A vertical exposure machine

Abstract

The present application relates to the technical field of exposure machine, provide a kind of vertical exposure machine, it includes: machine body, machine body is equipped with vertical exposure part and frame part, exposure part is used for the exposure of workpiece, frame part is used for the placement of workpiece;Feeding mechanism and discharging mechanism are respectively arranged in the both sides of frame part, when frame part is located in feeding and discharging position, discharging mechanism removes the workpiece that exposure is completed in frame part from one side, feeding mechanism removes the workpiece that is not exposed to vertical frame part from the other side;Fixed frame includes the first setting position and second setting position of vertical height higher than frame part, the feeding mechanism is arranged in the first setting position, and the discharging mechanism is arranged in the second setting position.The present application uses double mechanical arms to carry out workpiece installation and exposure workpiece disassembly to be exposed synchronously, improves work efficiency, and the feeding mechanism and discharging mechanism of the present application are all invertedly arranged, save setting space, improve feeding and discharging efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of exposure machines, in particular to a vertical exposure machine. BACKGROUND

[0002] Exposure machines play an important role in the production of semiconductors and PCBs. Using this technology can shorten the process flow and reduce production costs. The current vertical exposure machine mostly uses artificial loading and unloading of a single workpiece, which increases the loading and unloading time and thus affects the overall exposure efficiency, and the manual operation increases the operation burden of the operator. Another type uses mechanical loading and unloading, but mostly uses a single mechanical arm to realize the installation of the workpiece to be exposed and the disassembly of the exposed workpiece, and the replacement efficiency is not high.

[0003] Moreover, in the prior art, the workpieces are uniformly placed outside, and need to be manually moved from the outside to the frame part for exposure, which is low in exposure efficiency. SUMMARY

[0004] In view of the deficiencies of the prior art that affect efficiency, the purpose of the present application is to provide a vertical exposure machine that improves efficiency.

[0005] To solve the above problems, the present application provides the following technical solutions:

[0006] The present application provides a vertical exposure machine, comprising: a machine body, a vertical exposure part and a frame part are provided on the machine body, the exposure part is used for exposure of a workpiece, and the frame part is used for placement of the workpiece;

[0007] A loading mechanism and an unloading mechanism are respectively arranged on both sides of the frame part, when the frame part is at a loading and unloading position, the unloading mechanism removes the exposed workpiece from one side of the frame part, and the loading mechanism moves the unexposed workpiece to the vertical frame part from the other side;

[0008] A fixing frame is arranged on the machine body, the fixing frame comprises a first setting position and a second setting position, the vertical height of the first setting position is higher than that of the frame part, the loading mechanism is arranged at the first setting position, and the unloading mechanism is arranged at the second setting position;

[0009] A loading platform is arranged on the machine body, the loading platform is used for placing the unexposed workpiece, and the loading mechanism is used for grabbing the unexposed workpiece on the loading platform and moving it to the vertical frame part;

[0010] The loading platform further comprises a loading device, the loading device is used for storing a plurality of workpieces and can push the workpieces to a grabbing position one by one when the loading mechanism grabs the workpieces;

[0011] The loading platform further comprises a separation mechanism, the separation mechanism is used for separating the workpiece at the grabbing position from the workpiece below.

[0012] The application has the beneficial effects that: the application adopts double mechanical arms to synchronously install the workpiece to be exposed and dismount the workpiece after exposure, improves the work efficiency, and through the setting of the fixing frame, the feeding mechanism and the discharging mechanism are both invertedly arranged, the feeding platform and the discharging platform and the corresponding feeding mechanism and discharging mechanism can be located at the same vertical position, which saves the setting space on one hand and makes the feeding and discharging mechanism need to move the shortest distance when taking and placing the workpiece, improving the taking and placing efficiency.

[0013] The application also sets the feeding device and the separating mechanism, the feeding device can store multiple workpieces at a time and push them to the grabbing position one by one, and the separating mechanism separates the workpiece at the grabbing position from the rest of the workpieces, preventing the feeding mechanism from mistakenly grabbing the workpiece or causing damage such as abrasion and bending to other workpieces when grabbing. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a perspective view of the application;

[0015] Figure 2 It is a perspective view of the body of the vertical exposure machine of the application;

[0016] Figure 3 It is a perspective view of the fixing frame and the feeding mechanism and the discharging mechanism of the application;

[0017] Figure 4 It is a perspective view of the feeding mechanism and the discharging mechanism of the application;

[0018] Figure 5 It is a schematic view of the feeding mechanism and the discharging mechanism of the application;

[0019] Figure 6 It is a perspective view of the feeding platform and the discharging platform of the application;

[0020] Figure 7 It is a perspective view of the feeding device and the separating mechanism of the application;

[0021] Figure 8 It is an exploded view of the feeding device and the separating mechanism of the application.

[0022] REFERENCE NUMERALS:

[0023] 1. vertical exposure machine;

[0024] 10. body; 20. feeding platform; 30. discharging platform; 40. fixing frame; 50. feeding mechanism; 60. discharging mechanism; 70. positioning assembly; 80. feeding device; 90. separating mechanism;

[0025] 11. exposure part; 12. frame part; 121. frame main body; 122. clamping mechanism; 123. flattening mechanism;

[0026] a1, a roller;

[0027] 41, a first setting bit; 42, a second setting bit;

[0028] 51, a first driving mechanism; 52, a first grabbing assembly; 52a, a first supporting piece; 52b, a first grabbing piece;

[0029] 61, a second driving mechanism; 62, a second grabbing assembly; 62a, a second supporting piece; 62b, a second grabbing piece;

[0030] 71, a contact sensor;

[0031] 81, a box body; 82, a lifting device; 821, a first telescopic piece; 822, a bearing piece; 823, a tray; 83, a second telescopic piece;

[0032] 91, a pushing mechanism; 911, a pushing piece; 912, a first elastic piece; 913, a counter pushing assembly; 13a, a first driving rod; 13b, a driving wheel; 13c, a second driving rod; 92, a first lifting assembly; 93, a second lifting assembly; 931, a lifting piece; 932, a second elastic piece; 933, a driving assembly; 33a, a third driving rod; 33b, a third elastic piece; 33c, a driving groove. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0034] In addition, the terms "first", "second" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise explicitly and specifically limited.

[0035] To facilitate the description of the first direction, the second direction and the third direction in the embodiments of the present application, the first direction is the left-right direction in the drawings, the second direction is the front-rear direction in the drawings, and the third direction is the up-down direction in the drawings. Among them, the x-axis arrow direction is as "right" direction in the following text, the y-axis arrow direction is as "up" direction in the following text, and the z-axis arrow direction is as "back" direction in the following text, which is not limited in the actual application of the present application.

[0036] As Figures 1-5 shown, the embodiment provides a vertical exposure machine 1, which comprises a machine body 10, a feeding mechanism 50, a discharging mechanism 60, and a fixing frame 40. The machine body 10 is provided with a vertical exposure part 11 and a frame part 12. The exposure part 11 is used for the exposure of a workpiece, and the frame part 12 is used for the placement of the workpiece. The feeding mechanism 50 and the discharging mechanism 60 are respectively arranged on the two sides of the frame part 12. When the frame part 12 is located at the feeding and discharging positions, the discharging mechanism 60 takes out the workpiece exposed in the frame part 12 from one side, and the feeding mechanism 50 moves the unexposed workpiece to the vertical frame part 12 from the other side. The fixing frame 40 comprises a first setting position 41 and a second setting position 42, the vertical height of which is higher than that of the frame part 12. The feeding mechanism 50 is arranged at the first setting position 41, and the discharging mechanism 60 is arranged at the second setting position 42. When the workpiece needs to be placed in the frame part 12 or taken out of the frame part 12, the feeding mechanism 50 grabs the workpiece to be exposed which is placed horizontally, and at the same time, the discharging mechanism 60 grabs the exposed workpiece in the frame part 12. Then, the feeding mechanism 50 moves to the frame part 12, and at the same time, the discharging mechanism 60 moves the workpiece out of the frame part 12. The feeding and discharging mechanisms 50 and 60 take and place the workpiece alternately, thereby improving the feeding and discharging speed.

[0037] As Figure 2 shown, optionally, the frame part 12 comprises a frame main body 121 and a clamping mechanism 122. The clamping mechanism 122 clamps one end of the workpiece, so as to fix the workpiece on the frame main body 121. The clamping mechanism 122 can ensure the stable fixation of the workpiece on the frame main body 121.

[0038] As Figure 2 shown, optionally, the frame part 12 further comprises a flattening mechanism 123. The flattening mechanism 123 clamps the other end of the workpiece, stretches the workpiece, and flattens the workpiece fixed on the frame main body 121, so as to improve the flatness of the workpiece. Through the design of the flattening mechanism 123, the workpiece can be flattened after being clamped and fixed, so as to ensure that the exposure precision is not affected by the bending during the exposure.

[0039] As Figure 1 , Figure 3 shown, optionally, the vertical exposure machine 1 further comprises a feeding platform 20 and a discharging platform 30. The feeding platform 20 is used for placing the unexposed workpiece. The feeding mechanism 50 is used for grabbing the unexposed workpiece on the feeding platform 20 and moving it to the vertical frame part 12. The discharging platform 30 is used for placing the exposed workpiece. The discharging mechanism 60 is used for taking out the exposed workpiece from the frame part 12 and placing it on the discharging platform 30. Through the arrangement of the feeding platform 20 and the discharging platform 30, the feeding and discharging mechanisms 50 and 60 can be more convenient to use.

[0040] AsFigure 1 、 Figure 3 As shown in FIG. 1, optionally, the feeding platform 20 is located below the feeding mechanism 50, and the discharging platform 30 is located below the discharging mechanism 60. By vertically corresponding arrangement of the feeding platform 20 and the discharging platform 30 with the feeding mechanism 50 and the discharging mechanism 60, the workpiece can be conveniently taken and placed, the efficiency of replacing the workpiece is accelerated, and the setting space is saved.

[0041] As shown in FIG. 1, optionally, the feeding platform 20 and the discharging platform 30 are each provided with a roller a1, and the workpiece can be moved to the corresponding position of the feeding platform 20 and the discharging platform 30 through the roller a1. The position of the workpiece is changed, and the abrasion of the workpiece during movement is reduced. Figure 3 As shown in FIG. 1, optionally, the feeding platform 20 and the discharging platform 30 are each provided with a roller a1, and the workpiece can be moved to the corresponding position of the feeding platform 20 and the discharging platform 30 through the roller a1. The position of the workpiece is changed, and the abrasion of the workpiece during movement is reduced.

[0042] Figure 3 As shown in FIG. 1, optionally, the positioning assembly 70 is further included; the positioning assembly 70 is used for positioning the workpiece placed on the feeding platform 20; after the workpiece is placed on the feeding platform 20, the workpiece is placed at the corresponding placement position under the action of the positioning assembly 70. By using the setting of the positioning assembly 70, the workpiece can be stably placed at the corresponding position after being moved to the feeding platform 20, the position accuracy when the feeding mechanism 50 picks up the workpiece is ensured, and then the accuracy of the position installed on the frame part 12 is ensured.

[0043] As shown in FIG. 1, optionally, the positioning assembly 70 includes a plurality of contact sensors 71, and the contact sensors are arranged on the feeding platform 20; when the workpiece is moved to contact with the plurality of contact sensors 71, the workpiece stops moving. By setting the plurality of contact sensors 71, the plurality of positions of the workpiece can be identified, and the occurrence of placement deviation of the workpiece is reduced. Figure 3 As shown in FIG. 1, optionally, the feeding mechanism 50 includes a first driving mechanism 51 and a first grabbing assembly 52; the first driving mechanism 51 is connected to the first setting position 41 and the first grabbing assembly 52, and the first driving mechanism 51 is used for driving the first grabbing assembly 52 to move; the first grabbing assembly 52 is used for grabbing and releasing the workpiece. After being driven by the first driving mechanism 51, the first grabbing assembly 52 can realize reciprocating movement between the feeding platform 20 and the frame part 12, and the workpiece can be stably moved to the corresponding position.

[0044] Figure 1 As shown in FIG. 1, optionally, the first driving mechanism 51 is a multi-axis mechanical arm. By using the multi-axis mechanical arm, the workpiece can be translated and rotated, so that the workpiece placed on the feeding platform 20 is upright after being moved to the frame part 12, and the normal installation of the workpiece on the frame part 12 is ensured. Figures 3-5 As shown in FIG. 1, optionally, the first driving mechanism 51 is a multi-axis mechanical arm. By using the multi-axis mechanical arm, the workpiece can be translated and rotated, so that the workpiece placed on the feeding platform 20 is upright after being moved to the frame part 12, and the normal installation of the workpiece on the frame part 12 is ensured.

[0045] As shown in FIG. 1, optionally, the first driving mechanism 51 is a multi-axis mechanical arm. By using the multi-axis mechanical arm, the workpiece can be translated and rotated, so that the workpiece placed on the feeding platform 20 is upright after being moved to the frame part 12, and the normal installation of the workpiece on the frame part 12 is ensured.

[0046] ​​In one possible embodiment, the feeding mechanism 50 grabs the unexposed workpiece horizontally placed in the feeding platform 20, then the multi-axis robot moves the workpiece upward to the position corresponding to the frame part, then the multi-axis robot rotates the workpiece by 90 degrees so that the workpiece is perpendicular to the surface of the machine body, and finally the multi-axis robot translates the workpiece into the frame part 12 perpendicular to the surface of the machine body for installation.

[0047] Optionally, the optional mechanical arm is one of three-axis, five-axis, etc.

[0048] As shown in Figures 3-5 , optionally, the first grabbing assembly 52 includes a first support 52a and two groups of first grabbing pieces 52b; the first support 52a is installed on the first driving mechanism 51; the two groups of first grabbing pieces 52b are arranged on both sides of the first support 52a; and the two groups of first grabbing pieces 52b grab the opposite sides of the workpiece respectively. By grabbing the opposite sides of the workpiece through the two groups of first grabbing pieces 52b, it can be ensured that the workpiece will not be damaged after being grabbed by one side, and at the same time it can also be ensured that the flexible workpiece will not be bent due to one-sided clawing, which makes it difficult to be installed with the frame part 12.

[0049] As shown in Figures 3-5 , optionally, the discharging mechanism 60 includes a second driving mechanism 61 and a second grabbing assembly 62; the second driving mechanism 61 is connected to the second setting position 42 and the second grabbing assembly 62, and the second driving mechanism 61 is used to drive the second grabbing assembly 62 to move; and the second grabbing assembly 62 is used to grab and release the workpiece. After being driven by the second driving mechanism 61, the second grabbing assembly 62 can move back and forth between the frame part 12 and the discharging platform 30, so as to ensure that the workpiece moves stably to the corresponding position.

[0050] Optionally, the second driving mechanism 61 is a multi-axis robot. By using the multi-axis robot, the workpiece standing on the frame part 12 can be moved to the discharging platform 30, so as to ensure that the workpiece is normally taken down.

[0051] Optionally, the optional mechanical arm is one of three-axis, five-axis, etc.

[0052] Optionally, the second grabbing assembly 62 includes a second support 62a and two groups of second grabbing pieces 62b; the second support 62a is installed on the second driving mechanism 61; the two groups of second grabbing pieces 62b are arranged on both sides of the second support 62a; and the two groups of second grabbing pieces 62b grab the opposite sides of the workpiece respectively. By grabbing the opposite sides of the workpiece through the two groups of second grabbing pieces 62b, it can be ensured that the workpiece will not be damaged after being grabbed by one side, and at the same time it can also be ensured that the flexible workpiece will not be bent due to one-sided clawing, which makes it difficult to be placed flat on the discharging platform 30.

[0053] As shown in Figures 6-8As shown, the feeding platform 20 further comprises a feeding device 80, which is used to store a plurality of workpieces and push the workpieces to the grabbing position of the feeding mechanism one by one, so that the feeding efficiency is improved.

[0054] As shown in Figures 6-8 As shown, the feeding device 80 comprises an open-top box 81 and a lifting device 82, the box 81 is installed on the fixed frame 40, and the lifting device 82 is used to push the workpiece to be taken out in the box 81 upward, so as to ensure the stability of the grabbing position of the first grabbing assembly 52.

[0055] As shown in Figures 6-8 As shown, the lifting device 82 comprises a first telescopic piece 821, a bearing piece 822 and a tray 823; the bearing piece 822 is installed on the first telescopic piece 821, the tray 823 is detachably installed on the bearing piece 822, and the tray 823 is used to place the workpiece; when it is needed to push the workpiece upward, the first telescopic piece 821 moves the workpiece upward by the thickness of the workpiece through the tray 823, so that the workpiece can be moved to the grabbing position of the first grabbing assembly 52 every time.

[0056] Optionally, the top of the bearing piece 822 is provided with a magnet (not shown in the figure), and the bottom of the tray 823 is provided with a magnet; when the tray 823 is placed on the bearing piece 822, the tray 823 and the bearing piece 822 will not easily separate.

[0057] Optionally, the top of the bearing piece 822 is provided with a groove, and the bottom of the tray 823 is provided with a protrusion; when the tray 823 is placed on the bearing piece 822, the protrusion is placed in the groove, and the tray 823 and the bearing piece 822 will not easily separate.

[0058] As shown in Figures 7-8 As shown, the opposite two side plates of the box 81 can move towards or away from the box 81, and the distance between the two side plates can be adjusted according to the size of the workpiece; so that workpieces of different sizes can be placed.

[0059] Optionally, the outside of the opposite two side plates of the box 81 is provided with a second telescopic piece 83, the second telescopic piece 83 is fixed with the side plate of the corresponding side, the distance between the two side plates is adjusted by adjusting the length of the second telescopic piece 83, and then workpieces of different sizes can be exposed.

[0060] Optionally, the first telescopic piece 821 and the second telescopic piece 83 are both electric telescopic rods.

[0061] As shown in Figures 6-8As shown, optionally, the separating mechanism 90 is arranged to separate the workpiece to be grabbed from the lower workpiece, so that the first grabbing assembly 52 can grab the workpiece without grabbing multiple workpieces due to the stacking of the workpieces, and the first grabbing assembly 52 can be inserted between the two workpieces for grabbing.

[0062] As shown, the separating mechanism 90 includes a pushing mechanism 91 and a first lifting assembly 92, which are arranged on the upper side of the two side plates of the box body 81, respectively. The pushing mechanism 91 can push the workpiece to be grabbed towards the first lifting assembly 92, and the first lifting assembly 92 can separate the workpiece from the adjacent workpiece, so that the first grabbing assembly 52 can grab the workpiece. Figures 7-8 As shown, the pushing mechanism 91 includes a pushing piece 911, a first elastic piece 912, and a counter-pushing assembly 913. The first elastic piece 912 can push the pushing piece 911 towards the workpiece, so that the workpiece moves towards the first lifting assembly 92. The counter-pushing assembly 913 can drive the pushing piece 911 to move away from the workpiece, so that the next workpiece to be grabbed can be pushed.

[0063] Figures 7-8 As shown, the counter-pushing assembly 913 includes a first driving rod 13a, a driving wheel 13b, and a second driving rod 13c. The second driving rod 13c is installed on the pushing piece 911, and the first driving rod 13a is arranged vertically. The first driving rod 13a and the second driving rod 13c are engaged with the driving wheel 13b. The first driving rod 13a can drive the second driving rod 13c to move the pushing piece 911 away from the first lifting assembly 92 through the driving wheel 13b. When the first grabbing assembly 52 is grabbing the workpiece, the first support 52a can drive the first driving rod 13a to move the pushing piece 911 away from the first lifting assembly 92, so that the adjacent workpiece can be pushed by the pushing piece 911 towards the first lifting assembly 92 again after the workpiece is grabbed.

[0064] As shown, the counter-pushing assembly 913 includes a first driving rod 13a, a driving wheel 13b, and a second driving rod 13c. The second driving rod 13c is installed on the pushing piece 911, and the first driving rod 13a is arranged vertically. The first driving rod 13a and the second driving rod 13c are engaged with the driving wheel 13b. The first driving rod 13a can drive the second driving rod 13c to move the pushing piece 911 away from the first lifting assembly 92 through the driving wheel 13b. When the first grabbing assembly 52 is grabbing the workpiece, the first support 52a can drive the first driving rod 13a to move the pushing piece 911 away from the first lifting assembly 92, so that the adjacent workpiece can be pushed by the pushing piece 911 towards the first lifting assembly 92 again after the workpiece is grabbed. Figures 7-8 As shown, the counter-pushing assembly 913 includes a first driving rod 13a, a driving wheel 13b, and a second driving rod 13c. The second driving rod 13c is installed on the pushing piece 911, and the first driving rod 13a is arranged vertically. The first driving rod 13a and the second driving rod 13c are engaged with the driving wheel 13b. The first driving rod 13a can drive the second driving rod 13c to move the pushing piece 911 away from the first lifting assembly 92 through the driving wheel 13b. When the first grabbing assembly 52 is grabbing the workpiece, the first support 52a can drive the first driving rod 13a to move the pushing piece 911 away from the first lifting assembly 92, so that the adjacent workpiece can be pushed by the pushing piece 911 towards the first lifting assembly 92 again after the workpiece is grabbed.

[0065] As shown, the counter-pushing assembly 913 includes a first driving rod 13a, a driving wheel 13b, and a second driving rod 13c. The second driving rod 13c is installed on the pushing piece 911, and the first driving rod 13a is arranged vertically. The first driving rod 13a and the second driving rod 13c are engaged with the driving wheel 13b. The first driving rod 13a can drive the second driving rod 13c to move the pushing piece 911 away from the first lifting assembly 92 through the driving wheel 13b. When the first grabbing assembly 52 is grabbing the workpiece, the first support 52a can drive the first driving rod 13a to move the pushing piece 911 away from the first lifting assembly 92, so that the adjacent workpiece can be pushed by the pushing piece 911 towards the first lifting assembly 92 again after the workpiece is grabbed.

[0066] As shown, the counter-pushing assembly 913 includes a first driving rod 13a, a driving wheel 13b, and a second driving rod 13c. The second driving rod 13c is installed on the pushing piece 911, and the first driving rod 13a is arranged vertically. The first driving rod 13a and the second driving rod 13c are engaged with the driving wheel 13b. The first driving rod 13a can drive the second driving rod 13c to move the pushing piece 911 away from the first lifting assembly 92 through the driving wheel 13b. When the first grabbing assembly 52 is grabbing the workpiece, the first support 52a can drive the first driving rod 13a to move the pushing piece 911 away from the first lifting assembly 92, so that the adjacent workpiece can be pushed by the pushing piece 911 towards the first lifting assembly 92 again after the workpiece is grabbed.

[0067] As shown, the counter-pushing assembly 913 includes a first driving rod 13a, a driving wheel 13b, and a second driving rod 13c. The second driving rod 13c is installed on the pushing piece 911, and the first driving rod 13a is arranged vertically. The first driving rod 13a and the second driving rod 13c are engaged with the driving wheel 13b. The first driving rod 13a can drive the second driving rod 13c to move the pushing piece 911 away from the first lifting assembly 92 through the driving wheel 13b. When the first grabbing assembly 52 is grabbing the workpiece, the first support 52a can drive the first driving rod 13a to move the pushing piece 911 away from the first lifting assembly 92, so that the adjacent workpiece can be pushed by the pushing piece 911 towards the first lifting assembly 92 again after the workpiece is grabbed.

[0068] ​Preferably, the delaying member can be a liquid retarder arranged at the driving wheel 13b.

[0069] Preferably, the delaying member is a friction layer arranged between the driving wheel 13b and the shaft around which the driving wheel 13b rotates, and the rotation of the driving wheel 13b is slowed down by friction.

[0070] Optionally, the lower end surface of the pushing member 911 is higher than the box body 81, and the height difference between the pushing member 911 and the box body 81 is between 0.5 mm and 1 mm.

[0071] As shown in Figures 7-8 Optionally, the first lifting assembly 92 is provided with a slope close to the workpiece side and a stopper away from the workpiece side. When the pushing mechanism 91 pushes the workpiece to move, the workpiece is first lifted upward by the slope, and then stops pushing when reaching the stopper. The slope can separate the workpiece on the upper side to be grabbed from the adjacent workpiece, so as to facilitate being grabbed. The workpiece is positioned under the block of the stopper, so as to prevent the deviation of the grabbing position from affecting the accuracy of the later exposure.

[0072] Optionally, the lower end surface of the first lifting assembly 92 is flush with the upper end surface of the box body 81.

[0073] As shown in Figures 7-8 Optionally, the separating mechanism 90 further comprises a second lifting assembly 93. The second lifting assembly 93 comprises two groups, which are arranged on the upper sides of the adjacent two side plates to the side plates where the first lifting assembly 92 is arranged. The second lifting assembly 93 can lift the two sides of the workpiece lifted by the first lifting assembly 92 again. When the two sides of the workpiece are lifted by the second lifting assembly 93, the first grabbing assembly 52 can grab the workpiece through the two sides of the workpiece, so as to ensure the stability of grabbing.

[0074] As shown in Figures 7-8 Optionally, each group of the second lifting assembly 93 comprises a plurality of lifting members 931. There is a gap between the adjacent two lifting members 931. The lifting member 931 can move horizontally towards or away from the box body 81. When the lifting member 931 moves towards the box body 81, the two sides of the workpiece can be lifted. The first grabbing assembly 52 can grab the lifted workpiece through the gap, so as to ensure the stability of grabbing. When the lifting member 931 moves away from the box body 81, the adjacent workpiece to the grabbed workpiece can move upward without being blocked.

[0075] As shown in Figures 7-8As shown, optionally, the sequence of the plurality of lifting pieces 931 of each second lifting assembly 93 moving into the box body 81 is from the lifting piece 931 close to the first lifting assembly 92 to the lifting piece 931 far from the first lifting assembly 92. By moving the lifting piece 931 close to the first lifting assembly 92 into the box body 81 first, the problem that the lifting piece 931 cannot be inserted under the workpiece because the position of the workpiece far from the first lifting assembly 92 is not lifted can be prevented.

[0076] As shown, optionally, the side of the lifting piece 931 close to the box body 81 is a slope. When the lifting piece 931 moves into the box body 81, as long as there is a gap between two adjacent workpieces, the lifting piece 931 can be inserted into the gap through the slope, preventing the problem that the workpiece is blocked by the lifting piece 931 and cannot be lifted. A step is arranged on the lifting piece 931. When the lifting piece 931 moves into the box body 81, the lifting piece 931 is blocked by the step, preventing the problem that the clamping position is skewed due to the skew of the workpiece. Figures 7-8 As shown, optionally, the second lifting assembly 93 further comprises a plurality of second elastic pieces 932 and a plurality of driving assemblies 933. Each second elastic piece 932 and each driving assembly 933 correspond to one lifting piece 931. The second elastic piece 932 can drive the lifting piece 931 to move away from the box body 81. The driving assembly 933 can drive the lifting piece 931 to move into the box body 81. Before the first clamping assembly 52 clamps the workpiece, the driving assembly 933 first drives the lifting piece 931 to move into the box body 81.

[0077] Figures 7-8 As shown, optionally, the driving assembly 933 comprises a third driving rod 33a, a third elastic piece 33b, and a driving groove 33c arranged on the lifting piece 931. The third driving rod 33a is arranged vertically. The third elastic piece 33b is sleeved on the third driving rod 33a. The third elastic piece 33b can drive the third driving rod 33a to move away from the lifting piece 931. When the third driving rod 33a moves towards the lifting piece 931, the third driving rod 33a drives the lifting piece 931 to move into the box body 81 through the driving groove 33c. After the third elastic piece 33b drives the third driving rod 33a to move away from the lifting piece 931, the second elastic piece 932 drives the lifting piece 931 to move away from the box body 81. Before the first clamping assembly 52 clamps the workpiece, the first supporting piece 52a first contacts the third driving rod 33a and drives the third driving rod 33a to drive the lifting piece 931 to move into the box body 81 to lift the workpiece.

[0078] As shown, optionally, the driving assembly 933 comprises a third driving rod 33a, a third elastic piece 33b, and a driving groove 33c arranged on the lifting piece 931. The third driving rod 33a is arranged vertically. The third elastic piece 33b is sleeved on the third driving rod 33a. The third elastic piece 33b can drive the third driving rod 33a to move away from the lifting piece 931. When the third driving rod 33a moves towards the lifting piece 931, the third driving rod 33a drives the lifting piece 931 to move into the box body 81 through the driving groove 33c. After the third elastic piece 33b drives the third driving rod 33a to move away from the lifting piece 931, the second elastic piece 932 drives the lifting piece 931 to move away from the box body 81. Before the first clamping assembly 52 clamps the workpiece, the first supporting piece 52a first contacts the third driving rod 33a and drives the third driving rod 33a to drive the lifting piece 931 to move into the box body 81 to lift the workpiece. ​ As shown, optionally, the driving assembly 933 comprises a third driving rod 33a, a third elastic piece 33b, and a driving groove 33c arranged on the lifting piece 931. The third driving rod 33a is arranged vertically. The third elastic piece 33b is sleeved on the third driving rod 33a. The third elastic piece 33b can drive the third driving rod 33a to move away from the lifting piece 931. When the third driving rod 33a moves towards the lifting piece 931, the third driving rod 33a drives the lifting piece 931 to move into the box body 81 through the driving groove 33c. After the third elastic piece 33b drives the third driving rod 33a to move away from the lifting piece 931, the second elastic piece 932 drives the lifting piece 931 to move away from the box body 81. Before the first clamping assembly 52 clamps the workpiece, the first supporting piece 52a first contacts the third driving rod 33a and drives the third driving rod 33a to drive the lifting piece 931 to move into the box body 81 to lift the workpiece.

[0079] ​Optionally, the third driving rod 33a close to the first lifting assembly 92 is longer than the third driving rod 33a far from the first lifting assembly 92. That is, the first supporting piece 52a is in contact with the third driving rod 33a close to the first lifting assembly 92 first, and then in contact with the third driving rod 33a far from the first lifting assembly 92.

[0080] Optionally, the lower end surface of the lifting piece 931 is higher than the upper end surface of the box body 81, and the height difference between the lower end surface of the lifting piece 931 and the upper end surface of the box body 81 is between 0.5mm and 1mm.

[0081] The first grabbing assembly 52 mechanism grabs the workpiece in the following process:

[0082] Firstly, the first telescopic piece 821 moves the workpiece on the upper side to the upper side of the box body 81, and the height difference between the lower end surface of the workpiece and the upper end surface of the box body 81 is between 0.1mm and 0.4mm. The pushing piece 911 pushes the workpiece on the upper side to the first lifting assembly 92, and is blocked and positioned by the blocking piece.

[0083] Then, the first grabbing assembly 52 is moved to the feeding platform 20 by the mechanical arm, when it is moved above the box body 81, the first grabbing assembly 52 is downward, the first supporting piece 52a is laid flat, the first supporting piece 52a pushes the first driving rod 13a and the third driving rod 33a to move downward first, the first driving rod 13a moves the pushing piece 911 away from one side of the first lifting assembly 92, so as to facilitate the preparation for pushing the workpiece next time, the third driving rod 33a moves the lifting piece 931 to the box body 81, and makes the workpiece on both sides to be lifted upward as a whole; then the first grabbing assembly 52 is continuously moved until it can grab the workpiece, then the first grabbing assembly 52 grabs the workpiece through the interval between the adjacent two lifting pieces 931, then the workpiece is moved to the frame part 12 of the vertical exposure machine 1 to place and fix the workpiece vertically.

[0084] When the first grabbing assembly 52 grabs the workpiece and moves away, the third driving rod 33a is separated from the lifting piece 931 under the driving of the third elastic piece 33b, the lifting piece 931 moves away from the inside of the box body 81 under the driving of the second elastic piece 932, the first driving rod 13a slowly moves upward under the action of the first elastic piece 912 and the buffer, and delays the time of pushing the workpiece; that is, the first telescopic piece 821 is started after the first grabbing assembly 52 moves away, the first telescopic piece 821 first moves the workpiece upward by a distance of one workpiece, and then the pushing piece 911 slowly pushes the workpiece to move.

[0085] In summary, the vertical exposure machine provided by the application grabs the workpiece to be exposed by the feeding mechanism at the same time as the discharging mechanism grabs the exposed workpiece in the frame part, then the feeding mechanism moves to the frame part at the same time as the discharging mechanism moves the workpiece out of the frame part, thereby improving the work efficiency.

[0086] The application also provides a feeding device and a separation mechanism. The feeding device can store multiple workpieces at one time and push the workpieces to the grabbing position one by one. The separation mechanism separates the workpiece at the grabbing position from the remaining workpieces, preventing the feeding mechanism from mistakenly grabbing the workpieces or causing damage such as abrasion and bending to other workpieces during grabbing.

[0087] Finally, it should be noted that the above examples are only used to illustrate the technical solutions of the application, and not to limit them. Although the application has been described in detail with reference to the foregoing examples, those skilled in the art will understand that they can modify the technical solutions described in the foregoing examples or make equivalent replacements for some of the technical features. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the application.

Claims

1. A vertical exposure machine characterized by comprising: The utility model relates to a vertical exposure machine, comprising: a machine body, the machine body is equipped with vertical exposure part and frame part, the exposure part is used for the exposure of work piece, the frame part is used for the placement of work piece; a feeding mechanism and a discharging mechanism, respectively arranged on both sides of the frame part, when the frame part is located at the feeding and discharging position, the discharging mechanism removes the exposed work piece from one side of the frame part, and the feeding mechanism moves the unexposed work piece to the vertical frame part from the other side; a fixing frame arranged on the machine body, the fixing frame comprises a first setting position and a second setting position, the height of the first setting position is higher than that of the frame part, and the feeding mechanism is arranged on the first setting position, and the discharging mechanism is arranged on the second setting position; a feeding platform for placing unexposed work pieces, and the feeding mechanism is used for grabbing the unexposed work piece on the feeding platform and moving it to the vertical frame part; the feeding platform further comprises a feeding device, the feeding device is used for storing a plurality of work pieces and can push the work pieces to the grabbing position one by one when the feeding mechanism grabs the work pieces; the feeding platform further comprises a separation mechanism, the separation mechanism is used for separating the work piece located at the grabbing position from the work piece below; the separation mechanism comprises a pushing mechanism and a first lifting assembly, the pushing mechanism can push the work piece to be grabbed to move towards the first lifting assembly, and the first lifting assembly separates the work piece from the adjacent work piece.

2. The vertical exposure machine according to claim 1, characterized in that: the utility model further comprises a discharging platform; the discharging platform is used for placing the exposed work piece, and the discharging mechanism is used for removing the exposed work piece from the frame part and placing it on the discharging platform.

3. The vertical exposure machine according to claim 2, wherein: the feeding mechanism comprises a first driving mechanism and a first grabbing assembly; the first driving mechanism is connected to the first setting position and the first grabbing assembly, and is used for driving the first grabbing assembly to move; the first grabbing assembly is used for grabbing and releasing the work piece; the discharging mechanism comprises a second driving mechanism and a second grabbing assembly; the second driving mechanism is connected to the second setting position and the second grabbing assembly, and is used for driving the second grabbing assembly to move; the second grabbing assembly is used for grabbing and releasing the work piece.

4. The vertical exposure machine according to claim 3, characterized in that: The first driving mechanism and the second driving mechanism are multi-axis mechanical arms.

5. The vertical exposure machine according to claim 3, characterized in that: The first grabbing assembly comprises a first support and two groups of first grabbing pieces; the first support is mounted on the first driving mechanism, and the two groups of first grabbing pieces are arranged on both sides of the first support; the two groups of first grabbing pieces respectively grab the opposite sides of the work piece; the second grabbing assembly comprises a second support and two groups of second grabbing pieces; the second support is mounted on the second driving mechanism, and the two groups of second grabbing pieces are arranged on both sides of the second support; the two groups of second grabbing pieces respectively grab the opposite sides of the work piece.

6. The vertical exposure machine according to claim 2, characterized in that: The feeding platform is located below the feeding mechanism, and the discharging platform is located below the discharging mechanism.

7. The vertical exposure machine according to claim 2, characterized in that: The utility model further comprises a positioning assembly; the positioning assembly is used for positioning the work piece placed on the feeding platform; when the work piece is placed on the feeding platform, the work piece is placed in the corresponding placement position under the action of the positioning assembly.

8. The vertical exposure machine according to claim 7, characterized in that: The positioning assembly comprises a plurality of contact sensors, and when the work piece moves to contact the plurality of contact sensors, the work piece stops moving.

9. The vertical exposure machine according to claim 1, characterized in that: The frame part comprises a frame body and a clamping mechanism for fixing the workpiece on the frame body.

10. The vertical exposure machine according to claim 9, characterized in that: The frame part further comprises a flattening mechanism for flattening the workpiece fixed on the frame body to improve the flatness of the workpiece.

11. The vertical exposure machine according to claim 1, characterized in that: The feeding mechanism is used for grabbing the unexposed workpiece horizontally placed in the feeding platform, and then moving the workpiece to the frame part perpendicular to the surface of the machine body after rotating the workpiece by 90 degrees for installation; The discharging mechanism is used for grabbing the exposed workpiece in the frame part perpendicular to the surface of the machine body, and then moving the workpiece to the discharging platform after rotating the workpiece by 90 degrees for placement.

12. The vertical exposure machine according to claim 1, characterized in that: The feeding device comprises a box body and a lifting device; The box body is installed on the fixing frame and is used for storing a plurality of workpieces; The lifting device is arranged in the box body and is used for pushing the workpieces to be taken out in the box body one by one to the grabbing position of the feeding mechanism when the feeding mechanism grabs the workpiece.

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