Reduction furnace cylinder crack detection system and method based on machine vision

Abstract

The invention relates to the technical field of polycrystalline silicon production, in particular to a reduction furnace barrel crack detection system and method based on machine vision, the reduction furnace barrel crack detection system comprises a water mist spraying mechanism and a detection mechanism, the water mist spraying mechanism comprises a plurality of atomizing nozzles for spraying water mist to the inner wall of a furnace barrel body; the detection mechanism comprises a plurality of camera assemblies for carrying out image recording on cracks on the inner wall of the furnace barrel body after spraying; the detection mechanism further comprises a center rotating rod for driving the camera assembly to rotate along the inner wall of the furnace barrel body, the camera assembly comprises a furnace top detection camera and a plurality of furnace body detection cameras, and the furnace top detection camera is connected to the upper end of the center rotating rod through an inclined connecting rod; the plurality of furnace body detection cameras are vertically and uniformly connected to one side of the central rotating rod through a plurality of connecting plates; and a plurality of light sources are further arranged on the side, close to the camera assembly, of the center rotating rod.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of polycrystalline silicon production, and in particular to a reduction furnace cylinder crack detection system and method based on machine vision. BACKGROUND

[0002] The current production method of electronic-grade polycrystalline silicon is mainly the improved Siemens method, which produces polycrystalline silicon rods through chemical vapor deposition, and the core equipment is a reduction furnace. During long-term operation of the reduction furnace, small cracks will inevitably occur in the furnace cylinder, which need to be repaired in time to prevent the cracks from expanding and causing water leakage. Currently, artificial entry into the furnace cylinder is adopted to detect the cracks in the furnace cylinder by visual sampling inspection, which is easy to cause contamination of the furnace cylinder and has low efficiency and is prone to missing cracks.

[0003] In the existing patent with the patent number CN115619782B, a wellbore 360 panorama splicing detection system and method based on machine vision are disclosed, which includes moving the elevator along the inside of the wellbore by running the program; obtaining several wellbore images by shooting the inner wall of the wellbore at 360 degrees through multiple high-speed cameras, and each high-speed camera shoots once every set time value; horizontally splicing the wellbore images taken at the same time according to the feature points to obtain several horizontally spliced images, and vertically splicing the several horizontally spliced images according to the feature points to obtain a panoramic image, the inner wall of the wellbore is marked with several feature points, the feature points are uniformly distributed, and feature point horizontal and vertical values are set; and calculating the similarity between the panoramic image and the detection standard image, and generating an alarm signal when the similarity is less than the standard value.

[0004] In the above technical solution, several wellbore images are obtained by shooting the inner wall of the wellbore at 360 degrees through multiple high-speed cameras in order to timely investigate safety hazards, however, the cost of using multiple high-speed cameras for full-range shooting is too high, and if there are some small cracks on the inner wall of the cylinder that are not easy to observe, it is difficult to accurately and clearly detect these small cracks by shooting with the camera alone, resulting in inaccurate detection results.

[0005] Therefore, it is necessary to provide a reduction furnace cylinder crack detection system and method based on machine vision, which can achieve efficient and comprehensive crack detection. SUMMARY

[0006] The present application aims to provide a reduction furnace cylinder crack detection system and method based on machine vision to solve the problems raised in the background.

[0007] In order to solve the above technical problems, the present application provides the following technical solution: a reduction furnace cylinder crack detection system based on machine vision, which comprises a water mist spraying mechanism and a detection mechanism, The water mist spraying mechanism comprises a plurality of pairs of atomizing nozzles for spraying water mist on the inner wall of the furnace cylinder body; The detection mechanism comprises a plurality of pairs of camera assemblies for recording images of cracks on the inner wall of the furnace cylinder body after spraying. The detection mechanism further comprises a central rotating rod for driving the camera assemblies to rotate along the inner wall of the furnace cylinder body.

[0008] In one embodiment, the camera assemblies comprise a roof detection camera and a plurality of body detection cameras, the roof detection camera being connected to the upper end of the central rotating rod through an inclined connecting rod, and the plurality of body detection cameras being vertically and uniformly connected to one side of the central rotating rod through a plurality of connecting plates. The side of the central rotating rod close to the camera assemblies is further provided with a plurality of light sources.

[0009] In one embodiment, the roof detection camera and the plurality of body detection cameras are each provided with an explosion-proof cover outside.

[0010] In one embodiment, the water mist spraying mechanism further comprises a rotating shaft, and the plurality of atomizing nozzles are arranged on the rotating shaft and connected to the ultrapure water supply system.

[0011] In one embodiment, the lower end of the furnace cylinder body is provided with a limiting support mechanism for supporting the furnace cylinder body, and the lower end of the central rotating rod is provided with a rotating platform, which is arranged inside the limiting support mechanism.

[0012] In one embodiment, the rotating platform comprises a rotating disc and a fixed seat, the central rotating rod is fixed to the upper end of the rotating disc, a guide cover is slidingly fitted to the outer side of the rotating disc, the lower end of the guide cover is fixedly connected with a bottom plate, and the bottom plate is rotationally connected to the upper end of the fixed seat. The limiting support mechanism is fixed to the upper side of the fixed seat.

[0013] In one embodiment, guide grooves are formed in four sides of the guide cover, sliding blocks are slidingly fitted in the guide grooves, the sliding blocks are fixed to the four sides of the rotating disc, a through hole is formed in the upper end of the guide cover, a screw rod is rotationally connected to the upper end of the fixed seat, the screw rod penetrates the rotating disc and is threadedly connected thereto, and an accommodating vertical groove is formed in the central rotating rod.

[0014] In one embodiment, the atomizing nozzles are fixed to the other side of the central rotating rod through a hollow through rod.

[0015] Compared with the prior art, the present application has the beneficial effects that: the present application sprays water mist to the inner wall of the furnace cylinder body through the water mist spraying mechanism, if there is a crack in the inner wall, due to the capillary effect, the water mist will gather to form water droplets at the crack, producing the effect of convex lens, then when observed by the camera assembly, it is equivalent to magnifying the crack, making it more convenient to observe the crack, through the cooperation of the camera assembly and the above-mentioned convex lens effect, a high-quality, high-contrast image can be obtained, and this effect can be achieved only by spraying water, which is simple and convenient to operate and has low cost. BRIEF DESCRIPTION OF DRAWINGS

[0016] The technical solutions and other beneficial effects of the present application will become apparent through the following detailed description of specific embodiments of the present application in conjunction with the accompanying drawings.

[0017] In the drawings: Figure 1 is a schematic diagram of the overall structure of the present application; Figure 2 is a schematic diagram of the present application; Figure 3 is a schematic diagram of the present application; Figure 4 is a schematic diagram of the present application; In the drawings: 1, rotating platform; 101, rotating disc; 102, guide cover; 103, guide groove; 104, sliding block; 105, base plate; 106, screw; 107, gear one; 108, gear two; 2, central rotating rod; 3, furnace top detection camera; 301, furnace body detection camera; 302, inclined connecting rod; 303, connecting plate; 304, light source; 4, atomizing nozzle; 401, hollow through rod; 5, limiting support mechanism; 501, support table; 502, support rod; 6, furnace cylinder body; 7, fixed seat; 8, motor part one; 801, motor part two. DETAILED DESCRIPTION

[0018] The following disclosure provides many different embodiments, or examples, for implementing different structures of the present application. For the purpose of simplifying the present application, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeatedly refer to numbers and / or letters in different examples, and such repetition is for the purpose of simplification and clarity, which does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the present application provides examples of various specific processes and materials, but those of ordinary skill in the art can realize the application of other processes and / or the use of other materials.

[0019] Please refer to Figures 1-4 The present application provides a technical solution: a machine vision-based crack detection system and method for a reduction furnace cylinder, which comprises a water mist spraying mechanism and a detection mechanism, The water mist spraying mechanism comprises a plurality of atomizing nozzles 4 for spraying water mist on the inner wall of the furnace cylinder body 6; The detection mechanism comprises a plurality of camera assemblies for recording images of the inner wall of the furnace cylinder body 6 after spraying; The detection mechanism further comprises a central rotating rod 2 for driving the camera assemblies to rotate along the inner wall of the furnace cylinder body 6.

[0020] Preferably, the inner wall of the furnace cylinder body 6 is first uniformly sprayed with water mist by the plurality of atomizing nozzles 4 of the water mist spraying mechanism; after a certain period of time, the water mist converges to form water droplets with a convex lens effect at the cracks, while at the non-crack positions, the water droplets formed by the convergence of the water mist are not affected by the capillary effect and slide down the inner wall of the furnace cylinder body 6 due to gravity, thus conveniently screening out the corresponding cracks; then the staff hoists the furnace cylinder body 6 outside the central rotating rod 2, aligns the central axis of the furnace cylinder body 6 with the axis of the central rotating rod 2; the camera assemblies can be started and the central rotating rod 2 can be controlled to rotate, and the inner wall of the furnace cylinder body 6 can be recorded for 360 degrees of image, and transmitted to the detection platform, which can perform image stitching processing and tiled display; the cracks in the inner wall of the furnace cylinder body 6 can be detected by image recognition; Preferably, in order to further distinguish the cracks, in this embodiment, before the operation of the water mist spraying mechanism, that is, when the inner wall of the furnace cylinder body 6 is dry, the initial state image of the inner wall at this time is first recorded by taking a picture, then after the above-mentioned embodiment steps are processed, the image recording the condition of the inner wall of the furnace cylinder body 6 after spraying is obtained, and then compared and analyzed with the initial state image, so as to more conveniently detect and distinguish the existence and position of the cracks, and further improve the work efficiency; The present application sprays water mist to the inner wall of the furnace shell body 6 through a water mist spraying mechanism. If there are small cracks in the inner wall, due to capillary effect, the small cracks can generate sufficient capillary force to adhere liquid droplets, that is, the water mist will converge to form water droplets at the cracks. At this time, the presence of cracks can be determined by observing the liquid droplets adhered to the small cracks. Furthermore, the water droplets can form a convex lens effect at the small cracks. When the camera assembly is used for observation, the cracks are equivalent to being magnified, which is more convenient for observing the presence and position of the cracks. This effect can be achieved by simply spraying water, which is simple and convenient to operate and has low cost. It should be noted that the liquid droplets can interfere with the light, causing the light to refract or scatter, thereby failing to accurately show the specific shape of the small cracks, but this does not affect the determination of the presence of the small cracks by the liquid droplets adhered to the small cracks. It should be noted that when the above steps are performed, the temperature of the inner wall should be maintained at not less than the dew point of the environment to prevent wet air from condensing on the wall and affecting the shooting effect.

[0021] The camera assembly includes a furnace top detection camera 3 and a plurality of furnace body detection cameras 301. The furnace top detection camera 3 is connected to the upper end of the center rotating rod 2 through an inclined connecting rod 302. The plurality of furnace body detection cameras 301 are vertically and uniformly connected to one side of the center rotating rod 2 through a plurality of connecting plates 303. The side of the center rotating rod 2 close to the camera assembly is also provided with a plurality of light sources 304.

[0022] Preferably, the furnace body detection camera 301 is provided to take a 360-degree photo of the inner wall of the furnace body when the center rotating rod 2 rotates. Similarly, the furnace top detection camera 3 is provided to take a 360-degree photo of the furnace top, and the inclined connecting rod 302 and the connecting plate 303 are correspondingly provided to adjust the position of the camera assembly, thereby facilitating the determination of the position corresponding to the inner wall of the furnace shell body 6. Preferably, the furnace body detection camera 301 is vertically and uniformly provided with a plurality of groups along the center rotating rod 2 to completely cover the furnace body and improve the comprehensiveness of detection. Preferably, the detection platform is a prior art in the field, which is used to receive and process the photos taken by the furnace body detection camera 301 and the furnace top detection camera 3, and to perform splicing processing on the photos to be tiled and displayed.

[0023] Preferably, the light source 304 is also provided on one side of the center rotating rod 2, and the light source 304 is correspondingly provided with the furnace body detection camera 301. The light source 304 can provide supplementary light when the furnace body detection camera 301 takes a photo. Moreover, the convex lens formed by the liquid droplets at the cracks can also converge the light source 304. The two work together to help obtain high-quality and high-contrast images.

[0024] The furnace top detection camera 3 and the plurality of furnace body detection cameras 301 are both provided with explosion-proof covers.

[0025] Preferably, an explosion-proof cover is provided to prevent the explosion of components caused by harmful gases and improve safety.

[0026] The water mist spraying mechanism further comprises a rotating shaft, and a plurality of atomizing nozzles 4 are arranged on the rotating shaft, and the atomizing nozzles 4 are connected with the ultrapure water supply system.

[0027] Preferably, the atomizing nozzles 4 are connected with the ultrapure water supply system, the atomizing nozzles 4 atomize the ultrapure water, and when the rotating shaft rotates, the ultrapure water is atomized and sprayed on the inner wall of the furnace cylinder body 6.

[0028] The lower end of the furnace cylinder body 6 is provided with a plurality of limiting support mechanisms 5 for supporting the furnace cylinder body 6, and the lower end of the central rotating rod 2 is provided with a rotating platform 1, and the rotating platform 1 is arranged on the inner side of the limiting support mechanism 5.

[0029] Preferably, a plurality of limiting support mechanisms 5 are arranged to position and support the furnace cylinder body 6, the limiting support mechanism 5 comprises a support rod 502 and a support table 501 for stably supporting the furnace cylinder body 6, and a rotating platform 1 is arranged at the center to drive the central rotating rod 2 to rotate by 360 degrees.

[0030] The rotating platform 1 comprises a rotating disc 101 and a fixed seat 7, the central rotating rod 2 is fixed to the upper end of the rotating disc 101, a guide cover 102 is slidingly fitted to the outer side of the rotating disc 101, the lower end of the guide cover 102 is fixedly connected with a bottom disc 105, and the bottom disc 105 is rotationally connected to the upper end of the fixed seat 7. The limiting support mechanism 5 is fixed to the upper side of the fixed seat 7.

[0031] Optionally, in order to further improve the detection versatility and facilitate adaptive detection of furnace cylinder bodies 6 of various heights and sizes, the rotating disc 101 is arranged in a liftable manner, specifically, a linear driving mechanism is arranged to drive the rotating disc 101 to ascend and descend, thereby driving the central rotating rod 2 and the camera assembly to adjust the height position, improving the versatility; after the height position is adjusted, the rotating disc 101 is driven to rotate by the bottom disc 105 and the guide cover 102, thereby performing 360-degree inner wall crack detection. Optionally, a gear one 107 is fixedly connected to the lower end of the bottom disc 105 and meshes with a gear two 108, and the gear two 108 is driven to rotate by a motor member two 801. Preferably, the linear driving mechanism comprises but is not limited to a cylinder assembly, a hydraulic cylinder assembly or an electric telescopic rod member.

[0032] The four sides of the guide cover 102 are provided with guide grooves 103, and sliding blocks 104 are slidingly fitted in the guide grooves 103, the sliding blocks 104 are fixed to the four sides of the rotating disc 101, a through hole is formed in the upper end of the guide cover 102, a screw rod 106 is rotatably connected to the upper end of the fixed seat 7, the screw rod 106 penetrates the rotating disc 101 and is threadedly connected thereto, and an accommodating vertical groove is formed in the center rotating rod 2; The screw rod 106 penetrates the gear one 107 and the chassis 105 and is gap-fitted therebetween, without affecting the rotation of the gear one 107 and the chassis 105.

[0033] Optionally, when it is needed to drive the rotating disc 101 to ascend and descend, the screw rod 106 is driven to rotate by the motor one 8, the screw rod 106 is threadedly connected to the rotating disc 101, and under the guiding action of the sliding blocks 104 sliding along the guide grooves 103, the rotating disc 101 can be driven to ascend and descend along the guide cover 102, so as to adjust the height of the center rotating rod 2. Preferably, the accommodating vertical groove is formed in the center rotating rod 2, so as to accommodate the screw rod 106, further increase the range of the center rotating rod 2 that can ascend and descend, and avoid the overall equipment from being increased in height due to the use of other linear driving mechanisms.

[0034] The atomizing nozzle 4 is fixed to the other side of the center rotating rod 2 through the hollow through rod 401.

[0035] Optionally, in order to improve the overall detection convenience, the atomizing nozzle 4 is directly arranged on the upper side of the center rotating rod 2 and is arranged away from the side of the camera assembly, the atomizing nozzle 4 is started first to perform 360-degree spraying on the inner wall, then the camera assembly is started to perform 360-degree image recording, and the two share the same center rotating rod 2, which is high in practicability, improves the utilization rate of the assembly, and saves the time for transferring the furnace cylinder body 6 to the outer side of the center rotating rod 2 for detection after spraying, saves time and effort, and improves the work efficiency.

[0036] In the description of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connection" and "connection" should be understood in a broad sense, for example, can be fixedly connected, can be detachably connected, or integrally connected; can be mechanically connected, or electrically connected or can communicate with each other; can be directly connected, or the internal connection of two elements or the interaction relationship between two elements. For ordinary skilled in the art, the meaning of the above terms in the present application can be understood according to the specific circumstances.

[0037] The machine vision-based crack detection system and method for a reduction furnace cylinder provided by the embodiments of the present application are described in detail above, and the principles and implementation manners of the present application are described by using specific examples. The above description of the embodiments is only used to help understand the technical solutions of the present application and the core ideas thereof. Those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can still be modified, or some technical features thereof can be replaced equivalently, and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A machine vision-based reduction furnace cylinder crack detection system, comprising a water mist spraying mechanism and a detection mechanism, characterized in that: The water mist spraying mechanism includes several atomizing nozzles (4) that spray water mist onto the inner wall of the furnace body (6). The detection mechanism includes several camera components that record images of cracks in the inner wall of the furnace body (6) after spraying; The detection mechanism also includes a central rotating rod (2) that drives the camera assembly to rotate along the inner wall of the furnace body (6).

2. The machine vision-based reduction furnace cylinder crack detection system according to claim 1, characterized in that: The camera assembly includes a furnace top detection camera (3) and several furnace body detection cameras (301). The furnace top detection camera (3) is connected to the upper end of the central rotating rod (2) through an inclined connecting rod (302). The several furnace body detection cameras (301) are vertically and evenly connected to one side of the central rotating rod (2) through several connecting plates (303). Several light sources (304) are also provided on the side of the central rotating rod (2) near the camera assembly.

3. The machine vision-based reduction furnace cylinder crack detection system according to claim 2, characterized in that: The furnace top detection camera (3) and several furnace body detection cameras (301) are all equipped with explosion-proof covers.

4. The machine vision-based reduction furnace cylinder crack detection system according to claim 1, characterized in that: The water mist spraying mechanism also includes a rotating shaft, and a plurality of atomizing nozzles (4) are disposed on the rotating shaft. The atomizing nozzles (4) are connected to the ultrapure water supply system.

5. The machine vision-based reduction furnace cylinder crack detection system according to claim 1 or 2, characterized in that: The lower end of the furnace body (6) is provided with several limiting support mechanisms (5) to support it, and the lower end of the central rotating rod (2) is provided with a rotating platform (1), which is located inside the limiting support mechanism (5).

6. The machine vision-based reduction furnace cylinder crack detection system according to claim 5, characterized in that: The rotary platform (1) includes a rotary disk (101) and a fixed base (7). The central rotating rod (2) is fixed to the upper end of the rotary disk (101). A guide cover (102) is slidably fitted on the outer side of the rotary disk (101). A chassis (105) is fixedly connected to the lower end of the guide cover (102). The chassis (105) is rotatably connected to the upper end of the fixed base (7). The limiting support mechanism (5) is fixed to the upper side of the fixed base (7).

7. The machine vision-based reduction furnace cylinder crack detection system according to claim 6, characterized in that: The guide cover (102) has guide grooves (103) on its four sides. A slider (104) is slidably fitted in the guide groove (103). The slider (104) is fixed to the four sides of the rotary table (101). A through hole is opened at the upper end of the guide cover (102). A screw (106) is rotatably connected to the upper end of the fixed seat (7). The screw (106) passes through the rotary table (101) and is threadedly connected to it. An adaptive vertical groove is opened inside the central rotating rod (2).

8. The machine vision-based reduction furnace cylinder crack detection system according to claim 1 or 2, characterized in that: The atomizing nozzle (4) is fixed to the other side of the central rotating rod (2) by a hollow through rod (401).

9. The detection method of the reduction furnace cylinder crack detection system based on machine vision according to claim 1, characterized in that... Includes the following steps: S1. Water mist is evenly sprayed onto the inner wall of the furnace body (6) through several atomizing nozzles (4) of the water mist spraying mechanism; S2. After standing, the water mist gathers at the cracks to form water droplets with a convex lens effect, while in the area without cracks, the water droplets formed by the water mist will slide down the inner wall of the furnace body (6) due to gravity. S3. Hang the furnace body (6) on the outside of the central rotating rod (2) so that the central axis of the furnace body (6) is aligned with the axis of the central rotating rod (2); S4. Start the camera assembly and control the central rotating rod (2) to rotate, record 360-degree images of the inner wall of the furnace body (6), and transmit them to the detection platform. The detection platform stitches the images and displays them flat. S5. Cracks in the inner wall of the furnace body (6) are detected by image recognition.

10. The detection method of the reduction furnace cylinder crack detection system based on machine vision according to claim 9, characterized in that: Before spraying water mist, take pictures of the dry inner wall of the furnace cylinder body (6) to obtain an initial state image; compare and analyze the image after spraying with the initial state image to detect the existence and location of cracks.

Images