Fault diagnosis method and system for active vibration reduction system

Abstract

The invention belongs to the field of precise active vibration reduction, and particularly discloses a fault diagnosis method and system of an active vibration reduction system. The method specifically comprises the steps of obtaining a frequency response curve of related vibration transmissibility based on a kinetic equation of an active vibration reduction system; and performing fault diagnosis on related parts in the active vibration reduction system by adopting the frequency response curve of the related vibration transmissibility. According to the method, the fault points of the key actuator and the sensor in the active vibration reduction system can be quickly judged.

Description

Technical Field

[0001] This application belongs to the field of precision active vibration reduction, and more specifically, relates to a fault diagnosis method and system for an active vibration reduction system. Background Technology

[0002] To cope with environmental vibrations, high-performance precision active vibration damping equipment is a crucial foundation for ensuring the processing and testing accuracy of equipment such as lithography machines and electron microscopes. A precision active vibration damping system typically includes multiple sets of absolute velocity sensors, relative displacement sensors, and motor actuators. Effectively diagnosing fault points under various malfunction conditions is an important aspect of using this type of equipment.

[0003] In the use of vibration reduction systems, there are many sensors and actuators involved. In addition to the failure of the components themselves to output the corresponding sensing signals, there are also problems in the equipment production process, such as reverse polarity caused by installation or wiring, which can cause the system to malfunction. Therefore, it is crucial to design a method that can effectively diagnose faults based on the characteristics of the vibration reduction system itself. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the purpose of this application is to provide a fault diagnosis method and system for an active vibration damping system, which aims to solve the problem that the vibration damping system is prone to failure due to the presence of a large number of sensors and actuators during the use of the existing vibration damping system.

[0005] To achieve the above objectives, in a first aspect, this application provides a fault diagnosis method for an active vibration damping system. During fault diagnosis, the active vibration damping system is located on a foundation, with a load installed above it. The system contains an internal velocity sensor and a relative displacement sensor, and external sensors are installed externally. Specifically, the method includes the following steps: Step S1: Based on the dynamic equations of the active vibration reduction system, obtain the frequency response curves of the relevant vibration transmissibility; Step S2: Use the frequency response curve of the relevant vibration transmissibility to diagnose the faults of the relevant components in the active vibration reduction system.

[0006] More preferably, the frequency response curve of the relevant vibration transmissibility in step S1 includes at least one of the following frequency response curves: based on the dynamic equation of the active vibration reduction system, the frequency response curve of the passive vibration transmissibility, the frequency response curve corresponding to the force-displacement response transmissibility, the frequency response curve corresponding to the force-velocity response transmissibility, the frequency response curve corresponding to the velocity-acceleration transmissibility, and the frequency response curve corresponding to the velocity-velocity transmissibility are obtained. The method for fault diagnosis of relevant components in step S2 specifically includes the following steps: Step S2.1: First fault diagnosis step: If the external sensor is an accelerometer, then the frequency response curve corresponding to the velocity-accelerometer transmissibility is used to diagnose the fault of the internal velocity sensor; if the external sensor is a velocity sensor, then the frequency response curve corresponding to the velocity-velocity transmissibility is used to diagnose the fault of the internal velocity sensor; if there is no fault, then proceed with the subsequent fault diagnosis steps. Step S2.2: Second fault diagnosis step: Perform the following two steps simultaneously or in any order: First, diagnose the actuator based on the frequency response curve corresponding to the force-velocity response transmissibility; if the actuator is fault-free, then diagnose the relative displacement sensor based on the frequency response curve corresponding to the force-displacement response transmissibility. Fault diagnosis of the ground velocity sensor is performed based on the frequency response curve of the passive vibration transmissibility. If a fault is diagnosed in the first fault diagnosis step or the second fault diagnosis step, the fault is eliminated before proceeding to the next step.

[0007] More preferably, step S1 specifically includes the following steps: Step S1.1: Construct the dynamic equations of the single-degree-of-freedom vibration reduction system: ; Step S1.2: Setting Obtain the frequency response curve of passive vibration transmissibility: ; Step S1.3: Excite the load using an actuator and obtain the frequency response curve corresponding to the force-velocity response transmissibility. Frequency response curve corresponding to force-displacement response transmissivity ; in, , ; Step S1.4: If the external sensor is an external speed sensor, then construct the frequency response curve corresponding to the speed-speed transmissibility. If the external sensor is an external accelerometer, then construct the frequency response curve corresponding to the velocity-acceleration transmissibility. ; in, ,

[0008] in, Indicates to The first derivative of represents the velocity of the load, and , ; Indicates to The second derivative of represents the acceleration of the load. For Lagrangian operators; kTo support the stiffness of the structure; c Damping for the supporting structure; m The total mass of the vibration reduction system; This represents the time-domain signal of the load vibration displacement. The load vibration velocity in the frequency domain; This represents the ground vibration displacement in the frequency domain; The output force generated by the actuator and the supporting structure connected in parallel in the frequency domain; This represents the relative displacement between the load and the foundation in the frequency domain. The signal is from the built-in speed sensor in the frequency domain; This refers to the external speed in the frequency domain.

[0009] More preferably, step S2.1 specifically involves: if the external sensor is an accelerometer, then selecting a frequency response curve corresponding to the velocity-acceleration transmissibility with an amplitude-frequency slope of -25 to -15. Fault diagnosis of the load vibration velocity sensor is performed with a phase frequency value of -110° to -70°. If the external sensor is a velocity sensor, the theoretical amplitude frequency slope of the frequency response curve corresponding to the velocity-acceleration transmissibility is selected as -5 to +5dB / dec, ±5dB / dec, and the theoretical phase frequency is -20° to +20° for fault diagnosis of the load vibration velocity sensor.

[0010] More preferably, in step S2.2, the amplitude-frequency characteristics and phase characteristics before and after the resonant frequency in the frequency response curve corresponding to the force-velocity response transmissibility are used to diagnose the actuator fault; wherein, the amplitude-frequency characteristic is that the slope of the portion below the resonant frequency is +15~+25dB / dec, and the slope of the portion above the resonant frequency is... The range is -25 to -15 dB / dec; the phase characteristics are +70° to 110° for the portion below the resonant frequency and -110° to -70° for the portion above the resonant frequency. More preferably, in step S2.2, the amplitude-frequency characteristics and phase characteristics before and after the resonant frequency in the frequency response curve corresponding to the force-displacement response transmissibility are used to diagnose the displacement sensor fault; wherein, the amplitude-frequency characteristic is that the slope of the portion below the resonant frequency is 0dB / dec, and the amplitude is... (dB), of which k To support the stiffness of the structure; higher than The phase ratio is -45 to -35 dB / dec; the phase characteristics are -20° to +20° for the part below the resonant frequency and -200° to -160° for the part above the resonant frequency.

[0011] More preferably, in step S2.2, the amplitude-frequency characteristics and phase characteristics before and after the resonance frequency in the frequency response curve of the passive vibration transmissibility are used to diagnose the fault of the ground velocity sensor; the amplitude-frequency characteristics are: the slope of the portion below the resonance frequency is -5 to +5 dB / dec, and the amplitude is -5 to +5 dB; the slope of the portion above the resonance frequency is -5 to +5 dB / dec. The phase ratio is -45 to -35 dB / dec, transitioning to -25 to -15 dB / dec as the resonant frequency increases; the phase characteristics are -20° to +20° in the part below the resonant frequency, then gradually decreasing to -200° to -160°, and finally stabilizing at -110° to -70° as the resonant frequency increases.

[0012] Secondly, this application provides a fault diagnosis system for an active vibration damping system. During fault diagnosis, the vibration damping system is located on the foundation, with a load installed above it. The vibration damping system contains an internal velocity sensor and a relative displacement sensor, and external sensors are installed outside the active vibration damping system, including: The frequency response curve acquisition module is used to acquire the frequency response curves corresponding to the relevant vibration transmissivity based on the dynamic equations of the active vibration reduction system. The fault diagnosis module is used to diagnose faults in relevant components of the active vibration reduction system based on the frequency response curve corresponding to the relevant vibration transmissibility.

[0013] More preferably, the frequency response curves corresponding to the relevant vibration transmissibility in the frequency response curve acquisition module include at least one of the following frequency response curves: the frequency response curve of passive vibration transmissibility, the frequency response curve corresponding to force-velocity response transmissibility, the frequency response curve corresponding to velocity-acceleration transmissibility, and the frequency response curve corresponding to velocity-velocity transmissibility. The fault diagnosis module includes: The external sensor fault diagnosis unit is used to diagnose faults in the internal speed sensor by using the frequency response curve corresponding to the velocity-acceleration transmissibility if the external sensor is an accelerometer; and to diagnose faults in the internal speed sensor by using the frequency response curve corresponding to the velocity-velocity transmissibility if the external sensor is a speed sensor. The actuator fault diagnosis unit is used to diagnose actuator faults based on the frequency response curve corresponding to the force-velocity response transmissibility; the displacement sensor fault diagnosis module is used to diagnose displacement sensor faults based on the frequency response curve corresponding to the force-displacement response transmissibility. The ground velocity sensor fault diagnosis unit is used to diagnose faults in the ground velocity sensor based on the frequency response curve of the passive vibration transmissibility.

[0014] More preferably, the frequency response curve acquisition module includes: a dynamic equation construction unit, used to construct the dynamic equation of a single-degree-of-freedom vibration reduction system: ; The first frequency response curve acquisition unit is used to set... Obtain the frequency response curve of passive vibration transmissibility: ; The second frequency response curve acquisition unit is used to excite the load using an actuator and acquire the frequency response curve corresponding to the force-velocity response transmissibility. Frequency response curve corresponding to force-displacement response transmissivity ;in, , ; The third frequency response curve acquisition unit is used to construct the frequency response curve corresponding to the velocity-velocity transmissibility if the external sensor is an external velocity sensor. If the external sensor is an external accelerometer, then construct the frequency response curve corresponding to the velocity-acceleration transmissibility. ; in, ,

[0015] in, Indicates to The first derivative of represents the velocity of the load, and , ; Indicates to The second derivative of represents the acceleration of the load. For Lagrangian operators; k To support the stiffness of the structure; c Damping for the supporting structure; m The total mass of the vibration reduction system; This represents the time-domain signal of the load vibration displacement. The load vibration velocity in the frequency domain; This represents the ground vibration displacement in the frequency domain; The output force generated by the actuator and the supporting structure connected in parallel in the frequency domain; This represents the relative displacement between the load and the foundation in the frequency domain. This refers to the external speed in the frequency domain.

[0016] More preferably, the external sensor fault diagnosis unit is used to select the amplitude frequency slope of the frequency response curve corresponding to the velocity-acceleration transmissibility if the external sensor is an accelerometer. For fault diagnosis of load vibration velocity sensor, the phase frequency value is -110° to -70°; if the external sensor is a velocity sensor, the amplitude frequency slope of the frequency response curve corresponding to the velocity-acceleration transmissibility is selected as -5 to +5dB / dec, and the phase frequency value is -20° to +20° for fault diagnosis of load vibration velocity sensor.

[0017] More preferably, the actuator fault diagnosis unit is used to perform fault diagnosis on the actuator using the amplitude-frequency characteristics before and after the resonant frequency in the frequency response curve corresponding to the force-velocity response transmissibility and the phase characteristics in the phase-frequency curve; wherein, the amplitude-frequency characteristics have a slope of +15~+25dB / dec for the portion below the resonant frequency and a slope of +15~+25dB / dec for the portion above the resonant frequency. The range is -25 to -15 dB / dec; the phase characteristics are +70° to 110° for the part below the resonant frequency and -110° to -70° for the part above the resonant frequency. The displacement sensor fault diagnosis unit is used to diagnose displacement sensor faults by employing the amplitude-frequency characteristics before and after the resonant frequency in the frequency response curve corresponding to the force-displacement response transmissibility and the phase characteristics in the phase-frequency curve; wherein, the amplitude-frequency characteristic has a slope of -5 to +5 dB / dec in the portion below the resonant frequency, and the amplitude is... (dB) k To support the stiffness of the structure; higher than The range is -45 to -35 dB / dec; the phase characteristics are -20° to +20° for the part below the resonant frequency and -200° to -160° for the part above the resonant frequency. The ground velocity sensor fault diagnosis unit uses the amplitude-frequency characteristics before and after the resonant frequency in the frequency response curve of the passive vibration transmissibility and the phase characteristics in the phase-frequency curve to diagnose faults in the ground velocity sensor. The amplitude-frequency characteristics have a slope of -5 to +5 dB / dec in the portion below the resonant frequency, and the amplitude is... dB; higher than The phase ratio is -45 to -35 dB / dec, transitioning to -25 to -15 dB / dec as the resonant frequency increases; the phase characteristics are -20° to +20° in the part below the resonant frequency, then gradually decreasing to -200° to -160°, and finally stabilizing at -110° to -70° as the resonant frequency increases.

[0018] Thirdly, this application provides an electronic device, comprising: at least one memory for storing a program; and at least one processor for executing the program stored in the memory, wherein when the program stored in the memory is executed, the processor is configured to execute the method described in the first aspect or a further preferred embodiment of the first aspect.

[0019] Fourthly, this application provides a computer-readable storage medium storing a computer program that, when run on a processor, causes the processor to perform the method described in the first aspect or a further preferred embodiment of the first aspect.

[0020] Fifthly, this application provides a computer program product that, when run on a processor, causes the processor to perform the method described in the first aspect or a further preferred embodiment of the first aspect.

[0021] It is understood that the beneficial effects of the second to fifth aspects mentioned above can be found in the relevant descriptions in the first aspect mentioned above, and will not be repeated here.

[0022] Overall, the technical solutions conceived in this application have the following beneficial effects compared with the prior art: This application provides a fault diagnosis method for an active vibration damping system. By constructing the dynamic system of a single-degree-of-freedom vibration damping system, the frequency response curves of passive vibration transmissibility, force-velocity response transmissibility, velocity-acceleration transmissibility, and velocity-velocity transmissibility are obtained. Fault diagnosis of actuators can be performed based on the frequency response curves of force-velocity response transmissibility, and fault diagnosis of displacement sensors can be performed based on the frequency response curves of force-displacement response transmissibility. Therefore, it is possible to quickly determine the fault points of key actuators and sensors in the active vibration damping system. It should be noted that this method only provides judgment criteria for the fault points of various sensors and actuators based on the single-degree-of-freedom active vibration damping system, and is still applicable to multi-degree-of-freedom active vibration damping systems. Attached Figure Description

[0023] Figure 1 This is a schematic flowchart of the fault diagnosis method for the active vibration reduction system provided in the embodiments of this application; Figure 2 This is a schematic diagram of the dynamic composition of a single-degree-of-freedom vibration reduction system provided in an embodiment of this application; Figure 3 The passive vibration transmissibility provided in the embodiments of this application The amplitude and phase frequency response curves; Figure 4 The force-velocity response transmissibility provided in the embodiments of this application The amplitude and phase frequency response curves; Figure 5 The force-displacement response transmissivity provided in the embodiments of this application The amplitude and phase frequency response curves; Figure 6 The velocity-acceleration transfer rate provided in the embodiments of this application The amplitude and phase frequency response curves; Figure 7 The speed-rate transfer rate provided in the embodiments of this application The amplitude and phase frequency response curves.

[0024] Figure 8This is a schematic diagram of the structure of the electronic device provided in the embodiments of this application. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0026] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A exists alone, A and B exist simultaneously, and B exists alone. The symbol " / " in this document indicates that the related objects are in an "or" relationship; for example, A / B means A or B.

[0027] The terms "first" and "second," etc., used in the specification and claims of this application are used to distinguish different objects, rather than to describe a specific order of objects.

[0028] In the embodiments of this application, the terms "exemplary" or "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design. Specifically, the use of the terms "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0029] In the description of the embodiments in this application, unless otherwise stated, "multiple" means two or more.

[0030] The embodiments of this application are described below with reference to the accompanying drawings.

[0031] like Figure 1 As shown, in a first aspect, this application provides a fault diagnosis method for an active vibration damping system, specifically including the following steps: Step 1: Construct the dynamic equations of the single-degree-of-freedom vibration reduction system; The vibration reduction system described in this application includes: a main base plate, an actuator, and a support structure; the vibration reduction system internally houses a foundation vibration velocity sensor, a load vibration velocity sensor, and a relative displacement sensor; external sensors are installed on the load and foundation, respectively. and Acceleration or velocity sensors can be selected depending on the specific testing method; in practical applications, the load equipment is placed on top of the vibration damping system and the bottom is located on the foundation. like Figure 2 The figure shows the dynamic composition of a single-degree-of-freedom vibration reduction system. The parameters involved include the total mass of the vibration reduction system.m stiffness of the supporting structure k and damping c The vibration damping system's built-in actuator is connected in parallel with the support structure to generate output force. The vibration reduction system has a built-in ground vibration velocity sensor. Measuring the vibration velocity of the foundation The vibration reduction system has a built-in load vibration velocity sensor. Measuring load vibration velocity Considering the foundation vibration displacement is The load vibration displacement is The relative displacement sensor built into the vibration reduction system Measuring the relative displacement between the load and the foundation ; Figure 2 The dynamic equations of the single-degree-of-freedom vibration reduction system shown are:

[0032] in, Indicates to The first derivative of can represent the velocity of the load, and , ; Indicates to The second derivative of the equation can represent the acceleration of the load. Step 2: Obtain the frequency response curves for passive vibration transmissibility, force-velocity transmissibility, force-displacement transmissibility, velocity-acceleration transmissibility, and velocity-velocity transmissibility; specifically: Step 2.1: When When the passive vibration transmissibility of the first-order system is obtained, it can be obtained. The corresponding frequency response curve is as follows Figure 3 As shown;

[0033] in, For Lagrange operators; Step 2.2: When using an actuator to excite the load, considering the large stiffness of the foundation support, the vibration velocity of the foundation can be ignored. The impact, that is, the belief ; The actuator output force can be obtained. and The measured load vibration velocity Transmission rate between them (force-velocity response transmission rate) The corresponding frequency response curve is as follows Figure 4 As shown;

[0034] The actuator output force can be obtained. With relative displacement sensor The measured relative displacement Transmission rate between them (force-displacement response transmission rate) The corresponding frequency response curve is as follows Figure 5 As shown;

[0035] Step 2.3: In the process of fault diagnosis, it is first necessary to use external sensors. right Perform calibration, or right Perform calibration; if or Using an external accelerometer, the transmissibility (velocity-acceleration transmissibility) is: The corresponding frequency response curve is as follows Figure 6 As shown;

[0036] like or Using an external speed sensor, the transmissibility (speed - speed transmissibility) is: The corresponding frequency response curve is as follows Figure 7 As shown;

[0037] in, V This refers to the signal from an external speed sensor in the frequency domain. The signal is from the built-in speed sensor in the frequency domain; Step 3: If the external sensor is an accelerometer, then use the frequency response curve corresponding to the velocity-accelerometer transmissibility to diagnose the accelerometer fault; if the external sensor is a velocity sensor, then use the frequency response curve corresponding to the velocity-velocity transmissibility to diagnose the velocity sensor fault; more specifically, if the external sensor... If an accelerometer is used, it needs to be combined with... For load vibration velocity sensor Proofreading is required, and the proofreading process needs to be based on... Figure 6 Slope of the mid-frequency component (The phase value of the phase frequency component is approximately ±5dB / dec, subject to variations due to problems in actual engineering applications.) -90° (The phase value of the phase frequency component is approximately ±20°, subject to variations due to problems in actual engineering applications.) Perform calibration; if external sensors If a speed sensor is used, it needs to be combined with... Rate based on Figure 7 For speed sensor The amplitude frequency component slope is 0dB / dec (the range of variation due to problems in actual engineering applications is approximately ±5dB / dec), and the phase frequency component phase is 0° (the range of variation due to problems in actual engineering applications is approximately ±20°). Step 4: Perform fault diagnosis on the actuator based on the frequency response curve corresponding to the force-velocity response transmissibility; More specifically, to complete the task of After calibration, the actuator can be corrected. During the calibration process, according to... Combination Figure 4 The amplitude and phase frequency characteristics in the data need to be calibrated, and attention should be paid to the resonant frequency in the amplitude and phase frequency characteristics during the calibration. The change in slope before and after is lower than Partially +20dB / dec (the variation range is approximately ±5dB / dec due to issues in actual engineering applications), higher than Partially -20 dB / dec (the variation range is approximately ±5 dB / dec due to issues in actual engineering applications); it is also necessary to pay attention to the phase characteristics in the phase frequency curve, below... Partial phase is +90° (the range varies by approximately ±20° due to issues in practical engineering applications), higher than The phase is -90° (the range of variation is approximately ±20° due to the influence of problems in actual engineering applications); Step 5: Perform fault diagnosis on the displacement sensor based on the frequency response curve corresponding to the force-displacement response transmissibility; More specifically, after the actuator is calibrated, the displacement sensor can be calibrated. Proofreading is performed, and during the proofreading process, according to For displacement sensors Proofreading, combined Figure 5 The resonant frequency in the amplitude-frequency characteristics needs to be considered. The change in slope before and after is lower than The partial slope is 0 dB / dec (the variation range is approximately ±5 dB / dec due to issues in actual engineering applications), and the amplitude is... (dB), higher than Partially -40dB / dec (the variation range is approximately ±5dB / dec due to issues in actual engineering applications); it is also necessary to pay attention to the phase characteristics in the phase frequency curve, below... Partial phase is 0° (the range of variation is approximately ±20° due to issues in practical engineering applications), higher than The phase is -180° (the range of variation is approximately ±20° due to the influence of problems in actual engineering applications); Step 6: Perform fault diagnosis on the ground velocity sensor based on the frequency response curve of the passive vibration transmissibility; More specifically, finally, the ground velocity sensor can be used. Proofreading can be performed according to... Combination Figure 3 When performing this procedure, attention needs to be paid to the resonant frequency in the amplitude-frequency characteristics. The change in slope before and after is lower than The partial slope is 0dB / dec (the variation range is approximately ±5dB / dec due to problems in actual engineering applications), and the amplitude is 0dB (the variation range is approximately ±5dB due to problems in actual engineering applications), which is higher than... The initial value is -40 dB / dec (with variations of approximately ±5 dB / dec due to issues in practical engineering applications), then continues to transition to -20 dB / dec as the frequency increases (again, with variations of approximately ±5 dB / dec due to issues in practical engineering applications); the phase portion is lower than... The phase is initially 0° (with a variation range of approximately ±20° due to problems in practical engineering applications), gradually decreasing to -180° (with a variation range of approximately ±20° due to problems in practical engineering applications). As the frequency increases, the phase eventually stabilizes at -90° (with a variation range of approximately ±20° due to problems in practical engineering applications).

[0038] It should be noted that steps four and six can be performed simultaneously, or step six can be performed first and then step four; there is no difference in the order. If step three diagnoses a fault in the external sensor, the fault in the external sensor must be resolved before proceeding to step four or six; if step four diagnoses a fault in the actuator, the fault in the actuator must be resolved before proceeding to step five.

[0039] The fault diagnosis system of the active vibration damping system provided in this application is described below. The fault diagnosis system of the active vibration damping system described below can be referred to in correspondence with the fault diagnosis method of the active vibration damping system described above.

[0040] Secondly, this application provides a fault diagnosis system for an active vibration damping system. During fault diagnosis, the vibration damping system is located on the foundation, with a load installed above it. The vibration damping system contains an internal velocity sensor and a relative displacement sensor, and external sensors are installed outside the active vibration damping system, including: The frequency response curve acquisition module is used to acquire the frequency response curves corresponding to the relevant vibration transmissivity based on the dynamic equations of the active vibration reduction system. The fault diagnosis module is used to diagnose faults in relevant components of the active vibration reduction system based on the frequency response curve corresponding to the relevant vibration transmissibility.

[0041] More preferably, the frequency response curves corresponding to the relevant vibration transmissibility in the frequency response curve acquisition module include at least one of the following frequency response curves: the frequency response curve of passive vibration transmissibility, the frequency response curve corresponding to force-velocity response transmissibility, the frequency response curve corresponding to velocity-acceleration transmissibility, and the frequency response curve corresponding to velocity-velocity transmissibility. The fault diagnosis module includes: The external sensor fault diagnosis unit is used to diagnose faults in the internal speed sensor by using the frequency response curve corresponding to the velocity-acceleration transmissibility if the external sensor is an accelerometer; and to diagnose faults in the internal speed sensor by using the frequency response curve corresponding to the velocity-velocity transmissibility if the external sensor is a speed sensor. The actuator fault diagnosis unit is used to diagnose actuator faults based on the frequency response curve corresponding to the force-velocity response transmissibility; the displacement sensor fault diagnosis module is used to diagnose displacement sensor faults based on the frequency response curve corresponding to the force-displacement response transmissibility. The ground velocity sensor fault diagnosis unit is used to diagnose faults in the ground velocity sensor based on the frequency response curve of the passive vibration transmissibility.

[0042] More preferably, the frequency response curve acquisition module includes: a dynamic equation construction unit, used to construct the dynamic equation of a single-degree-of-freedom vibration reduction system: ; The first frequency response curve acquisition unit is used to set... Obtain the frequency response curve of passive vibration transmissibility: ; The second frequency response curve acquisition unit is used to excite the load using an actuator and acquire the frequency response curve corresponding to the force-velocity response transmissibility. Frequency response curve corresponding to force-displacement response transmissivity ;in, , ; The third frequency response curve acquisition unit is used to construct the frequency response curve corresponding to the velocity-velocity transmissibility if the external sensor is an external velocity sensor. If the external sensor is an external accelerometer, then construct the frequency response curve corresponding to the velocity-acceleration transmissibility. ; in, ,

[0043] in, Indicates to The first derivative of represents the velocity of the load, and , ; Indicates to The second derivative of represents the acceleration of the load. For Lagrangian operators; k To support the stiffness of the structure; c Damping for the supporting structure; m The total mass of the vibration reduction system; This represents the time-domain signal of the load vibration displacement. The load vibration velocity in the frequency domain; This represents the ground vibration displacement in the frequency domain; The output force generated by the actuator and the supporting structure connected in parallel in the frequency domain; This represents the relative displacement between the load and the foundation in the frequency domain. The signal is from the built-in speed sensor in the frequency domain; This refers to the external speed in the frequency domain.

[0044] More preferably, the external sensor fault diagnosis unit is used to select the amplitude frequency slope of the frequency response curve corresponding to the velocity-acceleration transmissibility if the external sensor is an accelerometer. (The variation range is approximately ±5dB / dec due to problems in actual engineering applications), and the phase frequency is -90° (the variation range is approximately ±20° due to problems in actual engineering applications) for fault diagnosis of the load vibration velocity sensor; if the external sensor is a velocity sensor, then select the frequency response curve corresponding to the velocity-acceleration transmissibility with an amplitude frequency slope of 0dB / dec (the variation range is approximately ±5dB / dec due to problems in actual engineering applications) and a phase frequency of 0° (the variation range is approximately ±20° due to problems in actual engineering applications) for fault diagnosis of the load vibration velocity sensor.

[0045] More preferably, the actuator fault diagnosis unit is used to perform fault diagnosis on the actuator using the amplitude-frequency characteristics before and after the resonant frequency in the frequency response curve corresponding to the force-velocity response transmissibility and the phase characteristics in the phase-frequency curve; wherein, the amplitude-frequency characteristic has a slope of +20dB / dec for the portion below the resonant frequency (which varies by approximately ±5dB / dec due to the influence of problems in actual engineering applications), and a slope of +20dB / dec for the portion above the resonant frequency. The partial value is -20 dB / dec (the variation range is approximately ±5 dB / dec due to problems in actual engineering applications); the phase characteristics are +90° for the part below the resonant frequency (the variation range is approximately ±20° due to problems in actual engineering applications), and -90° for the part above the resonant frequency (the variation range is approximately ±20° due to problems in actual engineering applications).

[0046] More preferably, the displacement sensor fault diagnosis unit is used to diagnose faults in the displacement sensor by employing the amplitude-frequency characteristics before and after the resonant frequency in the frequency response curve corresponding to the force-displacement response transmissibility and the phase characteristics in the phase-frequency curve; wherein, the amplitude-frequency characteristic has a slope of 0dB / dec for the portion below the resonant frequency (which varies by approximately ±5dB / dec due to the influence of problems in actual engineering applications), and the amplitude is... (dB) k To support the stiffness of the structure; higher than The partial value is -40 dB / dec (the variation range is approximately ±5 dB / dec due to problems in actual engineering applications); the phase characteristics are 0° for the part below the resonant frequency (the variation range is approximately ±20° due to problems in actual engineering applications), and -180° for the part above the resonant frequency (the variation range is approximately ±20° due to problems in actual engineering applications).

[0047] More preferably, the ground velocity sensor fault diagnosis unit is used to diagnose faults in the ground velocity sensor by using the amplitude-frequency characteristics before and after the resonance frequency in the frequency response curve of the passive vibration transmissibility and the phase characteristics in the phase-frequency curve; the amplitude-frequency characteristic has a slope of 0dB / dec for the portion below the resonance frequency (the range of variation is approximately ±5dB / dec due to the influence of problems in actual engineering applications), and the amplitude is... dB (the variation range is approximately ±5 dB due to issues in practical engineering applications); higher than The initial value is -40 dB / dec (the variation range is approximately ±5 dB / dec due to problems in actual engineering applications), transitioning to -20 dB / dec as the resonant frequency increases (the variation range is approximately ±5 dB / dec due to problems in actual engineering applications); the phase characteristic is that the phase below the resonant frequency is 0° (the variation range is approximately ±20° due to problems in actual engineering applications), then gradually decreasing to -180° (the variation range is approximately ±20° due to problems in actual engineering applications), and finally stabilizing at -90° (the variation range is approximately ±20° due to problems in actual engineering applications) as the resonant frequency increases.

[0048] In summary, this application has the following advantages compared with the prior art: The method proposed in this application can quickly determine the fault points of key actuators and sensors in an active vibration damping system. It should be noted that this method only provides a judgment standard for the fault points of each sensor and actuator based on the single-degree-of-freedom active vibration damping system, and is still applicable to multi-degree-of-freedom active vibration damping systems.

[0049] It should be understood that the above-described device is used to execute the methods in the above embodiments. The implementation principle and technical effect of the corresponding program modules in the device are similar to those described in the above methods. The working process of the device can be referred to the corresponding process in the above methods, and will not be repeated here.

[0050] Based on the methods in the above embodiments, such as Figure 8 As shown in the illustration, this application provides an electronic device that may include a processor 810, a communications interface 820, a memory 830, and a communication bus 840. The processor 810, communications interface 820, and memory 830 communicate with each other via the communication bus 840. The processor 810 can call logical instructions stored in the memory 830 to execute the methods described in the above embodiments.

[0051] Furthermore, the logical instructions in the aforementioned memory 830 can be implemented as software functional units and, when sold or used as independent products, can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application.

[0052] Based on the methods in the above embodiments, this application provides a computer-readable storage medium storing a computer program that, when run on a processor, causes the processor to execute the methods in the above embodiments.

[0053] Based on the methods in the above embodiments, this application provides a computer program product that, when run on a processor, causes the processor to execute the methods in the above embodiments.

[0054] It is understood that the processor in the embodiments of this application can be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, transistor logic devices, hardware components, or any combination thereof. A general-purpose processor can be a microprocessor or any conventional processor.

[0055] The method steps in this application embodiment can be implemented in hardware or by a processor executing software instructions. The software instructions can consist of corresponding software modules, which can be stored in random access memory (RAM), flash memory, read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), registers, hard disks, portable hard disks, CD-ROMs, or any other form of storage medium known in the art. An exemplary storage medium is coupled to the processor, enabling the processor to read information from and write information to the storage medium. Of course, the storage medium can also be a component of the processor. The processor and the storage medium can reside in an ASIC.

[0056] In the above embodiments, implementation can be achieved entirely or partially through software, hardware, firmware, or any combination thereof. When implemented using software, it can be implemented entirely or partially as a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, all or part of the processes or functions described in the embodiments of this application are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted through the computer-readable storage medium. The computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via wired (e.g., coaxial cable, fiber optic, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that integrates one or more available media. The available medium can be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium (e.g., solid-state disk (SSD)).

[0057] It is understood that the various numerical designations used in the embodiments of this application are merely for the convenience of description and are not intended to limit the scope of the embodiments of this application.

[0058] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A method for diagnosing a failure of an active vibration reduction system, wherein the active vibration reduction system is located on a foundation on which a load is placed, and an internal velocity sensor and a relative displacement sensor are provided inside the vibration reduction system, characterized by The active vibration reduction system is externally provided with an external sensor; comprising the following steps: Step S1: based on the dynamic equation of the active vibration reduction system, the frequency response curve of the relevant vibration transmissibility is obtained; Step S2: using the frequency response curve of the relevant vibration transmissibility to diagnose the fault of the relevant components in the active vibration reduction system.

2. The failure diagnosis method according to claim 1, characterized by, The frequency response curve of the relevant vibration transmissibility in step S1 includes at least one of the following frequency response curves: the frequency response curve of the passive vibration transmissibility, the frequency response curve corresponding to the force-displacement response transmissibility, the frequency response curve corresponding to the force-velocity response transmissibility, the frequency response curve corresponding to the velocity-acceleration transmissibility, and the frequency response curve corresponding to the velocity-velocity transmissibility; The method for diagnosing the fault of the relevant components in step S2 specifically includes the following steps: Step S2.1: if the external sensor is an acceleration sensor, the frequency response curve corresponding to the velocity-acceleration transmissibility is used to diagnose the fault of the internal velocity sensor; if the external sensor is a velocity sensor, the frequency response curve corresponding to the velocity-velocity transmissibility is used to diagnose the fault of the internal velocity sensor; if there is no fault, the subsequent fault diagnosis step is executed; Step S2.2: the following two steps are executed simultaneously or in any order: First, the actuator is diagnosed for fault according to the frequency response curve corresponding to the force-velocity response transmissibility, and if the actuator is fault-free, the relative displacement sensor is diagnosed for fault according to the frequency response curve corresponding to the force-displacement response transmissibility; The foundation velocity sensor is diagnosed for fault according to the frequency response curve of the passive vibration transmissibility; If a fault is diagnosed in the first fault diagnosis step and the second fault diagnosis step, the subsequent step is executed after the fault is excluded.

3. The failure diagnosis method according to claim 1, characterized by, Step S1 specifically includes the following steps: Step S1.1: constructing the dynamic equation of a single-degree-of-freedom vibration reduction system: ； Step S1.2: Setting , the frequency response curve of passive vibration transmission rate is obtained: ； Step S1.3: excite the load with actuators, and obtain the frequency response curve corresponding to the force-velocity response transfer rate and the frequency response curve corresponding to the force-displacement response transfer rate ; wherein , ; Step S1.4: if the external sensor is an external velocity sensor, construct a frequency response curve corresponding to the velocity-velocity transfer ratio ; if the external sensor is an external acceleration sensor, construct a frequency response curve corresponding to the velocity-acceleration transfer ratio ; wherein , wherein, denotes the first derivative of , denotes the velocity of the motion of the load, and , ; denotes the second derivative of , denotes the acceleration of the motion of the load; is the Laplace operator; k is the stiffness of the support structure; c is the damping of the support structure; m is the total mass of the vibration system; is the time-domain signal of the vibration displacement of the load; is the vibration velocity of the load in the frequency domain; is the vibration displacement of the foundation in the frequency domain; is the output force generated by the actuator in parallel with the support structure in the frequency domain; is the relative displacement between the load and the foundation in the frequency domain; is the signal of the built-in velocity sensor in the frequency domain; is the signal of the external velocity sensor in the frequency domain.

4. The failure diagnosis method according to claim 3, characterized by, Step S2.1 is specifically: if the external sensor adopts an acceleration sensor, the amplitude-frequency slope in the frequency response curve corresponding to the speed-acceleration transfer rate is selected to be-25~ -15 and the phase-frequency phase value is-110°~ -70°, and the load vibration speed sensor is diagnosed for failure; if the external sensor adopts a speed sensor, the amplitude-frequency slope in the frequency response curve corresponding to the speed-acceleration transfer rate is selected to be-5~ +5 dB / dec, ±5 dB / dec, and the phase-frequency theoretical phase is-20°~ +20°, and the load vibration speed sensor is diagnosed for failure.

5. The failure diagnosis method according to claim 4, characterized by, In step S2.2, the amplitude-frequency characteristics and phase characteristics before and after the resonance frequency in the frequency response curve corresponding to the force-velocity response transfer rate are used to diagnose the fault of the actuator; wherein the amplitude-frequency characteristics are that the slope of the part below the resonance frequency is +15~+25dB / dec, and the slope of the part above the resonance frequency is -25~-15dB / dec; the phase characteristics are that the phase of the part below the resonance frequency is +70°~110°, and the phase of the part above the resonance frequency is -110°~-70°. part above the resonance frequency is -25~-15 dB / dec; the phase characteristics are that the phase of the part below the resonance frequency is +70°~110°, and the phase of the part above the resonance frequency is -110°~-70°; The displacement sensor is diagnosed for faults by using the amplitude-frequency characteristics and phase characteristics before and after the resonance frequency in the frequency response curve corresponding to the force-displacement response transfer rate in step S2.2; wherein the amplitude-frequency characteristics are that the slope of the part below the resonance frequency is 0 dB / dec, and the amplitude is (dB), wherein k is the stiffness of the support structure; the part above is -45~-35 dB / dec; and the phase characteristics are that the phase of the part below the resonance frequency is -20°~+20°, and the phase of the part above the resonance frequency is -200°~-160°. The amplitude-frequency characteristics and phase characteristics before and after the resonance frequency in the frequency response curve of the passive vibration transmissibility in step S2.2 are used to diagnose the fault of the foundation velocity sensor; the amplitude-frequency characteristics are that the slope of the part below the resonance frequency is-5~+5dB / dec, and the amplitude is-5~+5dB; the amplitude-frequency characteristics are that the slope of the part above the resonance frequency is-45~-35dB / dec, and the slope is-25~-15dB / dec as the resonance frequency increases; the phase characteristics are that the phase of the part below the resonance frequency is-20°~+20°, and then gradually decreases to-200°~-160°, and the phase is stable at-110°~-70° as the resonance frequency increases. The amplitude-frequency characteristics and phase characteristics before and after the resonance frequency in the frequency response curve of the passive vibration transmissibility in step S2.2 are used to diagnose the fault of the foundation velocity sensor; the amplitude-frequency characteristics are that the slope of the part below the resonance frequency is-5~+5dB / dec, and the amplitude is-5~+5dB; the amplitude-frequency characteristics are that the slope of the part above the resonance frequency is-45~-35dB / dec, and the slope is-25~-15dB / dec as the resonance frequency increases; the phase characteristics are that the phase of the part below the resonance frequency is-20°~+20°, and then gradually decreases to-200°~-160°, and the phase is stable at-110°~-70° as the resonance frequency increases.

6. A failure diagnosis system for an active vibration reduction system, at the time of failure diagnosis, the vibration reduction system is located above a foundation on which a load is placed, and an internal velocity sensor and a relative displacement sensor are provided inside the vibration reduction system, characterized by, The active vibration reduction system is externally provided with an external sensor, including: A frequency response curve acquisition module is configured to obtain a frequency response curve corresponding to a relevant vibration transmissibility based on a dynamic equation of the active vibration reduction system; A fault diagnosis module is configured to diagnose a fault of a relevant component in the active vibration reduction system based on the frequency response curve corresponding to the relevant vibration transmissibility.

7. The failure diagnosis system according to claim 6, characterized by The frequency response curve corresponding to the relevant vibration transmissibility obtained by the frequency response curve acquisition module includes at least one of the following frequency response curves: a frequency response curve of a passive vibration transmissibility, a frequency response curve corresponding to a force-velocity response transmissibility, a frequency response curve corresponding to a velocity-acceleration transmissibility, and a frequency response curve corresponding to a velocity-velocity transmissibility; The fault diagnosis module includes: An external sensor fault diagnosis unit is configured to diagnose a fault of an internal velocity sensor using a frequency response curve corresponding to a velocity-acceleration transmissibility if the external sensor is an acceleration sensor, or using a frequency response curve corresponding to a velocity-velocity transmissibility if the external sensor is a velocity sensor; An actuator fault diagnosis unit is configured to diagnose a fault of an actuator using a frequency response curve corresponding to a force-velocity response transmissibility; and a displacement sensor fault diagnosis module is configured to diagnose a fault of a displacement sensor using a frequency response curve corresponding to a force-displacement response transmissibility. The foundation velocity sensor fault diagnosis unit is used for fault diagnosis of the foundation velocity sensor according to the frequency response curve of the passive vibration transmissibility.

8. The failure diagnosis system according to claim 7, characterized by The frequency response curve acquisition module comprises a dynamic equation construction unit configured to construct a dynamic equation of a single-degree-of-freedom damping system: ; The first frequency response curve acquisition unit is configured to set , and acquire a frequency response curve of the passive vibration transmission rate ; The second frequency response curve acquisition unit is configured to excite the load by using the actuator to acquire a frequency response curve corresponding to the force-velocity response transmissibility and a frequency response curve corresponding to the force-displacement response transmissibility ; wherein, , ; The third frequency response curve acquisition unit is configured to: if the external sensor is an external speed sensor, construct a frequency response curve corresponding to a speed-speed transfer rate ; if the external sensor is an external acceleration sensor, construct a frequency response curve corresponding to a speed-acceleration transfer rate ; wherein , wherein, denotes the first derivative of , denotes the velocity of the motion of the load, and , ; denotes the second derivative of , denotes the acceleration of the motion of the load; is the Laplace operator; k is the stiffness of the support structure; c is the damping of the support structure; m is the total mass of the vibration system; is the time-domain signal of the vibration displacement of the load; is the vibration velocity of the load in the frequency domain; is the vibration displacement of the foundation in the frequency domain; is the output force generated by the actuator in parallel with the support structure in the frequency domain; is the relative displacement between the load and the foundation in the frequency domain; is the signal of the built-in velocity sensor in the frequency domain; is the signal of the external velocity sensor in the frequency domain.

9. The failure diagnosis system according to claim 8, characterized by The external sensor fault diagnosis unit is used to select the amplitude frequency slope of the frequency response curve corresponding to the velocity-acceleration transmissibility if the external sensor is an accelerometer. For fault diagnosis of load vibration velocity sensor, the phase frequency value is -110° to -70°; if the external sensor is a velocity sensor, the amplitude frequency slope of the frequency response curve corresponding to the velocity-acceleration transmissibility is selected as -5 to +5dB / dec, and the phase frequency value is -20° to +20° for fault diagnosis of load vibration velocity sensor.

10. The failure diagnosis system according to claim 9, characterized by The actuator fault diagnosis unit is used to diagnose the fault of the actuator by using the amplitude-frequency characteristics before and after the resonance frequency in the frequency response curve corresponding to the force-velocity response transfer rate and the phase characteristics in the phase-frequency curve; wherein the amplitude-frequency characteristics are that the slope of the part below the resonance frequency is +15~+25dB / dec, and the slope of the part above the resonance frequency is -25~-15dB / dec; the phase characteristics are that the phase of the part below the resonance frequency is +70°~110°, and the phase of the part above the resonance frequency is -110°~-70°. part above the resonance frequency is -25~-15dB / dec; the phase characteristics are that the phase of the part below the resonance frequency is +70°~110°, and the phase of the part above the resonance frequency is -110°~-70°. The displacement sensor fault diagnosis unit is used to diagnose displacement sensor faults by employing the amplitude-frequency characteristics before and after the resonant frequency in the frequency response curve corresponding to the force-displacement response transmissibility and the phase characteristics in the phase-frequency curve; wherein, the amplitude-frequency characteristic has a slope of -5 to +5 dB / dec in the portion below the resonant frequency, and the amplitude is... (dB) k To support the stiffness of the structure; higher than The phase ratio is -45 to -35 dB / dec; the phase characteristics are -20° to +20° for the part below the resonant frequency and -200° to -160° for the part above the resonant frequency. The ground velocity sensor fault diagnosis unit uses the amplitude-frequency characteristics before and after the resonant frequency in the frequency response curve of the passive vibration transmissibility and the phase characteristics in the phase-frequency curve to diagnose faults in the ground velocity sensor. The amplitude-frequency characteristics have a slope of -5 to +5 dB / dec in the portion below the resonant frequency, and the amplitude is... dB; higher than The phase ratio is -45 to -35 dB / dec, transitioning to -25 to -15 dB / dec as the resonant frequency increases; the phase characteristics are -20° to +20° in the part below the resonant frequency, then gradually decreasing to -200° to -160°, and finally stabilizing at -110° to -70° as the resonant frequency increases.

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