Chip testing device with limiting structure

Abstract

The invention relates to the field of chip testing, in particular to a chip testing device with a limiting structure. Comprising a rack, a first electric sliding rail, a second electric sliding rail, a first air cylinder, an optical lens, a rotating disc, a rotating assembly, a clamping assembly, a mounting plate, a protective cover and the like. Two first electric sliding rails are installed on the machine frame, sliding blocks of the two first electric sliding rails are both connected with a second electric sliding rail, a first air cylinder is arranged on a sliding block of the second electric sliding rail, an optical lens is arranged on a piston of the first air cylinder, an installation plate is arranged on the optical lens, a protective cover is arranged on the outer side of the installation plate, and a shading cover is arranged at the bottom of the protective cover. The shading cover and the clamping assembly cooperate to form a closed darkroom environment, so that external light interference is effectively isolated; and a uniform and stable light source is provided in cooperation with the illumination system capable of being adjusted in multiple directions, it is ensured that chip images collected by the optical lens are clear and accurate, and the reliability of surface defect detection is greatly improved.

Description

Technical Field

[0001] This invention relates to the field of chip testing, and more particularly to a chip testing device with a limiting structure. Background Technology

[0002] With the rapid development of the semiconductor industry, integrated circuits are increasingly widely used in various fields. As the core component of semiconductor products, the stability and reliability of chips directly affect the performance and quality of the final product. During chip manufacturing, the surface quality directly impacts the product's performance and reliability. Therefore, after packaging, chips must undergo rigorous visual inspection to identify physical defects such as scratches, cracks, contamination, and pin deformation.

[0003] Existing chip testing equipment lacks effective measures to isolate external light interference. During the testing process, it is easily affected by ambient light. Changes and interference from external light can seriously affect the quality of chip images acquired by the optical lens, resulting in blurred images and low contrast. This makes it difficult to accurately identify some subtle defects, thereby reducing the reliability of surface defect detection and increasing the risk of missed and false detections. Summary of the Invention

[0004] To overcome the shortcomings of existing chip testing devices that are easily affected by ambient light, thus affecting the accuracy of defect detection, this invention provides a chip testing device with a limiting structure.

[0005] The technical solution of the present invention is: a chip testing device with a limiting structure, comprising a frame, a first electric slide rail, a second electric slide rail, a first cylinder, an optical lens, a rotating disk, a rotating assembly, a clamping assembly, a mounting plate, a protective cover, a light shield, and an illumination lamp. Two first electric slide rails are mounted on the frame, and the sliders of both first electric slide rails are connected to the second electric slide rails. A first cylinder is mounted on the slider of the second electric slide rail, an optical lens is mounted on the piston of the first cylinder, a mounting plate is mounted on the optical lens, a protective cover is mounted on the outside of the mounting plate, a light shield is mounted at the bottom of the protective cover, and an illumination lamp is mounted at the bottom of the mounting plate. A rotating disk is rotatably mounted on the frame, a rotating assembly for rotating the rotating disk is located inside the frame, and two clamping assemblies for clamping chips are mounted on the rotating disk.

[0006] Optionally, the clamping assembly includes a second motor, a bidirectional threaded rod, a mounting base, a movable frame, and a first clamping plate. Two second motors are mounted on the bottom of the rotating disk, and two mounting bases are provided on the bottom of the rotating disk. Both mounting bases are rotatably provided with bidirectional threaded rods. The output shafts of the two second motors are respectively connected to the two bidirectional threaded rods. Both ends of the bidirectional threaded rods are threadedly connected to the movable frame, and the movable frame is provided with the first clamping plate.

[0007] Optionally, the clamping assembly also includes a fixed plate, a second cylinder, a movable plate, and a second clamping plate. The rotating disk is provided with two fixed plates, and two second cylinders are installed on the rotating disk. The pistons of the second cylinders are connected to the movable plate, and the movable plate is provided with the second clamping plate.

[0008] Optionally, the clamping assembly further includes a first guide rod, a first elastic element, a second guide rod, and a second elastic element. The first clamping plate is provided with the first guide rod, and the first clamping plate is slidably connected to the movable frame through the first guide rod. The first elastic element is wrapped around the outside of the first guide rod, and the first elastic element connects the first clamping plate and the movable frame. The second clamping plate is provided with the second guide rod, and the second clamping plate is slidably connected to the movable plate through the second guide rod. The second elastic element is wrapped around the outside of the second guide rod, and the second elastic element connects the second clamping plate and the movable plate.

[0009] Optionally, the rotating assembly includes a first motor, a driving gear, a driven gear, and a support column. The first motor is installed inside the frame, and the output shaft of the first motor is connected to the driving gear. The support column is rotatably provided inside the frame, and the driven gear is provided on the outside of the support column. The driving gear and the driven gear mesh, and the support column is connected to the rotating disk.

[0010] Optionally, the rotating assembly also includes pulleys, with multiple pulleys arranged around the circumference of the rotating disk, and a sliding groove on the frame that matches the pulleys, with the pulleys slidably connected to the sliding groove.

[0011] Optionally, it also includes a third cylinder, a moving ring, a mounting block, a connecting rod, and a fixing component. The third cylinder is mounted on the mounting plate, and the piston of the third cylinder passes through the mounting plate and is connected to the moving ring. The mounting block is provided at the bottom of the mounting plate, and the lighting lamp is rotatably connected to the mounting block. The fixing component is provided at the bottom of the moving ring, and a connecting rod is rotatably provided on the fixing component. The connecting rod is rotatably connected to the lighting lamp.

[0012] Optionally, multiple lighting lamps are provided and evenly distributed around the optical lens.

[0013] The present invention has the following advantages: 1. The present invention forms a sealed darkroom environment by working together with the light-shielding cover and the clamping assembly, which effectively isolates external light interference; in conjunction with the multi-directional adjustable lighting system, it provides a uniform and stable light source, ensuring that the chip image acquired by the optical lens is clear and accurate, which greatly improves the reliability of surface defect detection.

[0014] 2. This invention, through a dual-station clamping design combined with a rotary disk structure, allows the pre-loading of the next chip to be tested while the current chip is being tested. The rotating components enable rapid switching between stations, significantly reducing loading and unloading time, achieving continuous testing, and improving equipment utilization and overall production efficiency.

[0015] 3. The third cylinder of this invention drives the moving ring, which is transmitted through the connecting rod, to drive the lighting lamp to rotate around the mounting block, thereby changing the tilt angle of the lighting lamp and adjusting the direction of the light source illumination to meet the needs of chip illumination in different detection scenarios and ensure the acquisition of high-quality chip images.

[0016] 4. The present invention has multiple lighting lamps, which are evenly distributed around the optical lens, and can provide light to the chip from multiple directions at the same time, eliminating the shadow areas that may be produced by a single light source, making the chip surface uniformly illuminated, thereby making the chip image captured by the optical lens clearer and more complete, effectively improving the imaging quality, and facilitating more accurate detection of physical defects on the chip surface. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0018] Figure 2 This is a three-dimensional structural diagram of the first motor, driving gear, and driven gear of the present invention.

[0019] Figure 3 This is a top view of the rotating disk of the present invention.

[0020] Figure 4 This is a three-dimensional structural diagram of the bidirectional threaded rod, mounting base, and movable frame of the present invention.

[0021] Figure 5 This is a three-dimensional structural diagram of the movable plate, the second clamping plate, and the second guide rod of the present invention.

[0022] Figure 6 This is a three-dimensional structural diagram of the mounting plate, protective cover, and light shield of the present invention.

[0023] Figure 7 This is a cross-sectional view of the protective cover and light shield of the present invention.

[0024] Figure 8 This is a three-dimensional structural diagram of the moving ring, mounting block, and lighting lamp of the present invention.

[0025] Figure 9 This is a three-dimensional structural diagram of the lighting lamp, connecting rod, and fixing component of the present invention.

[0026] In the attached diagrams: 1-Frame, 2-First electric slide rail, 3-Second electric slide rail, 4-First cylinder, 5-Optical lens, 6-Rotating disk, 7-First motor, 8-Driving gear, 9-Driven gear, 10-Support column, 11-Pulley, 12-Second motor, 13-Double threaded rod, 14-Mounting base, 15-Moving frame, 16-First clamping plate, 17-First guide rod, 18-First elastic element, 19-Fixing plate, 20-Second cylinder, 21-Moving plate, 22-Second clamping plate, 23-Second guide rod, 24-Second elastic element, 25-Mounting plate, 26-Protective cover, 27-Light shield, 28-Third cylinder, 29-Moving ring, 30-Mounting block, 31-Lighting lamp, 32-Connecting rod, 33-Fixing element. Detailed Implementation

[0027] The present invention will be further described below with reference to specific embodiments. The illustrative embodiments and descriptions herein are used to explain the present invention, but are not intended to limit the present invention.

[0028] A chip testing device with a limiting structure, such as Figures 1-7 As shown, the device includes a frame 1, a first electric slide rail 2, a second electric slide rail 3, a first cylinder 4, an optical lens 5, a rotating disk 6, a rotating assembly, a clamping assembly, a mounting plate 25, a protective cover 26, a light shield 27, and a lighting lamp 31. Two first electric slide rails 2 are mounted on the frame 1, and the sliders of the two first electric slide rails 2 are connected to the second electric slide rails 3. The sliders of the second electric slide rails 3 are equipped with first cylinders 4, and the pistons of the first cylinders 4 are equipped with optical lenses 5. The optical lenses 5 are equipped with mounting plates 25, and the outer side of the mounting plates 25 is equipped with a protective cover 26. The bottom of the protective cover 26 is equipped with a light shield 27, and the bottom of the mounting plates 25 is equipped with a lighting lamp 31. The rotating disk 6 is rotatably mounted on the frame 1, and the frame 1 is equipped with a rotating assembly for rotating the rotating disk 6. The rotating disk 6 is equipped with two clamping assemblies for clamping chips.

[0029] During operation, the chip under test is fixed by one of the clamping components on the rotating disk 6. The first electric slide rail 2 and the second electric slide rail 3 work together to control the movement of the optical lens 5 in the horizontal plane, aligning it with the chip. The piston of the first cylinder 4 extends to adjust the vertical height of the optical lens 5, enabling the optical lens 5 to accurately align with the chip for imaging detection. The light shield 27 works with the clamping components to block ambient light, creating a darkroom environment to ensure that the test is not interfered with by external light. The illumination lamp 31 provides sufficient and stable light source to ensure that the optical lens 5 can acquire clear and accurate chip images, thereby detecting whether there are physical defects on the chip surface. During chip detection, another chip under test can be fixed by another clamping component. After the current chip has been detected, the rotating component drives the rotating disk 6 to rotate, removing the detected chip and simultaneously rotating the next chip to be detected under the optical lens 5, thereby significantly saving loading and unloading time and improving detection efficiency.

[0030] like Figures 2-4 As shown, the clamping assembly includes a second motor 12, a bidirectional threaded rod 13, a mounting base 14, a movable frame 15, and a first clamping plate 16. Two second motors 12 are mounted on the bottom of the rotating disk 6, and two mounting bases 14 are provided at the bottom of the rotating disk 6. Each mounting base 14 has a rotatably mounted bidirectional threaded rod 13. The output shafts of the two second motors 12 are respectively connected to the two bidirectional threaded rods 13. Movable frames 15 are threaded to both ends of each bidirectional threaded rod 13, and the first clamping plate 16 is mounted on each movable frame 15. The second motors 12 drive the bidirectional threaded rods 13 to rotate. Because the threads at both ends of the bidirectional threaded rods 13 have opposite directions, the movable frames 15 at both ends of the bidirectional threaded rods 13 move closer to each other, thereby driving the first clamping plate 16 to move and clamp the chip, thus fixing the chip.

[0031] like Figures 2-5 As shown, the clamping assembly also includes a fixed plate 19, a second cylinder 20, a movable plate 21, and a second clamping plate 22. Two fixed plates 19 are provided on the rotating disk 6, and two second cylinders 20 are mounted on the rotating disk 6. The pistons of the second cylinders 20 are connected to the movable plate 21, and the movable plate 21 is equipped with the second clamping plate 22. The second cylinders 20 push the movable plate 21 to move, causing the second clamping plate 22 to move closer to the chip. In cooperation with the fixed plate 19, clamping forces are applied to the chip from different directions, enhancing the stability of the chip fixation and preventing the chip from shaking or shifting during testing. The first clamping plate 16, the fixed plate 19, and the second clamping plate 22 can completely surround the chip. Combined with the light-shielding cover 27, ambient light can be blocked, creating a darkroom environment to ensure that the test is not interfered with by external light.

[0032] like Figures 4-5As shown, the clamping assembly also includes a first guide rod 17, a first elastic element 18, a second guide rod 23, and a second elastic element 24. The first clamping plate 16 has the first guide rod 17, which is slidably connected to the movable frame 15 via the first guide rod 17. The first elastic element 18 is wrapped around the outside of the first guide rod 17, connecting the first clamping plate 16 and the movable frame 15. The second clamping plate 22 has the second guide rod 23, which is slidably connected to the movable plate 21 via the second guide rod 23. The second elastic element 24 is wrapped around the outside of the second guide rod 23, connecting the second clamping plate 22 and the movable plate 21. The first elastic element 18 acts as a buffer when the first clamping plate 16 clamps the chip, preventing damage to the chip due to excessive clamping force. Similarly, the second elastic element 24 buffers the clamping force of the second clamping plate 22.

[0033] like Figures 1-2 As shown, the rotating assembly includes a first motor 7, a driving gear 8, a driven gear 9, and a support column 10. The first motor 7 is installed inside the frame 1, and the output shaft of the first motor 7 is connected to the driving gear 8. The support column 10 is rotatably mounted inside the frame 1, and the driven gear 9 is located on the outside of the support column 10. The driving gear 8 and the driven gear 9 mesh, and the support column 10 is connected to the rotating disk 6. Driving the driving gear 8 to rotate causes the driven gear 9 to rotate through gear meshing, which in turn drives the support column 10 to rotate. Since the support column 10 is connected to the rotating disk 6, the rotating disk 6 is ultimately rotated, so that after one chip is tested, the next chip to be tested can be quickly rotated to the testing position. At the same time, the support column 10 also serves to support the rotating disk 6.

[0034] like Figure 2 As shown, the rotating assembly also includes pulleys 11. Multiple pulleys 11 are arranged circumferentially on the rotating disk 6, and the frame 1 has grooves adapted to the pulleys 11, with the pulleys 11 slidably connected to the grooves. During the rotation of the rotating disk 6, the pulleys 11 roll within the grooves, providing guidance for the rotating disk 6, reducing friction and shaking during rotation, making the rotation process more stable and smooth, ensuring high stability and low wear during rotation, and extending the equipment's lifespan.

[0035] like Figures 7-9As shown, the system also includes a third cylinder 28, a moving ring 29, a mounting block 30, a connecting rod 32, and a fixing member 33. The third cylinder 28 is mounted on the mounting plate 25, and its piston passes through the mounting plate 25 and connects to the moving ring 29. The mounting block 30 is located at the bottom of the mounting plate 25, and the lighting lamp 31 is rotatably connected to the mounting block 30. The fixing member 33 is located at the bottom of the moving ring 29, and the connecting rod 32 is rotatably mounted on the fixing member 33, connecting to the lighting lamp 31. The third cylinder 28 pushes the moving ring 29, which, via the connecting rod 32, drives the lighting lamp 31 to rotate around the mounting block 30, thereby changing the tilt angle of the lighting lamp 31 and adjusting the direction of the light source illumination to meet the chip illumination requirements in different detection scenarios, ensuring the acquisition of high-quality chip images.

[0036] Multiple illumination lamps 31 are provided and evenly distributed around the optical lens 5. This allows the chip to be illuminated simultaneously from multiple directions, eliminating shadow areas that may be produced by a single light source. This ensures uniform illumination of all parts of the chip surface, resulting in clearer and more complete images of the chip captured by the optical lens 5. This effectively improves imaging quality and facilitates more accurate detection of physical defects on the chip surface.

[0037] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A chip testing device with a limiting structure, comprising a frame (1), a first electric slide rail (2), a second electric slide rail (3), a first cylinder (4), and an optical lens (5), wherein two first electric slide rails (2) are mounted on the frame (1), the sliders of the two first electric slide rails (2) are connected to the second electric slide rails (3), the sliders of the second electric slide rails (3) are provided with the first cylinders (4), and the pistons of the first cylinders (4) are provided with the optical lens (5), characterized in that: It also includes a rotating disk (6), a rotating assembly, a clamping assembly, a mounting plate (25), a protective cover (26), a light shield (27), and a lighting lamp (31). The optical lens (5) is provided with a mounting plate (25), the outer side of the mounting plate (25) is provided with a protective cover (26), the bottom of the protective cover (26) is provided with a light shield (27), the bottom of the mounting plate (25) is provided with a lighting lamp (31), the frame (1) is rotatably provided with a rotating disk (6), the frame (1) is provided with a rotating assembly for rotating the rotating disk (6), and the rotating disk (6) is provided with two clamping assemblies for clamping the chip.

2. The chip testing device with a limiting structure according to claim 1, characterized in that: The clamping assembly includes a second motor (12), a bidirectional threaded rod (13), a mounting base (14), a moving frame (15), and a first clamping plate (16). Two second motors (12) are mounted on the bottom of the rotating disk (6), and two mounting bases (14) are provided on the bottom of the rotating disk (6). Both mounting bases (14) are rotatably provided with bidirectional threaded rods (13). The output shafts of the two second motors (12) are respectively connected to the two bidirectional threaded rods (13). Both ends of the bidirectional threaded rods (13) are threadedly connected to the moving frame (15), and the moving frame (15) is provided with the first clamping plate (16).

3. The chip testing device with a limiting structure according to claim 2, characterized in that: The clamping assembly also includes a fixed plate (19), a second cylinder (20), a movable plate (21), and a second clamping plate (22). Two fixed plates (19) are provided on the rotating disk (6), and two second cylinders (20) are installed on the rotating disk (6). The piston of the second cylinder (20) is connected to the movable plate (21), and the movable plate (21) is provided with the second clamping plate (22).

4. The chip testing device with a limiting structure according to claim 3, characterized in that: The clamping assembly also includes a first guide rod (17), a first elastic element (18), a second guide rod (23), and a second elastic element (24). The first clamping plate (16) is provided with the first guide rod (17), and the first clamping plate (16) is slidably connected to the moving frame (15) through the first guide rod (17). The first elastic element (18) is wrapped around the outside of the first guide rod (17), and the first elastic element (18) connects the first clamping plate (16) and the moving frame (15). The second clamping plate (22) is provided with the second guide rod (23), and the second clamping plate (22) is slidably connected to the moving plate (21) through the second guide rod (23). The second elastic element (24) is wrapped around the outside of the second guide rod (23), and the second elastic element (24) connects the second clamping plate (22) and the moving plate (21).

5. A chip testing device with a limiting structure according to claim 4, characterized in that: The rotating assembly includes a first motor (7), a driving gear (8), a driven gear (9), and a support column (10). The first motor (7) is installed inside the frame (1). The output shaft of the first motor (7) is connected to the driving gear (8). The support column (10) is rotatably provided inside the frame (1). The driven gear (9) is provided on the outside of the support column (10). The driving gear (8) and the driven gear (9) mesh. The support column (10) is connected to the rotating disk (6).

6. The chip testing device with a limiting structure according to claim 5, characterized in that: The rotating assembly also includes pulleys (11). The rotating disk (6) is provided with multiple pulleys (11) around its circumference. The frame (1) is provided with a sliding groove that is adapted to the pulleys (11). The pulleys (11) are slidably connected to the sliding groove.

7. A chip testing device with a limiting structure according to claim 6, characterized in that: It also includes a third cylinder (28), a moving ring (29), a mounting block (30), a connecting rod (32), and a fixing member (33). The third cylinder (28) is mounted on the mounting plate (25). The piston of the third cylinder (28) passes through the mounting plate (25) and is connected to the moving ring (29). The mounting block (30) is provided at the bottom of the mounting plate (25). The lighting lamp (31) is rotatably connected to the mounting block (30). The fixing member (33) is provided at the bottom of the moving ring (29). The connecting rod (32) is rotatably provided on the fixing member (33). The connecting rod (32) is rotatably connected to the lighting lamp (31).

8. A chip testing device with a limiting structure according to claim 7, characterized in that: Multiple lighting lamps (31) are provided and are evenly distributed around the optical lens (5).

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