Impact vibration compensation type surface acoustic wave sensor system

Abstract

The invention discloses an impact vibration compensation type surface acoustic wave sensor system, and relates to the field of information acquisition, the impact vibration compensation type surface acoustic wave sensor system comprises a surface acoustic wave sensing unit used for using a surface acoustic wave sensor as a sensitive element to sense a physical quantity to be measured and outputting a first signal to a data processing unit; and the impact vibration detection unit is used for acquiring an external impact vibration signal in real time and performing frequency domain analysis. The beneficial effects of the invention are that the mechanical execution unit can carry out mechanical correction and displacement compensation on the surface acoustic wave sensor according to a third signal of the data processing module on the premise of not influencing the normal work of the system, thereby achieving the software and hardware coordination compensation of an impact vibration signal; the first interdigital electrode of the surface acoustic wave sensor is arranged in an embedded mode, the electrode can be protected while the displacement amplitude of the surface acoustic wave is improved, and performance optimization and reliability improvement are achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of information collection, and in particular to an impact vibration compensation type surface acoustic wave sensor system. BACKGROUND

[0002] Surface acoustic wave (SAW) sensors have attracted much attention due to their miniaturization, high sensitivity, high precision, and ability to realize wireless and passive measurement, and are widely used in the measurement of various physical quantities. In the application environment of surface acoustic wave sensors, impact vibration from the outside world is often unavoidable, especially in the fields of industry, aerospace and automobiles. Environmental vibrations can cause frequency drift of the sensor, unstable response signals, leading to measurement errors and system performance degradation. Sudden and severe impact can also cause damage to the device structure of the surface acoustic wave sensor, leading to device failure and system collapse. Traditional surface acoustic wave sensor design often has difficulty in maintaining stable performance under highly complex impact vibration conditions, so a technical solution is needed to compensate for impact vibration interference in real time.

[0003] Existing vibration compensation methods usually rely on mechanical isolation or passive damping technology, which minimizes the physical effects of external impact vibration on the device through damping and other methods, but these methods are difficult to adapt to miniature and precise surface acoustic wave sensors, and have limited effect in high-frequency vibration and impact environments, and may also increase system weight and complexity. With the development of artificial intelligence and sensor technology, more and more research focuses on developing intelligent compensation systems to ensure the stability and integrity of the system in the impact vibration environment, and to actively compensate for the impact of vibration.

[0004] Deep learning technology has great potential in vibration signal processing and prediction due to its powerful non-linear modeling capability. By training a deep neural network, complex patterns and features can be learned from a large amount of vibration data, enabling accurate prediction and compensation of vibration effects. However, how to combine deep learning with surface acoustic wave sensors, convert the extracted features into feasible control signals, and regulate the response signals of surface acoustic wave sensors to achieve effective vibration compensation remains a problem to be solved. SUMMARY

[0005] The present application aims to provide an impact vibration compensation type surface acoustic wave sensor system to solve the problems raised in the background art.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical solutions:

[0007] An impact vibration compensation type surface acoustic wave sensor system, comprising:

[0008] A surface acoustic wave sensing unit is used to sense a physical quantity (e.g. temperature, gas) to be measured with a surface acoustic wave sensor as a sensitive element, and outputs a first signal to a data processing unit;

[0009] An impact vibration detection unit is used to acquire an external impact vibration signal in real time and perform (high-precision) frequency domain analysis, and transmit vibration characteristics (e.g. frequency, amplitude, phase, etc.) after analysis as a second signal to the data processing unit (the output signal is only related to the size of the impact vibration quantity); the surface acoustic wave sensing unit and the impact vibration detection unit are in the same environment and have the same installation conditions, and are subjected to the same external impact vibration;

[0010] The data processing unit is used to receive the first signal and the second signal, perform interference identification through an intelligent control strategy, and generate a third signal output to a mechanical execution unit through a deep learning algorithm, so as to dynamically adjust the driving frequency or the mechanical structure of the surface acoustic wave sensor through the mechanical execution unit to offset the influence of the external impact vibration on the resonant frequency of the surface acoustic wave sensor;

[0011] The mechanical execution unit is used to receive the third signal, directly regulate and control the mechanical deformation of the surface acoustic wave sensor substrate through the inverse piezoelectric effect of a material (e.g. piezoelectric material, smart material, etc.), and realize micron-level vibration compensation;

[0012] The signal output unit is used to monitor the frequency stability of the surface acoustic wave sensor in real time, output the final stable physical quantity measurement value (e.g. temperature, gas) and vibration state information, and dynamically evaluate and optimize the vibration compensation effect through a deep learning network;

[0013] The output end of the surface acoustic wave sensing unit is connected to the first input end of the data processing unit, the output end of the impact vibration detection unit is connected to the second input end of the data processing unit, the first output end of the data processing unit is connected to the input end of the mechanical execution unit, the second output end of the data processing unit is connected to the input end of the signal output unit, and the output end of the mechanical execution unit is connected to the input end of the surface acoustic wave sensing unit.

[0014] As a further scheme of the present application, the first interdigital electrode of the surface acoustic wave sensing unit is embedded, and the first interdigital electrode is installed in a groove of the first piezoelectric substrate by deposition.

[0015] As a further scheme of the present application, the surface acoustic wave sensing unit comprises a shell, and an elastic buffer assembly, a vibration damping membrane, a surface acoustic wave sensor, a first protective layer and a first adhesive layer are arranged in the inner cavity of the shell; one end of the elastic buffer assembly is connected to the inner side of the shell, the other end of the elastic buffer assembly is connected to one end of the vibration damping membrane, the other end of the vibration damping membrane is connected to one end of the surface acoustic wave sensor, and the other end of the surface acoustic wave sensor is sequentially fixedly connected to the base through the first protective layer and the first adhesive layer.

[0016] As a further scheme of the present application: the impact vibration detection unit comprises a vibration sensor, a second protective layer and a second adhesive layer, the vibration sensor is arranged in the inner cavity of the shell, and the vibration sensor is fixedly connected to the base through the second protective layer and the second adhesive layer in sequence.

[0017] As a further scheme of the present application: the data processing unit comprises:

[0018] The signal acquisition module is used for acquiring the first signal and the second signal output by the surface acoustic wave sensing unit and the impact vibration detection unit respectively in the form of wired connection or wireless reading.

[0019] The adaptive compensation module is used for receiving the first signal and the second signal, analyzing vibration compensation requirements in real time, analyzing the interference of vibration on the surface acoustic wave sensor signal based on a pre-trained deep learning model (such as CNN, LSTM, constructed by a deep learning algorithm), and predicting the optimal compensation parameters (such as frequency adjustment amount, voltage compensation value, mechanical deformation amount, etc.) required to offset the interference.

[0020] The intelligent control module is used for receiving the optimal compensation parameters, converting them into specific and executable real-time compensation control signals, and dynamically adjusting the driving frequency or mechanical structure of the surface acoustic wave sensor through the mechanical execution unit.

[0021] The output end of the signal acquisition module is connected to the input end of the adaptive compensation module, and the output end of the adaptive compensation module is connected to the input end of the intelligent control module.

[0022] As a further scheme of the present application: the signal acquisition module is connected to other units and modules through a high-speed data transmission link to ensure real-time processing of the first signal and the second signal.

[0023] As a further scheme of the present application: the piezoelectric actuator in the mechanical execution unit adopts a multi-layer stacking structure to enhance the deformation control capability.

[0024] As a further scheme of the present application: the impact vibration compensation type surface acoustic wave sensor system further comprises a fault diagnosis unit for monitoring the working state of each functional unit in real time and sending a warning signal when an abnormality occurs.

[0025] Compared with the prior art, the beneficial effects of the present application are: the mechanical execution unit in the present application can mechanically correct and displace the surface acoustic wave sensor according to the third signal of the data processing module without affecting the normal operation of the system, realizing the software and hardware coordinated compensation of the impact vibration signal; the first interdigital electrode of the surface acoustic wave sensor is arranged in an embedded manner, which can improve the displacement amplitude of the surface acoustic wave and protect the electrode, realizing performance optimization and reliability improvement. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 It is a flowchart of an impact vibration compensation type surface acoustic wave sensor system.

[0027] Figure 2 It is a schematic diagram of an embedded first interdigital electrode of a surface acoustic wave sensing unit.

[0028] Figure 3 It is a process flowchart of an embedded first interdigital electrode of a surface acoustic wave sensing unit.

[0029] Figure 4 It is a structural schematic diagram of a surface acoustic wave sensing unit and an impact vibration detection unit.

[0030] Figure 5 It is a structural schematic diagram of a mechanical execution unit.

[0031] In the figure: 1 - shell, 2 - shock absorbing film, 3 - surface acoustic wave sensor, 4 - vibration sensor, 5 - first protective layer, 6 - first adhesive layer, 7 - base, 8 - elastic buffer assembly, 9 - second protective layer, 10 - second adhesive layer, 11 - first interdigital electrode, 12 - first piezoelectric substrate, 13 - second interdigital electrode, 14 - second piezoelectric substrate, 15 - electrode plate. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0033] Please refer to Figure 1 An impact vibration compensation type surface acoustic wave sensor system, comprising:

[0034] A surface acoustic wave sensing unit, which uses a surface acoustic wave sensor 3 as a sensitive element to perceive a physical quantity to be measured (such as temperature, gas), and outputs a first signal to a data processing unit;

[0035] An impact vibration detection unit, which is used to acquire external impact vibration signals in real time and perform (high-precision) frequency domain analysis, and transmits the analyzed vibration characteristics (such as frequency, amplitude, phase, etc.) as a second signal to a data processing unit (the output signal is only related to the size of the impact vibration quantity); the environment and installation conditions of the surface acoustic wave sensing unit and the impact vibration detection unit are completely consistent, and the external impact vibrations they suffer are completely the same;

[0036] The data processing unit is configured to receive the first signal and the second signal, identify interference through an intelligent control strategy, and generate a third signal through a deep learning algorithm and output the third signal to the mechanical execution unit, so that the mechanical execution unit dynamically adjusts the driving frequency or the mechanical structure of the surface acoustic wave sensor 3 to offset the influence of external impact vibration on the resonant frequency of the surface acoustic wave sensor 3.

[0037] The mechanical execution unit is configured to receive the third signal, directly regulate the mechanical deformation of the substrate of the surface acoustic wave sensor 3 through the inverse piezoelectric effect of a material (such as a piezoelectric material or a smart material), and realize micron-level vibration compensation.

[0038] The signal output unit is configured to monitor the frequency stability of the surface acoustic wave sensor 3 in real time, output the final stable physical quantity measurement value (such as temperature or gas) and vibration state information, and dynamically evaluate and optimize the vibration compensation effect through a deep learning network.

[0039] The output end of the surface acoustic wave sensing unit is connected to the first input end of the data processing unit, the output end of the impact vibration detection unit is connected to the second input end of the data processing unit, the first output end of the data processing unit is connected to the input end of the mechanical execution unit, the second output end of the data processing unit is connected to the input end of the signal output unit, and the output end of the mechanical execution unit is connected to the input end of the surface acoustic wave sensing unit.

[0040] In specific embodiments, please refer to Figure 1 The data processing unit and the mechanical execution unit are connected through a closed-loop control structure to realize precise execution of the compensation signal.

[0041] The closed-loop control structure (such as containing the feedback of the actual deformation of the surface acoustic wave sensor 3 based on the mechanical execution unit) can monitor the execution effect of the compensation action in real time and feed back the result to the data processing unit. The data processing unit compares the difference between the expected compensation and the actual compensation accordingly and dynamically adjusts the control signal output to the mechanical execution unit. A feedback loop is formed, which can automatically correct the execution error and resist the disturbance inside and outside the system, thereby realizing high-precision and stable compensation effect.

[0042] In this embodiment, please refer to Figure 2 and 3 The first interdigital electrode 11 of the surface acoustic wave sensing unit is embedded, and the first interdigital electrode 11 is installed in the groove of the first piezoelectric substrate 12 through deposition.

[0043] The process flow of the embedded first interdigital electrode 11 is shown in Figure 3 After the first piezoelectric substrate 12 is pretreated, etching is performed, and then photolithography process flow is performed.

[0044] The first interdigital electrode 11 deposited on the traditional surface is prone to falling off, wearing or deforming under severe vibration, resulting in performance attenuation or failure of the surface acoustic wave sensor 3. By designing the structure embedded in the groove of the first piezoelectric substrate 12, the first interdigital electrode 11 can be placed in a protected position. The mechanical strength and reliability of the first interdigital electrode 11 can be significantly improved, effectively resisting the physical stress caused by impact vibration. At the same time, the groove structure can better constrain and guide the surface acoustic wave energy, reduce energy dissipation, thereby improving the sensitivity and stability of the surface acoustic wave sensor 3 while protecting the first interdigital electrode 11, achieving double optimization of reliability and performance.

[0045] In the embodiment, please refer to Figure 4 , the surface acoustic wave sensing unit comprises a shell 1, an elastic buffer assembly 8, a shock absorbing membrane 2, a surface acoustic wave sensor 3, a first protective layer 5 and a first adhesive layer 6 arranged in the inner cavity of the shell 1. One end of the elastic buffer assembly 8 is connected to the inner side of the shell 1, the other end of the elastic buffer assembly 8 is connected to one end of the shock absorbing membrane 2, the other end of the shock absorbing membrane 2 is connected to one end of the surface acoustic wave sensor 3, and the other end of the surface acoustic wave sensor 3 is sequentially fixedly connected to the base 7 through the first protective layer 5 and the first adhesive layer 6.

[0046] High-frequency vibration is easy to cause frequency drift, and instantaneous severe impact may directly cause the internal chip of the surface acoustic wave sensor 3 to crack or the structure to be damaged. A single material or structure is difficult to effectively cope with these two different types of interference. The surface acoustic wave sensing unit provides a hierarchical buffer protection: the elastic buffer assembly 8 mainly absorbs high-frequency vibration energy; the shock absorbing membrane 2 is used to isolate and attenuate the instantaneous impact wave transmitted to the internal chip of the surface acoustic wave sensor 3. Combined with the first protective layer 5 and the first adhesive layer 6, a multi-layer composite protection system is formed, which forms a locally flexible and stable environment inside the solid shell 1, ensuring the integrity and working stability of the core of the surface acoustic wave sensor 3 under harsh working conditions.

[0047] In the embodiment, please refer to Figure 4 , the impact vibration detection unit comprises a vibration sensor 4, a second protective layer 9 and a second adhesive layer 10. The vibration sensor 4 is arranged in the inner cavity of the shell 1, and the vibration sensor 4 is fixedly connected to the base 7 through the second protective layer 9 and the second adhesive layer 10.

[0048] The vibration sensor 4 and the surface acoustic wave sensor 3 are fixed side by side on the same base 7 through the same protective layer and adhesive layer, ensuring that the two units are under the same mechanical boundary conditions, which is the basis for realizing high-precision compensation and ensuring the authenticity and effectiveness of the vibration detection signal as a compensation reference value.

[0049] In the embodiment, please refer to Figure 1 , the data processing unit comprises:

[0050] The signal acquisition module is configured to acquire the first signal and the second signal output by the surface acoustic wave sensing unit and the shock vibration detection unit respectively in the form of wired connection or wireless reading.

[0051] The adaptive compensation module is configured to receive the first signal and the second signal, analyze vibration compensation requirements in real time, analyze the interference of vibration on the signal of the surface acoustic wave sensor 3 based on a pre-trained deep learning model (such as CNN, LSTM, constructed by a deep learning algorithm), and predict the optimal compensation parameters (for example, frequency adjustment amount, voltage compensation value, mechanical deformation amount, etc.) required to offset the interference.

[0052] The intelligent control module is configured to receive the optimal compensation parameters and convert them into specific and executable real-time compensation control signals, and dynamically adjust the driving frequency or mechanical structure of the surface acoustic wave sensor 3 through the mechanical execution unit.

[0053] The output end of the signal acquisition module is connected to the input end of the adaptive compensation module, and the output end of the adaptive compensation module is connected to the input end of the intelligent control module.

[0054] The first signal of the surface acoustic wave sensor 3 and the second signal of the vibration sensor 4 are collected simultaneously, the second signal of the vibration sensor 4 reflects various characteristic data related to vibration, such as acceleration, speed, displacement, and other time domain signals of the vibration, and based on this, a third signal (deformation compensation signal) can be output; at the same time, the first signal subjected to the shock disturbance is compensated by using an algorithm, and the parameters in the compensation algorithm need to be determined by pre-experiment, that is, by setting the shock vibration gradient, the first signal of the surface acoustic wave sensor 3 and the second signal of the vibration sensor under the shock disturbance are calibrated, the correlation coefficient of the two is calculated, and the fourth signal (response signal) of the surface acoustic wave sensor 3 under the condition of no disturbance is measured, based on this, the fifth signal (response signal) of the surface acoustic wave sensor 3 after filtering out the shock disturbance is regressed and predicted, and finally the third signal and the fifth signal are sent to the input end of the intelligent control module.

[0055] In the embodiment, please refer to Figure 1 The signal acquisition module is connected to other units and modules through a high-speed data transmission link to ensure real-time processing of the first signal and the second signal.

[0056] The vibration signal, especially the high-frequency vibration component, changes very quickly. If the data transmission delay is high, the system will obtain lagging vibration information, and the compensation signal generated therefrom cannot keep up with the real-time changes of the vibration, and the compensation effect is questionable. The use of a high-speed data transmission link (such as a high-speed serial bus, LVDS, etc.) ensures very low delay transmission of vibration data from acquisition to processing to decision-making, meeting the stringent real-time requirements of the vibration compensation system, and is the key infrastructure to ensure that the system can achieve real-time compensation.

[0057] In the present embodiment: please refer to Figure 5 The piezoelectric actuator in the mechanical execution unit adopts a multi-layer stacking structure to enhance the deformation control capability.

[0058] The piezoelectric actuator includes a second interdigital electrode 13, a second piezoelectric substrate 14, and an electrode plate 15. The second interdigital electrode 13 is embedded in the second piezoelectric substrate 14, and the electrode plate 15 is directly connected to the second piezoelectric substrate 14. The voltage signal on the electrode plate 15 is regulated by the data processing unit. The piezoelectric material deforms under the action of voltage. This deformation is precisely controlled to adjust the output parameters of the surface acoustic wave sensor 3, thereby achieving physical compensation.

[0059] The multi-layer stacking structure can produce larger displacement and output force under relatively low driving voltage, while maintaining fast response characteristics. This enhances the control ability and precision of the deformation of the surface acoustic wave sensor 3 substrate, enabling the system to cope with larger amplitude and more complex vibration interference.

[0060] In the present embodiment: please refer to Figure 1 The shock and vibration compensation type surface acoustic wave sensor 3 system further includes a fault diagnosis unit for real-time monitoring of the working state of each functional unit and issuing a warning signal when an anomaly occurs.

[0061] The fault diagnosis unit can achieve predictive maintenance and fault safety by self-checking and health monitoring of each unit (such as checking whether the signal is out of limits and whether the execution response meets the expectations). Early warning when an anomaly occurs avoids serious consequences due to hidden faults.

[0062] The working principle of the present application is that the surface acoustic wave sensing unit is used to perceive the physical quantity to be measured (such as temperature, gas) with the surface acoustic wave sensor 3 as a sensitive element, and outputs a first signal to the data processing unit; the impact vibration detection unit is used to obtain external impact vibration signals in real time and perform (high-precision) frequency domain analysis, and the analyzed vibration characteristics (such as frequency, amplitude, phase, etc.) are transmitted to the data processing unit as a second signal (the output signal is only related to the size of the impact vibration quantity); the environment and installation conditions of the surface acoustic wave sensing unit and the impact vibration detection unit are completely consistent, and the external impact vibration they suffer is completely the same; the data processing unit is used to receive the first signal and the second signal, to perform interference identification through intelligent control strategy, and to generate a third signal output to the mechanical execution unit through a deep learning algorithm, so as to dynamically adjust the driving frequency or mechanical structure of the surface acoustic wave sensor 3 through the mechanical execution unit to offset the influence of external impact vibration on the resonant frequency of the surface acoustic wave sensor 3; the mechanical execution unit is used to receive the third signal, to directly regulate and control the mechanical deformation of the surface acoustic wave sensor 3 substrate through the inverse piezoelectric effect of the material (such as piezoelectric material, smart material, etc.), to realize micron-level vibration compensation; the signal output unit is used to monitor the frequency stability of the surface acoustic wave sensor 3 in real time, to output the final stable physical quantity measurement value (such as temperature, gas) and vibration state information; and to dynamically evaluate and optimize the vibration compensation effect through a deep learning network.

[0063] It is apparent to those skilled in the art that the present application is not limited to the details of the foregoing exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered in all respects as illustrative and not restrictive, regardless of what is described in any aspect.

[0064] In addition, it should be understood that although the present specification is described in terms of embodiments, each embodiment does not contain only one independent technical solution, and the description manner of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. An impact vibration compensation type surface acoustic wave sensor system, characterized by comprising: The impact vibration compensation type surface acoustic wave sensor system comprises: a surface acoustic wave sensing unit for sensing a to-be-measured physical quantity with a surface acoustic wave sensor as a sensitive element and outputting a first signal to a data processing unit; an impact vibration detection unit for acquiring an external impact vibration signal in real time and performing frequency domain analysis, and transmitting a vibration feature after the analysis as a second signal to the data processing unit; the surface acoustic wave sensing unit and the impact vibration detection unit are in completely consistent environments and installation conditions, and suffer from the same external impact vibration; a data processing unit for receiving the first signal and the second signal, performing interference identification through an intelligent control strategy, and generating a third signal output to a mechanical execution unit through a deep learning algorithm, so as to dynamically adjust a driving frequency or a mechanical structure of the surface acoustic wave sensor through the mechanical execution unit, so as to offset the influence of the external impact vibration on a resonance frequency of the surface acoustic wave sensor; a mechanical execution unit for receiving the third signal, directly regulating mechanical deformation of a substrate of the surface acoustic wave sensor through an inverse piezoelectric effect of a material, and realizing micron-level vibration compensation; a signal output unit for monitoring frequency stability of the surface acoustic wave sensor in real time, outputting a final stable physical quantity measurement value and vibration state information, and dynamically evaluating and optimizing a vibration compensation effect through a deep learning network; an output end of the surface acoustic wave sensing unit is connected to a first input end of the data processing unit, an output end of the impact vibration detection unit is connected to a second input end of the data processing unit, a first output end of the data processing unit is connected to an input end of the mechanical execution unit, a second output end of the data processing unit is connected to an input end of the signal output unit, and an output end of the mechanical execution unit is connected to an input end of the surface acoustic wave sensing unit.

2. The shock vibration compensation type surface acoustic wave sensor system according to claim 1, characterized by, The first interdigital electrode of the surface acoustic wave sensing unit is embedded, and the first interdigital electrode is installed in a groove of the first piezoelectric substrate in a deposition manner.

3. The shock vibration compensation type surface acoustic wave sensor system according to claim 1 or 2, characterized by, The surface acoustic wave sensing unit comprises a shell, an elastic buffer assembly, a vibration damping membrane, a surface acoustic wave sensor, a first protective layer and a first adhesive layer are arranged in an inner cavity of the shell, one end of the elastic buffer assembly is connected to an inner side of the shell, the other end of the elastic buffer assembly is connected to one end of the vibration damping membrane, the other end of the vibration damping membrane is connected to one end of the surface acoustic wave sensor, and the other end of the surface acoustic wave sensor is sequentially fixedly connected to the base through the first protective layer and the first adhesive layer.

4. The shock vibration compensation type SAW sensor system according to claim 3, characterized by The impact vibration detection unit comprises a vibration sensor, a second protective layer and a second adhesive layer, the vibration sensor is arranged in the inner cavity of the shell, and the vibration sensor is sequentially fixedly connected to the base through the second protective layer and the second adhesive layer.

5. The shock vibration compensating type SAW sensor system according to claim 1, wherein The data processing unit comprises: a signal acquisition module for acquiring the first signal and the second signal output by the surface acoustic wave sensing unit and the impact vibration detection unit in a wired connection or wireless reading form; an adaptive compensation module for receiving the first signal and the second signal, analyzing vibration compensation requirements in real time, analyzing vibration interference on the surface acoustic wave sensor signal based on a pre-trained deep learning model, and predicting optimal compensation parameters required to offset the interference. The intelligent control module is used for receiving the optimal compensation parameters, converting them into specific and executable real-time compensation control signals, and dynamically adjusting the driving frequency or mechanical structure of the surface acoustic wave sensor through the mechanical execution unit. The output end of the signal acquisition module is connected to the input end of the adaptive compensation module, and the output end of the adaptive compensation module is connected to the input end of the intelligent control module.

6. The shock vibration compensation type SAW sensor system according to claim 5, wherein The signal acquisition module is connected to other units and modules through a high-speed data transmission link to ensure real-time processing of the first signal and the second signal.

7. The shock vibration compensating type SAW sensor system according to claim 1, wherein The piezoelectric actuator in the mechanical execution unit adopts a multi-layer stacking structure to enhance the deformation control capability.

8. The shock vibration compensating type SAW sensor system according to claim 1, wherein The impact vibration compensation type surface acoustic wave sensor system further comprises a fault diagnosis unit for monitoring the working state of each functional unit in real time and sending a warning signal when an anomaly occurs.

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