A multi-stage separation and purification device for photoresist stripping solution

Abstract

The application discloses a multi-stage separation and purification device for photoresist stripping liquid, relates to the technical field of photoresist stripping liquid regeneration, and specifically comprises a separation and purification assembly and a separation temperature control module. Heat transfer and evaporation are completed through a multi-stage heat pipe structure arranged in a heat exchange cavity. The flow range of the photoresist stripping liquid is changed in combination with a dynamically changeable thin layer gap, and the high-efficiency heat transfer and evaporation effect is achieved under the vortex flow formed by continuous rotation. The comprehensive effect of the three improves the solvent recovery efficiency in the regeneration of photoresist stripping liquid waste liquid, reduces the energy consumption loss in the solvent recovery process, and further combines the intelligent separation temperature control setting, so that the flow range of the photoresist stripping liquid is adjusted in real time during the change of the temperature required for heat transfer, and the high-efficiency heat transfer and evaporation effect of the photoresist stripping liquid is ensured.

Description

Technical Field

[0001] This invention relates to the field of photoresist stripping solution regeneration technology, specifically to a multi-stage separation and purification device for photoresist stripping solution. Background Technology

[0002] Stripping fluid, as a wet electronic chemical, mainly consists of organic solvents and a small amount of water. Organic solvents are important chemical materials with wide applications in coatings, electrochemistry, adhesives, paints, and cleaning agents. Photoresist waste stripping fluid contains a large amount of photoresist, water, and organic solvents, with a high organic solvent content. If these photoresist, water, and organic solvents are not properly treated, they will cause a large amount of pollutants to enter the air or soil, producing many harmful substances and causing significant environmental pollution. At the same time, organic solvents will also cause serious harm to water bodies and trigger various environmental problems. They will also produce harmful gases such as carbon monoxide, as well as contribute to the greenhouse effect caused by nitrogen oxides and sulfides in industry, among other environmental issues.

[0003] In the prior art, the characteristic of thin film evaporators is that the material liquid flows in a film along the heating tube wall to transfer heat and evaporate, thereby achieving the separation effect. However, in order to maintain the separation efficiency, most methods compensate for the efficiency loss by increasing the heating power or extending the processing time, which leads to an increase in energy consumption per unit of solvent recovery. In addition, the packing layer is mostly a fixed structure, which makes it difficult to dynamically adjust and change the liquid flow direction to improve the separation rate. Therefore, this application proposes a solution. Summary of the Invention

[0004] The purpose of this invention is to provide a multi-stage separation and purification device for photoresist stripping solution, which solves the problems of increased energy consumption in solvent recovery during the photoresist waste liquid regeneration stage and the difficulty in dynamically adjusting the liquid flow direction to improve the separation rate.

[0005] The objective of this invention can be achieved through the following technical solution: a multi-stage separation and purification device for photoresist stripping solution, comprising a separation and purification component, the separation and purification component comprising an outer tank and an inner tank nested together, wherein a steam exhaust pipe and a solvent outlet pipe penetrating the outer tank are respectively installed at the upper and lower ends of the inner tank, and a heat exchange chamber is formed between the outer tank and the inner tank, with a side inlet pipe and a side outlet pipe respectively penetrating both sides;

[0006] The heat exchange chamber is equipped with a multi-stage heat pipe structure, which includes a bottom swirl tube, a middle swirl tube, and an upper swirl tube embedded in the outer wall of the inner tank. The upper part of the inner tank is rotatably equipped with a packing structure for changing the flow direction of the liquid. The lower part of the inner tank is equipped with a defoaming component.

[0007] The defoaming assembly includes a rotatable lower rotating rod and an anti-impact plate. A folded plate is horizontally installed on the inner wall of the inner tank corresponding to the upper end of the anti-impact plate, and a liquid inlet pipe is installed through the outer tank corresponding to the folded plate.

[0008] The filling structure is further configured such that: the filling structure includes a stepped filling layer disposed at the upper end of the inner tank, the stepped filling layer includes vertically staggered and symmetrically arranged filling plates, and the upper and lower sides of the filling plates are staggered and symmetrically arranged with bottom steps and top steps.

[0009] A further configuration is provided: a thin gap is formed between the annular outer wall of the stepped packing layer away from the bottom or top step and the inner wall of the inner tank.

[0010] The configuration is further defined as follows: a motor is installed in the middle of the upper part of the outer tank, the output end of the motor extends into the outer tank and is connected to an upper rotating rod, the upper rotating rod is connected to the packing plate at the lower end of the stepped packing layer, and the packing plate at the upper end of the stepped packing layer is connected to the inner wall of the inner tank.

[0011] The configuration is further defined as follows: a lower rotating rod is installed at the lower end of the upper rotating rod; the anti-impact plates are spaced apart outside the lower rotating rod and are arranged to intersect with the folding plate; the folding plate is provided with a vertical hole, which is perpendicular to the outer surface of the folding plate.

[0012] The configuration is further defined as follows: the bottom spiral tube, the middle spiral tube, and the top spiral tube are all spirally arranged outside the inner tank and connected in sequence; a heat inlet pipe is installed through one side of the corresponding inlet pipe of the bottom spiral tube, the middle spiral tube, and the top spiral tube; and a heat outlet pipe is installed through one side of the corresponding outlet pipe of the bottom spiral tube, the middle spiral tube, and the top spiral tube.

[0013] Further configuration: The ports of the side inlet pipe and the side outlet pipe are respectively equipped with fixing plugs corresponding to the heat inlet pipe and the heat outlet pipe, in order to maintain the stable operation of the multi-stage heat pipe structure.

[0014] The separation and purification component is further configured to have a separation temperature control module connected to it via communication. The separation temperature control module includes a processor, a temperature grading detection terminal, a liquid flow direction detection terminal, a comprehensive analysis terminal, and a temperature and direction adjustment terminal.

[0015] The temperature grading detection terminal is used to collect the temperature change value of the separation and purification component within the time threshold, and send the temperature change value to the comprehensive analysis terminal via the processor;

[0016] The feed liquid flow detection end is used to collect the flow range of the feed liquid in the separation and purification component, and send the flow range of the feed liquid to the comprehensive analysis end;

[0017] The integrated analysis terminal compares and analyzes the received temperature change value and liquid flow range with the preset range and generates a control signal, which is then sent to the temperature control and steering adjustment terminal to execute the relevant actions.

[0018] The present invention has the following beneficial effects:

[0019] This invention achieves heat transfer and evaporation through a multi-stage heat pipe structure arranged in a heat exchange chamber. Combined with dynamically variable thin-layer gaps to change the flow range of the photoresist stripping solution, and the vortex flow formed by continuous rotation, it achieves a highly efficient heat transfer and evaporation effect. The combined effect of these three factors improves the solvent recovery efficiency in the regeneration of waste photoresist stripping solution and reduces energy loss during the solvent recovery process. Furthermore, the intelligent separation temperature control setting allows the flow range of the photoresist stripping solution to be adjusted in real time as the temperature required for heat transfer changes, ensuring a highly efficient heat transfer and evaporation effect for the photoresist stripping solution.

[0020] The heat exchange chamber is formed between the outer and inner tanks, and a multi-stage heat pipe structure with spiral connections completes heat transfer and evaporation. Combined with the dynamically changing thin-layer gap, the flow direction of the photoresist stripper is changed, achieving a highly efficient heat transfer and evaporation effect. While achieving efficient heat transfer and evaporation with the dynamically changing thin-layer gap and multi-stage heat transfer effect, a vortex guide is also provided at the liquid inlet position. When the liquid enters the inner tank through the liquid inlet pipe, the continuously rotating anti-impact plate causes the liquid to form a vortex flow effect. The vortex flow liquid can continue to rise through the vertical holes and continuously enter the thin-layer gap to complete evaporation. In this process, the photoresist stripper can complete multi-stage heat transfer and variable flow direction evaporation separation in the waste liquid regeneration separation process. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of the present invention;

[0023] Figure 2 This is a structural schematic diagram from another perspective of the present invention;

[0024] Figure 3 This is a partial cross-sectional schematic diagram of the present invention;

[0025] Figure 4 This is a schematic diagram of the installation of the multi-stage heat pipe structure of the present invention;

[0026] Figure 5 This is a schematic diagram of the internal structure of the main body of the present invention;

[0027] Figure 6 This is a front sectional view of the present invention;

[0028] Figure 7 This is a schematic diagram of the stepped filler layer of the present invention;

[0029] Figure 8 This is a schematic diagram of the structure of the defoaming assembly of the present invention;

[0030] Figure 9 This is a front sectional view of the defogging assembly of the present invention;

[0031] Figure 10 For the present invention Figure 9 Enlarged diagram of point A in the diagram.

[0032] In the diagram: 1. Outer tank; 2. Bottom tank; 3. Side inlet pipe; 4. Side outlet pipe; 5. Liquid inlet pipe; 6. Solvent outlet pipe; 7. Steam exhaust pipe; 8. Inner tank; 9. Motor; 10. Upper rotating rod; 11. Heat inlet pipe; 12. Sealing sleeve; 13. Bottom swirl pipe; 14. Middle swirl pipe; 15. Upper swirl pipe; 16. Heat outlet pipe; 17. Fixed plug; 18. Stepped packing layer; 19. Lower rotating rod; 20. Anti-impact plate; 21. Bending plate; 22. Bottom step; 23. Top step; 24. Vertical hole. Detailed Implementation

[0033] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] Example 1: To address the issue of increased energy consumption in solvent recovery during the photoresist stripping solution regeneration stage, the following technical solution is proposed:

[0035] Reference Figures 1-10 As shown, this embodiment of a photoresist stripping solution multi-stage separation and purification device includes a separation and purification component. The separation and purification component includes an outer tank 1 and an inner tank 8 that are nested together. The upper and lower ends of the inner tank 8 are respectively equipped with a steam exhaust pipe 7 and a solvent outlet pipe 6 that penetrate the outer tank 1. The outer tank 1 and the inner tank 8 form a heat exchange chamber and are respectively connected to the side inlet pipe 3 and the side outlet pipe 4.

[0036] The heat exchange chamber is equipped with a multi-stage heat pipe structure, which includes a bottom spiral tube 13, a middle spiral tube 14, and an upper spiral tube 15 embedded in the outer wall of the inner tank 8. The bottom spiral tube 13, the middle spiral tube 14, and the upper spiral tube 15 are all spiral structures and are tightly attached to the outer wall of the inner tank 8. The bottom spiral tube 13, the middle spiral tube 14, and the upper spiral tube 15 are bonded to each other, which can complete uniform multi-stage heating in the waste liquid regeneration process of photoresist stripping solution.

[0037] Reference Figures 5-7 As shown, a packing structure for changing the flow direction of liquid is rotatably provided at the upper end of the inner tank 8. The packing structure includes a stepped packing layer 18 rotatably provided at the upper end of the inner tank 8. The stepped packing layer 18 includes vertically staggered and symmetrically arranged packing plates, and the upper and lower sides of the packing plates are staggered and symmetrically arranged with bottom steps 22 and top steps 23. The annular outer wall of the stepped packing layer 18 away from the bottom steps 22 or top steps 23 forms a thin gap with the inner wall of the inner tank 8.

[0038] A motor 9 is installed at the middle of the upper end of the outer tank 1. The output end of the motor 9 extends into the outer tank 1 and is connected to an upper rotating rod 10. The upper rotating rod 10 is connected to the stepped packing layer 18. The packing structure is staggered, forming a stepped structure through the bottom step 22 and the top step 23, which forms a staggered contact state with the inner wall of the inner tank 8. The stepped packing layer 18 can dynamically adjust the position of the thin layer gaps under the action of the motor 9 starting and rotating. In combination with the above-mentioned multi-stage heating, solvent recovery is completed. Specifically:

[0039] The bottom step 22 on the packing plate at the lower end of the stepped packing layer 18 rotates under the rotation effect, that is, the relative position between the packing plate at the lower end of the stepped packing layer 18 and the inner wall of the inner tank 8 changes. Furthermore, during the upward flow of the liquid, the liquid flows upward through the inner wall of the inner tank 8 along the dynamically changing thin layer gap, thereby changing the liquid flow rate in combination with heat transfer efficiency, and improving the separation and purification efficiency of the stripping liquid in combination.

[0040] Reference Figure 6 and Figure 8 As shown, a defoaming assembly is provided at the lower end of the inner tank 8. The defoaming assembly includes a rotating lower rod 19 and an anti-impact plate 20. A folded plate 21 is horizontally installed on the inner wall of the inner tank 8 corresponding to the upper end of the anti-impact plate 20.

[0041] The outer tank 1 is fitted with a liquid inlet pipe 5 through the folded plate 21. The lower end of the upper rotating rod 10 is fitted with a lower rotating rod 19. Anti-impact plates 20 are spaced outside the lower rotating rod 19 and are arranged to cross the folded plate 21. The folded plate 21 has a vertical hole 24, which is perpendicular to the outer surface of the folded plate 21. The motor 9 drives the anti-impact plates 20 to rotate through the lower rotating rod 19, so that the liquid that hits the folded plate 21 falls onto the anti-impact plates 20 and forms a vortex flow effect. The liquid moves upward through the vertical hole 24 on the folded plate 21 into the thin layer gap and finally evaporates through the thin layer gap.

[0042] Reference Figure 3 , Figure 4 and Figure 5 As shown, the bottom spiral tube 13, the middle spiral tube 14, and the top spiral tube 15 are all spirally arranged outside the inner tank 8 and connected in sequence. The bottom spiral tube 13, the middle spiral tube 14, and the top spiral tube 15 are connected to the side of the corresponding side inlet tube 3 with a heat inlet tube 11. The bottom spiral tube 13, the middle spiral tube 14, and the top spiral tube 15 are connected to the side of the corresponding side outlet tube 4 with a heat outlet tube 16. The ports of the side inlet tube 3 and the side outlet tube 4 are respectively equipped with a fixing plug 17 corresponding to the heat inlet tube 11 and the heat outlet tube 16 to maintain the stable operation of the multi-stage heat pipe structure.

[0043] Reference Figure 5 and Figure 6 As shown, a bottom tank 2 is installed at the lower end of the outer tank 1, and a solvent outlet pipe 6 extends through the bottom tank 2 to the outside. A sealing sleeve 12 is installed at the upper end of the outer tank 1 corresponding to the inner tank 8 for sealing the heat exchange chamber.

[0044] Basic principle: Refer to Figure 6 As explained, the outer tank 1 and the inner tank 8 form a heat exchange cavity, and the heat transfer and evaporation are completed by a multi-stage heat pipe structure that is spiral and connected. Combined with the dynamically changing thin-layer gap, the flow range of the photoresist stripping liquid is changed, achieving a high-efficiency heat transfer and evaporation effect of the photoresist stripping liquid and improving the solvent recovery efficiency of waste liquid regeneration.

[0045] It is important to note here that while achieving efficient heat transfer and evaporation through dynamically variable thin-layer gaps and multi-stage heat transfer effects, a vortex flow guide is also provided at the liquid inlet position. When the liquid enters the inner tank 8 through the liquid inlet pipe 5, the continuously rotating anti-impact plate 20 causes the liquid to form a vortex flow effect. The vortex-flowing liquid can continue to rise through the vertical holes 24 and continuously enter the thin-layer gap to complete evaporation. During this process, the photoresist stripping solution can complete multi-stage heat transfer and variable flow direction range evaporation separation in the waste liquid regeneration separation process.

[0046] Based on the above, it can be seen that the heat transfer and evaporation are accomplished by the multi-stage heat pipe structure arranged in the heat exchange chamber, combined with the dynamic change of the thin layer gap to change the flow range of the photoresist stripping solution, and the vortex flow formed by continuous rotation, which together achieve a high-efficiency heat transfer and evaporation effect. The combined effect of these three factors improves the solvent recovery efficiency in the regeneration of photoresist stripping solution waste liquid and reduces the energy loss in the solvent recovery process.

[0047] Example 2: This example further optimizes the separation temperature control process in Example 1 with intelligent features. To address the difficulty in dynamically adjusting the liquid flow direction, the separation temperature control module includes a processor, a temperature grading detection end, a liquid flow direction detection end, a comprehensive analysis end, and a temperature adjustment and direction control end.

[0048] The temperature grading detection end is used to collect the temperature change value of the separation and purification component within the time threshold, and send the temperature change value to the comprehensive analysis end via the processor. The temperature change value is measured by the temperature sensor embedded in the inner wall of the inner tank 8.

[0049] The liquid flow detection end is used to collect the liquid flow range in the separation and purification component and send the liquid flow range to the comprehensive analysis end. The liquid flow range is measured by a photoelectric sensor set above the inner tank 8, which represents the overlap angle between the upper and lower packing plates in the stepped packing layer 18. The bottom step 22 and the top step 23 of the stepped packing layer 18 are set as references with 180° between them, and the current overlap angle is calculated using the rotation angle of the bottom step 22 as the reference.

[0050] The integrated analysis unit compares and analyzes the received temperature change values ​​and liquid flow range with preset ranges to obtain control signals. These control signals include heating and cooling direction adjustment signals, and the specific process is as follows:

[0051] When the temperature change is less than the minimum value of the preset temperature range and the flow range of the liquid is less than the minimum value of the preset flow range, a temperature rise and direction adjustment signal is generated and sent to the temperature adjustment and direction adjustment terminal.

[0052] When the temperature change value is greater than the maximum value of the preset temperature range and the flow range of the liquid is greater than the maximum value of the preset flow range, a cooling and reversing adjustment signal is generated and sent to the temperature and reversing adjustment terminal.

[0053] In other situations, no signal is generated;

[0054] When the temperature adjustment and reversing end receives the temperature rise and reversing adjustment signal, the motor 9 starts and drives the packing plate at the lower end of the stepped packing layer 18 to rotate in the forward direction, which causes the flow range of the liquid between the thin layer gap formed by the packing plate at the lower end of the stepped packing layer 18 and the inner wall of the inner tank 8 and the thin layer gap at the upper end of the stepped packing layer 18 to expand, and the heat source supply end connected to the multi-stage heat pipe structure performs temperature rise adjustment of the bottom swirl tube 13, the middle swirl tube 14 and the upper swirl tube 15.

[0055] When the temperature control adjustment end receives the cooling adjustment signal, the motor 9 starts and drives the packing plate at the lower end of the stepped packing layer 18 to rotate in the opposite direction. This causes the flow range of the liquid material between the thin layer gap formed by the packing plate at the lower end of the stepped packing layer 18 and the inner wall of the inner tank 8 and the thin layer gap at the upper end of the stepped packing layer 18 to be reduced. The heat source supply end connected to the multi-stage heat pipe structure performs cooling adjustment of the bottom swirl tube 13, the middle swirl tube 14 and the upper swirl tube 15.

[0056] It is important to note that the adjustment of the liquid flow range is based on the change in the relative position of the two thin-layer gaps. When the thin-layer gaps gradually overlap, the inner wall area of ​​the inner tank 8 through which the liquid flows decreases, resulting in an increase in the flow rate. When the thin-layer gaps gradually misalign, the inner wall area of ​​the inner tank 8 through which the liquid flows increases, resulting in a decrease in the flow rate. This is further combined with temperature adjustment to achieve the corresponding change in heat transfer and evaporation.

[0057] The fundamental purpose of the two adjustments mentioned above is to adjust the flow range of the photoresist stripper in real time as the temperature required for heat transfer changes, thereby ensuring the efficient heat transfer and evaporation of the photoresist stripper and improving the solvent recovery efficiency of waste liquid regeneration.

[0058] In summary, as can be seen from Examples 1 and 2, heat transfer and evaporation are achieved through a multi-stage heat pipe structure arranged in the heat exchange chamber. Combined with the dynamically changeable thin-layer gap to change the flow range of the photoresist stripping solution, and the vortex flow formed by continuous rotation, a highly efficient heat transfer and evaporation effect is achieved. The combined effect of these three factors improves the solvent recovery efficiency in the regeneration of photoresist stripping solution waste liquid and reduces energy loss in the solvent recovery process.

[0059] Furthermore, by combining intelligent separation temperature control settings, the flow range of the photoresist stripper is adjusted in real time as the temperature required for heat transfer changes, ensuring the efficient heat transfer and evaporation effect of the photoresist stripper.

[0060] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A multi-stage separation and purification device for photoresist stripping solution, comprising a separation and purification component, wherein the separation and purification component is communicatively connected to a separation temperature control module, characterized in that, The separation temperature control module includes a processor, a temperature grading detection end, a liquid flow direction detection end, a comprehensive analysis end, and a temperature adjustment and direction control end; The temperature grading detection terminal is used to collect the temperature change value of the separation and purification component within the time threshold, and send the temperature change value to the comprehensive analysis terminal via the processor; The feed liquid flow detection end is used to collect the flow range of the feed liquid in the separation and purification component, and send the flow range of the feed liquid to the comprehensive analysis end; The integrated analysis terminal compares and analyzes the received temperature change value and liquid flow range with the preset range and generates a control signal, which is then sent to the temperature control and steering adjustment terminal to execute the relevant actions. The separation and purification assembly includes an outer tank (1) and an inner tank (8) that are nested together. The upper and lower ends of the inner tank (8) are respectively equipped with a steam exhaust pipe (7) and a solvent outlet pipe (6) that penetrate the outer tank (1). The outer tank (1) and the inner tank (8) form a heat exchange chamber and are respectively connected by a side inlet pipe (3) and a side outlet pipe (4) on both sides. The heat exchange chamber is provided with a multi-stage heat pipe structure, which includes a bottom swirl tube (13), a middle swirl tube (14), and an upper swirl tube (15) embedded in the outer wall of the inner tank (8); the upper part of the inner tank (8) is rotatably provided with a packing structure for changing the flow direction of the liquid, and the lower part of the inner tank (8) is provided with a defoaming component. The defoaming assembly includes a rotating lower rod (19) and an anti-impact plate (20). A folded plate (21) is horizontally installed on the inner wall of the inner tank (8) corresponding to the upper end of the anti-impact plate (20). A liquid inlet pipe (5) is installed through the outer tank (1) corresponding to the folded plate (21). The packing structure includes a stepped packing layer (18) disposed at the upper end of the inner tank (8). The stepped packing layer (18) includes vertically staggered and symmetrically arranged packing plates, and the upper and lower sides of the packing plates are staggered and symmetrically arranged with bottom steps (22) and top steps (23). The annular outer wall of the stepped packing layer (18) away from the bottom step (22) or the top step (23) forms a thin gap with the inner wall of the inner tank (8). A motor (9) is installed in the middle of the upper end of the outer tank (1). The output end of the motor (9) extends into the outer tank (1) and is connected to an upper rotating rod (10). The upper rotating rod (10) is connected to the packing plate at the lower end of the stepped packing layer (18), and the packing plate at the upper end of the stepped packing layer (18) is connected to the inner wall of the inner tank (8). The lower end of the upper rotating rod (10) is equipped with a lower rotating rod (19). The anti-impact plates (20) are spaced apart outside the lower rotating rod (19) and are arranged to cross the folded plate (21). The folded plate (21) is provided with a vertical hole (24), which is perpendicular to the outer surface of the folded plate (21).

2. The multi-stage separation and purification device for photoresist stripping solution according to claim 1, characterized in that, The bottom spiral tube (13), middle spiral tube (14) and top spiral tube (15) are all spirally arranged outside the inner tank (8) and connected in sequence. The bottom spiral tube (13), middle spiral tube (14) and top spiral tube (15) are connected to the side of the corresponding side inlet pipe (3) with a heat inlet pipe (11) and the bottom spiral tube (13), middle spiral tube (14) and top spiral tube (15) are connected to the side of the corresponding side outlet pipe (4) with a heat outlet pipe (16).

3. The multi-stage separation and purification device for photoresist stripping solution according to claim 2, characterized in that, The ports of the side inlet pipe (3) and the side outlet pipe (4) are respectively equipped with fixing plugs (17) for the inlet heat pipe (11) and the outlet heat pipe (16) to maintain the stable operation of the multi-stage heat pipe structure.

4. The multi-stage separation and purification device for photoresist stripping solution according to claim 1, characterized in that, The lower end of the outer tank (1) is equipped with a bottom tank (2), and the solvent outlet pipe (6) extends through the bottom tank (2) to the outside. The upper end of the outer tank (1) corresponding to the inner tank (8) is equipped with a sealing sleeve (12) for sealing the heat exchange chamber.

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