Sucker clamp and laser processing equipment

Abstract

The invention provides a suction cup clamp and laser machining equipment. The suction cup clamp comprises a negative pressure plate and an adsorption plate. The negative pressure plate is provided with a negative pressure groove and a negative pressure channel. One end of the negative pressure channel is communicated with the negative pressure groove, and the other end is communicated with the outer side surface of the negative pressure plate. And the adsorption plate is connected with the negative pressure plate to enclose the negative pressure groove to form a negative pressure cavity. The negative pressure cavity is connected with negative pressure equipment through a negative pressure channel to form a negative pressure environment. And the adsorption plate is provided with a positioning surface opposite to the negative pressure plate. One end of the adsorption hole channel is communicated to the negative pressure cavity, and the other end of the adsorption hole channel is communicated to the positioning surface. And the reflectivity R of the positioning surface to light is greater than or equal to 90%. Through the arrangement, the contrast ratio of the glass substrate and the background is improved, the visual detection system more efficiently captures positioning marks and defects, and the machining precision is improved.

Description

Technical Field

[0001] This disclosure relates to the technical field of laser processing auxiliary tools, specifically to a suction cup clamp and laser processing equipment. Background Technology

[0002] Due to its numerous superior properties, such as high-frequency characteristics (dielectric constant less than 5.0@10GHz), ultra-low loss factor, submicron-level surface flatness, and excellent thermal expansion matching, glass substrates are taking up an increasingly larger share of the packaging substrate market. During the processing of glass substrates, ceramic chucks are typically used as fixing devices to maintain the stability of the glass substrate during processing.

[0003] However, when using the current ceramic chuck to fix the glass substrate, the low contrast between the surface features of the glass substrate and the background (ceramic chuck) during the processing and when using a vision inspection system to perform positioning markings or surface defect detection makes it impossible to effectively capture the positioning marks and surface defects of the glass substrate, affecting the processing positioning accuracy and the efficiency and accuracy of defect detection. Summary of the Invention

[0004] In view of this, the present disclosure aims to provide a suction cup clamp and laser processing equipment to solve the problem that suction cups affect the positioning accuracy and defect detection efficiency of glass substrate processing in the prior art.

[0005] In a first aspect, this disclosure provides a suction cup clamp, including a negative pressure plate and an adsorption plate. The negative pressure plate has a negative pressure groove and a negative pressure channel, one end of which communicates with the negative pressure groove, and the other end of which communicates with the outer surface of the negative pressure plate. The adsorption plate is connected to the negative pressure plate, enclosing the negative pressure groove to form a negative pressure cavity. The negative pressure cavity is connected to a negative pressure device through the negative pressure channel to form a negative pressure environment. The adsorption plate has a positioning surface facing away from the negative pressure plate. The adsorption plate has adsorption channels, one end of which communicates with the negative pressure cavity, and the other end of which communicates with the positioning surface. The reflectivity R of the positioning surface satisfies: R ≥ 90%.

[0006] In the above technical solution, a negative pressure chamber is formed by the negative pressure plate and the adsorption plate enclosing a negative pressure groove. Gas is extracted from the negative pressure chamber by a negative pressure device, creating a negative pressure environment within it. Simultaneously, the negative pressure chamber is connected to the positioning surface through adsorption channels. When the glass substrate to be processed is placed on the positioning surface, the lower side of the glass substrate is under negative pressure, while the upper side is under atmospheric pressure, thus firmly adsorbing and fixing the glass substrate to the positioning surface. This achieves proper positioning of the glass substrate and reduces the risk of damage caused by excessive pressure at certain locations during the fixing process. Furthermore, during processing, a corresponding visual inspection system is used to position the glass substrate and detect defects. The positioning surface increases light reflectivity and improves the contrast between the glass substrate and the background. The visual inspection system can more efficiently capture corresponding positioning marks or existing defects, avoiding deviations in processing position and improving the accuracy of processing positioning and the efficiency and accuracy of defect detection.

[0007] In one specific feasible implementation, the adsorption plate is a monocrystalline silicon plate, and the positioning surface is the surface of the monocrystalline silicon plate facing away from the negative pressure plate.

[0008] In one specific feasible implementation, the surface of the adsorption plate facing away from the negative pressure plate is provided with a monocrystalline silicon layer, and the positioning surface is the surface of the monocrystalline silicon layer facing away from the negative pressure plate.

[0009] In one specific feasible implementation, the bottom of the negative pressure tank is provided with a support part, which is attached to the surface of the adsorption plate facing the negative pressure plate.

[0010] In one specific implementation scheme, there are multiple support sections. The support sections are annular and arranged nested within each other. The multiple support sections divide the negative pressure chamber into multiple independent cavities. Each support section has a connecting notch, through which the independent cavities are connected.

[0011] In one specific implementation, each support has at least one connecting gap that is on the same straight line as a connecting gap on any other support.

[0012] In one specific implementation, each support portion has four connecting notches. The four connecting notches are evenly distributed on the support portion. The multiple connecting notches on multiple support portions are arranged to form two connecting channels, and the two connecting channels intersect perpendicularly.

[0013] In one specific feasible implementation, the negative pressure channel is connected to the bottom of the negative pressure tank. At least four negative pressure channels are provided, and the four negative pressure channels are connected to the negative pressure tank at opposite ends of two connecting channels.

[0014] In one specific implementation, the suction cup clamp also includes an adhesive layer. The suction plate and the negative pressure plate are bonded and fixed together by the adhesive layer.

[0015] Secondly, this disclosure also provides a laser processing apparatus, including a laser source, an optical system, a vision inspection system, and a suction cup fixture as described in any of the above. The laser source is used to generate laser light, and the optical system is used to modulate and focus the laser light. The suction cup fixture is used to fix the workpiece to be processed in a set position, and the laser light modulated and focused by the optical system processes the workpiece fixed on the suction cup fixture. The vision inspection system is used to detect positioning marks and defects on the workpiece to be processed. Attached Figure Description

[0016] Figure 1 The diagram shown is a schematic representation of the overall structure of a suction cup clamp provided in one embodiment of this disclosure.

[0017] Figure 2 The diagram shown is a schematic diagram of the internal structure of a suction cup clamp provided in an embodiment of this disclosure.

[0018] Figure 3 The image shown is a cross-sectional view of a suction cup clamp provided in one embodiment of this disclosure.

[0019] Figure 4 The diagram shown is a structural schematic of a negative pressure plate provided in an embodiment of this disclosure.

[0020] Figure 5 The following is a description of this disclosure. Figure 4 An enlarged schematic diagram of part A in the middle.

[0021] The attached figures are labeled as follows:

[0022] 1. Negative pressure plate; 11. Negative pressure groove; 12. Negative pressure channel; 13. Overlap edge; 14. Support part; 141. Connecting notch; 15. Auxiliary plane.

[0023] 2. Adsorption plate; 21. Positioning surface; 22. Adsorption channel;

[0024] 3. Adhesive layer. Detailed Implementation

[0025] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure are within the scope of protection of this disclosure.

[0026] To facilitate understanding of the suction cup clamp provided in the embodiments of this disclosure, a brief description of the suction cup clamp is provided first. In the field of electronic information equipment, due to its many superior properties such as high-frequency characteristics (dielectric constant less than 5.0@10GHz), ultra-low loss factor, submicron-level surface flatness, and excellent thermal expansion matching, glass substrates account for an increasingly larger proportion of packaging substrates. During the processing of glass substrates, ceramic suction cups are typically used as fixing devices to maintain the stability of the glass substrate during processing.

[0027] Furthermore, to ensure processing quality, precise positioning is required during the processing of the glass substrate to guarantee the accuracy of the processed image and structure. Additionally, surface defects on the glass substrate need to be detected to filter out defective products and improve overall product quality. All of the above requires inspection using a visual inspection system.

[0028] Based on this, the ceramic suction cups currently mainly used to fix glass substrates have high surface roughness due to the inherent limitations of ceramics. When the corresponding images are acquired by the vision inspection system, the incident light undergoes diffuse reflection at the interface between the glass substrate and the ceramic suction cup, which significantly reduces the intensity of the reflected light. The actual reflectivity may be less than 15%, resulting in low contrast between the surface features of the glass substrate and the background (ceramic suction cup). This problem is even more pronounced when a coaxial light source is used.

[0029] As a result, when using a vision inspection system, it is difficult to effectively capture the positioning marks on the edge of the glass substrate and the defects on the surface of the glass substrate, which seriously affects the positioning accuracy of the processing, and the efficiency of defect detection on the glass substrate is also lower, resulting in a decrease in the accuracy of the detection.

[0030] To overcome the above problems, this disclosure provides a suction cup clamp and laser processing equipment. By improving the contrast between the glass substrate and the background (suction cup), the vision forming system can more efficiently and accurately capture the positioning surface and existing defects of the glass substrate, thereby improving processing positioning accuracy and the efficiency of defect identification and detection. The following detailed description, in conjunction with specific drawings and embodiments, further illustrates these improvements.

[0031] Laser processing equipment includes a laser source, an optical system, a vision inspection system, and a suction cup clamp. The laser source generates the laser beam, and the optical system modulates and focuses the laser. The suction cup clamp holds the workpiece in a designated position, and the laser beam, modulated and focused by the optical system, processes the workpiece. The vision inspection system detects positioning marks and defects on the workpiece.

[0032] refer to Figure 1 and Figure 2The main structure of the suction cup clamp provided in the present disclosure embodiment is shown, including a negative pressure plate 1 and an adsorption plate 2. The negative pressure plate 1 is provided with a negative pressure groove 11 and a negative pressure channel 12. One end of the negative pressure channel 12 is connected to the negative pressure groove 11, and the other end is connected to the outer surface of the negative pressure plate 1.

[0033] The adsorption plate 2 is connected to the negative pressure plate 1. The two work together to enclose the negative pressure groove 11 to form a negative pressure cavity. The negative pressure cavity is connected to the negative pressure equipment through the negative pressure channel 12 to form a negative pressure environment. The adsorption plate 2 is provided with a positioning surface 21 facing away from the negative pressure plate. The adsorption plate is provided with adsorption channels 22. One end of the adsorption channel 22 is connected to the negative pressure cavity, and the other end is connected to the positioning surface 21.

[0034] The reflectivity R of the positioning surface 21 satisfies: R ≥ 90%. For example, the reflectivity of the positioning surface 21 can be set to values ​​such as 90%, 91%, 92%, 93%, 94%, 95%, 96%, 97%, and 98%. Limiting the reflectivity of the positioning surface 21 is primarily to ensure accurate and efficient capture of corresponding features during positioning and defect detection by the vision inspection system.

[0035] Here, light refers to the light received by the vision inspection system when it detects positioning marks or surface defects on the workpiece to be processed. It is generally visible light. For example, the wavelength λ of the light satisfies: 400nm≤λ≤800nm.

[0036] Furthermore, the reflectivity R of the positioning surface 21 satisfies: R≥96%. Further increasing the reflectivity of the positioning surface 21 results in higher image contrast when the vision inspection system captures positioning marks and detects surface defects. This facilitates more accurate acquisition and capture of the corresponding positioning marks and existing defects, thereby improving the positioning accuracy of the workpiece and the detection efficiency of potential defects on the workpiece.

[0037] Among them, the negative pressure equipment refers to a vacuum pump and related structures, which are used to extract the gas in the negative pressure chamber through the negative pressure channel 12 to create a negative pressure environment in the negative pressure chamber.

[0038] In addition, Figure 1 The structure of the adsorption channel 22 shown is only an example to illustrate the structure of the adsorption channel 22. Its number, position and size do not represent the limitation of the adsorption channel 22 set in the actual structure. The adsorption channel 22 can be limited according to actual needs.

[0039] When using the suction cup clamp to fix the glass substrate, the glass substrate is placed at a specific position on the positioning surface 21. Then, air is drawn out by a negative pressure device to form a negative pressure environment in the negative pressure chamber. This negative pressure environment is connected to the positioning surface 21 through the adsorption channel 22 opened on the adsorption plate 2. That is, the lower side of the glass substrate is in a negative pressure state, and the upper side is in a normal atmospheric pressure state. In this way, the glass substrate is adsorbed onto the adsorption plate 2 by the pressure difference between the upper and lower sides, thereby fixing the glass substrate and keeping the position of the glass substrate stable during subsequent processing.

[0040] During the processing, the positioning marks on the glass substrate are identified by the vision inspection system of the processing equipment to accurately locate the processing position; in addition, the defects of the glass substrate also need to be identified and detected by the set vision inspection system.

[0041] When imaging with a visual inspection system, such as a coaxial light source, the coaxial light is incident perpendicularly and produces lens reflection on the positioning surface. Compared with the diffuse reflection produced by the existing ceramic structure suction cup surface, the intensity of the reflected light is greatly improved, the imaging contrast between the glass substrate and the positioning surface 21 is improved, the imaging is clearer, and the efficiency and accuracy of capturing positioning marks and surface defects are higher.

[0042] Furthermore, it should be noted that although the embodiments described herein focus on the processing of glass substrates, the suction cup clamps provided in these embodiments are not limited to processing glass substrates; they can also be used to fix other workpieces. Moreover, for other transparent workpieces, if the contrast between the workpiece and the background is low during processing, making it difficult for the visual inspection system to locate the workpiece and detect defects, using the suction cup clamps provided in these embodiments to fix the workpiece can also improve the contrast between the workpiece and the background, enabling more accurate positioning and defect detection, and improving processing quality.

[0043] For example, in some embodiments, the surface roughness Ra of the positioning surface 21 can be set to satisfy: Ra≤3nm.

[0044] By processing the positioning surface 21, the roughness of the positioning surface 21 is reduced, making the positioning surface 21 more and more smooth. This changes the reflection effect of the positioning surface on light from diffuse reflection to specular reflection, resulting in a higher reflectivity of light. In actual design and processing, the roughness of the positioning surface can be adjusted to meet the corresponding requirements, thereby achieving the goal of improving the reflectivity of the positioning surface 21 on light.

[0045] In addition, by combining the selection of the material of the adsorption plate 2, the reflectivity of the positioning surface 21 to light can be improved, thereby reducing the requirement for the roughness of the positioning surface 21.

[0046] Exemplarily, the adsorption plate 2 is a monocrystalline silicon plate, and the positioning surface 21 is the surface of the monocrystalline silicon plate facing away from the negative pressure plate 1. The monocrystalline silicon plate is processed by crystal orientation cutting and chemical mechanical polishing to form a mirror working surface, thereby improving the reflectivity of the positioning surface 21. In some other embodiments, the adsorption plate 2 can also be made of other materials, with a monocrystalline silicon layer disposed on the surface of the adsorption plate 2 facing away from the negative pressure plate 1, and the positioning surface 21 being the surface of the monocrystalline silicon layer facing away from the negative pressure plate 1. This method can also improve the reflectivity of the positioning surface 21, but it will increase the complexity of the structure. In this embodiment, the adsorption plate 2 is a monocrystalline silicon plate as an example for explanation.

[0047] refer to Figure 3 and Figure 4 The negative pressure plate 1 has a plate-like structure, and the negative pressure groove 11 is located on one of the large surfaces of the negative pressure plate 1, making the negative pressure plate 1 form a disc-like structure. An overlapping edge 13 corresponding to the adsorption plate 2 is provided at the edge of the negative pressure groove 11, and the edge of the adsorption plate 2 overlaps on the overlapping edge 13 and is connected to the negative pressure plate 1. Here, the large surface refers to the two opposing surfaces of the negative pressure plate 1 in the thickness direction.

[0048] The bottom of the negative pressure tank 11 is provided with a support part 14, which is attached to the surface of the adsorption plate 2 facing the negative pressure plate 1 to support the adsorption plate 2; or, the surface of the support part 14 facing the adsorption plate 2 is flush with the surface of the overlapping edge 13 facing the adsorption plate 2, and the adsorption plate 2 is supported by the support part 14 and the overlapping edge 13 at the same time.

[0049] The adsorption plate 2 is placed on the overlap edge 13, and the adsorption plate 2 and the negative pressure plate 1 enclose the negative pressure groove 11 to form a negative pressure cavity; on this basis, a support part 14 is set at the bottom of the negative pressure groove 11, which cooperates with the overlap edge 13 to increase the support area of ​​the adsorption plate 2 and improve the stability of the support of the adsorption plate 2.

[0050] Furthermore, the adsorption plate 2 is made of monocrystalline silicon, a brittle material that is prone to breakage under external impact. To ensure the stability of the negative pressure adsorption, the thickness of the adsorption plate 2 should not be too thick, resulting in lower structural strength and making it susceptible to cracks and breakage under impact. The support portion 14 provides auxiliary support to the adsorption plate 2, reducing the risk of structural damage and improving the stability of adsorption and positioning on the glass substrate.

[0051] For example, there are multiple support portions 14, which extend in a ring shape and are arranged nested within each other. The multiple support portions 14 have different sizes and are nested in the inner and outer directions, forming a concentric circle structure with the support portions 14 forming a ring structure. In other embodiments, the support portions 14 can also be other shapes, such as triangles, quadrilaterals, pentagons, etc., and the multiple support portions 14 can be arranged nested within each other with reference to the case where the support portions 14 have a ring structure. Of course, the triangles, quadrilaterals, and pentagons mentioned above refer to the corresponding ring structures.

[0052] In this way, the suction plate 2 can be more stably supported in the area corresponding to the negative pressure groove 11. When the glass substrate is adsorbed and fixed on the suction plate 2 by negative pressure, or when the glass substrate is moved and collided with the suction plate 2, the problem of damage to the suction plate 2 is not easily caused, thus improving the stability of the suction cup clamp.

[0053] For ease of explanation, this embodiment of the present disclosure uses an example where the suction cup clamp is circular in shape and the support part 14 is annular in shape.

[0054] Multiple support parts 14 are arranged in concentric circles to divide the negative pressure chamber into multiple independent cavities. Each support part 14 is provided with a connecting notch 141, and the multiple independent cavities are connected through the connecting notch 141.

[0055] Thus, while multiple annular support parts 14 provide auxiliary support for the adsorption plate 2, the overall shape of the negative pressure chamber is a continuous cavity. Correspondingly, only one negative pressure channel 12 is needed, which can connect to each area of ​​the negative pressure chamber. By evacuating the air using a negative pressure device, the entire negative pressure chamber can be maintained in a negative pressure state, achieving adsorption and positioning of objects on the adsorption plate 2. If the negative pressure chamber is divided into multiple independent cavities, a separate negative pressure channel needs to be set for each independent cavity, which would increase the complexity of the structure and make the manufacturing process more difficult.

[0056] It should be noted that, in this embodiment, the connecting notch 141 can be configured to penetrate the support portion 14 in the thickness direction, that is, the support portion 14 is divided into multiple independent segments by the connecting notch 141; or it can be configured to be a part of the support portion 14 in the thickness direction, for example, the connecting notch 141 is located on the side of the support portion 14 near the bottom of the negative pressure groove 11, or near the adsorption plate 2, or in the middle of the support portion 14 in the thickness direction. Here, the thickness direction refers to the thickness direction of the negative pressure plate 1 (or adsorption plate 2).

[0057] Furthermore, there is no limit to the number of connecting notches 141 provided on the support portion 14, which can be adjusted according to actual needs; on each support portion 14, at least one connecting notch 141 is located on the same straight line as a connecting notch 141 on any other support portion 14. Specifically, multiple independent cavities are connected by multiple connecting notches 141 arranged in a straight line.

[0058] By setting up the above, the connection path between multiple cavities is shortened. When only one negative pressure channel 12 is set up, the position where the negative pressure channel 12 connects to the negative pressure cavity is located on the connection channel formed by the arrangement of the multiple connection gaps 141. In this way, during the process of the negative pressure device evacuating air to form a negative pressure environment in the negative pressure cavity, the gas flow path between the multiple cavities is shortened, the efficiency of forming a negative pressure environment is improved, and the efficiency is higher when adsorbing and positioning the glass substrate.

[0059] For example, the connection point between the negative pressure channel 12 and the negative pressure chamber is located at the end of the connection channel on the outer periphery of the negative pressure chamber. Of course, in some other embodiments, the connection point may be located in the middle of the connection channel or at one end near the center of the negative pressure chamber.

[0060] For example, refer to Figure 2 In this embodiment of the present disclosure, each support portion 14 is provided with four connecting gaps 141, and the four connecting gaps 141 are evenly distributed; and the connecting gaps 141 on the multiple support portions 14 are arranged to form two connecting channels, and the two connecting channels intersect perpendicularly.

[0061] Correspondingly, four negative pressure channels 12 are provided, and the four negative pressure channels 12 are connected one-to-one to the two ends of the above two connecting channels. That is, multiple connecting gaps 141 are arranged to form two connecting channels, and at each end of the two connecting channels, there is an opening of a negative pressure channel 12.

[0062] Thus, when a negative pressure environment is formed in the negative pressure chamber, the four negative pressure channels 12 draw air from all sides of the negative pressure chamber to form a negative pressure environment. The glass substrate placed on the positioning surface 21 is adsorbed through the adsorption channels 22 on the adsorption plate 2. This helps to improve the uniformity of the adsorption force formed in each area of ​​the adsorption plate 2, and the fixing effect on the glass substrate is better and more stable.

[0063] If a negative pressure channel 12 is set up, and air is drawn from a point in the negative pressure chamber to form a negative pressure, the closer to the air drawing position of the negative pressure channel 12, the greater the adsorption force transmitted to the positioning surface 21 through the adsorption channel 22, while the adsorption force generated in the farther away area is smaller, which will lead to an unstable adsorption and fixation of the glass substrate.

[0064] refer to Figure 4 and Figure 5 The suction cup clamp also includes an adhesive layer 3, through which the adsorption plate 2 and the negative pressure plate 1 are bonded and fixed. On the one hand, this can improve the firmness of the connection between the adsorption plate 2 and the negative pressure plate 1, reducing the problem of pitting and collision that may cause damage to the adsorption plate 2 due to relative shaking. On the other hand, the adhesive layer 3 can play a certain buffering role, which can protect the adsorption plate 2 compared to the adsorption plate 2 being directly connected to the negative pressure plate 1, reducing the risk of damage to the adsorption plate 2.

[0065] For example, the adhesive layer 3 is disposed on the support portion 14. In other embodiments, the adhesive layer may also be disposed on the overlap edge 13.

[0066] The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Any modifications or equivalent substitutions made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A suction cup clamp, characterized in that, include: A negative pressure plate is provided with a negative pressure groove and a negative pressure channel. One end of the negative pressure channel is connected to the negative pressure groove, and the other end is connected to the outer surface of the negative pressure plate. An adsorption plate is connected to the negative pressure plate to enclose the negative pressure groove and form a negative pressure cavity. The negative pressure cavity is connected to the negative pressure equipment through the negative pressure channel to form a negative pressure environment. The adsorption plate is provided with a positioning surface facing away from the negative pressure plate; The adsorption plate is provided with adsorption channels, one end of which is connected to the negative pressure chamber and the other end is connected to the positioning surface; The reflectivity R of the positioning surface satisfies: R≥90%.

2. The suction cup clamp according to claim 1, characterized in that, The adsorption plate is a monocrystalline silicon plate, and the positioning surface is the surface of the monocrystalline silicon plate facing away from the negative pressure plate.

3. The suction cup clamp according to claim 1, characterized in that, The surface of the adsorption plate facing away from the negative pressure plate is provided with a monocrystalline silicon layer, and the positioning surface is the surface of the monocrystalline silicon layer facing away from the negative pressure plate.

4. The suction cup clamp according to any one of claims 1-3, characterized in that, The bottom of the negative pressure groove is provided with a support part, which is in contact with the surface of the adsorption plate facing the negative pressure plate.

5. The suction cup clamp according to claim 4, characterized in that, The number of the support parts is multiple, the support parts are ring-shaped, and the multiple support parts are nested together. The multiple supporting portions form multiple independent cavities separated by the negative pressure cavity; Each of the support sections is provided with a connecting notch, through which independent cavities are connected.

6. The suction cup clamp according to claim 5, characterized in that, On each of the support portions, at least one of the connecting gaps is located on the same straight line as one of the connecting gaps on any other of the support portions.

7. The suction cup clamp according to claim 6, characterized in that, Each of the support portions has four connecting notches, and the four connecting notches are evenly distributed. Multiple connecting gaps are arranged to form two connecting channels, and the two connecting channels intersect perpendicularly.

8. The suction cup clamp according to claim 7, characterized in that, The negative pressure channel is connected to the bottom of the negative pressure groove; The negative pressure channel is provided with at least four channels, and the four negative pressure channels are connected one-to-one to the two ends of the two connecting channels.

9. The suction cup clamp according to claim 8, characterized in that, It also includes an adhesive layer, through which the adsorption plate and the negative pressure plate are bonded and fixed.

10. A laser processing device, characterized in that, Includes a laser source, an optical system, a vision inspection system, and a suction cup clamp as described in any one of claims 1-9; The laser source is used to generate laser light; The optical system is used to modulate and focus the laser. The suction cup clamp is used to fix the workpiece to be processed in a set position, and the laser beam modulated and focused by the optical system processes the workpiece fixed on the suction cup clamp. The vision inspection system is used to detect positioning marks and defects on the workpiece to be processed.

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