An automatic height adjustment method, device, and storage medium for an air-float vibration isolator

Abstract

This application relates to the technical field of semiconductor manufacturing, and discloses an automatic height adjustment method, device, and storage medium for air-bearing vibration isolators. The method includes: acquiring target attitude data of an air-bearing platform; obtaining current attitude data of the air-bearing platform based on sensor acquisition; decomposing multiple target height data based on the target attitude data; and decomposing multiple current height data based on the current attitude data; wherein each target height data corresponds one-to-one with each current height data, and each corresponds one-to-one with an air-bearing vibration isolator of the air-bearing platform; traversing each air-bearing vibration isolator and calculating the height difference data between the current height data and the target height data; if the height difference data is greater than a preset reference difference data, then using a PID algorithm to calculate the current internal pressure adjustment value of the air-bearing vibration isolator based on the height difference data; and adjusting the internal pressure of the current air-bearing vibration isolator based on the internal pressure adjustment value. This method can achieve automatic height adjustment, improving the timeliness and accuracy of air-bearing platform height adjustment.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to an automatic height adjustment method, apparatus and storage medium for an air-bearing vibration isolator. Background Technology

[0002] The semiconductor chip industry is increasingly becoming a key development area. The most crucial aspect of chip manufacturing is wafer fabrication, which not only involves complex processes but also places extremely high demands on the production environment of wafer manufacturing equipment. Environmental vibration has a significant impact on chip processing, and harsh dynamic environments can adversely affect chip manufacturing. Prolonged exposure to harsh dynamic environments can also shorten the lifespan of wafer manufacturing equipment; therefore, vibration reduction and isolation measures are necessary for wafer manufacturing equipment.

[0003] Existing technology utilizes vibration control techniques to reduce and isolate vibrations in wafer manufacturing equipment. Installing suitable vibration isolators between the equipment and its foundation ensures that precision equipment meets normal operating conditions. One of the most important functions of an air-floating platform is to prevent micro-vibrations. Multiple integrated air-floating vibration isolators made of special materials can support an air-floating platform weighing hundreds of tons and the simulated test object installed on top, ensuring it does not come into contact with any solid that could transmit vibration waves, thus achieving vibration isolation.

[0004] Existing air-float platform height adjustment devices mainly rely on components such as hydraulic jacks, guide rails, and lead screws to determine the current height position of the vibration isolator, adapting to platforms of different heights to achieve high efficiency and low error rate. However, the existing air-float platform height adjustment operation is manual, which is prone to problems such as untimely and inaccurate adjustment of the guide rail platform height during the leveling process, and easy damage to the air-float platform. Summary of the Invention

[0005] In order to enable automatic height adjustment of the air-float platform and improve the timeliness and accuracy of the height adjustment, this application provides an automatic height adjustment method, device and storage medium for an air-float vibration isolator.

[0006] In a first aspect, this application provides an automatic height adjustment method for an air-bearing vibration isolator, employing the following technical solution:

[0007] An automatic height adjustment method for an air-float vibration isolator includes the following steps:

[0008] Acquire the target attitude data of the air-floating platform, and obtain the current attitude data of the air-floating platform based on sensor acquisition;

[0009] Multiple target height data are decomposed from the target attitude data, and multiple current height data are decomposed from the current attitude data; wherein each target height data corresponds one-to-one with each current height data, and also corresponds one-to-one with the air-floating vibration isolator of the air-floating platform.

[0010] Iterate through each of the air-float vibration isolators and calculate the height difference between the current height data and the target height data;

[0011] If the height difference data is greater than the preset reference difference data, the PID algorithm is used to calculate the current internal pressure adjustment value of the air-float vibration isolator based on the height difference data.

[0012] The internal pressure of the air-bearing vibration isolator is adjusted according to the internal pressure adjustment value.

[0013] By adopting the above technical solution, target attitude data and current attitude data collected by sensors are acquired, and target height data and current height data corresponding to the air-bearing vibration isolators are decomposed one-to-one. The height difference data of each air-bearing vibration isolator is calculated iteratively. When the height difference data exceeds the reference difference data, the internal pressure adjustment value is calculated based on the height difference data using a PID algorithm, and the internal pressure of the air-bearing vibration isolator is adjusted accordingly. This process does not require manual intervention, avoiding the lag and error of manual adjustment. Independent and precise control of each vibration isolator is achieved through attitude data decomposition. The PID algorithm ensures that the adjustment process is stable and efficient, and can quickly reduce the height difference to a reasonable range. This effectively solves the problem of untimely and inaccurate height adjustment of the guide rail platform, reduces the risk of damage to the air-bearing platform caused by attitude deviation, improves the anti-micro-vibration performance and operational stability of the air-bearing platform, and ensures the working accuracy of precision equipment such as wafer manufacturing equipment.

[0014] Optionally, the sensor is a laser sensor, and the air-floating platform has at least three air-floating vibration isolators.

[0015] By adopting the above technical solution, laser sensors are used to improve data acquisition accuracy, and at least three air-bearing vibration isolators form a stable support.

[0016] Optionally, the step of adjusting the internal pressure of the current air-bearing vibration isolator further includes the following sub-steps:

[0017] The correction adjustment value is calculated based on the internal pressure adjustment value and the preset correction coefficient;

[0018] Adjust the internal pressure of the current air-float vibration isolator according to the correction adjustment value.

[0019] By adopting the above technical solution, the internal pressure adjustment value is combined with the preset correction coefficient to calculate the correction adjustment value, thereby adjusting the reverse internal pressure of the air-bearing vibration isolator, reducing system errors, improving the accuracy of internal pressure adjustment, and further ensuring the accuracy of air-bearing platform attitude calibration.

[0020] Optionally, the method further includes the following steps:

[0021] The fluctuation value of the internal pressure regulation value is calculated within a preset time period;

[0022] If the fluctuation value is greater than the preset fluctuation reference value, the correction coefficient is adjusted according to the inverse correlation of the fluctuation value.

[0023] By employing the above technical solution, the fluctuation of the internal pressure regulation value within a set time period is monitored. When the fluctuation exceeds the required level, the correction coefficient is adjusted inversely. When the fluctuation is large, the correction amplitude is reduced to avoid over-adjustment and exacerbation of oscillations; when the fluctuation is small, the correction amplitude is increased to accelerate deviation convergence.

[0024] Optionally, the method further includes the following steps:

[0025] If the number of air-bearing vibration isolators changes, the change in the number of air-bearing vibration isolators is calculated.

[0026] The correction coefficient is adjusted inversely based on the amount of change.

[0027] By adopting the above technical solution, when the number of air-bearing vibration isolators changes, the correction coefficient is adjusted inversely according to the change in number. When the number increases, the correction coefficient is reduced to reduce interference in coordinated adjustment; when the number decreases, the correction coefficient is increased to enhance the adjustment accuracy of a single unit, dynamically adapt to changes in number, and help ensure adjustment stability.

[0028] Optionally, the method further includes the following steps:

[0029] The duration of the set time period is adjusted according to the positive correlation between the quantity of change and the set time period.

[0030] By adopting the above technical solution, the set time period is adjusted in a positive correlation with the change in the number of air-float vibration isolators. When the change in the number is large, the set calculation cycle is extended to ensure sufficient fluctuation assessment, improve the adaptability of correction coefficient adjustment, and help ensure the anti-stability of system adjustment.

[0031] Optionally, the step of adjusting the internal pressure of the current air-bearing vibration isolator according to the internal pressure adjustment value further includes the following sub-steps:

[0032] Within the same adjustment cycle, the current internal pressure adjustment value of the air-float vibration isolator is obtained as the first adjustment value;

[0033] The internal pressure adjustment value of the adjacent air-float vibration isolator is obtained as the second adjustment value;

[0034] The difference between the first adjustment value and the second adjustment value is calculated as the adjacent difference.

[0035] If the adjacent difference is greater than the preset adjacent reference value, the internal pressure adjustment value of the air-float vibration isolator is adjusted according to the inverse correlation of the adjacent difference.

[0036] By adopting the above technical solution, the internal pressure adjustment values ​​of the current air-floating vibration isolators and adjacent air-floating vibration isolators are compared within the same adjustment cycle, that is, the first adjustment value and the second adjustment value are compared, and the adjacent difference is calculated. When the adjacent difference exceeds the adjacent reference value, the current internal pressure adjustment value is adjusted inversely to avoid attitude imbalance caused by excessive adjustment amplitude of adjacent vibration isolators, reduce platform oscillation, improve the consistency and stability of the coordinated adjustment of each air-floating vibration isolator, and further ensure the attitude calibration accuracy of the air-floating platform.

[0037] Optionally, the step of adjusting the internal pressure of the current air-bearing vibration isolator according to the internal pressure adjustment value further includes the following sub-steps:

[0038] Within the same adjustment cycle, the current internal pressure adjustment value of the air-float vibration isolator is obtained as the first adjustment value;

[0039] The internal pressure adjustment value of an adjacent air-float vibration isolator is obtained as the second adjustment value;

[0040] The internal pressure adjustment value of another adjacent air-float vibration isolator is obtained as the third adjustment value;

[0041] The difference between the first adjustment value and the second adjustment value is calculated as the first difference value;

[0042] The difference between the first adjustment value and the third adjustment value is calculated as the second difference value;

[0043] The sum of the absolute values ​​of the first difference and the second difference is the absolute sum.

[0044] If the absolute sum is greater than the preset sum reference value, the internal pressure adjustment value of the air-float vibration isolator is adjusted according to the inverse correlation of the absolute sum.

[0045] By adopting the above technical solution, within the same adjustment cycle, the absolute sum is obtained by calculating the first adjustment value of the current air-bearing vibration isolator and the first and second differences between the second and third adjustment values ​​of two adjacent vibration isolators, and summing the absolute values. When the absolute sum exceeds the reference value, the current internal pressure adjustment value is adjusted inversely. The adjustment differences of the surrounding vibration isolators are fully considered to avoid the risk of overall imbalance being masked by the deviation of adjacent devices on one side. This helps to suppress platform oscillations caused by excessive adjustment amplitude, enhances the balance of multi-vibration-isolator coordinated adjustment, and improves the attitude stability and calibration accuracy of the air-bearing platform.

[0046] Secondly, this application provides an automatic height adjustment device for an air-bearing vibration isolator, which adopts the following technical solution:

[0047] An automatic height adjustment device for an air-bearing vibration isolator includes a processor, wherein the processor performs the steps of the automatic height adjustment method for the air-bearing vibration isolator as described in any of the preceding claims.

[0048] Thirdly, this application provides a storage medium, which adopts the following technical solution:

[0049] A storage medium storing a program, which, when executed by a processor, implements the steps of the automatic height adjustment method for an air-bearing vibration isolator as described in any one of the preceding claims.

[0050] In summary, this application includes at least one of the following beneficial technical effects: by acquiring the target and current attitude data of the air-bearing platform and decomposing it into the height data of each corresponding air-bearing vibration isolator, calculating the height difference, and using a PID algorithm to obtain the internal pressure adjustment value and adjust the internal pressure when the difference exceeds the preset value, automatic height adjustment is achieved; at the same time, through optimization methods such as optimizing the adjustment value with a correction coefficient, dynamically adjusting the correction coefficient and monitoring cycle according to the fluctuation of the internal pressure adjustment value and the change in the number of vibration isolators, and comparing the adjustment values ​​of adjacent vibration isolators to avoid imbalance, it effectively replaces manual operation, solves the problems of lag and inaccuracy of manual adjustment, improves the stability and accuracy of adjustment, reduces the risk of equipment damage, and can dynamically adapt to changes in the scene, thereby ensuring the quality of precision manufacturing such as semiconductors. Attached Figure Description

[0051] Figure 1 This is a step diagram of an automatic height adjustment method for an air-float vibration isolator.

[0052] Figure 2 This is a schematic diagram of the air flotation platform.

[0053] Figure 3 This is a schematic diagram of a PID control system.

[0054] Figure 4 This is a system functional module architecture diagram.

[0055] Figure 5 This is a simplified flowchart of the software control process for the height adjustment device of the air-bearing vibration isolation platform.

[0056] Figure 6 This is the iterative curve of the PID control algorithm for the air-bearing vibration isolation platform.

[0057] Reference numerals: 1. Optical platform; 2. Air-bearing vibration isolator; 3. Support frame; 4. Air pressure regulating valve; 5. Flange; 6. Slide plate; 7. Air pump. Detailed Implementation

[0058] The embodiments of this application are described in detail below, and examples of the embodiments are shown in the accompanying drawings.

[0059] In the description of this specification, the references to "certain embodiments," "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples" refer to specific features, structures, materials, or characteristics described in connection with the described embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0060] This application discloses an automatic height adjustment method for an air-float vibration isolator, referring to... Figure 1 It includes the following steps:

[0061] The system acquires target attitude data for the air-bearing platform by using laser sensors to collect current attitude data. The target attitude of the air-bearing platform is input by the host computer or user via a touchscreen, and this attitude data is stored as reference parameters. Laser sensors scan multiple detection points on the air-bearing platform in real time, with each detection point corresponding to the support position of each air-bearing vibration isolator 2, acquiring current height and horizontal tilt data. Simultaneously, laser sensors on the side of the slide rail visually identify the coordinate position of the air-bearing platform on the slide rail, feeding back the position information and height data to the intelligent core algorithm module.

[0062] Based on the structural parameters of the air-bearing platform, such as the distribution location of the vibration isolators and the platform dimensions, the target attitude data is decomposed into multiple target height data. Each target height data corresponds to the target support height of one air-bearing vibration isolator 2. For example, if the air-bearing platform needs to remain level, the target height difference of each vibration isolator must be ≤0.3mm. Similarly, the current attitude data is decomposed into multiple current height data, which correspond one-to-one with the target height data, that is, the current height and target height of the same vibration isolator form a comparison group.

[0063] Iterate through each air-bearing vibration isolator 2 and calculate the height difference between the current height data and the target height data; height difference data = current height data - target height data; for example: if the current height of a vibration isolator is 50.2mm and the target height is 50.0mm, then the height difference data is 0.2mm.

[0064] The preset reference difference data is 0.1mm, which can be manually modified via the touchscreen. If the height difference data is ≤0.1mm, the current vibration isolator height is considered acceptable and no adjustment is needed; if the height difference data is >0.1mm, such as the aforementioned 0.2mm difference, PID adjustment is triggered. The intelligent core algorithm module calls the PID core algorithm, using the height difference data as input, and calculates using proportional (P), integral (I), and derivative (D) parameters; for example, proportional coefficient Kp=2.0, integral time Ti=0.5s, and derivative time Td=0.1s. The output is an internal pressure adjustment value, which corresponds to the opening and closing degree of the air valve and the adjustment time; for example, it is calculated that an internal pressure increase of 0.05MPa is needed to shorten the height difference by 0.2mm.

[0065] The internal pressure regulation value is converted into an electrical signal and sent to the air valve actuator unit. The air valve adjusts its opening degree according to the signal, changing the internal pressure of the air-bearing vibration isolator 2 by inflating or deflating: if the current height is lower than the target height, the air valve is controlled to inflate to raise the vibration isolator; if the current height is higher than the target height, the air valve is controlled to deflate to lower the vibration isolator. During the adjustment process, the laser sensor collects height data in real time and feeds it back to the intelligent core algorithm module, forming a closed-loop control. (Refer to...) Figure 6 The iterative curve under the PID control algorithm shows that the number of iterations is reduced and the convergence speed is improved after adjustment.

[0066] By acquiring the target attitude data of the air-bearing platform and using sensors to collect its current attitude data, the target height data and current height data corresponding to each air-bearing vibration isolator 2 are decomposed. The height difference between the current height data and the target height data of each air-bearing vibration isolator 2 is calculated by iterating through all air-bearing vibration isolators 2. When the height difference exceeds a preset reference difference, the internal pressure adjustment value of the corresponding air-bearing vibration isolator 2 is calculated using a PID algorithm based on this height difference, and the internal pressure of the air-bearing vibration isolator 2 is then adjusted according to this internal pressure adjustment value. This process requires no manual intervention, thus avoiding the lag and errors inherent in manual adjustment. By decomposing the attitude data, independent and precise control can be implemented for each vibration isolator; the application of the PID algorithm ensures that the adjustment process is both stable and efficient, quickly reducing the height difference to a reasonable range. This method effectively solves the problem of untimely and inaccurate height adjustment of the guide rail platform, reduces the possibility of damage to the air-bearing platform due to attitude deviation, and improves the anti-micro-vibration performance and operational stability of the air-bearing platform, thereby ensuring the working accuracy of precision equipment such as wafer manufacturing equipment.

[0067] Among them, reference Figure 2 The air flotation platform includes an optical platform 1, an air flotation isolator 2, a support frame 3, an air pressure regulating valve 4, a flange 5, a sliding plate 6, and an air pump 7.

[0068] The optical stage 1 serves as the top-level load-bearing structure, constructed from high-rigidity, low-deformation precision materials (such as granite or alloys). Its surface undergoes precision grinding to ensure a flatness error of <0.5mm, meeting the installation and operational requirements of precision loads in semiconductor manufacturing equipment. Multiple connection interfaces are pre-installed at the bottom of the optical stage 1 for fixed connection to the top of the air-bearing vibration isolator 2 via flanges 5. Simultaneously, laser sensors are installed on the edges or bottom of the optical stage 1 to collect real-time data on the stage's current height and attitude, providing fundamental detection information for automatic height adjustment.

[0069] The air-bearing vibration isolator 2, as the core vibration isolation and support component, is made of special sealing material and is distributed in an array between the optical platform 1 and the support frame 3 (multiple sets integrated can support a load of hundreds of tons). After being filled with compressed air, its height can be adjusted by changing the air pressure, thereby adjusting the height and attitude of the optical platform 1. Each air-bearing vibration isolator 2 corresponds to an independent height adjustment unit, which, together with the air pressure regulating valve 4 and the air pump 7, forms a closed-loop air pressure control circuit. It can precisely change the internal air pressure according to the internal pressure adjustment value output by the PID control algorithm, realize the fine adjustment of the height of a single spring, and ultimately ensure the levelness of the entire optical platform 1.

[0070] The support frame 3, serving as the platform's fundamental support structure, is constructed from high-strength metal materials through welding or assembly. Its bottom is connected to the ground (or a fixed base), and its top is fixed to the bottom of the air-bearing vibration isolator 2 via flange 5, providing a stable support frame for the entire air-bearing platform. The height of the support frame 3 must be designed according to the stroke range of the air-bearing vibration isolator 2, reserving sufficient adjustment space to ensure that the air-bearing vibration isolator 2 maintains structural stability even under maximum extension and contraction, while avoiding interference with other components such as the sliding plate 6.

[0071] The air pressure regulating valve 4, as the actuator for air pressure regulation, is installed on the air pipeline between the air pump 7 and the air-float vibration isolator 2. Each air-float vibration isolator 2 corresponds to at least one air pressure regulating valve 4. The valve opening degree can be changed by electromagnetic control to achieve precise control of the air volume or air release of the air-float vibration isolator 2. It receives electrical signals from the intelligent algorithm module and, based on the internal pressure regulation value calculated by the PID algorithm, delivers the compressed air output by the air pump 7 to the air-float vibration isolator 2 at a set flow rate, or releases excess gas in the air-float vibration isolator 2, thereby adjusting the internal pressure and height of the air-float vibration isolator 2 in real time.

[0072] Flange 5, made of metal, serves as a connecting component and is used for the fixed connection of key parts such as the optical platform 1 to the top of the air-bearing isolator 2, the bottom of the air-bearing isolator 2 to the top of the support frame 3, and the interface between the air pipeline and the air-bearing isolator 2. The flange 5 connection has high connection strength and sealing performance, ensuring rigid fixation between components to prevent loosening due to vibration during platform operation, and preventing air leakage at the connection between the air-bearing isolator 2 and the air pipeline, thus ensuring the stability of air pressure regulation.

[0073] The slide plate 6 is mounted on the bottom of the optical platform 1 or the side of the support frame 3. Designed according to the position of the slide rail, it works in conjunction with the slide rail to realize the horizontal movement function of the air-floating platform. The surface of the slide plate 6 is treated with a low-friction coefficient material to reduce the transmission of mechanical vibration during movement. The slide plate 6 is equipped with a position detection component, such as a laser sensor, which can automatically read the accurate position of the platform on the slide rail and feed the position information back to the algorithm module. This allows the algorithm module to take into account the horizontal position of the platform when adjusting the height, avoiding the impact of positional deviation on accuracy during height adjustment.

[0074] Air pump 7 serves as the pneumatic power source, employing a silent high-pressure type. It is connected to the air pressure regulating valve 4 via the main air pipeline, providing stable compressed air to all air-bearing vibration isolators 2. The output air pressure of air pump 7 can be preset via an algorithm module, and it features automatic start / stop functionality: when the internal pressure of an air-bearing vibration isolator 2 falls below a threshold, air pump 7 automatically starts to replenish air; when the internal pressure reaches the preset range, air pump 7 stops operating to reduce energy consumption and minimize the impact of operating noise on precision equipment.

[0075] The aforementioned components are integrated with the air and electrical systems via mechanical connections to form a complete air-float platform structure. Specifically, the air-float vibration isolator 2, air pressure regulating valve 4, and air pump 7 constitute the air pressure regulation subsystem; the optical platform 1 and sliding plate 6, in conjunction with sensors, constitute the detection and load-bearing subsystem. Under the coordination of a PID intelligent control algorithm, each subsystem... Figure 3 This enables the platform to automatically adjust its height, level, and prevent micro-vibration.

[0076] The air-bearing platform has at least three air-bearing vibration isolators 2. In this embodiment, four air-bearing vibration isolators 2 are preferably used. The four air-bearing vibration isolators 2 are arranged in a rectangular array between the optical platform 1 and the support frame 3. Referring to the relevant configuration of the air-bearing platform structure, each air-bearing vibration isolator 2 is fixedly connected to the bottom of the optical platform 1 and the top of the support frame 3 respectively through a flange 5.

[0077] Reference Figure 4 The system functional module architecture is as follows:

[0078] Signal input unit: includes input detection module, safety detection module, expandable detection module, and sensor signal processing module, responsible for collecting various signals, such as detection signals, safety signals, and sensor signals, to provide data sources for subsequent processing.

[0079] Intelligent conversion: Intelligent analysis and conversion of signals from the input unit is the core of data processing.

[0080] Intelligent core algorithm module: Uses PID algorithm to further process and optimize the converted signal, extract data value, and ensure the realization of system functions.

[0081] Serial communication module: It is responsible for signal transmission and can exchange signals before and after processing between different modules and units through serial communication to ensure data flow.

[0082] Level conversion: Adjusts the signal level to adapt to the level requirements of different modules, ensuring effective signal transmission and processing.

[0083] Signal output unit: includes analog information display module, intelligent conversion output module, CAN communication module, and touch display module. It is responsible for outputting the processed signal in various forms (such as display, communication, etc.) to meet the needs of system interaction with the outside world and presentation of results.

[0084] Reference Figure 5 The step of adjusting the internal pressure of the current air-float vibration isolator 2 also includes the following sub-steps:

[0085] After receiving the internal pressure adjustment value calculated based on the PID algorithm, the system calls the preset correction coefficient to correct it. The correction coefficient is a parameter that is preset and stored in the algorithm module based on the historical operating data of the air flotation isolator 2, the load characteristics of the air flotation platform, and environmental factors (such as temperature and air pressure).

[0086] The formula for calculating the correction adjustment value is: Correction adjustment value = Internal pressure adjustment value × Correction coefficient;

[0087] For example, if the internal pressure adjustment value of a certain air-bearing vibration isolator 2 is calculated to be 0.1MPa by the PID algorithm, and the current preset correction coefficient is 1.02, then the correction adjustment value = 0.1MPa × 1.02 = 0.102MPa.

[0088] This correction process can compensate for the inherent system errors that the PID algorithm did not consider in the theoretical calculation, such as the air tightness difference of the air flotation vibration isolator 2 and the pressure loss of the air pipeline, so that the adjustment value is more in line with the actual operation requirements.

[0089] The calculated correction adjustment value is converted into a corresponding control signal and transmitted to the air pressure regulating valve 4. After receiving the control signal, the air pressure regulating valve 4 will operate according to the opening degree and adjustment duration corresponding to the correction adjustment value: if the correction adjustment value is positive, that is, the internal pressure needs to be increased, the air pressure regulating valve 4 opens the air intake channel, and the compressed air output by the air pump 7 enters the air-float vibration isolator 2 through the air pipeline until the internal pressure of the vibration isolator reaches the target value; if the correction adjustment value is negative, that is, the internal pressure needs to be reduced, the air pressure regulating valve 4 opens the exhaust channel, and the gas in the air-float vibration isolator 2 is discharged through the exhaust channel until the internal pressure reaches the target value.

[0090] During the adjustment process, the laser sensor collects the platform height data corresponding to the air-bearing vibration isolator 2 in real time and feeds the data back. The system judges whether the internal pressure adjustment has achieved the expected effect based on the feedback data. If it has not achieved the expected effect, the internal pressure adjustment value will be recalculated and adjusted again in combination with the correction coefficient, forming a closed-loop control.

[0091] Reference Figure 6 In this embodiment, the method further includes a step of real-time monitoring of fluctuations in the internal pressure regulation value and dynamic adjustment of the correction coefficient, specifically including the following steps:

[0092] The fluctuation value of the internal pressure regulation is calculated within a preset time period. The preset time period is 5 seconds. Within the preset time period, the intelligent core algorithm module collects the internal pressure regulation value every 0.1 seconds, for a total of 50 data points. The fluctuation value is calculated using the following formula: Fluctuation value = Maximum internal pressure regulation value within the preset time period - Minimum internal pressure regulation value within the preset time period. For example, if the maximum internal pressure regulation value is 0.12 MPa and the minimum internal pressure regulation value is 0.09 MPa within a certain 5-second period, then the fluctuation value = 0.12 MPa - 0.09 MPa = 0.03 MPa.

[0093] If the fluctuation value is greater than the preset fluctuation reference value (0.02 MPa), the correction coefficient is adjusted according to the inverse correlation of the fluctuation value. The initial value of the correction coefficient is 1.0, and the adjustment formula is as follows: New correction coefficient = Current correction coefficient × (Fluctuation reference value / Fluctuation value). When the fluctuation value is large, such as 0.03 MPa as mentioned above, the new correction coefficient = 1.0 × (0.02 / 0.03) ≈ 0.67, reducing the correction amplitude and avoiding repeated oscillations in internal pressure regulation due to over-correction, thus preventing high-frequency fluctuations in the attitude of the air-floating platform.

[0094] When the fluctuation value is small, such as fluctuation value = 0.01MPa, the new correction coefficient = 1.0×(0.02 / 0.01) = 2.0, the correction strength is increased, which can accelerate the reduction of the height difference and promote the rapid convergence of the air-floating platform attitude to the target state.

[0095] This step dynamically adjusts the correction force based on the stability of the internal pressure regulation, ensuring regulation accuracy while avoiding oscillations, thus further improving the stability of the air flotation platform operation.

[0096] The method also includes an adaptive adjustment step for changes in the number of air-bearing vibration isolators 2, the specific steps of which are as follows:

[0097] Each air-floating vibration isolator 2 of the air-floating platform is connected to the intelligent core algorithm module through the sensor signal processing module. The algorithm module determines whether the vibration isolator is in normal working condition by detecting the connection signal in real time. If the air pressure feedback signal of a vibration isolator is interrupted, it is determined that it has stopped working, that is, the number is reduced. At the same time, if the connection signal of a new vibration isolator is detected, such as when an additional vibration isolator is installed, the number is determined to increase.

[0098] The change quantity is calculated using the following formula: Change quantity = Current number of working vibration isolators - Initial number of working vibration isolators;

[0099] For example, if the initial number of vibration isolators is 4, and after adding 1 more, the current number is 5, then the change in quantity = 5 - 4 = +1, with a positive value indicating an increase in quantity; if one of them stops working, the current number is 3, then the change in quantity = 3 - 4 = -1, with a negative value indicating a decrease in quantity.

[0100] If the number of air-bearing vibration isolators 2 changes, the intelligent core algorithm module adjusts the correction coefficient inversely according to the change in quantity. The adjustment rule is as follows: the initial correction coefficient is 1.0.

[0101] When the change is positive (the number increases): New correction coefficient = Current correction coefficient × [Initial number / (Initial number + Change number)]. For example, if the initial number is 4, and 1 is added, the change number increases by 1, and the new correction coefficient = 1.0 × (4 / 5) = 0.8. By reducing the correction coefficient, the mutual interference when multiple vibration isolators are adjusted in tandem is reduced, such as avoiding local attitude over-adjustment caused by adjacent vibration isolators being inflated at the same time.

[0102] When the change in quantity is negative (quantity decreases): New correction coefficient = Current correction coefficient × [Initial quantity / (Initial quantity + Change in quantity)]. For example, if the initial quantity is 4 and it decreases by 1, the change in quantity is -1, and the new correction coefficient = 1.0 × (4 / 3) ≈ 1.33. By increasing the correction coefficient, the adjustment accuracy of the remaining vibration isolators is enhanced, compensating for the decrease in adjustment redundancy caused by the reduction in quantity.

[0103] This step enables the system to dynamically adapt to changes in the number of vibration isolators, ensuring that the air-floating platform can maintain stable height adjustment accuracy under different load support requirements, such as when adding or removing vibration isolators to replace the test specimen, thus meeting the requirements of precision machining for attitude stability.

[0104] In this embodiment, to address the impact of changes in the number of air-bearing vibration isolators 2 on the fluctuation monitoring period, the method adds the following step: adjusting the duration of the set time period based on the positive correlation between the changes in the number of air-bearing vibration isolators 2 and the change in the number of isolators. The greater the change in the number of isolators (the larger the absolute value), the greater the extension of the set time period.

[0105] The preset initial time period is 5 seconds, corresponding to the fluctuation monitoring cycle under the initial number of vibration isolators. The adjustment coefficient for the set time period is 0.5 seconds per isolator, meaning that the set time period increases or decreases by 0.5 seconds for each change in the number of vibration isolators. For example, if the initial number of vibration isolators is 4, when the number changes by +2 (adding 2) or -2 (reducing 2), the adjustment range of the set time period is 2 × 0.5 seconds = 1 second.

[0106] The change in the air-bearing vibration isolator 2 is obtained by the sensor signal processing module, and the new set time period is calculated by the following formula: New set time period = Initial set time period + (Absolute value of change × Adjustment coefficient).

[0107] If the number of changes is +3, 3 new ones will be added, and the new time period will be set to 5 seconds + (3 × 0.5 seconds) = 6.5 seconds;

[0108] If the change quantity is -1, reduce by 1, and the new time period = 5 seconds + (1 × 0.5 seconds) = 5.5 seconds.

[0109] When the number of vibration isolators changes significantly, such as adding 3 more, the extended set time period (6.5 seconds) can more fully collect data on fluctuations in internal pressure regulation values, avoiding misjudging short-term fluctuations caused by a sudden increase in the number of vibration isolators as system oscillations, and ensuring the accuracy of fluctuation assessment. When the number changes slightly (such as reducing 1), a moderately extended set time period (5.5 seconds) can ensure monitoring efficiency while adapting to the fluctuation characteristics caused by a small number of vibration isolator load changes, improving the adaptability of the correction coefficient adjustment to the actual working conditions, and ultimately ensuring the stability of system regulation.

[0110] In the step of adjusting the internal pressure of the current air-bearing vibration isolator 2 according to the internal pressure adjustment value, in order to avoid attitude imbalance caused by excessive adjustment of adjacent vibration isolators, the following sub-step is added, as follows:

[0111] The preset adjacent reference value is 0.05MPa, which is set based on the spacing between the vibration isolators and the rigidity characteristics of the platform. The corresponding height difference between adjacent vibration isolators is ≤0.03mm, and the same adjustment cycle is 1 second, which is consistent with the output cycle of the internal pressure adjustment command.

[0112] Within the same adjustment cycle, the intelligent core algorithm module obtains the current internal pressure adjustment value of the air-bearing vibration isolator 2, i.e., the first adjustment value, and simultaneously obtains the internal pressure adjustment value of the air-bearing vibration isolator 2 adjacent to the current isolator, i.e., the second adjustment value, through the CAN communication module. For example, the first adjustment value of the current vibration isolator is 0.15MPa, and the second adjustment value of the adjacent vibration isolator is 0.08MPa.

[0113] The adjacent difference is calculated using the following formula: Adjacent difference = |First adjustment value - Second adjustment value|; In the example above, the adjacent difference = |0.15MPa - 0.08MPa| = 0.07MPa.

[0114] Compare the adjacent differences with a preset adjacent reference value (0.05 MPa):

[0115] If the difference between adjacent values ​​is less than or equal to the adjacent reference value, such as 0.04 MPa, it is determined that the adjustment amplitudes of adjacent vibration isolators are coordinated, and there is no need to correct the current internal pressure adjustment value.

[0116] If the adjacent difference is greater than the adjacent reference value, such as 0.07MPa as mentioned above, then the internal pressure adjustment value of the current vibration isolator is adjusted inversely based on the adjacent difference. The adjustment formula is as follows: Corrected first adjustment value = first adjustment value × (adjacent reference value / adjacent difference); In the example above, the corrected first adjustment value = 0.15MPa × (0.05 / 0.07) ≈ 0.107MPa.

[0117] Through this step, when the adjustment range of adjacent vibration isolators is too large, such as the difference of 0.07MPa mentioned above, the adjustment value of the current vibration isolator is appropriately reduced to avoid platform tilting or oscillation caused by excessively rapid local inflation / deflation; when the adjacent difference is small, the adjustment value is kept unchanged to ensure adjustment efficiency. Ultimately, this improves the consistency of the coordinated adjustment of each air-bearing vibration isolator 2.

[0118] In the step of adjusting the internal pressure of the current air-float vibration isolator 2 according to the internal pressure adjustment value, to comprehensively evaluate the adjustment synergy between the current vibration isolator and the surrounding vibration isolators, and to avoid unilateral adjacent deviations masking the risk of overall imbalance, the following sub-step is added. In this embodiment, the air-float platform uses at least three air-float vibration isolators 2, preferably distributed in a rectangular array. Each air-float vibration isolator 2 corresponds to at least two adjacent vibration isolators. For example, in a rectangular array, the adjacent left and right or front and rear vibration isolators of a certain vibration isolator are as follows:

[0119] The preset reference value is 0.08MPa, which is set based on the distribution characteristics of the vibration isolator array and the platform's anti-micro-vibration requirements. The sum of the height differences in two adjacent directions is ≤0.05mm. The same adjustment cycle is consistent with the output cycle of the internal pressure adjustment command, which is set to 1 second.

[0120] Within the same adjustment cycle, the intelligent core algorithm module obtains the current internal pressure adjustment value of the air-bearing vibration isolator 2 through the sensor signal processing module, defining it as the first adjustment value; simultaneously, it obtains the internal pressure adjustment values ​​of the two air-bearing vibration isolators 2 adjacent to the current isolator through the CAN communication module, defining them as the second adjustment value (e.g., the left adjacent isolator) and the third adjustment value (e.g., the right adjacent isolator), respectively. For example, the first adjustment value of the current isolator is 0.20 MPa, the second adjustment value of the left adjacent isolator is 0.12 MPa, and the third adjustment value of the right adjacent isolator is 0.13 MPa.

[0121] Calculate the difference between the first regulation value and the second regulation value, and define it as the first difference: First difference = First regulation value - Second regulation value. In the example above, the first difference = 0.20MPa - 0.12MPa = 0.08MPa.

[0122] The difference between the first and third adjustment values ​​is calculated and defined as the second difference: Second difference = First adjustment value - Third adjustment value. In the example above, the second difference = 0.20MPa - 0.13MPa = 0.07MPa.

[0123] The sum of the absolute values ​​of the first difference and the second difference is defined as the absolute sum: Absolute sum = |first difference| + |second difference|. In the example above, the absolute sum = |0.08MPa| + |0.07MPa| = 0.15MPa.

[0124] Compare the absolute sum with the preset sum reference value (0.08 MPa):

[0125] If the absolute sum is less than or equal to the sum reference value (e.g., 0.06MPa), it is determined that the adjustment amplitude of the current vibration isolator is coordinated with that of the two adjacent vibration isolators, and there is no need to correct the first adjustment value.

[0126] If the absolute sum is greater than the reference sum (such as 0.15 MPa as mentioned above), then the internal pressure adjustment value of the current vibration isolator is adjusted inversely based on the absolute sum. The adjustment formula is as follows: Corrected first adjustment value = First adjustment value × (Reference sum / Absolute sum). In the example above, the corrected first adjustment value = 0.20 MPa × (0.08 / 0.15) ≈ 0.107 MPa.

[0127] The adjustment value of the current vibration isolator is corrected by considering the differences between two adjacent directions. When the absolute sum is large, such as 0.15MPa as mentioned above, the adjustment value is significantly reduced to avoid "local bulges" or "local depressions" caused by excessive adjustment amplitudes of the current vibration isolator and its two adjacent vibration isolators, effectively suppressing platform oscillations. At the same time, compared with the adjustment method that only refers to the adjustment of a single adjacent vibration isolator, this method can comprehensively reflect the surrounding adjustment differences, avoiding the situation where the deviation on one side is normal but the deviation on both sides exceeds the standard. Ultimately, this enhances the balance of the coordinated adjustment of multiple vibration isolators and ensures the attitude stability of the air-floating platform.

[0128] This application also discloses an automatic height adjustment device for an air-bearing vibration isolator, including a processor, wherein the processor executes the steps of the automatic height adjustment method for the air-bearing vibration isolator as described in any of the above embodiments.

[0129] This application also discloses a storage medium storing a program, which, when executed by a processor, implements the steps of the automatic height adjustment method for the air-bearing vibration isolator described in any of the above embodiments.

[0130] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. An automatic height adjustment method of an air floatation vibration isolator, characterized by, The method comprises the following steps: Obtaining target attitude data of the air floating platform, and obtaining current attitude data of the air floating platform based on sensor acquisition; Decomposing a plurality of target height data from the target attitude data, and decomposing a plurality of current height data from the current attitude data; wherein each target height data corresponds to each current height data one by one, and corresponds to an air floating vibration isolator (2) of the air floating platform one by one; Traversing each air floating vibration isolator (2), calculating height difference value data between the current height data and the target height data; If the height difference value data is greater than a preset reference difference value data, using a PID algorithm to calculate an internal pressure adjustment value of the current air floating vibration isolator (2) according to the height difference value data; Adjusting the internal pressure of the current air floating vibration isolator (2) according to the internal pressure adjustment value; Calculating a correction adjustment value according to the internal pressure adjustment value and a preset correction coefficient; Adjusting the internal pressure of the current air floating vibration isolator (2) according to the correction adjustment value; If the number of the air floating vibration isolators (2) changes, calculating the changed number of the air floating vibration isolators (2); Adjusting the correction coefficient according to the changed number, and the adjustment rule is as follows: The initial correction coefficient is 1.0, when the changed number is positive, that is, the number increases: the new correction coefficient = the current correction coefficient × [the initial number / (the initial number+the changed number)]; when the changed number is negative, that is, the number decreases: the new correction coefficient = the current correction coefficient × [the initial number / (the initial number+the changed number)]; Monitoring the fluctuation of the internal pressure adjustment value in a set time period, adjusting the length of the set time period according to the changed number, and the adjustment rule is as follows: the new set time period = the initial set time period + (the absolute value of the changed number × the adjustment coefficient).

2. The method of claim 1, wherein, The sensor is a laser sensor, and the air floating platform has at least three air floating vibration isolators (2).

3. The method of claim 1, wherein the method further comprises: The method further comprises the following steps: Calculating the fluctuation value of the internal pressure adjustment value in a preset set time period; If the fluctuation value is greater than a preset fluctuation reference value, inversely adjusting the correction coefficient according to the fluctuation value.

4. The method of claim 1, wherein the automatic height adjustment of the air floatation vibration isolator is performed by a controller. In the step of adjusting the internal pressure of the current air floating vibration isolator (2) according to the internal pressure adjustment value, the following sub-steps are further included: In the same adjustment period, obtaining the internal pressure adjustment value of the current air floating vibration isolator (2) as a first adjustment value; Obtaining the internal pressure adjustment value of an adjacent air floating vibration isolator (2) as a second adjustment value; Calculating the difference between the first adjustment value and the second adjustment value as an adjacent difference value; If the adjacent difference value is greater than a preset adjacent reference value, inversely adjusting the internal pressure adjustment value of the current air floating vibration isolator (2) according to the adjacent difference value.

5. The method of claim 1, wherein, In the step of adjusting the internal pressure of the current air floating vibration isolator (2) according to the internal pressure adjustment value, the following sub-steps are further included: In the same adjustment period, obtaining the internal pressure adjustment value of the current air floating vibration isolator (2) as a first adjustment value; Obtaining the internal pressure adjustment value of an adjacent air floating vibration isolator (2) as a second adjustment value; Obtaining the internal pressure adjustment value of another adjacent air floating vibration isolator (2) as a third adjustment value; calculating a difference between the first adjustment value and the second adjustment value as a first difference value; calculating a difference between the first adjustment value and the third adjustment value as a second difference value; calculating a sum of an absolute value of the first difference value and an absolute value of the second difference value as an absolute sum value; if the absolute sum value is greater than a preset sum value reference value, inversely adjusting the current inner pressure adjustment value of the air floating vibration isolator (2) according to the absolute sum value.

6. An automatic height adjustment device for an air floatation vibration isolator, characterized by comprising: The air floating vibration isolator comprises a processor, and the processor executes the steps of the automatic height adjustment method of the air floating vibration isolator according to any one of claims 1-5.

7. A storage medium, characterized by The storage medium stores a program, and the program is executed by the processor to implement the steps of the automatic height adjustment method of the air floating vibration isolator according to any one of claims 1-5.

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