Ion source neutralizer device capable of regulating and controlling size of annular anode coil and use method

Abstract

The invention discloses an ion source neutralizer device capable of regulating and controlling the size of an annular anode coil and a use method, and is characterized in that a control system connecting assembly drives a scandium acid salt coating elastic cathode assembly to adjust an annular anode positioning spring coil assembly to a required size; the annular anode positioning spring coil assembly is in a hollow disc shape, an annular anode positioning plate is arranged at one end of the annular anode positioning spring coil assembly, a plurality of fixing seats are arranged on the other parts of the annular anode positioning spring coil assembly, and telescopic spring coils are arranged between the annular anode positioning plate and the fixing seats and between the fixing seats; the scandate coating elastic cathode assembly comprises a coil which is placed on the annular anode positioning spring coil assembly, and the annular anode positioning spring coil assembly and the scandate coating elastic cathode assembly are connected through a high-temperature-resistant shielding ring; the control system connecting assembly comprises a ceramic positioning base, a gas and electricity supply control system connector is fixed to the ceramic positioning base, the caliber of the neutralizer is controlled through the device and method, operation is convenient, adjusting precision is good, efficiency is high, and cost is saved.

Description

Technical Field

[0001] This invention relates to the field of ion beam processing technology, specifically to an ion source neutralizer device and its method of use with adjustable annular anode coil size. Background Technology

[0002] The ion source neutralizer is a core component of ion beam processing equipment. Its function is to neutralize the positive charges in the ion beam by emitting electrons, forming a stable plasma environment and preventing beam divergence or equipment damage caused by the space charge effect. Traditional neutralizers generally use tungsten filament cathodes, simple ring anodes, and coarse gas supply systems. Tungsten filament cathodes are easily oxidized at high temperatures (above 2000℃) and suffer material loss due to ion sputtering, with a lifespan typically only 100-300 hours. In addition, tungsten has a high electron work function (approximately 4.5 eV), requiring high temperatures to maintain electron emission efficiency, increasing energy consumption. Existing designs often optimize the cathode or anode independently, lacking systematic simulation and matching of the electromagnetic field distribution between the two. Summary of the Invention

[0003] This invention addresses the problems of existing technologies by proposing an ion source neutralizer device with adjustable annular anode coil size. By adjusting the size of the anode positioning spring coil assembly, the electric field strength and distribution can be adjusted. The device is simple in structure, easy to operate, highly stable, and highly accurate.

[0004] This invention also proposes a method for using an ion source neutralizer device with an adjustable annular anode coil size. The size is adjusted to a suitable size under the drive of the electrical control system connector, and the coil size is adjusted by the torque sliding clamp, which significantly extends the cathode life and is suitable for various ion source models. Using this device and method for neutralizer aperture control is convenient to operate, has good adjustment accuracy, high efficiency, and is cost-effective.

[0005] The technical solution of this invention is: an ion source neutralizer device with adjustable annular anode coil size, characterized in that it comprises:

[0006] A ring-shaped anode positioning spring coil assembly is a hollow disc with a ring-shaped anode positioning plate at one end and multiple fixing seats at the other end. Retractable spring coils are provided between the ring-shaped anode positioning plate and the fixing seats, as well as between the fixing seats.

[0007] A scandium-coated elastic cathode assembly includes a coil placed on an annular anode positioning spring coil assembly, and the two are connected by a high-temperature shielding ring;

[0008] A control system connection component includes a ceramic positioning base, a gas supply and electrical control system connector fixed to the ceramic positioning base, and a torque sliding clamp assembly fixed inside the ceramic positioning base.

[0009] The control system connection component drives the scandium-coated elastic cathode component to adjust the annular anode positioning spring coil component to the required size.

[0010] Further: The annular anode positioning spring coil assembly includes three fixed seats arranged and connected at intervals and four retractable spring coils. The top of the fixed seat is provided with a fixing port, and a high-temperature resistant shielding ring is fixed on the fixing port.

[0011] Furthermore, the outer wall of the ceramic positioning base is provided with three connection holes. The connection holes on both sides are slidably engaged with the torque sliding clamp, and the connection hole in the middle is fixed with the annular anode positioning plate.

[0012] Further: The torque sliding clamp assembly includes a CNC size adjuster, the output end of which is connected to a bearing rod cylinder, a pair of torque sliding clamps are fixed on the bearing rod cylinder, and a gap separator is provided in the middle of the torque sliding clamps.

[0013] Furthermore, the annular anode positioning plate is provided with an L-shaped connection port, which is fixed to the connection hole by bolts passing through the connection port.

[0014] Furthermore, the scandium-coated elastic cathode assembly is provided with an adjustable telescopic spring at its port. Blocks are fixed on both sides of the adjustable telescopic spring, and the block blocks are connected to the torque sliding clamp to drive the adjustable telescopic spring to extend or retract.

[0015] Furthermore, the scandium-coated elastic cathode assembly is provided with adjustable spring rings on both the left and right sides, and the adjustable spring rings are connected to the high-temperature shielding rings on the left and right sides.

[0016] Furthermore, the ceramic positioning base has a sliding strip on its side wall, and the corresponding gas supply and electrical control system connector has a sliding groove on its side wall to match it, so as to realize a sliding connection.

[0017] Finally: The outer end of the torque sliding clamp is provided with a threaded connection port to connect with the blocking block on the scandium-coated elastic cathode assembly.

[0018] Another technical solution of the present invention is: a method of using any of the above-mentioned adjustable annular anode coil size ion source neutralizer devices, characterized in that the gas supply and electrical control system connector adjusts the torque sliding plate to slide to a suitable ion source size position, the retractable spring coil and the blocking block slide through the torque sliding plate to drive the size adjustment of the scandium-coated elastic cathode assembly, thereby adjusting the size of the anode positioning spring coil assembly; and different parameters are set to adjust the electric field strength and distribution to meet the working requirements of the ion source.

[0019] Compared with existing technologies, the advantages of this product are:

[0020] By combining a scandium-coated elastic cathode assembly, an annular anode positioning spring coil assembly, and a high-temperature shielding ring, and activating the electrical control system connector, the scandium-coated elastic cathode assembly can adjust the size of the neutralizer coil according to the ion source model and size. Driven by the electrical control system connector, the scandium-coated elastic cathode assembly adjusts the annular anode positioning spring coil assembly to a suitable size. The coil size is adjusted by the torque sliding clamp, significantly extending the cathode life and adapting to various ion source models. Using this device and method for neutralizer aperture control is convenient to operate, has good adjustment accuracy, high efficiency, and is cost-effective.

[0021] By combining a ceramic positioning base with a high-precision gas supply and electrical control system connector, the system uses an ion current sensor to detect the remaining charge in the neutralized beam, a temperature sensor to monitor the cathode temperature, and pulse width modulation (PWM) to adjust the heating wire current, thereby driving the mass flow meter to dynamically supply gas. This system offers advantages such as high stability and high accuracy. Attached Figure Description

[0022] Figure 1 This is a three-dimensional schematic diagram of the present invention;

[0023] Figure 2 Top view of a scandium-coated elastic cathode assembly;

[0024] Figure 3 This is a structural diagram of the control system connection components;

[0025] Figure 4 A connection structure diagram of the annular anode positioning spring coil assembly;

[0026] Figure 5 This is a schematic diagram of the exploded structure of the present invention;

[0027] In the diagram, 1. Control system connection assembly; 2. Scandium-coated elastic cathode assembly; 3. Annular anode positioning spring coil assembly; 4. Annular anode positioning plate; 5. Fixing seat; 6. Spring coil; 7. High-temperature resistant shielding ring; 8. Ceramic positioning base; 9. Gas supply and power control system connector; 10. Torque sliding clamp assembly; 11. Fixing port; 12. Telescopic spring; 13. Blocking block; 14. Torque sliding clamp; 15. Spring ring; 16. Sliding bar; 17. Sliding groove; 18. Connecting hole; 19. Connecting port; 20. CNC dimension adjuster; 21. Bearing rod cylinder; 22. Spacing barrier; 23. Threaded connection port. Detailed Implementation

[0028] The embodiments of this invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this invention. In the description of this invention, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front end," "rear end," "head," "tail," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. Furthermore, the terms "first," "second," "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] In the description of this invention patent, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this invention patent based on the specific circumstances.

[0030] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0031] according to Figures 1 to 5 An ion source neutralizer device with adjustable annular anode coil size is disclosed. The key feature of this invention is that a control system connection component 1 drives a scandate-coated elastic cathode component 2 to adjust an annular anode positioning spring coil component 3 to the required size. The annular anode positioning spring coil component 3 is a hollow disc, with an annular anode positioning plate 4 at one end and multiple fixed seats 5 distributed around it. Retractable spring coils 6 connect the annular anode positioning plate 4 and the fixed seats 5, as well as between the fixed seats 5 themselves. The scandate-coated elastic cathode component 2 is placed on the annular anode positioning spring coil component 3 and connected to it by a high-temperature resistant shielding ring 7. The control system connection component 1 includes a ceramic positioning base 8, which has a gas supply and electrical control system connector 9 fixed to it. A torque sliding clamp assembly 10 is fixed inside the ceramic positioning base 8, connecting to the scandate-coated elastic cathode component. This allows the control system connection component 1 to drive the scandate-coated elastic cathode component 2 to adjust the annular anode positioning spring coil component 3 to the required size.

[0032] The annular anode positioning spring coil 3 assembly preferably has three fixed seats 5 and four retractable spring coils 6, which are arranged and connected to each other at intervals. The connection part where the spring coils 6 are sleeved is usually narrower to increase the deformation capacity. The fixed seat 5 is a hollow, waist-shaped hole with a fixing opening 11 at the top center. A hollow cylindrical high-temperature resistant shielding ring 7 is fixed on the fixing opening 11. An adjustable telescopic spring 12 is provided at the port of the scandate-coated elastic cathode assembly 2. The two ends of the adjustable telescopic spring 12 are respectively fixed with blocking blocks 13. The blocking blocks 13 are connected to the torque sliding clamp 14 to drive the adjustable telescopic spring 12 to extend or retract. Adjustable spring rings 15 are provided on the left and right sides of the scandate-coated elastic cathode assembly 2. The adjustable spring rings 15 are themselves connected to the ring. The adjustable spring rings 15 are sleeved with the high-temperature resistant shielding rings 7 on the left and right sides, allowing the torque sliding clamp 14 to drive the annular anode positioning spring coil assembly 3 to extend and retract.

[0033] The ceramic positioning base 8 is slidably connected to the gas supply and electrical control system connector 9 on its side wall. A slide bar 16 is provided on the side wall of the ceramic positioning base 8, and a corresponding slide groove 17 is provided on the side wall of the gas supply and electrical control system connector 9 to match it, achieving a sliding connection. Three connection holes 18 are provided on the outer wall of the ceramic positioning base 8. The connection holes 18 on both sides are slidably engaged with the torque sliding clamp 14, and the middle connection hole 18 is fixed to the annular anode positioning plate 4. The annular anode positioning plate 4 has an L-shaped connection port 19, which is bolted to the middle connection hole 18 by passing a bolt through the connection port 19.

[0034] The torque sliding clamp assembly 10 includes a CNC dimension adjuster 20. The output end of the CNC dimension adjuster 20 is connected to a bearing rod cylinder 21. A pair of torque sliding clamps 14 are fixed on the bearing rod cylinder 21, and a gap separator 22 is provided in the middle of the torque sliding clamps 14. The outer end of the torque sliding clamp 14 is provided with a threaded connection port 23, which is torque-connected to the blocking block 13 on the scandium-coated elastic cathode assembly 1.

[0035] Another technical solution of the present invention is: the gas supply and power control system connector 9 adjusts the torque sliding clamp 14 to slide to a position suitable for the size of the ion source, and the adjustable telescopic spring 12 and the blocking block 13 slide radially through the torque sliding clamp 14 to drive the size adjustment of the scandate-coated elastic cathode assembly 2. Because the scandate-coated elastic cathode assembly 2 is placed on the annular anode positioning spring coil assembly 3, the size of the anode positioning spring coil 3 assembly is adjusted, and different parameters are set to adjust the electric field strength and distribution to meet the working requirements of the ion source.

[0036] Working principle

[0037] The high-precision gas supply and electrical control system connector adjusts the torque sliding clamp to the appropriate ion source size position. The scandate-coated elastic cathode assembly port is equipped with a retractable spring coil blocking block, which, via the torque sliding clamp, adjusts the size of the scandate-coated elastic cathode assembly. The scandate-coated elastic cathode assembly and the annular anode positioning spring coil assembly are fixedly connected by a high-temperature resistant shielding ring, thereby adjusting the size of the anode positioning spring coil assembly. Furthermore, the electric field strength and distribution can be adjusted by setting different parameters. The ion source neutralizer, through the synergistic effect of electron emission and charge neutralization, ensures the stability of ion beam processing to meet the operational requirements of the ion source.

[0038] This invention utilizes the high melting point (>3500℃), low sputtering rate, and doping capability of carbon fiber in the cathode, combined with nanostructure design to enhance the electron emission area and resolve the contradiction between cathode lifetime and efficiency. The anode employs a ring structure to optimize the electric field distribution, and a variable-diameter ring anode coil size allows the neutralizer to adapt to various ion source sizes. Adjusted to the appropriate size via the connector in the electrical control system, and with the coil size controlled by a torque sliding clamp, the cathode lifetime is significantly extended, adapting to various ion source models. Using this device and method for neutralizer diameter control is convenient, has high adjustment accuracy, high efficiency, and is cost-effective.

Claims

1. An ion source neutralizer device with adjustable annular anode coil size, characterized in that, Including: A ring-shaped anode positioning spring coil assembly is a hollow disc with a ring-shaped anode positioning plate at one end and multiple fixing seats at the other end. Retractable spring coils are provided between the ring-shaped anode positioning plate and the fixing seats, as well as between the fixing seats. A scandium-coated elastic cathode assembly includes a coil placed on an annular anode positioning spring coil assembly, and the two are connected by a high-temperature shielding ring; A control system connection component includes a ceramic positioning base, a gas supply and electrical control system connector fixed to the ceramic positioning base, and a torque sliding clamp assembly connected to a scandium-coated elastic cathode assembly fixed inside the ceramic positioning base. The control system connection component drives the scandium-coated elastic cathode component to adjust the annular anode positioning spring coil component to the required size.

2. The ion source neutralizer device with adjustable annular anode coil size according to claim 1, characterized in that... The annular anode positioning spring coil assembly includes three fixed seats arranged and connected at intervals and four retractable spring coils. The top of the fixed seat is provided with a fixing port, and a high-temperature resistant shielding ring is fixed on the fixing port.

3. The ion source neutralizer device with adjustable annular anode coil size according to claim 1, characterized in that... The ceramic positioning base has three connection holes on its outer wall. The connection holes on both sides are slidably engaged with the torque sliding clamp, and the connection hole in the middle is fixed to the annular anode positioning plate.

4. The ion source neutralizer device with adjustable annular anode coil size according to claim 3, characterized in that... The torque sliding clamp assembly includes a CNC size adjuster, the output end of which is connected to a bearing rod cylinder, a pair of torque sliding clamps are fixed on the bearing rod cylinder, and a gap separator is provided in the middle of the torque sliding clamps.

5. The ion source neutralizer device with adjustable annular anode coil size according to claim 4, characterized in that... The annular anode positioning plate is provided with an L-shaped connection port, which is fixed to the connection hole by bolts passing through the connection port.

6. The ion source neutralizer device with adjustable annular anode coil size according to claim 1, characterized in that... The scandium-coated elastic cathode assembly is provided with an adjustable telescopic spring at its port. The two ends of the adjustable telescopic spring are respectively fixed with blocking blocks. The blocking blocks are connected and cooperate with the torque sliding clamp to drive the adjustable telescopic spring to extend or retract.

7. The ion source neutralizer device with adjustable annular anode coil size according to claim 1, characterized in that... The scandium-coated elastic cathode assembly is provided with adjustable spring rings on both the left and right sides, and the adjustable spring rings are connected to the high-temperature shielding rings on the left and right sides.

8. The ion source neutralizer device with adjustable annular anode coil size according to claim 1, characterized in that... The outer end of the torque sliding clamp is provided with a threaded connection port that connects to the blocking block on the scandium-coated elastic cathode assembly.

9. An ion source neutralizer device with adjustable annular anode coil size according to claim 1, characterized in that... The ceramic positioning base has a slide bar on its side wall, and the corresponding gas supply and electrical control system connector has a slide groove on its side wall to match it, so as to realize a sliding connection.

10. A method of using an ion source neutralizer device with adjustable annular anode coil size as described in any of claims 1 to 9, characterized in that... The gas supply and electrical control system connector adjusts the torque sliding plate to slide to the appropriate ion source size position. The retractable spring coil and the blocking block slide through the torque sliding plate to adjust the size of the scandium-coated elastic cathode assembly, thereby adjusting the size of the anode positioning spring coil assembly. Different parameters are set to adjust the electric field strength and distribution to meet the working requirements of the ion source.

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