Testing device

Abstract

The invention provides a testing device which comprises an objective table and a pressing block, the objective table is provided with a first groove, a second groove and a vacuum adsorption hole, the first groove and the second groove are communicated with each other, the vacuum adsorption hole is communicated with the first groove, the first groove is used for containing a to-be-tested piece, and the vacuum adsorption hole is used for being communicated with a vacuum system. The pressing block is connected with the objective table, the pressing block is arranged above the second groove, a limiting space is formed by the pressing block and the second groove, and the limiting space is used for limiting the test connecting piece connected with the to-be-tested piece. On the basis, the testing device can firmly limit and fix the to-be-tested piece and the testing connecting piece through vacuum adsorption limiting and pressing block physical limiting, the to-be-tested piece and the testing connecting piece are not prone to displacement in the testing process, connection and electric connection of the to-be-tested piece and the testing connecting piece are more stable, and the testing precision and the testing efficiency are greatly improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chip testing, in particular to a testing device. BACKGROUND

[0002] In the process of manufacturing semiconductor chips, the manufactured chips need to be tested. The chips to be tested are placed on a test platform of a testing device for testing.

[0003] The testing device of the related art uses a clamping structure to fix the chips, which is likely to damage the chips. Moreover, during movement and vibration of the platform, the chips are likely to deviate, which is likely to affect the connection and electrical connection stability of the chips and the testing device, thereby the testing precision and testing efficiency of the testing device are poor. SUMMARY

[0004] The present application aims to provide a testing device with better testing precision and testing efficiency.

[0005] To solve the above problems, the present application provides a testing device, comprising:

[0006] a carrier platform, provided with a first groove and a second groove in communication with each other, and a vacuum adsorption hole in communication with the first groove, the first groove being used for accommodating a test piece, and the vacuum adsorption hole being used for connecting a vacuum system; and

[0007] a pressing block connected with the carrier platform, the pressing block being arranged above the second groove and forming a limiting space with the second groove, the limiting space being used for limiting a test connecting piece connected with the test piece.

[0008] Optionally, the carrier platform is further provided with a third groove, the third groove being used for accommodating the test piece together with the first groove; wherein,

[0009] the third groove is arranged between the first groove and the second groove and is in communication with the first groove and the second groove respectively, and the groove depth of the third groove is greater than the groove depths of the first groove and the second groove.

[0010] Optionally, the bottom wall of the third groove is smoothly and transitionally connected with the bottom walls of the first groove and the second groove.

[0011] Optionally, the pressing block comprises a body portion and a protruding portion connected with and protruding from the body portion, the body portion being connected with the carrier platform, and at least a part of the protruding portion being accommodated in the second groove and forming the limiting space with the second groove.

[0012] Optionally, the object table is further provided with an extension groove, the extension groove is communicated with the first groove, and part of the groove wall of the extension groove protrudes from the groove wall of the first groove in the width direction of the first groove.

[0013] Optionally, the extension groove is arranged on the side of the vacuum adsorption hole away from the second groove in the length direction of the first groove.

[0014] Optionally, the test device further comprises:

[0015] a driving platform for carrying a driving board, the driving board is used for being connected with the test connector and testing the object to be tested through the test connector.

[0016] Optionally, the test device further comprises:

[0017] a carrying table for carrying the object table and being connected with the object table, and the carrying table is further used for being connected with a test table.

[0018] Optionally, the test device further comprises:

[0019] a connector connected with the driving platform and used for being connected with the test table, so that the driving platform, the test table and the object table can move synchronously.

[0020] Optionally, the test device further comprises a probe module, the object to be tested is provided with a plurality of test points, and the probe module is used for being connected with at least part of the test points.

[0021] Based on the above technical scheme, the object table of the test device comprises the first groove and the second groove in communication, the first groove is provided with the vacuum adsorption hole communicated with the vacuum system, when the object to be tested is placed in the first groove, the object to be tested can be fixed by vacuum adsorption; meanwhile, the pressing block is arranged above the second groove and forms the limiting space with the second groove, when the test connector connected with the object to be tested is placed in the second groove, the test connector can be fixed by the pressing block and the limiting space. Therefore, the test device can firmly fix the object to be tested and the test connector by vacuum adsorption limiting and pressing block physical limiting, the object to be tested and the test connector are not easy to move in the testing process, the connection and electrical connection of the object to be tested and the test connector are more stable, and the testing precision and efficiency are greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical scheme in the application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0023] For a more complete understanding of the present application and its advantages, reference is now made to the following description taken in conjunction with the accompanying drawings in which like parts are marked with like numerals throughout the drawings.

[0024] Figure 1 A structural schematic view of a test device provided by an embodiment of the present application;

[0025] Figure 2 A structural schematic view of a test device provided by an embodiment of the present application;

[0026] Figure 3 A structural schematic view of a test device provided by an embodiment of the present application;

[0027] Figure 4 A structural schematic view of a test device provided by an embodiment of the present application;

[0028] Figure 5 A structural schematic view of a test device provided by an embodiment of the present application;

[0029] Figure 6 A structural schematic view of a test device provided by an embodiment of the present application;

[0030] The reference signs represent:

[0031] 10, test device; 20, test piece; 21, first part; 22, second part; 23, third part; 24, first connecting terminal; 25, second connecting terminal; 100, test table; 200, pressing block; 300, test connecting piece; 400, bearing table; 500, test table; 600, driving platform; 700, driving plate; 800, connecting piece; 900, probe module; 110, first recess; 120, second recess; 130, third recess; 140, vacuum adsorption hole; 150, transition connecting structure; 160, expansion groove; 210, body part; 220, protruding part; 230, first mounting hole; 410, second mounting hole; 610, third mounting hole; 910, probe part; 920, driving part; 930, bearing part. DETAILED DESCRIPTION

[0032] The accompanying drawings, which are incorporated herein and form part of the specification, illustrate embodiments of the present application and, together with the description, further serve to explain the principles of the application and the Figure 1 to the drawings Figure 6 and embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative effort should belong to the protection scope of the present application.

[0033] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive of one another. As will be apparent to those of ordinary skill in the art, embodiments described herein can be combined with other embodiments.

[0034] In the field of chip testing, especially in the field of optical flux probe testing of optoelectronic chips, the fixing stability of the to-be-tested piece on the test platform and the contact reliability of the flexible printed circuit (FPC) extension line between the to-be-tested piece and the test drive board are the core factors restricting the testing accuracy and efficiency. The test scheme of the related technology has the following defects: 1. The to-be-tested piece is fixed by using a traditional mechanical clamping scheme, which is easy to damage the to-be-tested piece; the to-be-tested piece is easy to deviate when subjected to vibration, which affects the testing accuracy; the to-be-tested piece is difficult to take and place, which increases the testing time and reduces the testing efficiency. 2. The surface of the flexible printed circuit and the test platform is uneven, and the extension line of the flexible printed circuit is easy to be raised, thereby causing poor contact between the test probe and the to-be-tested piece and causing testing errors. 3. The wiring of the test drive board is messy, which is not easy to connect with the to-be-tested piece, affecting the smoothness of the test process and the testing efficiency.

[0035] In view of the above technical problems, the application provides a test device integrating vacuum adsorption, FPC embedding and pressing, and drive board modularization fixing, which can be applied to optical flux testing of optoelectronic devices. The test device can stably fix the to-be-tested piece and the FPC extension line, avoid testing contact deviation, and improve testing accuracy and efficiency. The scheme of the application is described in detail below.

[0036] Please refer to Figure 1 and Figure 2 , Figure 1 a structural schematic diagram of a test device 10 provided by an embodiment of the application, Figure 2 a structural schematic diagram of a test platform 100 provided by an embodiment of the application. The test device 10 comprises the test platform 100 and a pressing block 200. The test platform 100 is provided with a first recess 110 and a second recess 120 which are in communication with each other, and the first recess 110 is used for accommodating the to-be-tested piece 20. The test platform 100 is also provided with a vacuum adsorption hole 140 for communicating with a vacuum system, and the vacuum adsorption hole 140 is in communication with the first recess 110. The pressing block 200 is connected with the test platform 100, and the pressing block 200 is arranged above the second recess 120 and forms a limiting space with the second recess 120, and the limiting space is used for limiting a test connecting piece 300 connected with the to-be-tested piece 20.

[0037] It can be understood that the carrier 100 is used to carry the to-be-tested member 20. In some examples, the carrier 100 can be but is not limited to a round table structure, a square table structure, etc. In some examples, the carrier 100 can be but is not limited to a stainless steel structure, a ceramic structure, a quartz glass, etc. When the carrier 100 is a 304 stainless steel carrier, the carrier 100 has corrosion resistance, high strength performance (tensile strength ≥ 500 MPa), and can adapt to complex test environments (such as high and low temperature, humidity ≤ 80%). The carrier 100 includes a surface and a bottom surface oppositely arranged along the thickness direction thereof, and the first groove 110 and the second groove 120 can be recessed from the surface in the direction toward the bottom surface. The groove depth of the first groove 110 and the second groove 120 is less than the thickness dimension of the carrier 100, so that the first groove 110 and the second groove 120 do not penetrate the carrier 100.

[0038] It can be understood that the first groove 110 and the second groove 120 can be but are not limited to a long strip shape, a circular shape, a square shape, a polygonal shape, or an irregular shape. The first groove 110 and the second groove 120 have the same or different groove depths. In some examples, the length directions of the first groove 110 and the second groove 120 are the same and the first groove 110 and the second groove 120 are connected and form a straight line groove; or the length directions of the first groove 110 and the second groove 120 are different, and the first groove 110 and the second groove 120 are connected and form a broken line groove, an arc line groove, etc. The first groove 110 is used to accommodate the to-be-tested member 20, and the second groove 120 is used to accommodate a test connecting member 300. The to-be-tested member 20 can be but is not limited to a display chip, such as a Micro-LED chip, a Mini-LED chip, etc. The test connecting member 300 is connected with the to-be-tested member 20 and a driving board 700 described below, respectively, so that the driving board 700 can test the to-be-tested member 20.

[0039] It can be understood that the test connecting member 300 can be but is not limited to a connecting line of a flexible circuit board. In some examples, after the test connecting member 300 is accommodated in the second groove 120, one end of the test connecting member 300 is connected with the driving board 700, and the connection state of the test connecting member 300 and the driving board 700 can remain unchanged. Then, the other end of the test connecting member 300 can be connected with the to-be-tested member 20 accommodated in the first groove 110, and the to-be-tested member 20 is tested. Subsequently, the connection between the other end of the test connecting member 300 and the to-be-tested member 20 can be disconnected, and another to-be-tested member 20 is connected with the test connecting member 300 again and is tested again until all the to-be-tested members 20 are tested. Of course, in other examples, the connection states of the test connecting member 300 and the to-be-tested member 20, the driving board 700 can also be disconnected at the same time, and another to-be-tested member 20 is replaced and connected again.

[0040] It can be understood that one end of the vacuum adsorption hole 140 is open at the bottom wall of the first groove 110, and the other end of the vacuum adsorption hole 140 is open at the bottom surface of the object table 100, so that the vacuum adsorption hole 140 penetrates the object table 100 along the thickness direction of the object table 100. In some examples, the length direction of the vacuum adsorption hole 140 is parallel or intersected with the thickness direction of the object table 100, or the length direction of the vacuum adsorption hole 140 is a curved direction or a bent direction. The vacuum adsorption hole 140 is used to communicate with a vacuum system, and when the test piece 20 is placed in the first groove 110 and covers the vacuum adsorption hole 140, the test piece 20 is firmly adsorbed and fixed in the first groove 110 under the action of the vacuum negative pressure of the vacuum system.

[0041] It can be understood that in some examples, the hole diameter of the vacuum adsorption hole 140 is small to avoid generating excessive vacuum adsorption force to damage the test piece 20, for example, the hole diameter of the vacuum adsorption hole 140 is about 1.3 to 2.0 millimeters. In some examples, the vacuum system is used to provide a factory low pressure vacuum, which can provide a negative pressure of -70 to -80 Pa to adsorb and fix the test piece 20. The vacuum system can include but is not limited to a vacuum pump, a vacuum pipeline and the like, one end of the vacuum pipeline communicates with the vacuum pump, and the other end can communicate with the vacuum adsorption hole 140, or the other end of the vacuum pipeline extends into the vacuum adsorption hole 140. In some examples, the test device 10 includes the vacuum system; in other examples, the vacuum system is a structure independent of the test device 10.

[0042] It can be understood that the pressing block 200 is arranged on the side of the second groove 120 away from the bottom surface of the object table 100, and the pressing block 200 is arranged above the second groove 120 and covers at least part of the second groove 120. The pressing block 200 and the bottom wall of the second groove 120 form a limiting space, and the test connecting piece 300 connected with the test piece 20 can be arranged in the limiting space and be limited thereby. The test connecting piece 300 is limited and fixed in the limiting space and is not easy to be tilted or displaced, which greatly improves the connection firmness of the test connecting piece 300 and the test piece 20. It can be understood that in some examples, the pressing block 200 is completely above the second groove 120. In other examples, part of the pressing block 200 is above the second groove 120, and the other part can be accommodated in the second groove 120, and at this time, the pressing block 200 limits and fixes the test connecting piece 300 more firmly.

[0043] It can be understood that the pressing block 200 can be but is not limited to a long strip structure, a square structure, a circular structure or other shape structures. The pressing block 200 can be arranged along the length direction of the second groove 120, or can extend in a direction intersecting the length direction of the second groove 120, for example, the extending direction of the pressing block 200 is perpendicular to the length direction of the second groove 120. In some examples, the pressing block 200 can be but is not limited to a polytetrafluoroethylene pressing block structure, which has self-lubricating performance (friction coefficient ≤ 0.1) and insulation performance (dielectric constant ≤ 2.1), and can avoid crushing the test connecting piece 300 and short circuiting with the test connecting piece 300, so that the pressing block 200 of the embodiment of the present application can better protect the surface of the test connecting piece 300. Of course, the pressing block 200 can also be other structures, for example but not limited to ceramic structure, plastic structure, rubber structure, etc. Among them, in some examples, the pressing block 200 can be but is not limited to connected with the object table 100 by screw connection, rivet connection, welding, bonding, clamping, magnetic attraction connection, etc.

[0044] The object table 100 of the test device 10 of the embodiment of the present application comprises a first groove 110 and a second groove 120 connected in communication, the first groove 110 is provided with a vacuum adsorption hole 140 connected with a vacuum system, when the test piece 20 is placed in the first groove 110, the test piece 20 can be fixed by vacuum adsorption; at the same time, the pressing block 200 is arranged above the second groove 120 and forms a limiting space with the second groove 120, when the test connecting piece 300 connected with the test piece 20 is placed in the second groove 120, it can be fixed by the pressing block 200 and the limiting space. Therefore, the test device 10 of the present application can firmly fix the test piece 20 and the test connecting piece 300 by vacuum adsorption fixation and physical limiting fixation of the pressing block 200, and the two are not easy to move during the test, the connection and electrical connection of the two are more stable, which greatly improves the test precision and test efficiency.

[0045] It should be noted that the test piece 20 of the embodiment of the present application can be physically connected with the test connecting piece 300, at this time, the test device 10 can test the connection stability and firmness of the two. The test piece 20 can also be physically connected with the test connecting piece 300 and at the same time realize electrical connection, the test device 10 can test the connection stability and firmness of the two, and can also perform full series scanning measurement of various optical parameters (such as luminous flux test) and electrical parameters of the test piece 20. Among them, the luminous flux test refers to measuring the light energy emitted by a light source such as the test piece 20 per unit time, usually in units of lumens (lm). Common test methods include the integrating sphere method, the photometer method and the spectral analyzer method. The integrating sphere method uniformly distributes the light emitted by the light source such as the test piece 20 after multiple reflections in a spherical cavity with an inner surface uniformly coated with high reflectivity material, thereby accurately measuring the luminous flux, and the test device 10 of the present application can be placed in the spherical cavity for luminous flux test.

[0046] Wherein, please continue to refer to Figure 1 and Figure 2 In some examples, the object table 100 is further provided with a third groove 130 for jointly accommodating the test piece 20 with the first groove 110. The third groove 130 is arranged between the first groove 110 and the second groove 120 and communicates with the first groove 110 and the second groove 120 respectively. In some examples, the groove depth of the third groove 130 is greater than the groove depths of the first groove 110 and the second groove 120.

[0047] It can be understood that the third groove 130 is formed by the surface of the object table 100 being recessed in the direction towards the bottom surface thereof. The third groove 130 and the first groove 110 jointly form a groove structure that is adapted to the shape and size of the test piece 20 to accommodate the test piece 20. In some examples, the first groove 110, the third groove 130 and the second groove 120 sequentially communicate and extend in the same direction and form an elongated groove structure. In other examples, at least one of the three grooves can extend in a direction different from the other grooves.

[0048] It can be understood that, as shown in Figure 3 and Figure 4 , Figure 3 are different structural schematic diagrams of the test piece 20 in different directions provided by the embodiments of the present application, Figure 4 is a connection schematic diagram of the test piece 20 and the test connector 300 provided by the embodiments of the present application. Figure 3 Fig. (a), Fig. (b) and Fig. (c) are schematic diagrams of the test piece 20 in different directions, respectively. The test piece 20 includes a first part 21, a second part 22 and a third part 23. The first part 21 and the second part 22 are accommodated in the first groove 110, and the third part 23 is accommodated in the third groove 130. When the test piece 20 is a test chip, the first part 21 can be a chip structure, and the second part 22 and the third part 23 can be an integrated structure and jointly form a driving structure of the driving chip structure. The third part 23 is connected with the test connector 300, so that the first part 21, the second part 22, the third part 23 and the test connector 300 are sequentially connected and electrically connected.

[0049] It can be understood that, as shown in Figure 3 , the first part 21 of the chip structure and the second part 22 of the driving structure are connected and electrically connected through the first connection terminal 24 (for example, a chip pad). For example, a part of the second part 22 is overlaid on the first part 21, so that a part of the first connection terminal 24 on the second part 22 is correspondingly welded with a part of the first connection terminal 24 on the first part 21. At this time, the bottom surface of the first part 21 is not flush with the bottom surface of the second part 22.

[0050] It can be understood that, as shown in Figure 1 and Figure 3 The third part 23 is provided with a second connecting terminal 25 (such as a connecting socket, a connecting plug) for realizing the electrical connection between the third part 23 and the test connecting piece 300. The second connecting terminal 25 is arranged on the bottom surface of the third part 23, and the test connecting piece 300 is inserted from the bottom of the third part 23 and connected to and electrically connected with the second connecting terminal 25. The second connecting terminal 25 protrudes from the bottom surface of the third part 23, so that the second connecting terminal 25 is not flush with the bottom surface of the second part 22. Thus, under the action of the first connecting terminal 24 and the second connecting terminal 25, the back surface of the to-be-tested piece 20 forms a concave-convex structure, and since the second connecting terminal 25 needs to be connected to the test connecting piece 300, the height of the second connecting terminal 25 is higher, and the second connecting terminal 25 protrudes more from the back surface of the first part 21 and the second part 22.

[0051] It can be understood that, if the groove depth of the third groove 130 is the same as that of the other two grooves, when the to-be-tested piece 20 is placed in the grooves, the first part 21 and at least part of the second part 22 (including all or part of the second part 22) are arranged in the first groove 110, and the third part 23 is placed in the third groove 130. The second connecting terminal 25 with a higher height is in contact with the bottom wall of the third groove 130 and causes the first part 21 and the second part 22 to be raised and have a spacing from the bottom wall of the first groove 110. On the one hand, the center of gravity of the entire to-be-tested piece 20 is unstable, and it is easy to be displaced during the test, which can cause poor contact and unstable connection between the to-be-tested piece 20 and the test module, thereby causing test errors. On the other hand, when the second connecting terminal 25 is connected to and disconnected from the test connecting piece 300, the entire to-be-tested piece 20 is easy to sink towards the direction of the first groove 110 and be in contact with the bottom wall of the first groove 110. At this time, the connection between the second part 22 and the first part 21 is easy to be broken and damaged.

[0052] The third groove 130 has a groove depth greater than that of the first groove 110, and the bottom walls of the first groove 110 and the third groove 130 can form a concave-convex structure matching the to-be-tested member 20. When the to-be-tested member 20 is placed in the first groove 110 and the third groove 130, the second connecting terminal 25 is accommodated in the third groove 130, and at this time, the first part 21 of the to-be-tested member 20 can be in close contact with the bottom wall of the first groove 110. Thus, the second connecting terminal 25 of the to-be-tested member 20 is in close contact with the bottom wall of the third groove 130, the first part 21 is in close contact with the bottom wall of the first groove 110, the center of gravity of the to-be-tested member 20 is more stable, and the to-be-tested member 20 is less likely to deviate or shift. Moreover, under the action of the pressing block 200, the components of the to-be-tested member 20 and the to-be-tested member 20 and the test connecting member 300 are less likely to be warped or have poor contact, thereby further improving the testing accuracy and efficiency of the testing device 10.

[0053] In some examples, the groove depth of the first groove 110 is also less than that of the second groove 120. For example, the groove depth of the first groove 110 is about 0.7 mm, the groove depth of the third groove 130 can be about 1.7 mm, and the groove depth of the second groove 120 is about 1.5 mm. In the length direction of the to-be-tested member 20, the two end edges of the second connecting terminal 25 are not flush with the edge of the third part 23, and the test connecting member 300 needs to be inserted from below the edge of the third part 23 and connected with the second connecting terminal 25, which makes the third groove 130 need a larger space to accommodate the test connecting member 300. Therefore, the groove depth of the second groove 120 of the present application is greater than that of the first groove 110, which can further improve the stability of the to-be-tested member 20 and the test connecting member 300 after connection.

[0054] In some examples, the first surface of the object table 100 can be pre-formed with a groove structure equal to the groove depth of the first groove 110, and then the third groove 130 and the second groove 120 can be formed in the corresponding areas by milling pits according to the sizes of the second connecting terminal 25 and the test connecting member 300. Of course, the first groove 110, the second groove 120, and the third groove 130 can also be formed by other means.

[0055] In some examples, the bottom wall of the third groove 130 is smoothly connected with the bottom wall of the first groove 110. The so-called smooth transition connection means that the bottom wall of the third groove 130 is connected with the bottom wall of the first groove 110 through a transition connection structure 150, such as a bevel transition structure or a curved surface transition structure, so that the height difference between the bottom wall of the third groove 130 and the bottom wall of the first groove 110 gradually decreases.

[0056] It can be understood that the transition connection structure 150 between the third groove 130 and the first groove 110 can be matched with the end of the second connection terminal 25 close to the second part 22, the transition connection structure 150 can fill the spacing area between the connection of the second part 22 and the third part 23 of the to-be-tested member 20 and the end of the second connection terminal 25, and can avoid the damage of the second part 22 and the third part 23 due to the unbalanced force, thereby, the scheme of the present application further improves the stability of the to-be-tested member 20 placed in the groove.

[0057] It can be understood that in some examples, the end of the transition connection structure 150, such as the inclined surface structure or the curved surface structure, connected with the bottom wall of the third groove 130 and the bottom wall of the first groove 110 can be transitionally connected through a rounded corner structure, which can further improve the stability of the to-be-tested member 20 accommodated in the groove.

[0058] It can be understood that in some examples, the bottom wall of the third groove 130 and the bottom wall of the second groove 120 can also be smoothly transitionally connected through the transition connection structure 150 such as the inclined surface transition structure or the curved surface transition structure. In some examples, the end of the bottom wall of the third groove 130, the bottom wall of the first groove 110 and the inclined surface transition structure or the curved surface transition structure can also be transitionally connected through a rounded corner structure. Thus, the transition connection structure 150 between the bottom wall of the third groove 130 and the second groove 120 of the present application can be adapted to the end of the second connection terminal 25 close to the test connection member 300, the transition connection structure 150 can fill the spacing area between the connection of the third part 23 and the test connection member 300 and the second connection terminal 25, and can avoid the damage of the to-be-tested member 20 due to the unbalanced force at the connection of the third part 23 and the test connection member 300, thereby further improving the stability of the to-be-tested member 20 accommodated in the groove.

[0059] The present application embodiment is provided with a smooth transition structure at the connection of the first groove 110 and the third groove 130 and the connection of the second groove 120 and the third groove 130, which can avoid the damage of the to-be-tested member 20 due to the unbalanced force, and the scheme of the present application greatly improves the stability of the to-be-tested member 20 accommodated in the groove.

[0060] In some examples, please refer to Figure 1 and please refer to Figure 5 , Figure 5 A structural schematic diagram of the pressing block 200 provided by the present application embodiment is shown. The pressing block 200 includes a body part 210 and a protruding part 220 connected to the body part 210 and protruding from the body part 210, the body part 210 is connected with the object table 100, and at least a part of the protruding part 220 is accommodated in the second groove 120 and forms a limiting space with the second groove 120.

[0061] It can be understood that the body part 210 includes a first surface and a second surface oppositely arranged along the thickness direction thereof, the second surface is arranged on the side of the first surface away from the second groove 120, the protruding part 220 is connected to the first surface and protrudes from the first surface in the direction of the second groove 120, when the test connector 300 is located in the second groove 120, the protruding part 220 can be in contact with the test connector 300 and apply a proper downward pressure on the test connector 300.

[0062] It can be understood that the protruding part 220 can be arranged in the central region of the length direction of the body part 210, at this time, the protruding part can be in a symmetrical structure with respect to the second groove 120, and the protruding part can better fix and limit the test connector 300 accommodated in the second groove 120. In some examples, the body part 210 can be in a long strip structure, two first mounting holes 230 can be arranged at the two ends of the body part 210, two screw holes can be arranged on the stage 100 on the two sides of the second groove 120, and the pressing block 200 can be connected to the stage 100 through screws, the first mounting holes 230 and the screw holes. In some examples, the edges of the body part 210 and the protruding part 220 are designed to be rounded to avoid damage to the test connector 300.

[0063] The pressing block 200 of the present application includes a body part 210 and a protruding part 220, at least a part of the protruding part 220 is accommodated in the second groove 120, the protruding part 220 can more firmly limit the test connector 300, the pressing block 200 can press the test connector 300 to prevent it from being warped or shaken, and the test stability is improved.

[0064] Among them, please refer again to Figure 1 and Figure 2 In some examples, the stage 100 is further provided with an expansion groove 160, the expansion groove 160 is in communication with the first groove 110, and in the width direction of the first groove 110, part of the groove wall of the expansion groove 160 protrudes from the groove wall of the first groove 110.

[0065] It can be understood that the width direction of the first groove 110 is perpendicular to the length direction of the first groove 110. In the width direction of the first groove 110, the expansion groove 160 protrudes from the first groove 110. Or, the maximum distance between the expansion groove 160 and the central axis of the first groove 110 (an axis extending along the length direction of the first groove 110 and located in the middle of the bottom wall of the first groove 110) is greater than the maximum distance between the first groove 110 and the central axis.

[0066] It can be understood that the expansion groove 160 can be but is not limited to a circular groove, a square groove or a groove structure of other shapes. In some examples, the stage 100 can be provided with one or more (two or more) expansion grooves 160. In some examples, the plurality of expansion grooves 160 can be uniformly distributed with respect to the first groove 110.

[0067] The extension groove 160 of the embodiment of the present application makes the first groove 110 have extra space, so that a user can use a tool such as tweezers to extend into the first groove 110 from the extension groove 160 and clamp and take the DUT 20, which is convenient for the user to operate and reduces the time for taking and placing the DUT 20.

[0068] In some examples, the extension groove 160 is arranged on the side of the vacuum adsorption hole 140 away from the second groove 120 in the length direction of the first groove 110. The extension groove 160 can be arranged at the end of the first groove 110. Since the top end of the DUT 20 is less likely to be damaged than the side edge and can withstand greater force, the embodiment of the present application arranges the extension groove 160 at the end of the first groove 110, which can reduce the probability of damaging the DUT 20 when the user takes and places the DUT 20.

[0069] It can be understood that, as Figure 1 and Figure 2 the embodiment of the present application can symmetrically arrange two circular extension grooves 160 at the end of the first groove 110, and the two circular extension grooves 160 make the user conveniently take and place the product in different directions, which improves the operation efficiency.

[0070] The embodiment of the present application arranges the extension groove 160 at the end of the first groove 110, so that the user can extend the tweezers into the first groove 110 from the end to clamp the DUT 20, which can avoid damaging the DUT 20 and ensure the test accuracy.

[0071] In some embodiments, please refer to Figure 1 , Figure 2 and Figure 6 , Figure 6 another structural schematic view of the test device 10 provided by the embodiment of the present application, the test device 10 further includes a bearing table 400. The bearing table 400 is used to bear and connect with the object table 100, and is further used to connect with a test table 500.

[0072] It can be understood that, in some examples, the bearing table 400 is a cylindrical structure, a rectangular plate structure, etc., and the object table 100 is connected to the surface of the bearing table 400 and protrudes from the bearing table 400. In other examples, the bearing table 400 can be a table structure formed with a containing space, and at this time, the object table 100 is arranged in the containing space and connected with the bearing table 400. For example, the bearing table 400 includes a bottom wall and an annular side wall arranged around the edge of the bottom wall and protruding from the bottom wall, and the bottom wall and the annular side wall jointly form a containing space, and the object table 100 can be arranged in the containing space and connected with the bottom wall, and at the same time, the object table 100 is arranged in a spaced manner with the annular side wall, so that an annular area is formed between the object table 100 and the annular side wall.

[0073] It can be understood that the carrier table 100 protrudes from the bearing table 400, and the user can more conveniently operate the structures such as the to-be-tested member 20 and the test connecting member 300 carried by the carrier table 100. In some examples, the carrier table 100 and the bearing table 400 are connected by screw connection, rivet connection, welding, bonding, clamping, magnetic attraction connection, etc. Of course, in other examples, the carrier table 100 and the bearing table 400 are integrally connected.

[0074] It can be understood that the bearing table 400 is also used to be connected with the test table 500. The test table 500 is used to carry the bearing table 400 and the carrier table 100 of the present application. In some examples, the area of the bottom wall of the bearing table 400 that is not covered by the carrier table 100 can be provided with one or more second mounting holes 410, and the bearing table 400 is connected with the test table 500 through the cooperation of the screw or the pin and the second mounting hole 410. In some examples, the bottom wall of the bearing table 400 can be provided with three second mounting holes 410 which are uniformly distributed around the carrier table 100. Of course, the bearing table 400 can also be connected with the test table 500 by welding, bonding, clamping, magnetic attraction connection, etc., but the present application does not limit this.

[0075] It can be understood that the bearing table 400 can be but is not limited to a stainless steel structure, a ceramic structure, a quartz glass, etc. The bearing table 400 can be made of the same material as the carrier table 100, or the two can be made of different materials. For example, the carrier table 100 and the bearing table 400 are both made of 304 stainless steel.

[0076] The test device 10 of the present application comprises the bearing table 400 and the carrier table 100, the carrier table 100 is connected with the bearing table 400, and the bearing table 400 is connected with the test table 500, so that the carrier table 100 does not need to be directly connected with the test table 500, and the carrier table 100 is not easy to be damaged due to the connection with the test table 500, thereby improving the service life of the carrier table 100.

[0077] In some examples, the test device 10 of the present application can comprise the test table 500, or the test table 500 is a structure independent of the test device 10. Since different to-be-tested members 20 need to be adapted to different carrier tables 100, and one test device 10 or test equipment can often perform multiple tests on multiple to-be-tested members 20. The carrier table 100 and the test table 500 of the present application are independent of each other, when the to-be-tested member 20 is replaced and the test type is changed, the present application can unload the carrier table 100 from the test table 500, and install a new carrier table 100 and a corresponding to-be-tested member 20, thereby greatly improving the compatibility of the test device 10 or test equipment, and the test device 10 of the present application can realize multiple different types of tests.

[0078] In some examples, as shown in FIG. 2, the test device 10 of the present application can comprise a test table 500, and the test table 500 is used to carry the carrier table 100 of the present application.Figure 6 As shown, the test device 10 of the embodiment of the present application further comprises a driving platform 600. The driving platform 600 is used to carry a driving board 700, the driving board 700 is used to be connected with the test connector 300 and is used to test the test piece 20 through the test connector 300.

[0079] It can be understood that the driving platform 600 can be but is not limited to a rectangular plate structure. The driving platform 600 can be but is not limited to a hard aluminum material, which is treated by anodic oxidation and blackening, and has good wear resistance and insulation performance. The driving board 700 is fixedly installed on the driving platform 600, the driving platform 600 can carry and integrate the driving board 700 and the related connection circuit structure, and can realize the modular wiring of the driving board 700 and the test connection.

[0080] It can be understood that the driving board 700 is provided with a test circuit, the driving board 700 is electrically connected with the test piece 20 through the test connector 300, and the driving board 700 can test and control the test piece 20. In some examples, the driving platform 600 is provided with a plurality of third mounting holes 610, the driving board 700 is provided with a hole matched with a mounting member (such as a screw or a pin), the mounting member passes through the hole and is inserted into the third mounting hole 610 to realize the fixed connection of the driving platform 600 and the driving board 700. In some examples, the third mounting hole 610 can be a long strip hole structure, which is more convenient for adjusting the position of the driving board 700. Of course, the driving board 700 can also be connected with the driving board 700 through other bonding, clamping, magnetic attraction and the like.

[0081] The driving board 700 of the embodiment of the present application is modularly fixed through the driving platform 600, can optimize the wiring and test connection of the driving board 700 and the test piece 20, and reduces the test failure probability. At the same time, the driving platform 600 adopts a blackened hard aluminum platform, which has the characteristics of light weight (density is about 2.7 g / cm 3 ), wear resistance (hardness ≥ 150 HV), and strength and electrical compatibility.

[0082] In some examples, the test device 10 further comprises a connector 800, which is connected with the driving platform 600 and the test bench 500 respectively, so that the driving platform 600, the test bench 500 and the object carrier 100 can move synchronously.

[0083] It can be understood that the connector 800 can be but is not limited to an L-shaped structure, a Z-shaped structure and the like. For example, the long arm of the L-shaped structure is connected with the side wall of the driving platform 600, and the short arm of the L-shaped structure is connected with the bottom surface or the connecting part of the test bench 500, so that the driving platform 600 and the test bench 500 are connected as a whole.

[0084] It can be understood that the test device 10 comprises one or more connectors 800, and the plurality of connectors 800 can increase the connection firmness and stability of the driving platform 600 and the test bench 500.

[0085] The driving platform 600 of the embodiment of the application is connected with the test bench 500 through the connector 800, the driving platform 600 can move synchronously with the test bench 500 and the object table 100, and the loosening of the connection between the test connector 300 and the driving board 700 when the test bench 500 moves and the driving platform 600 does not move can be avoided, and the scheme of the application can ensure the connection firmness of the driving board 700 and the test connector 300.

[0086] In some examples, as shown in FIG. 1, the test device 10 further comprises a probe module 900, and the to-be-tested member 20 comprises a plurality of test points, and the probe module 900 is used to connect with at least part of the test points. The probe module 900 is in contact with the test points of the to-be-tested member 20 and is used to realize the signal connection and collection of the to-be-tested member 20. Figure 6

[0087] It can be understood that the probe module 900 is connected and electrically connected with the test points of the to-be-tested member 20 and the driving board 700 respectively. When the probe module 900 is connected and electrically connected with the corresponding test points, the driving board 700 can test the test points. In some examples, the connection line between the probe module 900 and the driving board 700 can be routed from above the object table 100 and the pressing block 200, and under the isolation of the pressing block 200, the connection line is not easy to contact the to-be-tested member 20, and the influence on the to-be-tested member 20 can be avoided.

[0088] It can be understood that in some examples, when the to-be-tested member 20 is a to-be-tested chip, the probe module 900 can accurately contact the pads of the to-be-tested chip, and support the chip performance detection. In some examples, the probe module 900 comprises a probe component 910, a driving component 920 and a bearing component 930, the probe component 910 is connected with the to-be-tested chip, the bearing component 930 is arranged between the bearing table 400 and the test bench 500 and can move with the test bench 500, and the driving component 920 can drive the probe component 910 to move relative to the object table 100, so that the probe component 910 is connected and electrically connected with different test points of the to-be-tested member 20.

[0089] The probe module 900 of the embodiment of the application can be connected with different test points of the to-be-tested member 20 and tested, and the user does not need to manually connect the test points of the to-be-tested member 20, and the probe module 900 improves the test efficiency.

[0090] Based on the above test device 10, the test device 10 of the embodiment of the application can first assemble and debug the structures such as the pressing block 200 and the vacuum system before formal testing. Specifically: ​

[0091] 1. Fix the pressure block 200 to the stage 100 with screws, and control the torque of the screws to about 0.5-1 N·m; test the fitting degree between the protrusion of the pressure block 200 and the third groove 130, so that the gap between the protrusion and the test piece 20 is less than or equal to 0.05 mm, and ensure that the pressing force of the protrusion on the test piece 20 is evenly distributed.

[0092] 2. Connect the control test device 10 to the vacuum system (e.g., the factory vacuum pipeline), start the vacuum system, and check that the negative pressure of the vacuum adsorption hole 140 is between -70 and -80 Pa. At the same time, the pressure drop after holding the pressure for 30 minutes is less than or equal to 5 Pa. Place the simulated product to verify the adsorption stability. For example, when a horizontal thrust of greater than or equal to 5 N is applied to the simulated product, the simulated product does not slip.

[0093] 3. Secure the drive board 700 to the drive platform 600 with screws, ensuring the connection torque is between 0.8 and 1.2 N·m. Connect the drive board 700 to the test connector 300. Then, check the neatness of the wiring on the drive board 700 (wire spacing ≥ 2 mm) and the reliability of the electrical connections (100% pass rate for continuity tests). This completes the pre-test assembly and debugging.

[0094] After completing the pre-test state and debugging, the testing device 10 of this application embodiment needs to perform formal testing operations, specifically:

[0095] 1. The user uses tweezers to grip the test piece 20 through the expansion slot 160 and places it in the first groove 110 and the third groove 130, ensuring that the vacuum adsorption hole 140 is aligned with the test piece 20, thus completing the product loading. The connector of the test connector 300 is inserted into the third groove 130 and connected to the test piece 20. The other parts of the test connector 300 are placed straight into the second groove 120. The pressure block 200 is installed and the screws are tightened, thus completing the loading of the test connector 300. The drive board 700 is fixed on the drive platform 600 and connected to the test connector 300, completing the loading and electrical connection of the drive board 700.

[0096] 2. Drive the vacuum system and confirm that the product is firmly adsorbed through visual inspection or pressure feedback; adjust the probe position by aligning the probe position with the test point of the test piece 20 and the connection between the test connector 300 and other structures through the microscopic system.

[0097] 3. Start the probe test program, collect test parameters such as light flux data, and monitor parameters such as contact resistance and signal fluctuations to complete the test execution steps.

[0098] 4. Turn off the vacuum system, disconnect the test piece 20 from the test connector 300, and take out the test piece 20 through the expansion groove 160 when there is no residual adsorption force, thereby realizing the blanking operation. At this time, another test piece 20 can be taken out to repeat the above-mentioned components for testing, until all test pieces 20 are tested, then loosen the pressing block 200, remove the test connector 300, and clean the surface of the loading table, ready for the next test cycle.

[0099] The test device 10 of the embodiment of the application can realize the "zero offset" fixation of the test piece 20 through vacuum suction and release, the recess limit of the third groove 130 and the recess of the pressing block 200, and the auxiliary grabbing of the expansion groove 160, and can adapt to test pieces 20 of various product sizes. The test connector 300 can eliminate the problems of warping and poor contact under the action of recess embedding and pressing by the pressing block 200. The driving plate 700 is modularly fixed on the driving platform 600, the wiring is standardized, the failure probability is reduced by 60%, and the test connection efficiency is improved. Moreover, the design of the expansion groove 160 of the application shortens the test piece 20 taking and placing time by about 5 seconds, the vacuum adsorption and the fixation of the pressing block 200 make the test piece 20 unnecessary to be repeatedly debugged, the single test cycle time is shortened by about 30 seconds, and the overall operation efficiency is improved by about 25%. Moreover, the application basically eliminates the problems of test piece 20 offset and poor contact of each component, the light flux data error is less than or equal to 1%, and the high-precision test demand is met. The scheme of the application takes into account the test efficiency and test precision.

[0100] It should be noted that the "multiple" mentioned in the application generally refers to two or more. Moreover, the directional terms mentioned in the embodiment of the application, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "side" and the like, are only the directions of the attached drawings. Therefore, the directional terms are used to illustrate and understand the embodiment of the application, and not to limit the embodiment of the application. In each drawing, similar units are denoted by the same reference numerals. For the sake of clarity, each part in the drawing is not drawn to scale. In addition, some related parts may not be shown in the drawing.

[0101] It should be understood that in the description of the application, terms such as "first", "second" and the like are only used to distinguish similar objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features.

[0102] It can be understood that those skilled in the art can combine various embodiments in the above embodiments under the guidance of the above embodiments to obtain technical solutions of various embodiments. The above description is only the preferred embodiment of the application and is not intended to limit the application. Any modification, equivalent replacement and improvement made within the spirit and principle of the application shall be included in the protection scope of the application.

[0103] The above describes the testing device provided by the present application in detail. The principles and implementation manners of the present application are described by applying specific examples in the present text, and the above description of the examples is only for helping to understand the present application. Meanwhile, according to the ideas of the present application, the specific implementation manners and application ranges will be changed by the skilled in the art, and the above description of the present specification should not be understood as the limitation of the present application.

Claims

1. A testing device, characterized in that, include: The stage has a first groove and a second groove that are interconnected, and a vacuum adsorption hole that communicates with the first groove. The first groove is used to accommodate the test piece, and the vacuum adsorption hole is used to connect to a vacuum system. A pressure block is connected to the stage. The pressure block is positioned above the second groove and forms a limiting space with the second groove. The limiting space is used to limit the test connector connected to the test piece.

2. The testing apparatus according to claim 1, characterized in that, The stage is further provided with a third groove, which, together with the first groove, accommodates the part to be tested; wherein... The third groove is disposed between the first groove and the second groove and communicates with the first groove and the second groove respectively. The groove depth of the third groove is greater than the groove depth of the first groove and the second groove.

3. The testing apparatus according to claim 2, characterized in that, The bottom wall of the third groove is smoothly connected to the bottom walls of the first groove and the second groove.

4. The testing apparatus according to claim 1, characterized in that, The pressure block includes a body portion and a protrusion portion connected to and protruding from the body portion. The body portion is connected to the platform. At least a portion of the protrusion portion is accommodated in the second groove and forms the limiting space with the second groove.

5. The testing apparatus according to claim 1, characterized in that, The platform is also provided with an expansion slot, which is connected to the first groove. In the width direction of the first groove, part of the groove wall of the expansion slot protrudes from the groove wall of the first groove.

6. The testing apparatus according to claim 5, characterized in that, Along the length of the first groove, the expansion groove is located on the side of the vacuum adsorption hole opposite to the second groove.

7. The testing apparatus according to any one of claims 1 to 6, characterized in that, The testing apparatus also includes: A drive platform is used to support a drive board, which is used to connect to the test connector and to test the device under test through the test connector.

8. The testing apparatus according to claim 7, characterized in that, The testing apparatus also includes: A support platform is used to support and connect to the loading platform, and the support platform is also used to connect to a test platform.

9. The testing apparatus according to claim 8, characterized in that, The testing apparatus also includes: A connector is provided, which is connected to the drive platform and is used to connect to the test bench, so that the drive platform, the test bench, and the stage can move synchronously.

10. The testing apparatus according to any one of claims 1 to 6, characterized in that, The testing device further includes a probe module, and the test piece is provided with multiple test points. The probe module is used to connect to at least some of the test points.

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