A power failure detection apparatus

Abstract

The application belongs to the technical field of semiconductor manufacturing equipment, and discloses a power failure detection device, which comprises a radio frequency VI power meter, an N-type interface for connecting the radio frequency VI power meter with a connecting line, and a data communication interface and a connecting interface for connecting the radio frequency VI power meter with a remaining wire harness; the power failure detection device further comprises an external magnetic coupling driving structure, an internal magnetic coupling matching structure, an elastic bellows, a multi-petal elastic contact inner core and a pushing structure; the double elastic contact structure effectively solves the interface loosening problem of the traditional N-type interface in the semiconductor equipment operation environment caused by frequent plugging and mechanical vibration, the multi-petal elastic contact inner core provides the main mechanical locking force, and the elastic bellows ensures the uniform distribution of the contact pressure, significantly reduces the contact resistance, prevents the radio frequency signal leakage, and thus guarantees the accuracy of the monitoring data and the controllability of the process.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing equipment technology, and in particular relates to a power supply fault detection device. Background Technology

[0002] In the semiconductor manufacturing field, PECVD (Plasma Enhanced Chemical Vapor Deposition) technology uses a radio frequency power supply to excite plasma in a vacuum reaction chamber, allowing reactive gases to deposit into films at low temperatures. The tunable radio frequency power supply is the core component of the system; its output stability directly determines the plasma density and energy distribution, thus having a decisive impact on key performance parameters such as the uniformity, density, and refractive index of the deposited film.

[0003] In existing technologies, to monitor the operating status of tunable RF power supplies, RF VI power meters are often used to monitor their electrical parameters (such as voltage, current, reflected power, etc.) in real time. However, such power meters are usually connected to the object under test via an N-type interface. In the actual semiconductor equipment operating environment, frequent plugging and unplugging operations or mechanical vibrations can easily cause the N-type interface to loosen and the contact pressure to attenuate, which in turn causes the contact resistance to increase. This not only introduces measurement errors but may also cause RF signal leakage, seriously affecting the accuracy of monitoring data and the controllability of the process. Summary of the Invention

[0004] This invention addresses the problem in existing technologies where frequent insertion / removal operations or mechanical vibrations in actual semiconductor equipment operating environments can easily lead to loosening of N-type interfaces and attenuation of contact pressure, resulting in increased contact resistance. This not only introduces measurement errors but may also cause radio frequency signal leakage, severely affecting the accuracy of monitoring data and the controllability of the process. The invention proposes the following technical solution:

[0005] A power supply fault detection device includes: an RF VI power meter, an N-type interface for connecting the RF VI power meter to a connecting cable, and a data communication interface and a connection interface for connecting the RF VI power meter to other wiring harnesses.

[0006] Power supply fault detection equipment also includes an external magnetic coupling drive structure, an internal magnetic coupling cooperation structure, an elastic bellows, a multi-lobed elastic contact core, and a drive structure;

[0007] An external magnetic coupling drive structure located outside the RF VI power meter is used to generate magnetic drive through external rotation operation;

[0008] The internal magnetic coupling structure located inside the RF VI power meter is magnetically coupled to the external magnetic coupling drive structure, and is used to receive magnetic drive and convert it into mechanical transmission.

[0009] A pushing structure between the inner magnetic coupling structure and the multi-petal elastic contact inner core, for converting axial movement into radial contraction force;

[0010] A multi-petal elastic contact inner core, directly driven by the pushing structure to generate radial contraction;

[0011] And an elastic bellows coaxially arranged inside the multi-petal elastic contact inner core, for generating radial contraction under the action of the pushing structure, and forming surface contact with the terminal of the connecting line.

[0012] As a preferred embodiment of the above technical solution, the external magnetic coupling driving structure comprises:

[0013] A rotating ring rotatably arranged outside the N-type interface;

[0014] An external magnetic coupling rotating ring fixedly connected with the rotating ring.

[0015] As a preferred embodiment of the above technical solution, a limiting groove is arranged outside the rotating ring, and an elastic sealing block corresponding to the limiting groove is arranged outside the N-type interface.

[0016] As a preferred embodiment of the above technical solution, the inner magnetic coupling structure comprises:

[0017] An axial transmission sleeve connected with the external magnetic coupling rotating ring through magnetic coupling;

[0018] A self-tightening ring fixedly arranged inside the axial transmission sleeve, for magnetic attraction connection between the external magnetic coupling rotating ring;

[0019] A positioning groove is arranged on the N-type interface, matched with the axial transmission sleeve.

[0020] As a preferred embodiment of the above technical solution, the pushing structure comprises:

[0021] A conical surface pressing ring fixedly connected with the axial transmission sleeve, and internally provided with a thrust rolling ring;

[0022] The conical surface pressing ring is rotatably connected with the elastic bellows through the thrust rolling ring;

[0023] An actuating plate arranged at one end of the conical surface pressing ring, and transmissionally connected with the inside of the multi-petal elastic contact inner core.

[0024] As a preferred embodiment of the above technical solution, a sliding groove matched with the thrust rolling ring is arranged on the inner wall of the conical surface pressing ring.

[0025] As a preferred embodiment of the above technical solution, a one-way check pawl is welded on the outside of the multi-petal elastic contact inner core, and a plurality of one-way check pawls are connected with the same reset ring, and the reset ring is fixedly connected with the conical surface pressing ring.

[0026] As the preferred technical scheme of the above, the actuating plate and the multi-petal elastic contact inner core are both provided with a rounded corner at the opposite side part.

[0027] As the preferred technical scheme of the above, the N-type interface is provided with a guide groove outside, and the rotating ring is rotatably connected inside the guide groove.

[0028] As the preferred technical scheme of the above, the external magnetic coupling rotating ring is provided with a magnetic member one at the equidistantly embedded outside, the self-tightening ring is provided with a magnetic member two at the equidistantly embedded outside, and the magnetic member one and the magnetic member two on the circumference of the external magnetic coupling rotating ring and the self-tightening ring are alternately arranged.

[0029] The present application has the following advantages:

[0030] (1) The double elastic contact structure effectively solves the interface loosening problem of the traditional N-type interface in the semiconductor equipment running environment caused by frequent plugging and mechanical vibration. The multi-petal elastic contact inner core provides the main mechanical locking force, and the elastic bellows ensures the uniform distribution of the contact pressure, significantly reduces the contact resistance, prevents the leakage of radio frequency signals, and thus ensures the accuracy of the monitoring data and the controllability of the process.

[0031] (2) The magnetic coupling non-contact transmission mode realizes the complete isolation of the external driving and the internal transmission mechanism, which not only ensures the sealing integrity of the equipment, but also avoids the wear and gap increase problems caused by the traditional mechanical connection, greatly improves the long-term stability and service life of the equipment in harsh industrial environments. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 A structure schematic diagram of a power failure detection device is shown;

[0033] Figure 2 A sectional view of an N-type interface is shown;

[0034] Figure 3 A structure schematic diagram of Figure 2 the A area is shown;

[0035] Figure 4 A structure schematic diagram of Figure 2 the B area is shown;

[0036] Figure 5 A structure schematic diagram of an external magnetic coupling rotating ring is shown.

[0037] In the diagram: 1. RF VI power meter; 2. N-type interface; 31. Rotating ring; 32. Limiting groove; 33. Elastic sealing block; 34. External magnetic coupling rotating ring; 35. Axial transmission sleeve; 36. Self-tightening ring; 37. Conical pressure ring; 38. Thrust rolling ring; 39. Elastic bellows; 310. Reset ring; 311. One-way check chuck; 312. Multi-lobed elastic contact inner core; 313. Actuating plate; 314. Slide groove; 315. Positioning groove; 316. Magnetic component one; 317. Magnetic component two; 4. Data communication interface; 5. Connection interface. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments.

[0039] This invention provides a power supply fault detection device, such as... Figures 1 to 5 As shown, it includes: RF VI power meter 1, N-type interface 2 for connecting RF VI power meter 1 to the connecting cable, and data communication interface 4 and connection interface 5 for connecting RF VI power meter 1 to the other wiring harnesses.

[0040] The power supply fault detection equipment also includes an external magnetic coupling drive structure, an internal magnetic coupling cooperation structure, an elastic bellows 39, a multi-lobed elastic contact core 312, and a push structure.

[0041] An external magnetic coupling drive structure is provided outside the RF VI power meter 1 to generate magnetic drive through external rotation operation;

[0042] The internal magnetic coupling structure located inside the RF VI power meter 1 is magnetically coupled to the external magnetic coupling drive structure, and is used to receive magnetic drive and convert it into mechanical transmission.

[0043] A push structure located between the inner magnetic coupling structure and the multi-lobed elastic contact inner core 312 is used to convert axial motion into radial contraction force.

[0044] The multi-lobed elastic contact core 312 is directly driven by the push structure to produce radial contraction;

[0045] And the elastic bellows 39 is coaxially disposed inside the multi-lobed elastic contact core 312, and is used to generate radial contraction under the action of the pushing structure to form surface contact with the terminal of the connecting wire.

[0046] In the operating environment of semiconductor equipment, frequent plugging and unplugging operations or mechanical vibrations can easily cause the N-type interface 2 to loosen and the contact pressure to decrease, which in turn leads to an increase in contact resistance. This not only introduces measurement errors, but may also cause radio frequency signal leakage, seriously affecting the accuracy of monitoring data and the controllability of the process.

[0047] In this application, the dual elastic contact structure effectively solves the problem of interface loosening caused by frequent plugging and unplugging and mechanical vibration in the semiconductor equipment operating environment of the traditional N-type interface 2. The multi-lobed elastic contact core 312 provides the main mechanical locking force, while the elastic bellows 39 ensures the uniform distribution of contact pressure, significantly reduces contact resistance, prevents radio frequency signal leakage, and thus ensures the accuracy of monitoring data and the controllability of the process.

[0048] Furthermore, the non-contact transmission method using magnetic coupling achieves complete isolation between the external drive and the internal transmission mechanism, ensuring the sealing integrity of the equipment and avoiding the wear and increased clearance problems that may be caused by traditional mechanical connections, thus greatly improving the long-term stability and service life of the equipment in harsh industrial environments.

[0049] In use, the wire harness is connected to the N-type interface 2. At this time, the external magnetic coupling drive structure is rotated, and the operation of the external magnetic coupling drive structure drives the operation of the internal magnetic coupling engagement structure. When the internal magnetic coupling engagement structure is running, it converts the rotation operation of the external magnetic coupling drive structure into the radial contraction movement of the multi-lobed elastic contact inner core 312. In turn, the multi-lobed elastic contact inner core 312 squeezes the elastic bellows 39 coaxially arranged on the inner side, so that it produces uniform radial deformation and forms a stable and reliable surface contact with the connection terminal.

[0050] Specifically, an N-type interface 2 is fixedly installed on one end face of the RF VI power meter 1, a data communication interface 4 is installed on the top front of the RF VI power meter 1, and a connection interface 5 is installed on the top front of the RF VI power meter 1 on the side of the data communication interface 4.

[0051] An external magnetic coupling drive structure is rotatably connected to the outside of the N-type interface 2, and an internal magnetic coupling engagement structure is rotatably connected inside the N-type interface 2. One end of the internal magnetic coupling engagement structure is connected to a push structure, and one end of the push structure is connected to a multi-lobed elastic contact inner core 312. The other end of the multi-lobed elastic contact inner core 312 is fixedly connected to the inner wall of the N-type interface 2. An elastic bellows 39 coaxial with the multi-lobed elastic contact inner core 312 is provided inside the N-type interface 2. The elastic bellows 39 is located inside the multi-lobed elastic contact inner core 312.

[0052] As a preferred embodiment of the above technical solution, to facilitate the rotation and fixation of the external magnetic coupling drive structure, the following solution is provided, such as... Figure 2 and Figure 4 As shown, the external magnetic coupling drive structure includes: a rotating ring 31, a limiting groove 32, an elastic sealing block 33, and an external magnetic coupling rotating ring 34; the rotating ring 31 is rotatably disposed outside the N-type interface 2; the external magnetic coupling rotating ring 34 is fixedly connected to the rotating ring 31; the limiting groove 32 is provided on the outer side of the rotating ring 31, and the elastic sealing block 33 corresponding to the limiting groove 32 is provided on the outer side of the N-type interface 2.

[0053] In use, the operator rotates the rotating ring 31. When the rotating ring 31 rotates, it drives the external magnetic coupling rotating ring 34 to rotate synchronously. At the same time, the rotating ring 31 drives the limiting groove 32 to enter the outer side of the elastic sealing block 33. At this time, the elastic sealing block 33 clamps and fixes the rotating ring 31. Then, the rotating ring 31 continues to squeeze the elastic sealing block 33, causing the elastic sealing block 33 to deform. Then, the rotating ring continues to rotate, so that the next limiting groove 32 enters the outer side of the elastic sealing block 33.

[0054] Specifically, the outer side of the N-type interface 2 is provided with a guide groove, and a rotating ring 31 is rotatably connected inside the guide groove of the N-type interface 2. An external magnetic coupling rotating ring 34 (the external magnetic coupling rotating ring 34 is made of high-performance permanent magnet material, specifically neodymium iron boron) is snapped onto the inner wall of the rotating ring 31. Limiting grooves 32 are provided at equal intervals on the outer side of the rotating ring 31. An elastic sealing block 33 is bonded inside the guide groove of the N-type interface 2 at the position of the limiting groove 32.

[0055] As a preferred embodiment of the above technical solution, in order to facilitate the conversion of the rotation of the external magnetically coupled drive structure into axial movement, the following solution is provided, such as... Figure 2 , Figure 3 and Figure 5 As shown, the internal magnetic coupling structure includes: an axial transmission sleeve 35 and a self-tightening ring 36. The axial transmission sleeve 35 is connected to the external magnetic coupling rotating ring 34 via magnetic coupling. The self-tightening ring 36 is fixedly disposed inside the axial transmission sleeve 35 and is used for magnetic attraction connection with the external magnetic coupling rotating ring 34. The N-type interface 2 is provided with a positioning groove 315 that mates with the axial transmission sleeve 35. The pushing structure includes: a conical pressure ring 37, a thrust rolling ring 38, an actuating plate 313, and a sliding groove 314.

[0056] A conical pressure ring 37 is fixedly connected to an axial transmission sleeve 35 and has a thrust roller ring 38 inside. The conical pressure ring 37 is rotatably connected to an elastic bellows 39 through the thrust roller ring 38. An actuating plate 313 is located at one end of the conical pressure ring 37 and is connected to the inner side of a multi-lobed elastic contact core 312. The inner wall of the conical pressure ring 37 is provided with a groove 314 that matches the thrust roller ring 38.

[0057] In use, the external magnetic coupling rotating ring 34 drives the axial transmission sleeve 35 through the magnetic coupling with the self-tightening ring 36 (magnetic element 1 316 and magnetic element 2 317 have opposite magnetic poles on opposite sides, with opposite magnetic polarities (N pole and S pole correspond to each other), forming a continuous magnetic pole pair and establishing a stable magnetic field coupling). The axial transmission sleeve 35 rotates and moves along the inside of the N-type interface 2, thereby driving the conical pressure ring 37 to move. When the conical pressure ring 37 moves, it drives the elastic bellows 39 to bend through the cooperation of the sliding groove 314 and the thrust rolling ring 38, so that the bent elastic bellows 39 contacts the terminal of the connecting wire.

[0058] Specifically, the N-type interface 2 has a positioning groove 315 inside, and an axial transmission sleeve 35 is vertically movably connected inside the positioning groove 315. A self-tightening ring 36 (made of high-performance permanent magnet material, specifically neodymium iron boron) is snapped into the axial transmission sleeve 35. A conical pressure ring 37 is fixedly installed at one end of the axial transmission sleeve 35 near the elastic bellows 39. The conical pressure ring 37 and the N-type interface 2 are threaded together. A sliding groove 314 is opened inside the conical pressure ring 37, and a thrust roller 38 is rotatably connected inside the sliding groove 314. One end of the thrust roller 38 near the elastic bellows 39 is fixed thereto, and the other end of the elastic bellows 39 is fixed inside the N-type interface 2. An actuating plate 313, coaxial with the elastic bellows 39, is welded inside the ring 38. The external magnetic coupling rotating ring 34 and the self-tightening ring 36 are radially magnetized and configured as multi-pole magnetic rings. Magnetic element 316 is equidistantly embedded on the outer side of the external magnetic coupling rotating ring 34, and magnetic element 317 is equidistantly embedded on the outer side of the self-tightening ring 36. Magnetic element 316 and magnetic element 317 are alternately arranged on the circumference of the external magnetic coupling rotating ring 34 and the self-tightening ring 36 (magnetic elements 316 and 317 have opposite magnetic poles on their opposite faces, i.e., N pole and S pole), so that when the external magnetic coupling rotating ring 34 rotates, it drives the self-tightening ring 36 to rotate (and the more poles, the smoother the transmission, the greater the torque, and the stronger the anti-slip ability).

[0059] As a preferred embodiment of the above technical solution, to facilitate the reset of the multi-lobed elastic contact core 312 after deformation, the following solution is provided, such as... Figure 2 and Figure 3 As shown, a one-way check claw 311 is welded to the outside of the multi-lobed elastic contact inner core 312. A reset ring 310 is connected between several one-way check claws 311. The reset ring 310 is fixedly connected to the conical pressure ring 37. The edges of the opposite surfaces of the actuating plate 313 and the multi-lobed elastic contact inner core 312 are provided with rounded corners, and the two rounded corners correspond to each other.

[0060] When in use, the conical pressure ring 37 moves and pushes the multi-lobed elastic contact inner core 312 inward through the actuating plate 313, which squeezes the outer side of the elastic bellows 39. At the same time, the one-way check pawl 311 separates from the reset ring 310.

[0061] When a reset is required, the reset ring 310 enters the one-way check claw 311, and at this time, the one-way check claw 311 pulls the multi-lobed elastic contact inner core 312 to perform a reset.

[0062] Working principle: In actual use, the radio frequency power supply cable to be tested is inserted into the N-type interface 2 of the device to ensure that the data communication interface 4 and the connection interface 5 are connected to the corresponding monitoring system.

[0063] The operator manually rotates the rotating ring 31, which drives the external magnetic coupling rotating ring 34 to rotate synchronously. The limiting groove 32 cooperates with the elastic sealing block 33 to provide phased positioning feedback and resistance. The external magnetic coupling rotating ring 34 drives the internal self-tightening ring 36 through magnetic coupling. The self-tightening ring 36 drives the conical pressure ring 37 to rotate. The conical pressure ring 37 is threadedly connected to the N-type interface 2, which causes the self-tightening ring 36 to drive the axial transmission sleeve 35 to move axially in the positioning groove 315, realizing non-contact power transmission and maintaining the sealing integrity of the equipment.

[0064] The axially moving conical pressure ring 37, through the cooperation of the sliding groove 314 and the thrust rolling ring 38, converts the axial movement into the pressure deformation of the elastic bellows 39, causing the elastic bellows 39 to generate radial pressure on the connecting wire terminal. Under the push of the conical pressure ring 37, the actuating plate 313 squeezes the multi-lobed elastic contact inner core 312. The multi-lobed elastic contact inner core 312 contracts outward, applying uniform radial pressure to the elastic bellows 39 on its inner side. At the same time, the elastic bellows 39 undergoes radial deformation, forming a 360° tight surface contact with the connecting wire terminal. The one-way check pawl 311 separates from the reset ring 310 and locks in the current working position.

[0065] After establishing a stable electrical connection, the RF VI power meter 1 begins to monitor the voltage, current, and power parameters of the RF power supply in real time. The monitoring data is transmitted to the host computer system through the data communication interface 4. The continuous pressure of the elastic bellows 39 ensures stable contact performance even under vibration. After the test is completed, the reverse rotating ring 31 resets the ring 310 into the one-way check chuck 311, pulling the multi-lobed elastic contact core 312 back to its initial state. The elastic bellows 39 returns to its original shape under its own elasticity, disconnecting from the terminal. All components are reset in an orderly manner, ready for the next test operation.

[0066] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it.

Claims

1. A power supply fault detection device, characterized in that, include: RF VI power meter (1), N-type interface (2) for connecting RF VI power meter (1) to the connecting cable, and data communication interface (4) and connection interface (5) for connecting RF VI power meter (1) to the remaining wiring harness. The power supply fault detection equipment also includes an external magnetic coupling drive structure, an internal magnetic coupling cooperation structure, an elastic bellows (39), a multi-lobed elastic contact core (312), and a drive structure; An external magnetic coupling drive structure is set outside the RF VI power meter (1) to generate magnetic drive through external rotation operation; The internal magnetic coupling structure located inside the RF VI power meter (1) is magnetically coupled with the external magnetic coupling drive structure to receive magnetic drive and convert it into mechanical transmission. A push structure located between the inner magnetic coupling structure and the multi-lobed elastic contact inner core (312) is used to convert axial motion into radial contraction force; The multi-lobed elastic contact core (312) is directly driven by the push structure to produce radial contraction; And an elastic bellows (39) is coaxially disposed inside the multi-lobed elastic contact core (312) to generate radial contraction under the action of the pushing structure and form surface contact with the terminal of the connecting wire; The external magnetic coupling drive structure includes: A rotating ring (31) is rotatably disposed outside the N-type interface (2); An external magnetic coupling rotating ring (34) is fixedly connected to a rotating ring (31); The internal magnetic coupling structure includes: The axial transmission sleeve (35) is connected to the external magnetic coupling rotating ring (34) via magnetic coupling; The self-tightening ring (36) is fixed inside the axial transmission sleeve (35) and is used for magnetic connection with the external magnetic coupling rotating ring (34); The N-type interface (2) is provided with a positioning groove (315) that cooperates with the axial transmission sleeve (35). The propulsion structure includes: A conical pressure ring (37) is fixedly connected to the axial transmission sleeve (35), and a thrust roller (38) is provided inside. The conical pressure ring (37) is rotatably connected to the elastic bellows (39) via the thrust roller ring (38); The actuating plate (313) is located at one end of the conical pressure ring (37) and is connected to the inner side of the multi-lobed elastic contact inner core (312) for transmission. The multi-lobed elastic contact inner core (312) is welded with a one-way check claw (311) on the outside. A reset ring (310) is connected between several of the one-way check claws (311). The reset ring (310) is fixedly connected to the conical pressure ring (37). The actuating plate (313) and the multi-lobed elastic contact inner core (312) both have rounded corners on their opposite sides, and the two rounded corners correspond to each other; Magnetic component one (316) is equidistantly embedded on the outer side of the external magnetic coupling rotating ring (34), and magnetic component two (317) is equidistantly embedded on the outer side of the self-tightening ring (36). Magnetic component one (316) and magnetic component two (317) are arranged alternately on the circumference of the external magnetic coupling rotating ring (34) and the self-tightening ring (36).

2. The power supply fault detection device according to claim 1, characterized in that, The rotating ring (31) is provided with a limiting groove (32) on the outside, and the N-type interface (2) is provided with an elastic sealing block (33) corresponding to the limiting groove (32) on the outside.

3. The power supply fault detection device according to claim 1, characterized in that, The inner wall of the conical pressure ring (37) is provided with a groove (314) that matches the thrust rolling ring (38).

4. The power supply fault detection device according to claim 1, characterized in that, The N-type interface (2) has a guide groove on its outer side, and the rotating ring (31) is rotatably connected to the inside of the guide groove.

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