Optical inspection machine with carrier plate in carrier and inspection method

Abstract

The invention provides an optical inspection machine for a carrier plate in a carrier and an inspection method. The optical inspection machine is characterized in that a flow channel is connected to a movable end of an X-Y transplanting device; the X-Y transplanting driving flow channel moves in the X direction and the Y direction on the horizontal plane; the Y transplanting fixed end is arranged on the rack; the X transplanting fixed end is arranged above the Y transplanting movable end, and the X transplanting movable end can move in the X-axis direction of the horizontal plane; the conveying flow channel is installed at the movable end of the X transplanting part and driven by the X transplanting part and the Y transplanting part to move in the horizontal direction, and the vacuum adsorption jacking mechanism, the Y-direction arraying mechanism, the X-direction arraying mechanism and the stopping mechanism are all installed on the conveying flow channel. A product is accommodated in the carrier and is adsorbed and positioned by the vacuum adsorption jacking mechanism; the Y-direction arraying mechanism and the X-direction arraying mechanism are arranged on the two sides of the vacuum adsorption jacking mechanism in the vertical direction. And the stopping mechanism is mounted in front of the product inlet side of the conveying runner. According to the invention, the AOI visual inspection effect can be completed in front of the reflow oven under the condition that the carrier is not dismounted.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of optical detection, and particularly relates to an optical inspection machine and an inspection method for a carrier plate in a carrier. BACKGROUND

[0002] In a semiconductor ball mounting production line, AOI visual inspection is usually performed after a reflow oven, at which time the carrier has been removed, and a mechanical arm is required to directly adsorb the product and place it on a detection platform for visual inspection.

[0003] Patent document CN114146949A discloses a classification device for a semiconductor optical detection equipment, which comprises a base, a lifting arm fixed to the base and having a vertical moving end, a first rotating arm fixed to the vertical moving end, a second rotating arm rotatably arranged at the other end of the first rotating arm, a third rotating arm rotatably arranged at the other end of the second rotating arm, a connecting arm rotatably arranged at the other end of the third rotating arm, a lifting adjusting assembly arranged at the other end of the connecting arm and having a vertical adjusting end, a flexible adsorption assembly arranged at the vertical adjusting end, a conveying assembly arranged on the base below the flexible adsorption assembly, and a receiving assembly. During classification, the flexible adsorption assembly selectively adsorbs semiconductor components from the conveying assembly, and the receiving assembly receives and sends the semiconductor components to a classification frame.

[0004] Although the patent document CN114146949A can reduce damage during semiconductor picking, it still requires a mechanical arm for subsequent operation and cannot directly perform detection without removing the carrier.

[0005] In order to perform AOI visual inspection before the reflow oven without removing the carrier, the present application designs an optical inspection machine and an inspection method for a carrier plate in a carrier, which solves the above-mentioned problems. SUMMARY

[0006] In view of the defects in the prior art, the present application aims to provide an optical inspection machine and an inspection method for a carrier plate in a carrier.

[0007] According to the present application, an optical inspection machine for a carrier plate in a carrier is provided, which comprises an X-Y moving device and a flow channel. The flow channel is connected to the movable end of the X-Y moving device. The X-Y moving device drives the flow channel to move in the X and Y directions on the horizontal plane. The X-Y moving device comprises an X moving device and a Y moving device. The fixed end of the Y moving device is arranged on the rack. The fixed end of the X moving device is arranged above the movable end of the Y moving device, and the movable end of the X moving device can move in the X-axis direction on the horizontal plane. The flow channel comprises a vacuum adsorption jacking mechanism, a Y-direction alignment mechanism, an X-direction alignment mechanism, a stop mechanism and a transmission flow channel; The transmission flow channel is installed at the movable end of the X-transplanter and is driven to move in the horizontal direction by the X-transplanter and the Y-transplanter. The vacuum adsorption jacking mechanism, the Y-direction alignment mechanism, the X-direction alignment mechanism and the stop mechanism are all installed on the transmission flow channel. The products are contained in the carriers and are adsorbed and positioned by the vacuum adsorption jacking mechanism. The Y-direction alignment mechanism and the X-direction alignment mechanism are respectively arranged in the vertical direction on both sides of the vacuum adsorption jacking mechanism and can respectively push the products contained in the carriers to align in the corresponding direction. The stop mechanism is installed in front of the transmission flow channel on the side where the products enter.

[0008] Preferably, the X-Y-transplanter further comprises an X-transplanter chain, a Y-transplanter chain and a fixed mounting member. One end of the Y-transplanter chain is connected with the fixed mounting member, and the other end is connected with the rack. The fixed mounting member is fixed and is driven by the Y-transplanter to move in the horizontal plane Y-axis direction. The fixed end of the X-transplanter is arranged on the fixed mounting member, and the movable end thereof can move in the horizontal plane X-axis direction. One end of the X-transplanter chain is connected with the X-transplanter, and the other end is connected with the fixed mounting member.

[0009] Preferably, the Y-transplanter drives the flow channel to move below the visual inspection.

[0010] Preferably, the X-transplanter is a linear motor.

[0011] Preferably, the transmission flow channel comprises a transmission flow channel bottom plate, a transmission flow channel side plate, a transmission flow channel drive shaft and a transmission belt. The transmission flow channel bottom plate is fixed on the X-transplanter. The transmission flow channel side plate extends in the movable direction of the X-transplanter and is installed on both sides above the transmission flow channel bottom plate. The transmission belt is slidably connected to the inner walls on both sides of the transmission flow channel side plate. The transmission flow channel drive shaft is installed on the transmission flow channel side plate, is rotationally connected to the transmission belt and drives the transmission flow channel drive shaft to operate.

[0012] Preferably, the vacuum adsorption jacking mechanism comprises a jacking motor and a vacuum adsorption platform. The jacking motor is fixed on the transmission flow channel bottom plate. The vacuum adsorption platform is installed above the jacking motor, the jacking motor drives the vacuum adsorption platform to rise, and the vacuum adsorption contains the carriers containing the products.

[0013] Preferably, the Y-direction alignment mechanism comprises a Y-direction alignment block, a Y-direction alignment cylinder and a cylinder fixing member; The cylinder fixing member is fixed to the bottom plate of the transmission flow channel; The Y-direction alignment cylinder is installed on the cylinder fixing member; The Y-direction alignment block is in a fork type and is installed on the movable end of the Y-direction alignment cylinder, and the Y-direction alignment block corresponds to the horizontal movement of the vacuum adsorption platform and drives the products contained in the carrier to be aligned.

[0014] Preferably, the X-direction alignment mechanism comprises an X-direction alignment block, an X-direction alignment cylinder, a connecting plate, a jacking cylinder and a fixing member; The fixing member is fixed to the bottom plate of the transmission flow channel; The jacking cylinder is installed on the fixing member; The fixed end of the X-direction alignment cylinder is installed on the connecting plate; The X-direction alignment block is installed on the movable end of the X-direction alignment cylinder and drives the products contained in the carrier to be aligned.

[0015] Preferably, the stopping mechanism comprises a stopping block, a stopping cylinder and a stopping cylinder fixing member; The stopping cylinder fixing member is fixed to the bottom plate of the transmission flow channel; The fixed end of the stopping cylinder is installed on the stopping cylinder fixing member, and the stopping cylinder is vertically arranged; The stopping block is installed on the movable end of the stopping cylinder and stops the incoming carrier.

[0016] According to the present application, a method for checking the carrier plate in the optical inspection machine in the carrier is provided, and the method comprises the following steps: Step S1: When the carrier flows in, the stopping mechanism is in the extended state, and the carrier is stopped; Step S2: The Y-direction alignment cylinder of the Y-direction alignment mechanism is extended, and the Y-direction alignment is performed; Step S3: The jacking cylinder of the X-direction alignment mechanism is lifted, the X-direction alignment cylinder is extended, and the X-direction alignment is performed; Step S4: After the X-direction and Y-direction alignment are completed, the jacking motor of the vacuum adsorption jacking mechanism is lifted, and after being lifted to the position, the vacuum adsorption product is started to ensure that the product is stable and immovable; Step S5: The Y-moving is responsible for the movement in the Y-direction, and the flow channel is moved below the visual inspection; Step S6: The X-moving is responsible for the movement in the X-direction, and the visual inspection is performed while moving.

[0017] Compared with the prior art, the present application has the following beneficial effects: 1. The flow channel butt joint mode is adopted in the present application, so that the carrier with products directly flows in.

[0018] 2、The application adopts the vacuum adsorption mode to ensure the stability of the product and facilitate visual inspection.

[0019] 3、The application can complete the AOI visual inspection before the reflow oven without disassembling the carrier, and has strong implementability. BRIEF DESCRIPTION OF DRAWINGS

[0020] Other features, objects, and advantages of the application will become more apparent from the following detailed description of non-limiting embodiments, when read in conjunction with the accompanying drawings: Figure 1 It is a schematic diagram of the overall structure of the application.

[0021] Figure 2 It is a schematic diagram of the X-Y transplanting structure of the application.

[0022] Figure 3 It is a schematic diagram of the flow channel structure of the application.

[0023] Figure 4 It is a schematic diagram of the vacuum adsorption lifting mechanism structure of the application.

[0024] Figure 5 It is a schematic diagram of the Y-direction alignment mechanism structure of the application.

[0025] Figure 6 It is a schematic diagram of the X-direction alignment mechanism structure of the application.

[0026] Figure 7 It is a schematic diagram of the stop mechanism structure of the application.

[0027] Figure 8 It is a schematic diagram of the transmission flow channel structure of the application.

[0028] The drawings show: DETAILED DESCRIPTION

[0029] The application will be described in detail below in conjunction with specific embodiments. The following embodiments will help those skilled in the art to further understand the application, but do not limit the application in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the application. These all belong to the protection scope of the application.

[0030] As shown in Figures 1-8 , an optical inspection machine of a carrier plate in a carrier includes an X-Y transplanting 201 and a flow channel 202; The flow channel 202 is connected to the movable end of the X-Y transplanting 201; The X-Y transfer 201 drives the flow channel 202 to move in X and Y directions on the horizontal plane; The X-Y transfer 201 comprises an X transfer 2011, an X transfer drag chain 2012, a Y transfer 2013, a Y transfer drag chain 2014 and a fixed mounting 2015; The fixed end of the Y transfer 2013 is arranged on the rack; One end of the Y transfer drag chain 2014 is connected with the fixed mounting 2015, and the other end is connected with the rack; The fixed mounting 2015 is fixed and driven by the Y transfer 2013 to move along the Y axis direction on the horizontal plane; The fixed end of the X transfer 2011 is arranged on the fixed mounting 2015, and the movable end can move along the X axis direction on the horizontal plane; One end of the X transfer drag chain 2012 is connected with the X transfer 2011, and the other end is connected with the fixed mounting 2015; Preferably, the Y transfer 2013 is a general module, responsible for the movement in the Y direction, moving the flow channel to the lower side of the visual inspection; The X transfer 2011 is a linear motor, responsible for the movement in the X direction, with high precision and good stability, which can better cooperate with the visual inspection.

[0031] The flow channel 202 comprises a vacuum adsorption jacking mechanism 2021, a Y direction alignment mechanism 2022, an X direction alignment mechanism 2023, a blocking mechanism 2024 and a transmission flow channel 2025; The transmission flow channel 2025 is installed on the movable end of the X transfer 2011 and is driven by the X transfer 2011 and the Y transfer 2013 to move along the horizontal direction, and the vacuum adsorption jacking mechanism 2021, the Y direction alignment mechanism 2022, the X direction alignment mechanism 2023 and the blocking mechanism 2024 are all installed on the transmission flow channel 2025; The transmission flow channel 2025 comprises a transmission flow channel bottom plate 20251, a transmission flow channel side plate 20252, a transmission flow channel drive shaft 20253 and a transmission belt 20254; The transmission flow channel bottom plate 20251 is fixed on the X transfer 2011; The transmission flow channel side plate 20252 extends along the movable direction of the X transfer 2011 and is installed above the two sides of the transmission flow channel bottom plate 20251; The transmission belt 20254 is slidably connected to the inner walls of the two sides of the transmission flow channel side plate 20252; The transmission flow channel drive shaft 20253 is installed on the transmission flow channel side plate 20252, and the transmission flow channel drive shaft 20253 is rotationally connected to the transmission belt 20254 and drives the transmission flow channel drive shaft 20253 to rotate, achieving the effect of transmission carrier; The vacuum adsorption jacking mechanism 2021 comprises a jacking motor 20211 and a vacuum adsorption platform 20212; The jacking motor 20211 is fixed on the transmission flow channel bottom plate 20251; The vacuum adsorption platform 20212 is installed above the jacking motor 20211, the jacking motor 20211 drives the vacuum adsorption platform 20212 to rise, the product is contained in the carrier, after the vacuum adsorption platform 20212 rises to the position, the vacuum adsorption containing the product carrier is started, and the product is ensured to be stable and immovable.

[0032] The Y-direction alignment mechanism 2022 includes a Y-direction alignment block 20221, a Y-direction alignment cylinder 20222, and a cylinder fixing piece 20223; The cylinder fixing piece 20223 is fixed on the transmission flow channel bottom plate 20251; The Y-direction alignment cylinder 20222 is installed on the cylinder fixing piece 20223; The Y-direction alignment block 20221 is in a fork type and is installed on the movable end of the Y-direction alignment cylinder 20222, and the Y-direction alignment block 20221 corresponds to the horizontal movement of the vacuum adsorption platform 20212.

[0033] The Y-direction alignment cylinder 20222 is extended to drive the Y-direction alignment block 20221 to move in the Y direction, so as to achieve the effect of aligning the Y direction of the product contained in the carrier.

[0034] The X-direction alignment mechanism 2023 includes an X-direction alignment block 20231, an X-direction alignment cylinder 20232, a connecting plate 20233, a jacking cylinder 20234, a fixing piece 20235; The fixing piece 20235 is fixed on the transmission flow channel bottom plate 20251; The jacking cylinder 20234 is installed on the fixing piece 20235; The fixed end of the X-direction alignment cylinder 20232 is installed on the connecting plate 20233; The X-direction alignment block 20231 is installed on the movable end of the X-direction alignment cylinder 20232; The jacking cylinder 20234 drives the X-direction alignment cylinder 20232 to drive the X-direction alignment block 20231 to rise, after rising to the position, the X-direction alignment cylinder 20232 is extended to drive the X-direction alignment block 20231 to move in the X direction, so as to achieve the effect of aligning the X direction of the product contained in the carrier.

[0035] The stopping mechanism 2024 includes a stopping block 20241, a stopping cylinder 20242, and a stopping cylinder fixing piece 20243; The stopping cylinder fixing piece 20243 is fixed on the transmission flow channel bottom plate 20251; The fixed end of the stopping cylinder 20242 is installed on the stopping cylinder fixing piece 20243, and the stopping cylinder 20242 is vertically arranged; The stop block 20241 is installed at the movable end of the stop cylinder 20242; The stop cylinder 20242 drives the stop block 20241 to rise, and when the carrier flows in, the stop effect is achieved. The working principle of the device is as follows: when the carrier flows in, the stop mechanism 2024 is in the extended state, and the carrier is stopped; the Y-direction alignment mechanism 2022 is extended, and Y-direction alignment is performed; the X-direction alignment mechanism 2023 is lifted, and the alignment cylinder is extended, and X-direction alignment is performed; after the X-direction and Y-direction alignment are completed, the vacuum adsorption platform (20212) of the vacuum adsorption lifting mechanism 2021 is lifted, and after being lifted to the position, the vacuum adsorption platform is opened to contain the product carrier, and the product is ensured to be stable The application also provides an optical inspection machine and an inspection method for a carrier plate in a carrier, and the steps include: Step S1: when the carrier containing the product flows in, the stop mechanism 2024 is in the extended state, and the carrier is stopped.

[0036] Step S2: the Y-direction alignment cylinder 20222 of the Y-direction alignment mechanism 2022 is extended, and Y-direction alignment is performed.

[0037] Step S3: the lifting cylinder 20234 of the X-direction alignment mechanism 2023 is lifted, the X-direction alignment cylinder 20232 is extended, and X-direction alignment is performed.

[0038] Step S4: after the X-direction and Y-direction alignment are completed, the lifting motor 20211 of the vacuum adsorption lifting mechanism 2021 is lifted, and after being lifted to the position, the vacuum adsorption platform is opened to contain the product, and the product is ensured to be stable.

[0039] Step S5: the Y-direction moving mechanism 2013 is responsible for Y-direction movement, and moves the flow channel 202 to the lower side of the visual inspection.

[0040] Step S6: the X-direction moving mechanism 2011 is responsible for X-direction movement, and performs visual inspection while moving.

[0041] In the description of the present application, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0042] The specific embodiments of the present application are described above. It needs to be understood that the present application is not limited to the specific embodiments described above, and various changes or modifications can be made by those skilled in the art within the scope of the claims, which does not affect the essential content of the present application. The embodiments of the present application and the features in the embodiments can be combined with each other at will without conflict.

Claims

1. An optical inspection machine of a carrier plate in a carrier, characterized by, The application relates to a kind of X-Y transfer device and method. The X-Y transfer device comprises: X-Y transfer (201) and flow channel (202); The flow channel (202) is connected to the movable end of the X-Y transfer (201); The X-Y transfer (201) drives the flow channel (202) to move along the X and Y directions on the horizontal plane; The X-Y transfer (201) comprises X transfer (2011) and Y transfer (2013); The fixed end of the Y transfer (2013) is arranged on the rack; The fixed end of the X transfer (2011) is arranged above the movable end of the Y transfer (2013), and the movable end of the X transfer (2011) can move along the X-axis direction on the horizontal plane; The flow channel (202) comprises vacuum adsorption jacking mechanism (2021), Y-direction alignment mechanism (2022), X-direction alignment mechanism (2023), stop mechanism (2024) and transmission flow channel (2025); The transmission flow channel (2025) is installed on the movable end of the X transfer (2011) and is driven by the X transfer (2011) and the Y transfer (2013) to move along the horizontal direction, and the vacuum adsorption jacking mechanism (2021), the Y-direction alignment mechanism (2022), the X-direction alignment mechanism (2023) and the stop mechanism (2024) are all installed on the transmission flow channel (2025); The products are contained in the carrier and positioned by the vacuum adsorption jacking mechanism (2021); The Y-direction alignment mechanism (2022) and the X-direction alignment mechanism (2023) are respectively arranged on the two sides of the vacuum adsorption jacking mechanism (2021) along the vertical direction and can respectively push the products contained in the carrier to align along the corresponding direction; 2. An optical inspection machine of the carrier within a carrier according to claim 1, characterized in that, The stop mechanism (2024) is installed in front of the transmission flow channel (2025) on the side where the products enter. The X-Y transfer (201) further comprises X transfer drag chain (2012), Y transfer drag chain (2014) and fixed mounting (2015); One end of the Y transfer drag chain (2014) is connected with the fixed mounting (2015), and the other end is connected with the rack; The fixed mounting (2015) is fixed and driven by the Y transfer (2013) to move along the Y-axis direction on the horizontal plane; The fixed end of the X transfer (2011) is arranged on the fixed mounting (2015), and the movable end thereof can move along the X-axis direction on the horizontal plane; 3. An optical inspection machine of the carrier within a carrier according to claim 1, characterized in that, One end of the X transfer drag chain (2012) is connected with the X transfer (2011), and the other end is connected with the fixed mounting (2015).

4. An optical inspection machine of the carrier within a carrier according to claim 1, characterized in that, The Y transfer (2013) drives the flow channel (202) to move below the visual inspection.

5. An optical inspection machine of the carrier within a carrier according to claim 1, characterized in that, The X transfer (2011) is a linear motor. The transmission flow channel (2025) comprises transmission flow channel bottom plate (20251), transmission flow channel side plate (20252), transmission flow channel drive shaft (20253) and transmission belt (20254); The transmission flow channel bottom plate (20251) is fixed on the X transfer (2011); The transmission flow channel side plate (20252) extends along the moving direction of the X transfer (2011) and is installed on the two sides above the transmission flow channel bottom plate (20251); The transmission belt (20254) is slidably connected to the inner walls of the two sides of the transmission flow channel side plate (20252); The transmission flow channel driving shaft (20253) is installed on the transmission flow channel side plate (20252), the transmission flow channel driving shaft (20253) is rotatably connected to the transmission belt (20254), and the transmission flow channel driving shaft (20253) is driven to rotate.

6. An optical inspection machine of the carrier within a carrier according to claim 1, characterized in that, The vacuum adsorption jacking mechanism (2021) comprises a jacking motor (20211) and a vacuum adsorption platform (20212); The jacking motor (20211) is fixed on the transmission flow channel bottom plate (20251); The vacuum adsorption platform (20212) is installed above the jacking motor (20211), the jacking motor (20211) drives the vacuum adsorption platform (20212) to rise, and the vacuum adsorption platform (20212) adsorbs the carrier containing products.

7. An optical inspection machine of the carrier within a carrier according to claim 1, characterized in that, The Y-direction alignment mechanism (2022) comprises a Y-direction alignment block (20221), a Y-direction alignment cylinder (20222), and a cylinder fixing piece (20223); The cylinder fixing piece (20223) is fixed on the transmission flow channel bottom plate (20251); The Y-direction alignment cylinder (20222) is installed on the cylinder fixing piece (20223); The Y-direction alignment block (20221) is arranged in a fork shape, is installed on the movable end of the Y-direction alignment cylinder (20222), and the Y-direction alignment block (20221) moves horizontally corresponding to the vacuum adsorption platform (20212) and drives the products contained in the carrier to be arranged in alignment.

8. An optical inspection machine of the carrier within a carrier according to claim 1, characterized in that, The X-direction alignment mechanism (2023) comprises an X-direction alignment block (20231), an X-direction alignment cylinder (20232), a connecting plate (20233), a jacking cylinder (20234), and a fixing piece (20235); The fixing piece (20235) is fixed on the transmission flow channel bottom plate (20251); The jacking cylinder (20234) is installed on the fixing piece (20235); The fixed end of the X-direction alignment cylinder (20232) is installed on the connecting plate (20233); The X-direction alignment block (20231) is installed on the movable end of the X-direction alignment cylinder (20232) and drives the products contained in the carrier to be arranged in alignment.

9. An optical inspection machine of the carrier within a carrier according to claim 1, characterized in that, The stop mechanism (2024) comprises a stop block (20241), a stop cylinder (20242), and a stop cylinder fixing piece (20243); The stop cylinder fixing piece (20243) is fixed on the transmission flow channel bottom plate (20251); The fixed end of the stop cylinder (20242) is installed on the stop cylinder fixing piece (20243), and the stop cylinder (20242) is vertically arranged; The stop block (20241) is installed on the movable end of the stop cylinder (20242) and stops the entering carrier.

10. A method of inspecting a carrier plate in an optical inspection machine of a carrier plate, using the optical inspection machine of a carrier plate according to any one of claims 1 to 8, characterized by the steps of Comprise: Step S1: when the carrier containing products flows in, the stop mechanism (2024) is in the extended state, and the carrier is stopped; Step S2: the Y-direction alignment cylinder (20222) of the Y-direction alignment mechanism (2022) is extended, and Y-direction alignment is performed; Step S3: the jacking cylinder (20234) of the X-direction alignment mechanism (2023) is raised, the X-direction alignment cylinder (20232) is extended, and X-direction alignment is performed; Step S4: After the alignment in X and Y directions is completed, the lifting motor (20211) of the vacuum adsorption lifting mechanism (2021) is lifted, and after reaching the position, the vacuum adsorption product is started to ensure that the product is stable and does not move; Step S5: Y transfer (2013) is responsible for the movement in Y direction, moving the flow channel (202) below the visual inspection; Step S6: X transfer (2011) is responsible for the movement in X direction, and visual inspection is performed while moving.

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