Longitudinal-torsional ultrasonic vibration auxiliary polishing device with adjustable motion trail

Abstract

The invention relates to a longitudinal-torsional ultrasonic vibration auxiliary polishing device with an adjustable motion trail, which is characterized in that a main shaft interface is used as a transition piece, and the rear end of the main shaft interface is connected with a polishing main shaft; the piezoelectric ceramic is a transduction mechanism and is used for generating axial ultrasonic vibration, and the rear end of the piezoelectric ceramic is connected with the front end of the main shaft interface; the rear end of the axial amplitude-change pole is of a structure connected with the front end of the piezoelectric ceramic, the middle section is used for transmitting and amplifying the amplitude, the front end is a connecting rod, and threads are machined on the whole section; a through hole is formed in the middle of the torsion amplitude-change pole, and a spiral hollow structure is arranged on the surface; a connecting rod at the front end of the axial amplitude-change pole penetrates through a through hole in the middle of the torsion amplitude-change pole and then is connected and tightened with a fine adjustment nut; the reverse tightening nut is mounted at the front end of the fine adjustment nut; the polishing head is fixedly mounted at the front end of the fine adjustment nut; the device has the advantages of simple structure, convenience in use, simplicity in operation of adjusting the longitudinal-torsional ultrasonic vibration motion trail and the like.

Description

Technical Field

[0001] This invention relates to an ultrasonic vibration-assisted polishing device for polishing optical components, specifically to a longitudinal-torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory. Background Technology

[0002] In the ultra-precision machining of optical components, polishing, as the final step, requires not only refining the surface shape to the target precision but also reducing roughness to the nanometer level to create a smooth surface. Therefore, polishing often uses relatively low polishing forces to meet the precision requirements. While lower polishing forces can achieve higher precision, they also result in lower polishing efficiency and longer processing times. This trade-off between precision and efficiency has hindered the development and widespread application of polishing technology. Ultrasonic vibration polishing, in particular, can effectively alleviate this trade-off. Two-dimensional composite vibration polishing, in particular, is finding increasingly widespread application in optical processing.

[0003] Traditional longitudinal-torsional ultrasonic vibration-assisted polishing devices generate ultrasonic vibrations through a transducer and amplify these vibrations using an amplitude transformer, converting unidirectional vibrations into axial and torsional motions to achieve a bidirectional longitudinal-torsional vibration effect. Because these devices use only one transducer, the torsional vibration is derived from a portion of the axial vibration energy via the amplitude transformer, resulting in identical vibration frequencies in both directions. For fixed-structure longitudinal-torsional ultrasonic vibration-assisted polishing devices, the combined motion trajectory of the polishing head in both directions is fixed. Therefore, changing the ultrasonic vibration trajectory requires replacing the amplitude transformer or transducer with a different structure. In practical applications, it is difficult to optimize process parameters by fine-tuning the ultrasonic vibration-assisted device to alter the motion trajectory, limiting improvements in processing efficiency and accuracy. To address this, a motion trajectory-adjustable ultrasonic vibration-assisted polishing device is proposed. Using only one transducer, the polishing head's motion trajectory can be altered through a fine-tuning mechanism, thereby increasing the adjustable range of process parameters and improving polishing efficiency and accuracy. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory, which can adjust the ratio of axial vibration and torsional vibration amplitude through a fine-tuning device, thereby changing the ultrasonic vibration trajectory of the polishing head without replacing the transducer. In the process development process, a larger range of process parameter adjustment can be obtained, and the processing efficiency and processing accuracy can be optimized.

[0005] The technical solution adopted by this invention to solve the above-mentioned technical problems is as follows: a longitudinal-torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory, characterized by comprising the following structures: a main shaft interface, a piezoelectric ceramic, an axial amplitude transformer, a torsional amplitude transformer, a fine-tuning nut, a reverse tightening nut, a sealing ring, a polishing head, and polishing head fasteners; wherein:

[0006] A main spindle interface serves as a transition piece, with its rear end connected to the polishing spindle. The longitudinal torsion ultrasonic vibration-assisted polishing device is then installed on the main spindle and performs linear or rotary motion under the drive of the main spindle.

[0007] A piezoelectric ceramic is used as a transducer to generate axial ultrasonic vibration, and its rear end is connected to the front end of the spindle interface.

[0008] An axial amplitude transformer has a rear end that connects to the front end of a piezoelectric ceramic, a middle section with cylindrical and conical structures for transmitting and amplifying amplitude, and a front end that is a connecting rod with threads machined throughout.

[0009] A torsion amplitude rod with a through hole in the middle and a spiral hollow structure on the surface; the connecting rod at the front end of the axial amplitude rod passes through the through hole in the middle of the torsion amplitude rod, and is then connected to the fine-tuning nut by threads and tightened to fix the axial amplitude rod, torsion amplitude rod, and fine-tuning nut together.

[0010] A reverse tightening nut is installed at the front end of the fine-adjusting nut and is connected to the connecting rod at the front end of the axial amplitude rod via a thread and tightened. When tightening, the tightening nut and the fine-adjusting nut are squeezed together to form an interlock between the two.

[0011] A polishing head is fixed to the front end of a fine-tuning nut by a polishing head fastener and covers the nut when tightened in the opposite direction. A sealing ring is installed between the polishing head and the fine-tuning nut to prevent polishing fluid from seeping into the interior of the polishing head.

[0012] Furthermore, the piezoelectric ceramic, as a transducer, can generate ultrasonic vibration in the axial direction after being energized, and the frequency and amplitude of the piezoelectric ceramic are adjustable.

[0013] Furthermore, the axial amplitude transformer has a four-section structure. The first section is connected to the piezoelectric ceramic, the second section is a cylindrical structure with cut edges on both sides for wrench clamping, the third section is a conical structure for amplifying the reciprocating vibration amplitude of the piezoelectric ceramic and transmitting it towards the polishing head, and the fourth section is a connecting rod with threads machined at the front for installing fine-tuning nuts and reverse tightening nuts.

[0014] Furthermore, the aforementioned torsional amplitude transformer has a through hole in the middle and a spiral hollow structure on the surface to guide the direction of deformation under force. It can convert a portion of the axial vibration energy into torsional vibration energy, thereby forming a composite vibration in both longitudinal and torsional directions, which is transmitted to the polishing head, causing the latter to also generate composite ultrasonic vibration in both longitudinal and torsional directions.

[0015] Furthermore, the aforementioned fine-tuning nut has an internal countersunk structure, with the front half being a circular countersunk hole for installing a reverse-tightening nut, and the rear half being a threaded hole that can engage with the thread at the front of the axial amplitude rod connecting rod for tightening and fixing; the outer surface of the front half is a circular structure for installing a sealing ring and a polishing head, and the rear half is an external hexagonal structure for clamping the wrench during tightening; a thin sheet structure separates the front and rear halves for pressing the sealing ring;

[0016] Furthermore, the polishing head is mounted on the front end of the fine-tuning nut by fasteners consisting of two sets of screws and washers for polishing processing;

[0017] Furthermore, the longitudinal-torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory adjusts the composite ultrasonic vibration trajectory by tightening / loosening the fine-tuning nut to increase / decrease the squeezing force on the torsional amplitude transformer, which in turn increases / decreases the ratio of torsional vibration energy to axial vibration energy, thereby reducing / increasing the longitudinal vibration and increasing / decreases the amplitude of the torsional vibration, thus achieving adjustment of the composite ultrasonic vibration trajectory.

[0018] Finally, the spiral-shaped hollow structure consists of multiple spiral-shaped long holes distributed along the surface of the torsion amplitude rod.

[0019] Compared with the prior art, the present invention has the following advantages:

[0020] (1) It overcomes the shortcomings of traditional longitudinal torsional ultrasonic vibration assisted polishing devices that cannot adjust the ratio of axial vibration and torsional vibration amplitudes, thus limiting the range of process optimization. The ratio of axial vibration and torsional vibration amplitudes can be adjusted by a fine-tuning device, thereby changing the ultrasonic vibration trajectory of the polishing head without replacing the transducer. In the process development process, a larger range of process parameter adjustment can be obtained, and the processing efficiency and processing accuracy can be optimized.

[0021] (2) The fine-tuning device has a simple structure and is easy to install, use and maintain;

[0022] (3) The fine-tuning device has a reasonable structure and is easy to operate when adjusting the longitudinal torsional ultrasonic vibration trajectory. It can be achieved with only simple tools.

[0023] (4) The measures to prevent nut loosening and polishing fluid corrosion are well taken into consideration, resulting in high device stability and long service life. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural schematic diagram of the longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory of the present invention.

[0025] Figure 2This is an exploded perspective view of the longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory of the present invention.

[0026] Figure 3 This is a three-dimensional sectional view of the longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory of the present invention.

[0027] Figure 4 This is a 3D view of the torsion amplitude rod. Detailed Implementation

[0028] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0029] See Figures 1 to 4 An embodiment of the present invention provides a longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory, comprising components such as a main shaft interface 1, a piezoelectric ceramic 2, an axial amplitude transformer 3, a torsional amplitude transformer 4, a fine-tuning nut 5, a reverse tightening nut 6, a sealing ring 7, a polishing head 8, and polishing head fasteners 9.

[0030] The main spindle interface 1 serves as a transition component, connecting to the polishing spindle at its rear end. The longitudinal torsional ultrasonic vibration-assisted polishing device is mounted on the spindle and moves linearly or rotaryly under its drive. Its front end is connected to and fixed to the piezoelectric ceramic 2. The piezoelectric ceramic 2 is the transducer mechanism used to generate axial ultrasonic vibration, and its front end is connected to the axial amplitude transformer 3. The rear end of the axial amplitude transformer 3 is connected to the piezoelectric ceramic 2, the middle section has cylindrical and conical structures for transmitting and amplifying the amplitude, and the front end is a connecting rod, with threads machined throughout. The torsional amplitude transformer 4 has a through hole in the middle and a hollowed-out structure on its surface to promote amplitude variation. In this embodiment, a spiral hollowed-out structure is used (see [reference]). Figure 4 The connecting rod at the front end of the axial amplitude transformer 3 passes through the through hole in the middle of the torsional amplitude transformer 4, and is then connected to and tightened with the fine-tuning nut 5 via threads, fixing the axial amplitude transformer 3, torsional amplitude transformer 4, and fine-tuning nut 5 together. The reverse tightening nut 6 is installed at the front end of the fine-tuning nut 5, connected to and tightened with the connecting rod at the front end of the axial amplitude transformer 3 via threads. During tightening, the tightening nut 6 and the fine-tuning nut 5 are pressed together, forming an interlock, thus achieving the effect of preventing the fine-tuning nut 5 from loosening. The polishing head 8 is installed and fixed to the front end of the fine-tuning nut 5 via polishing head fasteners 9, and covers the reverse tightening nut 6. A sealing ring 7 is installed between the polishing head 8 and the fine-tuning nut 5 to prevent polishing fluid from seeping into the interior of the polishing head 8.

[0031] When adjusting the composite ultrasonic vibration trajectory, first loosen the polishing head fastener 9 and remove the polishing head 8; then use two wrenches to clamp the fine-tuning nut 5 and the reverse tightening nut 6 respectively, and turn the wrenches in opposite directions to disable their interlocking, and unscrew the reverse tightening nut 6; then use two wrenches to clamp the fine-tuning nut 5 and the tangential position of the axial amplitude transformer 3 respectively, and turn the wrenches in opposite directions. By tightening the fine-tuning nut 5, the compressive force on the torsional amplitude transformer 4 is increased, which is converted into an increase in the ratio of torsional vibration energy to axial vibration energy, thereby reducing longitudinal vibration and increasing torsional vibration energy. The amplitude of the torsional vibration increases, or the fine-tuning nut 5 is loosened to reduce the squeezing force on the torsional amplitude transformer 4, which reduces the ratio of torsional vibration energy to axial vibration energy, thereby increasing the longitudinal vibration and decreasing the amplitude of the torsional vibration, thus achieving the adjustment of the composite ultrasonic vibration trajectory. After completing the above steps, the reverse tightening nut 6 is reinstalled and the squeezing fine-tuning nut 5 is tightened to prevent the nut from loosening. Finally, the polishing head 8 is reinstalled and fixed with the polishing head fastener 9, thus becoming a longitudinal-torsional ultrasonic vibration-assisted polishing device that can achieve the adjustment of the composite ultrasonic vibration trajectory.

[0032] It overcomes the shortcomings of traditional longitudinal-torsional ultrasonic vibration-assisted polishing devices, which cannot adjust the ratio of axial vibration to torsional vibration amplitudes and limit the range of process optimization. It can adjust the ratio of axial vibration to torsional vibration amplitudes through a fine-tuning device, thereby changing the ultrasonic vibration trajectory of the polishing head without replacing the transducer. During process development, a wider range of process parameters can be adjusted, optimizing processing efficiency and accuracy. The device has a simple structure, making it easy to install, use, and maintain. The device has a reasonable structure, and adjusting the longitudinal-torsional ultrasonic vibration trajectory is simple and can be achieved with only simple tools. The device has comprehensive measures to prevent nut loosening and corrosion of polishing fluid, resulting in high stability and long service life.

[0033] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory, characterized in that... Including: A main spindle interface (1) serves as a transition piece, with its rear end connected to the polishing spindle. The longitudinal torsion ultrasonic vibration-assisted polishing device is installed on the spindle and performs linear or rotary motion under the drive of the spindle. A piezoelectric ceramic (2) is used as a transducer to generate axial ultrasonic vibration, and its rear end is connected to the front end of the spindle interface; An axial amplitude transformer (3) has a rear end structure that connects to the front end of a piezoelectric ceramic (2), a middle section with cylindrical and conical structures for transmitting and amplifying amplitude, and a front end as a connecting rod with threads machined throughout. A torsion amplitude rod (4) has a through hole in the middle and a spiral hollow structure on the surface. The connecting rod at the front end of the axial amplitude rod (3) passes through the through hole in the middle of the torsion amplitude rod (4) and is then connected to the fine-tuning nut (5) by threads and tightened, so that the axial amplitude rod (3), the torsion amplitude rod (4), and the fine-tuning nut (5) are fixed together. A reverse tightening nut (6) is installed at the front end of the fine-tuning nut (5). It is connected to the connecting rod at the front end of the axial amplitude rod (3) by a thread and tightened. When tightening, the tightening nut (6) and the fine-tuning nut (5) are squeezed together to form an interlock between them. A polishing head (8) is installed and fixed to the front end of the fine-tuning nut (5) by a polishing head fastener (9) and covers the reverse tightening nut (6). A sealing ring (7) is installed between the polishing head (8) and the fine-tuning nut (5) to prevent polishing liquid from seeping into the interior of the polishing head (8).

2. The longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory according to claim 1, characterized in that, The piezoelectric ceramic (2) is used as a transducer and generates ultrasonic vibration in the axial direction after being energized. It is a piezoelectric ceramic with adjustable frequency and amplitude.

3. The longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory according to claim 1, characterized in that, The axial amplitude rod (3) is a four-section structure. The first section is connected to the piezoelectric ceramic (2). The second section is a cylindrical structure with cut edges on both sides for wrench clamping. The third section is a conical structure for amplifying the reciprocating vibration amplitude of the piezoelectric ceramic (2) and transmitting it to the polishing head (8). The fourth section is a connecting rod with threads machined at the front for installing the fine-tuning nut (5) and the reverse tightening nut (6).

4. The longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory according to claim 1, characterized in that, The torsional amplitude rod (4) has a through hole in the middle and a spiral hollow structure on the surface to guide the direction of deformation under force, and converts part of the axial vibration energy into torsional vibration energy, thereby forming a composite vibration in both longitudinal and torsional directions, and transmitting it to the polishing head (8), so that the latter also generates a composite ultrasonic vibration in both longitudinal and torsional directions.

5. The longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory according to claim 1, characterized in that, The fine-tuning nut (5) has a countersunk structure inside. The first half is a circular countersunk hole for installing the reverse tightening nut (6). The second half is a threaded hole that engages with the threaded part of the connecting rod of the axial amplitude rod 3 for tightening and fixing. The outer side of the first half is a circular structure for installing the sealing ring (7) and polishing head (8). The second half is an external hexagonal structure for clamping the wrench during tightening. There is a thin sheet structure separating the first half and the second half for pressing the sealing ring (7).

6. The longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory according to claim 1, characterized in that, The polishing head (8) is mounted on the front end of the fine-tuning nut (5) by a polishing head fastener (9) consisting of two sets of screws and washers, and is used for polishing.

7. The longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory according to claim 1, characterized in that, When adjusting the composite ultrasonic vibration trajectory, by tightening / loosening the fine-tuning nut (5), the squeezing force on the torsional amplitude rod (4) is increased / decreased, which is transformed into an increase / decrease in the ratio of torsional vibration energy to axial vibration energy, thereby reducing / increasing the longitudinal vibration and correspondingly increasing / decreasing the amplitude of the torsional vibration, thus achieving the adjustment of the composite ultrasonic vibration trajectory.

8. The longitudinal torsional ultrasonic vibration-assisted polishing device with adjustable motion trajectory according to claim 1, characterized in that, The spiral hollow structure consists of multiple spiral-shaped long holes distributed along the surface of the torsion amplitude rod (4).

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