Dismounting jig

Abstract

The disassembling jig comprises a first moving seat and a second moving seat which are arranged on a base in a sliding mode. The driving device is connected with the first moving seat and the second moving seat and is used for driving the first moving seat and the second moving seat to move relatively; the first separation part and the second separation part are arranged on the first moving seat and the second moving seat and are used for being inserted between the adsorption layer and the cooling layer along with reduction of the distance between the first moving seat and the second moving seat, so that the adsorption layer is separated from the cooling layer; the first separating part and the second separating part are connected with the driving device through the first moving seat and the second moving seat, so that an operator can drive the first separating part and the second separating part to move by controlling the driving device, the force needed to be applied by the operator when the operator uses the disassembling jig is correspondingly reduced, and meanwhile, the disassembling efficiency is improved. When an operator uses the disassembling jig, it can be ensured that the force exerting direction of the disassembling jig is kept in the horizontal direction, and therefore the difficulty that the operator uses the disassembling jig to separate the adsorption layer and the cooling layer is lowered.

Description

TECHNICAL FIELD

[0001] Embodiments of the present application relate to the field of semiconductor equipment, and in particular, to a disassembly jig. BACKGROUND

[0002] In the field of semiconductor manufacturing, the chamber of an etching device is usually composed of multiple precision components, such as a CEL (chuck engaging layer) and a cooling plate that are attached to each other in a chuck, and the two are connected by an O-ring (O-ring) for sealing.

[0003] During the use of the etching device, due to high temperature, chemical reactions and other factors, the O-ring adheres between the CEL and the cooling plate, making it difficult to separate the two, thereby affecting the PM (preventive maintenance) efficiency of the device. SUMMARY

[0004] The problem solved by embodiments of the present application is to provide a disassembly jig that facilitates reducing the difficulty of an operator in separating the CEL and the cooling plate using the disassembly jig.

[0005] To solve the above problems, embodiments of the present application provide a disassembly jig for separating a CEL and a cooling plate that are attached to each other in a chuck, comprising: a base; a first moving seat and a second moving seat, which are slidably arranged on the base, and the first moving seat and the second moving seat are oppositely arranged; a driving device connected to the first moving seat and the second moving seat, for driving the relative movement of the first moving seat and the second moving seat to adjust the distance between the first moving seat and the second moving seat; a first separation component and a second separation component arranged on the first moving seat and the second moving seat respectively, the first separation component and the second separation component are used for clamping the junction position of the CEL and the cooling plate, and are also used for inserting between the CEL and the cooling plate as the distance between the first moving seat and the second moving seat decreases, so as to separate the CEL and the cooling plate.

[0006] Compared with the prior art, the technical scheme of embodiments of the present application has the following advantages:

[0007] The embodiment of the present application provides a dismounting jig used for separating the adhering adsorption layer and cooling layer in a chuck, comprising: a base; a first moving seat and a second moving seat which are slidably arranged on the base and oppositely arranged; a driving device connected with the first moving seat and the second moving seat and used for driving the relative movement of the first moving seat and the second moving seat to adjust the interval of the first moving seat and the second moving seat; a first separating component and a second separating component which are arranged on the first moving seat and the second moving seat respectively, and used for clamping the joint position of the adsorption layer and the cooling layer and inserting between the adsorption layer and the cooling layer to separate the adsorption layer and the cooling layer as the interval of the first moving seat and the second moving seat is reduced; in the embodiment, the first separating component and the second separating component are connected with the driving device through the first moving seat and the second moving seat, so that the operator can drive the first separating component and the second separating component to move by controlling the driving device, the strength required to be applied by the operator in using the dismounting jig is reduced, and meanwhile, the operator can ensure that the force direction of the dismounting jig remains horizontal when using the dismounting jig, so that the difficulty of the operator in separating the adsorption layer and the cooling layer by using the dismounting jig is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0008] Figure 1 is a top view of an embodiment of the dismounting jig of the present application;

[0009] Figure 2 is Figure 1 is a sectional view along the direction of A arrow;

[0010] Figure 3 is Figure 1 is a sectional view along the direction of BB1;

[0011] Figure 4 is Figure 1 is a sectional view along the direction of CC1;

[0012] Figure 5 is a sectional view of the adhering adsorption layer and cooling layer in the chuck of the embodiment of the present application;

[0013] Figure 6 is a sectional view in the working state of the dismounting jig of the embodiment of the present application. DETAILED DESCRIPTION

[0014] As known from the background, how to separate the adhering adsorption layer and cooling layer in a chuck becomes a problem to be solved.

[0015] At present, the common solution is to use a jip to insert into the gap between the adsorption layer and the cooling layer, and to separate the adsorption layer and the cooling layer by prying to expand the gap between the adsorption layer and the cooling layer.

[0016] It is found through research that, in actual operation, since the adsorption layer and the cooling layer are usually located at the bottom edge position after the upper cover of the etching equipment chamber is opened, and are far from the ground, the operator needs to operate in a half-squatting state, so that the operator is difficult to exert force horizontally, and the process of separating the adsorption layer and the cooling layer by prying is not only laborious, but also low in efficiency.

[0017] To solve the above problems, an embodiment of the present application provides a dismounting jig for separating an adsorption layer and a cooling layer that are attached to each other in a chuck, comprising: a base; first and second moving seats that are slidingly arranged on the base and oppositely arranged; a driving device connected with the first and second moving seats and used for driving the relative movement of the first and second moving seats to adjust the distance between the first and second moving seats; and first and second separating components arranged on the first and second moving seats respectively, and used for clamping the junction position of the adsorption layer and the cooling layer, and for inserting between the adsorption layer and the cooling layer as the distance between the first and second moving seats decreases, so as to separate the adsorption layer and the cooling layer.

[0018] In the scheme disclosed by the embodiment of the present application, the first and second separating components are connected with the driving device through the first and second moving seats, so that the operator can drive the first and second separating components to move by controlling the driving device, and the force required to be exerted by the operator in using the dismounting jig is correspondingly reduced, and meanwhile, the operator can also ensure that the force direction of the dismounting jig remains horizontal when using the dismounting jig, thereby reducing the difficulty of the operator in separating the adsorption layer and the cooling layer by using the dismounting jig.

[0019] To make the above-mentioned purposes, features and advantages of the embodiments of the present application more obvious and easy to understand, the specific embodiments of the present application are described in detail below with reference to the drawings.

[0020] Figure 1 is a top view of an embodiment of the dismounting jig of the present application, Figure 2 is Figure 1 is a sectional view along the A arrow direction, Figure 3 is Figure 1 is a sectional view along the BB1 direction, Figure 4 is Figure 1 is a sectional view along the CC1 direction, Figure 5is a sectional view of the adhesion layer and the cooling layer in the chuck, Figure 6 is a sectional view of the working state of the dismounting jig.

[0021] It should be noted that, in order to make the drawing clear, Figure 1 Only the first moving seat, the second moving seat, the driving device, the first separating component, the second separating component, the first linear motion component and the second linear motion component are shown.

[0022] Reference Figures 1 to 6 , the dismounting jig is used for separating the adhesion layer 101 and the cooling layer 102 (as shown in Figure 5 and Figure 6 ) in the chuck 100, and comprises a base 103 (as shown in Figure 2 ), a first moving seat 104 and a second moving seat 105 which are slidably arranged on the base 103 and oppositely arranged, a driving device 106 (as shown in Figure 1 ) which is connected with the first moving seat 104 and the second moving seat 105 and used for driving the relative movement of the first moving seat 104 and the second moving seat 105 to adjust the distance between the first moving seat 104 and the second moving seat 105, a first separating component 130 and a second separating component 107 which are arranged on the first moving seat 104 and the second moving seat 105 respectively, and used for clamping the joint position of the adhesion layer 101 and the cooling layer 102 (as shown in Figure 6 ) and inserting between the adhesion layer 101 and the cooling layer 102 with the distance between the first moving seat 104 and the second moving seat 105 becoming smaller to separate the adhesion layer 101 and the cooling layer 102.

[0023] It should be noted that the first separating component 130 and the second separating component 107 are connected with the driving device 106 through the first moving seat 104 and the second moving seat 105, so that the operator can drive the first separating component 130 and the second separating component 107 to move by controlling the driving device 106, and the strength required to be applied by the operator in using the dismounting jig is reduced accordingly. Meanwhile, the operator can also ensure that the force direction of the dismounting jig remains horizontal when using the dismounting jig, so as to reduce the difficulty of the operator in separating the adhesion layer and the cooling layer by using the dismounting jig.

[0024] The base 103 is used for providing mounting positions and moving platforms for the first moving seat 104 and the second moving seat 105.

[0025] In this embodiment, the base 103 includes a first surface 108 and a second surface 109 arranged opposite to each other, facilitating compatibility with different types of components, so that the dismounting jig can be adapted to more application scenarios.

[0026] In this embodiment, the base 103 is of a rigid structure and has strong support.

[0027] With reference to Figure 3 and Figure 4 , in this embodiment, the base 103 is provided with a first guide protrusion 110 (as shown in Figure 3 ) and a second guide protrusion 111 (as shown in Figure 4 ), and the extension directions of the first guide protrusion 110 and the second guide protrusion 111 are both parallel to the preset straight line direction.

[0028] The first guide protrusion 110 and the second guide protrusion 111 are both used to guide the first moving seat 104 and the second moving seat 105 to move along a predetermined trajectory, ensuring smooth sliding of the first moving seat 104 and the second moving seat 105 along the preset straight line direction on the base 103.

[0029] In other embodiments, the base is provided with a first sliding groove and a second sliding groove, and the extension directions of the first sliding groove and the second sliding groove are both parallel to the preset straight line direction.

[0030] The shape of the first guide protrusion 110 includes an inverted trapezoid or a dovetail shape, and the shape of the second guide protrusion 111 includes an inverted trapezoid or a dovetail shape.

[0031] It should be noted that the inverted trapezoid or the dovetail shape both have the top wider and the bottom narrower, so when the first guide protrusion 110 and the second guide protrusion 111 cooperate with the corresponding sliding grooves, the wider top can be closely fitted with the sliding grooves, providing a larger contact area and a stronger constraint force, and the narrower bottom makes it difficult for the first moving seat 104 and the second moving seat 105 to be pulled out of the sliding grooves during sliding, thereby reducing the probability of the first moving seat 104 and the second moving seat 105 falling off.

[0032] As an example, the shape of the first guide protrusion 110 is an inverted trapezoid, and the shape of the second guide protrusion 111 is an inverted trapezoid.

[0033] In other embodiments, the shape of the first guide protrusion is a dovetail shape, and the shape of the second guide protrusion is a dovetail shape; or the shape of the first guide protrusion is a dovetail shape, and the shape of the second guide protrusion is an inverted trapezoid; or the shape of the first guide protrusion is an inverted trapezoid, and the shape of the second guide protrusion is a dovetail shape.

[0034] The first moving seat 104 and the second moving seat 105 are used to provide stable mounting platforms for the first separation component 130 and the second separation component 107, and ensure that the first separation component 130 and the second separation component 107 maintain accurate positions and directions during operation.

[0035] It should be noted that the first moving seat 104 and the second moving seat 105 are slidingly arranged on the base 103, which facilitates flexible adjustment of the distance between the first moving seat 104 and the second moving seat 105, so that the first separation component 130 and the second separation component 107 can be uniformly and stably inserted between the adsorption layer 101 and the cooling layer 102, thereby realizing efficient separation operation.

[0036] It should be further noted that the first moving seat 104 and the second moving seat 105 are oppositely arranged, and during the process of separating the adsorption layer 101 and the cooling layer 102, the first moving seat 104 and the second moving seat 105 move in opposite directions along the preset straight line direction, so that the separation force received by the adsorption layer 101 and the cooling layer 102 is always equal in size and opposite in direction, thereby improving the stability of the process of separating the adsorption layer 101 and the cooling layer 102.

[0037] Reference Figure 1 In the embodiment, the first moving seat 104 has a first linear motion component 112, and the second moving seat 105 has a second linear motion component 113. The extension direction of the first linear motion component 112 and the extension direction of the second linear motion component 113 are both parallel to the preset straight line direction, and the first linear motion component 112 and the second linear motion component 113 are arranged in parallel.

[0038] The first linear motion component 112 is used to provide high-precision linear guidance for the first moving seat 104, and cooperates with the driving device 106 to realize controlled linear displacement, thereby ensuring that the first moving seat 104 moves along the preset trajectory.

[0039] The second linear motion component 113 is used to provide high-precision linear guidance for the second moving seat 105, and cooperates with the driving device 106 to realize controlled linear displacement, thereby ensuring that the second moving seat 105 moves along the preset trajectory.

[0040] It should be noted that the extension direction of the first linear motion component 112 and the extension direction of the second linear motion component 113 are both parallel to the preset straight line direction, which facilitates smooth and accurate movement of the first moving seat 104 and the second moving seat 105 along the preset straight line direction, thereby improving the stability of the entire separation process.

[0041] It should be noted that the first linear motion component 112 and the second linear motion component 113 are arranged in parallel, which is beneficial to keep the first moving seat 104 and the second moving seat 105 symmetrical during the movement, so that the first moving seat 104 and the second moving seat 105 are uniformly distributed, thereby effectively reducing the probability of the first moving seat 104 and the second moving seat 105 being deflected during the movement. At the same time, it is also beneficial to the movement path of the first moving seat 104 and the second moving seat 105 being consistent, further ensuring the synchronous movement of the first separation component 130 and the second separation component 107, thereby reducing the difficulty of separating the adsorption layer 101 and the cooling layer 102.

[0042] Reference Figure 1 In the embodiment, the first linear motion component 112 includes a first rack 114, and the second linear motion component 113 includes a second rack 115. The tooth part of the first rack 114 and the tooth part of the second rack 115 are arranged oppositely.

[0043] Specifically, the first rack 114 and the second rack 115 have the characteristics of high rigidity and high precision, and can realize high-precision linear motion control, so that the first moving seat 104 and the second moving seat 105 always keep symmetry during the movement, and the force is uniformly distributed, thereby effectively reducing the probability of the first moving seat 104 and the second moving seat 105 being deflected during the movement.

[0044] It should be noted that the tooth part of the first rack 114 and the tooth part of the second rack 115 are arranged oppositely, which is beneficial to the meshing force of the first rack 114 and the meshing force of the second rack 115 being offset, thereby reducing the probability of the first moving seat 104 and the second moving seat 105 being deflected during the movement. At the same time, it is also beneficial to forcibly synchronize the first moving seat 104 and the second moving seat 105 through reverse meshing, thereby realizing the synchronous control of the first separation component 130 and the second separation component 107, and further improving the reliability and working efficiency of the disassembly jig.

[0045] Reference Figure 1 Along the extension direction of the first rack 114, the first rack 114 includes adjacent first toothed region I and first smooth region II. The first toothed region I is located on the side of the first smooth region II away from the first moving seat 104. The first toothed region I has a first tooth structure, and the first smooth region II is used to limit the movement range of the first rack 114.

[0046] It should be noted that the first tooth profile structure of the first toothed region I is used to engage with the gear, so as to realize high-precision linear motion control, and ensure that the movement path of the first moving seat 104 is accurate and stable; the first smooth region II is used to limit the movement range of the first rack 114, effectively preventing the first rack 114 from exceeding the predetermined movement range due to improper operation (such as excessive force), thereby avoiding damage to the adsorption layer 101.

[0047] With reference to Figure 1 , along the extension direction of the second rack 115, the second rack 115 includes adjacent second toothed region i and second smooth region ii, the second toothed region i is located on the side of the second smooth region ii away from the second moving seat 105, the second toothed region i has a second tooth profile structure, and the second smooth region ii is used to limit the movement range of the second rack 115.

[0048] It should be noted that the second tooth profile structure of the second toothed region i is used to engage with the gear, so as to realize high-precision linear motion control, and ensure that the movement path of the second moving seat 105 is accurate and stable; the second smooth region ii is used to limit the movement range of the second rack 115, effectively preventing the second rack 115 from exceeding the predetermined movement range due to improper operation (such as excessive force), thereby avoiding damage to the adsorption layer 101.

[0049] In this embodiment, the first rack 114 and the first moving seat 104 are of an integrated structure, and the second rack 115 and the second moving seat 105 are of an integrated structure.

[0050] It should be noted that the first rack 114 and the first moving seat 104 are of an integrated structure, and the second rack 115 and the second moving seat 105 are of an integrated structure, which is beneficial to improve the strength and rigidity of the overall structure of the disassembly jig, so that the disassembly jig has strong supportability, and the first separation component 130 and the second separation component 107 are arranged on the first moving seat 104 and the second moving seat 105 and are not easy to shake, which is beneficial to improve the stability of the first separation component 130 and the second separation component 107.

[0051] With reference to Figure 2 , in this embodiment, the first moving seat 104 includes a first base 116 and a first support 117 arranged on the first base 116, and the first base 116 is slidingly arranged on the base 103.

[0052] The first base 116 is used to provide support for the first support 117 and the first separation component 130, and is also used to slide on the base 103.

[0053] The first support 117 is used to mount and fix the first separation component 130.

[0054] In the embodiment, the second moving seat 105 comprises a second base 118 and a second support 119 arranged on the second base 118, and the second base 118 is slidingly arranged on the base 103.

[0055] The second moving seat 105 is configured to support the second support 119 and the second separating component 107, and to slide on the base 103.

[0056] The second support 119 is configured to mount and fix the second separating component 107.

[0057] The shapes of the first base 116 and the second base 118 include semicircle, square or rectangle. As an example, the shapes of the first base 116 and the second base 118 are semicircle.

[0058] It should be noted that the shapes of the first base 116 and the second base 118 include semicircle, square or rectangle, which is beneficial to improve the flexibility of the dismounting tool, so that the dismounting tool can adapt to various different operation requirements and working environments.

[0059] In the embodiment, the first moving seat 104 comprises an aluminum alloy moving seat or a steel moving seat, and the second moving seat 105 comprises an aluminum alloy moving seat or a steel moving seat.

[0060] It should be noted that the aluminum alloy moving seat or the steel moving seat has high support, so that the first separating component 130 and the second separating component 107 arranged on the first moving seat 104 and the second moving seat 105 are not easy to shake, which is beneficial to improve the stability of the first separating component 130 and the second separating component 107.

[0061] In the embodiment, the first moving seat 104 and the second moving seat 105 are configured to slide with the base 103 along a preset straight line direction, which is beneficial to accurately control the positions of the first moving seat 104 and the second moving seat 105. In addition, since the straight line movement is relatively simple, fewer components are involved, and the movement trajectory is clear, which makes the straight line sliding structure more direct and easy to control in design and manufacturing.

[0062] Reference Figures 3 to 4 In the embodiment, the first moving seat 104 and the second moving seat 105 are configured to slide with the base 103 along a preset straight line direction, wherein the bottom surface of the first moving seat 104 is provided with a first sliding groove 120 (such as Figure 3The first sliding groove 120 is matched with the first guiding convex part 110, so that the first moving seat 104 moves along the first guiding convex part 110. The bottom surface of the second moving seat 105 has a second sliding groove 121 (as shown in the figure). Figure 4 The second sliding groove 121 is matched with the second guiding convex part 111, so that the second moving seat 105 moves along the second guiding convex part 111.

[0063] It should be noted that, by matching the first sliding groove 120 with the first guiding convex part 110 and the second sliding groove 121 with the second guiding convex part 111, the first moving seat 104 and the second moving seat 105 can be accurately moved along the predetermined path, and the wear between the first moving seat 104, the second moving seat 105 and the base 103 can be reduced, thereby prolonging the service life of the components.

[0064] In other embodiments, the bottom surface of the first moving seat has a first guiding convex part, and the bottom surface of the second moving seat has a second guiding convex part.

[0065] The driving device 106 is used to drive the relative movement of the first moving seat 104 and the second moving seat 105, and adjust the distance between the first moving seat 104 and the second moving seat 105.

[0066] With reference to Figure 1 In this embodiment, the driving device 106 is connected with the first linear motion component 112 and the second linear motion component 113, and the driving device 106 is used to drive the first linear motion component 112 and the second linear motion component 113 to move synchronously and reversely in the predetermined linear direction.

[0067] It should be noted that, by connecting the driving device 106 with the first linear motion component 112 and the second linear motion component 113, the first linear motion component 112 and the second linear motion component 113 can be moved synchronously, and the first moving seat 104 and the second moving seat 105 can be moved synchronously, thereby improving the stability of the process of separating the adsorption layer 101 and the cooling layer 102.

[0068] It should be further noted that the driving device 106 is used to drive the first linear motion component 112 and the second linear motion component 113 to move synchronously and reversely in the predetermined linear direction, and the first moving seat 104 and the second moving seat 105 are correspondingly moved synchronously and reversely, so that the separation force acting on the adsorption layer 101 and the cooling layer 102 is always equal in size and opposite in direction, thereby improving the stability of the process of separating the adsorption layer 101 and the cooling layer 102.

[0069] With reference to Figure 1In the embodiment, the driving device 106 comprises a gear 122, the gear 122 is engaged with the first rack 114 and the second rack 115, and the gear 122 is used to drive the first rack 114 and the second rack 115 to move reversely through rotary motion.

[0070] The gear 122 interacts with the first rack 114 and the second rack 115 through precise engagement mechanism, so as to realize precise control of the first rack 114 and the second rack 115.

[0071] It should be noted that the gear 122 is used to drive the first rack 114 and the second rack 115 to move reversely through rotary motion, which is beneficial to ensure that the first rack 114 and the second rack 115 move reversely synchronously, and correspondingly, the first moving seat 104 and the second moving seat 105 move reversely synchronously.

[0072] Reference Figure 2 In the embodiment, in the case that the driving device 106 is the manual driving device, the driving device 106 further comprises a rotating shaft 123, a first end 124 of the rotating shaft 123 is connected to a bottom surface of the gear 122, and a rotating mechanism 125 is connected to a second end 129 of the rotating shaft 123.

[0073] In the extension direction of the rotating shaft 123, the rotating shaft 123 comprises the first end 124 and the second end 129 which are oppositely arranged.

[0074] The bottom surface of the gear 122 refers to the surface of the gear 122 facing the base 103.

[0075] The rotating shaft 123 is used to connect the gear 122 and the rotating mechanism 125, and is also used to transmit the rotary motion generated by manual driving from the rotating mechanism 125 to the gear 122.

[0076] The rotating mechanism 125 is used to convert the rotary operation of the operator into rotary motion, and transmit the rotary motion to the gear 122 through the rotating shaft 123.

[0077] It should be noted that the operator generates rotary motion through the rotating mechanism 125, and transmits the rotary motion to the gear 122 through the rotating shaft 123, and the gear 122 further converts the rotary motion into a motion form suitable for driving the jig, so as to realize separation of the adsorption layer 101 and the cooling layer 102, which is beneficial to efficiently and reliably complete complex mechanical motion through manual operation, and meets the actual needs of disassembling the jig.

[0078] Reference Figure 2In the embodiment, when the driving device 106 is the manual driving device, the rotating mechanism 125 comprises: a rotating disc 126, which is detachably connected with the second end 129 of the rotating shaft 123; and a handle 127, one end of which is detachably connected with the rotating disc 126.

[0079] The rotating disc 126 provides a larger operation interface for the operator, so that the operator can easily exert a rotating force.

[0080] The rotating disc 126 is detachably connected with the second end 129 of the rotating shaft 123. If the rotating disc 126 is damaged or needs to be replaced, the new part can be quickly detached and replaced, without the need to replace the entire driving device 106, which is conducive to reducing the maintenance cost.

[0081] In the embodiment, the rotating disc 126 is threadedly connected with the second end 129 of the rotating shaft 123. The rotating disc 126 has a groove (not shown in the figure), the inner wall of the groove has an internal thread structure (not shown in the figure), the second end 129 of the rotating shaft 123 has an external thread structure (not shown in the figure), and the external thread structure is threadedly connected with the internal thread structure.

[0082] In another embodiment, the second end of the rotating shaft has an internal thread structure, and the rotating disc has a groove, the inner wall of the groove has an external thread structure.

[0083] In other embodiments, the rotating disc and the second end of the rotating shaft can also be snap-connected.

[0084] The handle 127 provides a convenient gripping part for the operator, so that the operator can more easily exert a rotating force.

[0085] One end of the handle 127 is detachably connected with the rotating disc 126, so that the handle 127 can be detached without using a detaching jig, thereby saving storage space.

[0086] In the embodiment, when the driving device 106 is the manual driving device, the rotating shaft 126 penetrates through the base 103 from the side of the second face 109 and is connected with the bottom face of the gear 122.

[0087] It should be noted that the rotating shaft 123 penetrates through the base 103 from the side of the second face 109 and is connected with the bottom face of the gear 122, so that the rotating shaft 123 has a longer supporting length inside the base 103, thereby improving the rigidity of the rotating shaft 123 and reducing the deformation caused by external force or torque.

[0088] In other embodiments, in the case that the driving device is the automatic driving device, the driving device further comprises a motor, an output shaft of the motor is connected with the bottom surface of the gear.

[0089] It should be noted that, in the case that the driving device is the automatic driving device, the efficiency of separating the adsorption layer and the cooling layer is improved.

[0090] It should be further noted that, the output shaft of the motor is connected with the bottom surface of the gear, which facilitates the accurate transmission of the torque output by the motor to the gear, thereby driving the subsequent mechanical components and reducing energy loss caused by transmission errors.

[0091] In the case that the driving device is the automatic driving device, the output shaft of the motor penetrates the base from the second side and is connected with the bottom surface of the gear.

[0092] It should be noted that, the output shaft of the motor penetrates the base from the second side and is connected with the bottom surface of the gear, which facilitates avoiding interference with the movement of the moving seat, thereby ensuring smooth sliding operation of the moving seat.

[0093] In this embodiment, the first moving seat 104 and the second moving seat 105 are slidingly arranged on the first side 108 of the base 103, and the first rack 114, the second rack 115 and the gear 122 are arranged on the first side of the first side 108 of the base 103, which facilitates improving the engagement accuracy of the first rack 114, the second rack 115 and the gear 122, thereby improving the sliding accuracy of the first moving seat 104 and the second moving seat 105, and further improving the efficiency of separating the adsorption layer 101 and the cooling layer 102.

[0094] The first separating component 130 and the second separating component 107 are used to clamp the junction position of the adsorption layer 101 and the cooling layer 102, so as to separate the adsorption layer 101 and the cooling layer 102.

[0095] In this embodiment, the relative movement direction of the first moving seat 104 and the second moving seat 105, and the relative arrangement of the first separating component 130 and the second separating component 107, facilitate generating symmetrical and opposite forces at the junction position of the adsorption layer 101 and the cooling layer 102, thereby improving the efficiency of separating the adsorption layer 101 and the cooling layer 102.

[0096] In this embodiment, the first separating component 130 is detachably connected with the first moving seat 104, and the second separating component 107 is detachably connected with the second moving seat 105, which facilitates replacing the first separating component 130 and the second separating component 107, thereby effectively avoiding the failure of the disassembly tool caused by the wear of the first separating component 130 and the second separating component 107.

[0097] Specifically, the first separation component 130 is threadedly connected with the first moving seat 104, and the second separation component 107 is threadedly connected with the second moving seat 105. The first separation component 130 has a first groove (not shown in the figure) with an inner threaded structure (not shown in the figure), and the first moving seat 104 has a first protruding structure (not shown in the figure) with an outer threaded structure (not shown in the figure), which is threadedly connected with the inner threaded structure.

[0098] In another embodiment, the first separation component has a second groove with an outer threaded structure, and the first moving seat has a second protruding structure with an inner threaded structure, which is threadedly connected with the outer threaded structure.

[0099] In other embodiments, the first separation component can be snap-connected with the first moving seat, and the second separation component can be snap-connected with the second moving seat.

[0100] In this embodiment, the first separation component 130 and the second separation component 107 are both wedge-shaped.

[0101] It should be noted that the tapered tip of the wedge shape makes it easier for the separation component to be inserted between the adsorption layer 101 and the cooling layer 102, and the inclined surface design of the wedge shape gradually increases the separation force during the insertion process, thereby more effectively separating the adsorption layer 101 and the cooling layer 102.

[0102] In this embodiment, the first separation component 130 is made of plastic, and the second separation component 107 is made of plastic.

[0103] It should be noted that plastic has low hardness and good elasticity, so it can reduce the wear and tear of the adsorption layer 101 during separation.

[0104] In this embodiment, the plastic includes one or both of thermosetting plastic and thermoplastic.

[0105] In this embodiment, the first separation component 130 is arranged on the first support 117, and the second separation component 107 is arranged on the second support 119, which facilitates the first support 117 and the second support 119 to provide stable support for the first separation component 130 and the second separation component 107.

[0106] Reference Figure 2In the embodiment, the dismounting tool further comprises a buffer structure 128 arranged on the inner surface of the first moving seat 104 exposed by the first separating component 130 and the inner surface of the second moving seat 105 exposed by the second separating component 107, the inner surfaces of the first moving seat 104 and the second moving seat 105 being used for moving towards the adsorption layer 101 and the cooling layer 102.

[0107] It should be noted that when the first separating component 130 and the second separating component 107 separate the adsorption layer 101 and the cooling layer 102, the buffer structure 128 can protect the adsorption layer 101 when the adsorption layer 101 falls, thereby reducing the probability of damage to the adsorption layer 101.

[0108] In the application, the buffer structure 128 comprises a foam buffer layer or a silicone rubber buffer layer.

[0109] Specifically, the foam buffer layer is a buffer structure made of a foam material such as polyethylene foam, polypropylene foam, polyurethane foam, etc.

[0110] It should be noted that the foam buffer layer or the silicone rubber buffer layer both have good shock absorption performance, so that the adsorption layer 101 is protected from damage.

[0111] Although the application is disclosed as above, the application is not limited to this. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the application, so the protection scope of the application should be subject to the scope defined by the claims.

Claims

1. A disassembly fixture, characterized in that, Used to separate the adsorption layer and cooling layer that are bonded together in the chuck, including: Base; The first movable seat and the second movable seat are slidably disposed on the base, and the first movable seat and the second movable seat are disposed opposite to each other; A driving device, connected to both the first and second movable seats, is used to drive the relative movement of the first and second movable seats to adjust the distance between the first and second movable seats. The first separation component and the second separation component are respectively disposed on the first movable seat and the second movable seat. The first separation component and the second separation component are used to clamp the junction of the adsorption layer and the cooling layer, and are also used to insert between the adsorption layer and the cooling layer as the distance between the first movable seat and the second movable seat decreases, so as to separate the adsorption layer and the cooling layer.

2. The disassembly fixture as described in claim 1, characterized in that, The first movable seat and the second movable seat are configured to slide in cooperation with the base along a preset straight line direction; The first movable seat has a first linear motion component, and the second movable seat has a second linear motion component. The extension directions of the first linear motion component and the second linear motion component are both parallel to the preset linear direction, and the first linear motion component and the second linear motion component are arranged in parallel. The driving device is connected to both the first linear motion component and the second linear motion component, and the driving device is used to drive the first linear motion component and the second linear motion component to move synchronously in opposite directions in the preset linear direction.

3. The disassembly fixture as described in claim 2, characterized in that, The first linear motion component includes a first rack, and the second linear motion component includes a second rack, with the teeth of the first rack and the teeth of the second rack arranged opposite to each other. The driving device includes a gear that meshes with both the first rack and the second rack, and the gear is used to drive the first rack and the second rack to move in opposite directions through rotational motion.

4. The disassembly fixture as described in claim 3, characterized in that, The first rack and the first movable seat are integral structures, and the second rack and the second movable seat are integral structures.

5. The disassembly fixture as described in claim 3, characterized in that, Along the extending direction of the first rack, the first rack includes an adjacent first toothed region and a first smooth region. The first toothed region is located on the side of the first smooth region away from the first movable seat. The first toothed region has a first tooth-shaped structure. The first smooth region is used to limit the range of motion of the first rack. Along the extending direction of the second rack, the second rack includes an adjacent second toothed region and a second smooth region. The second toothed region is located on the side of the second smooth region away from the second movable seat. The second toothed region has a second toothed structure. The second smooth region is used to limit the range of motion of the second rack.

6. The disassembly fixture as described in claim 3, characterized in that, The drive device includes a manual drive device or an automatic drive device; When the driving device is the manual driving device, the driving device further includes: a rotating shaft, the first end of which is connected to the bottom surface of the gear; and a rotating mechanism connected to the second end of the rotating shaft. When the driving device is the automatic driving device, the driving device further includes a motor, and the output shaft of the motor is connected to the bottom surface of the gear.

7. The disassembly fixture as described in claim 6, characterized in that, When the driving device is the manual driving device, the rotating mechanism includes: a turntable, which is detachably connected to the second end of the rotating shaft; and a handle, one end of which is detachably connected to the turntable.

8. The disassembly fixture as described in claim 6, characterized in that, The base includes a first side and a second side arranged opposite to each other; The first movable seat and the second movable seat are slidably disposed on the first surface of the base, and the first rack, the second rack and the gear are all disposed on one side of the first surface of the base; When the driving device is the manual driving device, the rotating shaft passes through the base from one side of the second surface and is connected to the bottom surface of the gear; When the driving device is the automatic driving device, the output shaft of the motor passes through the base from one side of the second surface and is connected to the bottom surface of the gear.

9. The disassembly fixture as described in any one of claims 1 to 3, characterized in that, The first separating component and the second separating component are arranged opposite each other along the relative moving direction of the first movable seat and the second movable seat.

10. The disassembly fixture as described in any one of claims 1 to 3, characterized in that, The base is provided with a first guide protrusion and a second guide protrusion, and the extension direction of the first guide protrusion and the extension direction of the second guide protrusion are both parallel to a preset straight line direction. The first movable seat and the second movable seat are configured to slide in cooperation with the base along a preset straight direction. The bottom surface of the first movable seat has a first sliding groove, which is adapted to a first guide protrusion so that the first movable seat can move along the first guide protrusion. The bottom surface of the second movable seat has a second sliding groove, which is adapted to a second guide protrusion so that the second movable seat can move along the second guide protrusion.

11. The disassembly fixture as described in claim 10, characterized in that, The shape of the first guide protrusion includes an inverted trapezoid or a dovetail shape, and the shape of the second guide protrusion includes an inverted trapezoid or a dovetail shape.

12. The disassembly fixture as described in claim 1, characterized in that, The disassembly fixture further includes: a buffer structure, respectively disposed on the inner surface of the first movable seat exposed by the first separation component and the inner surface of the second movable seat exposed by the second separation component, wherein the inner surfaces of the first movable seat and the second movable seat are for facing the adsorption layer and the cooling layer.

13. The disassembly fixture as described in claim 12, characterized in that, The buffer structure includes a foam buffer layer or a silicone rubber buffer layer.

14. The disassembly fixture as described in claim 1, characterized in that, The first separating component is detachably connected to the first movable base, and the second separating component is detachably connected to the second movable base.

15. The disassembly fixture as described in claim 1, characterized in that, Both the first separating component and the second separating component have a wedge shape.

16. The disassembly fixture as described in claim 1, characterized in that, The first separating component is made of plastic, and the second separating component is made of plastic.

17. The disassembly fixture as described in claim 1, characterized in that, The first movable base includes a first base and a first bracket disposed on the first base, wherein the first base is slidably disposed on the base; The second movable base includes a second base and a second bracket disposed on the second base, wherein the second base is slidably disposed on the base; The first separation component is disposed on the first bracket, and the second separation component is disposed on the second bracket.

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