Rotary terminal vacuum docking mechanism and method of manufacture

Abstract

The present application relates to particle therapy equipment technical field, provide a kind of rotating terminal vacuum docking mechanism and manufacturing method, retractable sealing assembly is provided with closed drive cavity, sealing connector is arranged at one end of retractable sealing assembly, the end of sealing connector is provided with sealing surface, and sealing surface is used to adapt with the pneumatic plug valve sealing surface of treatment room vacuum system side;Coarse pumping sealing connector is arranged at the other end of retractable sealing assembly;Drive cavity is configured to be driven by the sealing surface of sealing connector by passing in or discharging pressure medium to move along the first direction;The present application realizes the axial movement of the sealing surface of sealing connector by the pressure medium of drive cavity filling and discharging, to meet the needs of rotating terminal frequently switching treatment room;After docking is completed, beam channel is completely continuous vacuum environment, effectively avoid using vacuum film window and other solutions to dock to cause greater energy loss, scattering and stray particles to treatment beam, improve treatment precision, guarantee patient safety.

Description

Technical Field

[0001] This invention relates to the field of particle therapy equipment technology, and in particular to a rotating terminal vacuum docking mechanism and its manufacturing method. Background Technology

[0002] Existing technology proposes a scheme that provides beam current to eight treatment rooms using a single rotating treatment terminal, which has been validated through a prototype. This scheme significantly reduces patient positioning and treatment preparation time, greatly increases beam current utilization, and lowers construction and operating costs. Since the rotating terminal vacuum system and the treatment room vacuum systems need to be arranged separately, reliable docking between the two vacuum systems must be carefully considered.

[0003] Considering the aforementioned requirements, existing technologies generally employ a method of extracting the beam through a rotating terminal vacuum system membrane window, passing a short section of air, and then introducing it through the treatment chamber vacuum system membrane window. This short section of air provides rotational space to ensure that the beam and air do not collide during rotation. However, this method requires the beam to pass through two membrane windows and a short section of air, resulting in significant interaction between the beam, membrane, and air, causing substantial energy loss, scattering, and stray particles, directly impacting treatment accuracy and patient safety. How to ensure unobstructed beam transmission? While some institutions have addressed similar issues using differential and plasma windows, the beam required by the treatment device needs to be broadened to a large physical cross-section by a scanning magnet system, resulting in a large extraction size at the interface. For example, if the required vacuum system interface size is 120mm × 120mm (square), a differential structure would be space-consuming and costly; a plasma window structure would only have a maximum effective extraction size of Φ10mm, clearly unsuitable.

[0004] Therefore, there is an urgent need to develop a rotating terminal vacuum docking mechanism that can achieve non-destructive beam passage and frequent remote docking. Summary of the Invention

[0005] This invention provides a rotating terminal vacuum docking mechanism and manufacturing method to solve the defects of existing technologies, such as energy loss, scattering and stray particles caused by the docking structure between the rotating terminal and the vacuum system of the treatment room, as well as the complex structure and high operation and maintenance costs, so as to achieve safe and stable docking and disconnection between the terminal vacuum system and the vacuum system of the treatment room, and the goal of unobstructed beam transmission.

[0006] In a first aspect, the present invention provides a rotating terminal vacuum docking mechanism, comprising:

[0007] A retractable sealing assembly with a sealed drive chamber;

[0008] A sealing connector is disposed at one end of the retractable sealing assembly. The end of the sealing connector is provided with a sealing surface, which is used to be adapted to the sealing surface of the pneumatic slide valve on the vacuum system side of the treatment chamber.

[0009] A rough-drawing sealing connector is disposed at the other end of the retractable sealing assembly;

[0010] The drive chamber is configured to drive the sealing surface of the sealing connector to move along a first direction by introducing or discharging a pressure medium, thereby achieving contact or disengagement with the sealing surface of the pneumatic slide valve, wherein the first direction is the axial direction of the retractable sealing assembly.

[0011] According to the rotary terminal vacuum docking mechanism provided by the present invention, the retractable sealing assembly includes:

[0012] Outer corrugated pipe;

[0013] The inner bellows is coaxially sleeved with the outer bellows, and the closed space formed between the inner bellows and the outer bellows forms a drive chamber for filling and releasing compressed gas.

[0014] The rotary terminal vacuum docking mechanism provided by the present invention further includes:

[0015] An air filling and exhaust channel is provided in the coarse drawing sealing connector. One end of the air filling and exhaust channel is connected to the drive cavity, and the other end is used to connect to the compressed gas supply device.

[0016] According to the rotary terminal vacuum docking mechanism provided by the present invention, the sealing surface is provided with a sealing structure, the sealing structure comprising at least:

[0017] First annular sealing groove;

[0018] The second annular sealing groove is coaxially sleeved with the first annular sealing groove. Each sealing groove is provided with an elastic sealing element, and a secondary sealing cavity is formed between the two sealing grooves.

[0019] The rotary terminal vacuum docking mechanism provided by the present invention further includes:

[0020] A secondary vacuum pumping channel is provided in the sealing connector. One end of the secondary vacuum pumping channel is connected to the secondary sealing cavity, and the other end is used to connect to a vacuum pumping device.

[0021] According to the rotary terminal vacuum docking mechanism provided by the present invention, the coarse pump sealing connector is provided with a coarse pump interface, the coarse pump interface is used to connect to the molecular pump coarse pump unit, and the molecular pump coarse pump unit is connected to the coarse pump interface through a coarse pump pneumatic slide valve.

[0022] According to the rotary terminal vacuum docking mechanism provided by the present invention, the coarse extraction sealing connector is further provided with a partition valve interface flange for connecting a partition pneumatic slide valve.

[0023] According to the rotary terminal vacuum docking mechanism provided by the present invention, the surface roughness Ra of the sealing surface is ≤0.8μm.

[0024] According to the rotary terminal vacuum docking mechanism provided by the present invention, the maximum compression and maximum elongation of the retractable sealing assembly are both not less than 50% of the original length.

[0025] Secondly, the present invention provides a method for manufacturing a rotary terminal vacuum docking mechanism based on the first aspect, comprising the following steps:

[0026] Step S1: Machin the retractable sealing assembly, sealing connector, and rough-cut sealing connector separately;

[0027] Step S2: Connect the retractable sealing assembly, sealing connector, and rough-pull sealing connector into a whole and check for leaks to ensure that the leakage rate at the connection meets the standard;

[0028] Step S3: Perform dimensional accuracy inspection, ultrasonic cleaning, and vacuum degassing on the overall structure in sequence;

[0029] Step S4: Assemble and fix the processed overall structure with the isolation pneumatic slide gate valve, molecular pump rough pump unit and rough pump pneumatic slide gate valve, fill with compressed gas for docking test and overall leak detection.

[0030] This invention provides a rotating terminal vacuum docking mechanism, comprising: a retractable sealing assembly, a sealing connector, and a coarse-drawing sealing connector. The retractable sealing assembly is provided with a sealed driving chamber; the sealing connector is disposed at one end of the retractable sealing assembly, and its end has a sealing surface adapted to fit with the sealing surface of a pneumatic slide valve on the vacuum system side of the treatment chamber; the coarse-drawing sealing connector is disposed at the other end of the retractable sealing assembly; the driving chamber is configured to drive the sealing surface of the sealing connector to move along a first direction by introducing or discharging a pressure medium, thereby achieving docking or disengagement with the sealing surface of the pneumatic slide valve, the first direction being the axial direction of the retractable sealing assembly; compared to the "membrane window" in the prior art... The "air section-membrane window" docking method, during the remote docking and disengagement of the particle therapy device's rotating terminal vacuum system and the treatment chamber vacuum system, enables the axial movement of the sealing surface of the sealing connector by driving the chamber to fill and release the pressure medium. Combined with the adaptive design of the sealing surface and the pneumatic slide valve sealing surface, this ensures smooth remote docking and disengagement, meeting the needs of frequent treatment chamber switching by the rotating terminal. The precise fit between the sealing surface of the sealing connector and the pneumatic slide valve sealing surface ensures that the beam channel is a completely continuous vacuum environment after docking, without any physical membrane window or air gap. This effectively avoids energy loss, scattering, and stray particles caused by the interaction between the beam and the membrane window or air gap. Furthermore, it eliminates the need to consider membrane window fatigue issues in radiation and alternating high-temperature deposition environments, eliminating the need for regular maintenance and replacement, further improving beam utilization efficiency and fundamentally enhancing beam quality and treatment efficacy. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0032] Figure 1 This is a schematic diagram of the docking and switching structure between a rotating terminal vacuum system and multiple treatment room vacuum systems provided in an embodiment of the present invention.

[0033] Figure 2 This is a schematic diagram of the connection point between a rotating terminal vacuum system and a treatment chamber vacuum system provided in an embodiment of the present invention.

[0034] Figure 3 This is a schematic diagram of a rotating terminal vacuum docking mechanism in a disengaged state, provided in an embodiment of the present invention.

[0035] Figure 4 This is a cross-sectional view of the rotary terminal vacuum docking mechanism provided in an embodiment of the present invention.

[0036] Figure 5 This is an isometric view of the rotary terminal vacuum docking mechanism provided in an embodiment of the present invention.

[0037] Figure 6 This is a schematic flowchart of the manufacturing method of the rotary terminal vacuum docking mechanism provided in the embodiment of the present invention.

[0038] Figure label:

[0039] 1. Sealing connector; 11. Sealing surface; 12. First annular sealing groove; 13. Second annular sealing groove; 14. Secondary vacuum pumping channel;

[0040] 2. Roughing and sealing connection parts; 21. Isolation valve interface flange; 22. Roughing and sealing interface; 23. Inflation and exhaust channels;

[0041] 3. Outer bellows; 4. Inner bellows; 5. Drive cavity;

[0042] 6. Pneumatic slide gate valve; 7. Rough-draw pneumatic slide gate valve; 8. Isolation pneumatic slide gate valve;

[0043] 100. Rotary terminal vacuum system; 200. Treatment room vacuum system. Detailed Implementation

[0044] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0045] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention according to the specific circumstances.

[0046] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "method," "specific method," or "some methods," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or method is included in at least one embodiment or method of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or method. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or methods. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or methods described in this specification, as well as the features of different embodiments or methods.

[0047] The following is combined with Figures 1-6 This invention describes a rotary terminal vacuum docking mechanism and its manufacturing method.

[0048] Reference Figures 1-3 This invention provides a rotating terminal vacuum docking mechanism, comprising: a retractable sealing assembly, a sealing connector 1, and a coarse-extraction sealing connector 2. The retractable sealing assembly is provided with a sealed drive chamber 5. The sealing connector 1 is disposed at one end of the retractable sealing assembly, and the end of the sealing connector 1 is provided with a sealing surface 11, which is adapted to the sealing surface of the pneumatic slide valve 6 on the side of the treatment chamber vacuum system 200. The coarse-extraction sealing connector 2 is disposed at the other end of the retractable sealing assembly. The drive chamber 5 is configured to drive the sealing surface of the sealing connector 1 to move along a first direction by introducing or discharging a pressure medium, thereby achieving docking or disengagement with the sealing surface of the pneumatic slide valve 6. The first direction is the axial direction of the retractable sealing assembly.

[0049] The rotary terminal vacuum docking mechanism provided in this embodiment, when in use, rotates the rotary terminal to the target treatment chamber position, aligning the sealing surface 11 of the sealing connector 1 with the sealing surface of the pneumatic slide valve 6 on the side of the treatment chamber vacuum system 200, ensuring that the coaxiality meets the requirements; by introducing a pressure medium such as compressed air or nitrogen into the sealed drive chamber 5 of the retractable sealing assembly, the drive chamber 5 expands and drives the retractable sealing assembly to extend along the first direction, i.e., the axial direction, thereby pushing the sealing surface 11 of the sealing connector 1 to move synchronously until it is tightly fitted with the sealing surface of the pneumatic slide valve 6; after the treatment is completed, the pressure medium in the drive chamber 5 is discharged, and the retractable sealing assembly contracts along the first direction under atmospheric pressure, causing the sealing surface 11 of the sealing connector 1 to disengage from the sealing surface of the pneumatic slide valve 6, and the rotary terminal can be switched to other treatment chambers to continue working.

[0050] As can be seen from the above scheme, in the process of remote docking and disconnection between the rotary terminal vacuum system 100 of the particle therapy device and the treatment chamber vacuum system 200, compared with the existing "membrane window-air section-membrane window" docking method, this invention achieves precise axial movement of the sealing surface 11 of the sealing connector 1 by filling and discharging the pressure medium in the drive chamber 5. Combined with the adaptive design of the sealing surface 11 and the sealing surface of the pneumatic slide valve 6, it ensures smooth remote docking and disconnection, meeting the needs of frequent switching of treatment chambers by the rotary terminal. Through the precise fit between the sealing surface 11 of the sealing connector 1 and the sealing surface of the pneumatic slide valve 6, the beam channel is a completely continuous vacuum environment after docking, without any physical membrane window or air gap, effectively avoiding energy loss, scattering, and stray particles caused by the interaction between the beam and the membrane window or air gap. Furthermore, it eliminates the need to consider the fatigue problem of the membrane window in the radiation environment and alternating high-temperature deposition environment, eliminating the need for regular maintenance and replacement, further improving beam utilization efficiency, and fundamentally improving beam quality and treatment effect.

[0051] Furthermore, by adopting a retractable sealing component structure design, it can absorb minor deviations during the docking process, buffer docking impact, and adapt to the dynamic working scenario of the rotating terminal of the particle therapy device, thereby improving the service life of the mechanism. This invention integrates the retractable sealing component, sealing connector 1, and coarse-drawing sealing connector 2 into one unit, reducing the overall structural complexity and eliminating the need for periodic replacement of vulnerable parts such as the membrane window, thus reducing maintenance costs.

[0052] Reference Figure 4 In this embodiment, the retractable sealing assembly includes an outer bellows 3 and an inner bellows 4. The inner bellows 4 and the outer bellows 3 are coaxially sleeved together, and the closed space formed between the inner bellows 4 and the outer bellows 3 forms a drive chamber 5 for filling and releasing compressed gas.

[0053] With this configuration, the outer wall of the inner bellows 4 and the inner wall of the outer bellows 3 are sealed together by the sealing connectors 1 at both ends and the coarse-drawing sealing connectors 2, thus forming an annular closed space. The inner bellows 4 and the outer bellows 3 are assembled in a coaxial manner. This coaxial layout ensures that the two bellows can synchronously and stably expand and contract axially during the inflation and deflation process. This double-bellows design not only provides sufficient docking driving force, but also forms a high-vacuum sealing barrier. The inner bellows 4 directly forms the inner wall of the ultra-high vacuum beam pipe, while the gas in the driving cavity 5 is strictly confined within the driving cavity 5 and completely isolated from the high-vacuum area, thereby ensuring the vacuum level required for particle beam transmission.

[0054] Preferably, the maximum compression and maximum elongation of the retractable sealing assembly are both not less than 50% of its original length, and there is no jamming during the extension and retraction process. This configuration ensures, on the one hand, sufficient disengagement clearance. Since the rotating treatment terminal needs to switch between multiple treatment chambers, sufficient maximum compression ensures that the mating surface fully retracts upon disengagement, leaving a sufficient safety distance to ensure that the rotating mechanism will never collide during rotation. On the other hand, it provides reliable mating stroke. Sufficient maximum elongation ensures that the sealing surface 11 can stably reach and press against the sealing surface of the pneumatic slide valve 6 on the vacuum system 200 side of the treatment chamber after inflation, providing sufficient and stable sealing pressure and ensuring the reliability of the vacuum seal.

[0055] Furthermore, it also includes a charging and venting channel 23, which is opened in the roughing sealing connector 2. One end of the charging and venting channel 23 is connected to the drive chamber 5, and the other end is used to connect to the compressed gas supply device.

[0056] With this configuration, the drive chamber 5 is connected to an external gas source, such as a compressed gas supply device, via the inflation / deflation channel 23. When docking is required, compressed gas, such as 2 bar compressed air or nitrogen, is injected into the chamber, increasing the internal pressure of the drive chamber 5. This pushes the double-layer bellows to extend axially, thereby driving the sealing surface 11 at the end to move forward and seal tightly against the sealing surface of the pneumatic slide valve 6 on the side of the treatment chamber vacuum system 200. When disengagement is required, the gas in the chamber is discharged. Under atmospheric pressure, the double-layer bellows contracts, causing the sealing surface 11 to retract.

[0057] In some specific embodiments, the outer bellows 3 and the inner bellows 4 are made of 316L stainless steel, while the sealing connector 1 and the roughing sealing connector 2 are made of 304 stainless steel. The fatigue life of the outer bellows 3 and the inner bellows 4 is ≥10,000 cycles, the rated pressure is ≥2 bar, and the burst pressure is ≥4 bar. The trough diameter of the inner bellows 4 is not less than 175 mm, allowing a beam of current with an envelope square cross-section of 120 mm × 120 mm to pass through.

[0058] Preferably, the surface roughness Ra of the sealing surface 11 is ≤0.8μm.

[0059] Reference Figure 5 In this embodiment, the sealing surface 11 is provided with a sealing structure, which includes at least a first annular sealing groove 12 and a second annular sealing groove 13. The second annular sealing groove 13 is coaxially sleeved with the first annular sealing groove 12. An elastic sealing element such as an elastic sealing ring is provided in each sealing groove, and a secondary sealing cavity is formed between the two sealing grooves.

[0060] With this configuration, the second annular sealing groove 13 and the first annular sealing groove 12 are coaxially fitted together to form two sealing barriers. The elastic seal is positioned through the sealing groove, which can prevent displacement or wear during the docking process. When the drive chamber 5 is filled with air, it drives the retractable sealing assembly to extend axially, so that the sealing surface 11 is pressed against the sealing surface of the pneumatic slide valve 6 on the side of the treatment chamber vacuum system 200. The two elastic seals are compressed and each plays a sealing role independently, which greatly enhances the reliability of the seal. Even if one of the elastic seals fails, the other elastic seal can still maintain a basic sealing effect.

[0061] Furthermore, it also includes a secondary vacuum pumping channel 14, which is disposed on the sealing connector 1. One end of the secondary vacuum pumping channel 14 is connected to the secondary sealing cavity, and the other end is used to connect to the vacuum pumping device.

[0062] This configuration, with a channel pre-installed inside the gas-sealing structure and connected to the secondary vacuum extraction channel 14, allows for the extraction of gas from the secondary sealing cavity after the initial alignment of the sealing surface 11 with the pneumatic slide valve 6. This creates a negative pressure within the secondary sealing cavity, forming a "double sealing and negative pressure interception" structure with the two elastic seals. This effectively prevents outside air from entering the vacuum system, blocking the path of gas leakage from the gap in the sealing surface 11, resulting in an overall leakage rate better than 5×10⁻⁶. -9 mbar·L / s, ensuring the system vacuum is stably maintained at 10 mbar·L / s after docking. - 8 mbar meets the high vacuum requirements for particle therapy beam transmission; compared with traditional single-seal or membrane window docking methods, particle beam transmission does not need to pass through the membrane window and air layer, and will not cause energy loss and scattering due to collisions with membranes or gas molecules, nor will it form stray particles, ensuring the precision of treatment.

[0063] In this embodiment, the roughing sealing connector 2 is also provided with a shut-off valve interface flange 21 for connecting the shut-off pneumatic slide gate valve 8, such as... Figures 3-5 As shown, the isolation valve interface flange 21 is located at the end of the roughing sealing connection 2 away from the retractable sealing assembly, and the specification of the isolation valve interface flange 21 can be CF200.

[0064] In this embodiment, the roughing sealing connector 2 is provided with a roughing interface 22. The roughing interface 22 is used to connect the molecular pump roughing unit. The molecular pump roughing unit is connected to the roughing interface 22 through the roughing pneumatic gate valve 7. Figure 3 , Figure 5 As shown, the coarse extraction interface 22 is located on the side of the coarse extraction sealing connector 2. The coarse extraction interface 22 is provided with a coarse extraction interface 22 flange, and the specification of the coarse extraction interface 22 flange can be DN63.

[0065] In this configuration, the coarse evacuation interface 22 is not directly connected to the molecular pump coarse evacuation unit, but rather connected to it via the coarse evacuation pneumatic slide gate valve 7. When the docking mechanism completes docking, the coarse evacuation pneumatic slide gate valve 7 is in the closed state, isolating the molecular pump coarse evacuation unit from the docked cavity, ensuring the safety and stability of the main vacuum. After the sealing surface 11 of the sealing connector 1 docks and seals with the sealing surface of the pneumatic slide gate valve 6 on the other side of the treatment chamber vacuum system 200, the coarse evacuation pneumatic slide gate valve 7 is opened, and then the molecular pump coarse evacuation unit is started. The unit begins to work, rapidly evacuating the closed cavity formed by docking from atmospheric pressure to a higher vacuum level, such as 10. -6 mbar, and the vacuum level of the vacuum systems on both sides of the docking mechanism has reached 10. -8 The pressure difference between mbars has been significantly reduced, allowing the pneumatic slide gate valves 6 and 8 on both sides to be opened safely without causing the main pumps of the vacuum systems on both sides to overload and trigger system collapse. This ensures the three vacuum systems are safely connected as one unit. Finally, the main vacuum system maintains the system and closes the roughing pneumatic slide gate valve 7, putting the molecular pump unit into standby mode, ready for the next cycle.

[0066] In this embodiment, the opening and closing of the pneumatic valve can be remotely and automatically executed by the control system, realizing fully automated control of the vacuuming process. Its operation is fast and reliable, meeting the treatment needs of the rotary treatment terminal that requires frequent and rapid switching.

[0067] The working process of the rotating terminal vacuum docking mechanism of the present invention is as follows: the rotating terminal rotates to the corresponding position of the target treatment chamber to ensure that the docking mechanism is aligned with the pneumatic slide valve 6 on the treatment chamber side; 2 bar compressed gas is introduced into the drive chamber 5 of the retractable sealing assembly, and the double-layer bellows expands, causing the sealing surface 11 to extend axially and fit against the sealing surface of the pneumatic slide valve 6 on the treatment chamber side; the secondary sealing chamber between the two sealing rings of the sealing surface 11 is vacuumed through the secondary vacuum pumping channel 14 to further reduce the overall leakage rate; the molecular pump coarse pumping unit is turned on to pump the inside of the docking mechanism to 10 -6 mbar, then connect both sides 10 -8 The mbar-level vacuum system forms a continuous vacuum channel through which the beam can pass directly. After treatment, the pneumatic slide valve 6 of the treatment chamber and the isolation pneumatic slide valve 8 of the rotating terminal are closed, the vacuum in the coarse extraction sealing connection 2 is released, the compressed gas in the drive chamber 5 is discharged, the sealing surface 11 contracts and resets under atmospheric pressure, and the rotating terminal can be freely switched to other treatment chambers.

[0068] Reference Figure 6 The present invention also provides a method for manufacturing the above-described rotating terminal vacuum docking mechanism, comprising the following steps:

[0069] Step S1: Machin the retractable sealing assembly, sealing connector 1, and rough-cut sealing connector 2 respectively;

[0070] Step S2: Connect the retractable sealing assembly, sealing connector 1 and rough sealing connector 2 into a whole and check for leaks to ensure that the leakage rate at the connection meets the standard.

[0071] Step S3: Perform dimensional accuracy inspection, ultrasonic cleaning, and vacuum degassing on the overall structure in sequence;

[0072] Step S4: Assemble and fix the processed overall structure with the isolation pneumatic slide gate valve 8, the molecular pump rough pump unit and the rough pump pneumatic slide gate valve 7, and fill it with compressed gas for docking test and overall leak detection.

[0073] In some embodiments, the retractable sealing assembly in step S1 is made of 316L stainless steel strip, which is pressed, shaped, welded and tested for air tightness to produce an outer corrugated pipe 3 and an inner corrugated pipe 4, which are then assembled to form a double-layer sealed corrugated pipe assembly to ensure its fatigue life ≥10,000 cycles and rated pressure ≥2 bar.

[0074] The sealing connector 1 is made of 304 stainless steel blank and is machined by CNC machine tool. A secondary vacuum pumping channel 14 and two annular sealing grooves are opened on it. After machining, the roughness Ra of the sealing surface 11 is ≤0.8μm.

[0075] The roughing sealing connector 2 is made of 304 stainless steel blank and is machined by CNC machine tool. The DN63 roughing interface 22 flange and the CF200 isolation valve interface flange 21 are machined on it.

[0076] In some specific embodiments, in step S2, the outer bellows 3, the inner bellows 4, the sealing connector 1, and the roughing sealing connector 2 are coaxially welded and fixed to form an integral structure. A helium mass spectrometer is used for leak detection to ensure that the leak rate at the weld is ≤5×10⁻⁶. -10 mbar·L / s; The specific operation method is as follows: blow a ring of helium around the outer corrugated pipe 3, and connect the filling and exhaust channel 23 to the helium mass spectrometer leak detector. If there is a leak, the helium will enter the drive cavity 5 through the leak hole, and then be detected by the leak detector through the filling and exhaust channel 23, thus determining that there is a leak.

[0077] In some specific embodiments, in step S3, the dimensional accuracy inspection uses a coordinate measuring machine to inspect the key dimensions of the overall structure, the roughness of the sealing surface 11, and the expansion and contraction of the double-layer welded bellows to ensure that it meets the design requirements; then, the qualified overall structure is placed in an ultrasonic cleaning device to remove surface oil and impurities; then, the cleaned overall structure is placed in a vacuum degassing furnace, under a vacuum degree ≤1×10 -3 The material was kept at 600℃ for 2 hours under the conditions of Pa to remove internal gas, surface adsorbed impurities and internal stress.

[0078] In some specific embodiments, in step S4, the overall structure is assembled and fixed with the isolation pneumatic slide gate valve 8, the molecular pump roughing unit, and the roughing pneumatic slide gate valve 7. Compressed gas at 2 bar is introduced into the drive chamber 5 to drive the sealing surface 11 to connect with the sealing surface of the pneumatic slide gate valve 6 on the side of the treatment chamber vacuum system 200. Then, the vacuum pumping device is first turned on to achieve a preset vacuum level in the secondary sealing chamber. Next, the roughing pneumatic slide gate valve 7 and the molecular pump roughing unit are turned on. After the molecular pump speed reaches its rated value, a helium mass spectrometer leak detector is used to detect the leakage rate at the connection surface. The leakage rate is better than 5 × 10⁻⁶. -9 mbar.L / s, open the pneumatic slide gate valves 6 and 8 on both sides, and connect to the 10 on both sides. -8 For mbar-level vacuum systems, close the roughing pneumatic gate valve 7 and maintain a system vacuum of 10. -8 mbar ensures that the sealing performance and vacuum level meet the standards.

[0079] Optionally, in step S3, the ultrasonic cleaning uses an alkaline cleaning solution, the cleaning temperature is 40-60℃, the cleaning time is 15-30 minutes, and after cleaning, it is rinsed with deionized water and dried.

[0080] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A rotating terminal vacuum docking mechanism, characterized by, The application relates to a telescopic sealing assembly. The telescopic sealing assembly has a maximum compression amount and a maximum elongation amount, both of which are not less than 50% of the original length. The telescopic sealing assembly comprises an outer bellows (3). An inner bellows (4) is coaxially sleeved with the outer bellows (3), and a closed space formed between the inner bellows (4) and the outer bellows (3) forms a driving cavity (5) for filling and discharging compressed gas; the valley diameter of the inner bellows (4) is not less than 175 mm, so as to envelope a beam with a square cross-section size of 120 mm*120 mm. A sealing connector (1) is arranged at one end of the telescopic sealing assembly, and an end of the sealing connector (1) is provided with a sealing surface (11) which is used for adapting to a sealing surface of a pneumatic insertion plate valve (6) on the side of a treatment chamber vacuum system (200); the sealing surface (11) is provided with a sealing structure which at least comprises: A first annular sealing groove (12); A second annular sealing groove (13) which is coaxially sleeved with the first annular sealing groove (12); elastic sealing members are arranged in the sealing grooves, and a secondary sealing cavity is formed between the two sealing grooves; A secondary vacuum air extraction channel (14) is arranged on the sealing connector (1), one end of the secondary vacuum air extraction channel (14) is communicated with the secondary sealing cavity, and the other end is used for connecting a vacuum air extraction device; A rough extraction sealing connector (2) is arranged at the other end of the telescopic sealing assembly. The driving cavity (5) is configured to drive the sealing surface (11) of the sealing connector (1) to move in a first direction to realize abutting or separating of the sealing surface of the sealing connector (1) and the sealing surface of the pneumatic insertion plate valve (6) by inputting or discharging pressure medium, and the first direction is the axial direction of the telescopic sealing assembly. A filling and discharging channel (23) is arranged on the rough extraction sealing connector (2), one end of the filling and discharging channel (23) is communicated with the driving cavity (5), and the other end is used for connecting a compressed gas supply device.

2. The rotary terminal vacuum docking mechanism of claim 1, wherein, A cutoff valve interface flange (21) is further arranged on the rough extraction sealing connector (2) and used for connecting a cutoff pneumatic insertion plate valve (8).

3. The rotary terminal vacuum docking mechanism of claim 2, wherein, A rough extraction interface (22) is arranged on the rough extraction sealing connector (2) and used for connecting a molecular pump rough extraction unit, and the molecular pump rough extraction unit is connected with the rough extraction interface (22) through a rough extraction pneumatic insertion plate valve (7).

4. The rotary terminal vacuum docking mechanism of claim 2, wherein, The surface roughness Ra of the sealing surface (11) is less than or equal to 0.8 microns.

5. A method of manufacturing a rotary terminal vacuum docking mechanism according to any one of claims 1-4, characterized by, The application further discloses a manufacturing method of the telescopic sealing assembly. S1: respectively processing the telescopic sealing assembly, the sealing connector (1) and the rough extraction sealing connector (2); S2: connecting the telescopic sealing assembly, the sealing connector (1) and the rough extraction sealing connector (2) into an integral whole and detecting leakage to ensure that the leakage rate of the connection part meets the standard; S3: sequentially performing size precision detection, ultrasonic cleaning and vacuum degassing treatment on the integral structure. Step S4: Assemble and fix the processed whole structure with the partition pneumatic plug valve (8), the molecular pump rough pumping unit and the rough pumping pneumatic plug valve (7), fill in compressed gas to carry out joint test and whole leak detection.

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