Air inlet device

Abstract

The invention provides an air inlet device, which is used for deposition equipment, and comprises an air inlet head main body, the air inlet head main body is of a cavity structure, and a plurality of air outlet holes penetrating through a first end face are formed in the first end face of the air inlet head main body; the first gas dispersion part is located in the gas inlet head main body and comprises a first gas inlet part, a first gas extraction part and a plurality of first dispersion pipelines which are respectively communicated with the first gas inlet part and the first gas extraction part; the multiple first dispersion pipelines are coaxially arranged with the gas inlet head body, communicate with the multiple gas outlet holes and are used for guiding first gas; the multiple first dispersion pipelines are connected to the first air inlet part in parallel, and the multiple first dispersion pipelines are connected to the first air exhaust part in parallel. The gas inlet device provided by the invention can realize uniform dispersion of gas to the reaction cavity.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, and particularly relates to an air inlet device. BACKGROUND

[0002] For atomic layer deposition (ALD), the uniformity of the distribution of the reaction gas above the substrate has a great influence on the thickness consistency and the uniformity of the composition distribution of the film deposited on the substrate surface.

[0003] The atomic layer deposition equipment usually uses an air inlet head similar to a shower structure to distribute the reaction gas from the air inlet pipeline and then deliver the reaction gas to the upper side of the substrate, so as to improve the uniformity of the distribution of the reaction gas above the substrate. Usually, a spiral dispersion pipeline similar to a mosquito-repellent disc is arranged in the air inlet head, the reaction gas enters the dispersion pipeline from the air inlet port located at the center of the spiral dispersion pipeline, and diffuses to the end of the spiral dispersion pipeline, wherein a plurality of air outlet holes are uniformly arranged on the peripheral wall of the spiral dispersion pipeline, and the reaction gas enters the process chamber through the air outlet holes and reacts with the surface of the substrate.

[0004] Although the spiral dispersion pipeline can redistribute the reaction gas from the air inlet pipeline and improve the uniformity of the distribution of the reaction gas above the substrate, the gas transmission path of the spiral dispersion pipeline is too long, so that there is a great difference between the pressure of the gas near the end of the dispersion pipeline and the pressure of the gas near the air inlet port in the dispersion pipeline, thereby causing a great difference in the concentration of the reaction gas entering the process chamber from the air outlet holes of the peripheral wall of different regions of the dispersion pipeline, and further affecting the uniformity of the film deposited on the substrate surface. SUMMARY

[0005] The purpose of the present application is to provide an air inlet device to improve the uniformity of the dispersion of the gas entering the reaction chamber.

[0006] The embodiment of the present application provides an air inlet device for a deposition equipment, comprising: an air inlet head body, the air inlet head body is a cavity structure, the air inlet head body comprises a plurality of air outlet holes, the plurality of air outlet holes are regularly distributed and penetrate through the first end surface of the air inlet head body; and a first gas dispersion part located in the interior of the air inlet head body, the first gas dispersion part comprises a first air inlet part, a first air exhaust part, and a plurality of first dispersion pipelines respectively communicating with the first air inlet part and the first air exhaust part, the plurality of first dispersion pipelines are coaxially arranged with the air inlet head body and communicate with the plurality of air outlet holes, and are used for guiding the flow of the first gas; the plurality of first dispersion pipelines are connected in parallel to the first air inlet part, and the plurality of first dispersion pipelines are connected in parallel to the first air exhaust part.

[0007] In some embodiments, the first dispersion pipeline is C-shaped.

[0008] In some embodiments, the first gas inlet part comprises: a first communication part, which communicates with the middle part of the plurality of first dispersion pipes; and a first gas inlet pipe, a first end of the first gas inlet pipe being in communication with the first communication part, and a second end of the first gas inlet pipe being configured to be in communication with a first gas source.

[0009] In some embodiments, the first communication part is located on a side of the first dispersion pipes away from the first end face, and the first communication part is in communication with the plurality of first dispersion pipes through a plurality of first communication pipes.

[0010] In some embodiments, the first communication part is flush with the first dispersion pipes.

[0011] In some embodiments, the first gas suction part comprises: a second communication part, which communicates with the first end of the plurality of first dispersion pipes; a third communication part, which communicates with the second end of the plurality of first dispersion pipes, and the third communication part and the second communication part are parallel to the first communication part; a first gas suction pipe, a first end of the first gas suction pipe being in communication with the second communication part, and a second end of the first gas suction pipe being configured to be connected to a negative pressure device; and a second gas suction pipe, a first end of the second gas suction pipe being in communication with the third communication part, and a second end of the second gas suction pipe being configured to be connected to the negative pressure device.

[0012] In some embodiments, the second communication part and the third communication part are located on a side of the first dispersion pipes away from the first end face, and the second communication part and the third communication part are in communication with the plurality of first dispersion pipes through a plurality of second communication pipes.

[0013] In some embodiments, the gas inlet device further comprises: a second gas dispersion part located inside the gas inlet head body, the second gas dispersion part comprising a second gas inlet part, a second gas suction part, and a plurality of second dispersion pipes in communication with the second gas inlet part and the second gas suction part, respectively, the plurality of second dispersion pipes being coaxially arranged with the gas inlet head body and in communication with the plurality of gas outlet holes for guiding the flow of second gas; the plurality of second dispersion pipes being connected in parallel to the second gas inlet part; the plurality of second dispersion pipes being connected in parallel to the second gas suction part; and the plurality of second dispersion pipes being staggered with the plurality of first dispersion pipes.

[0014] In some embodiments, the second dispersion pipe is C-shaped.

[0015] In some embodiments, the second gas inlet part comprises: a fourth communication part communicating with the middle part of the plurality of second dispersion pipelines, and the fourth communication part is located between the second communication part and the third communication part; and a second gas inlet pipe, a first end of the second gas inlet pipe being in communication with the fourth communication part, and a second end of the second gas inlet pipe being configured to be in communication with a second gas source.

[0016] In some embodiments, the second gas suction part comprises: a fifth communication part communicating with the first end of the plurality of second dispersion pipelines; a sixth communication part communicating with the second end of the plurality of second dispersion pipelines, the fifth communication part and the sixth communication part being parallel, and the fifth communication part and the sixth communication part being respectively located on both sides of the second communication part; a third gas suction pipe, a first end of the third gas suction pipe being in communication with the fifth communication part, and a second end of the third gas suction pipe being configured to be connected with the negative pressure device; and a fourth gas suction pipe, a first end of the fourth gas suction pipe being in communication with the sixth communication part, and a second end of the fourth gas suction pipe being configured to be connected with the negative pressure device.

[0017] In some embodiments, the gas outlet hole comprises a narrow hole section and a wide hole section which are in communication with each other; the cross-sectional area of the narrow hole section is smaller than that of the wide hole section; and the narrow hole section is arranged close to the inside of the gas inlet head body, and the wide hole section is arranged close to the outside of the gas inlet head body.

[0018] In some embodiments, the ratio of the cross-sectional area of the narrow hole section to that of the wide hole section is 1:(2-2.5).

[0019] In some embodiments, a transition section is further arranged between the narrow hole section and the wide hole section, and the cross-sectional area of the transition section gradually increases from one end close to the narrow hole section to the first end close to the wide hole section.

[0020] In some embodiments, the length ratio of the narrow hole section, the transition section, and the wide hole section is (2.8-3.2):(0.8-1.2):(8-12).

[0021] In some embodiments, the length of the gas outlet hole is greater than the thickness of the first end surface of the gas inlet head body.

[0022] In some embodiments, the gas outlet holes in communication with adjacent first dispersion pipelines and second dispersion pipelines are in communication with each other.

[0023] In some embodiments, the wide hole sections of the gas outlet holes in communication with adjacent first dispersion pipelines and second dispersion pipelines are in communication with each other, and share one gas outlet.

[0024] In some embodiments, the gas outlets are arranged in a ring array on the first end surface.

[0025] The intake device provided by the embodiments of the present application has the following advantages, but is not limited to the following:

[0026] The intake device provided by the embodiments of the present application includes an intake head main body, a first end surface of the intake head main body is provided with a plurality of gas outlet holes regularly distributed and penetrating through the intake head main body, the length of the gas outlet hole is greater than the thickness of the first end surface, the distance between the gas inlet end and the gas outlet end of the gas outlet hole is increased, so as to increase the hole pressure difference of the gas outlet hole, and further improve the uniformity of the gas flow in the gas outlet hole, so that the gas entering the reaction cavity from the gas outlet hole is more evenly dispersed.

[0027] In addition, the gas outlet hole includes a narrow hole section and a wide hole section which are mutually penetrated, the cross-sectional area of the narrow hole section is smaller than that of the wide hole section, and the narrow hole section is arranged close to the inside of the intake head main body, and the wide hole section is arranged close to the outside of the intake head main body. The cross-sectional area of the wide hole section is substantially the same as that of the gas outlet hole of the prior art, and by arranging the narrow hole section, the pressure difference between the gas inlet end and the gas outlet end of the gas outlet hole can be further increased, so as to increase the hole pressure difference of the gas outlet hole, and further improve the uniformity of the gas flow in the gas outlet hole.

[0028] The intake device provided by the embodiments of the present application further includes a first gas dispersion part, which includes a first gas inlet part, a first gas extraction part, and a plurality of first dispersion pipelines respectively communicating with the first gas inlet part and the first gas extraction part. By connecting the plurality of first dispersion pipelines to the first gas inlet part, the gas can be dispersed to the first dispersion pipelines located in different regions of the intake head main body at the same time when entering the first gas dispersion part, so that the gas concentration in different first dispersion pipelines is uniform, and the gas pressure difference of the gas inlet end of different gas outlet holes is reduced, thereby improving the uniformity of the gas flow of each gas outlet hole, making the gas dispersion on the surface of the substrate to be deposited uniform, and improving the deposition effect.

[0029] In addition, the intake device provided by the embodiments of the present application further includes a second gas dispersion part, which avoids the premature reaction of process gas and provides more gas reaction source selectivity. The reaction can introduce the same or different gas into the reaction cavity as the first gas dispersion part, the structure of the second gas dispersion part is substantially the same as that of the first gas dispersion part, and the second dispersion pipelines of the second gas dispersion part are staggered with the first dispersion pipelines. BRIEF DESCRIPTION OF DRAWINGS

[0030] The following drawings detail the exemplary embodiments disclosed in the present application. Identical reference numerals in several views of the drawings represent similar structures. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are for the purpose of illustration and description only and are not intended to limit the scope of the present application, and other ways of embodiments can also achieve the same intent of the invention in the present application. It should be understood that the drawings are not drawn to scale.

[0031] wherein:

[0032] Figure 1 Structure diagram of the air inlet device according to some embodiments of the present application;

[0033] Figure 2 is Figure 1 Sectional view of the air inlet device along the direction of A-A;

[0034] Figure 3 Structure diagram of the first gas dispersion part according to some embodiments of the present application;

[0035] Figure 4 Structure diagram of the first gas dispersion part according to some embodiments of the present application;

[0036] Figure 5 Structure diagram of the air outlet hole according to some embodiments of the present application;

[0037] Figure 6 Structure diagram of the second gas dispersion part according to some embodiments of the present application;

[0038] Figure 7 Connection diagram of the air outlet hole of the first dispersion pipeline and the air outlet hole of the second dispersion pipeline according to some embodiments of the present application;

[0039] Connection diagram of the air outlet hole of the second dispersion pipeline;

[0040] Figure 8 is Figure 7 Enlarged view of the air outlet hole in circle B; and

[0041] Figure 9 Distribution diagram of the air outlet in the first end surface according to some embodiments of the present application. DETAILED DESCRIPTION

[0042] The following description provides specific applications and requirements of the present application, in order to enable those skilled in the art to make and use the contents of the present application. Various local modifications of the disclosed embodiments are obvious to those skilled in the art, and the general principles defined herein can be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but is consistent with the widest scope of the claims.

[0043] The present application provides an air inlet device for a deposition device, comprising: an air inlet head body, the air inlet head body being a hollow structure, the air inlet head body comprising a plurality of air outlet holes regularly distributed and penetrating through a first end surface of the air inlet head body; and a first gas dispersion part located inside the air inlet head body, the first gas dispersion part comprising a first air inlet part, a first air extraction part, and a plurality of first dispersion pipelines respectively communicating with the first air inlet part and the first air extraction part, the plurality of first dispersion pipelines being respectively coaxially arranged with the air inlet head body and communicating with the plurality of air outlet holes, for guiding flow of a first gas; the plurality of first dispersion pipelines being connected in parallel to the first air inlet part; and the plurality of first dispersion pipelines being connected in parallel to the first air extraction part.

[0044] For the air inlet device of the air inlet head type, the gas dispersion uniformity can be evaluated according to the differential pressure ratio, the smaller the differential pressure ratio, the more uniform the gas flow through each air hole, that is, the more uniform the gas dispersion through the air inlet device.

[0045] The formula for calculating the differential pressure ratio is:

[0046]

[0047] Wherein, ΔP0 is the gas pressure difference between the air inlet ends of different air outlet holes; and ΔP h is the gas pressure difference inside the air outlet hole from the air inlet end to the air outlet end, that is, the hole pressure difference.

[0048] The air inlet device provided by the present application can make the gas dispersed to the first dispersion pipelines located in different regions of the air inlet head body at the same time when entering the first gas dispersion part by connecting the plurality of first dispersion pipelines in parallel to the first air inlet part, so as to make the gas concentration in different first dispersion pipelines uniform, thereby reducing the gas pressure difference of the air inlet ends of different air outlet holes, improving the uniformity of the gas flow of each air outlet hole, making the gas dispersion of the surface of the substrate to be deposited uniform, and improving the deposition effect.

[0049] The present application will be described in detail below in conjunction with specific embodiments and drawings.

[0050] Reference Figure 1 and 2The application provides an air inlet device, which comprises an air inlet head body 100 and a first gas dispersion part 200 arranged inside the air inlet head body 100. After entering the air inlet head body 100, the gas passes through the first gas dispersion part 200 and enters a reaction chamber.

[0051] In some embodiments, the air inlet head body 100 is a hollow structure, which comprises a first end surface 101 and a second end surface 102. The first end surface 101 is configured to face the reaction chamber. The first end surface 101 is provided with a plurality of gas outlet holes 103 penetrating through the first end surface 101. The gas outlet holes 103 are in communication with the first gas dispersion part 200. After being uniformly dispersed by the first gas dispersion part 200, the gas enters the reaction chamber through the gas outlet holes 103.

[0052] In some embodiments, referring to Figure 2 and 3 , the first gas dispersion part 200 comprises a first gas inlet part 201, a first gas exhaust part 202, and a plurality of first dispersion pipelines 203 in communication with the first gas inlet part 201 and the first gas exhaust part 202, respectively.

[0053] In some embodiments, the plurality of first dispersion pipelines 203 are coaxially arranged with the air inlet head body 100 and in communication with the plurality of gas outlet holes 103, for guiding the first gas. The first gas enters the first dispersion pipelines 203 from the first gas inlet part 201. Part of the first gas flows into the reaction chamber matched with the air inlet device through the gas outlet holes 103, and part of the first gas flows out of the first dispersion pipelines 203 through the first gas exhaust part 202.

[0054] In some embodiments, the first dispersion pipeline 203 can be a closed ring, such as a circular ring or a regular polygonal ring.

[0055] In some embodiments, the first dispersion pipeline 203 is an open ring, such as an open regular polygonal ring or an open circular ring, i.e., a C-shaped ring.

[0056] In some embodiments, the plurality of first dispersion pipelines 203 are connected in parallel to the first gas inlet part 201, and the first dispersion pipelines 203 are connected in parallel to the first gas inlet part 201. By means of parallel connection, the first gas can be dispersed to the first dispersion pipelines 203 located at different regions of the air inlet head body 100 at the same time when entering the first gas dispersion part 200, so as to make the first gas concentration in different first dispersion pipelines 203 uniform, thereby reducing the gas pressure difference at the gas inlet ends of different gas outlet holes 103, and improving the uniformity of the gas flow of each gas outlet hole 103.

[0057] The first gas inlet part 201 is configured to simultaneously introduce the first gas into a plurality of the first dispersion pipelines 203.

[0058] In some embodiments, the first gas inlet part 201 comprises a first communication part 201a and a first gas inlet pipe 201b.

[0059] In some embodiments, the first communication part 201a communicates with the middle part of a plurality of the first dispersion pipelines 203.

[0060] In some embodiments, referring to Figure 2 and 3 the first communication part 201a is provided with a plurality of first communication pipes 201c on the side facing the first dispersion pipelines 203, the plurality of first communication pipes 201c respectively communicate with the plurality of first dispersion pipelines 203, and the first gas is introduced into the first communication part 201a through the first gas inlet pipe 201b and then dispersed to each of the first dispersion pipelines 203 through the first communication pipes 201c.

[0061] In other embodiments, referring to Figure 4 the first communication part 201a is in the same height as the first dispersion pipelines 203, and the first gas is introduced into the first communication part 201a through the first gas inlet pipe 201b and then directly dispersed to each of the first dispersion pipelines 203 through the first communication part 201a.

[0062] In some embodiments, a first end of the first gas inlet pipe 201b communicates with the first communication part 201a, and a second end of the first gas inlet pipe 201b is configured to communicate with a first gas source. In some embodiments, the first gas inlet pipe 201b passes through the second end surface 102 to communicate with the first gas source.

[0063] In some embodiments, the first gas inlet pipe 201b is perpendicular to the first communication part 201a.

[0064] In some embodiments, the first gas extraction part 202 is configured to generate a gas pressure difference between the first gas inlet part 201 and the first gas extraction part 202 for the first dispersion pipelines 203, so that the first gas moves in the direction of the first gas extraction part 202 after entering the first dispersion pipelines 203.

[0065] In some embodiments, the first gas extraction part 202 comprises a second communication part 202a, a third communication part 202b, a first gas extraction pipe 202c, and a second gas extraction pipe 202d. The second communication part 202a communicates with the first gas extraction pipe 202c, and the third communication part 202b communicates with the second gas extraction pipe 202d. In some embodiments, the first gas extraction part 202 is configured to generate a gas pressure difference between the first gas inlet part 201 and the first gas extraction part 202 for the first dispersion pipelines 203, so that the first gas moves in the direction of the first gas extraction part 202 after entering the first dispersion pipelines 203.

[0066] In some embodiments, the second communication portion 202a communicates with the first ends of the plurality of first dispersion pipelines 203, and the third communication portion 202b communicates with the second ends of the plurality of first dispersion pipelines 203. The second communication portion 202a and the third communication portion 202b are provided with a plurality of second communication pipes 202e on the side facing the first dispersion pipelines 203, and the plurality of second communication pipes 202e respectively communicate with the plurality of first dispersion pipelines 203. After a portion of the first gas is dispersed into each of the first dispersion pipelines 203, the first gas flows to the second communication portion 202a and the third communication portion 202b through the second communication pipes 202e.

[0067] In some embodiments, the third communication portion 202b and the second communication portion 202a are parallel to the first communication portion 201a.

[0068] In some embodiments, the first end of the first gas extraction pipe 202c communicates with the second communication portion 202a, and the second end of the first gas extraction pipe 202c is configured to be connected with a negative pressure device, such as a vacuum pump. A portion of the first gas in the first dispersion pipeline 203 flows to the negative pressure device through the first gas extraction pipe 202c. In some embodiments, the first gas extraction pipe 202c is connected with the negative pressure device through the second end surface 102.

[0069] In some embodiments, the first end of the second gas extraction pipe 202d communicates with the third communication portion 202b, and the second end of the second gas extraction pipe 202d is configured to be connected with the negative pressure device. A portion of the first gas in the first dispersion pipeline 203 flows to the negative pressure device through the second gas extraction pipe 202d. In some embodiments, the first gas extraction pipe 202c is connected with the negative pressure device through the second end surface 102.

[0070] Reference is made to Figure 2 In some embodiments, the length of the gas outlet hole 103 is greater than the thickness of the first end surface of the gas inlet head body 100. Compared with the gas outlet hole with the same length as the thickness of the first end surface, the gas outlet hole 103 of the present application increases the distance between the gas inlet end and the gas outlet end of the gas outlet hole 103, thereby increasing the pressure difference of the gas outlet hole 103, and further improving the uniformity of the flow of the gas in the gas outlet hole 103.

[0071] In some embodiments, reference is made to Figure 2 and 5The gas outlet hole 103 comprises a narrow hole section 103a and a wide hole section 103b which are mutually through; the cross-sectional area of the narrow hole section 103a is smaller than that of the wide hole section 103b; and the narrow hole section 103a is arranged close to the inside of the gas inlet head body 100, and the wide hole section 103b is arranged close to the outside of the gas inlet head body 100. The cross-sectional area of the wide hole section 103b is substantially the same as that of the gas outlet hole 103 in the prior art, and by arranging the narrow hole section 103a, the pressure difference between the gas inlet end and the gas outlet end of the gas outlet hole 103 can be further increased, thereby increasing the hole pressure difference of the gas outlet hole 103, so as to further improve the uniformity of the gas flow of the gas outlet hole 103.

[0072] In some embodiments, the ratio of the cross-sectional areas of the narrow hole section 103a and the wide hole section 103b is 1:(2-2.5), for example 1:2, 1:2.2, 1:2.4 or 1:2.5. If the cross-sectional area of the narrow hole section 103a is too small, on the one hand, it will cause difficulty in flowing gas, causing the pressure of the gas inlet pipeline to be blocked, and the amount of reaction gas source introduced in the same purging time will be reduced, and on the other hand, if the cross-sectional area of the narrow hole section 103a is too small, the larger particles in the source bottle and pipeline will have the risk of blocking the hole diameter, and the gas cannot flow smoothly, which also increases the processing cost. If the cross-sectional area of the narrow hole section 103a is too large, the pressure difference between the gas inlet end and the gas outlet end of the gas outlet hole 103 will not increase significantly, and the effect of improving the uniformity of the gas flow of the gas outlet hole 103 will not be achieved.

[0073] In some embodiments, the cross sections of the narrow hole section 103a and the wide hole section 103b can be triangular, square or circular in shape, and optionally, the cross sections of the narrow hole section 103a and the wide hole section 103b are circular.

[0074] In some embodiments, a transition section 103c is further arranged between the narrow hole section 103a and the wide hole section 103b, and the cross-sectional area of the transition section 103c gradually increases from one end close to the narrow hole section 103a to a first end close to the wide hole section 103b. The transition section 103c functions as a chamfer, avoiding damage to the first end surface of the connection between the narrow hole section 103a and the wide hole section 103b caused by a too large difference in cross-sectional area between the narrow hole section 103a and the wide hole section 103b.

[0075] In some embodiments, the length ratio of the narrow hole section 103a, the transition section 103c and the wide hole section 103b is (2.8-3.2):(0.8-1.2):(8-12), for example, 2.8:0.2:8, 3:1:10 or 3.2:1.2:12. If the narrow hole section 103a is too long, it is difficult for the gas to flow out; if the narrow hole section 103a is too short, the pressure difference increases insignificantly, and the effect of improving the uniformity of the gas flow of the gas outlet hole 103 cannot be achieved.

[0076] In some embodiments, referring to Figure 2 , the second end surface 102 is provided with a plurality of through holes 102a penetrating the second end surface, so that the gas inlet pipe or the gas extraction pipe enters the inside of the gas inlet head body 100.

[0077] In some embodiments, referring to Figure 6 and 7 , the gas inlet device further comprises a second gas dispersion part 300 for guiding the second gas.

[0078] The second gas dispersion part 300 comprises a second gas inlet part 301, a second gas extraction part 302 and a plurality of second dispersion pipelines 303 respectively communicating with the second gas inlet part 301 and the second gas extraction part 302. The plurality of second dispersion pipelines 303 are coaxially arranged with the gas inlet head body 100 and communicate with the plurality of gas outlet holes 103' provided on the first end surface 101. The second gas enters the second dispersion pipeline 303 from the second gas inlet part 301, part of which flows into the reaction chamber matched with the gas inlet device through the gas outlet hole 103', and part of which flows out of the second dispersion pipeline 303 through the second gas extraction part 302. The plurality of second dispersion pipelines 303 are staggered with the plurality of first dispersion pipelines 203, so that the first gas and the second gas are uniformly dispersed into the reaction chamber.

[0079] Referring to Figure 7 and 8 , the length of the gas outlet hole 103' is greater than the thickness of the first end surface 101, which comprises a narrow hole section 103a', a wide hole section 103b' and a transition section 103c' between the narrow hole section 103a' and the wide hole section 103b'. The narrow hole section 103a', the wide hole section 103b' and the transition section 103c' are the same as or similar to the narrow hole section 103a, the wide hole section 103b and the transition section 103c, which will not be described again here.

[0080] In some embodiments, referring to Figure 7 , 8and 9, the gas outlet holes 103 and 103' of the adjacent first dispersion pipe 203 and second dispersion pipe 303 are in communication with each other, specifically, the wide hole sections 103b and 103b' are in communication with each other away from one end of the transition sections 103c and 103c', so that the first gas and the second gas in the adjacent first dispersion pipe 203 and second dispersion pipe 303 enter the reaction chamber through the same gas outlet 103d.

[0081] In some embodiments, referring to Figure 9 , the gas outlets 103d are distributed in a ring array on the first end surface 101.

[0082] In some embodiments, the second dispersion pipe 303 is a ring with openings, for example, a regular polygon ring with openings, or a circular ring with openings, i.e. a C shape.

[0083] In some embodiments, the two ends of the second dispersion pipe 303 are respectively in communication with the second gas extraction part 302, and a plurality of second dispersion pipes 303 are connected in parallel to the second gas inlet part 301. By parallel connection, the second gas can be dispersed to the second dispersion pipes 303 located in different regions of the gas inlet head main body 100 at the same time when entering the second gas dispersion part 300, so as to make the second gas concentration in different second dispersion pipes 303 uniform, and further reduce the gas pressure difference at the gas inlet end of different gas outlet holes 103', thereby improving the uniformity of the gas flow of each gas outlet hole 103'.

[0084] In some embodiments, the second gas inlet part 301 includes a fourth communication part 301a and a second gas inlet pipe 301b.

[0085] In some embodiments, the fourth communication part 301a communicates the middle part of a plurality of second dispersion pipes 303, and the fourth communication part 301a is located between the second communication part 202a and the third communication part 202b.

[0086] In some embodiments, the communication mode of the second communication part 202 with the second dispersion pipe 303 is the same as or similar to the communication mode of the first communication part 201 with the first dispersion pipe 203, which is not repeated here.

[0087] In some embodiments, the first end of the second gas inlet pipe 301b is in communication with the fourth communication part 301a, and the second end of the second gas inlet pipe 301b is configured to be in communication with a second gas source. In some embodiments, the second gas inlet pipe 301b passes through the second end surface 102 and is in communication with the second gas source.

[0088] In some embodiments, the second gas inlet pipe 301b is perpendicular to the fourth communication part 301a.

[0089] In some embodiments, the second gas extraction part 302 is configured to generate a gas pressure difference between the second gas inlet part 301 and the second gas extraction part 302, so that the second gas in the second dispersion pipe 303 moves towards the second gas extraction part 302.

[0090] In some embodiments, the second gas extraction part 302 comprises a fifth communication part 302a, a sixth communication part 302b, a third gas extraction pipe 302c, and a fourth gas extraction pipe 302d.

[0091] In some embodiments, the fifth communication part 302a is in communication with the first ends of the second dispersion pipes 303, and the sixth communication part 302b is in communication with the second ends of the second dispersion pipes 303. The communication modes of the fifth communication part 302a and the sixth communication part 302b with the second dispersion pipes 303 are the same as or similar to the communication modes of the second communication part 202a and the third communication part 202b with the first dispersion pipes 203, which are not described herein.

[0092] In some embodiments, the fifth communication part 302a and the sixth communication part 302b are parallel, and the fifth communication part 302a and the sixth communication part 302b are respectively located on the two sides of the second communication part 202a.

[0093] In some embodiments, the first end of the third gas extraction pipe 302c is in communication with the fifth communication part 302a, and the second end of the third gas extraction pipe 302c is configured to be connected with the negative pressure device, and part of the second gas in the second dispersion pipe 303 flows to the negative pressure device through the first gas extraction pipe 202c. In some embodiments, the third gas extraction pipe 302c penetrates through the second end surface 102 and is connected with the negative pressure device.

[0094] In some embodiments, the first end of the fourth gas extraction pipe 302d is in communication with the sixth communication part 302b, and the second end of the fourth gas extraction pipe 302d is configured to be connected with the negative pressure device, and part of the second gas in the second dispersion pipe 303 flows to the negative pressure device through the fourth gas extraction pipe 302d. In some embodiments, the fourth gas extraction pipe 302d penetrates through the second end surface 102 and is connected with the negative pressure device.

[0095] In some embodiments, the first gas and the second gas include, but are not limited to, reaction gases for vapor deposition reactions such as ALD, CVD, etc. In some embodiments, the first gas and the second gas include at least one of a Ti source gas, an Al source gas; and the first gas and the second gas can be the same or different. In some embodiments, the Ti source gas includes TiCl4, and the Al source gas includes TEA.

[0096] In some embodiments, the first gas and the second gas enter the first gas dispersion part 200 and the second gas dispersion part 300 from the first gas source and the second gas source respectively, and due to the plurality of first dispersion pipelines 203 and the plurality of second dispersion pipelines 303 being connected in parallel with the first gas inlet part 201 and the second gas inlet part 301 respectively, the first gas can enter the plurality of first dispersion pipelines 203 simultaneously, and the second gas can enter the plurality of second dispersion pipelines 303 simultaneously. A part of the first gas entering the first dispersion pipeline 203 enters the reaction chamber through the gas outlet hole 103 connected with the first dispersion pipeline 203, and a part of the first gas is sucked to the negative pressure device by the first gas suction part 202; a part of the second gas entering the second dispersion pipeline 303 enters the reaction chamber through the gas outlet hole 103 connected with the second dispersion pipeline, and a part of the second gas is sucked to the negative pressure device by the second gas suction part 302.

[0097] The beneficial effects of the gas inlet device provided by the embodiments of the present application include, but are not limited to, the following:

[0098] The gas inlet device provided by the embodiments of the present application includes a gas inlet head main body, a first end surface of the gas inlet head main body is provided with a plurality of gas outlet holes regularly distributed and penetrating through the gas inlet head main body, the length of the gas outlet hole is greater than the thickness of the first end surface, which increases the distance between the gas inlet end and the gas outlet end of the gas outlet hole, thereby increasing the hole pressure difference of the gas outlet hole, and further improving the uniformity of the gas flow in the gas outlet hole, so that the gas entering the reaction chamber from the gas outlet hole is more evenly dispersed.

[0099] In addition, the gas outlet hole includes a narrow hole section and a wide hole section penetrating each other, the cross-sectional area of the narrow hole section is smaller than the cross-sectional area of the wide hole section, and the narrow hole section is arranged close to the inside of the gas inlet head main body, and the wide hole section is arranged close to the outside of the gas inlet head main body. The cross-sectional area of the wide hole section is substantially the same as that of the gas outlet hole of the prior art, and by arranging the narrow hole section, the pressure difference between the gas inlet end and the gas outlet end of the gas outlet hole can be further increased, thereby increasing the hole pressure difference of the gas outlet hole, to further improve the uniformity of the gas flow in the gas outlet hole.

[0100] The gas inlet device also comprises a first gas dispersion part, which comprises a first gas inlet part, a first gas extraction part, and a plurality of first dispersion pipelines in communication with the first gas inlet part and the first gas extraction part respectively. By connecting the plurality of first dispersion pipelines to the first gas inlet part, the gas can be dispersed to the first dispersion pipelines in different regions of the gas inlet head main body at the same time when entering the first gas dispersion part, so as to make the gas concentration in different first dispersion pipelines uniform, and further reduce the gas pressure difference at the gas inlet end of different gas outlet holes, thereby improving the uniformity of the gas flow of each gas outlet hole, making the gas dispersion of the substrate surface to be deposited uniform, and improving the deposition effect.

[0101] In addition, the gas inlet device also comprises a second gas dispersion part, which can introduce the same or different gas into the reaction cavity as the first gas dispersion part. The structure of the second gas dispersion part is substantially the same as that of the first gas dispersion part, and the second dispersion pipelines of the second gas dispersion part are staggered with the first dispersion pipelines.

[0102] It should be noted that different embodiments can have different beneficial effects, and in different embodiments, the beneficial effects that can be produced can be any one or a combination of the above, or any other beneficial effect that can be obtained.

[0103] The above has described the basic concept, and it is obvious that the above detailed disclosure is only as an example and does not constitute a limitation on the specification. Although it is not explicitly stated here, those skilled in the art can make various modifications, improvements and corrections to the present application. Such modifications, improvements and corrections are suggested in the specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of the present application.

[0104] It should be noted that in the description of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be rotary connection, or it can be sliding connection; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood in combination with the specific circumstances.

[0105] In addition, when the terms "first", "second", "third" and the like are used in the description of the present application to describe various features, these terms are only used to distinguish these features, and cannot be understood as indicating or implying the relevance between the features, the relative importance of the features, or implicitly indicating the number of the indicated features.

[0106] In addition, the description herein makes reference to idealized illustrative cross-sectional and / or plan and / or elevational views. Accordingly, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and / or tolerances, are to be expected. Thus, examples of the embodiments should not be construed as limited to the precise shapes illustrated herein but are to include deviations in shapes that result from such

[0107] Also, the use of "an" or "the" to refer to an element or class of elements, along with the

[0108] In addition, the use of "a" or "an" to describe elements, institutions and / or method steps is taken to mean one or more than one unless explicitly stated otherwise. Furthermore, the use of the term "including" as well as other forms for, e.g., "include", "includes", "included", and / or "including" should be considered open-ended. For example, a process, method, article, or apparatus that includes a series of elements is not necessarily limited to only those elements but can include other

[0109] Finally, it should be understood that the embodiments described herein are intended to be illustrative only and that the scope of the present application is properly determined by a fair reading (and a fair construction) of the claims that follow. Thus, alternative configurations of the embodiments described herein are considered to be within the scope of the present application. Accordingly, the embodiments of the present application are not to be considered as limited to the examples described herein, but include any and all embodiments within the scope of the appended claims.

Claims

1. A gas inlet device for a deposition apparatus, characterized in that, The application relates to an air inlet head, which comprises: an air inlet head body, which is a hollow structure, and a first end surface of the air inlet head body is provided with a plurality of air outlet holes penetrating through the first end surface; a first gas dispersion part located inside the air inlet head body, the first gas dispersion part comprising a first air inlet part, a first air exhaust part and a plurality of first dispersion pipelines respectively communicating with the first air inlet part and the first air exhaust part, the plurality of first dispersion pipelines being coaxially arranged with the air inlet head body and communicating with the plurality of air outlet holes, and being used for guiding flow of first gas; the plurality of first dispersion pipelines are connected in parallel to the first air inlet part, and the plurality of first dispersion pipelines are connected in parallel to the first air exhaust part. The first dispersion pipeline is C-shaped.

2. The air intake device of claim 1, wherein The first air inlet part comprises a first communication part communicating with the middle part of the plurality of first dispersion pipelines; and 3. The air intake device of claim 2, wherein a first air inlet pipeline, a first end of the first air inlet pipeline communicating with the first communication part, and a second end of the first air inlet pipeline being configured to communicate with a first gas source. The first communication part is located on the side of the first dispersion pipeline away from the first end surface, and the first communication part communicates with the plurality of first dispersion pipelines through a plurality of first communication pipelines.

4. The air intake device of claim 3, wherein The first communication part is flush with the first dispersion pipeline.

5. The air intake device of claim 3, wherein The first air exhaust part comprises:

6. The air intake device of claim 3, wherein a second communication part communicating with the first ends of the plurality of first dispersion pipelines; a third communication part communicating with the second ends of the plurality of first dispersion pipelines, and the third communication part and the second communication part being parallel to the first communication part; a first air exhaust pipeline, a first end of the first air exhaust pipeline communicating with the second communication part, and a second end of the first air exhaust pipeline being configured to be connected with a negative pressure device; and a second air exhaust pipeline, a first end of the second air exhaust pipeline communicating with the third communication part, and a second end of the second air exhaust pipeline being configured to be connected with the negative pressure device. The second communication part and the third communication part are located on the side of the first dispersion pipeline away from the first end surface, and the second communication part and the third communication part communicate with the plurality of first dispersion pipelines through a plurality of second communication pipelines.

7. The air intake device of claim 6, wherein The application further relates to a second gas dispersion part located inside the air inlet head body, the second gas dispersion part comprising a second air inlet part, a second air exhaust part and a plurality of second dispersion pipelines respectively communicating with the second air inlet part and the second air exhaust part, the plurality of second dispersion pipelines being coaxially arranged with the air inlet head body and communicating with the plurality of air outlet holes, and being used for guiding flow of second gas; the plurality of second dispersion pipelines are connected in parallel to the second air inlet part; the plurality of second dispersion pipelines are connected in parallel to the second air exhaust part; and the plurality of second dispersion pipelines are staggered with the plurality of first dispersion pipelines.

8. The air intake device of claim 7, wherein The second dispersion pipeline is C-shaped. The second air inlet part comprises:

9. The air intake device of claim 8, wherein, a fourth communication part communicating with the middle part of the plurality of second dispersion pipelines, and the fourth communication part being located between the second communication part and the third communication part; and 10. The air intake assembly of claim 9, wherein, a fifth communication part communicating with the second ends of the plurality of second dispersion pipelines, and the fifth communication part being located on the side of the second dispersion pipeline away from the first end surface. ​ A second intake pipe, a first end of the second intake pipe being communicated with the fourth communication part, and a second end of the second intake pipe being configured to be communicated with a second gas source.

11. The air intake assembly of claim 10, wherein, The second gas suction part comprises: A fifth communication part communicating first ends of a plurality of the second dispersion pipelines; A sixth communication part communicating second ends of the plurality of the second dispersion pipelines, the fifth communication part and the sixth communication part being parallel, and the fifth communication part and the sixth communication part being respectively located on two sides of the second communication part; A third gas suction pipe, a first end of the third gas suction pipe being communicated with the fifth communication part, and a second end of the third gas suction pipe being configured to be connected with the negative pressure device; and A fourth gas suction pipe, a first end of the fourth gas suction pipe being communicated with the sixth communication part, and a second end of the fourth gas suction pipe being configured to be connected with the negative pressure device.

12. The air intake device of claim 7, wherein, The gas outlet hole comprises a narrow hole section and a wide hole section which are mutually through; the cross-sectional area of the narrow hole section is smaller than that of the wide hole section; and the narrow hole section is arranged close to the inside of the intake head body, and the wide hole section is arranged close to the outside of the intake head body.

13. The air intake device of claim 12, wherein, The cross-sectional area ratio of the narrow hole section to the wide hole section is 1:(2-2.5).

14. The air intake device of claim 13, wherein, A transition section is further arranged between the narrow hole section and the wide hole section, and the cross-sectional area of the transition section gradually increases from one end close to the narrow hole section to the first end close to the wide hole section.

15. The air intake device of claim 14, wherein, The length ratio of the narrow hole section, the transition section and the wide hole section is (2.8-3.2):(0.8-1.2):(8-12).

16. The air intake device of claim 15, wherein, The length of the gas outlet hole is greater than the thickness of the first end face of the intake head body.

17. The air intake device of claim 15, wherein, The gas outlet holes which communicate adjacent first dispersion pipelines and second dispersion pipelines are mutually communicated.

18. The air intake device of claim 17, wherein, The wide hole sections of the gas outlet holes which communicate adjacent first dispersion pipelines and second dispersion pipelines are mutually communicated, and share one gas outlet.

19. The air intake device of claim 18, wherein, The gas outlet is annularly arrayed on the first end face.

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