Method for controlling optical characteristic area based on performance difference of combined film layer and optical element

Abstract

The invention discloses an optical characteristic area controllable method based on performance difference of a combined film layer and an optical element. The method comprises the following steps: providing a substrate; depositing a composite film layer structure on the surface of the substrate; the composite film layer structure at least comprises a first film layer and a second film layer; the second film layer is deposited on the first film layer; the first film layer has a first optical characteristic when existing independently, the first film layer and the second film layer jointly form a composite film layer with a second optical characteristic when existing in a combined mode, and the first optical characteristic is different from the second optical characteristic. According to the method, complex patterns can be efficiently formed, flexible control of regional optical characteristics is achieved, and the method is suitable for scenes such as projection light spot customization and optical sensing.

Description

Technical Field

[0001] This invention relates to the technical field of coating processes, specifically a method for controlling optical characteristic regions based on the performance differences of combined film layers, and optical elements. Background Technology

[0002] Optical beam splitting characteristic modulation technology is mainly used in the fields of projection display, optical sensing and imaging systems. Its core objective is to achieve a specific light spot shape or energy distribution by controlling the reflection, transmission or refraction behavior of light.

[0003] Traditional technical approaches can be divided into two categories: the first is the structural control method, which changes the optical path by designing the physical structure of the lens / lens (such as curvature and array arrangement); the second is the film layer control method, which uses the optical constants (refractive index n, extinction coefficient k) of the coating material to achieve functions such as anti-reflection and high reflectivity, but is limited to uniform film layers.

[0004] Currently, the main approach is structural control, which modulates the shape of the projected light spot in a microarray lens by altering the lens's structure. Specifically, it controls the refraction and emission direction of the light source by changing parameters such as the shape, size, and curvature of the microarray lens, thus forming a light spot of a specific shape. For example, the lens can be designed as a plano-convex lens with a groove on one side and a convex array on the other. When the light source shines through the lens, it forms symmetrical light spots through the inner convex surface (groove) and outer convex surface with different curvatures. However, the light spot shapes obtained using this technique are mostly simple and cannot form complex patterns. Therefore, it is necessary to customize the light spot shape of the array lens. Summary of the Invention

[0005] This application provides a method and optical element for regional controllable optical properties based on the performance differences of combined film layers. This method can efficiently form complex patterns and achieve flexible control of regional optical properties, and is suitable for scenarios such as customized projection spot and optical sensing.

[0006] On one hand, this application provides a method for controllable optical property regions based on the performance differences of combined film layers, characterized by the following steps: providing a substrate; depositing a composite film layer structure on the surface of the substrate; the composite film layer structure includes at least a first film layer and a second film layer; the second film layer is deposited on top of the first film layer; the first film layer has a first optical property when it exists alone, and when the first film layer and the second film layer exist together, they together constitute a composite film layer with a second optical property, and the first optical property is different from the second optical property; according to a preset pattern, using the material property differences between the first film layer and the second film layer, a specific area on the surface of the substrate is processed to selectively remove the second film layer while retaining the first film layer underneath; forming at least two types of regions on the surface of the substrate: a first region that retains the composite film layer structure and has the second optical property; and a second region that retains only the first film layer and has the first optical property.

[0007] By adopting the above technical solution, this application draws the film layers of optical elements based on the performance differences of the combined film layers. The first film layer has first optical properties when it exists alone and second optical properties when it is combined with the first film layer. The second film layer is then selectively removed to form different regions. By selectively removing the film layer, high-precision optical property partitions are created on the substrate (e.g., the first region retains the composite film layer, and the second region retains only the first film layer), which solves the problem that traditional methods cannot form complex patterns.

[0008] Preferably, the step of selectively removing the second film layer is achieved by laser ablation, etching, or ion bombardment techniques.

[0009] By adopting the above technical solutions, these technologies provide high spatial resolution, avoid accidental damage to the underlying film layer, ensure that the second film layer is completely removed while the first film layer remains undamaged, and improve processing yield.

[0010] Preferably, the difference in material properties is that the evaporation temperatures of the first film layer and the second film layer are different.

[0011] By adopting the above technical solution, the removal process is made more controllable by utilizing differences in physical properties (such as temperature evaporation threshold). The laser energy can be precisely set to vaporize the high evaporation temperature film layer without affecting the low evaporation temperature layer, reducing process setup time; this, in turn, helps to improve film density and avoids accidental damage during processing.

[0012] Preferably, the processing step employs laser etching, by precisely controlling the laser parameters so that the laser energy is sufficient to vaporize the second film layer without causing substantial damage to the first film layer.

[0013] By adopting the above technical solution, laser etching is used to precisely control parameters (such as spot size and energy) to ensure that only the second film layer is vaporized.

[0014] Preferably, the first optical characteristic is anti-reflection and anti-reflection, and the second optical characteristic is high reflectivity.

[0015] By adopting the above technical solution, in projection applications, a high transmittance difference is formed between the high reflectivity area and the anti-reflectivity area, producing a clear light spot boundary, which solves the limitation of "simple shape" and is suitable for complex light and shadow effects.

[0016] Preferably, the first film layer is an antireflective film layer with a (MgF2-Al2O3)3 structure; the composite film layer structure is a high reflective film layer with a (MgF2-Al2O3)3-MgF2-(Ti3O5-MgF2)5 structure, wherein the second film layer corresponds to the MgF2-(Ti3O5-MgF2)5 film layer structure.

[0017] Preferably, the deposition step is a vacuum coating technique.

[0018] By adopting the above technical solutions, the vacuum environment reduces pollution, the ion source helps improve adhesion, avoids delamination, and extends the life of components.

[0019] Preferably, the composite film structure comprises two or more film layers stacked in sequence, and by selectively removing different regions layer by layer or in groups, two or more regions with different optical properties can be formed on the substrate surface.

[0020] By adopting the above technical solution, the selection of film layers is not limited to the first and second film layers; this method can be extended to an "AB-...-Z" structure. Here, A refers to the first film layer in this application; B refers to the second film layer in this application. By extending to two or more film layers, the limitations of "simple shapes" are overcome, achieving gradient optical effects. Furthermore, through grouping and removal, three-region or even multi-region optical elements can be created.

[0021] On the other hand, this application discloses an optical element manufactured by a method for controllable optical characteristic regions based on the performance differences of combined film layers. The optical element includes: a substrate; a film layer structure disposed on the surface of the substrate and having a predetermined pattern; the film layer structure includes at least two regions: a first region having a composite film layer structure composed of a first film layer and a second film layer, and exhibiting a second optical characteristic; and a second region having only the first film layer and exhibiting a first optical characteristic different from the second optical characteristic.

[0022] Preferably, the first optical property is antireflection and anti-reflection property; the first film layer is a film layer with a (MgF2-Al2O3)3 structure; the second optical property is high reflectance property; and the composite film layer structure is a film layer with a (MgF2-Al2O3)3-MgF2-(Ti3O5-MgF3)5 structure.

[0023] One or more technical solutions provided in this application have at least the following technical effects or advantages:

[0024] 1. This application draws optical element films based on the performance differences of combined films. It utilizes the fact that the first film has first optical properties when it exists alone and second optical properties when combined, and then selectively removes the second film to form different regions. By selectively removing the film, high-precision optical property partitions are created on the substrate, solving the problem that traditional methods cannot form complex patterns.

[0025] 2. This application utilizes differences in physical properties (such as temperature evaporation threshold) to make the removal process more controllable. The laser energy can be precisely set to vaporize the high evaporation temperature film layer without affecting the low evaporation temperature layer, reducing process setup time; this, in turn, helps to improve film density and avoids accidental damage during processing.

[0026] 3. The selection of film layers in this application is not limited to the first and second film layers; the method can be extended to an "AB-...-Z" structure. Here, A refers to the first film layer in this application, and B refers to the second film layer. By extending to two or more film layers, the limitations of "simple shapes" are overcome, achieving gradient optical effects; and by grouping and removing layers, three-region or even multi-region optical elements can be created. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 The reflectance spectrum characterization of the first film layer in Embodiment 1 of this application;

[0029] Figure 2 The reflectance spectrum characterization of the 17-layer composite film structure in Example 1 of this application;

[0030] Figure 3 This is a schematic diagram of the final product structure in Embodiment 1 of this application;

[0031] Figure 4 This is a diagram showing the final product's light spot effect in Embodiment 1 of this application;

[0032] Figure 5 The reflectance spectrum characterization of the first film layer in Embodiment 2 of this application;

[0033] Figure 6 The reflectance spectrum characterization of the bilayer composite film in Example 2 of this application;

[0034] Figure 7 The reflectance spectrum characterization of the three-layer composite film in Example 2 of this application;

[0035] Figure 8 The reflectance spectrum characterization of the first film layer in Embodiment 3 of this application;

[0036] Figure 9 The reflectance spectrum characterization of the bilayer composite film in Example 3 of this application. Detailed Implementation

[0037] This application provides a method and optical element for regional controllable optical properties based on the performance differences of combined film layers. This method can efficiently form complex patterns and achieve flexible control of regional optical properties, and is suitable for scenarios such as customized projection spot and optical sensing.

[0038] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0039] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or server that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or modules not explicitly listed or inherent to such processes, methods, products, or devices.

[0040] This application discloses a method for controlling optical properties based on the performance differences of combined films, comprising the following steps: providing a substrate based on optical components, and depositing a composite film structure on the surface of the substrate.

[0041] The composite membrane structure includes at least a first membrane layer and a second membrane layer; the second membrane layer is deposited on top of the first membrane layer. The first membrane layer and the second membrane layer are membrane layers made of different materials.

[0042] Furthermore, the first film layer has the first optical properties when it exists alone, while when the first film layer and the second film layer exist together, they together form a composite film layer with the second optical properties, and the first optical properties and the second optical properties are different.

[0043] Furthermore, based on a preset pattern, the material property differences between the first and second films are utilized to process specific areas of the substrate surface to selectively remove the second film while retaining the underlying first film. The principle behind selectively removing the second film is based on differences in physical properties (such as temperature evaporation thresholds), making the removal process more controllable.

[0044] Specifically, the selective removal of the second film layer can be achieved through laser ablation, etching, or ion bombardment technology. This application reduces process setup time by precisely setting the vaporization temperature of the high-evaporation-temperature film layer without affecting the low-evaporation-temperature layer; this, in turn, helps to improve film density and avoids accidental damage during processing.

[0045] By selectively removing the second film layer, two regions are formed on the substrate surface. These include a first region and a second region. The first region retains the composite film layer structure and possesses the second optical properties. The second region retains only the first film layer and possesses the first optical properties. This application solves the problem that traditional methods cannot form complex patterns by selectively removing the film layer to create high-precision optical property partitions on the substrate.

[0046] Example

[0047] Example 1

[0048] In Example 1 of this application, the first film layer is an antireflective film layer with a (MgF2-Al2O3)3 structure; the second film layer has a structure of MgF2-(Ti3O5-MgF2)5. The composite film layer structure is a combination of the first film layer and the second film layer, that is, a high reflective film layer with a (MgF2-Al2O3)3-MgF2-(Ti3O5-MgF2)5 structure.

[0049] The structural diagrams of the first membrane layer are shown in Table 1 below; the structural diagrams of the second membrane layer are shown in Table 2 below; and the structural diagrams of the composite membrane layer are shown in Table 3 below.

[0050]

[0051]

[0052]

[0053] Furthermore, by selectively removing the second film layer, two regions are formed on the substrate surface. The first region retains the composite film layer structure and has the second optical property, specifically high reflectivity, and its specific structure is a 17-layer high reflectivity film system (MgF2-Al2O3)3-MgF2-(Ti3O5-MgF2)5; while the second region retains the first film layer structure and has the first optical property, specifically antireflection and anti-reflection properties, and its specific structure is (MgF2-Al2O3)3.

[0054] Additionally, refer to Figure 1 and Figure 2 , Figure 1 The structure of the first film layer is characterized by its reflectance spectra. Figure 2 The reflectance spectra of the 17-layer high-reflectivity film system were characterized.

[0055] The following are the specific steps of the method for controlling the optical properties based on the performance differences of combined films:

[0056] S1. Select a coating machine, clean the vacuum evaporation chamber in advance to ensure cleanliness, put in the part to be coated and the flat sheet of the same material to be coated, and after confirming that the crucible film material is sufficient, close the vacuum chamber door and start evacuating.

[0057] S2. Start the coating program. When the vacuum level in the vacuum chamber reaches 8×e... -3 The process begins pre-melting the film material at time pa, and waits until the vacuum level reaches 3×E. -3 After the temperature rises to 300℃ and is maintained at a constant temperature for 1200s, the program is officially started. At this time, the ion source starts and pre-cleans the substrate surface for 150s with energy parameters of 800 / 800 / 600, then cleans and electro-activates the substrate surface to improve the cohesion coefficient and adhesion of the film layer on the substrate surface.

[0058] S3. After bottom cleaning, the film layer is deposited by evaporation. The evaporation rates of MgF2, Al2O3 and Ti3O5 are set to 6A / s, 3A / s and 3.5A / s respectively. Ion source assisted deposition is used during evaporation to improve the film density. The ion source energies of MgF2, Al2O3 and Ti3O5 during evaporation are 800 / 800 / 600, 1100 / 1000 / 800 and 1100 / 1000 / 800 respectively. A 17-layer high-reflectivity film structure is formed according to the structure (MgF2-Al2O3)3-MgF2-(Ti3O5-MgF2)5.

[0059] Since the evaporation temperatures of Ti3O5 and MgF2 are much lower than those of Al2O3, the laser parameters were adjusted to ensure that the laser action on the substrate caused the MgF2-(Ti3O5-MgF2)5 film to vaporize without affecting the underlying (MgF2-Al2O3)3 film. The desired pattern was drawn using CAD, and then a CO2 laser marking machine with a laser spot size of 0.06 mm and a position repeatability of 1 μm was used for single-sided pattern processing.

[0060] like Figure 3 as well as Figure 4 As shown, the marked area retains only the (MgF2-Al2O3)3 film layer, exhibiting antireflective and anti-reflective properties; the unmarked area is a highly reflective film layer. After laser irradiation, due to the transmittance difference between the highly reflective and highly transparent areas, specific patterned light spots are revealed.

[0061] On the other hand, in Embodiment 1 of this application, an optical element is fabricated by a method that controls the optical properties of the region based on the performance differences of the combined film layers.

[0062] Specifically, the optical element includes: a substrate and a film structure with a preset pattern disposed on the surface of the substrate.

[0063] Furthermore, the film structure comprises two regions: a first region having a composite film structure composed of a first film layer and a second film layer, and exhibiting a second optical property; and a second region having only the first film layer, and exhibiting a first optical property different from the second optical property.

[0064] The first optical property is anti-reflection and anti-reflection properties; the first film layer is a (MgF2-Al2O3)3 structure film layer; the second optical property is high reflectance properties; the composite film layer structure is a (MgF2-Al2O3)3-MgF2-(Ti3O5-MgF2)5 structure film layer.

[0065] Example 2

[0066] The difference between Example 2 and Example 1 is that Example 2 uses a composite film layer with three properties, wherein the first film layer has antireflection and anti-reflection properties, i.e., an antireflection film (AR film), and the film layer structure is as follows:

[0067] (Ta2O5-MgF2) 2 -Ta2O5

[0068] The second membrane structure is as follows:

[0069] (MgF2-AL2O3) 4 -AL2O3

[0070] When the first film layer and the second film layer are combined, a double-layer composite film is formed, wherein the double-layer composite film is a 50% visible light reflective film, and the film structure is as follows:

[0071] (Ta2O5-MgF2) 2 -Ta2O5-(MgF2-AL2O3) 4 -AL2O3

[0072] The structure of the third membrane layer is as follows:

[0073] (MgF2-Ti3O5) 5 -MgF2

[0074] When the first, second, and third layers are simultaneously laminated in layers, a three-layer composite film is formed. This three-layer composite film exhibits high reflectivity, i.e., it is a high-reflectivity film. The film structure is as follows:

[0075] (Ta2O5-MgF2) 2 -Ta2O5-(MgF2-AL2O3) 4 -AL2O3-(MgF2-Ti3O5) 5 -MgF2

[0076] Specifically, the structure of the first membrane layer is shown in Table 4 below.

[0077]

[0078] The structural diagram of the double-layer composite membrane is shown in Table 5 below.

[0079]

[0080] The structural diagram of the three-layer composite membrane is shown in Table 6 below.

[0081]

[0082] The method of controlling the optical property regions with different combined film properties in Example 2 allows for the presentation of three regions with different optical properties on the same substrate with only one deposition.

[0083] Reference Figure 5 , Figure 6 and Figure 7 The values ​​represent the reflectance spectra of the first film layer, the reflectance spectra of the double-layer composite film, and the reflectance spectra of the triple-layer composite film, respectively.

[0084] In Embodiment 2 of this application, the composite film structure is not limited to two layers stacked in sequence. By selectively removing different regions layer by layer or in groups, two regions with different optical properties are formed on the substrate surface.

[0085] In Example 2, the selection of film layers can be three or more. Therefore, the method for controllable optical characteristic regions based on the performance differences of combined film layers in this application is not limited to the first and second film layers. This method can be extended to an "AB-...-Z" structure. Here, A refers to the first film layer in this application; B refers to the second film layer in this application; and Z is the third film layer in Example 2 of this application. By extending to two or more film layers, the limitations of "simple shape" are overcome, and gradient optical effects are achieved. Furthermore, by grouping and removing layers, optical elements with three or even more regions can be created.

[0086] Example 3

[0087] The difference between Example 3 and Example 1 is that the film materials used are different, resulting in composite films with different optical properties. However, the different evaporation temperatures of the films result in the appearance of specific patterned light spots.

[0088] A composite film with two different optical properties. The first film is a blue-reflecting and yellow-transmitting film, and its structure is as follows:

[0089] (Ta2O5-MgF2) 10 -Ta2O5

[0090] The structure of the second membrane layer is as follows:

[0091] SiO2-AG-SiO2

[0092] The composite membrane is an integral high-reflectivity membrane, and its structure is as follows:

[0093] (Ta2O5-MgF2) 10 -Ta2O5-SiO 2- AG-SiO2

[0094] Specifically, the structure of the first membrane layer is shown in Table 7 below.

[0095]

[0096] The structural diagram of the composite membrane is shown in Table 8 below.

[0097]

[0098] The method described in Example 3, which allows for controllable optical property regions based on the differences in the performance of combined film layers, enables the presentation of two regions with different optical properties on the same substrate with only one deposition. Each optical property region exhibits different characteristics; the first film layer has blue-reflective and yellow-transparent properties, while the composite film layer has high reflectivity. This application achieves flexible control over the regional optical properties by removing the second film layer from the composite film layer, making it suitable for applications such as customized projection spots and optical sensing.

[0099] Reference Figure 8 and Figure 9 , where represents the reflectance spectrum characterization of the first film layer and the reflectance spectrum characterization of the composite film layer, respectively.

[0100] This application utilizes differences in physical properties to make the removal process of each film layer more controllable. The laser energy can be precisely set to vaporize the high evaporation temperature film layer without affecting the low evaporation temperature layer, reducing process setup time; this, in turn, helps to improve film density and avoids accidental damage during processing.

[0101] It should be noted that the order of the embodiments described above is merely for descriptive purposes and does not represent the superiority or inferiority of the embodiments. Furthermore, specific embodiments have been described above. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps described in the claims can be performed in a different order than that shown in the embodiments and still achieve the desired result. Additionally, the processes depicted in the drawings do not necessarily require a specific or sequential order to achieve the desired result. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0102] The above description is only a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

[0103] This specification and accompanying drawings are merely illustrative examples of this application and are intended to cover any and all modifications, variations, combinations, or equivalents within the scope of this application. Clearly, those skilled in the art can make various alterations and modifications to this application without departing from its scope. Therefore, if such modifications and modifications fall within the scope of this application and its equivalents, this application intends to include such modifications and modifications.

Claims

1. A method for controllable optical properties based on the performance differences of combined films, characterized in that, Includes the following steps: Provide a base; A composite film structure is deposited on the surface of the substrate; The composite membrane structure includes at least a first membrane layer and a second membrane layer; the second membrane layer is deposited on the first membrane layer. When the first film layer exists alone, it has first optical properties. When the first film layer and the second film layer exist together, they together form a composite film layer with second optical properties, and the first optical properties are different from the second optical properties. According to a preset pattern, the material property difference between the first film layer and the second film layer is used to process a specific area on the surface of the substrate to selectively remove the second film layer while retaining the first film layer underneath. At least two regions are formed on the substrate surface: a first region that retains the composite film structure and has the second optical properties; and a second region that retains only the first film and has the first optical properties.

2. The method for controllable optical properties based on the performance differences of combined films as described in claim 1, characterized in that, The step of selectively removing the second film layer is achieved by laser ablation, etching, or ion bombardment techniques.

3. The method for controllable optical properties based on the performance differences of combined films as described in claim 2, characterized in that, The difference in material properties is due to the different evaporation temperatures of the first film layer and the second film layer.

4. The method for controllable optical properties based on the performance differences of combined films as described in claim 3, characterized in that, The processing step employs laser etching. By precisely controlling the laser parameters, the laser energy is sufficient to vaporize the second film layer without causing substantial damage to the first film layer.

5. The method for controllable optical properties based on the performance differences of combined films as described in claim 1, characterized in that, The first optical characteristic is anti-reflection and anti-reflection, and the second optical characteristic is high reflectivity.

6. The method for controllable optical properties based on the performance differences of combined films as described in claim 5, characterized in that: The first film layer is an antireflective film layer with a (MgF2-Al2O3)3 structure; The composite film structure is a high-reflectivity film with a (MgF2-Al2O3)3-MgF2-(Ti3O5-MgF2)5 structure, wherein the second film corresponds to the MgF2-(Ti3O5-MgF2)5 film structure.

7. The method for controllable optical properties based on the performance differences of combined films as described in claim 1, characterized in that: The deposition step is a vacuum coating technique.

8. The method for controllable optical properties based on the performance differences of combined films as described in claim 1, characterized in that: The composite film structure includes two or more film layers stacked in sequence, and by selectively removing different regions layer by layer or in groups, two or more regions with different optical properties can be formed on the substrate surface.

9. An optical element manufactured by the method for controllable optical characteristic regions based on the performance differences of combined film layers as described in any one of claims 1 to 8, characterized in that, The optical element includes: One base; A film structure with a predetermined pattern disposed on the surface of the substrate; The membrane structure comprises at least two types of regions: The first region has a composite film structure composed of a first film layer and a second film layer, and exhibits a second optical property. The second region has only the first film layer and exhibits a first optical property that is different from the second optical property.

10. The optical element according to claim 9, characterized in that: The first optical characteristic is anti-reflection and anti-transmission properties; The first film layer is a film layer with a (MgF2-Al2O3)3 structure; The second optical characteristic is high reflectivity; The composite film has a structure of (MgF2-Al2O3)3-MgF2-(Ti3O5-MgF2)5.

Images