Semiconductor equipment air tightness detection tool

Abstract

The invention relates to an air tightness detection tool, belongs to the technical field of air tightness detection, and particularly relates to a semiconductor equipment air tightness detection tool which comprises a supporting floor, a fixed base is fixedly mounted on the top wall surface of the supporting floor, a driving assembly is arranged at the top of the fixed base, and a detection assembly is arranged at the top of the supporting floor; two pushing assemblies are arranged at the top of the supporting floor; according to the invention, a to-be-detected device is placed in the detection box, the output end of the servo motor drives the eccentric rod 1 and the eccentric rod 2 to rotate, one side of the detection box is sealed, the interior of the detection box is pressurized, the sealing performance of the device is detected, the other side of the detection box is unsealed, the sealing cover plate is separated from the detection box, and one side of the detection box is opened. At the moment, the equipment inside can be taken out; the problem that an existing air tightness detection tool is low in detection efficiency is solved.

Description

Technical Field

[0001] This invention relates to the field of airtightness testing technology, and in particular to an airtightness testing fixture for semiconductor equipment. Background Technology

[0002] In the semiconductor manufacturing industry, the airtightness of equipment directly affects the cleanliness of process chambers, the stability of the gas environment, and the long-term reliability of the equipment. Currently, the differential pressure method is commonly used to test the airtightness of semiconductor equipment. This type of equipment typically consists of a pressure source, a sealed chamber, and a testing unit.

[0003] However, existing testing fixtures still have significant shortcomings: First, most devices rely on manual operation or independent power sources in the clamping, sealing, and pressure control stages, resulting in low efficiency and difficulty in ensuring consistent operation; second, common single-chamber, single-path structures cannot achieve alternating pressurization and evacuation, leading to poor testing continuity and low work efficiency; third, the pressing and separating of traditional sealing caps are often completed by linear cylinders or manually, lacking automated design linked to the pressure generation process, making operation cumbersome and resulting in low testing efficiency. Summary of the Invention

[0004] To address the aforementioned technical problems, this invention proposes a semiconductor equipment airtightness testing fixture. The equipment to be tested is placed inside a testing chamber. The output of a servo motor drives eccentric rod one and eccentric rod two to rotate, sealing one side of the testing chamber while simultaneously pressurizing its interior to test the airtightness of the equipment. The other side of the testing chamber is then unsealed, and the sealing cover separates from the testing chamber, opening one side of the testing chamber. At this point, the equipment inside can be removed.

[0005] The technical solution for achieving the objective of this invention is as follows: a semiconductor equipment airtightness testing fixture, comprising a support base, a fixed base fixedly installed on the top wall of the support base, and a driving assembly provided on the top of the fixed base, the driving assembly comprising:

[0006] A servo motor is fixedly mounted on the top of a fixed base. A transmission box is fixedly mounted on the top wall of the fixed base. A transmission shaft is rotatably mounted inside the transmission box and is fixedly connected to the output end of the servo motor.

[0007] There are four eccentric rods in total. The four eccentric rods are located in the middle of the side wall of the transmission shaft. There is a gap between two adjacent eccentric rods. A connecting rod is provided between two adjacent eccentric rods. The connecting rod is rotatably mounted on the side wall of the eccentric rod. A piston plate is rotatably mounted on the end of the connecting rod away from the eccentric rod.

[0008] There are four eccentric rods in total. The four eccentric rods are located at both ends of the side wall of the transmission shaft. There is a gap between two adjacent eccentric rods. A connecting rod is provided between two adjacent eccentric rods. The connecting rod is rotatably mounted on the side wall of the eccentric rod. A piston plate is rotatably mounted on the end of the connecting rod away from the eccentric rod.

[0009] A detection component is installed on top of the supporting floor;

[0010] Two push-up components are provided at the top of the supporting floor.

[0011] In some embodiments, the angles between the four eccentric rods 1 located on the drive shaft are all equal, the phase difference between the two eccentric rods 2 located at both ends of the drive shaft is 180 degrees, and the two eccentric rods 2 at both ends of the drive shaft are offset by 90 degrees from the adjacent eccentric rod 1.

[0012] In some embodiments, the detection component includes:

[0013] Two air storage boxes are fixedly installed on the top of the fixed base, and one side of each air storage box is fixed to the transmission box. Two piston plates are slidably installed inside the two air storage boxes respectively. Ventilation pipes are fixedly installed at the ends of the side walls of the two air storage boxes that are far apart from each other.

[0014] The testing box is located on top of a supporting floor. A support rod is fixedly installed at the bottom of the testing box, and the support rod is fixedly installed on top of a transmission box. An integrally formed partition plate is installed inside the testing box. The top ends of two vent pipes are fixedly installed on the side wall of the testing box, and the top ends of the two vent pipes are located on both sides of the partition plate. Pressure sensors are fixedly installed on both sides of the partition plate. Sealing covers are provided on both sides of the testing box. Multiple sealing protrusions are fixedly installed equidistantly on the circumference of both sides of the testing box. Multiple sealing grooves are formed on the inner side wall of the sealing cover plate, and the multiple sealing grooves are aligned with the adjacent sealing protrusions. A wrapping groove is formed on the inner side wall of the sealing cover plate, and the inner side wall of the wrapping groove can fit tightly against the outer side wall of the testing box.

[0015] In some embodiments, the push component includes:

[0016] The container is located at the end of the sealing cover away from the detection box. A push rod is slidably installed on the side of the container near the sealing cover. The push rod is fixedly connected to the side wall of the adjacent sealing cover. Plates are installed on the side walls of the container. Both plates are fixedly installed on the top wall of the supporting floor.

[0017] An oil reservoir is fixedly installed on the side wall of the transmission box and is connected to the interior of the transmission box. A piston plate is slidably installed inside the oil reservoir. The oil reservoir is filled with hydraulic oil. An oil pipe is fixedly installed on the top wall of the oil reservoir. The end of the oil pipe away from the oil reservoir is fixedly connected to the side wall of the receiving box away from the sealing cover. The receiving box has a receiving cavity inside. A limit plate is slidably installed inside the receiving cavity. The limit plate is fixedly installed on the side wall of the adjacent push rod.

[0018] In some embodiments, both push components are internally provided with a reinforcement component, the reinforcement component including:

[0019] The connecting groove is located inside the push rod. A diversion groove is located inside the sealing cover, and the diversion groove communicates with the connecting groove. A guide groove is located on the side wall of the limiting plate. A corner groove is located on the side wall of the receiving box, aligned with the connecting groove and the guide groove. A push rod is fixedly installed on the inner side wall of the corner groove, aligned with the guide groove. A sealing slide plate is located inside the guide groove, its side wall tightly fitting against the side wall of the guide groove near the push rod. A return spring is located inside the guide groove, its two ends fixedly connected to the guide groove and the sealing slide plate. A rubber ring is fixedly installed on the inner side wall of the wrapping groove, its interior communicating with the diversion groove. A reinforcement groove is located on the side wall of the detection box, aligned with the position of the rubber ring.

[0020] In some embodiments, the reinforcement component further includes:

[0021] The limiting slide plate is fixedly installed on the side wall of the sealing slide plate and slidably installed inside the guide groove.

[0022] In some embodiments, a pressure measuring component is provided on the side wall of the gas storage tank, the pressure measuring component comprising:

[0023] The measuring slot is located on the side wall of the air storage box away from the transmission box. A viewing plate is fixedly installed on the inner side wall of the measuring slot. Scales are laid on the side wall of the viewing plate. A ventilation slot is provided at the bottom of the inner side wall of the measuring slot, which communicates with the interior of the air storage box. Two magnetic plates are installed inside the measuring slot. The top magnetic plate is fixedly installed on the inner top wall of the measuring slot, and the bottom magnetic plate is slidably installed on the side wall between the measuring slot and the viewing plate. The magnetic poles of the two magnetic plates are the same on the side closest to each other.

[0024] A positioning support plate is fixedly installed on the inner wall of the measuring groove, and the positioning support plate is located at the top of the ventilation groove.

[0025] In some embodiments, the pressure measuring component further includes:

[0026] An exhaust port is provided on the side wall of the air storage box; when the sealing cover has not yet sealed one side of the test box, the air inside the air storage box can be discharged to the outside through the exhaust port.

[0027] In some embodiments, a positioning component is provided inside the sealing cover, the positioning component including:

[0028] A drive motor is fixedly installed on the inner side wall of the sealing cover. An adjusting screw is fixedly installed at the output end of the drive motor. The top end of the adjusting screw is rotatably installed inside the sealing cover through a bearing. The two ends of the side wall of the adjusting screw have opposite thread directions, and both ends of the adjusting screw are threaded with fixing plates.

[0029] In some embodiments, the positioning component further includes:

[0030] The positioning slide is formed on the inner side wall of the sealing cover plate. Two positioning sliders are slidably installed inside the positioning slide, and two fixing plates are respectively fixedly installed on the side wall of the positioning sliders.

[0031] The significant advantages of this invention compared to existing technologies are:

[0032] Firstly, in this invention, the device to be tested is placed inside the testing chamber. Since the four eccentric rods are at the same angle, and two air storage boxes are located on the left and right sides of the transmission box, and a partition plate divides the interior of the testing chamber into two parts, the air storage boxes are connected to the interior of the testing chamber via a vent pipe. When the output of the servo motor drives the transmission shaft to rotate, the eccentric rods one and two on the side wall of the transmission shaft will rotate synchronously. Driven by the two connecting rods, air from one side of the air storage box is sent into the interior of the testing chamber through the vent pipe, while the other side of the air storage box draws air from the testing chamber into its interior. Driven by the two eccentric rods... Hydraulic oil stored in the reservoir is either fed into the receiving tank or pumped back into the reservoir. The hydraulic oil fed into the receiving tank pushes a push rod towards the testing box, causing a sealing cover to be placed on the side wall of the testing box, sealing one side of the testing box. At the same time, pressure is applied to the inside of the testing box to test the airtightness of the equipment. Conversely, the hydraulic oil is pumped back from the reservoir, causing the push rod to retract into the receiving box. This separates the sealing cover from the testing box, opening one side of the testing box, allowing the equipment inside to be removed. This method solves the problem of low testing efficiency in existing airtightness testing fixtures.

[0033] Secondly, in this invention, when the eccentric rod 2 rotates 90 degrees around the drive shaft, it delivers hydraulic oil into the housing, pushing the push rod to move, causing the sealing cover to seal one side of the test box. Since the limiting plate is already in contact with the inner wall of the housing, the push rod will abut against the side wall of the sealing slide, causing the sealing slide to separate from the inner wall of the guide groove. When the eccentric rod 2 rotates another 90 degrees around the drive shaft, the hydraulic oil inside the housing enters the connecting groove through the inside of the guide groove and the corner groove inside the housing, and finally enters the inside of the rubber ring through the diversion groove. The rubber ring expands as a result, filling the inside of the reinforcing groove, ensuring the stability of the sealing cover, and improving the sealing effect of the sealing cover on the test box, preventing the air inside the test box from leaking out.

[0034] Thirdly, in this invention, when the piston plate conveys the gas storage tank to the detection box, the gas pressure inside the gas storage tank increases. Since the inside of the measuring slot is connected to the inside of the gas storage tank through the ventilation slot, as the gas pressure inside the gas storage tank increases, the magnetic plate at the bottom will move upward. The magnetic poles on the side of the two magnetic plates that are close to each other are the same. With the repulsive force between the two magnetic plates, the gas pressure inside the gas storage tank is made visible, which is convenient for the staff to check.

[0035] Fourthly, this invention restricts the position of the fixed clamping plate through the cooperation of the positioning groove and the positioning slider, so that the fixed clamping plate can slide up and down stably; by driving the adjusting screw to rotate through the output end of the drive motor, the two fixed clamping plates move to the side closer to each other or to the side further away as the adjusting screw rotates, so as to fix the equipment that needs to be tested. Attached Figure Description

[0036] The present invention will be further explained below with reference to the accompanying drawings and embodiments:

[0037] Figure 1 This is a three-dimensional schematic diagram of the overall structure of the present invention;

[0038] Figure 2 This is a schematic diagram of the internal structure of the gas storage tank of the present invention;

[0039] Figure 3 This is a schematic diagram of the internal structure of the transmission box of the present invention;

[0040] Figure 4 This is a schematic diagram of the internal structure of the testing box of the present invention;

[0041] Figure 5 This is a schematic diagram of the internal structure of the sealing cover plate of the present invention;

[0042] Figure 6 This is the present invention. Figure 5 Enlarged view of point A in the middle;

[0043] Figure 7This is the present invention. Figure 2 Enlarged diagram of point B in the middle.

[0044] Explanation of reference numerals in the attached figures:

[0045] 11. Supporting floor; 12. Fixed base; 13. Support rod; 14. Mounting plate; 21. Servo motor; 22. Transmission box; 23. Transmission shaft; 24. Eccentric rod one; 25. Connecting rod one; 26. Piston plate one; 27. Eccentric rod two; 28. Connecting rod two; 29. ​​Piston plate two; 31. Air storage box; 32. Vent pipe; 33. Detection box; 34. Divider plate; 35. Pressure sensor; 36. Sealing cover plate; 37. Sealing tooth; 38. Sealing groove; 39. Encapsulation groove; 41. Receiving box; 42. Push 43. Rod; 44. Receiving cavity; 45. Limiting plate; 46. Oil reservoir; 51. Oil pipe; 52. Connecting groove; 53. Diverting groove; 54. Guiding groove; 55. Sealing slide plate; 56. Limiting slide plate; 57. Return spring; 58. Top rod; 59. Rubber ring; 60. Reinforcing groove; 61. Measuring groove; 62. Transparent plate; 63. Vent groove; 64. Positioning support plate; 65. Magnetic plate; 66. Exhaust hole; 71. Positioning slide groove; 72. Positioning slider; 73. Drive motor; 74. Adjusting screw; 75. Fixing clamp. Detailed Implementation

[0046] The present invention will now be described in detail, and the technical solutions in the embodiments of the present invention will be clearly and completely described. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0047] This invention provides an improved semiconductor device hermeticity testing fixture. The technical solution of this invention is as follows:

[0048] like Figures 1-7 As shown, a semiconductor device airtightness testing fixture includes a support base 11, a fixed base 12 is fixedly installed on the top wall of the support base 11, and a drive assembly is provided on the top of the fixed base 12. The drive assembly includes a servo motor 21, an eccentric rod 24 and an eccentric rod 27.

[0049] The servo motor 21 is fixedly mounted on the top wall of the fixed base 12. The top wall of the fixed base 12 is fixedly mounted with a transmission box 22. The transmission box 22 is rotatably mounted with a transmission shaft 23 inside. The transmission shaft 23 is fixedly connected to the output end of the servo motor 21.

[0050] There are four eccentric rods 24 in total. The four eccentric rods 24 are located in the middle of the side wall of the transmission shaft 23. There is a certain gap between two adjacent eccentric rods 24. A connecting rod 25 is provided between two adjacent eccentric rods 24. The connecting rod 25 is rotatably mounted on the side wall of the eccentric rod 24. A piston plate 26 is rotatably mounted on the end of the connecting rod 25 away from the eccentric rod 24. The angles between the four eccentric rods 24 on the transmission shaft 23 are all equal.

[0051] There are four eccentric rods 27. The four eccentric rods 27 are located at both ends of the side wall of the transmission shaft 23. There is a certain gap between two adjacent eccentric rods 27. A connecting rod 28 is set between two adjacent eccentric rods 27. The connecting rod 28 is rotatably mounted on the side wall of the eccentric rod 27. A piston plate 29 is rotatably mounted on the end of the connecting rod 28 away from the eccentric rod 27. The two eccentric rods 27 located at both ends of the transmission shaft 23 are 180 degrees out of phase, and the two eccentric rods 27 at both ends of the transmission shaft 23 are offset by 90 degrees from the adjacent eccentric rod 24.

[0052] A detection assembly is provided on the top of the supporting floor 11. The detection assembly includes an air storage box 31 and a detection box 33.

[0053] There are two air storage boxes 31. Both air storage boxes 31 are fixedly installed on the top wall of the fixed base 12, and the two air storage boxes 31 are fixedly installed on the left and right sides of the transmission box 22. The two air storage boxes 31 are connected to the inside of the transmission box 22. The two piston plates 26 are slidably installed inside the two air storage boxes 31 respectively. Ventilation pipes 32 are fixedly installed at the ends of the side walls of the two air storage boxes 31 that are far apart.

[0054] The test box 33 is set on top of the support floor 11. A support rod 13 is fixedly installed on the bottom wall of the test box 33. The support rod 13 is fixedly installed on the top wall of the transmission box 22. A partition plate 34 is fixedly installed on the inner side wall of the test box 33. The partition plate 34 is located in the middle of the inside of the test box 33, which facilitates dividing the inside of the test box 33 into two parts. The top ends of the two vent pipes 32 are fixedly installed on the side wall of the test box 33, and the top ends of the two vent pipes 32 are respectively located on both sides of the partition plate 34. Pressure sensors 35 are fixedly installed on both sides of the partition plate 34. Sealing covers 36 are provided on both sides of the test box 33. Multiple sealing protrusions 37 are fixedly installed equidistantly on the circumference of both sides of the test box 33. Multiple sealing grooves 38 are opened on the inner side wall of the sealing cover 36. The multiple sealing grooves 38 are respectively aligned with the adjacent sealing protrusions 37. A wrapping groove 39 is opened on the inner side wall of the sealing cover 36. The inner side wall of the wrapping groove 39 can fit tightly with the outer side wall of the test box 33.

[0055] The top of the supporting floor 11 is provided with two push components, which include a receiving box 41 and an oil storage tank 45;

[0056] The container 41 is located at the end of the sealing cover 36 away from the detection box 33. A push rod 42 is slidably installed on the side wall of the container 41 near the sealing cover 36. The push rod 42 is fixedly connected to the side wall of the adjacent sealing cover 36. Plates 14 are installed on the side wall of the container 41. Both plates 14 are fixedly installed on the top wall of the support floor 11.

[0057] The oil reservoir 45 is fixedly installed on the side wall of the transmission box 22, and the oil reservoir 45 is connected to the interior of the transmission box 22. The piston plate 29 is slidably installed inside the oil reservoir 45. The oil reservoir 45 is filled with hydraulic oil. An oil pipe 46 is fixedly installed on the top wall of the oil reservoir 45. The end of the oil pipe 46 away from the oil reservoir 45 is fixedly connected to the side wall of the receiving box 41 away from the sealing cover plate 36. The receiving box 41 has a receiving cavity 43 inside. A limit plate 44 is slidably installed inside the receiving cavity 43. The limit plate 44 is fixedly installed on the side wall of the adjacent push rod 42. The equipment to be tested is placed into the testing box. Inside the detection box 33, since the four eccentric rods 24 are at the same angle and the two air storage boxes 31 are located on the left and right sides of the transmission box 22, and the partition plate 34 divides the interior of the detection box 33 into two parts, the air storage boxes 31 and the interior of the detection box 33 are connected by the air pipe 32. When the output end of the servo motor 21 drives the transmission shaft 23 to rotate, the eccentric rods 24 and 27 on the side wall of the transmission shaft 23 will rotate synchronously. Driven by the two connecting rods 25, the air inside one air storage box 31 is sent into the interior of the detection box 33 through the air pipe 32, and the air storage box 31 on the other side draws the air inside the detection box 33. Inside, driven by the two eccentric rods 24, hydraulic oil stored in the reservoir 45 is either sent into the receiving tank 41 or pumped back into the reservoir 45. The hydraulic oil sent into the receiving tank 41 pushes the push rod 42 closer to the detection box 33, causing the sealing cover 36 to cover the side wall of the detection box 33, sealing one side of the detection box 33. Meanwhile, the pumped-back hydraulic oil from the reservoir 45 causes the push rod 42 to retract into the receiving tank 41, thus separating the sealing cover 36 from the detection box 33. One side of the detection box 33 is then opened, allowing the equipment inside to be removed. Because there is a 90-degree angle difference between eccentric rod 27 and eccentric rod 24, when eccentric rod 27 rotates 90 degrees, the sealing cover 36 seals one end of the test box 33 or draws the air inside the test box 33 back into the air storage box 31. When eccentric rod 27 rotates 90 degrees again, the air inside the air storage box 31 is sent into the sealed side of the test box 33 to pressurize the inside of the test box 33 and test the sealing performance of the equipment inside the test box 33. The sealing cover 36 on the side where the air inside the test box 33 is drawn out separates from the test box 33, completing the separation of the sealing cover 36 from the test box 33.

[0058] like Figures 1-6 As shown, in one embodiment, both push components are provided with a reinforcing component inside, the reinforcing component including a connecting groove 51 and a limiting slide plate 55;

[0059] A connecting groove 51 is formed inside the push rod 42. A diversion groove 52 is formed inside the sealing cover plate 36, which communicates with the connecting groove 51. A guide groove 53 is formed on the side wall of the limiting plate 44. A corner groove is formed on the side wall of the receiving box 41, which is aligned with the connecting groove 51 and the guide groove 53. A push rod 57 is fixedly installed on the inner side wall of the corner groove, which is aligned with the guide groove 53. A sealing slide plate 54 is provided inside the guide groove 53. The side wall of the sealing plate 54 is tightly fitted to the side wall of the guide channel 53 near the push rod 42. A return spring 56 is installed inside the guide channel 53, with both ends of the return spring 56 fixedly connected to the inner side wall of the guide channel 53 and the side wall of the sealing plate 54 away from the push rod 42. A rubber ring 58 is fixedly installed on the inner side wall of the wrapping groove 39, and the interior of the rubber ring 58 communicates with the diversion groove 52. A reinforcing groove 59 is provided on the side wall of the detection box 33, and the reinforcing groove 59 is connected to the rubber ring 58. The rubber ring 58 is aligned. When the eccentric rod 27 rotates 90 degrees around the drive shaft 23, it pushes the push rod 42 to move by supplying hydraulic oil into the housing 41, so that the sealing cover 36 seals one side of the test box 33. When the limiting plate 44 is already in contact with the inner wall of the housing 41, the push rod 57 will abut against the side wall of the sealing slide plate 54, so that the sealing slide plate 54 is separated from the inner wall of the guide groove 53. When the eccentric rod 27 rotates 90 degrees around the drive shaft 23 again, the hydraulic oil inside the housing 41 enters the connecting groove 51 through the inside of the guide groove 53 and the corner groove inside the housing 41, and finally enters the inside of the rubber ring 58 through the diversion groove 52. The rubber ring 58 expands as a result, filling the inside of the reinforcing groove 59, ensuring the stability of the sealing cover 36, and improving the sealing effect of the sealing cover 36 on the test box 33, preventing the air inside the test box 33 from leaking out.

[0060] The limiting slide plate 55 is fixedly installed on the side wall of the sealing slide plate 54, and the limiting slide plate 55 is slidably installed inside the guide channel 53; the position of the sealing slide plate 54 is restricted by the limiting slide plate 55, so that the limiting slide plate 55 can slide smoothly inside the guide channel 53.

[0061] like Figures 1-7 As shown, in one embodiment, a pressure measuring component is provided on the side wall of the gas storage tank 31. The pressure measuring component includes a measuring groove 61, a positioning support plate 64, and an exhaust port 66.

[0062] The measuring groove 61 is located on the side wall of the air storage box 31 away from the transmission box 22. A viewing plate 62 is fixedly installed on the inner side wall of the measuring groove 61. Scale markings are laid on the side wall of the viewing plate 62. A ventilation groove 63 is provided at the bottom of the inner side wall of the measuring groove 61, communicating with the interior of the air storage box 31. Two magnetic plates 65 are installed inside the measuring groove 61. The top magnetic plate 65 is fixedly installed on the inner top wall of the measuring groove 61, while the bottom magnetic plate 65 is slidably installed on the side wall between the measuring groove 61 and the viewing plate 62. On the top, the magnetic poles on the side of the two magnetic plates 65 that are close to each other are the same; when the piston plate 26 conveys the inside of the air storage box 31 to the inside of the detection box 33, the air pressure inside the air storage box 31 increases. Since the inside of the measuring groove 61 is connected to the inside of the air storage box 31 through the ventilation groove 63, as the air pressure inside the air storage box 31 increases, the magnetic plate 65 at the bottom will move upward, and the magnetic poles on the side of the two magnetic plates 65 that are close to each other are the same. With the repulsive force between the two magnetic plates 65, the air pressure inside the air storage box 31 is visualized, which is convenient for the staff to check.

[0063] The positioning support plate 64 is fixedly installed on the inner side wall of the measuring groove 61, and the positioning support plate 64 is located at the top of the ventilation groove 63. The positioning support plate 64 restricts the space inside the measuring groove 61 and restricts the sliding range of the magnetic plate 65 located at the bottom, so as to prevent the air entering the measuring groove 61 through the ventilation groove 63 from being unable to push the magnetic plate 65 located at the bottom to move upward.

[0064] The vent 66 is located on the side wall of the air storage box 31. When the sealing cover 36 has not yet sealed one side of the test box 33, the air inside the air storage box 31 can be discharged outward through the vent 66 to avoid the situation where the air pressure inside the test box 33 is too high, making it difficult for the sealing cover 36 to seal one side of the test box 33.

[0065] like Figure 5 As shown, in one embodiment, a positioning component is provided inside the sealing cover plate 36, the positioning component including a drive motor 73 and a positioning slide 71;

[0066] The drive motor 73 is fixedly installed on the inner side wall of the sealing cover plate 36. An adjusting screw 74 is fixedly installed at the output end of the drive motor 73. The top end of the adjusting screw 74 is rotatably installed inside the sealing cover plate 36 through a bearing. The two ends of the side wall of the adjusting screw 74 have opposite thread directions. Fixed clamping plates 75 are threadedly installed at both ends of the adjusting screw 74. The drive motor 73 drives the adjusting screw 74 to rotate. The two fixed clamping plates 75 move to the side closer to each other or to the side farther away as the adjusting screw 74 rotates, which facilitates the fixing of the equipment to be tested.

[0067] The positioning groove 71 is formed on the inner side wall of the sealing cover plate 36. Two positioning sliders 72 are slidably installed inside the positioning groove 71, and two fixing plates 75 are respectively fixedly installed on the side wall of the positioning sliders 72. Through the cooperation of the positioning groove 71 and the positioning sliders 72, the position of the fixing plates 75 is restricted, so that the fixing plates 75 can slide up and down stably.

[0068] The specific working method is as follows: The equipment to be tested is placed inside the testing chamber 33. The output of the drive motor 73 drives the adjusting screw 74 to rotate. The two fixing plates 75 move towards one side or away from the other as the adjusting screw 74 rotates, facilitating the fixation of the equipment to be tested. Since the four eccentric rods 24 have the same angle, and the two air storage boxes 31 are located on the left and right sides of the transmission box 22, and the partition plate 34 divides the interior of the testing chamber 33 into two parts, the air storage box 31 and the testing chamber 33 are connected by the vent pipe 32. The internal structure of the test chamber 33 is interconnected. When the output of the servo motor 21 drives the transmission shaft 23 to rotate, the eccentric rods 24 and 27 on the side wall of the transmission shaft 23 will rotate synchronously. Driven by the two connecting rods 25, the air inside one air storage tank 31 is sent into the interior of the test chamber 33 through the vent pipe 32, and the air storage tank 31 on the other side draws the air inside the test chamber 33 into its interior. Driven by the two eccentric rods 24, the hydraulic oil stored in the oil storage tank 45 is sent into the interior of the receiving tank 41, or the receiving tank 41 is... The hydraulic oil inside is drawn back into the reservoir 45, and the hydraulic oil supplied into the receiving tank 41 pushes the push rod 42 closer to the detection box 33, causing the sealing cover 36 to cover the side wall of the detection box 33, sealing one side of the detection box 33. Meanwhile, the hydraulic oil inside the reservoir 45 is drawn back, causing the push rod 42 to retract into the receiving tank 41. The sealing cover 36 then separates from the detection box 33, opening one side of the detection box 33. At this point, the equipment inside can be removed. Because there is a 90-degree angle difference between the eccentric rod 27 and the eccentric rod 24... When the eccentric rod 27 rotates 90 degrees, the sealing cover 36 seals one end of the test box 33 or draws the air inside the test box 33 back into the air storage box 31. When the eccentric rod 27 rotates 90 degrees again, the air inside the air storage box 31 is sent into the sealed side of the test box 33 to pressurize the inside of the test box 33 and test the sealing performance of the equipment inside the test box 33. The sealing cover 36 on the side where the air inside the test box 33 is drawn off separates from the test box 33, completing the separation of the sealing cover 36 from the test box 33.

[0069] The technical means disclosed in this invention are not limited to those described above, but also include technical solutions composed of equivalent substitutions of the above technical features. Matters not covered in this invention are common knowledge to those skilled in the art.

Claims

1. A semiconductor device hermeticity inspection tool comprising a support floor (11), characterized in that: The top wall of the support floor (11) is fixedly installed with a fixed base (12), the top of the fixed base (12) is provided with a driving assembly, the driving assembly comprises: A servo motor (21) is fixedly installed on the top of the fixed base (12), the top wall of the fixed base (12) is fixedly installed with a transmission box (22), the inside of the transmission box (22) is rotatably installed with a transmission shaft (23), the transmission shaft (23) is fixedly connected with the output end of the servo motor (21); Four eccentric rods one (24) are arranged at the middle positions of the side walls of the transmission shaft (23), gaps are arranged between the adjacent two eccentric rods one (24), connecting rods one (25) are arranged between the adjacent two eccentric rods one (24), the connecting rods one (25) are rotatably installed on the side walls of the eccentric rods one (24), piston plates one (26) are rotatably installed on the ends of the connecting rods one (25) away from the eccentric rods one (24); Four eccentric rods two (27) are arranged at the two ends of the side walls of the transmission shaft (23), gaps are arranged between the adjacent two eccentric rods two (27), connecting rods two (28) are arranged between the adjacent two eccentric rods two (27), the connecting rods two (28) are rotatably installed on the side walls of the eccentric rods two (27), piston plates two (29) are rotatably installed on the ends of the connecting rods two (28) away from the eccentric rods two (27); The top of the support floor (11) is provided with a detection assembly; The top of the support floor (11) is provided with two pushing assemblies.

2. The semiconductor device hermeticity inspection tool of claim 1, wherein: The angles between the four eccentric rods one (24) on the transmission shaft (23) are equal, the phases of the two eccentric rods two (27) at the two ends of the transmission shaft (23) are different by one hundred and eighty degrees, and the two eccentric rods two (27) at the two ends of the transmission shaft (23) are offset by ninety degrees from the adjacent eccentric rods one (24).

3. The semiconductor device hermeticity inspection tool of claim 1, wherein: The detection assembly comprises: Two gas storage tanks (31) are fixedly installed on the top of the fixed base (12), and the side of the two gas storage tanks (31) is fixed with the transmission box (22), the two piston plates one (26) are slidably installed in the two gas storage tanks (31), and the side walls of the two gas storage tanks (31) are fixedly installed with air pipes (32) away from each other; The detection box (33) is arranged on the top of the support floor (11), the bottom of the detection box (33) is fixedly installed with the support rod (13), the support rod (13) is fixedly installed on the top of the transmission box (22), the inside of the detection box (33) is provided with an integrated partition plate (34), the top of the two air pipes (32) is fixedly installed on the side wall of the detection box (33), and the top of the two air pipes (32) is located on the two sides of the partition plate (34) respectively, the two side walls of the partition plate (34) are fixedly installed with the pressure sensor (35), the two sides of the detection box (33) are provided with the sealing cover plate (36), the circumferential side wall of the detection box (33) is fixedly installed with a plurality of sealing convex teeth (37), a plurality of sealing grooves (38) are formed in the inner side wall of the sealing cover plate (36), the plurality of sealing grooves (38) are aligned with the adjacent sealing convex teeth (37) respectively, and the inner side wall of the sealing cover plate (36) is provided with a wrapping groove (39), and the inner side wall of the wrapping groove (39) can be tightly fitted with the outer side wall of the detection box (33).

4. The semiconductor device hermeticity inspection tool of claim 3, wherein: The pushing assembly comprises: The containing box (41) is located away from the detection box (33) at one end of the sealing cover plate (36), the push rod (42) is slidingly installed on the side of the containing box (41) close to the sealing cover plate (36), the push rod (42) is fixedly connected with the side wall of the adjacent sealing cover plate (36), and the side wall of the containing box (41) is provided with the mounting plate (14); both the two mounting plates (14) are fixedly installed on the top wall surface of the support floor (11); The oil storage tank (45) is fixedly installed on the side wall of the transmission box (22), the oil storage tank (45) is in communication with the inside of the transmission box (22), the piston plate two (29) is slidingly installed in the inside of the oil storage tank (45), the inside of the oil storage tank (45) is filled with hydraulic oil, the top wall surface of the oil storage tank (45) is fixedly installed with the oil pipe (46), one end of the oil pipe (46) away from the oil storage tank (45) is fixedly connected with the side wall of the containing box (41) away from the sealing cover plate (36), and the inside of the containing box (41) is provided with the containing cavity (43), the containing cavity (43) is slidingly installed with the limiting plate (44), and the limiting plate (44) is fixedly installed on the side wall of the adjacent push rod (42).

5. The semiconductor device hermeticity inspection tool of claim 4, wherein: The inside of the two pushing assemblies is provided with a reinforcing assembly, and the reinforcing assembly comprises: The communication groove (51) is arranged in the inside of the push rod (42), the inside of the sealing cover plate (36) is provided with the shunt groove (52), the shunt groove (52) is communicated with the communication groove (51), the side wall of the limiting plate (44) is provided with the flow guide groove (53), the side wall of the containing box (41) is provided with the corner groove, the corner groove is aligned with the communication groove (51) and the flow guide groove (53), the inner side wall of the corner groove is fixedly installed with the top rod (57), the top rod (57) is aligned with the flow guide groove (53), the inside of the flow guide groove (53) is provided with the sealing sliding plate (54), the side wall of the sealing sliding plate (54) is tightly combined with the side wall of the flow guide groove (53) close to the push rod (42), the inside of the flow guide groove (53) is provided with the reset spring (56), the both ends of the reset spring (56) are fixedly connected with the flow guide groove (53) and the sealing sliding plate (54), the inner side wall of the wrapping groove (39) is fixedly installed with the rubber ring (58), the inside of the rubber ring (58) is communicated with the shunt groove (52), the side wall of the detection box (33) is provided with the reinforcing groove (59), and the reinforcing groove (59) is aligned with the position of the rubber ring (58).

6. The semiconductor device hermeticity inspection tool of claim 5, wherein: The reinforcing assembly further comprises: The limiting sliding plate (55) is fixedly installed on the side wall of the sealing sliding plate (54) and is slidingly installed in the inside of the flow guide groove (53).

7. The semiconductor device hermeticity inspection tool of claim 3, wherein: The side wall of the gas storage tank (31) is provided with a pressure measuring assembly, and the pressure measuring assembly comprises: The measuring groove (61) is arranged on the side wall of the gas storage tank (31) away from the transmission box (22), the inner side wall of the measuring groove (61) is fixedly installed with the perspective plate (62), the side wall of the perspective plate (62) is paved with a scale, the inner side wall of the measuring groove (61) is provided with the air vent groove (63) at the bottom end, the air vent groove (63) is communicated with the inside of the gas storage tank (31), the inside of the measuring groove (61) is provided with two magnetic plates (65), the top magnetic plate (65) is fixedly installed on the inner top wall of the measuring groove (61), the bottom magnetic plate (65) is slidingly installed on the side wall between the measuring groove (61) and the perspective plate (62), and the magnetic poles of the two magnetic plates (65) on the same side are the same; The positioning support plate (64) is fixedly installed on the inner side wall of the measuring groove (61) and is located at the top of the air vent groove (63).

8. The semiconductor device hermeticity inspection tool of claim 7, wherein: The pressure measuring assembly further comprises: The air vent hole (66) is arranged on the side wall of the gas storage tank (31); when the sealing cover plate (36) has not sealed one side of the detection box (33), the air in the inside of the gas storage tank (31) can be discharged outward through the air vent hole (66).

9. The semiconductor device hermeticity inspection tool of claim 3, wherein: The inside of the sealing cover plate (36) is provided with a positioning assembly, and the positioning assembly comprises: A drive motor (73) is fixedly installed on the inner side wall of the sealing cover plate (36), the output end of the drive motor (73) is fixedly installed with an adjusting screw rod (74), the top end of the adjusting screw rod (74) is rotatably installed in the inside of the sealing cover plate (36) through a bearing, the thread directions of the two ends of the side wall of the adjusting screw rod (74) are opposite, and the two ends of the adjusting screw rod (74) are both threadedly installed with a fixed clamping plate (75).

10. The semiconductor device hermeticity inspection tool of claim 9, wherein: The positioning assembly further comprises: A positioning sliding groove (71) is opened on the inner side wall of the sealing cover plate (36), two positioning sliding blocks (72) are slidably installed in the inside of the positioning sliding groove (71), and the two fixed clamping plates (75) are fixedly installed on the side walls of the positioning sliding blocks (72) respectively.

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