A method of processing a tco conductive glass

Abstract

The application discloses a TCO conductive glass processing method and relates to the technical field of glass production. The TCO conductive glass processing method comprises the following steps: glass forming, uniformly melting glass raw materials in a melting furnace to form a glass melt, continuously flowing the glass melt into a tin bath, floating the glass melt on the surface of tin liquid in the tin bath to form a glass ribbon, and performing edge pulling on the glass ribbon through an edge pulling roller to reach a target size and form a glass substrate; high-temperature film plating, moving the glass substrate to a film plating channel through a material conveyor at the outlet end of the tin bath. According to the application, the film plating assembly is arranged to move synchronously with the glass substrate, adjacent two groups of film plating assemblies form a closed flow channel, a single group of film plating assemblies can continuously plating the surface of a section of glass substrate, the vapor reaction deposition process can be dynamically matched with the continuously moving glass substrate, and the uniformity of the film plating by the chemical vapor deposition method is improved.

Description

Technical Field

[0001] This invention relates to the field of glass production technology, specifically a method for processing TCO conductive glass. Background Technology

[0002] TCO conductive glass, short for transparent conductive oxide glass, is a material with a thin film of transparent conductive oxide deposited on its surface using physical or chemical methods. In-line coating is a technology that directly deposits the thin film during the continuous production of the glass substrate, eliminating the need to remove the glass from the production line for separate coating. Its core advantage is the utilization of residual heat from the glass production process (such as the high-temperature glass strip in float glass), significantly reducing energy consumption and production costs, while simultaneously achieving strong adhesion between the thin film and the glass substrate. This is the mainstream coating solution for TCO conductive glass.

[0003] For example, patent CN101844874A discloses an online coating method and online coating device for conductive glass. Multiple reaction gas inlet channels and multiple waste gas extraction channels are set in the coating area. The glass substrate is driven by a conveying roller to pass through multiple reaction gas inlet channels and multiple waste gas extraction channels in sequence. The gaseous reactants are deposited on the surface of the glass substrate to achieve coating. However, the gaseous reactants are prone to interference between the multiple inlet channels, which affects the uniformity of the coating. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides a TCO conductive glass processing method that solves the problem of gaseous reactants easily clashing and interfering with each other between multiple air inlet channels, thus affecting the uniformity of the coating.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a method for processing TCO conductive glass, comprising the following steps:

[0006] Step 1: Glass forming. The glass raw material is melted at high temperature in a melting furnace to form a uniform glass melt. The glass melt flows continuously into a tin bath. In the tin bath, the glass melt floats on the surface of the molten tin to form a glass strip. The glass strip is pulled by edge-pulling rollers to achieve the target size and form a glass substrate.

[0007] Step 2: High-temperature coating. The glass substrate is moved to the coating channel via a material conveyor from the tin bath outlet. The coating channel has a split coating device that moves synchronously with the glass substrate. It is used to coat the surface of the glass substrate with a layer of transparent conductive oxide film and reduce the space for exhaust gas to escape.

[0008] Step 3: Annealing and cooling. The coated glass ribbon is drawn into the annealing furnace for gradient annealing to eliminate internal stress.

[0009] Furthermore, the coating apparatus includes a conveyor and multiple sets of coating components evenly distributed in the conveying direction of the conveyor;

[0010] A single coating assembly includes:

[0011] The nozzle is a hollow plate structure. The thickness of the plate structure is in the conveying direction of the conveyor. Supports are installed at both ends of the nozzle, and airflow baffles are provided on the supports.

[0012] The exhaust nozzle is located on one side of the jet nozzle, so that two adjacent exhaust nozzles and the airflow baffle can form a closed flow channel. The closed flow channel prevents the reaction waste gas from expanding outward, so that the reaction waste gas is gradually discharged within the controlled closed flow channel.

[0013] Furthermore, the exhaust nozzle includes:

[0014] An external exhaust plate is fixed to a bracket. Inside the external exhaust plate is an internal exhaust plate that can move longitudinally. The external exhaust plate has multiple external through slots on both sides along its thickness direction. The internal exhaust plate has an internal through slot that mates with the external through slots. The internal exhaust plate moves within the external exhaust plate to bring the internal through slot closer to or further away from the corresponding external through slot, thereby changing the opening and closing size of the external through slot and controlling the exhaust volume of the exhaust nozzle.

[0015] Furthermore, a slide rail is fixedly installed inside the coating channel, and the slide rail is located at both ends of the coating assembly. The slide rail includes an inclined rail, which gradually rises along the transmission direction of the conveyor. A straight rail is provided above the inclined rail. The two ends of the inclined rail and the straight rail are connected into an integral structure by a first arc-shaped rail and a second arc-shaped rail, respectively. The first arc-shaped rail and the second arc-shaped rail are close to the outlet end and the inlet end of the coating channel, respectively. The first arc-shaped rail is a minor arc with a gradually increasing diameter, and the second arc-shaped rail is a minor arc with a fixed diameter.

[0016] The upper part of both ends of the internal exhaust plate is fixed with sliders, which can slide on the slide rail.

[0017] Furthermore, the air inlet end of the jet nozzle is provided with a tapering section, the lower part of the tapering section is provided with a expanding section, and a throat is formed between the two. The lower part of the expanding section is provided with a straight section, and the jet nozzle end is provided with a flat nozzle.

[0018] Furthermore, a third air intake manifold is provided on both sides of the conveyor. An air intake pipe is provided at one end of the third air intake manifold, and the upper end of the air intake pipe extends to the outside of the coating channel. The gaseous reactants are introduced into the third air intake manifold through the air intake pipe.

[0019] A second connecting pipe connects the jet nozzle to the third air intake manifold.

[0020] Furthermore, a second exhaust manifold is provided on both sides of the conveyor, and an exhaust pipe is provided at one end of the second exhaust manifold. A first exhaust manifold is fixed at the top of the coating channel, and the upper end of the exhaust pipe extends to the outside of the coating channel and is fixedly connected to the first exhaust manifold.

[0021] A first connecting pipe connects the exhaust nozzle to the second exhaust manifold.

[0022] Furthermore, each of the inlet and outlet ends of the coating channel is provided with an exhaust pipe, the upper end of the exhaust pipe is fixedly connected to the exhaust pipe, and the end of the exhaust pipe is fixedly connected to the first exhaust manifold.

[0023] Furthermore, the support structure is an isosceles triangle, with the airflow baffle located on the isosceles side of the triangle and inclined downwards in the direction away from the nozzle.

[0024] Furthermore, the conveyor includes:

[0025] A first conveyor belt and a second conveyor belt are arranged side by side, and both the first conveyor belt and the second conveyor belt are equipped with coating components;

[0026] An installation gap is formed between the first conveyor belt and the second conveyor belt. A support frame is provided on the side of the first conveyor belt and the second conveyor belt that is far apart from each other and at the installation gap position. The support frame is connected to the rotating shaft of the conveyor through a bearing. An installation frame is connected to the support frame located at the installation gap position. The upper part of the installation frame is installed on the top of the coating channel.

[0027] The present invention has the following beneficial effects:

[0028] 1. The TCO conductive glass processing method sets up a coating assembly that moves synchronously with the glass substrate. Two adjacent sets of coating assemblies form a closed flow channel, enabling a single set of coating assemblies to continuously coat a section of the glass substrate surface. The vapor phase reactant deposition process can be dynamically matched with the continuously moving glass substrate, improving the uniformity of chemical vapor deposition coating. At the same time, the closed flow channel blocks the outward diffusion of gas flow, reduces the interference of waste gas flow on the substrate surface, and makes the coating gas flow stably on the substrate surface.

[0029] 2. The TCO conductive glass processing method includes setting an inner exhaust plate, an outer exhaust plate, and a slide rail. Under the action of the inclined rail, the inner exhaust plate gradually rises along the moving direction of the glass substrate. That is, as the coating process proceeds, the inner exhaust plate gradually moves upward to bring the inner channel closer to the corresponding outer channel, thereby changing the opening and closing size of the outer channel, controlling the intake volume of the exhaust nozzle, and adapting to the absorption of the gradually increasing amount of waste gas during the coating process.

[0030] 3. The TCO conductive glass processing method uses a conveyor for transporting the coating assembly so that it moves synchronously with the glass substrate. The conveyor is equipped with a first conveyor belt and a second conveyor belt, with an installation gap between them. The coating assembly is set on the first conveyor belt and the second conveyor belt to achieve balanced operation of the coating assembly. The installation gap facilitates the installation and fixation of the conveyor, and enables the coating assembly to move synchronously with the glass substrate without interfering with the coating work.

[0031] Of course, any product implementing this invention does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0032] Figure 1 These are the process steps of the present invention;

[0033] Figure 2 This is a schematic diagram of the external structure of the present invention;

[0034] Figure 3 This is a cross-sectional view of the present invention;

[0035] Figure 4 This is a schematic diagram of the coating apparatus of the present invention;

[0036] Figure 5 This is a partial schematic diagram of the coating apparatus of the present invention;

[0037] Figure 6 This is a schematic diagram showing the connection between the coating assembly and the conveyor of the present invention;

[0038] Figure 7 This is a schematic diagram of the conveyor of the present invention;

[0039] Figure 8 This is a schematic diagram of the exhaust nozzle of the present invention;

[0040] Figure 9 This is a cross-sectional view of the jet nozzle of the present invention;

[0041] Figure 10 This is a schematic diagram of the working state of the coating device of the present invention;

[0042] Figure 11 This is a schematic diagram of the working state of the exhaust nozzle of the present invention.

[0043] In the diagram, 1. Coating channel; 2. Material conveyor; 31. First exhaust manifold; 32. Exhaust pipe; 33. Exhaust stack; 34. Second exhaust manifold; 35. First connecting pipe; 41. Inlet pipe; 42. Third inlet manifold; 43. Second connecting pipe; 5. Conveyor; 51. First conveyor belt; 52. Second conveyor belt; 53. Installation gap; 54. Support frame; 55. Mounting frame; 6. Slide rail; 61. Inclined... 62. Inclined rail; 63. First arc-shaped rail; 64. Second arc-shaped rail; 7. Straight rail; 7. Coating assembly; 71. Air nozzle; 711. Tapering section; 712. Expanding section; 713. Straight section; 714. Flat nozzle; 72. Exhaust nozzle; 721. Internal exhaust plate; 7211. Slider; 722. External exhaust plate; 723. External through groove; 724. Internal through groove; 73. Support; 74. Airflow baffle; 8. Closed flow channel. Detailed Implementation

[0044] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] In the description of this invention, it should be understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inner", "around", etc., which indicate orientation or positional relationship, are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting this invention.

[0046] The following is based on Figures 1-11 This invention describes a method for processing TCO conductive glass according to embodiments of the present invention.

[0047] Please refer to Figure 1 This invention provides a method for processing TCO conductive glass, comprising the following steps:

[0048] Step 1: Glass forming. The glass raw material is melted at high temperature in a melting furnace to form a uniform glass melt. The glass melt flows continuously into a tin bath. In the tin bath, the glass melt floats on the surface of the molten tin to form a glass strip. The glass strip is pulled by edge-pulling rollers to achieve the target size and form a glass substrate.

[0049] Step 2: High-temperature coating. The glass substrate is moved from the tin bath outlet to the coating channel 1 via the material conveyor 2. The coating channel 1 has a split coating device that moves synchronously with the glass substrate. It is used to coat the surface of the glass substrate with a layer of transparent conductive oxide film and reduce the space for exhaust gas to escape.

[0050] Step 3: Annealing and cooling. The coated glass ribbon is drawn into the annealing furnace for gradient annealing to eliminate internal stress.

[0051] Please refer to Figures 2-6 The coating apparatus includes a conveyor 5 and multiple coating components 7 evenly distributed in the conveying direction of the conveyor 5. The coating components 7 can coat the glass substrate and discharge exhaust gas. The transmission speed of the conveyor 5 is the same as that of the material conveyor 2, so that the coating components 7 move synchronously with the glass substrate. Thus, the vapor phase reactant deposition process of the coating components 7 can be dynamically matched with the continuously moving glass substrate. The multiple coating components 7 can continuously and stably coat the corresponding glass substrate surface, improving the uniformity of chemical vapor deposition coating.

[0052] Furthermore, a closed flow channel 8 covering only the glass substrate area can be formed between two adjacent sets of coating components 7. The closed flow channel 8 blocks the outward diffusion of airflow and reduces the interference of waste gas flow on the surface of the glass substrate, so that the gaseous reactants flow stably on the substrate surface. Specifically, a single set of coating components 7 includes a jet nozzle 71 and an exhaust nozzle 72. The jet nozzle 71 is a hollow plate structure with the thickness of the plate structure in the conveying direction of the conveyor 5. Supports 73 are installed at both ends of the jet nozzle 71, and airflow baffles 74 are provided on the supports 73. The exhaust nozzle 72 is located on one side of the jet nozzle 71, so that a closed flow channel 8 can be formed between two adjacent exhaust nozzles 72 and the airflow baffle 74. The closed flow channel 8 blocks the outward diffusion of reaction waste gas, so that the reaction waste gas is gradually exhausted within the controlled closed flow channel 8.

[0053] Therefore, in the TCO conductive glass processing method provided in this embodiment of the invention, the coating component 7 moves synchronously with the glass substrate along with the conveyor 5. For a section of glass substrate, the gaseous reactants of the TCO film are transported to the closed flow channel 8 through the jet nozzle 71 to continuously coat the surface of the corresponding section of glass substrate. At the same time, the exhaust nozzles 72 located at both ends of the jet nozzle 71 work to move the gaseous reactants to both sides of the closed flow channel 8, thereby uniformly covering the surface of the section of glass substrate. The gaseous reactants are adsorbed on the surface of the glass substrate, and the chemical reaction is triggered by the high temperature of the substrate to generate a TCO film and waste gas. The exhaust nozzles 72 can also collect the waste gas desorbed from the glass surface to avoid contaminating the film or equipment. At this time, the waste gas in the entire coating channel 1 will not interfere with each other and affect the coating effect.

[0054] Preferably, the support 73 forms an isosceles triangle structure, and the airflow baffle 74 is located on the isosceles side of the isosceles triangle and is inclined downward in the direction away from the nozzle 71. The inclined airflow baffle 74 enables the gaseous reactants that diffuse to both sides to fit more closely to the glass substrate, compensate for the edge flux, and reduce the airflow edge attenuation.

[0055] Preferably, an L-shaped retaining angle is fixed at one acute-angle end of the bracket 73 where the exhaust nozzle 72 is not installed. The L-shaped retaining angle cooperates with the edge of the exhaust nozzle 72, so that the two adjacent sets of coating components 7 can be stably connected to form a closed flow channel 8.

[0056] Preferably, the material conveyor 2 is a liftable roller conveyor, for example, using hydraulic or pneumatic methods to lift the roller conveyor. When the coating work begins, the material conveyor 2 rises and pushes the glass substrate up to approach the coating device, so that the nozzle 71 is close to the glass substrate, which is beneficial for vapor deposition.

[0057] Furthermore, the distance between the jet nozzle 71 and the glass substrate is 2-3cm, which reduces the impact of the ejected airflow on the glass while ensuring the dispersion of the airflow after it is ejected. The distance between the exhaust nozzle 72 and the glass substrate is 2-10mm.

[0058] Please refer to Figures 3-5 To facilitate uninterrupted air intake for the coating assembly 7 as it moves with the conveyor 5, a third air intake manifold 42 is provided on both sides of the conveyor 5. One end of the third air intake manifold 42 is provided with an air intake pipe 41, the upper end of which extends to the outside of the coating channel 1. A second connecting pipe 43 connects the nozzle 71 to the third air intake manifold 42. The gaseous reactants enter the third air intake manifold 42 through the air intake pipe 41, and then pass through the second connecting pipe 43 into the nozzle 71. The gaseous reactants are released onto the surface of the glass substrate through the nozzle 71.

[0059] Preferred, refer to Figure 9 The nozzle 71 has a tapered section 711 at the air inlet end, and a diffusing section 712 at the lower part of the tapered section 711, forming a throat between the two. A straight section 713 is located at the lower part of the diffusing section 712. The cross-sectional area of ​​the tapered section 711 gradually decreases, forcing the fluid to accelerate. The throat is the area with the smallest cross-sectional area, where the flow velocity reaches its maximum value and the static pressure drops to its minimum. The cross-sectional area of ​​the diffusing section 712 gradually recovers, the flow velocity decreases, and the gas is fully mixed through the pressure difference, ensuring the uniformity of the gas phase reactants from the source. The initial uniformity of the gas phase reactants directly determines the subsequent diffusion effect. The design of tapered section 711-throat-diffusing section 712 can eliminate the problems of raw material stratification and concentration gradient. The straight section 713 stabilizes the flow field and guides the airflow to flow parallel to the surface of the glass substrate.

[0060] Additionally, refer to Figure 9The nozzle 71 has a flat nozzle 714 at the nozzle end. The length of the flat nozzle 714 matches the width of the glass, replacing the traditional circular nozzle. This allows the gaseous reactants to be sprayed onto the glass surface in a laminar flow, avoiding the formation of turbulence caused by using a circular nozzle, which would result in excessively high local concentrations.

[0061] Please refer to Figures 3-5 To facilitate uninterrupted waste discharge of the coating assembly 7 as it moves with the conveyor 5, second exhaust manifolds 34 are provided on both sides of the conveyor 5. One end of the second exhaust manifold 34 is provided with an exhaust pipe 32. The top of the coating channel 1 is fixed with a first exhaust manifold 31. The upper end of the exhaust pipe 32 extends to the outside of the coating channel 1 and is fixedly connected to the first exhaust manifold 31. A first connecting pipe 35 connects the exhaust nozzle 72 and the second exhaust manifold 34. The exhaust nozzle 72 can absorb unreacted gaseous reactants (such as silane, ammonia, and organometallic compounds) and reaction byproducts (such as hydrogen chloride, hydrogen, and methane). The first exhaust manifold 31 is provided with an integrated pipe, and an air pump is installed on the integrated pipe. The air pump enables the exhaust nozzle 72 to absorb waste gas, which enters the second exhaust manifold 34 through the first connecting pipe 35 and is then concentrated back to the first exhaust manifold 31 through the exhaust pipe 32.

[0062] Furthermore, referring to Figure 8 and Figure 11 To allow the intake volume of the exhaust nozzle 72 to be adjusted according to the coating state, the exhaust nozzle 72 is provided with an external exhaust plate 722 fixedly connected to the bracket 73. The external exhaust plate 722 has an internal exhaust plate 721 that can move longitudinally inside, and multiple external through slots 723 are provided on both sides of the external exhaust plate 722. The internal exhaust plate 721 has an internal through slot 724 that cooperates with the external through slots 723. The lower ends of the internal exhaust plate 721 and the external exhaust plate 722 are closed structures and do not serve as exhaust ports. The internal through slot 724 can be moved closer to or further away from the corresponding external through slot 723 by moving the internal exhaust plate 721 longitudinally, thereby changing the opening and closing size of the external through slot 723 and controlling the intake volume of the exhaust nozzle 72. The pair of external through slots 723 at the bottom of the external exhaust plate 722 are always in the open state.

[0063] It should be noted that the exhaust nozzle 72 performs exhaust work, causing the gaseous reactants to move to both sides of the closed flow channel 8 and diffuse to the area directly below the exhaust nozzle 72. Therefore, the glass substrate located directly below the exhaust nozzle 72 can also complete the coating process and generate a TCO thin film.

[0064] Specifically, refer to Figure 10To enable the internal exhaust plate 721 to move longitudinally so that the internal through groove 724 moves closer to or further away from the corresponding external through groove 723, slide rails 6 are provided at both ends of the coating assembly 7. The slide rails 6 include inclined rails 61, which gradually rise along the transmission direction of the conveyor 5. A straight rail 64 is provided above the inclined rails 61. The inclined rails 61 and the straight rail 64 are connected at both ends by a first arc rail 62 and a second arc rail 63 to form an integral structure. The first arc rail 62 and the second arc rail 63 are close to the outlet end and the inlet end of the coating channel 1, respectively. The first arc rail 62 is a minor arc with a gradually increasing diameter, and the second arc rail 63 is a minor arc with a fixed diameter. Slider blocks 7211 are fixed at the upper part of both ends of the internal exhaust plate 721. The sliders 7211 can slide on the slide rails 6. The setting of the inclined rails 61 and the first arc rail 62 with a gradually increasing diameter enables the internal exhaust plate 721 to move longitudinally and return to its original position.

[0065] In addition, to prevent exhaust gas from escaping from both ends of the coating channel 1, exhaust pipes 33 are provided at both the inlet and outlet ends of the coating channel 1. The upper end of the exhaust pipe 33 is fixedly connected to the exhaust pipe 32, and the end of the exhaust pipe 32 is fixedly connected to the first exhaust manifold 31.

[0066] Here, taking the nine-group coating assembly 7 as an example, three orientations (A), (B), and (C) are respectively set (e.g., Figure 10 ), and the three states of exhaust nozzle 72 (a), (b) and (c) (e.g. Figure 11 ), describing the changes in the working state of a single coating assembly 7:

[0067] When the single coating assembly 7 moves to Figure 10 At position (A), the exhaust nozzle 72 of the single coating assembly 7 located on its right engages with its L-shaped locking angle, so that the two adjacent coating assemblies 7 are stably connected, forming a closed flow channel 8 that only covers the glass substrate area. At this time, it is located at Figure 10 (A) The valve of the second connecting pipe 43 of the single-unit coating assembly 7 at position A is opened, and the gaseous reactants of the TCO film are transported to the closed flow channel 8 through the jet nozzle 71 to coat the glass substrate surface opposite it. At the same time, the valves of the first connecting pipe 35 of the exhaust nozzles 72 located on both sides of the closed flow channel 8 are opened. At this time, the outer exhaust plate 722 at the bottom of the pair of external channels 723 can perform exhaust work, such as Figure 11 In state (a), the gaseous reactants move to both sides of the closed flow channel 8 and uniformly cover the surface of the glass substrate in this section. The gaseous reactants are adsorbed on the surface of the glass substrate, and the chemical reaction is triggered by the high temperature of the substrate to generate TCO film and exhaust gas. At the same time, the exhaust nozzle 72 can also collect the exhaust gas desorbed from the glass surface to avoid contaminating the film or equipment.

[0068] In a single coating assembly 7, Figure 10 The (A) position is moved to Figure 10During the (B) position process, the coating component 7 moves synchronously with the glass substrate, meaning that the closed flow channel 8 always covers the corresponding glass substrate area, continuously coating it. This allows the vapor deposition process of the coating component 7 to dynamically match the continuously moving glass substrate, improving the uniformity of the chemical vapor deposition coating. Simultaneously, the slider 7211 slides on the inclined rail 61 and gradually rises along the transmission direction of the conveyor 5. As the coating process progresses, the inner exhaust plate 721 gradually moves upward, bringing the inner through groove 724 closer to the corresponding outer through groove 723. Figure 11 The purpose of state (b) is to change the opening and closing size of the external channel 723, increase the exhaust volume of the exhaust nozzle 72, and adapt to the gradual increase in the amount of waste gas during the coating process.

[0069] When the single coating assembly 7 moves to Figure 10 At position (B), this coating assembly 7 completes the coating work on the corresponding glass substrate area, and the valve of the second connecting pipe 43 of the corresponding jet nozzle 71 and the valve of the first connecting pipe 35 of the left exhaust nozzle 72 are closed (here, left and right refer to...). Figure 10 (Using the relative positions as a reference), at this time, the slider 7211 of the left exhaust nozzle 72 is at the junction of the inclined rail 61 and the first arc-shaped rail 62, the inner exhaust plate 721 is at its highest position, and the inner through groove 724 is fully connected to the corresponding outer through groove 723, such as Figure 11 In state (c), the exhaust volume of exhaust nozzle 72 reaches its maximum.

[0070] In a single coating assembly 7, Figure 10 The (B) position is moved to Figure 10 During the (C) position process, this group of coating components 7 rotates with the conveyor 5 and no longer participates in the coating work. The inner exhaust plate 721 on the left side of the single group of coating components 7 slides along the first arc-shaped rail 62. The diameter of the first arc-shaped rail 62 gradually increases, causing the inner exhaust plate 721 to gradually approach the outer exhaust plate 722, so that the exhaust nozzle 72 is from Figure 11 (c) state is restored to Figure 11 (a) state.

[0071] In a single coating assembly 7, Figure 10 The (C) position is moved to Figure 10 During the (A) position process, this group of coating components 7 does not participate in the coating work. The internal exhaust plate 721 on the right side of the single group of coating components 7 slides along the straight rail 64 and the second arc-shaped rail 63, always as Figure 11 (a) state.

[0072] When the single coating assembly 7 moves again Figure 10When it reaches position (A), it begins a new round of coating work. The coating operations of the other eight coating components 7 are the same as those of the single coating component 7 mentioned above, and will not be described in detail here. The nine coating components 7 operate in a reciprocating manner to coat all positions on the surface of the glass substrate.

[0073] Please refer to Figure 3 , Figure 4 and Figure 7 To facilitate the connection between the conveyor 5 and the coating assembly 7, the conveyor 5 is provided with a first conveyor belt 51 and a second conveyor belt 52 arranged in parallel. Both the first conveyor belt 51 and the second conveyor belt 52 are provided with coating assemblies 7. The length of a single coating assembly 7 matches the width of the glass substrate. The coating assemblies 7 on the first conveyor belt 51 and the second conveyor belt 52 are arranged to form a single coating assembly 7. The arrangement of the first conveyor belt 51 and the second conveyor belt 52 achieves balanced installation of the coating assembly 7 without affecting the fixed installation of the conveyor 5.

[0074] To facilitate the installation and fixation of the conveyor 5, an installation gap 53 is formed between the first conveyor belt 51 and the second conveyor belt 52. A support frame 54 is provided on the side of the first conveyor belt 51 and the second conveyor belt 52 that is far apart from each other and at the installation gap 53. The support frame 54 is connected to the rotating shaft of the conveyor 5 through a bearing. A motor is provided on the support frame 54 located on one side of the conveyor 5. The motor can drive the rotation of the rotating shaft of the conveyor 5 to support the operation of the conveyor 5. A mounting frame 55 is connected to the support frame 54 located at the installation gap 53. The upper part of the mounting frame 55 is installed on the top of the coating channel 1 to fix the conveyor 5.

[0075] It should be noted that the gap between the single coating components 7 caused by the installation gap 53 is small. The gaseous reactants are fluid and will continue to diffuse to the glass substrate surface located in the gap, coating it.

[0076] Furthermore, the second exhaust manifold 34 and the third intake manifold 42 are both fixed on the mounting bracket 55, and the exhaust gas needs to be treated by the exhaust gas treatment device before being discharged into the atmosphere.

[0077] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0078] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A method for processing TCO conductive glass, characterized in that, Includes the following steps: Step 1: Glass forming. The glass raw material is melted at high temperature in a melting furnace to form a uniform glass melt. The glass melt flows continuously into a tin bath. In the tin bath, the glass melt floats on the surface of the molten tin to form a glass strip. The glass strip is pulled by edge-pulling rollers to achieve the target size and form a glass substrate. Step 2: High-temperature coating. The glass substrate is moved from the tin bath outlet to the coating channel (1) via the material conveyor (2). The coating channel (1) has a split coating device. The split coating device moves synchronously with the glass substrate to coat the surface of the glass substrate with a transparent conductive oxide film and reduce the space for exhaust gas to escape. Step 3: Annealing and cooling. The coated glass ribbon is drawn into the annealing furnace for gradient annealing to eliminate internal stress. The coating device includes a conveyor (5) and multiple sets of coating components (7) evenly distributed in the conveying direction of the conveyor (5). The single coating assembly (7) includes: The nozzle (71) is a hollow plate structure. The thickness of the plate structure is in the conveying direction of the conveyor (5). The nozzle (71) has brackets (73) installed at both ends. The brackets (73) are provided with airflow baffles (74). Exhaust nozzle (72) is located on one side of jet nozzle (71), so that two adjacent exhaust nozzles (72) and airflow baffle (74) can form a closed flow channel (8). The closed flow channel (8) blocks the outward expansion of the reaction waste gas, so that the reaction waste gas is gradually discharged in the controlled closed flow channel (8). The exhaust nozzle (72) includes: An external exhaust plate (722) is fixed to a bracket (73). The external exhaust plate (722) has an internal exhaust plate (721) that can move longitudinally inside. The external exhaust plate (722) has multiple external through grooves (723) on both sides along its thickness direction. The internal exhaust plate (721) has an internal through groove (724) that cooperates with the external through groove (723). The internal exhaust plate (721) moves inside the external exhaust plate (722) to make the internal through groove (724) approach or move away from the corresponding external through groove (723) so as to change the opening and closing size of the external through groove (723) and control the exhaust volume of the exhaust nozzle (72). The coating channel (1) is fixedly provided with a slide rail (6), and the slide rail (6) is located at both ends of the coating assembly (7). The slide rail (6) includes an inclined rail (61). The inclined rail (61) is gradually raised along the transmission direction of the conveyor (5). A straight rail (64) is provided above the inclined rail (61). The two ends of the inclined rail (61) and the straight rail (64) are connected into an integral structure by a first arc rail (62) and a second arc rail (63) respectively. The first arc rail (62) and the second arc rail (63) are close to the outlet end and the inlet end of the coating channel (1) respectively. The first arc rail (62) is a minor arc with a gradually increasing diameter, and the second arc rail (63) is a minor arc with a fixed diameter. The upper part of both ends of the internal exhaust plate (721) is fixed with sliders (7211), and the sliders (7211) can slide on the slide rail (6); The bracket (73) forms an isosceles triangle structure, and the airflow baffle (74) is located on the isosceles side of the isosceles triangle and is inclined downward in the direction away from the nozzle (71).

2. The method for processing TCO conductive glass according to claim 1, characterized in that, The air inlet end of the jet nozzle (71) is provided with a tapering section (711), and the lower part of the tapering section (711) is provided with a expanding section (712), forming a throat between the two. The lower part of the expanding section (712) is provided with a straight section (713), and the jet nozzle (71) is provided with a flat nozzle (714).

3. The method for processing TCO conductive glass according to claim 2, characterized in that, The conveyor (5) is provided with a third air intake manifold (42) on both sides. One end of the third air intake manifold (42) is provided with an air intake pipe (41). The upper end of the air intake pipe (41) extends to the outside of the coating channel (1). The gaseous reactants are introduced into the third air intake manifold (42) through the air intake pipe (41). A second connecting pipe (43) is connected between the jet nozzle (71) and the third air intake manifold (42).

4. The TCO conductive glass processing method according to claim 3, characterized in that, The conveyor (5) is provided with a second exhaust manifold (34) on both sides. The second exhaust manifold (34) is provided with an exhaust pipe (32) at one end. The top of the coating channel (1) is fixed with a first exhaust manifold (31). The upper end of the exhaust pipe (32) extends to the outside of the coating channel (1) and is fixedly connected to the first exhaust manifold (31). A first connecting pipe (35) is connected between the exhaust nozzle (72) and the second exhaust manifold (34).

5. The TCO conductive glass processing method according to claim 4, characterized in that, The inlet and outlet ends of the coating channel (1) are provided with exhaust pipes (33). The upper end of the exhaust pipe (33) is fixedly connected to the exhaust pipe (32), and the end of the exhaust pipe (32) is fixedly connected to the first exhaust manifold (31).

6. The method for processing TCO conductive glass according to claim 5, characterized in that, The conveyor (5) includes: A first conveyor belt (51) and a second conveyor belt (52) are arranged side by side, and both the first conveyor belt (51) and the second conveyor belt (52) are equipped with coating components (7). An installation gap (53) is formed between the first conveyor belt (51) and the second conveyor belt (52). A support frame (54) is provided on the side of the first conveyor belt (51) and the second conveyor belt (52) that are far apart from each other and at the installation gap (53). The support frame (54) is connected to the rotating shaft of the conveyor (5) through a bearing. An installation frame (55) is connected to the support frame (54) located at the installation gap (53). The upper part of the installation frame (55) is installed on the top of the coating channel (1).

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