Dynamic and static integrated gas sensor array gas sensitive performance testing device

Abstract

The invention discloses a dynamic and static integrated gas sensor array gas sensitive performance testing device, and belongs to the technical field of gas sensor detection. A testing cavity of the testing device is a static and dynamic integrated testing cavity and comprises a cavity body (1), a cavity body (2) and a cavity body (3), and a sensor testing internal connecting plate (18-1), a sensor array connecting module (18-2), an ultraviolet light source LED array module (18-3), a sensor testing external connecting plate (9) and a power module (17) are installed in the cavity body. According to the invention, a dynamic gas-sensitive test and a static gas-sensitive test can be carried out on the gas sensor array on the same device, the integrated design of the two systems is realized, the response and recovery processes of the static test are separated, meanwhile, test conditions such as different humidity background gases and ultraviolet light source irradiation can be conveniently provided, and the device has the advantages of high integration level, high reliability and the like. And the test efficiency is high, the cost is low, and convenience and rapidness are realized.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of gas sensor testing, and particularly relates to a dynamic and static integrated gas sensor array gas-sensitive performance testing device. BACKGROUND

[0002] In order to adapt to different testing requirements, semiconductor gas sensors generally have static and dynamic two testing methods. In the testing of VOC gas, the static testing method is generally adopted. The static testing method is to place the sensor in a certain volume of closed test chamber, and the gas-sensitive performance of the sensor to the test gas is obtained by collecting the resistance change of the sensor. In the gas-sensitive testing response process, a certain amount of VOC liquid corresponding to the test gas is injected onto the heating wire in the test chamber through the small hole on the test chamber panel. The liquid is heated and vaporized to obtain test gas of different concentrations. In the gas-sensitive testing recovery process, the operation window of the test chamber is opened, and the gas vapor is naturally released to the outside of the chamber. In the traditional measurement process, the following problems may occur: 1. The response and recovery processes cannot be tested under the set humidity due to the influence of the external environment of the test box. 2. In the gas-sensitive testing recovery process, it is difficult to make the test gas immediately leave the test chamber, and the recovery process is greatly affected by the diffusion speed of the gas.

[0003] When the test gas is not VOC gas, the dynamic testing method needs to be used. The dynamic testing process must be realized by a device different from the static testing device, which greatly improves the testing cost. Unlike the static testing method, the dynamic testing method is to place the gas sensor in a test chamber with a smaller volume, and the test gas is introduced from the gas inlet and discharged from the gas outlet. The volume of the test gas flowing through the gas sensor per unit time is controlled by the gas flow meter to obtain the required test gas concentration and humidity. Since the dynamic test chamber has a small volume, the gas-sensitive testing recovery process can quickly discharge the test gas.

[0004] When the semiconductor gas sensor array needs to use light excitation means to generate or enhance the gas-sensitive performance during testing, the sensor test board needs to be provided with an ultraviolet light source circuit board, and the ultraviolet lamp bead used for light excitation has different packages, such as a patch type and a substrate type. The traditional test device is difficult to be compatible with the ultraviolet light source test conditions or different packages of the ultraviolet light source, and cannot meet the testing requirements of different sensors in the gas sensor array.

[0005] The semiconductor gas sensor array needs a power supply suitable for the testing conditions during testing. For example, the power supply that provides the heating working conditions of the gas sensor requires a wide voltage adjustable range and strong load capacity. For example, the power supply that provides the ultraviolet light source test conditions needs stable voltage and current. For example, the heating wire power supply for VOC liquid evaporation requires a relatively large power supply. The traditional test device can only be additionally provided with different power supplies to meet the testing requirements.

[0006] In summary, the traditional static test and dynamic test are divided into two sets of systems, which requires higher cost and occupies larger space, and it is difficult to balance different test conditions and power supply requirements, so it is urgent to design a gas sensitive test device integrating dynamic test and static test, which can provide ultraviolet light source excitation, micro-hot plate heating and other test conditions, and set power output and monitoring module to meet test requirements. Therefore, in order to realize the above characteristics, improve the test efficiency and reduce the test cost, the application designs a dynamic and static integrated gas sensor array gas sensitive performance test device. SUMMARY

[0007] The dynamic and static integrated gas sensor array gas sensitive performance test device of the application mainly comprises cavities (1), (2) and (3), four support columns (16) are arranged between the cavities (1) and (3);

[0008] The cavities (1), (2) and (3) are communicated, the four support columns (16) are located between the four corners of the cavity (3) and the four corners of the cavity (1), and are fixedly connected with the four corners of the cavity (3) and the four corners of the cavity (1) by pasting glue, and are supported between the two cavities;

[0009] The side wall of the cavity (1) has a closed operation window (19-1), an air inlet hole (13) and an air outlet hole (14), the air inlet hole (13) and the air outlet hole (14) are provided with air valve switches; the "H" shaped connecting plate (22-1) is arranged between the bottom panel opening of the cavity (1) and the top opening of the cavity (2); the cavity conversion window panel (15) is connected to the bottom panel opening of the cavity (1) through a hinge, and the cavity conversion window panel (15) is arranged on the side wall of the cavity (1) after being opened upward; the "H" shaped connecting plate (22-1) is provided with a circumferential sealing element (21-1);

[0010] The cavity (2) is located below the cavity (1), and the side wall has an air inlet hole (11) and an air outlet hole (12), the air inlet hole (11) and the air outlet hole (12) are provided with air valve switches; the top opening of the cavity (2) is in sealing connection with the bottom panel opening of the cavity (1), and the cavity conversion window (15) can be communicated with the cavity (1) when the cavity conversion window (15) is opened; the bottom opening of the cavity (2) is in sealing connection with the top panel opening of the cavity (3);

[0011] The cavity (3) is located below the cavity (2), and its side wall has a closed operation window (19-2), an air inlet (6) and an air outlet (10). Both the air inlet (6) and the air outlet (10) are equipped with air valve switches. The top panel of the cavity (3) is open and a cavity conversion window panel (7) is installed. Opening the cavity conversion window panel (7) can connect the cavity (3) and the cavity (2). The bottom panel of the cavity (3) is equipped with a support column (8), which is fixedly connected to the bottom of the cavity (3) by adhesive. The support column (8) supports the downward-opening cavity conversion window panel (7); the cavity conversion window panel (7) has a hole in the middle for mounting the sensor test internal connection plate (18-1), and a circumferential seal is provided between the sensor test internal connection plate (18-1) and the hole in the middle of the cavity conversion window panel (7); the sensor array connection module (18-2) is mounted on the sensor test internal connection plate (18-1), and the sensor array connection module (18-2) is connected to the ultraviolet light source LED array module (18-3) through a pin header socket;

[0012] There is a U-shaped connecting plate (22-2) between the top panel of the cavity (3) and the bottom opening of the cavity (2); the top panel opening of the cavity (3) is connected to the cavity conversion window panel (7) by a hinge; a circumferential sealing element (21-2) is provided on the U-shaped connecting plate (22-2);

[0013] A sensor test external connection plate (9) is installed on the side wall of the cavity (3). A circumferential seal is provided between the sensor test external connection plate (9) and the side wall of the cavity (3). The sensor test external connection plate (9) is connected to the sensor test internal connection plate (18-1) inside the cavity (3) via a ribbon cable. A power module (17) is connected to the outside of the cavity (3) via a ribbon cable. A heating wire (20) is installed inside the cavity (3).

[0014] The closed operation window (19-1) and the closed operation window (19-2) are equipped with glove operation structures; the closed operation window (19-1) has a hole in the middle for connecting the operation glove, the length of the operation glove is the same as the length of the cavity (1), and a circumferential seal is provided between the operation glove and the hole in the middle of the closed operation window (19-1); the closed operation window (19-2) has a hole in the middle for connecting the operation glove, the length of the operation glove is the same as the length of the cavity (3), and a circumferential seal is provided between the operation glove and the hole in the middle of the closed operation window (19-2); the operation gloves are all made of corrosion-resistant rubber; a small hole (21) is provided on the panel of the closed operation window (19-2), and the small hole (21) can be sealed by sticking tape;

[0015] The air inlet hole (13) of the cavity (1), the air inlet hole (11) of the cavity (2) and the air inlet hole (6) of the cavity (3) are fixedly provided with three-way interfaces, and two air valve switches are respectively arranged outside the cavities; the air outlet hole (14) of the cavity (1), the air outlet hole (12) of the cavity (2) and the air outlet hole (10) of the cavity (3) are fixedly provided with air valve switches outside the box.

[0016] The dynamic and static integrated gas sensor array gas sensitive performance testing device of the application has the following dynamic gas sensitive performance testing method:

[0017] Step one: a certain number of measured gas sensors are installed on the sensor array connecting module (18-2); the closed operation window (19-2) is opened, the sensor array connecting module (18-2) is installed on the sensor test internal connecting plate (18-1) on the cavity conversion window (7), the ultraviolet light source LED array module (18-3) is inserted and installed above the sensor array connecting module (18-2) provided with the measured gas sensor, and the switch of the ultraviolet light source LED array module above the gas sensor requiring ultraviolet light source test conditions is closed; the sensor test external connecting plate (9) and the sensor test internal connecting plate (18-1) are connected through a wire, then the closed operation window (19-2) is installed, and the airtightness is checked; the sensor test external connecting plate (9) is installed on the side wall of the cavity (3), and the power module (17) and the multimeter are connected to the sensor test external connecting plate (9) through a wire;

[0018] Step two: the cavity conversion window panel (15) is closed through the glove of the closed operation window (19-1), the cavity conversion window panel (7) is closed through the glove of the closed operation window (19-2), the small hole (21) on the panel of the closed operation window (19-2) is pasted with adhesive tape, and the air valve switches of the air inlet hole (11) and the air outlet hole (12) are opened;

[0019] Step three: the stable process of the gas sensor: a certain amount of background gas is introduced into the air inlet hole (11) through the three-way interface for a certain period of time, and the gas flows out from the air outlet hole (12);

[0020] Step four: the gas sensitive response process: a certain amount of background gas containing a certain amount of measured gas is introduced into the air inlet hole (11) through the three-way interface for a certain period of time, and the gas flows out from the air outlet hole (12);

[0021] Step five: the gas sensitive recovery process: background gas is introduced into the air inlet hole (11) through the three-way interface, the gas flows out from the air outlet hole (12), and a certain period of time is waited;

[0022] Step six: the next test cycle: steps three, four and five are repeated.

[0023] The static and dynamic integrated gas sensor array gas sensitive performance testing device of the application, the static gas gas sensitive performance testing method is as follows:

[0024] Step one: install a certain number of measured gas sensors on the sensor array connection module (18-2); open the closed operation window (19-2), install the sensor array connection module (18-2) on the sensor test internal connection plate (18-1) on the cavity conversion window panel (7), install the ultraviolet light source LED array module (18-3) above the sensor array connection module (18-2) which is provided with the measured gas sensors, and close the switch of the ultraviolet light source LED array plate module above the gas sensor which needs to be tested under the condition of ultraviolet light source; connect the sensor test external connection plate (9) and the sensor test internal connection plate (18-1) through a wire, then install the closed operation window (19-2), and check the airtightness; install the sensor test external connection plate (9) on the side wall of the cavity (3), and connect the power module (17) and the multimeter to the sensor test external connection plate (9) through a wire;

[0025] Step two: close the cavity conversion window panel (15) through the glove operation of the closed operation window (19-1), open the cavity conversion window panel (7) through the glove operation of the closed operation window (19-2), place the cavity conversion window panel (7) on the support column (8) at the bottom of the cavity (3), and paste the small hole (21) on the panel of the closed operation window (19-2) with adhesive tape;

[0026] Step three: stable process of the gas sensor: turn on the power switch of the heating wire (20), adjust the heating power of the heating wire to 15W, pass the same background gas into the air inlet hole (6) and the air inlet hole (13) through a three-way interface, and let the gas flow out from the air outlet hole (10) and the air outlet hole (14); after the air inlet, close the air inlet hole (6), the air inlet hole (13), the air outlet hole (10) and the air outlet hole (14), and stand for a certain amount of time;

[0027] Step four, gas sensitive response process: tear off the adhesive tape of the small hole (21) on the panel of the closed operation window (19-2), inject a certain amount of liquid corresponding to the VOC gas into the heating wire (20) with a microsyringe, cover the small hole (21) with adhesive tape, and wait for a certain amount of time;

[0028] Step five: gas sensitive recovery process: through the glove operation on the panel of the closed operation window (19-2), the cavity conversion window (7) is rotated upward to close, the sensor test internal connecting plate (18-1), the sensor array connecting module (18-2), the ultraviolet light source LED array module (18-3) enter the cavity (2), through the glove operation on the panel of the closed operation window (19-1), the cavity conversion window (15) is rotated upward to open, through the three-way interface, the same background gas is input into the air inlet hole (6) and the air inlet hole (13) for a certain amount of time, and the gas flows out from the air outlet hole (10) and the air outlet hole (14);

[0029] Step six: the response and recovery process of the next static test is repeated in sequence in steps two, three, four and five.

[0030] Further, the gas sensitive performance test device for the dynamic and static integrated gas sensor array of the application is made of acrylic plates, and is not limited to acrylic plates, and is fixed by pasting glue between the plates, and is kept airtight.

[0031] Further, the size and shape of the external structure and the internal structure of the cavity (1), the cavity (2) and the cavity (3) can be adjusted.

[0032] Further, the material, shape and size of the circuit board used by the power module (17), the sensor test internal connecting plate (18-1), the sensor test external connecting plate (9), the sensor array connecting module (18-2) and the ultraviolet light source LED array plate (18-3) can be adjusted; the circuit layout and wiring of the power module (17), the sensor test internal connecting plate (18-1), the sensor test external connecting plate (9), the sensor array connecting module (18-2) and the ultraviolet light source LED array plate (18-3) can be adjusted.

[0033] Further, the gas sensitive performance test device for the gas sensor array of the application is characterized in that, in the gas sensitive response process of the static test, the adhesive tape of the small hole (21) on the panel of the closed operation window (19-2) is torn open, a certain amount of VOC gas corresponding liquid is injected onto the heating wire (20) by using a microsyringe, the small hole (21) is covered with adhesive tape, and a certain amount of time is waited for the physical diffusion of the gas into the cavity, and the gas is uniformly distributed in the cavity. In order to ensure the uniformity of the gas diffusion in the cavity, the uniformity of the diffusion can be ensured by a certain diffusion time, or a remote control fan can be added to assist the diffusion of the volatile gas in the cavity.

[0034] The microinjector has 0.5uL, 1uL, 5uL, 10uL, 25uL and 50uL range specifications, and the corresponding accuracy range can be selected according to the VOC gas concentration to be obtained, so that the injection amount deviation does not affect the accuracy of the test result.

[0035] The heating wire (20) is heated by the voltage provided by the power module, and the heating temperature of the heating wire is higher than the boiling point temperature of the liquid corresponding to the VOC gas, so that the VOC liquid drops on the heating wire can be volatilized; the heating wire (20) is larger than the needle of the microinjector, and only the injected VOC liquid is heated.

[0036] By adopting the above technical scheme, the gas sensor array gas sensitivity performance test device has the following beneficial effects:

[0037] (1) The dynamic and static combined gas sensitivity test device integrates the static and dynamic gas testing devices, reduces the test cost, and improves the test efficiency.

[0038] (2) The static test chamber is divided into upper and lower parts, so that the response process and recovery process of the sensor are separated, the test gas and the background gas are completely replaced, and the test precision is improved.

[0039] (3) Different numbers of gas sensors in the gas sensor array can be tested simultaneously according to the needs, meeting the test requirements, being flexible in testing, and having strong adaptability.

[0040] (4) Each test chamber is provided with an air inlet hole and an air outlet hole, and the background gas with water vapor can be introduced during the dynamic test and the static test, so that the humidity test conditions of the gas sensor array can be controlled. BRIEF DESCRIPTION OF DRAWINGS

[0041] Figure 1 It is a schematic diagram of the overall structure of the test device of the application;

[0042] Figure 2 It is a side view and top view schematic diagram of the cavity structure of the test device of the application;

[0043] Figure 3 It is a side view and top view schematic diagram of the cavity conversion window of the test device of the application;

[0044] Figure 4 It is a gas valve switching device diagram used in the test device of the application;

[0045] Figure 5 It is a three-way interface device diagram used in the test device of the application. DETAILED DESCRIPTION

[0046] The application will be described in detail below with reference to the embodiments and drawings, it should be pointed out that the described embodiments are only intended to facilitate the understanding of the application, and do not limit the application in any way.

[0047] Example 1: Structure of each main component of the application.

[0048] Figure 1 An external schematic diagram of the test chamber of the application is given. The test chamber is composed of three parts, which are stably supported by four supporting columns in the middle. The upper and lower chambers are both rectangular chambers with an internal edge length of 500mmx500mmx200mm, which are the response chamber and the recovery chamber for static testing, respectively. The side is the operation window, and there is a sealing ring between the edge of the operation window panel and the chamber panel, which can be sealed or opened. The rubber glove is fixed by sealing glue at the circle on the operation window panel, which is used to operate the chamber conversion window inside during the static test process. The chamber face wall thickness is 8mm. The middle chamber is a rectangular chamber with an internal edge length of 120mmx120mmx60mm, which is the conversion chamber for the response process and the recovery process in static testing, and is also the chamber for dynamic testing. The three chambers can be connected to the background gas of water-carrying gas through the gas flow meter from the gas valve to control the humidity in the chamber.

[0049] Figure 2 The side view and top view schematic diagram of the chamber structure of the test device of the application is given. The middle chamber can be sealed by closing the upper and lower chamber conversion windows, or can be communicated with the upper and lower chambers through the upper and lower chamber conversion windows, respectively. There is a sealing ring between the edge of the conversion window and the chamber panel.

[0050] Figure 3 The side view and top view schematic diagram of the chamber conversion window details of the test device of the application is given. There are "hui" shaped connecting plates between the upper and lower chamber panels and the upper and lower openings of the chamber (2), and there are circumferential sealing members on the "hui" shaped connecting plates. The width of the "hui" shaped connecting plate is greater than the opening width of the upper and lower chamber panels, and the opening width of the upper and lower chamber panels is greater than the upper and lower opening width of the chamber (2).

[0051] The gas valve switching device used in the test device of the application is as shown in Figure 4 .

[0052] The three-way interface device used in the test device of the application is as shown in Figure 5 .

[0053] Example 2: Static test of 50ppm ammonia gas by 3 sensors in the gas sensor array under natural light conditions.

[0054] Step one, install 3 gas sensors to be tested into the sensor placement area of the sensor array connection module (18-2). Open the enclosed operation window (19-2), install the sensor array connection module (18-2) on the sensor test internal connection board (18-1) on the cavity conversion window (7). Connect the sensor test external connection board (9) and the sensor test internal connection board (18-1) through the flat cable, and connect the power module (17) and the multimeter to the sensor test external connection board (9) through the flat cable.

[0055] Step two, the cavity conversion window (15) is closed, the cavity conversion window (7) is opened, and the support column (8) at the bottom of the cavity (3) is placed, and the enclosed operation windows (19-1) and (19-2) are closed.

[0056] Step three, the stabilization process of the gas sensor: pass the same background gas through the three-way interface into the gas inlet hole (6) and the gas inlet hole (13) for 10 minutes, and the gas flows out from the gas outlet hole (10) and the gas outlet hole (14). After the gas is passed, close the gas inlet hole (6), the gas inlet hole (13), the gas outlet hole (10) and the gas outlet hole (14), and stand for 10 minutes.

[0057] Step four, the gas sensitive response process: tear off the adhesive tape covering the small hole on the enclosed operation window (19-2) panel, use a 10uL (minimum scale 0.2uL) microsyringe to draw 8.4uL of ammonia water liquid corresponding to 50ppm ammonia gas (calculated according to liquid density, concentration, molar mass, test cavity volume, etc.) onto the heating wire (20), cover the small hole with adhesive tape, and wait for 5 minutes;

[0058] Step five, the gas sensitive recovery process: rotate the cavity conversion window panel (7) upward to close by operating through the glove on the enclosed operation window (19-2) panel, and the sensor test internal connection board (18-1) and the sensor array connection module (18-2) enter the cavity (2). Rotate the cavity conversion window panel (15) upward to open by operating through the glove on the enclosed operation window (19-1) panel. Pass the same background gas through the three-way interface into the gas inlet hole (6) and the gas inlet hole (13) for 10 minutes, and the gas flows out from the gas outlet hole (10) and the gas outlet hole (14).

[0059] Example 3: Static test of 100 ppm formaldehyde under ultraviolet LED light conditions for 2 sensor patches in a gas sensor array

[0060] Step one, install two gas sensors to be tested into the sensor placement area of the sensor array connection module (18-2). Open the enclosed operation window (19-2), install the sensor array connection module (18-2) on the sensor test internal connection board (18-1) on the cavity conversion window (7), install the ultraviolet light source LED array board module above the two gas sensors on the sensor array connection module (18-2), turn on the switch of the ultraviolet light source LED array board module above the two gas sensors. Connect the sensor test external connection board (9) and the sensor test internal connection board (18-1) through the wire, and connect the power module (17) and the multimeter to the sensor test external connection board (9) through the wire.

[0061] Step two, close the cavity conversion window (15) and open the cavity conversion window (7), place the support column (8) at the bottom of the cavity (3), and close the enclosed operation window (19-1) and (19-2).

[0062] Step three, stable process of gas sensor: pass the same background gas into the air inlet hole (6) and the air inlet hole (13) through the three-way interface for 10 minutes, and the gas flows out from the air outlet hole (10) and the air outlet hole (14). After the air is passed, close the air inlet hole (6), the air inlet hole (13), the air outlet hole (10) and the air outlet hole (14), and stand for 10 minutes.

[0063] Step four, gas sensitive response process: tear off the adhesive tape covering the small hole on the enclosed operation window (19-2) panel, use a 25uL (minimum scale 0.5uL) microsyringe to extract 16.5uL of 100ppm formaldehyde gas corresponding to formaldehyde aqueous solution (calculated according to liquid density, concentration, molar mass, test cavity volume, etc.), cover the small hole with adhesive tape, and wait for 5 minutes.

[0064] Step five, gas sensitive recovery process: rotate the cavity conversion window (7) upward to close, and the sensor test internal connection board (18-1) and the sensor array connection module (18-2) enter the cavity (2) by operating the glove on the enclosed operation window (19-2) panel, rotate the cavity conversion window (15) upward to open by operating the glove on the enclosed operation window (19-1) panel. Pass the same background gas into the air inlet hole (6) and the air inlet hole (13) through the three-way interface for 10 minutes, and the gas flows out from the air outlet hole (10) and the air outlet hole (14).

[0065] Example 4: Dynamic test of 5 sensors in the gas sensor array under natural light conditions on 70ppm nitrogen dioxide gas.

[0066] Step one, install 5 gas sensors to be tested into the sensor placement area of the sensor array connection module (18-2). Open the enclosed operation window (19-2), install the sensor array connection module (18-2) on the sensor test internal connection board (18-1) on the cavity conversion window (7), connect the sensor test external connection board (9) and the sensor test internal connection board (18-1) through the wire, connect the power module (17) and the multimeter to the sensor test external connection board (9) through the wire.

[0067] Step two, close the cavity conversion window (15) and the cavity conversion window (7), open the gas valve of the air inlet hole (11) and the air outlet hole (12) respectively.

[0068] Step three, the stabilization process of the gas sensor: pass the background gas from the air inlet hole (11) for 10 minutes, and the gas flows out from the air outlet hole (12).

[0069] Step four, the gas sensitive response process: pass the background gas containing 70 ppm nitrogen dioxide gas from the air inlet hole (11) for 5 minutes, the gas concentration is controlled by the gas flow meter, and the gas flows out from the air outlet hole (12).

[0070] Step five, the gas sensitive recovery process: pass the background gas from the air inlet hole (11), and the gas flows out from the air outlet hole (12), wait for 10 minutes.

[0071] Example 5: Dynamic test of 4 sensor substrates in the gas sensor array under the ultraviolet LED light for 30 ppm nitrogen dioxide gas.

[0072] Step one, install 5 gas sensors to be tested into the sensor placement area of the sensor array connection module (18-2). Open the enclosed operation window (19-2), install the sensor array connection module (18-2) on the sensor test internal connection board (18-1) on the cavity conversion window (7), install the ultraviolet light source LED array board module above the sensor array connection module (18-2) on which the gas sensors to be tested are installed, turn on the switch of the ultraviolet light source LED array board module above the 4 gas sensors. Connect the sensor test external connection board (9) and the sensor test internal connection board (18-1) through the wire, connect the power module (17) and the multimeter to the sensor test external connection board (9) through the wire.

[0073] Step two, close the cavity conversion window (15) and the cavity conversion window (7), open the gas valve of the air inlet hole (11) and the air outlet hole (12) respectively.

[0074] Step three, the stabilization process of the gas sensor: pass the background gas from the air inlet hole (11) for 10 minutes, and the gas flows out from the air outlet hole (12).

[0075] Step four, gas sensitive response process: the background gas containing 30 ppm nitrogen dioxide gas is introduced from the inlet hole (11) for 5 minutes, the gas concentration is controlled by the gas flow meter, and the gas flows out from the outlet hole (12).

[0076] Step five, gas sensitive recovery process: the background gas is introduced from the inlet hole (11), and the gas flows out from the outlet hole (12), and waiting for 10 minutes.

[0077] Finally, it should be noted that the above examples are only used to illustrate the technical solutions of the present application, and are not a limitation on the protection scope of the present application. Although the present application has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that other different forms of changes or variations can be made on the basis of the above description, and here it is not necessary or impossible to exhaust all the embodiments. The several improvements and decorations deduced therefrom should be regarded as the protection scope of the present application.

Claims

1. A gas sensor array gas-sensing performance testing device integrating dynamic and static operation, characterized in that: It includes a cavity (1), a cavity (2) and a cavity (3), and four support columns (16) are provided between the cavity (1) and the cavity (3); The cavity (1), cavity (2) and cavity (3) are connected. The four support columns (16) are located between the four corners of the cavity (3) and the four corners of the cavity (1). They are fixedly connected to the four corners of the cavity (3) and the four corners of the cavity (1) respectively by adhesive, and are supported between the two cavities. The side wall of the cavity (1) has a closed operation window (19-1), an air inlet (13) and an air outlet (14), and both the air inlet (13) and the air outlet (14) are equipped with air valve switches; there is a U-shaped connecting plate (22-1) between the bottom panel of the cavity (1) and the top opening of the cavity (2); the bottom panel of the cavity (1) is connected to the cavity conversion window panel (15) by a hinge, and the cavity conversion window panel (15) rests against the side wall of the cavity (1) after opening upward; a circumferential sealing element (21-1) is provided on the U-shaped connecting plate (22-1); the width of the U-shaped connecting plate (22-1) is greater than the width of the bottom panel opening of the cavity (1), and the width of the bottom panel opening of the cavity (1) is greater than the width of the top opening of the cavity (2); The cavity (2) is located below the cavity (1), and its side wall has an air inlet (11) and an air outlet (12) for dynamic gas-sensitive testing. Both the air inlet (11) and the air outlet (12) are equipped with air valve switches. The top of the cavity (2) is open, and the opening is sealed to the bottom panel opening of the cavity (1). The cavity conversion window panel (15) is opened to communicate with the cavity (1). The bottom of the cavity (2) is open, and the opening is sealed to the top panel opening of the cavity (3). The cavity (3) is located below the cavity (2), and its side wall has a closed operation window (19-2), an air inlet (6), and an air outlet (10). Both the air inlet (6) and the air outlet (10) are equipped with air valve switches. The top panel of the cavity (3) is open and a cavity conversion window panel (7) is installed. Opening the cavity conversion window panel (7) connects the cavity (3) and the cavity (2). The bottom panel of the cavity (3) is equipped with a support column (8), which is fixed to the bottom of the cavity (3) with adhesive. The support column (8) supports the downward-opening cavity conversion window panel (7); the cavity conversion window panel (7) has a hole in the middle for mounting the sensor test internal connection plate (18-1), and a circumferential seal is provided between the sensor test internal connection plate (18-1) and the hole in the middle of the cavity conversion window panel (7); the sensor array connection module (18-2) is connected to the sensor test internal connection plate (18-1) through a pin header socket, and the ultraviolet light source LED array module (18-3) is connected to the sensor array connection module (18-2) through a pin header socket; There is a U-shaped connecting plate (22-2) between the top panel of the cavity (3) and the bottom opening of the cavity (2); the top panel opening of the cavity (3) is connected to the cavity conversion window panel (7) by a hinge; a circumferential sealing element (21-2) is provided on the U-shaped connecting plate (22-2); the width of the U-shaped connecting plate (22-2) is greater than the width of the top panel opening of the cavity (3), and the width of the top panel opening of the cavity (3) is greater than the width of the bottom opening of the cavity (2); A sensor test external connection plate (9) is installed on the side wall of the cavity (3). A circumferential seal is provided between the sensor test external connection plate (9) and the side wall of the cavity (3). The sensor test external connection plate (9) is connected to the sensor test internal connection plate (18-1) inside the cavity (3) via a ribbon cable. A power module (17) is connected to the outside of the cavity (3) via a ribbon cable. A heating wire (20) is installed inside the cavity (3). The closed operation window (19-1) and the closed operation window (19-2) are equipped with glove operation structures; the closed operation window (19-1) has a hole in the middle for connecting the operation glove, the length of the operation glove is the same as the length of the cavity (1), and a circumferential seal is provided between the operation glove and the hole in the middle of the closed operation window (19-1); the closed operation window (19-2) has a hole in the middle for connecting the operation glove, the length of the operation glove is the same as the length of the cavity (3), and a circumferential seal is provided between the operation glove and the hole in the middle of the closed operation window (19-2); the operation gloves are all made of corrosion-resistant rubber; a small hole (21) is provided on the panel of the closed operation window (19-2), and the small hole (21) is sealed by sticking adhesive tape; The air inlet (13) of the cavity (1), the air inlet (11) of the cavity (2) and the air inlet (6) of the cavity (3) are all fixedly equipped with three-way interfaces, and two air valve switches are respectively installed on the outside of the cavity through the three-way interfaces; the air outlet (14) of the cavity (1), the air outlet (12) of the cavity (2) and the air outlet (10) of the cavity (3) are all fixedly equipped with air valve switches on the outside of the box.

2. The gas sensor array gas-sensing performance testing device integrating dynamic and static functions as described in claim 1, characterized in that, The dynamic gas sensing performance test method is as follows: Step 1: Install a certain number of gas sensors to be tested onto the sensor array connection module (18-2); open the closed operation window (19-2), install the sensor array connection module (18-2) on the sensor test internal connection board (18-1) on the cavity conversion window (7), insert and install the ultraviolet light source LED array module (18-3) above the gas sensors to be tested on the sensor array connection module (18-2), close the switch of the ultraviolet light source LED array board module above the gas sensor that requires ultraviolet light source testing conditions; connect the sensor test external connection board (9) and the sensor test internal connection board (18-1) through a ribbon cable, then install the closed operation window (19-2) and check the airtightness; install the sensor test external connection board (9) on the side wall of the cavity (3), and connect the power module (17) and the multimeter to the sensor test external connection board (9) through a ribbon cable; Step 2: Close the cavity conversion window (15) through the glove that closes the operation window (19-1), close the cavity conversion window (7) through the glove that closes the operation window (19-2), use tape to stick the small hole (21) on the panel of the closed operation window (19-2), and open the air valve switches of the air inlet (11) and the air outlet (12). Step 3: Stabilization process of gas sensor: Background gas is introduced into the inlet (11) through the three-way interface for a certain period of time, and the gas flows out from the outlet (12); Step 4: Gas-sensitive response process: Background gas containing a certain amount of the gas to be measured is introduced into the air inlet (11) for a certain period of time through the three-way interface. The gas concentration is controlled by the gas flow meter. The gas flows out from the air outlet (12). Step 5: Gas Sensitivity Recovery Process: Through the three-way interface, background gas is introduced from the air inlet (11), and the gas flows out from the air outlet (12). Wait for a certain amount of time. Step Six: Next test cycle: Repeat steps three, four, and five.

3. The gas sensing performance testing device for a dynamic and static integrated gas sensor array as described in claim 1, characterized in that, The static gas sensing performance test method is as follows: Step 1: Install a certain number of gas sensors to be tested onto the sensor array connection module (18-2); open the closed operation window (19-2), install the sensor array connection module (18-2) on the sensor test internal connection board (18-1) on the cavity conversion window (7), insert and install the ultraviolet light source LED array module (18-3) above the gas sensors to be tested on the sensor array connection module (18-2), close the switch of the ultraviolet light source LED array board module above the gas sensor that requires ultraviolet light source testing conditions; connect the sensor test external connection board (9) and the sensor test internal connection board (18-1) through a ribbon cable, then install the closed operation window (19-2) and check the airtightness; install the sensor test external connection board (9) on the side wall of the cavity (3), and connect the power module (17) and the multimeter to the sensor test external connection board (9) through a ribbon cable; Step 2: Close the cavity conversion window (15) by using the gloves to close the operation window (19-1), open the cavity conversion window (7) by using the gloves to close the operation window (19-2), place the cavity conversion window (7) on the support column (8) at the bottom of the cavity (3), and use tape to stick the small hole (21) on the panel of the operation window (19-2); Step 3: Stabilization process of gas sensor: Turn on the power switch of heating wire (20), and introduce the same background gas into the air inlet (6) and air inlet (13) for a certain period of time through the three-way interface. The gas flows out from the air outlet (10) and air outlet (14). After the gas is introduced, close the air inlet (6), air inlet (13), air outlet (10) and air outlet (14) and let it stand for a certain period of time. Step 4, gas-sensitive response process: Tear off the tape on the small hole (21) on the closed operation window (19-2) panel, inject a certain amount of liquid corresponding to the VOC gas into the heating wire (20) with a micro syringe, cover the small hole (21) with tape, and wait for a certain amount of time. Step 5: Gas Sensitivity Recovery Process: By operating the gloves on the panel of the closed operation window (19-2), the cavity conversion window (7) is rotated upward and closed. The sensor test internal connection plate (18-1), sensor array connection module (18-2), and ultraviolet light source LED array module (18-3) enter the cavity (2). By operating the gloves on the panel of the closed operation window (19-1), the cavity conversion window (15) is rotated upward and opened. Through the three-way interface, the same background gas is introduced into the air inlet (6) and air inlet (13) for a certain period of time. The gas flows out from the air outlet (10) and air outlet (14). Step Six: Perform the response and recovery process for the next static test, repeating steps Two, Three, Four, and Five in sequence.

4. The gas sensing performance testing device for a dynamic and static integrated gas sensor array as described in claim 1, characterized in that, The panels of cavity (1), cavity (2), and cavity (3) are made of acrylic sheets, but are not limited to acrylic sheets. Each sheet is fixed together with adhesive and kept airtight.

5. The gas sensing performance testing device for a dynamic and static integrated gas sensor array as described in claim 1, characterized in that, The size and shape of the external and internal structures of cavities (1), (2), and (3) can be adjusted.

6. The gas sensing performance testing device for a dynamic and static integrated gas sensor array as described in claim 1, characterized in that, The material, shape, and size of the circuit boards used in the power supply module (17), sensor test internal connection board (18-1), sensor test external connection board (9), sensor array connection module (18-2), and ultraviolet light source LED array board (18-3) can be adjusted; the circuit layout and wiring of the power supply module (17), sensor test internal connection board (18-1), sensor test external connection board (9), sensor array connection module (18-2), and ultraviolet light source LED array board (18-3) can be adjusted.

7. The gas sensing performance testing device for a dynamic and static integrated gas sensor array as described in claim 1, characterized in that, During the static gas-sensitive response test, the tape on the small hole (21) on the closed operation window (19-2) panel is torn off, a certain amount of liquid corresponding to the VOC gas is injected into the heating wire (20) using a micro-syringe, the small hole (21) is covered with tape, and a certain amount of time is waited for the gas to physically diffuse into the cavity and be evenly distributed in the cavity. In order to ensure that the gas diffuses evenly in the cavity, a certain diffusion time is used to ensure the uniformity of diffusion. Alternatively, a remote-controlled fan can be added to assist the diffusion of the volatile gas in the cavity. The micro-injector has volume range specifications of 0.5uL, 1uL, 5uL, 10uL, 25uL and 50uL. The corresponding accuracy range can be selected according to the VOC gas concentration to be obtained, so as to ensure that the injection volume deviation does not affect the accuracy of the test results. The heating wire (20) is heated by a voltage supplied by a power module. The voltage is increased so that the heating wire temperature is higher than the boiling point temperature of the liquid corresponding to the VOC gas. The VOC liquid evaporates when it is dropped onto the heating wire. The heating wire (20) only needs to have an area larger than the needle of a microsyringe so that it can only heat the injected VOC liquid.

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