Particle source characterization device

Abstract

The invention discloses a particle source characterization device which is characterized in that a particle energy detection device and a particle source are arranged in a vacuum and low-magnetism working cavity, and the particle energy detection device and the particle source are oppositely arranged; a micropore is movably mounted in the working cavity, only the micropore is moved to the focus of the particle energy detection device, and the particle energy detection device is started to perform energy distribution detection of the particle source; a movable Faraday cup is arranged in the working cavity, the flange cup is connected with a beam detection meter, and the movable Faraday cup is moved to a flight path where a particle beam is located to carry out beam measurement; the knife edge can be moved in the working cavity, the movable Faraday cup is moved to the flight path where the particle beam is located, and in the process that the knife edge moves along with the position moving device, the particle beam is not shielded, partially shielded and completely shielded, and the size of a beam spot and the size of a divergence angle are measured. The device can measure multiple parameters of the particle source at the same time, and the integration degree is higher.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of particle source characterization, in particular to a particle source characterization device. BACKGROUND

[0002] A particle source is a device that emits a particle beam, which can be classified into electron guns, ion guns, etc. The core characteristics of the particle beam include parameters such as energy distribution, beam spot size, beam current, and divergence angle. The existing method for determining the above parameters of the particle beam is as follows: The measurement method of the energy distribution of the electron gun: a hemispherical electron energy analyzer is installed opposite the electron gun to directly measure the energy distribution of the beam emitted by the electron gun.

[0003] The measurement method of the beam current: the electron beam or ion beam directly hits a Faraday cup, a photodetector, a particle detector, etc. for direct measurement.

[0004] The measurement method of the beam spot size: a combination of a fluorescent screen and a camera is used to measure the beam spot size by image; or a movable knife edge and a beam current detector are used to measure the beam spot size by the knife edge.

[0005] The measurement method of the divergence angle: the beam spot size at different positions in the direction of the ion beam current is measured to calculate the divergence angle.

[0006] However, the existing device can only detect one or more of the energy distribution, beam spot size, beam current, and divergence angle at the same time, and there is no device that can detect all the parameters at the same time. SUMMARY

[0007] In order to solve the problems existing in the prior art, the present application provides a particle source characterization device, which can simultaneously measure the energy distribution, beam spot size, beam current, and divergence angle of the particle source, i.e. all the above parameters can be measured in one experiment.

[0008] The technical solution adopted by the present application is as follows: A particle source characterization device, comprising: 1 vacuum, low magnetic working cavity; The particle energy detection device is arranged opposite to the particle source to be detected and receives the particle beam emitted by the particle source. The micro-hole is movably installed in the working cavity by the position moving device, and only the micro-hole is moved to the focal point of the particle energy detection device, and the particle energy detection device is started to detect the energy distribution of the particle source. The Faraday cup is moved in the working cavity by a position moving device, the Faraday cup is connected with the beam current detection table through a wire, the moving Faraday cup is moved to the flight path of the particle beam, and the beam current is measured; The knife edge is moved in the working cavity by a position moving device, the moving Faraday cup is moved to the flight path of the particle beam, and the knife edge is not shielded, partially shielded and completely shielded during movement of the position moving device, so that the beam spot size and the divergence angle size are measured.

[0009] Further, the working cavity is composed of a vacuum cavity and a magnetic shielding layer, the magnetic shielding layer is located in the vacuum cavity, and the working cavity is inside the magnetic shielding layer.

[0010] Further, the vacuum cavity is provided with a vacuum pump to provide a vacuum environment.

[0011] Further, the position moving device can at least move vertically to the flight direction of the particle beam.

[0012] Further, the beam current detection table has a beam current detection function of increasing bias.

[0013] Further, the third position moving device needs to be insulated.

[0014] Further, the particle energy detection device can be selected from a hemispherical electron energy analyzer, a time-of-flight analyzer or a reflective particle energy analyzer.

[0015] The beneficial effects of the present application are: The particle energy detection device, the micro-hole, the knife edge, the Faraday cup and the beam current detection table are integrated in the present application, especially the micro-hole, the knife edge and the Faraday cup are provided with a moving mechanism, when the energy distribution of the particle source, the beam spot size, the beam current size and the divergence angle are detected, the micro-hole, the knife edge and the Faraday cup are moved to the specified position by the moving mechanism, and the corresponding measurement work can be carried out. Therefore, the present device can simultaneously measure the energy distribution of the particle source, the beam spot size, the beam current size and the divergence angle, realizes the integration of detection, and does not need multiple detection devices.

[0016] Figure 1 It is a structure schematic diagram of a particle source characterization device.

[0017] Figure 2 It is a schematic diagram of the present device for measuring the energy distribution of a particle beam.

[0018] Figure 3 It is a schematic diagram of the present device for measuring the beam current.

[0019] Figure 4 It is a schematic diagram of the present device for measuring the beam spot size.

[0020] In the figure, 1, vacuum cavity, 2, magnetic shielding layer, 3, vacuum pump, 4, particle energy detection device, 5, particle source, 6, particle beam, 7, micropore, 8, first position moving device, 9, knife edge, 10, second position moving device, 11, Faraday cup, 12, third position moving device, 13, wire, 14, beam current detection table. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application is further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the present application and do not limit the present application.

[0022] In combination Figure 1 , the present application proposes a particle source characterization device, which can simultaneously measure multiple parameters such as energy distribution, beam spot size, beam current size, and divergence angle of the particle source; the device comprises: The vacuum cavity 1 provides the necessary vacuum environment for particle source measurement; the vacuum cavity 1 can be made of SUS304 stainless steel, and a CF knife edge flange is configured at the connection.

[0023] The magnetic shielding layer 2 is located in the vacuum cavity 1, and the inside of the magnetic shielding layer 2 is a working cavity, which provides the necessary low magnetic field environment for particle source measurement; the magnetic shielding layer 2 can be made of μ metal.

[0024] The vacuum pump 3 is connected with the vacuum cavity 1 to provide the necessary vacuum pumping and vacuum maintenance for the vacuum cavity 1, and can use molecular pumps, mechanical pumps, etc.

[0025] The particle energy detection device 4 passes through the vacuum cavity 1 and the magnetic shielding layer 2 into the working cavity, and can measure the distribution of particles entering its inside in the energy direction.

[0026] The particle source 5 to be detected passes through the vacuum cavity 1 and the magnetic shielding layer 2 into the working cavity, and the particle source 5 to be detected is arranged towards the particle energy detection device 4, and the particle source 5 to be detected emits a particle beam 6 with a certain energy, intensity, etc. towards the particle energy detection device 4, which can be classified into particles such as electrons and ions according to types.

[0027] The micropore 7, the knife edge 9, and the Faraday cup 11 are also provided in the working cavity; wherein the micropore 7 is installed on the first position moving device 8, and the micropore 7 can be moved along the direction perpendicular to the particle beam flight direction by the first position moving device 8. The knife edge 9 is installed on the second position moving device 10, and the knife edge 9 can be moved along the direction perpendicular to the particle beam flight direction by the second position moving device 10 to realize the control of the particle beam in the states of no shielding, partial shielding, and complete shielding.

[0028] The Faraday cup 11 is a standard particle beam intensity measuring device, which can accurately measure the size of the particle beam. In this application, the Faraday cup 11 is installed on the third position moving device 12, which drives the Faraday cup 11 to move along the direction perpendicular to the flight direction of the particle beam, realizing the control of the unshielded and fully shielded states of the particle beam. The Faraday cup 11 is connected to the beam current detector 14 through the wire 13, and the beam current of the particle beam injected into the Faraday cup 11 is measured by the beam current detector 14.

[0029] In this embodiment, the beam current detector 14 has the function of increasing the bias voltage.

[0030] In this embodiment, the third position moving device 12 needs to be insulated.

[0031] In this embodiment, the micro-hole 7 can be moved to the detection focal point of the particle energy detection device 4. The size and shape of the micro-hole 7 can be selected according to the characteristics of the particle source 5. The micro-hole 7 is usually made of a non-magnetic metal sheet, such as a 0.1mm thick beryllium copper sheet, with a 0.1mm diameter aperture. The micro-hole 7 mainly realizes the isolation of the control field of the particle source and the control field of the particle energy detection device 4.

[0032] In this embodiment, the particle energy detection device 4 can be selected from a hemispherical electron energy analyzer, a time-of-flight analyzer, a reflection-type particle energy analyzer or other types of energy analyzers.

[0033] In this embodiment, the combination of the knife edge 9 and the Faraday cup 11 is replaced by a combination of a fluorescent screen and a camera for spot measurement.

[0034] In this embodiment, when detecting the beam spot size and the divergence angle size, the knife edge 9 is located between the particle source and the particle energy detection device 4. The knife edge 9 is usually made of metal (such as tungsten) and has a sharp cut.

[0035] In this embodiment, the second position moving device 10 has XYZ three-axis displacement function, and the motion accuracy is micron, sub-micron, etc.

[0036] In this embodiment, the first position moving device 8 and the third position moving device 12 both have XYZ three-axis displacement function.

[0037] In this embodiment, the micro-hole 7 is grounded through the wire.

[0038] The following describes the detection process of the energy distribution, beam current size, beam spot size and divergence angle size of the particle source in combination with the device: (1) Energy distribution measurement process of particle source For example, Figure 2This demonstrates the core components required for measuring particle beam energy distribution, including the particle source 5 to be detected, the micro-orifice 7, and the particle energy detection device 4. The knife edge 9 and the flange cup 11, through corresponding positioning mechanisms, completely avoid the particle beam 6. The micro-orifice 7, through its positioning mechanism, moves to the focal point of the particle energy detection device 4, isolating the particle source control field and the control field of the particle energy detection device 4, thereby avoiding mutual interference.

[0039] exist Figure 2 With the device in place, the particle source 5 is turned on and its operating parameters are given, and the particle energy detection device 4 is turned on. The particle beam 6 emitted from the particle source 5 passes through the micro-hole 7 and enters the particle energy detection device 4, which can complete the measurement of the energy distribution of the particle source.

[0040] (2) Beam measurement Measuring the total beam current of the particle beam requires only the relevant Faraday cup mechanism. For example... Figure 3 The moving Faraday cup 11 is moved to the flight path of the particle beam 6 by the corresponding position moving device; the particle source 5 is turned on, and the beam size of all particle beams 6 is measured by the beam detection table 14.

[0041] Depending on the characteristics of the particle beam, different positive or negative voltages can be applied to the Faraday cup 11. In this measurement, the micropore 7 can be connected or completely removed.

[0042] (3) Size of the beam spot like Figure 4 The vertical measurement method for particle beam 6 at the target measurement point can be carried out based on the beam measurement using Faraday cup 11.

[0043] The blade 9 is moved to the side of the target measurement beam spot, and then continuously moved perpendicular to the flight direction of the particle beam 6. The relationship between the position of the blade 9 or its corresponding second position moving device 10 and the intensity of the beam current detection table 14 is recorded. It can be seen that as the blade 9 blocks the particle beam 6, the beam current intensity value decreases until it reaches 0. Through this process, the beam spot size is obtained.

[0044] (4) Divergence angle exist Figure 4 Based on the measurement of the beam spot size, the beam spot size at multiple points along the direction of particle beam flight can be measured, and the divergence angle can be calculated.

[0045] The above examples are only used for illustrating the design idea and characteristics of the present application, and the purpose is to enable the person skilled in the art to understand the present application and to implement it, and the protection scope of the present application is not limited to the above examples. Therefore, any equivalent changes or modifications made according to the disclosed principles and design ideas of the present application are within the protection scope of the present application.

Claims

1. A particle source characterization apparatus, comprising: It comprises:

1. A vacuum, low magnetic working cavity; The particle energy detection device (4) is arranged opposite to the particle source (5) to be detected and receives the particle beam (6) emitted by the particle source (5); The micropore (7) is movably installed in the working cavity by a position moving device, and only when the micropore (7) is moved to the focal point of the particle energy detection device (4), the particle energy detection device (4) is started to detect the energy distribution of the particle source; The Faraday cup (11) is movably installed in the working cavity by a position moving device, the Faraday cup (11) is connected with the beam current detection table (14) by a wire, the moving Faraday cup (11) is moved to the flight path of the particle beam (6) to measure the beam current; The knife edge (9) is movably installed in the working cavity by a position moving device, the moving Faraday cup (11) is moved to the flight path of the particle beam (6), and the knife edge (9) is not shielded, partially shielded and completely shielded to the particle beam during the movement of the position moving device, thereby measuring the beam spot size and divergence angle size.

2. A particle source characterization apparatus as claimed in claim 1, characterized in that The working cavity is composed of a vacuum cavity (1) and a magnetic shielding layer (2), the magnetic shielding layer (2) is located in the vacuum cavity (1), and the inside of the magnetic shielding layer (2) is the working cavity.

3. A particle source characterization apparatus as defined in claim 1, wherein, The vacuum cavity (1) is provided with a vacuum pump (3) to provide a vacuum environment.

4. The particle source characterization apparatus of claim 1, wherein, The position moving device can at least move vertically to the flight direction of the particle beam.

5. The particle source characterization apparatus of claim 1, wherein, The beam current detection table (14) has the function of detecting the beam current with an increased bias.

6. The particle source characterization apparatus of claim 1, wherein, The third position moving device (12) needs to be insulated.

7. The particle source characterization apparatus of claim 1, wherein, The particle energy detection device (4) can be selected from a hemispherical electron energy analyzer, a time-of-flight analyzer or a reflective particle energy analyzer.

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