Crack detector based on array sensor
The crack detector using array sensors, employing automatic feeding components and anti-slip devices, solves the problem of wafer slippage in wafer inspection equipment, achieving automated feeding and stable inspection processes, and reducing economic losses.
Patent Information
- Application Number
- CN202511351707.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-22
- Publication Date
- 2025-12-16
AI Technical Summary
In the current wafer inspection equipment, the turning angle and speed of the wafer box are difficult to control during the loading process, which can cause the wafer to slip or be scratched, resulting in economic losses and production interruptions.
A crack detector based on an array sensor was designed. It employs an automatic feeding component and an anti-slip assembly. The automatic flipping and positioning of the wafer cassette and its uniform rotation are achieved through a transmission device. Combined with a self-sealing component, the stability of the flipping process and a clean environment are ensured.
It has achieved automated wafer box loading, reduced manual intervention, lowered the risk of wafer slippage, improved loading efficiency, and maintained the continuity of the testing process and the clean environment of the protective cover.
Smart Images
Figure CN121149033A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application belongs to the technical field of wafer detection equipment, and particularly relates to a crack detector based on an array sensor. BACKGROUND
[0002] In a semiconductor wafer manufacturing and detection process, an AOI detector is a key equipment for realizing efficient detection of surface cracks, scratches and edge defects in a semiconductor wafer mass production process, and the core advantage of the AOI detector is to realize rapid full detection of a wafer surface through high-resolution optical imaging and automatic scanning technology.
[0003] Before the AOI detector detects the wafer, an operator needs to rotate the wafer box by 90 degrees so that the wafer is in a horizontal state, and then clamps one side of the wafer box into a specified position of a workbench. The above loading mode has a high requirement for the proficiency of the operator, and when the wafer box is turned over, if the turning angle is too large or the turning speed is too fast, the wafer will slide out of the wafer box, and then breakage or scratching will occur, causing economic loss and production interruption. SUMMARY
[0004] To solve the problems in the background art, the application provides a crack detector based on an array sensor, which comprises an optical detection equipment, the top of the optical detection equipment is fixedly connected with a protective cover, the front end of the right side of the protective cover is provided with an inlet, the right side of the optical detection equipment is provided with a wafer box, and the crack detector further comprises: An automatic feeding part is arranged on the right side of the optical detection equipment and used for automatically turning and positioning the wafer box. The automatic feeding part comprises a base plate, the base plate is fixedly connected to the top of the right side of the optical detection equipment, a transmission device is arranged in the base plate, and a cylinder is fixedly connected to the top of the base plate through a bearing seat. A supporting seat is arranged on the right side of the cylinder and used for stably supporting the wafer box.
[0005] The sleeve plate is sleeved on the surface of the wafer box, a sliding rod one is slidably connected to the front side and the rear side of the inner cavity of the cylinder, the top of the sliding rod one is fixedly connected with a sliding rod two, an inclined groove one is arranged in the inner cavity of the cylinder, and the sliding rod two is slidably connected in the inclined groove one. A fixing assembly is arranged on the surface of the sliding rod one and used for automatically fixing the wafer box.
[0006] In the above technical solution, preferably, the transmission device comprises a double-shaft motor, the double-shaft motor is fixedly connected to the inside of the backing plate, the front end and the rear end of the output shaft of the double-shaft motor are fixedly connected with a screw rod, one end of the screw rod away from the double-shaft motor penetrates to the outside of the backing plate, the front surface and the back surface of the backing plate are provided with an opening, the surface of the screw rod is threadedly connected with a gusset plate, one end of the slide rod close to the gusset plate is fixedly connected to the surface of the gusset plate, the gusset plate is slidingly connected in the opening, and the surface of the gusset plate is provided with an anti-falling assembly.
[0007] In the above technical solution, preferably, the anti-falling assembly comprises a toothed plate, the toothed plate is arranged on the front side of the top of the backing plate, one end of the toothed plate is fixedly connected to the left side of the gusset plate, the top of the backing plate is fixedly connected with a concave frame, the surface of the concave frame is slidingly sleeved with a half-tooth sleeve, the top of the half-tooth sleeve is fixedly connected with a baffle, the bottom of the toothed plate is in contact with the bottom of the inner wall of the concave frame. The surface of the concave frame is fixedly connected with a spiral spring, and one end of the spiral spring away from the concave frame is fixedly connected in the half-tooth sleeve.
[0008] In the above technical solution, preferably, the front surface and the back surface of the backing plate are fixedly connected with a concave sleeve, the concave sleeve is sleeved on the surface of the screw rod, and the two sides of the gusset plate are in contact with the inner wall of the concave sleeve.
[0009] In the above technical solution, preferably, the right side of the protective cover is fixedly connected with a light-shielding sleeve, the front surface of the light-shielding sleeve is provided with a rotating opening, and the rotating opening is used in cooperation with the baffle.
[0010] In the above technical solution, preferably, the support seat comprises a sleeve plate, the sleeve plate is sleeved on the surface of the wafer box, the front end and the rear end of the left side of the sleeve plate are fixedly connected with a connecting plate, the left end of the connecting plate is fixedly connected to the surface of the cylinder, and the front surface and the back surface of the sleeve plate are provided with a loading and unloading opening.
[0011] In the above technical solution, preferably, the fixing assembly comprises a circular ring, the circular ring is fixedly connected to the surface of the slide rod one through a bearing, the side close to the cylinder of the circular ring is fixedly connected with a spring, one end of the spring away from the circular ring is fixedly connected with an L-shaped limiting sleeve, the surface of the L-shaped limiting sleeve is fixedly connected with a bottom plate, and the L-shaped limiting sleeve and the bottom plate are sleeved on the surface of the support seat.
[0012] In the above technical solution, preferably, the top and the bottom of the side close to the cylinder of the circular ring are fixedly connected with a limiting rod, the top and the bottom of the front surface and the back surface of the cylinder are provided with a limiting hole, and one end of the limiting rod away from the circular ring penetrates through the L-shaped limiting sleeve and is slidingly connected in the limiting hole.
[0013] In the above technical solution, preferably, the inside of the protective cover is provided with a self-sealing assembly, the self-sealing assembly comprises a moving plate, the rear side of the top of the moving plate is fixedly connected with a slide rod three, the front end of the moving plate penetrates to the front side of the protective cover, the front end of the right side of the moving plate is fixedly connected with a support plate, and the right end of the support plate is fixedly connected to the left side of the I-shaped plate. The front end of the right side of the inner wall of the protective cover is fixedly connected with a rotating rod through a bearing seat, the bottom of the rotating rod is provided with an inclined groove two, and the slide rod three is slidably connected in the inclined groove two.
[0014] In the above technical solution, preferably, the front of the protective cover is hingedly connected with a cover plate through a hinge, the left side of the top of the concave frame is fixedly connected with an arc-shaped plate, the bottom of the arc-shaped plate is in contact with the surface of the half-tooth sleeve, and the two sides of the half-tooth sleeve are in contact with the inner walls of the concave frame.
[0015] Compared with the prior art, the beneficial effects of the present application are as follows: The present application drives the slide rod one and the slide rod two to move through the transmission device, the slide rod two drives the cylinder and the support seat to rotate through the inclined groove one, the support seat drives the wafer box to rotate at a constant speed, the fixed assembly can limit the wafer box during rotation, the automatic feeding effect is achieved, the subsequent wafer taking misalignment caused by installation deviation is reduced, the automatic feeding reduces manual intervention, the feeding efficiency is improved, and the economic loss is reduced to a certain extent.
[0016] Further, although the automatic overturning and positioning of the wafer box are realized, there is still a risk of wafer sliding during overturning due to vibration or shaking, and the design of the anti-sliding assembly, including the tooth plate, the concave frame and the half-tooth sleeve, can block and protect the wafer, effectively preventing the wafer from sliding, and after the wafer box is overturned to the horizontal state, the tooth plate can drive the baffle to rotate through the half-tooth sleeve, the baffle will not affect the wafer conveying of the subsequent wafer robot, which ensures the effectiveness of protection during overturning and does not affect the continuity of the detection process.
[0017] Further, although effective positioning of the wafer can be realized, after use, external contaminants can easily enter the inside of the protective cover through the feeding port, and a separate sealing device is still needed for sealing, and through the design of the moving plate, the slide rod three and the support plate in the self-sealing assembly, the sealing plate can automatically rotate to the horizontal state after the wafer box is overturned, and after the detection is completed and the wafer box is reversed and reset, the sealing plate can rotate to the vertical state to seal the feeding port, ensuring the clean environment inside the protective cover, and no additional power and operation steps are needed. BRIEF DESCRIPTION OF DRAWINGS
[0018] Figure 1 The present application is a structural schematic diagram; Figure 2This is a schematic diagram of the wafer cassette structure after rotation according to the present invention; Figure 3 This is a schematic diagram of the structure of the optical detection device of the present invention; Figure 4 This is a schematic diagram of the structure of the self-sealing component of the present invention; Figure 5 This is an exploded view of the self-sealing component of the present invention; Figure 6 This is a schematic diagram of the support base of the present invention; Figure 7 This is a schematic diagram of the structure of the I-shaped plate of the present invention; Figure 8 This is a cross-sectional schematic diagram of the cylinder of the present invention; Figure 9 This is a cross-sectional schematic diagram of the semi-tooth sleeve of the present invention; Figure 10 This is a schematic diagram of the structure of the fixing component of the present invention; Figure 11 This is a schematic diagram of the structure of the pad of the present invention.
[0019] In the diagram: 1. Optical inspection equipment; 2. Protective cover; 3. Feed inlet; 4. Wafer box; 5. Automatic feeder; 51. Pad; 52. Transmission device; 521. Dual-axis motor; 522. Screw; 523. Opening; 524. I-beam; 525. Anti-slip assembly; 5251. Toothed plate; 5252. Concave frame; 5253. Semi-toothed sleeve; 5254. Baffle; 5255. Spiral spring; 53. Cylinder; 54. Support base; 541. Sleeve plate; 542. Connecting plate; 5 43. Loading / unloading port; 55. Slide rod one; 56. Slide rod two; 57. Inclined groove one; 58. Fixing assembly; 581. Ring; 582. Spring; 583. L-shaped limiting sleeve; 584. Base plate; 6. Concave sleeve; 7. Light-shielding sleeve; 8. Rotating port; 9. Limiting rod; 10. Limiting hole; 11. Self-sealing assembly; 111. Moving plate; 112. Slide rod three; 113. Support plate; 114. Rotating rod; 115. Inclined groove two; 116. Sealing plate; 12. Cover plate; 13. Arc plate. Detailed Implementation
[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0021] like Figures 1 to 3As shown, the present application provides a crack detector based on array sensor, comprising an optical detection device 1, the top of the optical detection device 1 is fixedly connected with a protective cover 2, the front end of the right side of the protective cover 2 is provided with a feeding port 3, the right side of the optical detection device 1 is provided with a wafer box 4, and the optical detection device 1 further comprises: An automatic feeding part 5 is arranged on the right side of the optical detection device 1 and used for automatically turning and positioning the wafer box 4. The automatic feeding part 5 comprises a base plate 51, the base plate 51 is fixedly connected to the top of the right side of the optical detection device 1, the inside of the base plate 51 is provided with a transmission device 52, and the top of the base plate 51 is fixedly connected with a cylinder 53 through a bearing seat. A supporting seat 54 is arranged on the right side of the cylinder 53 and used for stably supporting the wafer box 4.
[0022] A sleeve plate 541 is sleeved on the surface of the wafer box 4, the front side and the rear side of the inner cavity of the cylinder 53 are both slidably connected with a sliding rod one 55, the top of the sliding rod one 55 is fixedly connected with a sliding rod two 56, the inside of the cylinder 53 is provided with an inclined groove one 57, and the sliding rod two 56 is slidably connected in the inside of the inclined groove one 57. A fixing assembly 58 is arranged on the surface of the sliding rod one 55 and used for automatically fixing the wafer box 4.
[0023] Specifically, the optical detection device 1 is an AOI optical automatic detection device, which is composed of a workbench, a wafer robot, a display and a core detection device, the wafer robot is responsible for accurately taking and placing the wafer from the wafer box 4 to the detection station, the display presents the detection image and result in real time, and the core detection device integrates a high-resolution optical lens, a multi-spectrum light source and an array sensor, wherein the array sensor is composed of a plurality of micro photoelectric sensing units arranged in a matrix and serves as a key detection element to quickly capture the light signal change on the wafer surface; the detection principle is that the multi-spectrum light source irradiates the wafer surface from different angles, the reflected light of the flat area propagates regularly, and the cracks, scratches and other defects cause the scattering or refraction of light; after the light signals are focused by the optical lens, the array sensor synchronously receives the light signals, the sensor converts the light signals into electric signals and transmits the electric signals to a processing system, the system identifies the defect position and size by analyzing the signal difference, and finally generates a detection report on the display, and the optical detection device 1 belongs to the existing mature technology application. The inclined groove one 57 is composed of an inner horizontal groove and an inner inclined groove, the inner horizontal groove is arranged on the right side of the cylinder 53, and the inner inclined groove is arranged on the front side and the rear side of the inner wall of the inner horizontal groove.
[0024] As Figures 6 to 8As shown, the transmission 52 comprises a double-shaft motor 521 fixedly connected inside the backing plate 51, the front end and the rear end of the output shaft of the double-shaft motor 521 are fixedly connected with screw rods 522, one end of the screw rod 522 away from the double-shaft motor 521 penetrates to the outside of the backing plate 51, the front and back of the backing plate 51 are provided with openings 523, the surface of the screw rod 522 is threadedly connected with an I-shaped plate 524, one end of the sliding rod one 55 close to the I-shaped plate 524 is fixedly connected to the surface of the I-shaped plate 524, the I-shaped plate 524 is slidingly connected inside the opening 523, and the surface of the I-shaped plate 524 is provided with an anti-falling assembly 525.
[0025] Specifically, the front and back of the double-shaft motor 521 shell are fixedly installed inside the backing plate 51 by bolts; the threads of the two screw rods 522 are opposite in direction; the backing plate 51 can support and limit the I-shaped plate 524 through the opening 523, improving the stability of the I-shaped plate 524 when moving.
[0026] As shown in Figure 6 and Figure 9 The anti-falling assembly 525 comprises a toothed plate 5251 provided on the front side of the top of the backing plate 51, one end of the toothed plate 5251 is fixedly connected to the left side of the I-shaped plate 524, the top of the backing plate 51 is fixedly connected with a concave frame 5252, the surface of the concave frame 5252 is slidingly sleeved with a half-tooth sleeve 5253, the top of the half-tooth sleeve 5253 is fixedly connected with a baffle 5254, and the bottom of the toothed plate 5251 is in contact with the bottom of the inner wall of the concave frame 5252. The surface of the concave frame 5252 is fixedly connected with a spiral spring 5255, one end of the spiral spring 5255 away from the concave frame 5252 is fixedly connected inside the half-tooth sleeve 5253.
[0027] Specifically, the spiral spring 5255 is a stainless steel spring coil; in use, the I-shaped plate 524 drives the sliding rod one 55 and the toothed plate 5251 to move, the sliding rod one 55 drives the sliding rod two 56 to slide inside the inner inclined groove, so that the cylinder 53 rotates counterclockwise, when the cylinder 53 rotates ninety degrees, the sliding rod two 56 will slide inside the inner horizontal groove, at this time the cylinder 53 will not rotate, the toothed plate 5251 will engage with the half-tooth sleeve 5253 and drive the half-tooth sleeve 5253 to rotate, and the half-tooth sleeve 5253 drives the baffle 5254 to horizontally move, and then the double-shaft motor 521 can be turned off.
[0028] As shown in Figure 7 The front and back of the backing plate 51 are fixedly connected with concave sleeves 6, the concave sleeves 6 are sleeved on the surface of the screw rod 522, and the two sides of the I-shaped plate 524 are in contact with the inner walls of the concave sleeves 6.
[0029] Specifically, by setting the concave sleeve 6, the screw rod 522 can be supported and limited, improving the stability of the screw rod 522 during rotation, and preventing the I-shaped plate 524 from moving too far.
[0030] As shown in Figures 1 to 3 , the right side of the protective cover 2 is fixedly connected with a light shielding sleeve 7, and the front surface of the light shielding sleeve 7 is provided with a rotating opening 8, which is used in cooperation with the baffle 5254.
[0031] Specifically, by setting the light shielding sleeve 7 and the rotating opening 8, the feeding port 3 can be shielded and protected from external light, thereby preventing the external light from entering the interior of the protective cover 2 and affecting the detection effect.
[0032] As shown in Figure 6 , the support seat 54 includes a sleeve plate 541, which is sleeved on the surface of the wafer box 4. The front end and the rear end of the left side of the sleeve plate 541 are fixedly connected with a connecting plate 542, and the left end of the connecting plate 542 is fixedly connected to the surface of the cylinder 53. The front surface and the back surface of the sleeve plate 541 are provided with a loading and unloading opening 543.
[0033] Specifically, the sleeve plate 541 can stably wrap and support the wafer box 4, and the fixed connection of the connecting plate 542 and the cylinder 53 ensures that the wafer box 4 remains stable during the turning process, reducing shaking. By setting the loading and unloading opening 543, the wafer box 4 can be quickly placed into or taken out of the sleeve plate 541, without affecting the support strength of the sleeve plate 541 on the wafer box 4.
[0034] As shown in Figure 6 and Figure 10 , the fixing assembly 58 includes a circular ring 581 fixedly connected to the surface of the slide rod one 55 through a bearing. The side of the circular ring 581 close to the cylinder 53 is fixedly connected with a spring 582, and the end of the spring 582 away from the circular ring 581 is fixedly connected with an L-shaped limiting sleeve 583. The surface of the L-shaped limiting sleeve 583 is fixedly connected with a bottom plate 584, and the L-shaped limiting sleeve 583 and the bottom plate 584 are both sleeved on the surface of the support seat 54.
[0035] Specifically, the L-shaped limiting sleeve 583 and the bottom plate 584 can limit the wafer box 4 through the sleeve plate 541, preventing the wafer box 4 from falling during rotation, and improving the stability of the wafer box 4. At the same time, the circular ring 581 drives the L-shaped limiting sleeve 583 to move through the spring 582, which can ensure the continuous movement of the slide rod one 55 and the stability of the L-shaped limiting sleeve 583.
[0036] As shown in Figure 7 and Figure 10As shown, the top and bottom of the side of the circular ring 581 close to the cylinder 53 are fixedly connected with the limiting rods 9, the top and bottom of the front and back of the cylinder 53 are provided with limiting holes 10, and the ends of the limiting rods 9 away from the circular ring 581 penetrate through the L-shaped limiting sleeve 583 and are slidingly connected in the limiting holes 10.
[0037] Specifically, by arranging the limiting rods 9 and the limiting holes 10, the L-shaped limiting sleeve 583 can be supported and limited, thereby improving the stability of the L-shaped limiting sleeve 583 and preventing the L-shaped limiting sleeve 583 from shaking during movement.
[0038] As shown in Figures 3 to 5 , the inside of the protective cover 2 is provided with a self-sealing assembly 11, the self-sealing assembly 11 includes a moving plate 111, the rear side of the top of the moving plate 111 is fixedly connected with a slide rod three 112, the front end of the moving plate 111 penetrates to the front side of the protective cover 2, the front end of the right side of the moving plate 111 is fixedly connected with a support plate 113, and the right end of the support plate 113 is fixedly connected to the left side of the I-shaped plate 524. The front end of the right side of the inner wall of the protective cover 2 is fixedly connected with a rotating rod 114 through a bearing seat, the bottom of the rotating rod 114 is provided with an inclined groove two 115, the slide rod three 112 is slidingly connected in the inclined groove two 115, and the right side of the rotating rod 114 is fixedly connected with a sealing plate 116.
[0039] Specifically, when the I-shaped plate 524 moves, the I-shaped plate 524 drives the moving plate 111 to move through the toothed plate 5251 and the support plate 113, the moving plate 111 drives the slide rod three 112 to slide in the inclined groove two 115, thereby driving the rotating rod 114 and the sealing plate 116 to rotate, when the wafer box 4 is turned over, the sealing plate 116 is rotated to a horizontal state, facilitating the subsequent wafer robot to quickly transport the wafer; and after detection is completed, the I-shaped plate 524 is reset, the toothed plate 5251 and the moving plate 111 move forward, the slide rod three 112 drives the rotating rod 114 and the sealing plate 116 to reverse and reset through the inclined groove two 115, and the sealing plate 116 seals the feeding port 3, thereby ensuring the clean environment inside the protective cover 2.
[0040] As shown in Figure 1 , Figure 9 and Figure 10 , the front of the protective cover 2 is hingedly connected with a cover plate 12, the left side of the top of the concave frame 5252 is fixedly connected with an arc-shaped plate 13, the bottom of the arc-shaped plate 13 is in contact with the surface of the half-tooth sleeve 5253, and the two sides of the half-tooth sleeve 5253 are in contact with the inner walls of the concave frame 5252.
[0041] Specifically, one side of the arc-shaped plate 13 is in contact with the tooth of the half-tooth sleeve 5253, the arc-shaped plate 13 can limit the half-tooth sleeve 5253 through the concave frame 5252, so that the half-tooth sleeve 5253 does not rotate too much, and the stability of the half-tooth sleeve 5253 and the baffle 5254 is improved.
[0042] The working principle and use process of the application are as follows: Firstly, the user places the wafer box 4 loaded with wafers into the inner part of the sleeve plate 541, and then starts the double-shaft motor 521, so that the double-shaft motor 521 drives the screw rod 522 to rotate, the screw rod 522 drives the two I-shaped plates 524 to move close to each other, the I-shaped plates 524 drive the slide rod one 55 to move, the slide rod one 55 and the slide rod two 56 drive the cylinder 53 and the connecting plate 542 to rotate through the inclined groove one 57, so that the connecting plate 542 and the sleeve plate 541 drive the wafer box 4 to rotate at a constant speed; Meanwhile, in the rotating process, the slide rod one 55 drives the circular ring 581 to move through the bearing, the circular ring 581 drives the L-shaped limiting sleeve 583 and the bottom plate 584 to be sleeved on the surface of the sleeve plate 541 through the spring 582, the L-shaped limiting sleeve 583 moves to the corner of the wafer box 4 to limit the wafer box 4, the baffle 5254 can block the wafers to prevent falling, when the wafer box 4 rotates by 90 degrees, the tooth plate 5251 engages with the half-tooth sleeve 5253 and drives the half-tooth sleeve 5253 to rotate, the half-tooth sleeve 5253 drives the baffle 5254 to move horizontally, then the double-shaft motor 521 is turned off, and the optical detection equipment 1 takes, places and detects the wafers, so that the automatic feeding effect is achieved.
[0043] It should be noted that, in the present document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.
[0044] Although embodiments of the present application have been shown and described, it would be recognized by those of ordinary skill in the art that various changes, modifications, replacements, and alterations of the embodiments could be made without departing from the principles and spirit of the application, and the scope of the application is defined by the appended claims and their equivalents.
Claims
1. An array sensor-based crack detector, comprising an optical detection device (1), a protective cover (2) is fixedly connected to the top of the optical detection device (1), a feed inlet (3) is formed in the front end of the right side of the protective cover (2), and a wafer box (4) is arranged on the right side of the optical detection device (1), characterized in that, Also include: Automatic feeding piece (5), set in the right side of optical detection equipment (1), for automatic turnover positioning of wafer box (4); The automatic feeding piece (5) includes a backing plate (51), which is fixedly connected to the top of the right side of the optical detection equipment (1), and the inside of the backing plate (51) is provided with a transmission device (52), and the top of the backing plate (51) is fixedly connected with a cylinder (53) through a bearing seat; Supporting seat (54), set in the right side of the cylinder (53), for stable support of the wafer box (4); The sleeve plate (541) is sleeved on the surface of the wafer box (4), the front side and the rear side of the inner cavity of the cylinder (53) are slidably connected with the slide rod one (55), the top of the slide rod one (55) is fixedly connected with the slide rod two (56), the inside of the cylinder (53) is provided with a chute one (57), and the slide rod two (56) is slidably connected in the inside of the chute one (57); The fixing assembly (58) is arranged on the surface of the slide rod one (55), and the wafer box (4) is automatically fixed.
2. The array sensor based crack detector as claimed in claim 1, wherein: The transmission device (52) includes a double shaft motor (521), which is fixedly connected to the inside of the backing plate (51), and the front end and the rear end of the output shaft of the double shaft motor (521) are fixedly connected with the screw rod (522), one end of the screw rod (522) away from the double shaft motor (521) penetrates to the outside of the backing plate (51), the front and back of the backing plate (51) are provided with openings (523), the surface of the screw rod (522) is threadedly connected with an I-shaped plate (524), one end of the slide rod one (55) close to the I-shaped plate (524) is fixedly connected to the surface of the I-shaped plate (524), the I-shaped plate (524) is slidably connected in the inside of the opening (523), and the surface of the I-shaped plate (524) is provided with an anti-falling assembly (525).
3. The array sensor based crack detector as claimed in claim 2, wherein: The anti-falling assembly (525) includes a toothed plate (5251), which is arranged on the front side of the top of the backing plate (51), one end of the toothed plate (5251) is fixedly connected to the left side of the I-shaped plate (524), the top of the backing plate (51) is fixedly connected with a concave frame (5252), the surface of the concave frame (5252) is slidably sleeved with a half tooth sleeve (5253), the top of the half tooth sleeve (5253) is fixedly connected with a baffle (5254), and the bottom of the toothed plate (5251) is in contact with the bottom of the inner wall of the concave frame (5252). The surface of the concave frame (5252) is fixedly connected with a vortex spring (5255), and one end of the vortex spring (5255) away from the concave frame (5252) is fixedly connected in the inside of the half tooth sleeve (5253).
4. The array sensor based crack detector as claimed in claim 3, wherein: The front and back of the backing plate (51) are fixedly connected with a concave sleeve (6), the concave sleeve (6) is sleeved on the surface of the screw rod (522), and the two sides of the I-shaped plate (524) are in contact with the inner wall of the concave sleeve (6).
5. The array sensor based crack detector as claimed in claim 3, wherein: The right side of the protective cover (2) is fixedly connected with a light shielding sleeve (7), the front surface of the light shielding sleeve (7) is provided with a rotating opening (8), and the rotating opening (8) is used in cooperation with the baffle (5254).
6. The array sensor based crack detector as claimed in claim 1, wherein: The supporting seat (54) comprises a sleeve plate (541), the sleeve plate (541) is sleeved on the surface of the wafer box (4), the front end and the rear end of the left side of the sleeve plate (541) are fixedly connected with the connecting plates (542), the left end of the connecting plate (542) is fixedly connected on the surface of the cylinder (53), and the front surface and the back surface of the sleeve plate (541) are provided with the loading and unloading openings (543).
7. The array sensor based crack detector as claimed in claim 6, wherein: The fixing assembly (58) comprises a circular ring (581), the circular ring (581) is fixedly connected on the surface of the sliding rod one (55) through a bearing, one side of the circular ring (581) close to the cylinder (53) is fixedly connected with a spring (582), one end of the spring (582) away from the circular ring (581) is fixedly connected with an L-shaped limiting sleeve (583), the surface of the L-shaped limiting sleeve (583) is fixedly connected with a bottom plate (584), and the L-shaped limiting sleeve (583) and the bottom plate (584) are sleeved on the surface of the supporting seat (54).
8. The array sensor based crack detector as claimed in claim 7, wherein: The top and the bottom of one side of the circular ring (581) close to the cylinder (53) are fixedly connected with the limiting rods (9), the top and the bottom of the front surface and the back surface of the cylinder (53) are provided with the limiting holes (10), and one end of the limiting rod (9) away from the circular ring (581) penetrates through the L-shaped limiting sleeve (583) and is slidingly connected in the limiting hole (10).
9. The array sensor based crack detector as claimed in claim 1, wherein: The inside of the protective cover (2) is provided with a self-sealing assembly (11), the self-sealing assembly (11) comprises a moving plate (111), the rear side of the top of the moving plate (111) is fixedly connected with a sliding rod three (112), the front end of the moving plate (111) penetrates to the front side of the protective cover (2), the front end of the right side of the moving plate (111) is fixedly connected with a supporting plate (113), and the right end of the supporting plate (113) is fixedly connected on the left side of the I-shaped plate (524). The front end of the right side of the inner wall of the protective cover (2) is fixedly connected with a rotating rod (114) through a bearing seat, the bottom of the rotating rod (114) is provided with an inclined groove two (115), the sliding rod three (112) is slidingly connected in the inclined groove two (115), and the right side of the rotating rod (114) is fixedly connected with a sealing plate (116).
10. The array sensor based crack detector as claimed in claim 3, wherein: The front surface of the protective cover (2) is hingedly connected with a cover plate (12), the top of the left side of the concave frame (5252) is fixedly connected with an arc-shaped plate (13), the bottom of the arc-shaped plate (13) is in contact with the surface of the half-tooth sleeve (5253), and the two sides of the half-tooth sleeve (5253) are in contact with the inner wall of the concave frame (5252).