System for rapidly judging whether complex vacuum chamber has vacuum leakage or not

Abstract

The invention relates to the technical field of vacuum detection, in particular to a system for quickly judging whether a complex vacuum chamber has vacuum leakage or not. Aiming at the problem of vacuum leak detection, the invention provides the following technical scheme: the judgment system consists of a test vacuum chamber, a background vacuum chamber, a quadrupole mass spectrometer, a vacuum gauge tube and a vacuum unit; the test vacuum chamber is connected with the background vacuum chamber through a corrugated pipe; the vacuum gauge tube and the background vacuum chamber are connected through a CF35 knife edge sealing flange, and the quadrupole mass spectrometer and the background vacuum chamber are connected through a CF35 knife edge sealing flange. According to the invention, the leakage detection requirements of non-standard complex vacuum systems and various high-requirement vacuum systems in the nuclear fusion field at the present stage are met, and non-intrusive, rapid and high-reliability leakage judgment is realized through multi-interface adaptation, high-vacuum stable maintenance, dual precise monitoring and low-leakage-rate sealing design; the method is suitable for batch detection and on-line monitoring of fusion subsystems or engineering occasions with strict requirements for leak detection efficiency and accuracy.

Description

Technical Field

[0001] This invention relates to the field of vacuum detection technology, and in particular to a system for rapidly determining whether a complex vacuum chamber is leaking. Background Technology

[0002] In humanity's quest for the ultimate solution to clean energy, nuclear fusion technology is advancing towards the engineering verification stage at an unprecedented pace. For fusion devices, exemplified by tokamaks, achieving stable operation of plasma at temperatures exceeding hundreds of millions of degrees Celsius has become crucial, with the attainment of an ultra-high vacuum environment and the reliability of vacuum sealing becoming vital to success. The fusion vacuum chamber, like the vascular system of the device, must maintain a temperature below 10°C inside this colossal structure, tens of meters in diameter. -5 In the high vacuum environment of Pa, even the slightest external gas leak can extinguish the plasma discharge: the intrusion of external oxygen or nitrogen will instantly increase the impurity content in the plasma, leading to enhanced impurity radiation, cooling the plasma, and quenching the fusion reaction. As fusion devices such as EAST and HL-3 continuously break plasma confinement records, vacuum leak detection has evolved from a simple quality inspection method into a strategic supporting technology for ensuring the safe operation of fusion devices and accelerating the construction of demonstration reactors. Nuclear fusion devices comprise numerous systems, including heating systems, fueling systems, diagnostic systems, and cryogenic systems. To integrate these systems into the fusion device, their dimensions, interfaces, and other aspects are often non-standard, and the systems are highly complex. These non-standard and complex systems require vacuum leak detection before being applied to the main fusion device. However, vacuum leak detection for these complex non-standard systems often requires significant time and effort. To enable the rapid integration of non-standard and complex vacuum systems into the main fusion device and achieve efficient operation of the fusion device, there is an urgent need to develop a system that can quickly determine whether a non-standard and complex vacuum system is leaking. In view of this, the present invention proposes a system for rapidly determining whether a complex vacuum chamber is leaking by comparing the ratio of nitrogen and oxygen in the residual gas composition in a vacuum chamber measured by a mass spectrometer with the ratio in the atmospheric environment. This system can quickly determine whether the system under test has a vacuum leak, thus providing a guarantee for the efficient operation of fusion devices. Summary of the Invention

[0003] The purpose of this invention is to address the problem of vacuum leak detection in the prior art by proposing a system for quickly determining whether a complex vacuum chamber is leaking.

[0004] The technical solution of the present invention: a system for rapidly determining whether a complex vacuum chamber is leaking, the determination system comprising a test vacuum chamber, a background vacuum chamber, a quadrupole mass spectrometer, a vacuum gauge tube, and a vacuum unit;

[0005] The test vacuum chamber and the background vacuum chamber are connected by a bellows.

[0006] The vacuum gauge tube and the background vacuum chamber, as well as the quadrupole mass spectrometer and the background vacuum chamber, are all connected by CF35 knife-edge sealing flanges.

[0007] The vacuum unit includes a mechanical pump and a molecular pump. The molecular pump is connected to the background vacuum chamber via a CF100 knife-edge sealing flange, and the mechanical pump is connected to the background vacuum chamber via a metal bellows.

[0008] A multi-interface connection assembly for connecting the bellows and the background vacuum chamber is provided. The multi-interface connection assembly includes a connection base that is fixedly connected to the background vacuum chamber. An interface sleeve is fitted on the outside of the connection port of the connection base. The interface sleeve has multiple sets of interface channels. The bellows is sealed to one set of the interface channels. Each set of interface channels has a locking groove on its outer ring. A locking ring is rotatably connected in the locking groove. The locking ring is connected to the end of the bellows.

[0009] Optionally, the outer ring of the bellows end is provided with a connecting section, and the inner ring of the locking ring is provided with a locking ring internal thread section adapted to the connecting section;

[0010] The inner wall of the mounting slot is provided with a threaded groove that is the same as the internal threaded section of the locking ring.

[0011] Optionally, a sealing sleeve is provided between the interface sleeve and the outer end ring of the connecting base, and the thickness of the sealing sleeve is 2-3mm.

[0012] Optionally, the internal parts of multiple sets of the interface channels are also threaded and sealed with sealing plugs.

[0013] Optionally, the bellows and the test vacuum chamber are detachably connected via a quick-connect coupling. One end of the quick-connect coupling is connected to the KF25 interface clamp of the test vacuum chamber, and the other end is fixedly connected to the end of the bellows.

[0014] Optionally, the background vacuum chamber is made of 304L stainless steel, and its inner surface is polished to a mirror finish and heated to 180°C for gas venting, with an inner surface roughness Ra≤0.8μm.

[0015] Optionally, the quadrupole mass spectrometer has a working vacuum pressure of less than 1.0E-3Pa and a scanning mass number range of 0-100 amu, and is used to detect the partial pressure ratio of nitrogen and oxygen in the residual gas in the test vacuum chamber and the background vacuum chamber.

[0016] The measuring range of the vacuum gauge tube is 10. -8 ~10 5 Pa is used to monitor the vacuum level changes of the background vacuum chamber in real time.

[0017] Optionally, the test vacuum chamber has an irregular and complex structure, and its inner surface is polished to a mirror finish and heated to 150-200℃ to release gas.

[0018] Optionally, the mechanical pump is connected to the exhaust port of the molecular pump via a KF40 quick-connect interface, forming a series pumping structure to maintain a high vacuum environment between the test vacuum chamber and the background vacuum chamber.

[0019] In summary, this application includes at least one of the following beneficial technical effects:

[0020] This invention adds a multi-interface connection component between the test vacuum chamber and the background vacuum chamber. The interface sleeve has multiple sets of interface channels of different specifications. With the help of a rotatable locking ring and a sealing structure, it can adapt to non-standard nuclear fusion subsystems with various interface specifications such as KF series and CF series without replacing the bellows. Compared with the existing single-interface system, it shortens the interface adaptation time and avoids wear on the sealing surface caused by repeated disassembly, thereby reducing the risk of additional leakage and meeting the needs of rapid access and batch leak detection of fusion subsystems.

[0021] Furthermore, by employing a series structure of molecular and mechanical pumps in the vacuum unit, with the mechanical pump precisely connected to the exhaust port of the molecular pump via a KF40 quick-connect interface, a stable 10 mV / L vacuum level can be maintained, regardless of the irregular and complex structure and volume of the test vacuum chamber. - 3 The test vacuum chamber and the base vacuum chamber are subjected to polished mirror surface and baking treatment at 150-200℃ to reduce the amount of gas adsorption, shorten the time for the system to reach the vacuum level required for leak detection, avoid the extension of the leak detection cycle due to vacuum fluctuations, and adapt to the vacuum requirements of complex nuclear fusion subsystems.

[0022] Furthermore, by setting the quadrupole mass spectrometer's working vacuum pressure to less than 1.0E-3 Pa and the scanning mass number range to 0-100 amu, the partial pressure ratio of nitrogen and oxygen in the test vacuum chamber and the background vacuum chamber can be accurately detected. This can be combined with a vacuum gauge tube 10 -8 ~10 5 The wide-range real-time monitoring of Pa provides a dual basis for judgment of composition analysis and vacuum degree monitoring; at the same time, the design of sealing sleeves and sealing plugs in the multi-interface connection components ensures that the leakage rate at the connection points is ≤1×10. -8 Pa・m³ / s, avoiding interference from external gases with the detection results, reducing the misjudgment rate of leakage detection, and providing precise assurance for the reliability of the vacuum seal of the nuclear fusion subsystem;

[0023] In summary, this invention meets the leak detection requirements of non-standard complex vacuum systems and various high-requirement vacuum systems in the current nuclear fusion field. Through multi-interface adaptation, high vacuum stability maintenance, dual accurate monitoring and low leak rate sealing design, it achieves non-invasive, rapid and highly reliable leak detection. It is suitable for batch testing of fusion subsystems, online monitoring or engineering applications with strict requirements for leak detection efficiency and accuracy. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of a system for quickly determining whether a complex vacuum chamber is leaking.

[0025] Figure 2 This is a three-dimensional structural schematic diagram of the present invention;

[0026] Figure 3 This is an exploded structural diagram of the bellows and multi-interface connection components;

[0027] Figure 4 This is a schematic diagram of the separation structure of the locking ring and the mounting groove;

[0028] Figure 5 This is a cross-sectional structural diagram of a multi-interface connection component;

[0029] Figure label:

[0030] 1. Test vacuum chamber; 11. Quick connector; 12. Bellows; 121. Connecting section; 122. Sealing gasket;

[0031] 2. Base vacuum chamber; 21. Multi-interface connection assembly; 200. Sealing sleeve; 211. Connecting base; 212. Interface sleeve; 213. Interface channel; 214. Sealing plug; 215. Mounting groove; 216. Locking ring; 217. Locking ring internal thread section;

[0032] 3. Quadrupole mass spectrometer;

[0033] 4. Vacuum gauge tube;

[0034] 5. Vacuum unit; 51. Mechanical pump; 52. Molecular pump; 53. Metal bellows. Detailed Implementation

[0035] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0036] The components of the embodiments of the invention described and shown in the accompanying drawings can typically be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention.

[0037] Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] In the description of this invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0039] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0040] Example

[0041] like Figures 1 to 5 As shown, the present invention proposes a system for rapidly determining whether a complex vacuum chamber is leaking. The determination system consists of a test vacuum chamber 1, a background vacuum chamber 2, a quadrupole mass spectrometer 3, a vacuum gauge tube 4, and a vacuum unit 5.

[0042] Among them, the test vacuum chamber 1 has an irregular and complex structure. Its inner surface is polished to a mirror finish and baked at 150-200℃ to remove gas. Specifically, the baking process lasts for 4-6 hours to fully remove the water vapor and volatile impurities adsorbed on the inner surface of the chamber. The chamber volume is designed to be 0.5-5m³ according to the requirements of the fusion subsystem, and it is compatible with non-standard vacuum equipment of different specifications such as diagnostic systems and heating systems.

[0043] The background vacuum chamber 2 is made of 304L stainless steel. Its inner surface is polished to a mirror finish and treated with 180℃ baking for gas venting. The surface roughness Ra of the inner chamber is ≤0.8μm. Furthermore, the specific dimensions of the background vacuum chamber 2 are a cubic structure of 200×200×200mm, with a chamber wall thickness of 9mm, ensuring structural strength while reducing gas infiltration. Multiple sealing flange mounting holes are reserved on the four sides of the chamber, which are not marked in the design. All interfaces are fixed to the chamber body by argon arc welding, and the welds are inspected to ensure no leakage.

[0044] The quadrupole mass spectrometer 3 operates under a vacuum pressure of less than 1.0E-3 Pa and has a scanning mass number range of 0-100 amu. It is used to detect the partial pressure ratio of nitrogen and oxygen in the residual gas in the test vacuum chamber 1 and the background vacuum chamber 2. The quadrupole mass spectrometer 3 has a detection response time of ≤1s, a detection accuracy error of ≤3% for the partial pressure ratio of nitrogen and oxygen, and is equipped with a data storage module that can record and export detection data in real time for easy subsequent analysis and traceability.

[0045] The measuring range of vacuum gauge 4 is 10. -8 ~10 5 Pa is used to monitor the vacuum level changes in the background vacuum chamber 2 in real time. Specifically, the vacuum gauge tube adopts a combination of an ionization vacuum gauge and a Pirani vacuum gauge, with the ionization vacuum gauge responsible for 10 Pa. -8 ~10 -3 Pa range monitoring, Pirani vacuum gauge responsible for 10 -3 ~10 5 Pa range monitoring with automatic switching between the two ensures that the accuracy error of full-range monitoring is ≤5%, and the length of the gauge probe extending into the chamber is 45mm to avoid the probe contacting the chamber wall and affecting the test results.

[0046] The test vacuum chamber 1 and the background vacuum chamber 2 are connected by a bellows 12. The bellows 12 and the test vacuum chamber 1 are detachably connected by a quick connector 11. One end of the quick connector 11 is connected to the KF25 interface clamp of the test vacuum chamber 1, and the other end is fixedly connected to the end of the bellows 12. The outer ring of the end of the bellows 12 is provided with a connecting section 121, and the inner ring of the locking ring 216 is provided with a locking ring internal thread section 217 that is adapted to the connecting section 121. The inner wall of the clamping groove 215 is provided with a threaded groove that is the same as the locking ring internal thread section 217, and the threaded hole depth is 20mm to ensure that the locking ring and the interface sleeve are fully engaged and improve the connection sealing.

[0047] The vacuum gauge tube 4 and the background vacuum chamber 2, as well as the quadrupole mass spectrometer 3 and the background vacuum chamber 2, are all connected by CF35 knife-edge sealing flanges, and the flange seals use oxygen-free copper gaskets.

[0048] Vacuum unit 5 includes a mechanical pump 51 and a molecular pump 52. The mechanical pump 51 is connected to the exhaust port of the molecular pump 52 via a KF40 quick-connect interface, forming a series pumping structure to maintain a high vacuum environment between the test vacuum chamber 1 and the background vacuum chamber 2. The quick-connect interface is equipped with a fluororubber sealing ring. The molecular pump 52 is connected to the background vacuum chamber 2 via a CF100 knife-edge sealing flange, and the mechanical pump 51 is connected to the background vacuum chamber 2 via a metal bellows 53. The inner wall of the bellows is electrolytically polished to a roughness Ra≤1.6μm to reduce gas adsorption.

[0049] A multi-port connection assembly 21 for connecting the bellows 12 and the base vacuum chamber 2 is provided. The multi-port connection assembly 21 includes a connection base 211 fixedly connected to the base vacuum chamber 2. An interface sleeve 212 is sleeved on the outside of the connection port of the connection base 211. A sealing sleeve 200 is provided between the interface sleeve 212 and the outer ring of the end of the connection base 211. The sealing sleeve 200 has a thickness of 3mm and a rectangular gasket with a width of 10mm to ensure no gap leakage between the interface sleeve and the connection base. The interface sleeve 212 has an opening on it. Multiple sets of interface channels 213 are provided. The bellows 12 is sealed to one set of interface channels 213. The interior of the multiple sets of interface channels 213 is also threaded and sealed with sealing plugs 214. Each set of interface channels 213 has a locking groove 215 on its outer ring. A locking ring 216 is rotatably connected in the locking groove 215. The locking ring 216 is connected to the end of the bellows 12. The locking ring is 30mm long and has anti-slip texture on its outer wall to facilitate manual rotation. A rubber sealing gasket is provided at the contact point between the locking ring and the end of the bellows to further improve the connection sealing.

[0050] In this embodiment, the test vacuum chamber 1 is first pretreated by cleaning its inner wall to ensure that there is no dust or oil residue. Then, the baking device is started and baked at 200°C for 6 hours to fully remove the water vapor and volatile impurities adsorbed on the inner surface of the chamber. After the chamber cools down to room temperature naturally, the KF25 quick connector of the test vacuum chamber 1 is connected to one end of the quick connector 11 by clamp. The other end of the quick connector 11 has been fixed to the bellows 12 by laser welding, thus completing the initial assembly of the test vacuum chamber 1 and the connecting parts.

[0051] Subsequently, based on the interface specifications of the test vacuum chamber 1, the corresponding interface channel 213 on the interface sleeve 212 is selected. The unused interface channel 213 is then inserted into the internal thread of the sealing plug 214 and tightened to ensure a tight seal. Next, the end of the bellows 12 is inserted into the selected interface channel 213, and the locking ring 216 in the mounting groove 215 is rotated to fully engage the inner thread section 217 of the locking ring 216 with the connecting section 121 of the bellows 12, while simultaneously tightening the rubber sealing gasket at the end of the bellows 12. A tight seal is established between the bellows 12 and the multi-interface connection assembly 21. Next, the quadrupole mass spectrometer 3 and vacuum gauge 4 are connected to the background vacuum chamber 2 via a CF35 knife-edge sealing flange. In the vacuum unit 5, the mechanical pump 51 is connected in series with the exhaust port of the molecular pump 52 via a KF40 quick-connect interface; the molecular pump 52 is connected to the background vacuum chamber 2 via a CF100 knife-edge sealing flange; and the mechanical pump 51 is auxiliaryly connected to the background vacuum chamber 2 via a metal bellows 53. A visual inspection confirms that all welds and flange connections are free from loosening or deformation, thus achieving a complete connection of all system components.

[0052] By starting the mechanical pump 51, the background vacuum chamber 2 and the test vacuum chamber 1 are initially evacuated using a series structure. At this time, the vacuum gauge tube 4 automatically switches to the Pirani vacuum scale mode, displaying the change in vacuum level in the chamber in real time, until the vacuum level drops to 1.0 × 10⁻⁶. -3 The initial vacuum was completed when the pressure was below 1 Pa; subsequently, the vacuum level was displayed as ≤1.0×10⁻⁶ by vacuum gauge tube 4. - 3 At a pressure of Pa, the molecular pump 52 is activated, the mechanical pump 51 is shut down in individual pumping mode, and the system switches to a series pumping mode with the mechanical pump 51 and molecular pump 52 connected together. Simultaneously, the system switches to ionization vacuum mode via the vacuum gauge tube 4, and pumping continues until the vacuum level in the background vacuum chamber 2 and the test vacuum chamber 1 stabilizes at 1.0 × 10⁻⁶ Pa. -4 A high vacuum environment is established for the system when the pressure is below PaPa.

[0053] Start the quadrupole mass spectrometer 3. After the quadrupole mass spectrometer 3 has warmed up for 15 minutes and is running stably, turn on the data storage module and set a 10-second data sampling interval to record the residual gas composition and partial pressure data in the test vacuum chamber 1 and the background vacuum chamber 2. Then, scan the residual gas in the test vacuum chamber 1 and the background vacuum chamber 2 with the quadrupole mass spectrometer 3, focusing on collecting the partial pressure values ​​of nitrogen and oxygen and calculating the partial pressure ratio. At the same time, continuously monitor the vacuum level through the vacuum gauge tube 4 to ensure that the fluctuation during the detection process is ≤±5%. If the partial pressure ratio is close to the atmospheric ratio and the vacuum level continues to decrease, it is determined that there is an external leak in the test vacuum chamber 1. If the partial pressure ratio is much lower than 3.7:1 and the vacuum level is stable at 1.0×10 -4If the pressure is below Pa, the test vacuum chamber 1 is determined to have no leakage or the leakage is below the detection limit. During the test, the partial pressure ratio data and vacuum degree data are exported in real time for simultaneous analysis, so as to achieve accurate determination of whether the test vacuum chamber 1 has a vacuum leak.

[0054] After the test is completed, turn off the molecular pump 52 and wait for it to stop completely before turning off the mechanical pump 51. Then, slowly open the vent valve of the background vacuum chamber 2 to introduce dry nitrogen gas with a purity of ≥99.999% into the chamber until the pressure inside and outside the chamber is balanced, to prevent air from rushing in and damaging the inner wall of the chamber. Then, separate the bellows 12 from the multi-port connection assembly 21 by removing the locking ring 216 on the multi-port connection assembly 21, and then remove the clamp of the quick connector 11 to separate the test vacuum chamber 1 from the system. Clean all interfaces, and finally turn off the power to the quadrupole mass spectrometer 3 and the vacuum gauge tube 4, export all test data for archiving, and restore the system to standby state to prepare for the next test.

[0055] The above specific embodiments are merely several optional embodiments of the present invention. Based on the technical solutions of the present invention and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A system for rapidly determining whether a complex vacuum chamber is leaking, characterized in that, The determination system consists of a test vacuum chamber (1), a background vacuum chamber (2), a quadrupole mass spectrometer (3), a vacuum gauge tube (4), and a vacuum unit (5); The test vacuum chamber (1) and the background vacuum chamber (2) are connected by a bellows (12); The vacuum gauge tube (4) and the background vacuum chamber (2) and the quadrupole mass spectrometer (3) and the background vacuum chamber (2) are all connected by CF35 knife-edge sealing flanges; The vacuum unit (5) includes a mechanical pump (51) and a molecular pump (52). The molecular pump (52) is connected to the background vacuum chamber (2) through a CF100 knife-edge sealing flange, and the mechanical pump (51) is connected to the background vacuum chamber (2) through a metal bellows (53). A multi-interface connection assembly (21) for connecting the bellows (12) and the base vacuum chamber (2) is provided. The multi-interface connection assembly (21) includes a connection base (211) fixedly connected to the base vacuum chamber (2). An interface sleeve (212) is sleeved on the outside of the connection port of the connection base (211). Multiple sets of interface channels (213) are opened on the interface sleeve (212). The bellows (12) is sealed to one set of the interface channels (213). Each set of interface channels (213) has a locking groove (215) on its outer ring. A locking ring (216) is rotatably connected in the locking groove (215). The locking ring (216) is connected to the end of the bellows (12).

2. The system for rapidly determining whether a complex vacuum chamber is leaking, as described in claim 1, is characterized in that, The bellows (12) has a connecting section (121) on its outer end and the locking ring (216) has an internal thread section (217) that is adapted to the connecting section (121) on its inner end. The inner wall of the mounting groove (215) is provided with the same thread groove as the inner thread section (217) of the locking ring.

3. The system for rapidly determining whether a complex vacuum chamber is leaking, as described in claim 1, is characterized in that... A sealing sleeve (200) is provided between the interface sleeve (212) and the outer end ring of the connecting base (211), and the thickness of the sealing sleeve (200) is 2-3mm.

4. The system for rapidly determining whether a complex vacuum chamber is leaking, as described in claim 1, is characterized in that... The internal parts of the multiple sets of interface channels (213) are also threaded and sealed with sealing plugs (214).

5. The system for rapidly determining whether a complex vacuum chamber is leaking according to claim 1, characterized in that, The bellows (12) and the test vacuum chamber (1) are detachably connected by a quick connector (11). One end of the quick connector (11) is connected to the KF25 interface clamp of the test vacuum chamber (1), and the other end is fixedly connected to the end of the bellows (12).

6. The system for rapidly determining whether a complex vacuum chamber is leaking according to claim 1, characterized in that, The background vacuum chamber (2) is made of 304L stainless steel. Its inner surface is polished to a mirror finish and heated to 180°C to release gas. The roughness of the inner surface of the chamber is Ra≤0.8μm.

7. The system for rapidly determining whether a complex vacuum chamber is leaking according to claim 1, characterized in that, The working vacuum pressure of the quadrupole mass spectrometer (3) is less than 1.0E-3Pa, and the scanning mass number range is 0-100amu. It is used to detect the partial pressure ratio of nitrogen and oxygen in the residual gas in the test vacuum chamber (1) and the background vacuum chamber (2). The measuring range of the vacuum gauge tube (4) is 10. -8 ~10 5 Pa is used to monitor the vacuum level changes of the background vacuum chamber (2) in real time.

8. The system for rapidly determining whether a complex vacuum chamber is leaking according to claim 1, characterized in that, The test vacuum chamber (1) has an irregular and complex structure. Its inner surface is polished to a mirror finish and heated to 150-200℃ to release gas.

9. The system for rapidly determining whether a complex vacuum chamber is leaking according to claim 1, characterized in that, The mechanical pump (51) is connected to the exhaust port of the molecular pump (52) via a KF40 quick-connect interface, forming a series pumping structure to maintain a high vacuum environment in the test vacuum chamber (1) and the background vacuum chamber (2).

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