Facial shape detection device and method for detecting facial shape of bottom of microcrystal by using laser interferometer

Abstract

The application relates to the technical field of optical element surface shape detection, in particular to a surface shape detection device and method for detecting the surface shape of a microcrystal bottom by using a laser interferometer. The surface shape detection device comprises a support assembly, the support assembly is connected with a measured microcrystal and is used for supporting the measured microcrystal; a high-precision auxiliary mirror, the high-precision auxiliary mirror is used for reflecting detection laser from the laser interferometer to the measured surface and sending reflected light from the measured surface back to the laser interferometer according to the original light path; an angle adjusting assembly, the angle adjusting assembly is used for adjusting the mirror surface inclination angle of the high-precision auxiliary mirror; a position adjusting assembly, the position adjusting assembly is used for adjusting the position of the high-precision auxiliary mirror; and a calibration reference mechanism, the calibration reference mechanism is used for detecting whether the position or the mirror surface inclination angle of the high-precision auxiliary mirror meets the expectation. By adopting the scheme, high-precision microcrystal surface shape detection of a special position can be realized under limited conditions, the application range of the existing laser interferometer is expanded, and the detection cost is saved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical element surface shape detection, and particularly relates to a surface shape detection device for detecting the surface shape of the bottom of a microcrystal by using a laser interferometer and a surface shape detection method for detecting the surface shape of the bottom of a microcrystal by using a laser interferometer. BACKGROUND

[0002] Optical element surface shape detection technologies include profile scanning, Shack-Hartmann detection, phase deflectometry, and laser interference detection. The laser interference detection is the most commonly used method, and its specific working principle is as follows: first, a laser beam is used to irradiate the surface of an object, and after the laser beam is reflected on the surface of the object, it is received by a detector. The detector can analyze the surface shape of the object, i.e., the surface shape deviation of the measured surface compared with an ideal plane (interferometer reference mirror), according to the interference fringes of the emitted (reference) laser beam and the emitted laser beam.

[0003] The laser interferometer is usually large in size, and the adjustment range of the laser emission direction is limited. Therefore, the market needs to adjust the position of the measured microcrystal to adapt to the laser emission surface (interferometer mirror surface) of the laser interferometer. However, in special cases (for example, an optical element bonded on a microcrystal, which cannot be turned over due to special position or other factors), the measured microcrystal cannot adapt to the laser interferometer, and the surface shape detection of the specific surface cannot be completed. If a new laser interferometer is purchased to adapt to the measured microcrystal, the cost is too high.

[0004] In order to overcome the above technical problems, an auxiliary detection device is needed to complete the accurate measurement of the surface shape of the specific position of the measured microcrystal by using the existing laser interferometer. SUMMARY

[0005] The purpose of the embodiments of the present application is to provide a surface shape detection device for detecting the surface shape of the bottom of a microcrystal by using a laser interferometer and a surface shape detection method for detecting the surface shape of the bottom of a microcrystal by using a laser interferometer, so as to realize high-precision microcrystal surface shape detection at a special position under limited conditions, expand the application range of the existing laser interferometer, and save detection cost.

[0006] To achieve the above object, the first aspect of the present application provides a surface shape detection device for detecting the surface shape of a microcrystal bottom surface by using a laser interferometer, the laser interferometer comprising an interferometer surface, the laser interferometer emitting detection laser horizontally through the interferometer surface, the surface shape detection device being used for detecting the surface shape of a measured microcrystal, the surface shape detection device comprising: a support assembly, the support assembly being connected with the measured microcrystal and being used for supporting the measured microcrystal, wherein the measured surface of the measured microcrystal faces downward horizontally and is perpendicular to the interferometer surface; a high-precision auxiliary mirror, the high-precision auxiliary mirror being arranged right below the measured surface and being used for reflecting the detection laser from the laser interferometer to the measured surface and returning the reflected light from the measured surface to the laser interferometer along the original light path; an angle adjusting assembly, the angle adjusting assembly being connected with the high-precision auxiliary mirror and being used for adjusting the mirror surface inclination angle of the high-precision auxiliary mirror; a position adjusting assembly, the position adjusting assembly being connected with the high-precision auxiliary mirror or the angle adjusting assembly and being used for adjusting the position of the high-precision auxiliary mirror; a calibration reference mechanism, the calibration reference mechanism being used for detecting whether the position or the mirror surface inclination angle of the high-precision auxiliary mirror meets the expectation, the calibration reference mechanism comprising a calibration mirror, the calibration mirror being connected with the angle adjusting assembly, the mirror surface of the calibration mirror facing the interferometer surface of the laser interferometer, and the highest part of the calibration mirror being not higher than the lowest part of the high-precision auxiliary mirror.

[0007] Based on the first aspect, in the embodiments of the present application, the angle adjusting assembly comprises: a wedge, the wedge being arranged below the measured microcrystal, the wedge being provided with a fixing surface for fixing the high-precision auxiliary mirror; a connecting plate, the high-precision auxiliary mirror being fixed to the middle part of the plate surface of the connecting plate, the plate surface of the connecting plate being parallel to the mirror surface of the high-precision auxiliary mirror, and the connecting plate being connected with the fixing surface of the wedge through an adjustable lead screw; a plurality of adjustable lead screws, the plurality of adjustable lead screws being uniformly distributed at the edges of the plate surface of the connecting plate, and any adjustable lead screw being threadedly connected with the fixing surface of the wedge through the connecting plate; the adjustable lead screws being used for fixing the high-precision auxiliary mirror and adjusting the mirror surface inclination angle of the high-precision auxiliary mirror.

[0008] Based on the first aspect, in the embodiments of the present application, the position adjusting assembly comprises: a first adjusting mechanism, the first adjusting mechanism being located below the wedge and being slidingly connected or fixedly connected with the wedge, the first adjusting mechanism being used for adjusting the position of the high-precision auxiliary mirror in the horizontal plane; a second adjusting mechanism, the second adjusting mechanism being located below the wedge and being fixedly connected with the first adjusting mechanism, the second adjusting mechanism being used for adjusting the height position of the high-precision auxiliary mirror.

[0009] Based on the first aspect, in the embodiments of the present application, the first adjusting mechanism is an X-axis adjusting assembly or a two-dimensional displacement table.

[0010] Based on the first aspect, in the embodiments of the present application, the second adjusting mechanism comprises a Z-axis adjusting table.

[0011] In the embodiments of the present application based on the first aspect, the calibration reference mechanism further comprises an adapter plate, the adapter plate comprises a first plate and a second plate connected integrally, the first plate is parallel to the connecting plate and fixedly connected with the connecting plate, and the plate surface of the second plate is parallel to the horizontal plane; a fixing groove for fixing the calibration mirror is arranged on the top surface of the second plate.

[0012] In the embodiments of the present application based on the first aspect, the support assembly comprises a top plate, a window adapted to the measured surface is arranged on the top plate, and the top plate is connected with the measured microcrystal; the top plate is located above the high-precision auxiliary mirror; a support column is arranged below the top plate, the top of the support column is fixedly connected with the top plate, and the support column is used for supporting the top plate and the measured microcrystal; and a bottom plate is fixedly connected with the bottom of the support column; the high-precision auxiliary mirror, the angle adjusting assembly and the position adjusting assembly are located between the top plate and the bottom plate.

[0013] In the embodiments of the present application based on the first aspect, a handle is arranged on the bottom plate, so as to facilitate moving and carrying.

[0014] In the second aspect, the present application provides a surface shape detection method for detecting the surface shape of the bottom surface of a microcrystal by using a laser interferometer, the laser interferometer comprises an observation screen capable of displaying a reference light spot and a test light spot, the surface shape detection method is applicable to the surface shape detection device described above, and the surface shape detection method comprises the following steps: S1, fixing the measured microcrystal on the top plate, and making the measured surface of the measured microcrystal horizontally face downward to the window; S2, adjusting the position of the high-precision auxiliary mirror, making the detection laser emitted by the laser interferometer irradiate on the mirror surface of the high-precision auxiliary mirror, and observing whether the test light spot of the measured surface exists in the observation screen of the laser interferometer (200); S3, if the test light spot exists, adjusting the mirror surface inclination angle of the high-precision auxiliary mirror according to the relative position of the test light spot and the reference light spot, and making the test light spot of the measured surface coincide with the reference light spot; S4, if the test light spot does not exist, adjusting the height position of the calibration mirror, making the detection laser emitted by the laser interferometer irradiate on the mirror surface of the calibration mirror, obtaining the relative position of the test light spot and the reference light spot formed by the reflected light from the calibration mirror from the observation screen of the laser interferometer, synchronously adjusting the mirror surface inclination angle of the calibration mirror and the high-precision auxiliary mirror according to the relative position, and making the test light spot of the calibration mirror coincide with the reference light spot; S5, keeping the inclination angle of the high-precision auxiliary mirror in step S4, and repeatedly executing steps S2-S4 until the test light spot of the high-precision auxiliary mirror coincides with the reference light spot; and S6, obtaining the interference fringes of the coincident light spots, and obtaining the surface shape deviation of the measured surface compared with the ideal plane according to the interference fringes.

[0015] In the embodiments of the present application based on the second aspect, the fixed surface is arranged at an angle of 45° with the horizontal plane, and the perpendicular line of the fixed surface is arranged at an angle of 45° with the interference mirror surface, and the surface of the first plate and the surface of the second plate are arranged at an angle of 135°; in step S2, the position of the high-precision auxiliary mirror is adjusted to include: in the horizontal direction, the high-precision auxiliary mirror is located directly below the measured surface; in the vertical direction, the high-precision auxiliary mirror is located on the light path of the detection laser; in step S3, the mirror surface inclination of the high-precision auxiliary mirror is adjusted to include: the surface of the connecting plate is parallel to the fixed surface; in step S4, the mirror surface inclinations of the calibration mirror and the high-precision auxiliary mirror are synchronously adjusted to include: the surface of the connecting plate is parallel to the fixed surface, and the surface of the second plate is parallel to the horizontal plane.

[0016] The scheme provided in the present application has at least the following beneficial effects:

[0017] The surface shape detection device provided in the present application uses the high-precision auxiliary mirror to reflect the detection laser emitted by the laser interferometer to the measured surface of the microcrystal to be measured, and then the high-precision auxiliary mirror returns the reflected light of the measured surface to the laser interferometer along the original light path (the light path of the detection laser) to realize detection. In this process, the detection of the measured surface at different positions can be realized by adjusting the position or the mirror surface inclination of the high-precision auxiliary mirror, the high-precision surface shape detection of the measured surface at special positions is realized under limited conditions, the application range of the existing laser interferometer is expanded, and the detection cost is greatly saved.

[0018] The surface shape detection method provided in the present application realizes the visual adjustment of the mirror surface inclination of the high-precision auxiliary mirror by setting the calibration mirror with the mirror surface parallel to the interference mirror surface, provides a guidance direction for the calibration of the mirror surface inclination of the high-precision auxiliary mirror, and can effectively improve the adjustment efficiency of the inclination.

[0019] Other features and advantages of the embodiments of the present application will be described in detail in the following specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0020] The accompanying drawings are included to provide a further understanding of the embodiments of the present application, constitute a part of the specification, and are used together with the following specific embodiments to explain the embodiments of the present application, but do not constitute a limitation on the embodiments of the present application. In the drawings:

[0021] Figure 1 The structure schematic diagram of the surface shape detection device in the embodiments is schematically shown in a first perspective view;

[0022] Figure 2 The expected light path schematic diagram of the detection of the bottom surface shape of the microcrystal by the laser interferometer in the embodiments is schematically shown;

[0023] Figure 3Fig. 2 schematically shows a structure of the face shape detection device in the embodiment in a second view angle.

[0024] Reference Signs List

[0025] 1, high-precision auxiliary mirror; 2, wedge body; 21, fixed surface; 3, connecting plate; 4, adjustable screw rod; 5, first adjusting mechanism; 6, second adjusting mechanism; 7, adapter plate; 8, calibration mirror; 9, top plate; 10, support column; 11, bottom plate; 12, handle; 100, measured microcrystal; 200, laser interferometer. DETAILED DESCRIPTION

[0026] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. It should be understood that the specific embodiments described herein are only used to explain and illustrate the embodiments of the present application, and are not used to limit the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0027] It should be noted that if the embodiments of the present application involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative positional relationship, motion condition, etc. between components in a certain posture (as shown in the drawings), and if the certain posture changes, the directional indications also change accordingly.

[0028] In addition, if the embodiments of the present application involve descriptions of “first”, “second”, etc., the descriptions of “first”, “second”, etc. are only for description purposes, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by “first” and “second” can explicitly or implicitly include at least one of the features. In addition, the technical solutions of the various embodiments can be combined with each other, but must be based on the fact that a person of ordinary skill in the art can implement the combination, and when the combination of the technical solutions contradicts each other or cannot be implemented, it should be considered that the combination of the technical solutions does not exist, and is not within the scope of protection claimed by the present application.

[0029] Embodiment 1

[0030] For example, in the present embodiment, the bottom face shape of the most difficult to detect microcrystal is taken as an example, and a face shape detection device for detecting the bottom face shape of the microcrystal by using the laser interferometer 200 is provided, as shown in Figure 1 and Figure 3As shown in the figure, the laser interferometer 200 comprises an interferometer mirror surface, and the laser interferometer 200 emits horizontal detection laser through the interferometer mirror surface. The surface shape detection device is used for detecting the surface shape of the measured microcrystal 100. Figure 1 As shown in the figure, the surface shape detection device comprises:

[0031] A support assembly is connected with the measured microcrystal 100, and is used for supporting the measured microcrystal 100. The measured surface of the measured microcrystal 100 is horizontally downward and perpendicular to the interferometer mirror surface. Specifically, the support assembly comprises: 1) a top plate 9, a window adapted to the measured surface is formed in the top plate 9 (so that the detection laser can irradiate the measured surface), the top plate 9 is reliably connected with the measured microcrystal 100 through threads, buckles and the like in a detachable manner (screws, etc.), and the top plate 9 is located above the high-precision auxiliary mirror 1. If the measured surface is parallel to the horizontal plane, the top plate 9 is preferably horizontally arranged. 2) A plurality of support columns 10 are arranged below the top plate 9, the top of the support column 10 is fixedly connected with the top plate 9, and the support column 10 is used for supporting the top plate 9 and the measured microcrystal 100. 3) A bottom plate 11 is fixedly connected with the bottom of the support column 10. The high-precision auxiliary mirror 1, the angle adjusting assembly and the position adjusting assembly are located between the top plate 9 and the bottom plate 11, so that the high-precision auxiliary mirror 1, the angle adjusting assembly and the position adjusting assembly can be integrated as a whole, which is convenient for moving or carrying.

[0032] A high-precision auxiliary mirror 1 is arranged directly below the measured surface, and is used for reflecting the detection laser from the laser interferometer 200 to the measured surface, and returning the reflected light from the measured surface to the laser interferometer 200 according to the original light path. The high-precision auxiliary mirror 1 needs to simultaneously complete the reflection of the detection laser from the laser interferometer 200 to the measured surface and the return of the reflected light from the measured surface to the laser interferometer 200 according to the original light path, so it is necessary to ensure that the detection laser reflected by the high-precision auxiliary mirror 1 needs to be vertically incident on the measured surface (such as Figure 2 As shown in the figure, wherein Figure 2The solid arrow indicates the direction of the light path of the detection laser, and the hollow arrow indicates the direction of the light path of the reflected light of the measured surface. Since the measured surface of the measured microcrystal 100 is horizontally downward and perpendicular to the interference mirror surface (vertically arranged), the high-precision auxiliary mirror 1 needs to be arranged below the measured surface, facing the interference mirror surface and at an angle of 45° with the horizontal plane, which is the ideal state when the measured surface is absolutely horizontal and the interference mirror surface is absolutely vertical. In actual operation, there will inevitably be slight deviations, so the position and especially the angle of the high-precision auxiliary mirror 1 also need to be adjusted. The biggest difficulty in using the high-precision auxiliary mirror 1 to complete the detection is the adjustment of the inclination angle of the mirror surface of the high-precision auxiliary mirror 1. To complete one detection, the entire light path needs to pass through two reflecting surfaces (the mirror surface of the high-precision auxiliary mirror 1 and the measured surface), a total of three reflections. Any slight deviation in this process will be amplified, which not only requires the mirror surface of the high-precision auxiliary mirror 1 to have high surface precision (λ / 20 or higher, where λ represents the wavelength of light, and here the wavelength of the central region of visible light is used by default, i.e. λ = 632.8 nm), but also requires the inclination angle of the mirror surface of the high-precision auxiliary mirror 1 to be infinitely close to the desired value (such as 45°). If the reflected light of the measured surface cannot return to the laser interferometer 200, the test spot of the measured surface will not be displayed on the observation screen of the laser interferometer 200, and without the position of the test spot, it is impossible to provide guidance for the adjustment of the position or inclination angle of the high-precision auxiliary mirror 1 (the worker cannot determine which direction to adjust the position or inclination angle of the high-precision auxiliary mirror 1).

[0033] An angle adjusting assembly is connected with the high-precision auxiliary mirror 1, and is used for adjusting the mirror surface inclination angle of the high-precision auxiliary mirror 1. In order to simplify the operation, the mirror surface inclination angle in the embodiment only considers the inclination angle of the mirror surface compared with the X-axis direction, and it is assumed that the mirror surface of the high-precision auxiliary mirror 1 always faces the laser interferometer 200 (the perpendicular line of the mirror surface of the high-precision auxiliary mirror 1 forms a 45° angle with the interference mirror surface). Specifically, the angle adjusting assembly comprises a wedge body 2, a connecting plate 3 and an adjustable lead screw 4. The wedge body 2 is arranged below the measured microcrystal 100, and the wedge body 2 is provided with a fixing surface 21 for fixing the high-precision auxiliary mirror 1. The high-precision auxiliary mirror 1 is fixed to the middle part of the plate surface of the connecting plate 3, the plate surface of the connecting plate 3 is parallel to the mirror surface of the high-precision auxiliary mirror 1, and the connecting plate 3 is connected with the fixing surface 21 of the wedge body 2 through the adjustable lead screw 4. The adjustable lead screw 4 is a plurality (for example, four) of adjustable lead screws. The plurality of adjustable lead screws 4 are uniformly distributed on the edge of the plate surface of the connecting plate 3 (the four adjustable lead screws 4 can be distributed near the four corners of the connecting plate 3), and any adjustable lead screw 4 is threadedly connected with the fixing surface 21 of the wedge body 2 through the connecting plate 3. That is, the mirror surface inclination angle of the high-precision auxiliary mirror 1 is adjusted by adjusting the connection length of the adjustable lead screw 4 and the wedge body 2 (locally adjusting the distance between the connecting plate 3 and the fixing surface 21). Preferably, the fixing surface 21 is arranged to form a 45° angle with the horizontal plane, and the perpendicular line of the fixing surface 21 is arranged to form a 45° angle with the interference mirror surface. In this way, when the mirror surface inclination angle of the high-precision auxiliary mirror 1 is adjusted, the connecting plate 3 only needs to be parallel to the fixing surface 21.

[0034] A position adjusting assembly is connected with the high-precision auxiliary mirror 1 or the angle adjusting assembly, and is used for adjusting the position of the high-precision auxiliary mirror 1. Specifically, the position adjusting assembly comprises a first adjusting mechanism 5 and a second adjusting mechanism 6. The first adjusting mechanism 5 is slidably connected or fixedly connected with the wedge body 2 below the wedge body 2, and is used for adjusting the position of the high-precision auxiliary mirror 1 on the horizontal plane. The second adjusting mechanism 6 is fixedly connected with the first adjusting mechanism 5 below the wedge body 2, and is used for adjusting the height position of the high-precision auxiliary mirror 1. Specifically, the first adjusting mechanism 5 can adopt an existing X-axis adjusting assembly or a two-dimensional displacement table (which is suitable for the case that the measured surface is more or the range is larger). The second adjusting mechanism 6 can adopt an existing Z-axis (height) adjusting table.

[0035] A calibration reference mechanism is arranged near the high-precision auxiliary mirror 1, and is used for detecting whether the position or the mirror surface inclination angle of the high-precision auxiliary mirror 1 meets the expectation. As described above, in order to complete one detection, the whole light path needs to pass through two reflecting surfaces (the mirror surface of the high-precision auxiliary mirror 1 and the measured surface), and a total of three reflections. Any slight deviation in this process can cause the reflected light of the measured surface to be unable to return to the laser interferometer 200. Therefore, the calibration reference mechanism also needs to be relied on during the preliminary adjustment. Specifically, the calibration reference mechanism comprises:

[0036] An adapter plate 7 is provided, which comprises a first plate and a second plate connected integrally, wherein the first plate is parallel to the connecting plate 3 and fixedly connected with the connecting plate 3, and the second plate is parallel to the horizontal plane; a fixing groove for fixing the collimator 8 is arranged on the top surface of the second plate.

[0037] The collimator 8 is arranged with its mirror surface facing the mirror surface of the laser interferometer 200, and the highest part of the collimator 8 is not higher than the lowest part of the high-precision auxiliary mirror 1, so as to prevent the auxiliary mirror from blocking the light emitted by the laser interferometer 200 to the high-precision auxiliary mirror 1. When the collimator 8 is fixed in the fixing groove, if the position or the mirror surface inclination angle of the collimator 8 needs to be adjusted, the position or the mirror surface inclination angle of the adapter plate 7 needs to be adjusted, and the first plate of the adapter plate 7 is fixedly connected with the connecting plate 3, so that the position or the mirror surface inclination angle of the high-precision auxiliary mirror 1 is adjusted synchronously when the position or the mirror surface inclination angle of the collimator 8 is adjusted. For example, the angle between the plate surface of the first plate and the plate surface of the second plate is 135°, and based on the position structure of the fixing surface 21, only the plate surface of the second plate needs to be adjusted to be parallel to the horizontal plane, so that the mirror surface inclination angle of the high-precision auxiliary mirror 1 is 45°, which meets the ideal state.

[0038] The working principle of the calibration reference mechanism is as follows: the laser interferometer 200 emits detection laser to the collimator 8, and the collimator 8 directly reflects the detection laser, and the light directly reflected from the collimator 8 is more likely to be reflected back to the laser interferometer 200 than the light reflected from the high-precision auxiliary mirror 1 for three times. When the test personnel cannot observe the reference light spot from the measured surface on the observation screen of the laser interferometer 200, the adjustment direction (increase or decrease) of the mirror surface inclination angle of the high-precision auxiliary mirror 1 can be determined by observing the position of the test light spot of the collimator 8 compared with the reference light spot, that is, the test light spot of the collimator 8 is close to the reference light spot, the closer the test light spot of the collimator 8 to the reference light spot, the closer the (position) angle of the high-precision auxiliary mirror to the expected value, and the more likely the reference light spot of the measured surface to appear on the observation screen.

[0039] Embodiment 2

[0040] The embodiment provides a surface shape detection method for detecting the surface shape of the bottom surface of a microcrystal by using a laser interferometer 200, wherein the laser interferometer 200 comprises an observation screen capable of displaying a reference light spot and a test light spot, the surface shape detection method is suitable for the surface shape detection device, and the surface shape detection method comprises the following steps.

[0041] S1, fixing the measured microcrystal 100 on the top plate 9, so that the measured surface of the measured microcrystal 100 faces downward and is opposite to the window;

[0042] S2, adjust the position of the high-precision auxiliary mirror 1 (for example, place the high-precision auxiliary mirror 1 directly below the measured surface, facing the interferometer surface and at an angle of 45° with the horizontal plane), and make the detection laser emitted by the laser interferometer 200 irradiate the mirror surface of the high-precision auxiliary mirror 1, and observe whether the test spot of the measured surface exists in the observation screen of the laser interferometer 200;

[0043] S3, if it exists, adjust the mirror surface inclination angle of the high-precision auxiliary mirror 1 according to the relative position of the test spot and the reference spot, so that the test spot of the measured surface coincides with the reference spot;

[0044] S4, if it does not exist (indicating that the reflected light of the measured surface cannot be successfully transmitted back to the interferometer surface of the laser interferometer 200 at this time, and there is a large deviation in adjusting the position or mirror surface inclination angle of the high-precision auxiliary mirror 1), adjust the height position of the calibration mirror 8 (for example, place the mirror surface of the calibration mirror 8 as much as possible to face the interferometer surface of the laser interferometer 200), and make the detection laser emitted by the laser interferometer 200 (vertically) irradiate the mirror surface of the calibration mirror 8 as much as possible, observe the relative position of the test spot and the reference spot formed by the reflected light from the calibration mirror 8 in the observation screen of the laser interferometer 200, and adjust the mirror surface inclination angle of the calibration mirror 8 and the high-precision auxiliary mirror 1 synchronously according to the relative position, so that the test spot of the calibration mirror 8 coincides with the reference spot. For details, refer to the description in Embodiment 1. The position or mirror surface inclination angle of the high-precision auxiliary mirror 1 is also adjusted at the same time.

[0045] S5, keep the inclination angle of the high-precision auxiliary mirror 1 in step S4, and repeat steps S2-S4 until the test spot of the high-precision auxiliary mirror coincides with the reference spot; if the problem still exists after repeating several times (for example, the test spot is not displayed or the test spot and the reference spot cannot be aligned), it may be considered that the device precision is low or the measured surface, the laser interferometer 200, etc. itself is the cause.

[0046] S6, obtain the interference fringes of the coincident spot, and obtain the surface shape deviation of the measured surface compared with the ideal plane according to the interference fringes. Here, existing analysis methods can be used, and details are not repeated here.

[0047] Further, if the fixing surface 21 is arranged at an angle of 45° with the horizontal plane, and the perpendicular line of the fixing surface 21 is arranged at an angle of 45° with the interference mirror surface, the plate surface of the first plate and the plate surface of the second plate are arranged at an angle of 135°; in step S2, the position of the high-precision auxiliary mirror 1 is adjusted, including: in the horizontal direction, the high-precision auxiliary mirror 1 is located on the light path of the detection laser; in the vertical direction, the high-precision auxiliary mirror 1 is located directly below the measured surface; in step S3, the inclination of the mirror surface of the high-precision auxiliary mirror 1 is adjusted, including: adjusting the plate surface of the connecting plate 3 to be parallel to the fixing surface 21; in step S4, the inclination of the mirror surface of the high-precision auxiliary mirror 1 and the calibration mirror 8 is adjusted, including: adjusting the plate surface of the connecting plate 3 to be parallel to the fixing surface 21, and adjusting the plate surface of the second plate to be parallel to the horizontal plane.

[0048] It should also be noted that the terms "comprising", "containing", or any other similar term are intended to encompass non-exclusive inclusions, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements in the list, but can also include other elements not expressly listed, or can also include elements inherent in such process, method, article, or apparatus. Without more limitations, the element defined by the phrase "comprising a" does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0049] The above is only an embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the scope of the claims of the present application.

Claims

1. A surface shape detection device for detecting the bottom surface shape of a microcrystal using a laser interferometer, wherein the laser interferometer (200) includes an interference mirror, and the laser interferometer (200) emits a detection laser horizontally through the interference mirror, characterized in that, The surface shape detection device is used to detect the surface shape of the microcrystal (100) under test, and the surface shape detection device includes: A support assembly is connected to the microcrystal under test (100) and is used to support the microcrystal under test (100); wherein the test surface of the microcrystal under test (100) is horizontally downward and perpendicular to the interference mirror surface; A high-precision auxiliary mirror (1) is located directly below the surface being measured. It is used to reflect the detection laser from the laser interferometer (200) to the surface being measured and to send the reflected light from the surface being measured back to the laser interferometer (200) along the original optical path. An angle adjustment component is connected to the high-precision auxiliary mirror (1) and is used to adjust the mirror tilt angle of the high-precision auxiliary mirror (1). The angle adjustment component includes a connecting plate (3), the high-precision auxiliary mirror (1) is fixed in the middle of the plate surface of the connecting plate (3), and the plate surface of the connecting plate (3) is parallel to the mirror surface of the high-precision auxiliary mirror (1). A position adjustment component, which is connected to a high-precision auxiliary mirror (1) or an angle adjustment component, is used to adjust the position of the high-precision auxiliary mirror (1); A calibration reference mechanism is provided near the high-precision auxiliary mirror (1) to detect whether the position or tilt angle of the high-precision auxiliary mirror (1) meets expectations. The calibration reference mechanism includes a calibration mirror (8) and an adapter plate (7). The calibration mirror (8) is connected to the angle adjustment component. The mirror surface of the calibration mirror (8) is set facing the interference mirror surface of the laser interferometer (200). The highest point of the calibration mirror (8) is not higher than the lowest point of the high-precision auxiliary mirror (1). The adapter plate (7) includes a first plate and a second plate integrally connected, wherein the first plate is parallel to the connecting plate (3) and fixedly connected to the connecting plate (3), and the surface of the second plate is parallel to the horizontal plane; the top surface of the second plate is provided with a fixing groove for fixing the calibration mirror (8).

2. The surface shape detection device according to claim 1, characterized in that, The angle adjustment component also includes: Wedge (2), the wedge (2) is located below the microcrystal (100) being measured, and the wedge (2) is provided with a fixing surface (21) for fixing the high-precision auxiliary mirror (1). Adjustable lead screw (4), there are multiple adjustable lead screws (4); multiple adjustable lead screws (4) are evenly distributed on the edge of the connecting plate (3), and any adjustable lead screw (4) passes through the connecting plate (3) and is threaded to the fixing surface (21) of the wedge (2); used to fix the high-precision auxiliary mirror (1) and adjust the mirror tilt angle of the high-precision auxiliary mirror (1); The connecting plate (3) is connected to the fixed surface (21) of the wedge (2) via an adjustable lead screw (4).

3. The surface shape detection device according to claim 2, characterized in that, The position adjustment component includes: The first adjustment mechanism (5) is located below the wedge (2) and is slidably or fixedly connected to the wedge (2) for adjusting the position of the high-precision auxiliary mirror (1) on the horizontal plane; The second adjustment mechanism (6) is located below the wedge (2) and is fixedly connected to the first adjustment mechanism (5) for adjusting the height position of the high-precision auxiliary mirror (1).

4. The surface shape detection device according to claim 3, characterized in that, The first adjustment mechanism (5) is an X-axis adjustment component or a two-dimensional displacement stage.

5. The surface shape detection device according to claim 3, characterized in that, The second adjustment mechanism (6) includes a Z-axis adjustment stage.

6. The surface shape detection device according to claim 2, characterized in that, The support components include: The top plate (9) has a window adapted to the surface being measured, and the top plate (9) is connected to the microcrystalline material being measured (100); the top plate (9) is located above the high-precision auxiliary mirror (1); A support column (10) is located below the top plate (9). The top of the support column (10) is fixedly connected to the top plate (9). The support column (10) is used to support the top plate (9) and the microcrystal (100) to be tested. The base plate (11) is fixedly connected to the bottom of the support column (10); the high-precision auxiliary mirror (1), the angle adjustment component and the position adjustment component are all located between the top plate (9) and the base plate (11).

7. The surface shape detection device according to claim 6, characterized in that, The base plate (11) is provided with a handle (12).

8. A method for detecting the surface shape of a microcrystal bottom surface using a laser interferometer, wherein the laser interferometer (200) includes an observation screen capable of displaying a reference spot and a test spot, characterized in that, The surface shape detection method is applicable to the surface shape detection device according to claim 6, and the surface shape detection method includes the following steps: S1. Fix the microcrystal (100) to be tested on the top plate (9) and make the tested surface of the microcrystal (100) face downwards and directly towards the window; S2. Adjust the position of the high-precision auxiliary mirror (1) so that the detection laser emitted by the laser interferometer (200) shines on the mirror surface of the high-precision auxiliary mirror (1) and observe whether there is a test spot on the surface to be measured in the observation screen of the laser interferometer (200). S3. If it exists, adjust the mirror tilt angle of the high-precision auxiliary mirror (1) according to the relative position of the test spot and the reference spot so that the test spot and the reference spot of the test surface coincide. S4. If not, adjust the height of the calibration mirror (8) so that the detection laser emitted by the laser interferometer (200) illuminates the surface of the calibration mirror (8). Obtain the relative position of the test spot and the reference spot of the calibration mirror (8) from the observation screen of the laser interferometer (200). Adjust the mirror tilt angle of the calibration mirror (8) and the high-precision auxiliary mirror (1) synchronously according to the relative position so that the test spot of the calibration mirror (8) coincides with the reference spot. S5. Repeat steps S2 to S4 until the test spot on the tested surface coincides with the reference spot. S6. Obtain the interference fringes of the overlapping light spots, and obtain the surface shape deviation of the measured surface relative to the ideal plane based on the interference fringes.

9. The surface shape detection method according to claim 8, characterized in that, The fixed surface (21) is set at a 45° angle to the horizontal plane, and the vertical line of the fixed surface (21) is set at a 45° angle to the interference mirror surface. The surface of the first plate and the surface of the second plate form a 135° angle. In step S2, the position of the high-precision auxiliary mirror (1) is as follows: in the horizontal direction, the high-precision auxiliary mirror (1) is located directly below the surface being measured; in the vertical direction, the high-precision auxiliary mirror (1) is located on the optical path of the detection laser. In step S3, adjusting the tilt angle of the high-precision auxiliary mirror (1) includes: adjusting the plate surface of the connecting plate (3) to be parallel to the fixed surface (21); In step S4, the mirror tilt angles of the synchronous adjustment calibration mirror (8) and the high-precision auxiliary mirror (1) include: adjusting the plate surface of the connecting plate (3) to be parallel to the fixed surface (21) and adjusting the plate surface of the second plate to be parallel to the horizontal plane.

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