Ceramic forming apparatus, system, and method

Abstract

The application discloses a ceramic forming device, system and method, and relates to the technical field of forming of semiconductor high-purity ceramic materials. The ceramic forming device comprises a shell, a first forming layer and a second forming layer. The first forming layer and the second forming layer are arranged in the shell in a spaced manner. The two opposite sides of the first forming layer and the second forming layer are surrounded by the inner wall of the shell to form a forming cavity for injecting slurry. The side of the second forming layer, which is away from the first forming layer, is surrounded by the inner wall of the shell to form a vacuum cavity for vacuumizing. The vacuum cavity is communicated with the forming cavity through the second forming layer. The side of the first forming layer, which faces the second forming layer, is flexible. The second forming layer is water-permeable so that the slurry is dehydrated to the vacuum cavity. The vacuum cavity is vacuumized to form a negative pressure. The slurry in the forming cavity is dehydrated under the action of the negative pressure through the second forming layer, and the water is dehydrated to the vacuum cavity. The ceramic body is formed in the forming cavity. The application solves the problem of poor product quality, uniformity and compactness of the traditional wet forming technology in the ceramic forming process.

Description

Technical Field

[0001] This application relates to the field of semiconductor high-purity ceramic material forming technology, and in particular to a ceramic forming equipment, system and method. Background Technology

[0002] Ceramic materials possess numerous advantages, including low density, high strength, and excellent chemical stability, making them crucial in the semiconductor industry. High-purity ceramic structural components are key parts of semiconductor process equipment, and their applications are expanding rapidly with the industry's growth. However, the harsh environments of semiconductor processes, such as high purity, cleanliness, high temperature, corrosion, etching, and thermal shock, impose stringent requirements on the density, uniformity, and thermal stability of ceramic materials. Therefore, the manufacturing process demands rigorous quality control measures for raw material selection, molding and densification technologies and equipment, and processing technologies and equipment.

[0003] In ceramic forming processes and equipment, wet forming is widely used due to its simplicity and ease of implementation. However, traditional wet forming techniques, such as slip casting or pressure slip casting and plastic molding, suffer from poor finished product quality, uniformity, and density.

[0004] Therefore, the above problems urgently need to be solved. Summary of the Invention

[0005] The purpose of this application is to provide a ceramic forming equipment, system, and method to solve the problems of poor finished product quality, uniformity, and density in traditional wet forming technology in ceramic forming processes.

[0006] To address the aforementioned technical problems, the embodiments of this application provide the following technical solutions:

[0007] The first aspect of this application provides a ceramic forming apparatus, comprising:

[0008] case;

[0009] The first forming layer and the second forming layer are disposed alternately in the shell. The two sides of the first forming layer and the second forming layer facing each other and the inner wall of the shell form a forming cavity for injecting slurry. The side of the second forming layer away from the first forming layer and the inner wall of the shell form a vacuum cavity for evacuation. The vacuum cavity is connected to the forming cavity through the second forming layer.

[0010] The first molding layer is flexible on the side facing the second molding layer, and the second molding layer is permeable to water to allow the slurry to be dehydrated into the vacuum chamber.

[0011] The vacuum chamber is evacuated to create negative pressure, which causes the slurry in the molding chamber to be dehydrated through the second molding layer under the action of negative pressure, and the water is removed into the vacuum chamber, forming a ceramic blank in the molding chamber.

[0012] In some embodiments, the aforementioned ceramic forming equipment includes a housing comprising an upper cover, a cavity, and a lower cover; the cavity is a hollow cylinder with openings on both sides along its axial direction, and the upper cover and the lower cover are detachably connected to the openings on both sides; or, the cavity is a hollow cube with openings along its height direction, and the upper cover and the lower cover are detachably connected to the openings on both sides.

[0013] In some embodiments, the aforementioned ceramic forming equipment, wherein when the cavity is a hollow cylindrical shape, the first forming layer includes a metal male mold and a release mold, the release mold being disposed on the side of the metal male mold facing the second forming layer, and the release mold being flexible; or, when the cavity is a hollow cubic shape, the first forming layer includes a release mold, the release mold being connected to the side of the upper cover facing the lower cover.

[0014] In some embodiments, the aforementioned ceramic molding equipment further includes a heating device and a thermal expansion material layer within the housing; when the cavity is a hollow cylinder, the thermal expansion material layer is disposed between the metal male mold and the release mold, and the heating device is disposed on the side of the metal male mold away from the release mold; or, when the cavity is a hollow cube, the thermal expansion material layer is disposed between the upper cover and the release mold, and the heating device is disposed on the side of the upper cover away from the lower cover; wherein the heating device causes the thermal expansion material layer to expand under heat to extrude and form the cavity.

[0015] In some embodiments, the aforementioned ceramic forming equipment includes a metal male mold having an inner cavity and a through hole communicating with the inner cavity on the side wall opposite to the mold. The heating device on the side opposite to the metal male mold is connected to a pressurizing device to pressurize the inner cavity through the through hole.

[0016] In some embodiments, the aforementioned ceramic forming equipment, when the cavity is a hollow cylinder, both the first forming layer and the second forming layer extend along the axial direction; or, when the cavity is a hollow cube, both the first forming layer and the second forming layer extend along the horizontal direction perpendicular to the height direction.

[0017] In some embodiments, the aforementioned ceramic molding equipment, wherein when the cavity is a hollow cylinder or a hollow cube, the second molding layer includes a metal female mold and a porous permeable resin mold; the porous permeable resin mold is disposed on the side of the metal female mold facing the first molding layer, the metal female mold has a flow channel, and the porous permeable resin mold is elastic and has a porous structure; the porous structure and the flow channel connect the vacuum cavity and the molding cavity.

[0018] In some embodiments, the aforementioned ceramic forming equipment has a flow channel that is at least partially spiral-shaped.

[0019] A second aspect of this application provides a ceramic molding system, including a vacuuming device, a grouting device, a drainage device, and the aforementioned ceramic molding device, wherein the vacuuming device is disposed within the housing of the ceramic molding device to communicate with the vacuum chamber of the ceramic molding device, the grouting device is disposed within the housing to communicate with the molding chamber of the ceramic molding device, and the drainage device is disposed within the housing to communicate with the vacuum chamber to drain water from the vacuum chamber.

[0020] A third aspect of this application provides a ceramic forming method, comprising: S1, injecting slurry into a forming cavity formed by the opposing sides of the first forming layer and the second forming layer of the ceramic forming equipment and the inner wall of the shell through a slurry injection device; S2, evacuating the vacuum cavity of the ceramic forming equipment through a vacuum device, thereby creating a negative pressure in the vacuum cavity to dehydrate the slurry in the forming cavity through the second forming layer under the negative pressure, and removing water into the vacuum cavity, and draining water from the vacuum cavity through a drainage device, thereby forming a ceramic blank in the forming cavity; S3, separating the shell, the first forming layer and the second forming layer of the ceramic forming equipment, thereby demolding the ceramic blank in the forming cavity.

[0021] By employing the above technical solutions, the ceramic forming equipment, system, and method of the present invention have at least the following advantages:

[0022] This application provides a ceramic forming device, including a shell, a first forming layer, and a second forming layer. The first forming layer and the second forming layer are spaced apart within the shell. The opposite sides of the first forming layer and the second forming layer, together with the inner wall of the shell, form a forming cavity for injecting slurry. The side of the second forming layer away from the first forming layer, together with the inner wall of the shell, forms a vacuum cavity for evacuation. The vacuum cavity is connected to the forming cavity through the second forming layer. The side of the first forming layer facing the second forming layer is flexible, and the second forming layer is permeable to water so that the slurry is dehydrated into the vacuum cavity. The vacuum cavity is evacuated to form a negative pressure so that the slurry in the forming cavity is dehydrated through the second forming layer under the negative pressure, and the water is removed into the vacuum cavity, forming a ceramic blank in the forming cavity. This application uses a first forming layer, a second forming layer, and the inner wall of the shell to form a forming cavity for injecting slurry. The side of the second forming layer facing away from the first forming layer, together with the inner wall of the shell, forms a vacuum cavity for vacuuming. The water-permeable nature of the second forming layer connects the vacuum cavity and the forming cavity, achieving synchronous negative pressure-driven dehydration throughout the forming cavity. This improves the uniformity of density and structural consistency within the ceramic green body. Simultaneously, the vacuum negative pressure provides continuous forming pressure to the slurry in the forming cavity, resulting in a green body with lower porosity and a denser structure. Furthermore, this application features a flexible first forming layer facing the second forming layer, providing a buffer for the green body in the forming cavity under vacuum negative pressure, reducing stress concentration and making the pressure distribution more uniform. Its flexibility also helps to break the pressure-exposed contact interface between the ceramic green body and the first forming layer during demolding, improving the integrity and success rate of demolding, and further enhancing the quality of the finished product. Through the application of this invention, the problems of poor finished product quality, uniformity, and density in traditional wet forming techniques for ceramic molding are solved.

[0023] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, the preferred embodiments of this application are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0024] The above and other objects, features, and advantages of exemplary embodiments of this application will become readily understood by reading the following detailed description with reference to the accompanying drawings. In the drawings, several embodiments of this application are illustrated by way of example and not limitation, with the same or corresponding reference numerals denoteing the same or corresponding parts, wherein:

[0025] Figure 1 A schematic diagram of the structure of a ceramic forming device according to the present invention is shown.

[0026] Figure 2 A schematic diagram of another ceramic forming device according to the present invention is shown.

[0027] Figure 3A schematic diagram of the structure of a ceramic forming system according to the present invention is shown.

[0028] Figure 4 A schematic diagram of a ceramic forming method according to the present invention is shown.

[0029] Explanation of icon numbers:

[0030] 1. Shell; 11. Upper cover; 12. Cavity; 13. Lower cover;

[0031] 2. First molding layer; 21. Molding cavity; 22. Metal male mold; 23. Release mold;

[0032] 3. Second molding layer; 31. Vacuum cavity; 32. Metal female mold; 33. Porous water-permeable resin mold; 321. Flow channel; 331. Porous structure;

[0033] 4. Heating device;

[0034] 5. Thermal expansion material layer;

[0035] 6. Vacuum pumping equipment;

[0036] 7. Grouting equipment;

[0037] 8. Drainage equipment;

[0038] A. Axial direction; B. Height direction; C. Horizontal direction. Detailed Implementation

[0039] The embodiments of this application will be further described in detail below with reference to the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to illustrate the principles of this application by way of example, but should not be used to limit the scope of this application. This application can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0040] It should be noted that, in the description of this application, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicating orientation or positional relationship, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0041] Furthermore, the terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different parts. "Vertical" is not strictly vertical, but within the permissible margin of error. "Parallel" is not strictly parallel, but within the permissible margin of error. Terms such as "including" or "contains" mean that the element preceding the word encompasses the element listed after it, and do not exclude the possibility of encompassing other elements as well.

[0042] It should also be noted that, in the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application depending on the specific circumstances. All terms used in this application have the same meaning as understood by those skilled in the art to which this application pertains, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and should not be interpreted with an idealized or highly formalized meaning, unless expressly defined herein.

[0043] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, they should be considered part of the specification.

[0044] Ceramic materials possess numerous advantages, including low density, high strength, and excellent chemical stability, making them crucial in the semiconductor industry. High-purity ceramic structural components are key parts of semiconductor process equipment, and their applications are expanding rapidly with the industry's growth. However, the harsh environments of semiconductor processes, such as high purity, cleanliness, high temperature, corrosion, etching, and thermal shock, impose stringent requirements on the density, uniformity, and thermal stability of ceramic materials. Therefore, the manufacturing process demands rigorous quality control measures for raw material selection, molding and densification technologies and equipment, and processing techniques and equipment.

[0045] However, the inventors discovered that wet molding is widely used in ceramic forming processes and equipment due to its simplicity and ease of implementation. Traditional wet molding techniques, such as slip casting or pressure slip casting and plastic molding, suffer from poor uniformity and density of the finished products. Therefore, the inventors developed a ceramic forming equipment, system, and method to improve the uniformity and density of the formed ceramic products, thereby enhancing product quality through technological optimization and improvement.

[0046] Example 1

[0047] like Figures 1 to 3 As shown, the first aspect of this application provides a ceramic forming device, which includes a housing 1, a first forming layer 2, and a second forming layer 3. The first forming layer 2 and the second forming layer 3 are spaced apart within the housing 1. The opposite sides of the first forming layer 2 and the second forming layer 3 form a forming cavity 21 for injecting slurry with the inner wall of the housing 1. The side of the second forming layer 3 away from the first forming layer 2 forms a vacuum cavity 31 for vacuuming with the inner wall of the housing 1. The vacuum cavity 31 is connected to the forming cavity 21 through the second forming layer 3. The side of the first forming layer 2 facing the second forming layer 3 is flexible, and the second forming layer 3 is permeable to water so that the slurry is dehydrated to the vacuum cavity 31. The vacuum cavity 31 is evacuated to form a negative pressure so that the slurry in the forming cavity 21 is dehydrated through the second forming layer 3 under the negative pressure, and the water is removed to the vacuum cavity 31, and a ceramic blank is formed in the forming cavity 21.

[0048] Specifically, this application provides a ceramic forming device, which includes a housing 1, a first forming layer 2 and a second forming layer 3. The housing 1 provides space for the installation of the first forming layer 2 and the second forming layer 3. The first forming layer 2 and the second forming layer 3 are spaced apart inside the housing 1 to form a forming cavity 21 with the inner wall of the housing 1. The forming cavity 21 can be connected to the grouting pipeline of the grouting device 7 to realize grout injection.

[0049] In one embodiment, the grouting equipment 7 used in this application includes a high-pressure storage tank, a high-pressure gas cylinder, a pressure reducing valve, a grouting pipeline, and a shut-off valve installed on the pipeline. By placing a ceramic slurry with a certain solid volume content in the high-pressure storage tank, applying a certain grouting pressure through the high-pressure gas cylinder and the pressure reducing valve, and opening the shut-off valve of the grouting pipeline, the slurry enters the molding cavity 21.

[0050] The second forming layer 3, on the side opposite to the first forming layer 2, forms a vacuum cavity 31 with the inner wall of the shell 1 for vacuuming. The vacuum cavity 31 is connected to the forming cavity 21 through the second forming layer 3, and the second forming layer 3 is made water-permeable. By utilizing the water-permeable properties of the second forming layer 3 to connect the vacuum cavity 31 and the forming cavity 21, the vacuum cavity 31 and the forming cavity 21 are connected to achieve synchronous negative pressure-driven dehydration throughout the forming cavity 21, which improves the uniformity of internal density and structural consistency of the ceramic green body. At the same time, the vacuum negative pressure provides continuous forming pressure to the slurry in the forming cavity 21, making the prepared green body have lower porosity and a denser structure.

[0051] In one embodiment, the vacuum equipment may include a vacuum tank, a vacuum pump, and a vacuum pump shut-off valve. After the slurry enters the molding chamber 21, the vacuum pump and the vacuum pump medium valve are opened to maintain the vacuum tank at a certain vacuum level for a certain period of time. The vacuum chamber 31 is evacuated to form a negative pressure, causing the slurry in the molding chamber 21 to be dehydrated through the second molding layer 3 under the negative pressure, and the water is removed to the vacuum chamber 31. The vacuum chamber 31 can be drained by a drainage device 8, and a ceramic blank is formed in the molding chamber 21. The drainage device 8 may include a water storage tank, a water pump, a drainage pipe, and a shut-off valve on the pipe. When the water pump is started, the shut-off valve is opened, and the water accumulated in the vacuum chamber 31 is pumped into the water storage tank through the drainage pipe. The specific components are not limited.

[0052] This application provides a flexible first molding layer 2 facing the second molding layer 3, which provides a buffer for the ceramic blank in the molding cavity 21 under vacuum negative pressure, reduces stress concentration and makes the pressure distribution more uniform. At the same time, its flexible properties help to break the contact interface between the ceramic blank and the first molding layer 2 after being compressed during demolding, improve the integrity and success rate of demolding, and further improve the quality of the finished product.

[0053] This invention introduces vacuum, high pressure, and molding pressure to act on the green body, which not only significantly improves the density and uniformity of the green body but also increases molding efficiency. Furthermore, this application can also incorporate a heater and thermal expansion material within the shell 1 to design the holding time and cooling rate under temperature conditions. This allows for synchronized drying shrinkage of the ceramic green body and mold shrinkage, reducing drying deformation and cracking of the ceramic green body, improving the yield of ceramic green bodies, and significantly reducing production costs.

[0054] This application provides a ceramic forming device, including a housing 1, a first forming layer 2, and a second forming layer 3. The first forming layer 2 and the second forming layer 3 are spaced apart within the housing 1. The opposite sides of the first forming layer 2 and the second forming layer 3 form a forming cavity 21 for injecting slurry with the inner wall of the housing 1. The side of the second forming layer 3 away from the first forming layer 2 forms a vacuum cavity 31 for vacuuming with the inner wall of the housing 1. The vacuum cavity 31 is connected to the forming cavity 21 through the second forming layer 3. The side of the first forming layer 2 facing the second forming layer 3 is flexible, and the second forming layer 3 is permeable to water so that the slurry is dehydrated to the vacuum cavity 31. The vacuum cavity 31 is evacuated to form a negative pressure so that the slurry in the forming cavity 21 is dehydrated through the second forming layer 3 under the negative pressure, and the water is removed to the vacuum cavity 31, forming a ceramic blank in the forming cavity 21. This application uses a first forming layer 2, a second forming layer 3, and the inner wall of the shell 1 to form a forming cavity 21 for injecting slurry. The side of the second forming layer 3 facing away from the first forming layer 2, together with the inner wall of the shell 1, forms a vacuum cavity 31 for vacuuming. The water-permeable nature of the second forming layer 3 connects the vacuum cavity 31 and the forming cavity 21, achieving synchronous negative pressure-driven dehydration throughout the forming cavity 21. This improves the uniformity of density and structural consistency within the ceramic blank. Simultaneously, the vacuum negative pressure provides continuous forming pressure to the slurry within the forming cavity 21, resulting in a blank with lower porosity and a denser structure. Furthermore, the first forming layer 2 is designed with flexibility on the side facing the second forming layer 3. Under vacuum negative pressure, this provides a buffer for the blank within the forming cavity 21, reducing stress concentration and making the pressure distribution more uniform. Its flexibility also helps to break the pressure-exposed contact interface between the ceramic blank and the first forming layer 2 during demolding, improving the integrity and success rate of demolding and further enhancing the quality of the finished product. The application of this invention solves the problems of poor finished product quality, uniformity, and density in traditional wet forming technology in ceramic forming processes.

[0055] like Figure 1 and Figure 2 As shown, in some embodiments, the housing 1 includes an upper cover 11, a cavity 12, and a lower cover 13; the cavity 12 is a hollow cylinder with openings on both sides along its axial direction A, and the upper cover 11 and the lower cover 13 are detachably connected to the openings on both sides; or, the cavity 12 is a hollow cube with an opening along its height direction B, and the upper cover 11 and the lower cover 13 are detachably connected to the openings on both sides.

[0056] Specifically, this application provides a housing 1 comprising an upper cover 11, a cavity 12, and a lower cover 13, with the upper cover 11 and lower cover 13 detachably connected to the openings of the cavity 12 to facilitate demolding of the formed ceramic blank by the operator. Furthermore, this application provides at least two different structural forms of the cavity 12. In one embodiment, the cavity 12 is a hollow cylinder with openings on both sides along its axial direction A. The upper cover 11 and lower cover 13 are detachably connected to the openings on both sides, making the device suitable for producing tubular or irregularly shaped tubular molded ceramic products due to the hollow cylindrical structure of the cavity 12. In another embodiment, the cavity 12 is a hollow cube with an opening along its height direction B. The upper cover 11 and lower cover 13 are detachably connected to the openings on both sides, making the hollow cubic structure of the cavity 12 suitable for producing sheet-like or irregularly shaped sheet-like molded ceramic products. The at least two embodiments provided in this application expand the structural forms and product categories of ceramic finished products, enabling the selection of the corresponding structural form of the cavity 12 as required for production, and are not specifically limited.

[0057] like Figure 1 and Figure 2 As shown, in some embodiments, when the cavity 12 is in the shape of a hollow cylinder, the first molding layer 2 includes a metal male mold 22 and a release mold 23, the release mold 23 being disposed on the side of the metal male mold 22 facing the second molding layer 3, and the release mold 23 being flexible; or, when the cavity 12 is in the shape of a hollow cube, the first molding layer 2 includes a release mold 23, the release mold 23 being connected to the side of the upper cover 11 facing the lower cover 13.

[0058] Specifically, in one embodiment, when the cavity 12 is a hollow cylinder, the first forming layer 2 includes a metal male mold 22 and a release mold 23. The metal male mold 22 provides axial rigidity and can serve as a load-bearing and force-transmitting component. The flexible release layer is disposed on the side of the metal male mold 22 facing the second forming layer 3. The release mold 23 can be a polyurethane mold, silicone mold, etc., which acts as a non-metallic physical isolation layer, blocking the contact between the slurry and the metal male mold 22. At the same time, its flexibility allows the contact interface with the ceramic blank in the forming cavity 21 to be broken through elastic deformation during demolding, improving the integrity and success rate of demolding, and further improving the quality of the finished product. In this embodiment, the metal male mold 22 used in this application can be tubular or irregularly shaped tubular, which can realize the forming of ceramic blanks with ultra-large aspect ratio and ultra-thin shape.

[0059] In another embodiment, when the cavity 12 is in the shape of a hollow cube, the first molding layer 2 of this application includes a release mold 23. The release mold 23 is connected to the side of the upper cover 11 facing the lower cover 13, so that the upper cover 11 serves as the mounting base and pressure transmission platform for the flexible release mold 23. There is no need to set a metal male mold 22, which saves costs and reduces assembly steps.

[0060] like Figure 1 and Figure 2 As shown, in some embodiments, a heating device 4 and a thermal expansion material layer 5 are also provided inside the housing 1; when the cavity 12 is a hollow cylinder, the thermal expansion material layer 5 is disposed between the metal male mold 22 and the release mold 23, and the heating device 4 is disposed on the side of the metal male mold 22 away from the release mold 23; or, when the cavity 12 is a hollow cube, the thermal expansion material layer 5 is disposed between the upper cover 11 and the release mold 23, and the heating device 4 is disposed on the side of the upper cover 11 away from the lower cover 13; wherein, the heating device 4 causes the thermal expansion material layer 5 to expand by heat to extrude and form the cavity 21.

[0061] Specifically, this application further provides a heating device 4 and a thermal expansion material layer 5 inside the housing 1. The heating device 4 provides heating to cause the thermal expansion material layer 5 to expand due to heat, which in turn provides pressure to the extrusion molding cavity 21. The heating device 4 can be a heating resistance wire, an electric heating rod, an electromagnetic induction coil, etc., and is not limited to any specific type.

[0062] The thermal expansion material layer 5 can be made of thermally expandable polymer materials such as thermally expandable rubber or thermally expandable silicone, so that it can expand under the heating action of the heating element to compress the molding cavity 21, further providing uniform pressure for the molding of the ceramic green body and improving the uniformity and density of the finished ceramic green body. At the same time, after the heating device 4 stops heating, the thermal expansion material layer 5 cools and shrinks, releasing pressure and reducing demolding pressure. The thickness, expansion size, and heat resistance temperature of the thermal expansion material layer 5 can be selected and set according to the specific requirements of ceramic molding, and there are no specific limitations.

[0063] Due to the expansion and contraction of thermally expanding polymer materials, the synchronous contraction of the green body during drying and the thermally expanding polymer can be achieved through controlled cooling technology. By controlling the drying and gravity deformation of the ceramic green body, the automatic demolding of the product green body can also be achieved.

[0064] Furthermore, in order to realize the placement of the heating device 4 and the thermal expansion material layer 5 for the two different embodiments of the hollow cylindrical cavity 12 and the hollow cubic cavity 12 of this application, in terms of structural layout, in one embodiment, when the cavity 12 is hollow cylindrical, the thermal expansion material layer 5 is disposed between the metal male mold 22 and the release mold 23, and the heating device 4 is disposed on the side of the metal male mold 22 away from the release mold 23; in another embodiment, when the cavity 12 is hollow cubic, the thermal expansion material layer 5 is disposed between the upper cover 11 and the release mold 23, and the heating device 4 is disposed on the side of the upper cover 11 away from the lower cover 13, so as to make full use of the structural space of the ceramic molding equipment for the reasonable placement of the heating device 4 and the thermal expansion material layer 5, so that the thermal expansion material layer 5 can stably provide pressure to the extrusion molding cavity 21 after being heated and expanded. The specific placement is not limited.

[0065] In some embodiments, the metal male mold 22 has an inner cavity and a through hole is provided on the side wall opposite to the mold 23 to communicate with the inner cavity. The heating device 4 is connected to a pressurizing device on the side opposite to the metal male mold 22 to pressurize the inner cavity through the through hole.

[0066] Specifically, in order to further improve the density and uniformity of the ceramic body forming process, in one embodiment, the present application provides a pressure boosting device connected to the side of the heating device 4 away from the metal male mold 22. The pressure boosting device may include a valve and a pressure boosting pipe to introduce a high-pressure liquid or gas medium into the space enclosed by the heating device 4 and the shell 1 to the side of the heating device 4 away from the metal male mold 22. By providing a through hole in the side wall of the metal male mold 22 with an inner cavity and a through hole connected to the inner cavity, the high-pressure liquid or gas medium can enter the inner cavity through the through hole to pressurize the inner cavity, thereby applying pressure to the forming cavity 21 on the side of the metal male mold 22 away from the heating device 4, further improving the density and uniformity of the ceramic body forming in the forming cavity 21.

[0067] Furthermore, while the pressurizing device further increases the pressure of the ceramic molding equipment of this application, the heating device 4 enables the coupling of heating and pressurization processes, achieving synergistic thermo-pressurization. This enhances the plastic flowability of the slurry through heating while further eliminating fine pores in the slurry through pressurization, promoting slip rearrangement and improving density and uniformity. In one embodiment, the heating temperature of the heating device 4 can be set to 50-150℃, and the pressurization pressure of the pressurizing device can be set to 50-300MPa, with no specific limitation.

[0068] like Figure 1 and Figure 2 As shown, in some embodiments, when the cavity 12 is in the shape of a hollow cylinder, both the first molding layer 2 and the second molding layer 3 extend along the axial direction A; or, when the cavity 12 is in the shape of a hollow cube, both the first molding layer 2 and the second molding layer 3 extend along the horizontal direction C, which is perpendicular to the height direction B.

[0069] Specifically, in one embodiment, when the cavity 12 is in the shape of a hollow cylinder, the first molding layer 2 and the second molding layer 3 are both extended along the axial direction A to form a continuous tubular or cylindrical molding space. During the vacuum dehydration process, the negative pressure is evenly distributed along the axial direction, and the slurry is simultaneously dehydrated along the radial direction. This is suitable for generating uniform and dense tubular or irregularly shaped tubular molded ceramic products along the axial direction A.

[0070] In another embodiment, when the cavity 12 is a hollow cube, the first molding layer 2 and the second molding layer 3 are both extended along the horizontal direction C, which is perpendicular to the height direction B, so as to form a complete and continuous molding surface and molding space in the horizontal direction C. The negative pressure is evenly distributed in the molding cavity 21 along the horizontal direction C, and the slurry is simultaneously dehydrated along the height direction B. This is suitable for generating uniform and dense sheet-like or irregular sheet-like molded ceramic products along the horizontal direction C.

[0071] like Figure 1 and Figure 2 As shown, in some embodiments, when the cavity 12 is a hollow cylinder or a hollow cube, the second molding layer 3 includes a metal female mold 32 and a porous water-permeable resin mold 33; the porous water-permeable resin mold 33 is disposed on the side of the metal female mold 32 facing the first molding layer 2, the metal female mold 32 has a flow channel 321, and the porous water-permeable resin mold 33 is elastic and has a porous structure 331; the porous structure 331 and the flow channel 321 connect the vacuum cavity 31 and the molding cavity 21.

[0072] Specifically, regardless of whether the cavity 12 is a hollow cylinder or a hollow cube, the second molding layer 3 can include a metal female mold 32 and a porous permeable resin mold 33. The metal female mold 32 serves as a rigid support, providing structural strength. Through the setting of the rigid metal male mold 22 and the metal female mold 32, the dimensional uniformity and precision of the ceramic blank in the molding cavity 21 are ensured. Through the structural design of the metal female mold 32 and the metal male mold 22, the molding of large-size and complex structure products can be realized, achieving the molding of dense and uniform large-size and ultra-thin structures.

[0073] A porous permeable resin mold 33 is disposed on the side of the metal female mold 32 facing the first molding layer 2. The metal female mold 32 has a flow channel 321. The porous permeable resin mold 33 is elastic and has a porous structure 331. The porous structure 331 and the flow channel 321 connect the vacuum chamber 31 and the molding chamber 21 to form a path for the dewatered water of the slurry to flow through. The porous permeable resin mold 33 can be made of polyurethane material, and the thickness can be set to 1-3 mm. Its porous structure 331 provides capillary action to improve the dewatering rate. Its elastic properties also allow it to adhere well to the surface of the slurry, transmit pressure to eliminate gaps in the molding process, and improve the density and uniformity of the finished product.

[0074] The metal female mold 32 can be made of stainless steel. The flow channel 321 can include different forms such as spiral channel, straight and spiral channel combination, etc., and is not limited to any specific form. In one embodiment, the width of the flow channel 321 is set to 0.5-1mm, the depth is 2-5mm, and the flow channel 321 is spaced 2-5mm apart.

[0075] The metal female mold 32 used in this application can be tubular or irregularly shaped, and when used with a metal male mold 22 that can also be tubular or irregularly shaped, it can achieve the forming of ceramic blanks with ultra-large aspect ratios and ultra-thin shapes. It can also be sheet-shaped or irregularly shaped, and when used with a metal male mold 22 that can also be sheet-shaped or irregularly shaped, the specific shape is not limited.

[0076] In some embodiments, the flow channel 321 is at least partially spiral-shaped.

[0077] Specifically, this application designates at least a portion of the flow channel 321 connecting the vacuum cavity 31 to the metal female mold 32 as spiral-shaped. The smooth curvature of the spiral channel allows the water medium within the flow channel 321 to flow smoothly along a spiral trajectory, avoiding turbulence and eddies caused by direct impact. Furthermore, the smooth curvature of the spiral channel helps prevent excessive local pressure during vacuum evacuation of the vacuum cavity 31, achieving a uniform distribution of negative pressure and improving molding uniformity. In one embodiment, the flow channel 321 can be entirely spiral-shaped, or a combination of spiral and vertical flow channels can be used; the specific design is not limited.

[0078] Example 2

[0079] like Figures 1 to 3 As shown, the second aspect of this application provides a ceramic molding system, including a vacuuming device 6, a grouting device 7, a drainage device 8, and the aforementioned ceramic molding device. The vacuuming device 6 is disposed in the housing 1 of the ceramic molding device to communicate with the vacuum chamber 31 of the ceramic molding device, the grouting device 7 is disposed in the housing 1 to communicate with the molding chamber 21 of the ceramic molding device, and the drainage device 8 is disposed in the housing 1 to communicate with the vacuum chamber 31 to drain water from the vacuum chamber 31.

[0080] For details on the specific structure of the ceramic forming equipment, please refer to Example 1, which will not be repeated here.

[0081] To meet the functional requirements of grouting, vacuuming, and drainage of ceramic molding equipment, the second aspect of this application provides a ceramic molding system, including a vacuuming device 6, a grouting device 7, and a drainage device 8. The vacuuming device 6 is installed in the housing 1 of the ceramic molding equipment to connect to the vacuum chamber 31 of the ceramic molding equipment. The grouting device 7 is installed in the housing 1 to connect to the molding chamber 21 of the ceramic molding equipment. The drainage device 8 is installed in the housing 1 to connect to the vacuum chamber 31 so as to drain water from the vacuum chamber 31.

[0082] In one embodiment, the grouting equipment 7 used in this application includes a high-pressure storage tank, a high-pressure gas cylinder, a pressure reducing valve, and a grouting pipeline with a shut-off valve installed on the pipeline. A ceramic slurry with a certain solid volume content is placed in the high-pressure storage tank, and a certain grouting pressure is applied through the high-pressure gas cylinder and the pressure reducing valve. The shut-off valve of the grouting pipeline is then opened, allowing the slurry to enter the forming cavity 21 formed by the opposing sides of the first forming layer 2 and the second forming layer 3, which is enclosed by the inner wall of the shell 1. The high-pressure storage tank and pipeline can be made of stainless steel and have a polyurethane or polytetrafluoroethylene coating or lining. In one embodiment, a discharge port and pipeline are provided at the bottom of the high-pressure storage tank. The inner diameter of the discharge port and pipeline is 25–45 mm, and the high-pressure storage tank and pipeline are designed to withstand pressures of 15–25 MPa. The connection port between the high-pressure storage tank and the high-pressure gas cylinder is located at the top.

[0083] In one embodiment, the vacuum equipment may include a vacuum tank, a vacuum pump, and a vacuum pump shut-off valve. After the slurry enters the molding chamber 21, the vacuum pump and the vacuum pump medium valve are opened to keep the vacuum tank at a certain vacuum level for a certain period of time. The vacuum chamber 31 is evacuated to form a negative pressure so that the slurry in the molding chamber 21 is dehydrated through the second molding layer 3 under the action of negative pressure, and the water is removed to the vacuum chamber 31. The vacuum chamber 31 is drained through the drainage device 8, and a ceramic blank is formed in the molding chamber 21.

[0084] In one embodiment, the drainage device 8 may include a water storage tank, a water pump, a drainage pipe and a shut-off valve on the pipe, etc. When the water pump is started, the shut-off valve is opened, and the water accumulated in the vacuum chamber 31 is pumped into the water storage tank through the drainage pipe, which is not limited to any specific component.

[0085] Furthermore, in some embodiments 2, the ceramic forming equipment of this application can also be equipped with a heater and thermally expanding rubber or thermally expanding silicone on the side of the first forming layer 2 away from the second forming layer 3. The slurry in the forming cavity 21 first achieves rapid dehydration and forming under vacuum and pressure. After holding the pressure for a certain time, it is heated to a certain temperature and time by the heating part, causing the thermally expanding rubber or thermally expanding silicone to expand and extrude the ceramic blank, thereby improving the uniformity and density of the ceramic blank. Correspondingly, the ceramic forming system provided by this application can include heating and temperature control equipment to adjust and control the temperature gradient and duration of heating, and can adopt controllable cooling technology to achieve synchronous shrinkage of the blank during drying and the thermally expanding polymer. By controlling the drying and gravity deformation of the ceramic blank, automatic demolding of the product blank can also be achieved.

[0086] The second aspect of this application provides a ceramic forming system, including a vacuuming device 6, a slurry injection device 7, a drainage device 8, and the aforementioned ceramic forming equipment. The vacuuming device 6 penetrates the housing 1 of the ceramic forming equipment to connect to the vacuum chamber 31 of the ceramic forming equipment. The slurry injection device 7 penetrates the housing 1 to connect to the forming chamber 21 of the ceramic forming equipment. The drainage device 8 penetrates the housing 1 to connect to the vacuum chamber 31 to drain water from the vacuum chamber 31. This application achieves this by using a first forming layer 2 and a second forming layer 3 within the ceramic forming equipment, together with the inner wall of the housing 1, to form a forming chamber 21 for slurry injection. Furthermore, by utilizing the side of the second forming layer 3 facing away from the first forming layer 2, together with the inner wall of the housing 1, a vacuum chamber 31 for vacuuming is formed. The water-permeable nature of the second forming layer 3 connects the vacuum chamber 31 and the forming chamber 21, achieving synchronous negative pressure-driven dehydration throughout the forming chamber 21. This improves the uniformity of density and structural consistency within the ceramic green body. Simultaneously, the vacuum negative pressure provides continuous forming pressure to the slurry within the forming chamber 21, resulting in a green body with lower porosity and a denser structure. Furthermore, this application provides a flexible first forming layer 2 facing the second forming layer 3, which buffers the blank within the forming cavity 21 under vacuum negative pressure, reducing stress concentration and making the pressure distribution more uniform. Simultaneously, its flexibility helps to break the pressure-exposed contact interface between the ceramic blank and the first forming layer 2 during demolding, improving the integrity and success rate of demolding, and further enhancing the quality of the finished product. Through the application of this invention, the problems of poor finished product quality, uniformity, and density in traditional wet forming technology in ceramic forming processes are solved.

[0087] Example 3

[0088] like Figure 4 As shown, a third aspect of this application provides a ceramic forming method, comprising: S1, injecting slurry into a forming cavity 21 formed by the opposite sides of the first forming layer 2 and the second forming layer 3 of the ceramic forming equipment and the inner wall of the shell 1 through a slurry injection device 7; S2, evacuating the vacuum cavity 31 of the ceramic forming equipment through a vacuum device, thereby creating a negative pressure in the vacuum cavity 31 to dehydrate the slurry in the forming cavity 21 through the second forming layer 3 under the negative pressure, and removing water into the vacuum cavity 31, and draining water from the vacuum cavity 31 through a drainage device 8, thereby forming a ceramic blank in the forming cavity 21; S3, separating the shell 1, the first forming layer 2 and the second forming layer 3 of the ceramic forming equipment, thereby demolding the ceramic blank in the forming cavity 21.

[0089] For details on the specific structure of the ceramic forming system, please refer to Embodiment 2; it will not be repeated here.

[0090] This application uses a grouting device 7 to inject grout into the molding cavity 21 formed by the opposite sides of the first molding layer 2 and the second molding layer 3 of the ceramic molding equipment and the inner wall of the shell 1. In one embodiment, the grouting device 7 used in this application includes a high-pressure storage pipe, a high-pressure gas cylinder, a pressure reducing valve, a grouting pipe, and a shut-off valve installed on the pipe. By placing a ceramic slurry with a certain solid volume content in the high-pressure storage tank, applying a certain grouting pressure through the high-pressure gas cylinder and the pressure reducing valve, and opening the shut-off valve of the grouting pipe, the slurry enters the molding cavity 21 formed by the opposite sides of the first molding layer 2 and the second molding layer 3 and the inner wall of the shell 1.

[0091] This application uses a vacuum device to evacuate the vacuum chamber 31 of a ceramic forming equipment. The vacuum device may include a vacuum tank, a vacuum pump, and a vacuum pump shut-off valve. After the slurry enters the forming chamber 21, the vacuum pump and vacuum pump medium valve are opened to maintain the vacuum tank at a certain vacuum level for a certain period of time. The vacuum chamber 31 is evacuated to form a negative pressure, causing the slurry in the forming chamber 21 to be dehydrated through the second forming layer 3 under the negative pressure, and the water is removed into the vacuum chamber 31. The water is drained from the vacuum chamber 31 through the drainage device 8, and a ceramic blank is formed in the forming chamber 21. Furthermore, this application may provide a heater and thermally expanding rubber or thermally expanding silicone on the side of the first forming layer 2 away from the second forming layer 3. The slurry in the forming chamber 21 first achieves rapid dehydration and forming under vacuum and pressure. After holding the pressure for a certain period of time, it is heated to a certain temperature and time by the heating part, causing the thermally expanding rubber or thermally expanding silicone to expand and compress the ceramic blank, thereby improving the uniformity and density of the ceramic blank.

[0092] Finally, in order to obtain the molded product of the ceramic blank, this application separates the housing 1, the first molding layer 2, and the second molding layer 3 of the ceramic molding equipment, so that the ceramic blank in the molding cavity 21 can be demolded. Furthermore, this application sets the side of the first molding layer 2 facing the second molding layer 3 to be flexible. The flexibility helps to break the contact interface between the ceramic blank and the first molding layer 2 after being compressed during demolding, thereby improving the integrity and success rate of demolding and further improving the quality of the finished product.

[0093] A third aspect of this application provides a ceramic forming method, comprising: S1, injecting slurry into a forming cavity 21 formed by the opposite sides of the first forming layer 2 and the second forming layer 3 of the ceramic forming equipment and the inner wall of the shell 1 through a slurry injection device 7; S2, evacuating the vacuum cavity 31 of the ceramic forming equipment through a vacuum device, thereby creating a negative pressure in the vacuum cavity 31 to dehydrate the slurry in the forming cavity 21 through the second forming layer 3 under the negative pressure, and removing water into the vacuum cavity 31, and draining water from the vacuum cavity 31 through a drainage device 8, thereby forming a ceramic blank in the forming cavity 21; S3, separating the shell 1, the first forming layer 2 and the second forming layer 3 of the ceramic forming equipment, thereby demolding the ceramic blank in the forming cavity 21. The ceramic forming method employed in this application, implemented through the ceramic forming system provided in this application, allows for the injection of high-pressure slurry into the forming cavity 21. A vacuum device is used to create negative pressure, causing the slurry in the forming cavity 21 to dehydrate under this negative pressure. Through the drainage device 8, the permeable properties of the second forming layer 3 connect the vacuum cavity 31 and the forming cavity 21, achieving synchronous negative pressure-driven dehydration throughout the forming cavity 21. This improves the uniformity of density and structural consistency within the ceramic blank. Simultaneously, the vacuum negative pressure provides continuous forming pressure to the slurry in the forming cavity 21, resulting in a blank with lower porosity and a denser structure. By setting the side of the first forming layer 2 facing the second forming layer 3 to be flexible, this flexibility helps to disrupt the pressure-exposed contact interface between the ceramic blank and the first forming layer 2 during demolding, improving the integrity and success rate of demolding and further enhancing the quality of the finished product. Through the application of this invention, the problems of poor finished product quality, uniformity, and density in traditional wet forming techniques for ceramic forming are solved.

[0094] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A ceramic forming device, characterized in that, include: case; A first forming layer and a second forming layer are disposed at intervals within the housing. The two sides of the first forming layer and the second forming layer opposite to each other form a forming cavity for injecting slurry with the inner wall of the housing. The side of the second forming layer away from the first forming layer forms a vacuum cavity for drawing a vacuum with the inner wall of the housing. The vacuum cavity is connected to the forming cavity through the second forming layer. The first molding layer is flexible on the side facing the second molding layer, and the second molding layer is permeable to water to allow the slurry to be dehydrated into the vacuum chamber; The vacuum chamber is evacuated to create a negative pressure, which causes the slurry in the forming chamber to be dehydrated through the second forming layer under the negative pressure, and the water is removed into the vacuum chamber, where a ceramic blank is formed. The housing includes an upper cover, a cavity, and a lower cover; The cavity is a hollow cylinder with openings on both sides along its axial direction. The upper cover and the lower cover are detachably connected to the openings on both sides. or, The cavity is a hollow cube with an opening along its height direction, and the upper cover and the lower cover are detachably connected to the openings on both sides. When the cavity is a hollow cylinder or a hollow cube, the second molding layer includes a metal female mold and a porous water-permeable resin mold. The porous permeable resin mold is disposed on the side of the metal female mold facing the first molding layer. The metal female mold has a flow channel. The porous permeable resin mold is elastic and has a porous structure. The porous structure and the flow channel connect the vacuum cavity and the forming cavity.

2. The ceramic forming equipment according to claim 1, characterized in that, When the cavity is a hollow cylinder, the first molding layer includes a metal male mold and a release mold. The release mold is disposed on the side of the metal male mold facing the second molding layer, and the release mold is flexible. or, When the cavity is a hollow cube, the first molding layer includes the release mold, which is connected to the side of the upper cover facing the lower cover.

3. The ceramic forming equipment according to claim 2, characterized in that, The housing is also equipped with a heating device and a layer of thermal expansion material; When the cavity is a hollow cylinder, the thermal expansion material layer is disposed between the metal male mold and the release mold, and the heating device is disposed on the side of the metal male mold away from the release mold; or, When the cavity is a hollow cube, the thermal expansion material layer is disposed between the upper cover and the release mold, and the heating device is disposed on the side of the upper cover away from the lower cover; The heating device causes the thermal expansion material layer to expand due to heat, thereby compressing the molding cavity.

4. The ceramic forming equipment according to claim 3, characterized in that, The metal male mold has an inner cavity and a through hole is provided on the side wall opposite to the release mold to communicate with the inner cavity. The heating device is connected to a pressurizing device on the side opposite to the metal male mold to pressurize the inner cavity through the through hole.

5. The ceramic forming equipment according to claim 1, characterized in that, When the cavity is a hollow cylinder, both the first molding layer and the second molding layer extend along the axial direction. or, When the cavity is a hollow cube, both the first molding layer and the second molding layer extend in a horizontal direction perpendicular to the height direction.

6. The ceramic forming equipment according to claim 1, characterized in that, The flow channel is at least partially spiral-shaped.

7. A ceramic forming system, characterized in that, include: Vacuum equipment; Grouting equipment; Drainage equipment; The ceramic forming equipment as described in any one of claims 1-6; The vacuum pumping device is installed in the housing of the ceramic forming equipment to connect with the vacuum chamber of the ceramic forming equipment; the grouting device is installed in the housing to connect with the forming chamber of the ceramic forming equipment; and the drainage device is installed in the housing to connect with the vacuum chamber to drain water from the vacuum chamber.

8. A ceramic forming method, implemented using the ceramic forming system of claim 7, characterized in that, include: S1. Grout is injected into the molding cavity formed by the opposite sides of the first and second molding layers of the ceramic molding equipment and the inner wall of the shell through the grouting equipment. S2. Vacuuming is performed on the vacuum chamber of the ceramic forming equipment using a vacuum device. The vacuum chamber is evacuated to create a negative pressure so that the slurry in the forming chamber is dehydrated through the second forming layer under the negative pressure and the water is removed into the vacuum chamber. The vacuum chamber is drained through a drainage device, and a ceramic blank is formed in the forming chamber. S3. Separate the shell, first molding layer and second molding layer of the ceramic molding equipment to demold the ceramic blank in the molding cavity.

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