Laser systems and lasers

Abstract

This invention provides a laser system and laser, relating to the field of laser technology. The laser system includes a bar array, a collimating and beam-combining component, and a shaping lens group, with the collimating and beam-combining component disposed on the output side of the bar array. The shaping lens group includes a first slow-axis homogenizing group, a fast-axis shaping group, and a slow-axis cylindrical lens, all located on the same output path. The first slow-axis homogenizing group is detachably disposed on the input side of the fast-axis shaping group and can selectively join or leave the output path. Specifically, when the first slow-axis homogenizing group is removed from the output path, the shaping lens group emits a radial light spot; when the first slow-axis homogenizing group is joined to the output path, the shaping lens group emits a non-linear light spot. Compared to existing technologies, this invention, by employing a detachable first slow-axis homogenizing group, enables changes in the light spot morphology, thereby achieving a replaceable light spot design and avoiding the use of complex optical path designs, thus meeting the stringent requirements for switching between different scenarios.

Description

Technical Field

[0001] This invention relates to the field of laser technology, and more specifically, to a laser system and a laser. Background Technology

[0002] To obtain a uniform light spot output with a large output power, multiple bars need to be stacked in an array and shaped using a shaping system to obtain the required light spot. Different scenarios require different light spot sizes and shapes.

[0003] Current high-power laser systems often output only one type of beam pattern. Their lens shaping systems are monolithic, making it impossible to change the beam pattern by replacing only a few lenses, thus failing to meet the needs of diverse application scenarios. This necessitates the use of completely different laser systems for different applications, undoubtedly increasing costs. Summary of the Invention

[0004] The purpose of this invention is to provide a laser system and laser that adopts a partially detachable structure and can change the beam pattern by adjusting some lenses, thus realizing a replaceable beam design and avoiding the use of complex optical path design, meeting the stringent requirements for conversion in different scenarios.

[0005] In a first aspect, the present invention provides a laser system, comprising:

[0006] Bass line array;

[0007] A collimating beam combiner is disposed on the light-emitting side of the bar array and is configured to combine the emitted light from the bar array and collimate it for output.

[0008] The shaping lens group includes a first slow-axis homogenizing group, a fast-axis shaping group, and a slow-axis cylindrical lens located on the same light output path. The first slow-axis homogenizing group is detachably disposed on the light input side of the fast-axis shaping group and can be selectively added to or removed from the light output path.

[0009] Specifically, when the first slow-axis homogenization group is removed from the light output path, the shaping lens group emits a ray-shaped light spot; when the first slow-axis homogenization group is added to the light output path, the shaping lens group emits a non-linear light spot.

[0010] In an optional embodiment, the first slow-axis homogenization group includes one of a first homogenization group, a second homogenization group, and a third homogenization group. The first homogenization group, the second homogenization group, and the third homogenization group are selectively disposed on the light-incident side of the fast-axis shaping group, so that the shaping lens group emits a circular light spot, a square light spot, or a non-equilateral rectangular light spot, respectively.

[0011] In an optional embodiment, when the second homogenization group is added to the light output path, the shaping lens group emits a square light spot. The second homogenization group includes at least one first microprism array and a square aperture lens array. The first microprism array and the square aperture spherical lens array are sequentially arranged between the second slow-axis homogenization group and the fast-axis shaping group along the light output path. The first microprism array has multiple first sub-prisms with the same rotation angle, and the square aperture spherical lens array has multiple square spherical sub-lenses.

[0012] In an optional embodiment, the first slow-axis homogenization group further includes at least one second microprism array, which is disposed between the first microprism array and the square aperture lens array. The second microprism array has a plurality of second subprisms with the same rotation angle distributed on it, wherein the rotation angle of the second subprisms is different from that of the first subprisms.

[0013] In an optional embodiment, the sub-prism has a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, and an angle of 1° to 30°.

[0014] The second sub-prism has a thickness of 0.5 to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, and an angle of 0.5° to 20°.

[0015] The square spherical sub-lens has a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, and a focal length of 0.7 mm to 40 mm.

[0016] In an optional embodiment, when the third homogenization group is added to the light output path, the shaping lens group emits a non-equilateral rectangular light spot. The third homogenization group includes at least one first microprism array and a square aperture lens array. The first microprism array and the square aperture spherical lens array are sequentially arranged along the light output path on the light input side of the fast axis shaping group. The first microprism array has multiple first sub-prisms with different rotation angles distributed on it, and the square aperture lens array has multiple square spherical sub-lenses distributed on it.

[0017] In an optional embodiment, the first slow-axis homogenization group further includes at least one second microprism array, which is disposed between the first microprism array and the square aperture lens array. The second microprism array has a plurality of second sub-prisms with different rotation angles distributed on it, wherein the rotation angle of the second sub-prisms is different from that of the first sub-prisms.

[0018] In an optional embodiment, the first sub-prism has a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, an angle of 1 mm to 30°, and a rotation angle of 5° to 50°; the second sub-prism has a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, an angle of 0.5° to 20°, and a rotation angle of -15° to -75°; the square spherical sub-lens has a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, and a focal length of 0.7 mm to 40 mm.

[0019] In an optional embodiment, when the first homogenization group is added to the light output path, the shaping lens group emits a circular light spot. The first homogenization group includes at least one microspherical lens array, which is disposed on the light input side of the fast axis shaping group. Multiple microspherical sub-lenses are distributed on the microspherical lens array.

[0020] And / or, the first homogenization group includes multiple microspherical lens arrays, each of the microspherical lens arrays being provided with 50-100 microspherical sub-lenses, each of the microspherical sub-lenses having a focal length of 0.5mm to 15mm, a thickness of 2mm, and a net aperture of 0.05mm to 0.6mm.

[0021] In an optional embodiment, the fast-axis shaping group includes at least two fast-axis cylindrical lenses arranged sequentially, with the slow-axis cylindrical lens disposed between two adjacent fast-axis cylindrical lenses.

[0022] In an optional embodiment, the shaping lens group further includes a second slow-axis homogenization group, which is disposed on the light-emitting side of the integrated beam combiner and configured to homogenize slow-axis light rays. The second slow-axis homogenization group includes two micropillar lens arrays, on which multiple micropillar lenses are distributed. Each micropillar lens has a focal length of 2mm to 15mm, a length of 12mm to 16mm, a thickness of 2mm, and a net aperture of 0.2mm to 0.6mm.

[0023] In an optional embodiment, the collimating and beam combining device includes an integrated beam combiner and multiple fast-axis collimating mirrors. The integrated beam combiner includes multiple slow-axis collimating mirrors and multiple sets of reflector groups, with the multiple slow-axis collimating mirrors and multiple sets of reflector groups being integrally formed.

[0024] Each of the light-emitting bars is provided with a fast-axis collimating lens on its light-emitting side;

[0025] Each of the slow-axis collimating lenses has an integrally formed mirror group on its light-emitting side. The mirror group is configured to reflect the light emitted from the slow-axis collimating lens to the shaping lens group. The bar array includes multiple linearly distributed light-emitting bars. Each light-emitting bar has a fast-axis collimating lens on its light-emitting side. The multiple slow-axis collimating lenses are respectively arranged corresponding to the multiple light-emitting bars.

[0026] In an optional embodiment, each of the mirror groups includes a first mirror and a second mirror. The first mirror is disposed on the light-emitting side of the corresponding slow-axis collimating mirror, and the angle between the normal of the incident surface of the first mirror and the incident ray is 45°. The second mirror is disposed on the light-emitting side of the first mirror, and the angle between the normal of the incident surface of the second mirror and the incident ray is 45°. And / or, multiple mirror groups are staggered in the light-emitting direction of the slow-axis collimating mirror and located on the same horizontal plane.

[0027] In a second aspect, the present invention provides a laser, including a laser system as described in any of the foregoing embodiments.

[0028] The beneficial effects of the embodiments of the present invention include:

[0029] The laser system and laser provided in this invention utilize a collimating and beam-combining device to collimate the output light from a bar array, and then use a shaping lens group for shaping. The fast-axis shaping group and the slow-axis cylindrical lens respectively enable focusing of the fast-axis and slow-axis rays. The first slow-axis homogenizing group is a detachable structure and can be selectively added to or removed from the output path. When the first slow-axis homogenizing group is removed from the output path, the shaping lens group outputs a radial light spot. When the first slow-axis homogenizing group is added to the output path, the shaping lens group outputs a non-linear light spot. Compared to existing technologies, this invention, by employing a detachable first slow-axis homogenizing group, enables changes in the light spot shape, thus achieving a replaceable light spot design and avoiding complex optical path designs, meeting the stringent requirements for switching between different scenarios. Attached Figure Description

[0030] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of the structure of a laser system provided in an embodiment of the present invention;

[0032] Figure 2 for Figure 1 A schematic diagram of the structure of the China-Pakistan linear array and collimating assembly from a first-view perspective;

[0033] Figure 3 for Figure 1 A schematic diagram of the China-Pakistan linear array and collimating assembly from a second perspective;

[0034] Figure 4 for Figure 1 Diagram showing the positional relationship between the fast-axis shaping group and the slow-axis cylindrical lens;

[0035] Figure 5 for Figure 1 Schematic diagram of the structure of the second slow axis shaping group and the fast axis shaping group;

[0036] Figure 6 for Figure 5 Schematic diagram of the structure of a micro-cylindrical lens array;

[0037] Figure 7 A schematic diagram of the structure of the laser system provided in an embodiment of the present invention when the first slow axis homogenization group is separated from the light output path;

[0038] Figure 8 for Figure 7 A schematic diagram of the linear beam emitted by the laser system.

[0039] Figure 9 for Figure 7 A schematic diagram of the intensity distribution of the linear beam emitted from the laser system.

[0040] Figure 10 This is a schematic diagram of the structure of the laser system provided in the embodiment of the present invention when an output path is added to the second homogenization group;

[0041] Figure 11 for Figure 10 A schematic diagram of the structure of the first microprism array in the middle;

[0042] Figure 12 for Figure 10 A schematic diagram of the optical path of a local sub-ray of the first and second microprism arrays;

[0043] Figure 13 for Figure 10 A schematic diagram of a medium-sized square aperture lens array;

[0044] Figure 14 for Figure 10 A schematic diagram of the square beam emitted by the laser system.

[0045] Figure 15 for Figure 10 A schematic diagram of the light intensity distribution of the square spot emitted by the laser system.

[0046] Figure 16 This is a schematic diagram of the structure of the laser system provided in the embodiment of the present invention when an output path is added to the third homogenization group;

[0047] Figure 17 for Figure 16 A schematic diagram of the optical path of a local sub-ray of the first and second microprism arrays;

[0048] Figure 18 for Figure 16 A schematic diagram of the non-equilateral rectangular beam emitted by the laser system.

[0049] Figure 19 for Figure 16 A schematic diagram of the intensity distribution of the non-equilateral rectangular beam emitted from the laser system.

[0050] Figure 20 This is a schematic diagram of the structure of the laser system provided in the embodiment of the present invention when a light output path is added to the first homogenization group;

[0051] Figure 21 for Figure 20 Schematic diagram of the structure of a micro-spherical lens array;

[0052] Figure 22 for Figure 20 A schematic diagram of the circular light spot emitted by the laser system.

[0053] Figure 23 for Figure 20 A schematic diagram of the light intensity distribution of the circular light spot emitted by the laser system.

[0054] Icons: 100 - Laser system; 110 - Bar array; 111 - Output bar; 120 - Collimating and beam combining device; 121 - Integrated beam combiner; 122 - Fast axis collimating lens; 123-Slow-axis collimating lens; 124-Reflecting mirror group; 125-First reflecting mirror; 126-Second reflecting mirror; 130-Shaping lens group; 140-Second slow-axis homogenizing group; 141-Micro-cylindrical lens array; 142-Micro-cylindrical lens; 150-First slow-axis homogenizing group; 150a-First homogenizing group; 150b-Second homogenizing group; 150c-Third homogenizing group; 151-Micro-spherical lens array; 152-Micro-spherical sub-lens; 153-First microprism array; 154-First sub-prism; 155-Square aperture lens array; 156-Square spherical sub-lens; 157-Second microprism array; 158-Second sub-prism; 160-Fast-axis shaping group; 161-Fast-axis cylindrical lens; 170-Slow-axis cylindrical lens. Detailed Implementation

[0055] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0056] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0057] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0058] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0059] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0060] As described in the background section, in current laser applications, high-uniformity, high-power-density linear laser spots are commonly used in wafer annealing (for example, the application scenario of this design is wafer annealing). Many other materials also require annealing, such as steel and alloys. Different materials and shapes require different laser spots (e.g., circular or square spots). However, current high-power laser systems often only output one type of spot shape, and their lens shaping systems are monolithic, making it impossible to change the spot shape by replacing only a few lenses, thus failing to meet the needs of diverse application scenarios. This further necessitates the use of completely different laser systems for different applications, undoubtedly increasing costs.

[0061] Therefore, a high-power bar beam combining laser system with interchangeable beam spots is needed to meet the annealing needs of different materials, achieving a multi-purpose effect and reducing costs (including material costs, management costs, and design costs). The laser system will be described in detail below. It should be noted that, unless otherwise specified, features in the embodiments of this invention can be combined with each other.

[0062] This invention provides a laser system with a partially detachable structure, which can change the shape of the light spot by adjusting some of the lenses. This achieves a replaceable light spot design and avoids the use of complex optical path designs, thus meeting the stringent requirements for conversion in different scenarios.

[0063] See Figure 1 The laser system 100 provided in this embodiment of the invention includes a bar array 110, a collimating beam combiner 120, and a shaping lens group 130. The collimating beam combiner 120 is disposed on the light-emitting side of the bar array 110 and is configured to combine the emitted light from the bar array 110 and collimate it for output. The shaping lens group 130 includes a first slow-axis homogenizing group 150, a fast-axis shaping group 160, and a slow-axis cylindrical lens 170 located on the same light-emitting path. The fast-axis shaping group 160 is configured to focus fast-axis rays, and the slow-axis cylindrical lens 170 is configured to focus slow-axis rays. The first slow-axis homogenizing group 150 is detachably disposed on the light-incident side of the fast-axis shaping group 160 and can be selectively added to or removed from the light-emitting path. Specifically, when the first slow-axis homogenization group 150 is removed from the light output path, the shaping lens group 130 emits a radial light spot; when the first slow-axis homogenization group 150 is added to the light output path, the shaping lens group 130 emits a non-linear light spot.

[0064] See Figure 2 and Figure 3 In some embodiments, the collimating beam combiner 120 includes an integrated beam combiner 121 and a plurality of fast-axis collimating lenses 122. The beam emitted by the bar array 110 passes sequentially through the fast-axis collimating lenses 122, the integrated beam combiner 121, and the shaping lens group 130.

[0065] The bar array 110 includes multiple linearly distributed light-emitting bars 111. Each light-emitting bar 111 has a fast-axis collimating lens 122 on its light-emitting side, and multiple slow-axis collimating lenses 123 are respectively arranged corresponding to the multiple light-emitting bars 111.

[0066] The integrated beam combiner 121 includes multiple slow-axis collimating mirrors 123 and multiple sets of reflector groups 124, which are integrally formed. Each light-emitting bar 111 has a fast-axis collimating mirror 122 on its light-emitting side. Each slow-axis collimating mirror 123 also has an integrally formed reflector group 124 on its light-emitting side, configured to reflect the emitted light from the slow-axis collimating mirror 123 to the shaping lens group 130. The integrated beam combiner 121 integrates the slow-axis collimating mirrors 123 and multiple sets of reflector groups 124, improving the accuracy of optical path shaping in the laser system 100 and reducing costs. In contrast, existing beam combining pump source products use separate beam combining components, with each reflector individually attached, resulting in long processing times and large cumulative tolerances.

[0067] Specifically, the bar array 110 can be a horizontal bar array, the spacing between multiple light-emitting bars 111 can be 1mm to 5mm, the wavelength of the light-emitting bars 111 can be 400μm to 1500μm, the power of a single light-emitting bar 111 can be 500W, and the number of light-emitting points of a single light-emitting bar 111 can be 19 to 47. The bar array 110 can be composed of 10-50 light-emitting bars 111, each light-emitting bar 111 is equipped with a fast-axis collimating lens 122, the focal length of which can be 0.5mm to 1mm. Its function is to compress the fast-axis divergence angle of the light emitted by the light-emitting bar 111, and the total angle of the fast-axis divergence angle of the light emitted by the light-emitting bar 111 after compression is less than 0.15°.

[0068] The integrated collimator 121 uses quartz glass. Multiple slow-axis collimating lenses 123 are arrayed to form a slow-axis collimating array. This array is coated with an anti-reflection film, the wavelength of which matches the emission wavelength of the emission bars 111, resulting in an anti-reflection rate of Ravg < 0.5%. Each slow-axis collimating lens 123 consists of several micropillar lenses, the number of which matches the total number of emission points in the bar array 110. The focal length of each micropillar lens can be 2mm to 5mm. After passing through the slow-axis collimating lens, the slow-axis divergence angle is < 0.15°.

[0069] Furthermore, each mirror group 124 includes a first mirror 125 and a second mirror 126. The first mirror 125 is disposed on the light-emitting side of the corresponding slow-axis collimating mirror 123, and the angle between the normal of the incident surface of the first mirror 125 and the incident ray is 45°. The second mirror 126 is disposed on the light-emitting side of the first mirror 125, and the angle between the normal of the incident surface of the second mirror 126 and the incident ray is 45°. Specifically, both the first mirror 125 and the second mirror 126 are 45° mirrors, and two 45° mirrors form a group and constitute the mirror group 124. The number of mirror groups 124 is the same as the number of light-emitting bars 111, and the reflection wavelength of the two 45° mirrors is consistent with the light-emitting wavelength of the light-emitting bars 111, with a reflectivity greater than 98%.

[0070] Furthermore, multiple mirror groups 124 are staggered in the light output direction of the slow-axis collimating mirror 123 and located on the same horizontal plane. Specifically, each mirror group 124 is staggered by 2mm in the horizontal direction, while remaining on the same horizontal line in the vertical direction. When the bar array 110 is incident on the slow-axis collimating mirror 123 after passing through the fast-axis collimating mirror 122 for slow-axis collimation, the beam collimated on both the fast and slow axes is incident on the mirror group 124 for two reflections. After the two reflections, the original slow-axis collimated light spot can be transformed into the fast-axis direction, and the fast-axis collimated light spot can be transformed into the slow-axis direction.

[0071] See also Figure 1 and Figure 4 In some embodiments, the fast-axis shaping assembly 160 includes at least two sequentially arranged fast-axis cylindrical lenses 161. A slow-axis cylindrical lens 170 is disposed between two adjacent fast-axis cylindrical lenses 161. Specifically, the fast-axis shaping assembly 160 includes three sequentially arranged fast-axis cylindrical lenses 161, each coated with an anti-reflection coating. The coating wavelength is consistent with the emission wavelength of the bar array 110, the anti-reflection rate is Ravg < 0.5%, and the material is quartz glass. The total focal length of the fast-axis shaping assembly 160 can be 200mm-500mm. The focal length of a single slow-axis cylindrical lens 170 can be 100mm-500mm.

[0072] See also Figure 1 , Figure 5 and Figure 6In some embodiments, the shaping lens group 130 further includes a second slow-axis homogenization group 140. The second slow-axis homogenization group 140 is disposed on the light-emitting side of the integrated beam combiner 121 and is configured to homogenize slow-axis light rays. The second slow-axis homogenization group 140 includes two micropillar lens arrays 141, on which multiple micropillar lenses 142 are distributed; each micropillar lens 142 has a focal length of 2mm to 15mm, a length of 12mm to 16mm, a thickness of 2mm, and a net aperture of 0.2mm to 0.6mm. The micropillar lenses 142 can also be made of quartz glass, and the number of micropillar lenses 142 can be 50 to 100.

[0073] It should be noted that the second slow-axis homogenization group 140 is located on the light-incident side of the first slow-axis homogenization group 150. The second slow-axis homogenization group 140 can homogenize the slow-axis light, while the first slow-axis homogenization group 150 can change the shape of the light spot and homogenize the light.

[0074] See also Figures 7 to 9 It should be noted that when the first slow-axis homogenization group 150 is not added to the light output path, the laser system 100 can output a radial light spot. However, when it is necessary to change the shape of the output light spot, the first slow-axis homogenization group 150 needs to be inserted into the light output path. Figure 8 This is a linear light spot diagram. Figure 9 The graph shows the light intensity distribution of the linear light spot. As can be seen from the graph, the uniformity of the linear light spot can reach 98.2%.

[0075] See Figure 10 , Figure 16 and Figure 20 In some embodiments, the first slow-axis homogenization group 150 includes one of a first homogenization group 150a, a second homogenization group 150b, and a third homogenization group 150c. The first homogenization group 150a, the second homogenization group 150b, and the third homogenization group 150c are selectively disposed on the light-incident side of the fast-axis shaping group 160, so that the shaping lens group 130 emits a circular light spot, a square light spot, or a non-equilateral rectangular light spot, respectively.

[0076] Specifically, the first homogenization group 150a, the second homogenization group 150b, and the third homogenization group 150c are all detachable structures, and each can be selected to be added to the light output path, thereby outputting different light spot shapes. Therefore, the first homogenization group 150a, the second homogenization group 150b, and the third homogenization group 150c can be used selectively in different application scenarios, while unused homogenization groups can be stored separately or additional storage locations can be designed in the laser system 100. The first homogenization group 150a, the second homogenization group 150b, and the third homogenization group 150c can be manually assembled and disassembled, or they can be assembled and disassembled using special tools (such as adsorption tools). The disassembly process of the first homogenization group 150a, the second homogenization group 150b, and the third homogenization group 150c is not limited here.

[0077] Furthermore, the first homogenization group 150a, the second homogenization group 150b, and the third homogenization group 150c can switch the light output path through a position switching structure (not shown in the figure).

[0078] See Figures 10 to 15 In some embodiments, when the second homogenization group 150b is added to the light output path, the shaping lens group 130 emits a square light spot. The second homogenization group 150b includes at least one first microprism array 153 and a square aperture lens array 155. The first microprism array 153 and the square aperture spherical lens array are sequentially arranged between the second slow-axis homogenization group 140 and the fast-axis shaping group 160 along the light output path. The first microprism array 153 has multiple first sub-prisms 154 with the same rotation angle, and the square aperture spherical lens array has multiple square spherical sub-lenses 156.

[0079] Furthermore, the first slow-axis homogenization group 150 also includes at least one second microprism array 157, which is disposed between the first microprism array 153 and the square aperture lens array 155. Multiple second sub-prisms 158 with the same rotation angle are distributed on the second microprism array 157, wherein the rotation angle of the second sub-prisms 158 is different from that of the first sub-prisms 154.

[0080] It should be noted that the first microprism array 153 and the second microprism array 157 are not the same. The multiple first sub-prisms 154 constituting the first microprism array 153 rotate at the same angle to each other, therefore the width and angle of the emitted light rays from the multiple first sub-prisms 154 are consistent. Similarly, the multiple second sub-prisms 158 constituting the second microprism array 157 rotate at the same angle to each other, therefore the width and angle of the emitted light rays from the multiple second sub-prisms 158 are consistent. Furthermore, the rotation angles of the first sub-prisms 154 and the second sub-prisms 158 are different. It is worth noting that in this embodiment, the rotation angles of the first sub-prisms 154 and the second sub-prisms 158 refer to the rotation angles of the first sub-prisms 154 and the second sub-prisms 158 relative to the axis, which characterizes the mounting tilt angles of the first sub-prisms 154 and the second sub-prisms 158.

[0081] Further, the first sub-prism 154 has a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, and an angle of 1° to 30°. The second sub-prism 158 has a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, and an angle of 0.5° to 20°. Both the first sub-prism 154 and the second sub-prism 158 are made of quartz glass, and the number of the first sub-prism 154 and the second sub-prism 158 can be 50 to 100. The square spherical sub-lens 156 has a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, and a focal length of 0.7 mm to 40 mm. The number of square spherical sub-lenses 156 constituting the square aperture lens array 155 can be 50 to 100. The schematic diagram of the optical path of the sub-ray between the first sub-prism 154 and the second sub-prism 158 is shown in the figure.

[0082] It should be noted that, see Figure 14 and Figure 15 , Figure 14 The diagram shows a square light spot. Figure 15 The light intensity distribution diagram of the square light spot shows that the uniformity of the square light spot can reach 94.3%, which is good and the light output effect is good.

[0083] See Figures 16 to 19In some embodiments, when the third homogenization group 150c is added to the light output path, the shaping lens group 130 emits a non-equilateral rectangular light spot. The third homogenization group 150c includes at least one first microprism array 153 and a square aperture lens array 155. The first microprism array 153 and the square aperture spherical lens array are sequentially arranged along the light output path on the light input side of the fast axis shaping group 160. The first microprism array 153 has multiple first sub-prisms 154 with different rotation angles, and the square aperture lens array 155 has multiple square spherical sub-lenses 156. The first microprism array 153 can change the shape of the light spot and homogenize the light, while the square aperture lens array 155 can focus the optical fiber, change the working distance, and homogenize the light.

[0084] Furthermore, the first slow-axis homogenization group 150 also includes at least one second microprism array 157, which is disposed between the first microprism array 153 and the square aperture lens array 155. Multiple second sub-prisms 158 with different rotation angles are distributed on the second microprism array 157, wherein the rotation angle of the second sub-prisms 158 is different from that of the first sub-prisms 154. The second microprism array 157 can also change the shape of the light spot and homogenize the image, thereby improving the homogenization effect.

[0085] It should be noted that the first microprism array 153 and the second microprism array 157 are not the same. The multiple first sub-prisms 154 constituting the first microprism array 153 have different rotation angles relative to each other, therefore the size and angle of the emitted light rays are not the same. Similarly, the multiple second sub-prisms 158 constituting the second microprism array 157 have different rotation angles relative to each other, therefore the width and angle of the emitted light rays from the multiple second sub-prisms 158 are also not consistent. It is worth noting that, in this embodiment, the rotation angle of the first sub-prisms 154 and the second sub-prisms 158 refers to the rotation angle of the first sub-prisms 154 and the second sub-prisms 158 relative to the axis, which can characterize the mounting tilt angle of the first sub-prisms 154 and the second sub-prisms 158.

[0086] Furthermore, the first sub-prism 154 has a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, an angle of 1 to 30°, and a rotation angle of 5° to 50°. The second sub-prism 158 has a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, an angle of 0.5° to 20°, and a rotation angle of -15° to -75°. Both the first sub-prism 154 and the second sub-prism 158 are made of quartz glass, and the number of first sub-prisms 154 and second sub-prisms 158 can be 50 to 100. The square spherical sub-lens 156 has a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm, and a focal length of 0.7 mm to 40 mm. The number of square spherical sub-lenses 156 constituting the square aperture lens array 155 can be 50 to 100. The schematic diagram of the optical path between several first sub-prisms 154 and corresponding second sub-prisms 158 in a local area is shown in the figure, which can form a non-equilateral rectangular light spot.

[0087] It should be noted that when the rotation angle and the angle of the first sub-prism 154 are changed, the width of the non-equilateral rectangular light spot can be changed. At this time, by changing the distance between the square aperture spherical array and the second microprism array 157, the length of the non-equilateral rectangular light spot can be changed. Therefore, by adjusting the rotation angle of the first microprism array 153 and / or the second microprism array 157 and the setting distance of the square aperture spherical lens array, non-equilateral rectangular light spots of different lengths and widths can be achieved.

[0088] It should be noted that, see Figures 18 to 19 , Figure 18 This is a schematic diagram of a non-equilateral rectangular light spot. Figure 19 The light intensity distribution diagram of the non-equilateral rectangular light spot shows that the uniformity of the square light spot can reach 90.2%, which is better and results in better light output.

[0089] See Figures 20 to 23 In some embodiments, when the first homogenization group 150a is added to the light output path, the shaping lens group 130 emits a circular light spot. The first homogenization group 150a includes at least one microspherical lens array 151, which is disposed on the light input side of the fast axis shaping group 160. Multiple microspherical sub-lenses 152 are distributed on the microspherical lens array 151.

[0090] In some embodiments, the first homogenization group 150a includes a plurality of microspherical lens arrays 151, each microspherical lens array 151 having 50-100 microspherical sub-lenses 152, each microspherical sub-lens 152 having a focal length of 0.5mm to 15mm, a thickness of 2mm, and a net aperture of 0.05mm to 0.6mm. Specifically, the first homogenization group 150a may include two identical microspherical lens arrays 151, the sub-lenses constituting the microspherical lens array 151 being randomly distributed, and their material being quartz glass.

[0091] It should be noted that, see Figures 22 to 23 ,in Figure 22 This is a schematic diagram of a circular light spot. Figure 23 The light intensity distribution diagram of the circular light spot shows that the uniformity of the circular light spot can reach 97.7%, which is good and results in good light output.

[0092] It is worth noting that when outputting different light spot shapes, it is necessary to switch between the first homogenization group 150a, the second homogenization group 150b, or the third homogenization group 150c. Refocusing is required during switching, meaning the working distance of the laser system 100 is different. Here, d represents the distance between the light-emitting surface of the laser system 100 and the working surface. The d values ​​corresponding to different light spot shapes are shown in the table below:

[0093]

[0094] The present invention also provides a laser, including a housing and the aforementioned laser system 100, which can be integrated and assembled within the housing.

[0095] In summary, the laser system 100 and laser provided in this embodiment of the invention utilize a collimating and beam-combining device 120 to collimate and output the beam from the bar array 110, and then uses a shaping lens group 130 for shaping. The fast-axis shaping group 160 and the slow-axis cylindrical lens 170 can focus the fast-axis and slow-axis beams, respectively. The first slow-axis homogenizing group 150 is a detachable structure and can be selectively added to or removed from the output path. When the first slow-axis homogenizing group 150 is removed from the output path, the shaping lens group 130 outputs a radial beam. When the first slow-axis homogenizing group 150 is added to the output path, the shaping lens group 130 outputs a non-linear beam. Compared to the prior art, this embodiment of the invention, by employing a detachable first slow-axis homogenizing group 150, can achieve changes in beam shape, thereby realizing a replaceable beam design and avoiding the use of complex optical path designs, thus meeting the stringent requirements for conversion in different scenarios.

[0096] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A laser system, characterized by, The application relates to a light-emitting device, which comprises: a bar line array (110); a collimating combining element (120) arranged on the light-emitting side of the bar line array (110) and configured to collimate the light emitted by the bar line array (110) after combining the light; a shaping lens group (130) comprising a first slow-axis homogenizing group (150), a fast-axis shaping group (160) and a slow-axis cylindrical lens (170) arranged on the same light-emitting path, the first slow-axis homogenizing group (150) being detachably arranged on the light-incident side of the fast-axis shaping group (160) and being capable of being selectively added to or removed from the light-emitting path; wherein, when the first slow-axis homogenizing group (150) is removed from the light-emitting path, the shaping lens group (130) emits a linear light spot; and when the first slow-axis homogenizing group (150) is added to the light-emitting path, the shaping lens group (130) emits a non-linear light spot; the first slow-axis homogenizing group (150) comprises a first homogenizing group (150a), a second homogenizing group (150b) and a third homogenizing group (150c), which are alternatively arranged on the light-incident side of the fast-axis shaping group (160) to respectively make the shaping lens group (130) emit a circular light spot, a square light spot or a non-equilateral rectangular light spot; the first homogenizing group (150a) comprises at least one micro-spherical lens array (151) arranged on the light-incident side of the fast-axis shaping group (160), and a plurality of micro-spherical sub-lenses (152) are distributed on the micro-spherical lens array (151).

2. The laser system of claim 1, wherein, the second homogenizing group (150b) comprises at least one first micro-prism array (153) and a square aperture lens array (155), which are sequentially arranged on the light-incident side of the fast-axis shaping group (160) along the light-emitting path, a plurality of first sub-prisms (154) with the same rotation angle are distributed on the first micro-prism array (153), and a plurality of square spherical sub-lenses (156) are distributed on the square aperture lens array.

3. The laser system of claim 2, wherein, the first slow-axis homogenizing group (150) further comprises at least one second micro-prism array (157) arranged between the first micro-prism array (153) and the square aperture lens array (155), and a plurality of second sub-prisms (158) with the same rotation angle are distributed on the second micro-prism array (157), wherein the rotation angle of the second sub-prisms (158) is different from that of the first sub-prisms (154).

4. The laser system of claim 3, wherein, the first sub-prisms (154) have a thickness of 0.5 mm to 2 mm, a length of 0.1 mm to 2 mm, a width of 0.1 mm to 2 mm and an angle of 1° to 30°. The thickness of the second sub-prism (158) is 0.5-2mm, the length is 0.1-2mm, the width is 0.1-2mm, and the angle is 0.5-20°; The thickness of the square spherical sub-lens (156) is 0.5-2mm, the length is 0.1-2mm, the width is 0.1-2mm, and the focal length is 0.7-40mm.

5. The laser system of claim 1, wherein, The third homogenization group (150c) comprises at least one first micro-prism array (153) and a square aperture lens array (155), the first micro-prism array (153) and the square aperture lens array are sequentially arranged on the light-in side of the fast-axis shaping group (160) along the light-out path, the first micro-prism array (153) is distributed with a plurality of first sub-prisms (154) with different rotation angles, and the square aperture lens array (155) is distributed with a plurality of square spherical sub-lenses (156).

6. The laser system of claim 5, wherein, The first slow-axis homogenization group (150) further comprises at least one second micro-prism array (157), the second micro-prism array (157) is arranged between the first micro-prism array (153) and the square aperture lens array (155), and the second micro-prism array (157) is distributed with a plurality of second sub-prisms (158) with different rotation angles, wherein the rotation angle of the second sub-prism (158) is different from that of the first sub-prism (154).

7. The laser system of claim 6, wherein, The thickness of the first sub-prism (154) is 0.5-2mm, the length is 0.1-2mm, the width is 0.1-2mm, the angle is 1-30°, and the rotation angle is 5-50°; The thickness of the second sub-prism (158) is 0.5-2mm, the length is 0.1-2mm, the width is 0.1-2mm, the angle is 0.5-20°, and the rotation angle is -15° to -75°; The thickness of the square spherical sub-lens (156) is 0.5-2mm, the length is 0.1-2mm, the width is 0.1-2mm, and the focal length is 0.7-40mm.

8. The laser system of claim 1, wherein, Each of the micro-spherical lens arrays (151) is provided with 50-100 micro-spherical sub-lenses (152), each of the micro-spherical sub-lenses (152) has a focal length of 0.5-15mm, a thickness of 2mm, and a net aperture of 0.05-0.6mm.

9. The laser system of claim 1, wherein, The fast-axis shaping group (160) comprises at least two fast-axis cylindrical lenses (161) which are sequentially distributed, and the slow-axis cylindrical lens (170) is arranged between two adjacent fast-axis cylindrical lenses (161).

10. The laser system of claim 1, wherein, The shaping lens group further comprises a second slow-axis homogenization group (140) disposed on the light exit side of the collimating beam combining component (120), the second slow-axis homogenization group (140) comprising two micro-lens arrays (141) with a plurality of micro-lenslets (142) distributed thereon; each micro-lenslet (142) has a focal length of 2-15 mm, a length of 12-16 mm, a thickness of 2 mm, and a clear aperture of 0.2-0.6 mm.

11. The laser system of claim 1, wherein, The collimating beam combining component (120) comprises an integrated beam combiner (121) and a plurality of fast-axis collimating mirrors (122), the integrated beam combiner (121) comprising a plurality of slow-axis collimating mirrors (123) and a plurality of mirror groups (124) integrally formed; Each slow-axis collimating mirror (123) is integrally provided with a mirror group (124) on the light exit side, the mirror group (124) being configured to reflect the light emitted by the slow-axis collimating mirror (123) to the shaping lens group (130), the bar linear array (110) comprising a plurality of linearly distributed light exit bars (111), each light exit bar (111) being provided with a fast-axis collimating mirror (122) on the light exit side, and a plurality of slow-axis collimating mirrors (123) being correspondingly provided with a plurality of light exit bars (111).

12. The laser system of claim 11, wherein, Each mirror group (124) comprises a first mirror (125) and a second mirror (126), the first mirror (125) being disposed on the light exit side of the corresponding slow-axis collimating mirror (123), and the angle between the normal of the incident surface of the first mirror (125) and the incident light is 45°; the second mirror (126) is disposed on the light exit side of the first mirror (125), and the angle between the normal of the incident surface of the second mirror (126) and the incident light is 45°; and / or, a plurality of mirror groups (124) are disposed in a staggered manner in the light exit direction of the slow-axis collimating mirror (123) and located on the same horizontal plane.

13. A laser characterized by, A laser system comprising the laser system according to any one of claims 1-12.

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