Dissociation cavity structure, design method and remote plasma source generator

Abstract

The invention belongs to the technical field of semiconductor manufacturing, and provides a dissociation cavity structure, a design method and a remote plasma source generator. The method comprises the following steps: determining target power P and plasma load impedance Zp required by a remote plasma source; estimating the effective length of the plasma based on the preset volume power density Pv; based on the target power P and the plasma load impedance Zp, discharge voltage Vp at the two ends of the short cavity is obtained; if the discharge voltage Vp exceeds a preset withstand voltage threshold Vs, the short cavity is segmented to form short cavity segments, and the number n of the short cavity segments is a satisfied minimum positive integer; and determining the length of the short cavity section according to the effective length of the plasma and the number of the short cavity sections. According to the dissociation cavity mechanism disclosed by the invention, the short cavity adopts a multi-section design, so that the output power of a remote plasma source can be improved, and in an application scene of large-flow gas, the withstand voltage at the two ends of the cavity can be reduced, and the service life of the remote plasma source can be prolonged.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, specifically to a dissociation cavity structure and design method, and a remote plasma source generator. Background Technology

[0002] Remote Plasma Sources (RPS), as a highly efficient and controllable plasma generation technology, have wide applications in semiconductor manufacturing, material surface treatment, thin film deposition, and contaminant degradation. However, in the LCD panel and photovoltaic fields, plasma sources typically require high-flow-rate gas to shorten cleaning time, thus necessitating higher-power plasma gas dissociation chambers.

[0003] Currently, common plasma sources, such as inductively coupled plasma (ICP) sources and capacitively coupled plasma (CCP) sources, typically employ a single resonant cavity structure. In this structure, energy is coupled to the working gas within the cavity through an antenna or electrodes, ionizing it to form plasma.

[0004] However, existing single-cavity structures have several inherent limitations. First, the generation and maintenance of plasma are often coupled within the same physical space, making the control of plasma parameters extremely difficult. The space for process optimization is limited, making it difficult to meet the refined and differentiated requirements for plasma characteristics in different application scenarios. Second, under high-power conditions, energy is concentrated and coupled in a single region, easily leading to excessively high local power density, causing problems such as overheating of cavity components, increased sputtering contamination, and plasma instability, affecting process repeatability and long-term equipment reliability. Furthermore, for some complex processes requiring step-by-step processing, single-cavity structures struggle to achieve spatial separation and functional transformation in the process flow, limiting the expansion of process capabilities.

[0005] To overcome these shortcomings, the industry has explored various approaches, such as setting multiple feed points within a single cavity or employing complex magnetic field configuration control. However, these methods often complicate the internal structure of the cavity and the external control system, and fail to fundamentally solve the problems of physical process coupling and power load concentration, resulting in limited improvement and low cost-effectiveness. Summary of the Invention

[0006] To address the shortcomings of existing technologies, this invention provides a dissociation cavity structure and design method, as well as a remote plasma source generator, to solve the problem that current remote plasma sources typically adopt a single-cavity design, i.e., gas ionization, excitation, and generation of active groups are completed in a continuous cavity, resulting in high pressure resistance at both ends of the short cavity and seriously affecting the service life of the cavity membrane.

[0007] In a first aspect, the present invention provides a design method for a dissociation cavity structure of a remote plasma source generator, comprising: Determine the target power required for a remote plasma source P and plasma load impedance Z p ; Based on a preset volumetric power density P v Estimate the effective length of the plasma l ; , S The effective area of ​​the plasma is the cross-sectional area of ​​the gas cavity within the short cavity. Based on target power P and plasma load impedance Z p Obtain the discharge voltage across the short cavity. V p , If the discharge voltage V p Exceeding the preset withstand voltage threshold V s When the short cavity is segmented to form interconnected short cavity segments, the number of short cavity segments n is such that n satisfies the following condition. The smallest positive integer; Based on the effective length of the plasma l The length of each short cavity segment is determined by the number of short cavity segments, n; all short cavity segments have the same length.

[0008] As can be seen from the above technical solution, the dissociation cavity mechanism of the present invention, wherein the short cavity adopts a multi-segment design, can reduce the pressure resistance at both ends of the cavity and improve the service life of the remote plasma source.

[0009] Optionally, the plasma load impedance Z p The values ​​of voltage and current are measured by an oscilloscope, or calculated using a series circuit model equivalent to a nonlinear resistor and inductor. The plasma load impedance is calculated using a series circuit model equivalent to a nonlinear resistor and inductor, and is then given by... , Angular frequency, , , The frequency of electron oscillation. e For elementary charge, For electron density, The vacuum permittivity, For electron mass, plasma conductivity , q The amount of electron charge. For electron density, For electron velocity.

[0010] Optionally, the ignition discharge terminal is configured according to the number of short cavity segments, including: When the number of short cavity segments n=2, all of the short cavity segments are connected to high-voltage ignition wires; When the number of short cavity segments n>2, the short cavity segments at both ends are connected to the high-voltage ignition wire, the short cavity segments between the two ends are grounded or connected to the high-voltage ignition wire, and adjacent short cavity segments are not connected to the high-voltage ignition wire at the same time.

[0011] As can be seen from the above technical solution, the ignition discharge end of the present invention is set according to the number of short cavity segments. The increase of the ignition discharge end can significantly improve the ignition success rate and shorten the ignition delay; it can excite plasma at multiple points, and the larger discharge area can reduce the "edge effect" and make the plasma distribution in the generation cavity more uniform.

[0012] Secondly, the present invention provides a remote plasma source generator dissociation cavity structure, obtained based on the design method of any possible implementation of the first aspect, including: Air intake; The long cavity at the air inlet end is connected to the air inlet, and the long cavity at the air inlet end is grounded; Two short cavities are respectively connected to the long cavity at the air intake end; each short cavity includes several short cavity segments, which are interconnected by ceramic rings; The long cavity at the air outlet is connected to the two short cavities, and the long cavity at the air outlet is grounded; the long cavity at the air inlet, the two short cavities, and the long cavity at the air outlet are combined to form a connected air cavity; The air outlet is connected to the long cavity at the air outlet end.

[0013] Thirdly, the present invention provides a remote plasma source generator, comprising a dissociation cavity structure of any possible implementation of the second aspect, and further comprising a heat dissipation device, the heat dissipation device comprising: A first cooling water tray is disposed on both sides of the long cavity at the air inlet end, and the first cooling water tray includes a first water channel; Several second cooling water trays are disposed on both sides of the short cavity. The second cooling water trays are connected to each other. The second cooling water tray at one end is connected to the first cooling water tray. The number of the second cooling water trays and the number of the short cavity segments are arranged in a one-to-one correspondence. The second cooling water tray includes a second water channel. The third heat dissipation water tray is disposed on both sides of the long cavity at the air outlet end. The third heat dissipation water tray is connected to the second heat dissipation water tray located at the other end. The third heat dissipation water tray includes a third water channel. The first waterway is connected to an outlet, and the third waterway is connected to an inlet. The first waterway and the second waterway, the second waterway and the third waterway, and the second waterway are connected by waterway seals.

[0014] As can be seen from the above technical solution, the remote plasma source generator provided by the present invention has multiple short cavity sections connected by ceramic rings, which serve as dielectric materials for insulation and barrier. The second heat dissipation water tray is configured in conjunction with the number of short cavity sections to dissipate heat. The process gas passes through the dissociation cavity structure from top to bottom, and the temperature at the outlet is the highest during the ionization process. The cooling water dissipates heat from bottom to top, thereby expanding the heat exchange area and improving the heat exchange efficiency.

[0015] Optionally, the waterway seals connected to any of the second waterways are arranged diagonally, and the second cooling water trays on the two short cavities are arranged symmetrically.

[0016] Optionally, flow-blocking copper plates are provided in the first, second, and third water channels. These copper plates can reduce local water flow velocity, increase the heat exchange area, and improve heat dissipation efficiency.

[0017] Optionally, it also includes a magnetic core assembly, the magnetic core assembly comprising: Two base plates; Several magnets are disposed between the base plates; A spacer is disposed between the magnets; A heat-conducting sheet is disposed between the magnet and the intermediate spacer and between the magnet and the base plate; A fastening bolt is inserted between the base plate and the intermediate spacer.

[0018] Optionally, the base plate and the intermediate partition are bent to form a first connecting segment and a second connecting segment, and both the first connecting segment and the second connecting segment are screwed to the heat dissipation device.

[0019] By adopting the above technical solution, this application has the following beneficial effects: The design method and dissociation cavity structure provided by this invention allow the short cavity to withstand a preset pressure threshold. V s The multi-segment design of the short cavity can improve the output power of the remote plasma source. In the application of high flow gas, it can reduce the pressure resistance at both ends of the cavity and extend the service life of the remote plasma source. The remote plasma source generator provided by this invention connects the short cavity segments through ceramic rings, which serve as dielectric materials for insulation. Therefore, multiple second heat dissipation water trays are configured to cooperate with the short cavity segments for heat dissipation. The process gas passes through the dissociation cavity structure from top to bottom, and the temperature at the outlet is the highest during the ionization process. Cooling water dissipates heat from bottom to top, thereby expanding the heat exchange area and improving the heat exchange efficiency. Attached Figure Description

[0020] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0021] Figure 1 A flowchart illustrating a design method for a dissociation cavity structure of a remote plasma source generator according to an embodiment of the present invention is shown. Figure 2 The diagram shows a wiring diagram of an ionization cavity provided in an embodiment of the present invention; (a) shows two short cavity segments, (b) shows three short cavity segments, (c) shows four short cavity segments, and (d) shows five short cavity segments. Figure 3 One of the schematic diagrams of the dissociation cavity structure provided in the embodiment of the present invention is shown; Figure 4 This shows one of the exploded schematic diagrams of the dissociation cavity structure provided in the embodiment of the present invention; Figure 5 One of the cross-sectional views of the dissociation cavity structure provided in an embodiment of the present invention is shown; Figure 6 A second schematic diagram of the dissociation cavity structure provided in an embodiment of the present invention is shown; Figure 7 A second cross-sectional view of the dissociation cavity structure provided in an embodiment of the present invention is shown; Figure 8 One of the schematic diagrams of the heat dissipation device provided in the embodiment of the present invention is shown; Figure 9 A second schematic diagram of the heat dissipation device provided in an embodiment of the present invention is shown; Figure 10 A schematic diagram of a remote plasma source generator provided in an embodiment of the present invention is shown; Figure 11 A schematic diagram of a magnetic core assembly provided in an embodiment of the present invention is shown; Figure 12 An exploded view of the magnetic core assembly provided in an embodiment of the present invention is shown.

[0022] Figure label: 100 - Dissociation chamber; 101 - Air inlet; 102 - Air inlet seat; 103 - Air inlet distributor plate; 104 - Long air inlet chamber; 105 - Short chamber; 1051 - Short chamber section; 106 - Long air outlet chamber; 107 - Air outlet; 108 - Ceramic ring; 200 - Heat dissipation device; 201 - Water inlet; 202 - Water outlet; 203 - First heat dissipation basin; 204 - Second heat dissipation basin; 205 - Third heat dissipation basin; 206 - First water channel; 207 - Second water channel; 208 - Third water channel; 209 - Water channel seal; 210 - Flow-blocking copper sheet; 300 - Magnetic core assembly; 301 - Base plate; 3011 - First connecting section; 302 - Magnet; 303 - Intermediate spacer; 3031 - Second connecting section; 304 - Heat-conducting plate; 305 - Fastening bolt; 306 - Gasket; 307 - Nut. Detailed Implementation

[0023] The embodiments of the technical solution of the present invention will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of the present invention and are therefore merely examples, and should not be construed as limiting the scope of protection of the present invention. It should be noted that, unless otherwise stated, the technical or scientific terms used in this application should have the ordinary meaning as understood by one of ordinary skill in the art to which this invention pertains.

[0024] Example 1 like Figure 1 As shown, a design method for a dissociation cavity structure of a remote plasma source generator is provided, including: S1. Determine the target power required for the remote plasma source. P and plasma load impedance Z p .

[0025] S2. Based on a preset volumetric power density P v Estimate the effective length of the plasma l ; , S The effective area of ​​the plasma is the cross-sectional area of ​​the gas cavity within the short cavity.

[0026] Treating plasma as an energy absorber requires an empirically validated volumetric power density. P v Typically 1~5W / cm 3 This value depends on the type of gas, pressure, and gas flow rate range.

[0027] In plasmas with inductively coupled discharge, charged particles accelerate under the influence of the induced electric field and absorb energy from it, causing the induced electric field to attenuate. However, in high-density plasmas, the characteristic dimension through which the radio frequency induced electric field penetrates is much smaller than the plasma's geometric dimensions. In other words, the intensity of the radio frequency induced electric field gradually decreases from the plasma's edge towards the interior; this phenomenon is known as the skin effect.

[0028] In low-pressure plasma, the skin depth It can be determined by the following formula: , , in c The speed of light in a vacuum Where e is the electron oscillation frequency, and e is the elementary charge. For electron density, The vacuum permittivity, For electronic quality.

[0029] Consistent with the skin effect in circuits, the current in plasma flows only within the skin layer, allowing for the calculation of the effective area S. The size of the effective area varies under different currents and requires real-time calculation. The effective length l is determined by the cavity structure. The conductivity of the plasma is calculated using the following formula: , Remote plasma sources typically require high power output to meet the needs of cleaning, etching, and thin film deposition. If the cavity length remains unchanged, the gas flow rate needs to be increased to meet the power increase. However, excessively high gas flow rate leads to insufficient dissociation and a decrease in the plasma source dissociation rate.

[0030] Therefore, to meet the high-power output requirements of the plasma source, the cavity length needs to be increased. However, the longer the cavity, the higher the required breakdown voltage and sustaining voltage, and the insulation materials of the power supply and electrode / cavity wall must be able to withstand this higher voltage. A longer short cavity means a higher load impedance, according to... In order to input the same power at a higher impedance, or simply to ignite and sustain the plasma, the required discharge voltage... It will increase significantly. In order to maintain the power P, if the impedance Z is too high (because the length L is too long), the required discharge voltage will be very high.

[0031] S3. Based on target power P and plasma load impedance Z p Obtain the discharge voltage across the short cavity. V p , If the discharge voltage V p Exceeding the preset withstand voltage threshold V s When the short cavity is segmented to form interconnected short cavity segments, the number of short cavity segments n is such that n satisfies the following condition. The smallest positive integer.

[0032] According to Paschen's Law, there exists a breakdown voltage for a given p × L (pressure × length). If the withstand voltage across the short cavity is too high, it will affect the service life of the cavity membrane. Therefore, the short cavity needs to be segmented. When the cavity length is too large, the voltage across the short cavity exceeds the withstand voltage threshold. V s In this case, the short cavity is divided into multiple segments to reduce the voltage across the short cavity and to increase the plasma ignition discharge terminal.

[0033] The target power P is determined based on actual design requirements; the withstand voltage threshold... V s This is an empirical value, typically 5~6kV, which is less than the breakdown voltage.

[0034] S4. Based on the effective length of the plasma l The length of each short cavity segment is determined by the number of short cavity segments, n; all short cavity segments have equal lengths. l The effective length of the plasma includes the length of the long cavity at the inlet and outlet ends and the length of the short cavity. The long cavity at the inlet and outlet ends is in close contact with the short cavity, and the gap in between is negligible.

[0035] Traditional remote plasma sources typically employ a single-cavity design, where gas ionization, excitation, and active group generation occur within a single, continuous cavity. This results in high withstand pressures at both ends of the short cavity, severely impacting the lifespan of the cavity membrane. According to the design method provided in this embodiment, the short cavity operates within a preset withstand pressure threshold. V s The multi-segment design of the short cavity can reduce the pressure resistance at both ends of the cavity and improve the service life of the remote plasma source.

[0036] In step S3, the plasma load impedance Z p The voltage and current values ​​are obtained by measuring them with an oscilloscope, or by calculating them using a series circuit model that is equivalent to a nonlinear resistor and inductor.

[0037] The voltage and current values ​​are measured using an oscilloscope. The oscilloscope measures the primary voltage and primary current of the converter, and the load impedance is obtained by dividing the values.

[0038] The plasma load impedance is calculated using an equivalent series circuit model of a nonlinear resistor and inductor, and is then... , Angular frequency, , , The frequency of electron oscillation. e For elementary charge, For electron density, The vacuum permittivity, For electron mass, plasma conductivity , q The amount of electron charge. For electron density, For electron velocity.

[0039] Optionally, the ignition discharge terminal is configured according to the number of short cavity segments, including: When the number of short cavity segments n=2, all short cavity segments are connected to high-voltage ignition wires; When the number of short cavity segments n>2, the short cavity segments at both ends are connected to the high-voltage ignition wire, the short cavity segments between the two ends are grounded or connected to the high-voltage ignition wire, and adjacent short cavity segments are not connected to the high-voltage ignition wire at the same time.

[0040] Based on this, in this embodiment, the ignition discharge terminal is set according to the number of short cavity segments. Increasing the number of ignition discharge terminals can significantly improve the ignition success rate and shorten the ignition delay; it can excite plasma at multiple points, and the larger discharge area can reduce the "edge effect," making the plasma distribution in the generation cavity more uniform. As shown in Table 1, as the number of short cavity segments increases, the cavity withstand voltage value decreases significantly, and the ignition discharge terminal also shows an upward trend, which is beneficial to the discharge breakdown of plasma.

[0041] Table 1

[0042] Figure 2 Part (a) corresponds to Figure 3-5 The dissociation cavity structure shown; Figure 2 Part (b) corresponds to Figure 6-7 The dissociation cavity structure shown is embedded in the heat dissipation device. A ceramic ring is installed between the gaps formed between two adjacent short cavities 105 as a dielectric material for insulation.

[0043] For ease of explanation, the multiple short cavity segments will be referred to as the first short cavity segment, the second short cavity segment, and so on, in order from top to bottom. "First" and "second" are not intended to limit the number.

[0044] like Figure 2 As shown in part (a), the first and second short cavity sections are connected to the high-voltage ignition wire, and the long cavity at the inlet and outlet ends is grounded simultaneously, forming a situation where the two first and second short cavity sections simultaneously discharge to the long cavity at the inlet and outlet ends, resulting in four ignition discharge terminals; as Figure 2 As shown in (b), the first and third short cavity sections are connected to the high-voltage ignition wire, and the second short cavity section and the long cavity at the inlet and outlet are grounded at the same time to form a DBD ignition discharge structure. The two first and third short cavity sections discharge to the two second short cavity sections and the long cavity at the inlet and outlet respectively, forming 8 ignition discharge terminals.

[0045] By analogy, Figure 2 The four-segment short cavity dissociation cavity structure shown in section (c) can form eight ignition discharge terminals, while Figure 2 The five-segment short cavity dissociation cavity structure shown in section (d) can form 12 ignition discharge terminals. The increase in ignition discharge terminals can significantly reduce the ignition voltage of the remote plasma source, improve the ignition success rate, and shorten the ignition delay. The multi-segment short cavity design can excite plasma at multiple points, and the larger discharge area can reduce the "edge effect," making the plasma distribution within the generation cavity more uniform.

[0046] Example 2 like Figure 3-7 As shown, a dissociation cavity structure for a remote plasma source generator is provided, obtained based on the design method provided in Embodiment 1, including: Air intake 101; The long cavity 104 at the air inlet is connected to the air inlet 101, and the long cavity 104 at the air inlet is grounded; Two short cavities 105 are respectively connected to the long cavity 104 at the air intake end; the short cavity 105 includes several short cavity segments 1051, and the short cavity segments 1051 are connected to each other by ceramic rings 108. The long cavity 106 at the air outlet is connected to two short cavities 105, and the long cavity 106 at the air outlet is grounded; the long cavity 104 at the air inlet, the two short cavities 105 and the long cavity 106 at the air outlet are combined to form a connected air cavity; The air outlet 107 is connected to the long cavity 106 at the air outlet end.

[0047] like Figure 3-7 As shown, an air inlet seat 102 and an air inlet distributor plate 103 are screwed below the air inlet 101. The upper end of the long air inlet cavity 104 and the lower end of the air inlet distributor plate 103 are bolted together. The upper ends of the two short cavities 105 are connected to the long air inlet cavity 104 through a ceramic ring 108 and a sealing ring, respectively. The lower ends of the two short cavities 105 are connected to the lower ends of the two short cavities 105 through a ceramic ring 108 and a sealing ring, respectively. The upper end of the air outlet 107 is bolted together with the long air outlet cavity 106. The air inlet 101, air inlet seat 102, long air inlet cavity 104, short cavities 105, long air outlet cavity 106, and air outlet 107 are combined to form a complete cavity, and an air chamber is opened inside the complete cavity.

[0048] The remote plasma source generator dissociation cavity structure provided in this application embodiment adopts the same inventive concept as the above-described design method and can achieve the same beneficial effects, so it will not be described again here.

[0049] Example 3 like Figure 8-10 As shown, the present invention provides a remote plasma source generator, including the dissociation cavity structure of Embodiment 2, and further including a heat dissipation device 200, the heat dissipation device 200 including: The first cooling water tray 203 is disposed on both sides of the long cavity 104 at the air inlet end, and the first cooling water tray 203 includes a first water channel 206. Several second cooling water trays 204 are disposed on both sides of the short cavity 105. The second cooling water trays 204 are connected to each other. The second cooling water tray 204 located at one end is connected to the first cooling water tray 203. The number of second cooling water trays 204 and the number of short cavity segments 1051 are set one-to-one. The second cooling water tray 204 includes a second water channel 207. The third cooling water tray 205 is disposed on both sides of the long cavity 106 at the air outlet end. The third cooling water tray 205 is connected to the second cooling water tray 204 located at the other end. The third cooling water tray 205 includes a third water channel 208. The first waterway 206 is connected to the outlet 202, and the third waterway 208 is connected to the inlet 201. The first waterway 206 and the second waterway 207, the second waterway 207 and the third waterway 208, and the second waterway 207 are connected by waterway seals 209.

[0050] Since the short cavity segments 1051 are connected by ceramic rings 108, and the ceramic rings 108 serve as dielectric materials for insulation, multiple second heat dissipation water trays 204 are set in conjunction with the number of short cavity segments 1051 to dissipate heat. The process gas passes through the dissociation cavity structure 100 from top to bottom, and the temperature at the outlet 107 is the highest during the ionization process. The cooling water dissipates heat from bottom to top, thereby expanding the heat exchange area and improving the heat exchange efficiency.

[0051] Specifically, such as Figure 8 , 9 As shown, where Figure 8 The diagram illustrates the heat dissipation corresponding to a dissociated cavity with two short cavity segments. Figure 9 This diagram illustrates the heat dissipation corresponding to a dissociation cavity with three short cavities, respectively. Figure 2 , Figure 5 The diagram shows two or three short cavities.

[0052] like Figure 8-9As shown, the water channel seals 209 connected to any of the second water channels 207 are arranged diagonally, and the second heat dissipation water trays 204 on the two short cavities 105 are symmetrically arranged. A flow-blocking copper plate 210 is provided in the first water channel 206, the second water channel 207, and the third water channel 208. The flow-blocking copper plate 210 can reduce the local water flow velocity, expand the heat exchange area, and improve heat dissipation efficiency.

[0053] Plasma ionization of gas generates continuous high temperatures, requiring real-time heat dissipation. However, existing cooling devices are mostly external cooling modules, which have low heat dissipation efficiency. The cavity and magnetic core components are prone to overheating, severely reducing the service life of the cavity and seals, and also reducing production efficiency.

[0054] Based on this, such as Figure 11-12 As shown, the remote plasma source generator provided in this embodiment also includes a magnetic core assembly 300. The magnetic core assembly 300 includes two base plates 301, a plurality of magnets 302, intermediate spacers 303, and heat-conducting plates 304. The plurality of magnets 302 are disposed between the two base plates 301; the intermediate spacers 303 are disposed between the magnets 302; the heat-conducting plates 304 are disposed between the magnets 302 and the intermediate spacers 303, and between the magnets 302 and the base plates 301; it also includes a fastening bolt 305, which passes through the base plates 301 and the intermediate spacers 303. The fastening bolt 305 enters from one side of one of the base plates 301, passes through the plurality of intermediate spacers 303, and then exits from the other side of the other base plate 301, and is fixed by a nut 307. A washer 306 is also provided to prevent deformation.

[0055] The magnetic core assembly 300 adopts a multi-layer magnet 302 arrangement structure, and screws the upper and lower base plates 301 and the middle partition 303 to the external heat dissipation water pan, which can expand the heat exchange area and improve the heat dissipation efficiency.

[0056] See Figure 12 The base plate 301 and the intermediate partition 303 are bent to form a first connecting section 3011 and a second connecting section 3031, respectively. Both the first connecting section 3011 and the second connecting section 3031 are screwed to the heat dissipation device 200. The connection between the first connecting section 3011 and the second connecting section 3031 and the heat dissipation device 200 can help transfer heat and improve heat dissipation efficiency.

[0057] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A method of designing a remote plasma source generator dissociation chamber structure, comprising: The ignition discharge end is arranged according to the number of short cavity sections, comprising: Determining target power required for a remote plasma source P and plasma load impedance Z p ; based on a predetermined volume power density P v , estimating the plasma effective length l ; , S is the plasma effective area, i.e. the cross-sectional area of the gas cavity within the short cavity Based on target power P And plasma load impedance Z p , the discharge voltage at both ends of the short cavity is obtained V p , If the discharge voltage V p exceeds the preset voltage threshold V s , the short cavity is segmented to form interconnected short cavity segments, and the number n of short cavity segments is the smallest positive integer satisfying ​ According to the effective length of the plasma l and the number n of short cavity sections, the length of the short cavity sections is determined; the lengths of the short cavity sections are equal.

2. The method of claim 1, wherein, The plasma load impedance Z p The voltage and current values are measured by an oscilloscope, or are calculated by using an equivalent series circuit model of a nonlinear resistor and inductor. Wherein, by equivalent for nonlinear resistance and inductance of series circuit model, plasma load impedance is , ω is angular frequency, , , ωe is electron oscillation frequency, e q is elementary charge, ne is electron density, ε0 is vacuum permittivity, me is electron mass, plasma conductivity , q e is electron charge amount, ne is electron density, ve is electron velocity.

3. The method of claim 1, wherein, When the number of short cavity sections n = 2, the short cavity sections are connected to high-voltage ignition lines; When the number of short cavity sections n > 2, the short cavity sections at both ends are connected to high-voltage ignition lines, the short cavity sections between the two ends are grounded or connected to high-voltage ignition lines, and adjacent short cavity sections are not simultaneously connected to high-voltage ignition lines. The design method is obtained based on any one of claims 1-3, comprising:

4. A remote plasma source generator dissociation chamber structure, characterized by, An air inlet; An air inlet end long cavity connected to the air inlet, the air inlet end long cavity being grounded; Two short cavities respectively connected to the air inlet end long cavity; the short cavities comprise a plurality of short cavity sections, and the short cavity sections are connected to each other through ceramic rings; An air outlet end long cavity connected to the two short cavities, the air outlet end long cavity being grounded; the air inlet end long cavity, the two short cavities, and the air outlet end long cavity combine to form a continuous air cavity; An air outlet connected to the air outlet end long cavity. The dissociation cavity structure of claim 4 further comprises a heat dissipation device, the heat dissipation device comprising:

5. A remote plasma source generator, characterized by, First heat dissipation water pans arranged on both sides of the air inlet end long cavity, the first heat dissipation water pans comprising first water channels; A plurality of second heat dissipation water pans arranged on both sides of the short cavities, the second heat dissipation water pans being connected to each other, the second heat dissipation water pans at one end being connected to the first heat dissipation water pans, the second heat dissipation water pans and the number of short cavity sections being arranged one-to-one, and the second heat dissipation water pans comprising second water channels; Third heat dissipation water pans arranged on both sides of the air outlet end long cavity, the third heat dissipation water pans being connected to the second heat dissipation water pans at the other end, and the third heat dissipation water pans comprising third water channels; The first water channels are connected to water outlets, the third water channels are connected to water inlets, and the first water channels and the second water channels, the second water channels and the third water channels, and the second water channels are connected through water channel sealing elements. The water channel sealing elements connected to any one of the second water channels are arranged diagonally, and the second heat dissipation water pans on the two short cavities are arranged symmetrically.

6. The remote plasma source generator of claim 5, wherein, Flow resistance copper sheets are arranged in the first water channels, the second water channels, and the third water channels.

7. The remote plasma source generator of claim 5, wherein, Further comprising a magnetic core assembly, the magnetic core assembly comprising:

8. The remote plasma source generator of claim 5, wherein, Two bottom plates; A plurality of magnets arranged between the bottom plates; An intermediate spacer arranged between the magnets; Thermal conduction sheets arranged between the magnets and the intermediate spacer and between the magnets and the bottom plates; Fastening bolts passing through the bottom plates and the intermediate spacer. The bottom plates and the intermediate spacer are respectively bent to form first connecting sections and second connecting sections, and the first connecting sections and the second connecting sections are screwed to the heat dissipation device.

9. The remote plasma source generator of claim 8, wherein, ​

Images