray head with the solder sleeve installed.

[0033] Figure 5 for Figure 4 The diagram shows a cross-sectional view after the solder sleeve forms the second and third sealing structures.

[0034] Figure 6 for Figure 2 The spray head shown is a cross-sectional view of another form of the first sealing structure and solder sleeve;

[0035] Figure 7 for Figure 4 The diagram shown is a three-dimensional schematic of a connecting sleeve with a screw groove.

[0036] Figure 8 for Figure 7 A sectional view of the connecting sleeve shown;

[0037] Figure 9 for Figure 1 A magnified schematic diagram of point B on the spray head shown.

[0038] Explanation of reference numerals in the attached figures:

[0039] 1. Cover plate; 101. First plate; 1011. Connecting hole; 10111. Opening section; 10112. Connecting section; 102. Connecting hole; 1021. First hole section; 1022. Second hole section; 1023. First step surface; 103. Second step structure;

[0040] 2. Spray plate; 201. Second plate; 2011. Mixing chamber; 202. Connecting column; 2021. Threaded section; 2022. Base section; 2023. Second step surface; 210. Opening; 211. Spray surface; 212. First step structure;

[0041] 3. Connecting sleeve; 301. Sleeve; 3011. Threaded hole; 302. Sealing cap; 3021. First sealing structure; 303. Solder sleeve; 3031. Second sealing structure; 3032. Third sealing structure; 304. Rotary groove;

[0042] 4. First gap; 5. Second gap; X, First direction. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0044] The following is combined Figures 1 to 9 The following describes embodiments of the present invention.

[0045] like Figures 1-3 As shown, according to an embodiment of the present invention, a spray head is provided, having a first direction X, the spray head comprising:

[0046] The cover plate 1 and the spray plate 2 are provided. The spray plate 2 has a mixing chamber 2011 with an opening 210 along the first direction X. The cover plate 1 is placed on the periphery of the opening 210 to close the mixing chamber 2011. The spray plate 2 also has a spray surface 211. The spray plate 2 has a plurality of spray holes from the spray surface 211 that communicate with the mixing chamber 2011.

[0047] The cover plate 1 has a plurality of connecting holes 102, which penetrate the cover plate 1 along the first direction X. The connecting holes 102 include a first hole segment 1021 and a second hole segment 1022 arranged with decreasing hole diameter along the first direction X. The connecting surface of the first hole segment 1021 and the second hole segment 1022 forms a first step surface 1023.

[0048] A plurality of connecting posts 202 are provided on the side of the spray plate 2 facing the cover plate 1. The connecting post 202 includes a threaded section 2021 and a base section 2022 that are connected to each other along the first direction X. The threaded section 2021 is provided on the side of the base section 2022 facing the cover plate 1. The connection surface between the threaded section 2021 and the base section 2022 forms a second stepped surface 2023. The threaded section 2021 passes through the second hole section 1022 and extends into the first hole section 1021.

[0049] It also includes a connecting sleeve 3, which includes a sleeve 301. The sleeve 301 is threaded to the outside of the threaded section 2021. The sleeve 301 abuts against the first step surface 1023 and abuts against the cover plate 1 against the second step surface 2023.

[0050] In addition, a first sealing structure 3021 is disposed between the sleeve 301 and the end of the threaded section 2021 that is away from the base section 2022, and the first sealing structure 3021 seals the sleeve 301 and the threaded section 2021.

[0051] The spray head of this embodiment connects the cover plate 1 and the spray plate 2 via a threaded connection between the sleeve 301 and the connecting column 202. The threaded connection provides higher consistency than welding, effectively improving connection accuracy. No welding or heating methods are required during the connection process, preventing deformation of the connecting column 202 and other connecting structures. Furthermore, a first sealing structure 3021 is provided to ensure the sealing performance between the connecting sleeve 3 and the connecting column 202. The spray head proposed in this application has a simple structure and is easy to manufacture. The connection strength required for reliable connection is achieved by the threaded connection, and the first sealing structure 3021 only needs to perform the sealing function. Optionally, the first sealing structure 3021 can be welded, as only the sealing function is required, eliminating the need for excessive welding and achieving a balance between welding strength and welding accuracy. Alternatively, it can be bonded, which will not affect the structural strength of the connecting column 202.

[0052] Wherein, the first direction X refers to Figure 1 and Figure 2 The direction of "X" indicated by the middle arrow should be understood as merely for the convenience of describing spatial relationships, and should not be construed as a limitation on the scope of the embodiments of this application.

[0053] Specifically, there is no limit to the number of connecting holes 102 and connecting posts 202. It can be that only one set of corresponding connecting holes 102 and connecting posts 202 is set, or multiple sets of connecting holes 102 and connecting posts 202 are set at intervals and correspond one-to-one. It can be selected according to the connection requirements.

[0054] Reference Figure 2 Furthermore, the cover plate 1 has a first plate body 101, and a connecting hole 102 is formed on the first plate body 101; the spray plate 2 has a second plate body 201, a mixing chamber 2011 is located in the second plate body 201, and a connecting post 202 is provided on the second plate body 201; the sleeve 301 has a threaded hole 3011 inside, and the sleeve 301 is connected to the threaded section 2021 through its own threaded hole 3011.

[0055] Reference Figure 3 In one possible implementation, the connecting sleeve 3 further includes a cap 302, which is disposed at one end of the sleeve 301 away from the base section 2022. The cap 302 is integrally connected to the sleeve 301, and the portion of the periphery of the cap 302 integrally connected to the sleeve 301 forms a first sealing structure 3021.

[0056] The cap 302 itself can seal the threaded hole 3011, thereby ensuring the sealing effect at the threaded hole 3011. In addition, the sleeve 301 and the first sealing structure 3021 are designed as a single unit, meaning that the first sealing structure 3021 does not need to be welded, which can effectively reduce the amount of welding work in the processing of the spray head. The sealing function is achieved when the connecting sleeve 3 is screwed in. Specifically, the cap 302 is located at the end of the sleeve 301 and blocks the threaded hole 3011.

[0057] As an alternative implementation method, such as Figure 6 As shown, it can be understood that the cap 302 may not be provided. The opening of the threaded hole 3011 and the threaded section 2021 are welded together to form a first sealing structure 3021, and the outer ring of the end of the sleeve 301 is welded to the first hole section 1021 to form a second sealing structure 3031.

[0058] Alternatively, the cap 302 can be made into a ring shape, with a sealing ring placed on the lower end face of the cap 302. During the screwing of the sleeve 301, the cap 302 presses the sealing ring against the end face of the threaded section 2021, thus achieving a sealing effect. It should be noted that the sealing ring selected in this case should be made of perfluoroelastomer rubber to withstand high-temperature environments.

[0059] Reference Figure 4 and Figure 5In one possible implementation, a second sealing structure 3031 is also included, which is disposed between the inner wall of the sleeve 301 and the first hole section 1021 to seal the sleeve 301 and the first hole section 1021. The second sealing structure 3031 can further improve the sealing reliability after the spray head is assembled. Together with the first sealing structure 3021, it constitutes the sealing function between the connecting column 202 and the connecting hole 102, thereby more comprehensively and thoroughly preventing the gas leakage in the mixing chamber 2011 and ensuring the stability and safety of the gas pressure in the mixing chamber 2011.

[0060] In one possible implementation, the connecting sleeve 3 further includes a solder sleeve 303, which is fixedly fitted onto the outer wall of the sleeve 301. The melting point of the solder sleeve 303 is lower than that of the sleeve 301. A first gap 4 is left between the sleeve 301 and the inner wall of the first hole section 1021. The solder sleeve 303 is adapted to be heated at a preset temperature and melted separately to form a molten solder sleeve 303, which fills at least a portion of the first gap 4 and cools to form a second sealing structure 3031. Due to the integrated design of the solder sleeve 303 and the sleeve 301, the solder sleeve 303 can be positioned simultaneously with screwing into the sleeve 301. No additional effort is required to arrange the solder during subsequent welding; welding can proceed directly, significantly reducing the welding workload. Furthermore, since the melting point of the solder sleeve 303 is lower than that of the sleeve 301, only the solder sleeve 303 is melted during the welding process. The heat generated during welding has a lower impact on the sleeve 301 and the threaded post, ensuring welding strength and accuracy.

[0061] The second sealing structure 3031 formed in this form can effectively fill the gap between the sleeve 301 and the first hole section 1021, thus effectively improving the sealing reliability at this position. In addition, since the melting point of the solder sleeve 303 is lower than that of the connecting sleeve 3, and the connection strength required for the reliable connection between the cover plate 1 and the spray plate 2 is mainly achieved by the threaded fit, the heating process of the solder sleeve 303 only needs to achieve sealing, without excessive heating, thus preventing deformation of the connecting sleeve 3 and the connecting column 202.

[0062] It is understandable that, as an alternative implementation, the second sealing structure 3031 can also be a sealing component with elasticity such as rubber, as long as the sealing reliability between the sleeve 301 and the first hole section 1021 can be guaranteed.

[0063] It should be noted that, in order to ensure that the heating process of the solder sleeve 303 has a small impact on the surrounding components, the melting points of the cover plate 1 and the spray plate 2 are both higher than the melting point of the solder sleeve 303.

[0064] The heating method for the solder sleeve 303 is not limited. It can be heated by welding laser, or by high-speed electron flow generated by plasma arc or electron beam generator. The choice can be made flexibly according to the requirements.

[0065] In one possible implementation, such as Figure 4 and Figure 5 As shown, a second gap 5 exists between the threaded section 2021 and the second hole section 1022. The cover plate 1 has several connecting holes 1011 inside, connecting the first gap 4 and the second gap 5. After the solder sleeve 303 melts, it flows into the second gap 5 through the connecting holes 1011 to fill the second gap 5 and form a third sealing structure 3032. By setting the connecting holes 1011, the solder sleeve 303 can melt and enter the second gap 5, subsequently cooling to form the third sealing structure 3032. This allows the solder sleeve 303 to form a multi-stage sealing structure, further enhancing the sealing effect. Additionally, the second sealing structure 3031 provides a tight connection between the connecting sleeve 3 and the first hole section 1021, and the third sealing structure 3032 provides a tight connection between the threaded section 2021 and the second hole section 1022, thereby further improving the connection strength and reliability of the cover plate 1 and the spray plate 2.

[0066] Among them, such as Figure 5 As shown, the location of the second gap 5 is enclosed by the threaded section 2021, the sleeve 301, the second hole section 1022, and the second stepped surface 2023 to form a sealed chamber. After the first gap 4 and the second gap 5 are connected through the connecting hole 1011, the molten solder sleeve 303 flows into the second gap 5, and the gas in the second gap 5 can also be discharged outward through the connecting hole 1011 at the same time. It should be noted that the molten solder sleeve 303 does not need to completely fill the second gap 5. As long as it can fill a part of the second gap 5, the third sealing structure 3032 can have both sealing and fastening effects.

[0067] In one possible implementation, such as Figure 4 As shown, the connecting hole 1011 extends along a straight line. One end of the connecting hole 1011 is located on the first step surface 1023, and the other end of the connecting hole 1011 is located on the inner wall of the second hole section 1022. This type of connecting hole 1011 has a shorter path, which not only facilitates processing and manufacturing, but also allows the molten solder sleeve 303 to flow smoothly into the second gap 5.

[0068] It is understood that, as an alternative implementation, the extension path of the connecting hole 1011 is not strictly limited, as long as it can connect the first gap 4 and the second gap 5. One end of the connecting hole 1011 can be located on the inner wall of the first hole segment 1021, while the other end can be located on the inner wall of the second hole segment 1022, which can also achieve the connection effect.

[0069] In one possible implementation, such as Figure 4 and Figure 5 As shown, the connecting hole 1011 includes an opening section 10111 and a connecting section 10112 located between the two opening sections 10111. The flow cross-sectional area of ​​the opening section 10111 is larger than the flow cross-sectional area of ​​the connecting section 10112, which is beneficial to the flow of the solder sleeve 303 after melting.

[0070] In this type of connection hole 1011, the opening is flared to facilitate the flow of molten solder sleeve 303 into the connection hole 1011, which can improve the speed and reliability of the molten solder sleeve 303 filling the second gap 5.

[0071] Specifically, the specific flow cross-sectional area of ​​the opening section 10111 and the connecting section 10112 is not limited, and can be selected according to the specifications and dimensions of the spray head.

[0072] In one possible implementation, such as Figure 7 and Figure 8 As shown, the sleeve 301 and / or the solder sleeve 303 are provided with a screw groove 304 at the end away from the first step surface 1023. The screw groove 304 is provided to allow the assembly tool to be inserted, making it easier to screw the connecting sleeve 3 in.

[0073] Specifically, the form of the screw groove 304 is not limited. It can be a slotted groove, a cross groove, or a polygonal groove. It can be flexibly selected according to the tools used when assembling the connecting sleeve 3.

[0074] In one possible implementation, such as Figure 2 As shown, along the first direction X, the outer diameter of the base section 2022 gradually increases in the direction close to the threaded section 2021. This type of connecting post 202 can effectively increase the area of ​​the second step surface 2023, thereby increasing the contact area when the first plate 101 and the connecting post 202 abut against each other. This allows the base section 2022 to support the first plate 101 more stably and avoid stress concentration.

[0075] It is understood that, as an alternative implementation, the outer diameter of the base section 2022 may remain unchanged along the direction close to the threaded section 2021.

[0076] Specifically, there are no restrictions on the specific dimensions of the threaded section 2021 and the base section 2022; they can be selected flexibly according to requirements.

[0077] Furthermore, the diameters of the first hole segment 1021 and the second hole segment 1022 are not limited. The first hole segment 1021 and the second hole segment 1022 can be through holes with the same diameter, or they can be through holes with a diameter that gradually changes along the first direction X. As long as the inner diameter of the first hole segment 1021 is larger than the inner diameter of the second hole segment 1022 at the connection point, a second step surface 2023 facing the threaded segment 2021 can be formed.

[0078] In one possible implementation, such as Figure 9 As shown, in the mixing chamber 2011 of the spray plate 2, along the first direction X, the side wall of the mixing chamber 2011 is provided with a first step structure 212, and the edge of the cover plate 1 is provided with a corresponding second step structure 103. The cover plate 1 can abut against the first step structure 212 through its own second step structure 103. The first step structure 212 and the second step structure 103 adopt a stepped design. The spray plate 2 can generate a lifting force on the cover plate 1 through the first step structure 212, which can reduce the pressure on the connecting column 202, thereby further improving the stability and reliability of the spray plate 2 and the cover plate 1 after assembly.

[0079] According to an embodiment of the present invention, in another aspect, a method for processing a spray head is provided for assembling the cover plate 1 and spray plate 2 of the above-mentioned spray head, comprising:

[0080] Align the connecting hole 102 on the cover plate 1 with the corresponding connecting post 202 on the spray plate 2;

[0081] Move the cover plate 1 and the spray plate 2 toward each other until the cover plate 1 contacts the second step surface 2023;

[0082] The connecting sleeve 3 is fitted onto the threaded section 2021 of the connecting post 202;

[0083] Tighten the connecting sleeve 3 to press the cover plate 1 against the second step surface 2023.

[0084] The assembly method is simple and reliable. Compared with the welding method, it can reduce the impact on the connecting column 202 and improve the assembly accuracy and connection consistency of the spray head.

[0085] In one possible implementation, after the step of tightening the connecting sleeve 3 to press the cover plate 1 against the second stepped surface 2023, the method further includes:

[0086] The welding laser heats the solder sleeve 303, causing it to melt and flow into the second gap 5.

[0087] Stop heating and allow the molten solder sleeve 303 to cool and form the second sealing structure 3031 and the third sealing structure 3032.

[0088] The two-stage sealing structure formed by the cooling of the molten solder sleeve 303 not only significantly improves the sealing performance at the connection point, but also connects adjacent components, further enhancing the connection strength and stability.

[0089] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A spray head, characterized in that, Having a first direction (X), the spray head includes: The cover plate (1) and the spray plate (2) are provided. The spray plate (2) has a mixing chamber (2011) with an opening (210) along a first direction (X). The cover plate (1) is placed on the periphery of the opening (210) to close the mixing chamber (2011). The spray plate (2) also has a spray surface (211). The spray plate (2) has a plurality of spray holes from the spray surface (211) that communicate with the mixing chamber (2011). The cover plate (1) has a plurality of connecting holes (102), the connecting holes (102) penetrate the cover plate (1) along the first direction (X), the connecting holes (102) include a first hole segment (1021) and a second hole segment (1022) arranged with the hole diameter decreasing along the first direction (X), and the connecting surface of the first hole segment (1021) and the second hole segment (1022) forms a first step surface (1023); The spray plate (2) is provided with a plurality of connecting posts (202) on the side facing the cover plate (1). The connecting post (202) includes a threaded section (2021) and a base section (2022) that are connected to each other along the first direction (X). The threaded section (2021) is provided on the side of the base section (2022) facing the cover plate (1). The connecting surface of the threaded section (2021) and the base section (2022) forms a second stepped surface (2023). The threaded section (2021) passes through the second hole section (1022) and extends into the first hole section (1021). It also includes a connecting sleeve (3), including a sleeve (301), the sleeve (301) being threaded onto the outside of the threaded section (2021), the sleeve (301) abutting against the first stepped surface (1023), and the cover plate (1) abutting against the second stepped surface (2023); and, A first sealing structure (3021) is disposed between the sleeve (301) and the end of the threaded section (2021) opposite to the base section (2022), and the first sealing structure (3021) seals the sleeve (301) and the threaded section (2021).

2. The spray head according to claim 1, characterized in that, It also includes a second sealing structure (3031), which is disposed between the inner wall of the sleeve (301) and the first hole section (1021) to seal the sleeve (301) and the first hole section (1021).

3. The spray head according to claim 2, characterized in that, The connecting sleeve (3) further includes a cap (302), which is disposed at one end of the sleeve (301) away from the base section (2022). The cap (302) is integrally connected to the sleeve (301), and the portion of the periphery of the cap (302) integrally connected to the sleeve (301) forms the first sealing structure (3021).

4. The spray head according to claim 3, characterized in that, The connecting sleeve (3) also includes a solder sleeve (303), which is fixedly sleeved on the outer wall of the sleeve (301), and the melting point of the solder sleeve (303) is lower than the melting point of the sleeve (301). A first gap (4) is left between the sleeve (301) and the inner wall of the first hole section (1021). The solder sleeve (303) is adapted to melt at a preset temperature to fill at least a portion of the first gap (4) and cool to form the second sealing structure (3031).

5. The spray head according to claim 4, characterized in that, There is a second gap (5) between the threaded section (2021) and the second hole section (1022). The cover plate (1) has a plurality of connecting holes (1011) connecting the first gap (4) and the second gap (5). After the solder sleeve (303) melts, it flows into the second gap (5) through the connecting holes (1011) to fill the second gap (5) and form a third sealing structure (3032).

6. The spray head according to claim 5, characterized in that, The connecting hole (1011) includes an opening section (10111) and a connecting section (10112) located between the two opening sections (10111), wherein the flow cross-sectional area of ​​the opening section (10111) is greater than the flow cross-sectional area of ​​the connecting section (10112).

7. The spray head according to any one of claims 4 to 6, characterized in that, The sleeve (301) and / or the solder sleeve (303) are provided with a screw groove (304) at the end away from the first step surface (1023).

8. The spray head according to any one of claims 1 to 6, characterized in that, Along the first direction (X), the outer diameter of the base segment (2022) gradually increases in the direction close to the threaded segment (2021).

9. A method for processing a spray head, used in the assembly process of the cover plate (1) and spray plate (2) of the spray head according to any one of claims 1 to 8, characterized in that, include: Align the connecting hole (102) on the cover plate (1) with the corresponding connecting post (202) on the spray plate (2); Move the cover plate (1) and the spray plate (2) toward each other until the cover plate (1) contacts the second step surface (2023); The connecting sleeve (3) is fitted onto the threaded section (2021) of the connecting post (202); Tighten the connecting sleeve (3) to press the cover plate (1) against the second step surface (2023).

10. The spray head processing method according to claim 9, characterized in that, The step of tightening the connecting sleeve (3) to press the cover plate (1) against the second step surface (2023) further includes: The solder sleeve (303) is heated by welding laser, and the solder sleeve (303) melts and flows into the second gap (5); Stop heating and allow the molten solder sleeve (303) to cool and form the second sealing structure (3031) and the third sealing structure (3032).

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