A displacement device

Abstract

The application provides a displacement device, and relates to the technical field of semiconductor device manufacturing. The displacement device comprises a mover, a stator surrounding the mover, a first driving mechanism for driving the mover to move relative to the stator along a first direction, and a second driving mechanism for driving the mover to move relative to the stator along a second direction. The first driving mechanism and the second driving mechanism both comprise a first shell, a second shell sleeved outside the first shell, a third driving unit for driving the first shell to move relative to the second shell, a first decoupling element directly or indirectly connected to one end of the first shell, and a second decoupling element directly or indirectly connected to the other end of the first shell.

Description

TECHNICAL FIELD

[0001] The present specification relates to the field of semiconductor device manufacturing, and in particular, to a displacement device. BACKGROUND

[0002] The displacement device can achieve displacement along a first direction and / or along a second direction in a horizontal plane, and achieve rotation around a third direction based on the displacement along the first direction and the displacement along the second direction. The displacement device can achieve the above displacement through a first driving mechanism, a second driving mechanism, and a third driving mechanism. The first driving mechanism, the second driving mechanism, and the third driving mechanism of the displacement device can adopt a Lorentz force-based planar voice coil motor, which can achieve high servo stiffness. However, the planar voice coil motor has a large amount of heat, relies on water medium cooling, and the jitter error in the control process cannot be further reduced. With the requirement of precision measurement technology on the corresponding process being more and more fine, the repeatability and the jitter error of the device are more and more likely to affect the accurate recognition ability and the judgment ability of the image recognition system on the pattern and the mark. SUMMARY

[0003] One or more embodiments of the present specification provide a displacement device, comprising: a mover, a stator surrounding the mover, a first driving mechanism driving the mover to move relative to the stator along a first direction, and a second driving mechanism driving the mover to move relative to the stator along a second direction; the first driving mechanism and the second driving mechanism each comprise: a first shell, a second shell sleeved outside the first shell, a third driving unit driving the first shell to move relative to the second shell, a first decoupling element directly or indirectly connected to one end of the first shell, and a second decoupling element directly or indirectly connected to the other end of the first shell; the first shell of the first driving mechanism is configured to be able to translate along a positive direction or a negative direction of the first direction, the first decoupling element and the second decoupling element of the first driving mechanism are configured to be able to synchronously translate along the positive direction or the negative direction of the first direction based on the first shell of the first driving mechanism; the first shell of the second driving mechanism is configured to be able to translate along a positive direction or a negative direction of the second direction, the first decoupling element and the second decoupling element of the second driving mechanism are configured to be able to synchronously translate along the positive direction or the negative direction of the second direction based on the first shell of the second driving mechanism.

[0004] In some embodiments, the displacement device further comprises a base plate, a third driving mechanism driving movement of the mover or the entirety of the mover and the stator relative to the base plate along a third direction, and a first flexible guiding mechanism connecting the base plate and the stator; the third direction is perpendicular to the first direction and the second direction; the first flexible guiding mechanism is configured to be flexible in the third direction and rigid in the first direction and the second direction.

[0005] In some embodiments, the second housing is connected with the stator, or the second housing is connected with the base plate.

[0006] In some embodiments, the first driving mechanism and the second driving mechanism each further comprise a first piezoelectric driving unit and a second piezoelectric driving unit arranged inside the first housing, and a pre-pressing structure connected with the first piezoelectric driving unit and the second piezoelectric driving unit and providing a pre-pressing force; the first decoupling member and the second decoupling member are connected with the pre-pressing structure, and the first decoupling member is located at the first piezoelectric driving unit and the second decoupling member is located at the second piezoelectric driving unit.

[0007] In some embodiments, the pre-pressing structure comprises a first pre-pressing structure connected with the first piezoelectric driving unit, a second pre-pressing structure connected with the second piezoelectric driving unit, and one or more pre-pressing connecting structures connecting the first pre-pressing structure and the second pre-pressing structure; the first piezoelectric driving unit and the second piezoelectric driving unit are arranged between the first pre-pressing structure and the second pre-pressing structure, and the first pre-pressing structure and the second pre-pressing structure are configured to have a tendency of moving towards each other to provide a pre-pressing force to the first piezoelectric driving unit and the second piezoelectric driving unit.

[0008] In some embodiments, one of the first pre-pressing structure and the first piezoelectric driving unit provides a first convex camber surface, and the other one of the first pre-pressing structure and the first piezoelectric driving unit provides a first concave camber surface or a first flat surface matching the first convex camber surface; one of the second pre-pressing structure and the second piezoelectric driving unit provides a second convex camber surface, and the other one of the second pre-pressing structure and the second piezoelectric driving unit provides a second concave camber surface or a second flat surface matching the second convex camber surface.

[0009] In some embodiments, the first housing has a first hole for accommodating the first piezoelectric driving unit and a second hole for accommodating the second piezoelectric driving unit, the first hole and the second hole are opposite to each other; a gap is formed between the first hole and the second hole; one of the gap and the first piezoelectric driving unit provides a third convex arc surface, the other of the gap and the first piezoelectric driving unit provides a third concave arc surface or a third plane matched with the third convex arc surface; one of the gap and the second piezoelectric driving unit provides a fourth convex arc surface, the other of the gap and the second piezoelectric driving unit provides a fourth concave arc surface or a fourth plane matched with the fourth convex arc surface.

[0010] In some embodiments, the driving center line of the first piezoelectric driving unit, the driving center line of the second piezoelectric driving unit and the driving center line of the third driving unit coincide.

[0011] In some embodiments, the third driving mechanism comprises a third housing, a fourth housing sleeved outside the third housing, a sixth driving unit driving the third housing to move relative to the fourth housing, and a third decoupling member; the third decoupling member is directly or indirectly connected with the third housing and at least a part of the third decoupling member protrudes from the third housing; the third decoupling member is configured to be flexible in the first direction and the second direction.

[0012] In some embodiments, the third driving mechanism further comprises a fourth piezoelectric driving unit and a fifth piezoelectric driving unit arranged inside the third housing, and a vertical pre-pressing structure connected with the fourth piezoelectric driving unit and the fifth piezoelectric driving unit respectively and providing a pre-pressing force; the third decoupling member is connected with the vertical pre-pressing structure.

[0013] In some embodiments, the stator has a first accommodating space for accommodating the first driving mechanism and a second accommodating space for accommodating the second driving mechanism; the rotor has a first driving connection part and a second driving connection part, a part of the first driving connection part is arranged in the first accommodating space, and a part of the second driving connection part is arranged in the second accommodating space; the first decoupling member and / or the second decoupling member of the first driving mechanism is connected with the first driving connection part, and the first decoupling member and / or the second decoupling member of the second driving mechanism is connected with the second driving connection part.

[0014] In some embodiments, the first driving connection part comprises two first driving connection members, the first driving mechanism is arranged between the two first driving connection members, and the first decoupling member and the second decoupling member of the first driving mechanism are respectively connected to the two first driving connection members; the second driving connection part comprises two second driving connection members, the second driving mechanism is arranged between the two second driving connection members, and the first decoupling member and the second decoupling member of the second driving mechanism are respectively connected to the two second driving connection members.

[0015] In some embodiments, the first driving mechanism or the second driving mechanism is configured to translate the first housing to drive the two first driving connection members to translate respectively based on the first decoupling member and the second decoupling member or to drive the two second driving connection members to translate respectively based on the first decoupling member and the second decoupling member.

[0016] In some embodiments, a second flexible guiding mechanism is further arranged between the mover and the stator; the second flexible guiding mechanism is configured to have rigidity in the third direction and flexibility in the first direction and the second direction.

[0017] In some embodiments, the first decoupling member and the second decoupling member of the first driving mechanism are connected to the mover and are configured to be able to deform based on the movement of the mover in the second direction; the first decoupling member and the second decoupling member of the second driving mechanism are connected to the mover and are configured to be able to deform based on the movement of the mover in the first direction.

[0018] The beneficial effects that the embodiments of the present specification can bring include but are not limited to: (1) a displacement device suitable for driving based on a piezoelectric driving unit is provided, which can take advantage of the small volume and large thrust of the piezoelectric driving unit, and the characteristics of large self-locking holding force, high repeat positioning accuracy and extremely small static jitter of the piezoelectric driving unit; (2) displacement in the first direction and / or the second direction and rotation around the third direction can be realized, and further displacement in the third direction and rotation around the first direction and / or the second direction can be realized; (3) since the piezoelectric driving unit is used, the working current is extremely small, and the heat generation is very small, so there is no need to arrange a special water medium cooling measure, which is helpful to avoid the jitter error influence brought by the cooling water flow; (4) the driving mechanism can translate in the positive direction or the negative direction of its corresponding direction, and the properties and sizes of the force provided by the driving mechanism when translating in the positive direction or the negative direction are consistent or basically consistent, so as to facilitate accurate control of displacement; (5) the second housing of the first driving mechanism and the second driving mechanism can be connected with the stator or the base plate, providing a variety of applicable arrangement modes; (6) the arrangement of the first piezoelectric driving unit and the second piezoelectric driving unit provides a different displacement stroke from the third driving unit, which facilitates the equipment to quickly reach the approximate position and then make accurate displacement adjustment; (7) the symmetric arrangement of the first piezoelectric driving unit and the second piezoelectric driving unit, and the working mode of one extending and the other retracting can provide the properties of the force in the positive direction and the negative direction of its corresponding direction as the properties of the force of the piezoelectric driving unit extending, and can provide equal or approximately equal thrust, which helps to improve the homogeneity of the force provided in the positive direction and the negative direction of its driving direction; (8) the same pre-pressing structure provides pre-pressing force to the two piezoelectric driving units, and the pre-pressing force is not output as thrust, which ensures the homogeneity of the force provided in the positive direction and the negative direction of the driving direction, and there is no need to arrange independent pre-pressing structures for each piezoelectric driving mechanism, nor to adjust the pre-pressing force of the two pre-pressing structures separately; (9) the pre-pressing structure does not deform or almost does not deform in the working state, so that the pre-pressing force provided by the pre-pressing structure to the piezoelectric driving unit remains consistent, improving the working accuracy of the piezoelectric driving unit; (10) the first decoupling piece and the second decoupling piece realize the decoupling of the piezoelectric driving mechanism when it is stressed in the non-working direction, avoiding mutual interference when the two piezoelectric driving mechanisms in different directions work at the same time; (11) the structure design of the first housing of the piezoelectric driving mechanism allows two piezoelectric driving units to be accommodated, and provides fixation and support for the two piezoelectric driving units;(12) the driving center line of the first piezoelectric driving unit, the driving center line of the second piezoelectric driving unit and the driving center line of the third driving unit coincide, without providing additional radial connectors for connecting the first piezoelectric driving unit and the third driving unit or connecting the second piezoelectric driving unit and the third driving unit, having the characteristics of high precision in the corresponding driving direction of the driving mechanism, and at the same time, since the second shell is sleeved outside the first shell, the overall length in the axial direction of the first direction is shorter; (13) the cooperation of the first convex arc surface and the first concave arc surface / first plane, and the cooperation of the second convex arc surface and the second concave arc surface / second plane facilitate the matching point between the piezoelectric driving unit and the pre-pressing structure to be located at the center position of the piezoelectric driving unit; (14) the cooperation of the third convex arc surface and the third concave arc surface / third plane, and the cooperation of the fourth convex arc surface and the fourth concave arc surface / fourth plane facilitate the matching point between the piezoelectric driving unit and the first shell to be located at the center position of the piezoelectric driving unit. It should be noted that different embodiments may have different beneficial effects, and in different embodiments, the beneficial effects that can be produced can be any one or a combination of the above, or any other beneficial effect that can be obtained. BRIEF DESCRIPTION OF DRAWINGS

[0019] The present specification will be further illustrated in the manner of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same reference numbers in the drawings represent the same structures or steps.

[0020] Figure 1 is a schematic diagram of a displacement device according to some embodiments of the present specification.

[0021] Figure 2 is a schematic diagram of a mover and a stator of a displacement device according to some embodiments of the present specification.

[0022] Figure 3 is a schematic diagram of a substrate and a third driving mechanism of a displacement device according to some embodiments of the present specification.

[0023] Figure 4 is a schematic diagram of a substrate and a first flexible guide mechanism of a displacement device according to some embodiments of the present specification.

[0024] Figure 5 is a schematic diagram of a displacement device according to some other embodiments of the present specification.

[0025] Figure 6 is a schematic diagram of a substrate of a displacement device according to some other embodiments of the present specification.

[0026] Figure 7 is a schematic diagram of a displacement device according to some other embodiments of the present specification.

[0027] Figure 8 is a schematic view of a substrate of a displacement device according to yet other embodiments of the present specification.

[0028] Figure 9 is a schematic view of a first drive mechanism or a second drive mechanism of a displacement device according to some embodiments of the present specification.

[0029] Figure 10 is a cross-sectional schematic view of a first drive mechanism or a second drive mechanism of a displacement device according to other embodiments of the present specification.

[0030] Figures 11 to 14 is a cross-sectional schematic view of a first drive mechanism or a second drive mechanism of a displacement device according to other embodiments of the present specification.

[0031] Figure 15 is a schematic view of a third drive mechanism of a displacement device according to some embodiments of the present specification.

[0032] Figure 16 is a cross-sectional schematic view of a third drive mechanism of a displacement device according to some embodiments of the present specification.

[0033] Figure 17 is a cross-sectional schematic view of a third drive mechanism of a displacement device according to other embodiments of the present specification.

[0034] Figures 18 to 19 is a cross-sectional schematic view of a third drive mechanism of a displacement device according to other embodiments of the present specification.

[0035] Marked in the figure: 100 mover; 101 first driving connection part; 1011 first driving connecting piece; 102 second driving connection part; 1021 second driving connecting piece; 200 stator; 300 base plate; 1 first driving mechanism; 11 first shell; 111 first hole; 112 second hole; 113 interval part; 1131 third protruding member; 1132 fourth protruding member; 12 second shell; 131 first piezoelectric driving unit; 132 second piezoelectric driving unit; 133 third driving unit; 141 first decoupling piece; 142 second decoupling piece; 15 pre-pressing structure; 151 first pre-pressing structure; 1511 first protruding member; 152 second pre-pressing structure; 1521 second protruding member; 153 pre-pressing connecting structure; 2 second driving mechanism; 3 third driving mechanism; 31 third shell; 32 fourth shell; 331 fourth piezoelectric driving unit; 332 fifth piezoelectric driving unit; 333 sixth driving unit; 34 third decoupling piece; 35 vertical pre-pressing structure; 351 vertical first pre-pressing structure; 352 vertical second pre-pressing structure; 353 vertical pre-pressing connecting structure; 361 flexible guiding structure; 362 flexible guiding spring; 4 first flexible guiding mechanism; 5 second flexible guiding mechanism. DETAILED DESCRIPTION

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present specification, the embodiments will be described in detail below with reference to the drawings. Obviously, the following description is some examples or embodiments of the present specification, and for those skilled in the art, the technical solutions or means disclosed in the present specification can also be applied to other scenarios without creative labor.

[0037] It should be understood that the "system", "device", "equipment", "part" and / or "unit" and / or "module" used in the present specification is a method for distinguishing different components, elements, parts, parts or assemblies at different levels. However, if other words can achieve the same purpose, the words can be replaced by other expressions.

[0038] Unless otherwise specified, the technical terms of components, elements, etc. described in the present specification are not specific to the singular, and can also include the plural. Generally speaking, the terms "include", "contain" and the like only indicate the inclusion of the steps, elements or components explicitly identified, and these steps, elements and components do not constitute an exclusive list, and the method or device described can also include other steps or components.

[0039] In the description of the present specification, it is to be understood that the orientation description, such as the orientation or position relationship indicated by the upper, lower, front, rear, left, right and the like, is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application. In the description of the present specification, unless otherwise explicitly limited, the words of setting, installing, connecting and the like should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present specification according to the specific content of the technical scheme.

[0040] The displacement device can achieve displacement along a first direction (e.g., first direction X) and / or along a second direction (e.g., second direction Y) in a horizontal plane, and achieve rotation around a third direction (e.g., third direction Z) based on the displacement along the first direction and the displacement along the second direction. The displacement device can include a mover, a stator, and a first driving mechanism and a second driving mechanism driving the mover to move relative to the stator along the first direction and the second direction. The displacement device can further achieve displacement along the third direction in a three-dimensional space, and achieve rotation around the first direction and / or the second direction based on the displacement along the third direction. The displacement device can further include a base plate, and a third driving mechanism driving the whole of the mover or the mover and the stator to move relative to the base plate along the third direction.

[0041] The first driving mechanism, the second driving mechanism and the third driving mechanism of the displacement device can adopt a planar voice coil motor based on Lorentz force, which can achieve high servo stiffness. However, the planar voice coil motor has a large amount of heat, relies on water medium cooling, and the jitter error in the control process cannot be further reduced. With the requirement of precision measurement technology on the corresponding process being more and more fine, the repeatability and the jitter error of the device are more and more likely to affect the pattern and the identification accuracy and judgment ability of the image recognition system.

[0042] The first driving mechanism, the second driving mechanism and the third driving mechanism of the displacement device can also adopt a piezoelectric driving unit, which has small volume, large thrust, large self-locking holding force and extremely small dynamic jitter. However, due to the small deformation of the piezoelectric driving unit (such as a piezoelectric stack or a piezoelectric ceramic component after pre-stress packaging), in order to eliminate the gap between the stator and the mover and / or to eliminate the gap between the piezoelectric ceramic sheets, a pre-pressing structure is needed to apply a pre-pressing force to the piezoelectric ceramic. Since the effective output force of the piezoelectric driving unit is usually only the outward thrust generated by the volume expansion of the piezoelectric driving unit, and does not include the inward pull generated by the volume contraction of the piezoelectric driving unit, the positive output force of the piezoelectric driving device is provided by the outward thrust of the piezoelectric driving unit, and the negative output force is provided by the inward pull generated by the elastic deformation contraction of the corresponding pre-pressing structure of the piezoelectric driving unit. The properties of the two output forces are different, resulting in different displacements generated in the positive direction and the negative direction under the same conditions, poor displacement linearity, long response time delay of the control system, narrow bandwidth and low servo precision.

[0043] In addition, in some related embodiments, in order to save space in the third direction, the mover of the displacement device can be in or substantially in the same plane as the stator. Therefore, when the first driving mechanism drives the mover to move towards the second driving mechanism, it may have an impact on the driving work of the second driving mechanism.

[0044] Therefore, in one or more embodiments of the present specification, a displacement device is provided, in which the first housing in the first driving mechanism or the second driving mechanism can be translated in the positive direction or the negative direction of a certain direction, and the mover has balanced driving force in the positive direction and the negative direction through the output of the synchronously moving first decoupling piece and the second decoupling piece. In addition, the displacement device provided in one or more embodiments of the present specification realizes decoupling through the first decoupling piece and the second decoupling piece, avoiding the driving interference of the first driving mechanism and the second driving mechanism.

[0045] Figure 1 is a schematic view of a displacement device according to some embodiments of the present specification, Figure 2 is a schematic view of a mover and a stator of a displacement device according to some embodiments of the present specification, Figure 3 is a schematic view of a substrate and a third driving mechanism of a displacement device according to some embodiments of the present specification, Figure 4 is a schematic view of a substrate and a first flexible guide mechanism of a displacement device according to some embodiments of the present specification. See Figures 1 to 4As shown, in one or more embodiments of the present disclosure, the displacement device can include a mover 100, a stator 200 surrounding the mover 100, a first driving mechanism 1 driving the mover 100 to move relative to the stator 200 along a first direction X, and a second driving mechanism 2 driving the mover 100 to move relative to the stator 200 along a second direction Y. In some embodiments, the mover 100 can be rectangular, and the stator 200 can be a rectangular frame structure. In other embodiments, the mover 100 can be circular, and the stator 200 can be a circular ring structure. In some embodiments, the first driving mechanism 1 is arranged between the mover 100 and the stator 200, and the number of the first driving mechanisms 1 can be two, which are respectively located on two sides of the mover 100 (e.g., the upper and lower sides in Figure 1 some embodiments). In some embodiments, the second driving mechanism 2 is arranged between the mover 100 and the stator 200, and the number of the second driving mechanisms 2 can be two, which are respectively located on the other two sides of the mover 100 (e.g., the left and right sides in Figure 1 some embodiments).

[0046] In some embodiments, a second flexible guide mechanism 5 is further arranged between the mover 100 and the stator 200, and the second flexible guide mechanism 5 is configured to have rigidity in a third direction Z and flexibility in the first direction X and the second direction Y. The second flexible guide mechanism 5 is used to provide translational guidance of the mover 100 relative to the stator 200 in the first direction X, translational guidance in the second direction Y, and rotational guidance around the third direction Z.

[0047] In some embodiments, the mover 100 and the stator 200 can be cut from a whole plate structure. As shown in Figure 2 , the corner of the plate structure is provided with a slot in the third direction Z in the shape of “[”, and the slots in the shape of “[” are arranged in cross (as shown by the dashed lines in Figure 2 ). The inside of the slots forms the mover 100, and the outside of the slots forms the stator 200. In this embodiment, there is a gap between two adjacent slots, and the second flexible guide mechanism 5 is formed at the gap. In this embodiment, the second flexible guide mechanism 5 is in the shape of “L” (e.g., the second flexible guide spring in the shape of “L” is formed).

[0048] In some embodiments, the mover 100 and the stator 200 are both rectangular, and four second flexible guide springs in the shape of “L” are formed at the four corners of the mover 100. The four second flexible guide springs are arranged in mirror symmetry relative to the first direction X and also in mirror symmetry relative to the second direction Y.

[0049] In some embodiments, as shown in Figures 9 to 14As shown, the first driving mechanism 1 and the second driving mechanism 2 each comprises a first housing 11, a second housing 12 sleeved outside the first housing 11, a third driving unit 133 driving the first housing 11 to move relative to the second housing 12, a first decoupling piece 141 directly or indirectly connected with one end of the first housing 11, and a second decoupling piece 142 directly or indirectly connected with the other end of the first housing 11.

[0050] In some embodiments, the first housing 11 of the first driving mechanism 1 is configured to be able to translate along the positive direction or the negative direction of the first direction X, and the first decoupling piece 141 and the second decoupling piece 142 of the first driving mechanism 1 are configured to be able to synchronously translate along the positive direction or the negative direction of the first direction X based on the first housing 11 of the first driving mechanism 1.

[0051] In some embodiments, the first housing 11 of the second driving mechanism 2 is configured to be able to translate along the positive direction or the negative direction of the second direction Y, and the first decoupling piece 141 and the second decoupling piece 142 of the second driving mechanism 2 are configured to be able to synchronously translate along the positive direction or the negative direction of the second direction Y based on the first housing 11 of the second driving mechanism 2.

[0052] In some embodiments, referring to Figure 9 As shown, the second housing 12 can be a cylindrical structure with both ends open, and the first housing 11 can translate inside the cylindrical structure. In some embodiments, the third driving unit 133 can be fixed to the second housing 12 and drive the first housing 11 to translate relative to the second housing 12. In some embodiments, the third driving unit 133 can adopt a piezoelectric driving unit, such as a inchworm piezoelectric driving unit, which has balanced driving force in the positive direction and the negative direction. In other embodiments, the third driving unit 133 can also adopt other types of driving units with balanced driving force in the positive direction and the negative direction.

[0053] In some embodiments, the first decoupling piece 141 and the second decoupling piece 142 are respectively fixedly connected with both ends of the first housing 11 and respectively protrude from the openings of both ends of the second housing 12. When the first housing 11 moves, the first decoupling piece 141 and the second decoupling piece 142 follow the first housing 11 to move, so as to realize the synchronous movement of the first decoupling piece 141 and the second decoupling piece 142, such as synchronously translating along the positive direction of the first direction X, synchronously translating along the negative direction of the first direction X, synchronously translating along the positive direction of the second direction Y, and synchronously translating along the negative direction of the second direction Y.

[0054] In some embodiments, the first decoupling member 141 and the second decoupling member 142 of the first driving mechanism 1 are configured to be rigid in the first direction X so as to transmit power in the first direction X. In some embodiments, the first decoupling member 141 and the second decoupling member 142 of the first driving mechanism 1 are configured to be flexible in the second direction Y and the third direction Z, and are able to adaptively deform when the first driving mechanism 1 is subjected to a force from the second direction Y and / or the third direction Z (e.g. a force generated on the first driving mechanism 1 when the second driving mechanism 2 is working) so as to avoid driving interference. The first decoupling member 141 and the second decoupling member 142 have a large follow-up stroke, which has the ability to follow the stroke of the mover 100 and / or the stator 200 in the third direction Z while ensuring decoupling in the first direction X or the second direction Y.

[0055] In some embodiments, the first decoupling member 141 and the second decoupling member 142 of the second driving mechanism 2 are configured to be rigid in the second direction Y so as to transmit power in the second direction Y. In some embodiments, the first decoupling member 141 and the second decoupling member 142 of the second driving mechanism 2 are configured to be flexible in the first direction X and the third direction Z, and are able to adaptively deform when the second driving mechanism 2 is subjected to a force from the first direction X and / or the third direction Z (e.g. a force generated on the second driving mechanism 2 when the first driving mechanism 1 is working) so as to avoid driving interference.

[0056] Exemplarily, the first decoupling member 141 and the second decoupling member 142 of the first driving mechanism 1 and the second driving mechanism 2 can include a first fixed part, a second fixed part, and a flexible part arranged between the first fixed part and the second fixed part. The first fixed part is fixedly connected with the first housing 11, and the second fixed part is fixedly connected with the driven member (e.g. the mover 100 or the stator 200). The flexible part is used to provide rigidity in the axial direction and flexibility in the radial direction. In some embodiments, the flexible part can have a rod-like structure.

[0057] Exemplarily, referring to Figure 9As shown, the first decoupling piece 141 and the second decoupling piece 142 of the first driving mechanism 1 and the second driving mechanism 2 can include a first fixed part 1401, a second fixed part 1402, an intermediate part 1403, a first flexible part 1404 connecting the first fixed part 1401 and the intermediate part 1403, and a second flexible part 1405 connecting the second fixed part 1402 and the intermediate part 1403. The first fixed part 1401 is fixedly connected with the first housing 11, and the second fixed part 1402 is fixedly connected with the driven member (e.g., the mover 100 or the stator 200). The intermediate part 1403 is used to provide a certain rigidity, separate the longer flexible part into the first flexible part 1404 and the second flexible part 1405, and avoid the longer flexible part from being broken or plastically deformed. The first flexible part 1404 and the second flexible part 1405 are used to provide rigidity in the axial direction and flexibility in the radial direction. In some embodiments, the first flexible part 1404 and the second flexible part 1405 can have a rod-like structure. Compared with a single flexible part, the combination of the first flexible part 1404 and the second flexible part 1405 can provide greater flexibility or a greater deformation range.

[0058] In some embodiments, the second housing 12 of the first driving mechanism 1 can be fixedly connected with the stator 200, and the first decoupling member 141 and the second decoupling member 142 of the first driving mechanism 1 can be fixedly connected with the mover 100, so as to drive the mover 100 to move based on the stator 200. Similarly, the second housing 12 of the second driving mechanism 2 can be fixedly connected with the stator 200, and the first decoupling member 141 and the second decoupling member 142 of the second driving mechanism 2 can be fixedly connected with the mover 100, so as to drive the mover 100 to move based on the stator 200. In other embodiments, the second housing 12 of the first driving mechanism 1 can be fixedly connected with the mover 100, and the first decoupling member 141 and the second decoupling member 142 of the first driving mechanism 1 can be fixedly connected with the stator 200, so as to drive the stator 200 to move based on the mover 100. Similarly, the second housing 12 of the second driving mechanism 2 can be fixedly connected with the mover 100, and the first decoupling member 141 and the second decoupling member 142 of the second driving mechanism 2 can be fixedly connected with the stator 200, so as to drive the stator 200 to move based on the mover 100. In one or more of the above embodiments, the first driving mechanism 1 and the second driving mechanism 2 are used to realize the relative movement between the mover 100 and the stator 200, and the driving mechanism (for example, the first driving mechanism 1 and the second driving mechanism 2) can be arranged on the mover 100 or the stator 200, and has similar driving effect to drive the driven member. In some use scenarios, the position (or coordinate) of the stator 200 in the first direction X and the second direction Y is unchanged, and the mover 100 can move relative to the stator 200; in other use scenarios, the position (or coordinate) of the mover 100 in the first direction X and the second direction Y is unchanged, and the stator 200 can move relative to the mover 100 to drive the driven member (in this use scenario, the stator 200 wrapped on the outside actually realizes the function of the mover).

[0059] In some embodiments, the first decoupling member 141 and the second decoupling member 142 of the first driving mechanism 1 can have the same structure and size, or different structure and size. In some embodiments, the first decoupling member 141 and the second decoupling member 142 of the second driving mechanism 2 can have the same structure and size, or different structure and size.

[0060] In some embodiments, the first decoupling element 141 and the second decoupling element 142 of the first driving mechanism 1 are arranged along the first direction X and mirror-symmetrically relative to the second direction Y. In some embodiments, the first decoupling element 141 and the second decoupling element 142 of the second driving mechanism 2 are arranged along the second direction Y and mirror-symmetrically relative to the first direction X. In some use scenarios, during the driving movement of the first driving mechanism 1 or the second driving mechanism 2, a first state in which the first decoupling element 141 is under pressure and the second decoupling element 142 is under tension, or a second state in which the first decoupling element 141 is under tension and the second decoupling element 142 is under pressure, can occur. With the reciprocating driving of the first driving mechanism 1 or the second driving mechanism 2, the first state and the second state also repeatedly and alternately occur. Based on the above symmetric arrangement of the first decoupling element 141 and the second decoupling element 142, the force form and force state of the driving mechanism (for example, the first driving mechanism 1 or the second driving mechanism 2) in the reciprocating movement can be almost symmetrically consistent, which is beneficial to ensure the driving positioning effect and repeatability of the driving mechanism.

[0061] In some use scenarios, both sides of the two first driving mechanisms 1 driving the mover 100 move along the positive direction of the first direction X or move along the negative direction of the first direction X, to realize translation in the first direction X. Both sides of the two second driving mechanisms 2 driving the mover 100 move along the positive direction of the second direction Y or move along the negative direction of the second direction Y, to realize translation in the second direction Y. Both sides of the two first driving mechanisms 1 driving the mover 100 move along the positive direction and the negative direction of the first direction X respectively, to realize rotation around the third direction Z. Both sides of the two second driving mechanisms 2 driving the mover 100 move along the positive direction and the negative direction of the second direction Y respectively, to also realize rotation around the third direction Z. Wherein, the first direction X intersects the second direction Y, for example, the first direction X is perpendicular to the second direction Y, and the third direction Z is perpendicular to the first direction X and the second direction Y. Therefore, the displacement device can form a three-axis displacement device based on the mover 100 and the stator 200, and can realize XYRz movement.

[0062] In one or more embodiments of the present specification, the displacement device further comprises a third driving mechanism 3 for moving the base plate 300, the driving mover 100, or the whole of the mover 100 and the stator 200 along the third direction Z relative to the base plate 300, and a first flexible guide mechanism 4 connecting the base plate 300 and the stator 200.

[0063] In some embodiments, the number of third driving mechanisms 3 is multiple, for example, three or four and more than four. In some use scenarios, multiple third driving mechanisms 3 are synchronously raised or lowered to realize the translation of the mover 100 in the third direction Z. Several third driving mechanisms 3 on one side are raised, and several third driving mechanisms 3 on the other side are lowered to realize the rotation of the mover 100 around the first direction X and / or the rotation of the mover 100 around the second direction Y. Therefore, the displacement device can form a six-axis displacement device based on the mover 100, the stator 200 and the substrate 300, which can realize XYRz motion and ZRxRy motion.

[0064] In some embodiments, the substrate 300 can include multiple grooves for accommodating the third driving mechanisms 3. For example, the substrate 300 includes four grooves for accommodating the third driving mechanisms 3 at the four corners of the substrate 300.

[0065] In some embodiments, the first flexible guiding mechanism 4 is configured to have flexibility in the third direction Z and rigidity in the first direction X and the second direction Y, and to guide the displacement of the mover 100 in the third direction, the rotation of the mover 100 around the first direction X and / or the rotation of the mover 100 around the second direction Y.

[0066] For example, the first flexible guiding mechanism 4 can include a first flexible guiding spring parallel to the first direction X and the second direction Y. Both ends of the first flexible guiding spring can be fixedly connected with the substrate 300, and the middle part of the first flexible guiding spring can be fixedly connected with the mover 100 or the stator 200.

[0067] In some embodiments, several third driving mechanisms 3 can be arranged around the periphery of several first flexible guiding mechanisms 4. In other embodiments, several first flexible guiding mechanisms 4 can be arranged around the periphery of several third driving mechanisms 3. In some embodiments, each first flexible guiding mechanism 4 is arranged close to a third driving mechanism 3.

[0068] In some embodiments, the third driving mechanism 3 is used to drive the whole of the mover 100 and the stator 200 to move relative to the substrate 300 in the third direction Z. For example, as shown in FIG. 1, the third driving mechanism 3 can be connected with the stator 200 to drive the whole of the mover 100 and the stator 200 to move relative to the substrate 300 in the third direction Z. Figures 1 to 4 For example, as shown in FIG. 1, the third driving mechanism 3 can be connected with the stator 200 to drive the whole of the mover 100 and the stator 200 to move relative to the substrate 300 in the third direction Z. Figures 5 to 8 For example, as shown in FIG. 1, the third driving mechanism 3 can be connected with the stator 200 to drive the whole of the mover 100 and the stator 200 to move relative to the substrate 300 in the third direction Z. Figures 5 to 8As shown, in the case that the stator 200 is fixedly arranged, the third driving mechanism 3 can also be connected with the mover 100 to drive the mover 100 to move along the third direction Z relative to the base plate 300.

[0069] In some embodiments, the second housing 12 of the first driving mechanism 1 can be fixedly connected with the base plate 300, and the first decoupling piece 141 and the second decoupling piece 142 of the first driving mechanism 1 can be fixedly connected with the mover 100 to drive the mover 100 to move based on the base plate 300. Similarly, the second housing 12 of the second driving mechanism 2 can be fixedly connected with the base plate 300, and the first decoupling piece 141 and the second decoupling piece 142 of the second driving mechanism 2 can be fixedly connected with the mover 100 to drive the mover 100 to move based on the base plate 300.

[0070] In one or more embodiments of the present specification, the first driving mechanism 1 and the second driving mechanism 2 each further comprise: a first piezoelectric driving unit 131 and a second piezoelectric driving unit 132 arranged in the interior of the first housing 11, and a pre-pressing structure 15 connected with the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 and providing a pre-pressing force. The first piezoelectric driving unit 131, the second piezoelectric driving unit 132 and the third driving unit 133 form a combined driving. In some use scenarios, the combined driving can meet some specific use requirements, for example, requirements for a displacement device to have a millimeter-level stroke displacement, while being able to meet the use requirements of a micron-level scanning function. In some embodiments, the third driving unit 133 can achieve a millimeter-level stroke displacement, and the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 can achieve a micron-level stroke displacement to meet the scanning function and the like. The combined driving formed by combining two driving units with different strokes can achieve more functional requirements of the displacement device.

[0071] In some embodiments, the first decoupling piece 141 and the second decoupling piece 142 are each connected with the pre-pressing structure 15, the first decoupling piece 141 is located at the first piezoelectric driving unit 131, and the second decoupling piece 142 is located at the second piezoelectric driving unit 132. The first decoupling piece 141 and the second decoupling piece 142 are indirectly connected with the first housing 11 through the pre-pressing structure 15 and the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132. When the whole of the first housing 11, the first piezoelectric driving unit 131, the second piezoelectric driving unit 132 and the pre-pressing structure 15 is translated under the action of the third driving unit 133, the first decoupling piece 141, the second decoupling piece 142 and the pre-pressing structure 15 are also synchronously translated.

[0072] In some embodiments, the pre-press structure 15 comprises a first pre-press structure 151 connected with the first piezoelectric driving unit 131, a second pre-press structure 152 connected with the second piezoelectric driving unit 132, and one or more pre-press connecting structures 153 connecting the first pre-press structure 151 and the second pre-press structure 152.

[0073] In some embodiments, the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 are disposed between the first pre-press structure 151 and the second pre-press structure 152, and the first pre-press structure 151 and the second pre-press structure 152 are configured to have a tendency of moving towards each other to provide pre-press force to the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132.

[0074] In some embodiments, the first pre-press structure 151 and the second pre-press structure 152 can have a tendency of moving towards each other based on elastic force. In some embodiments, the first pre-press structure 151 and the second pre-press structure 152 are integrally connected with the pre-press connecting structure 153 respectively, and the elastic force is provided based on elastic deformation of the pre-press connecting structure 153 to make the first pre-press structure 151 and the second pre-press structure 152 have a tendency of moving towards each other.

[0075] In some embodiments, the first pre-press structure 151 and the second pre-press structure 152 are arranged in parallel or substantially in parallel, the first piezoelectric driving unit 131 is abutted against the first pre-press structure 151, the second piezoelectric driving unit 132 is abutted against the second pre-press structure 152, the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 are clamped between the first pre-press structure 151 and the second pre-press structure 152 to make the first pre-press structure 151 and the second pre-press structure 152 have a tendency of elastic deformation such as bending, and the first pre-press structure 151 and the second pre-press structure 152 provide pre-press force to the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 respectively based on the tendency of elastic deformation such as bending.

[0076] In some embodiments, the pre-press structure 15 can also provide pre-press force based on the elastic deformation of the pre-press connecting structure 153 and the elastic deformation of the first pre-press structure 151 and the second pre-press structure 152 comprehensively at the same time.

[0077] In some embodiments, the first preloading structure 151 and the second preloading structure 152 may be plate-like structures. In some embodiments, the preloading connection structure 153 may be a plate-like structure. In some embodiments, the first preloading structure 151 and the second preloading structure 152 are respectively connected to two ends of the preloading connection structure 153. In some embodiments, the first preloading structure 151 and the second preloading structure 152 may be perpendicular to the preloading connection structure 153. In some embodiments, the first preloading structure 151, the second preloading structure 152 and the preloading connection structure 153 may be formed integrally. In some embodiments, the first preloading structure 151, the second preloading structure 152 and the preloading connection structure 153 as a whole may be formed by bending a plate-like structure.

[0078] In some embodiments, the number of the preloading connection structures 153 may be multiple. In some embodiments, the multiple preloading connection structures 153 may be arranged in parallel, and two ends of each preloading connection structure 153 are respectively connected to one end of the first preloading structure 151 and one end of the second preloading structure 152 to form a substantially "C"-shaped structure.

[0079] In some other embodiments, two ends of one or more of the preloading connection structures 153 are respectively connected to one end of the first preloading structure 151 and one end of the second preloading structure 152, and two ends of one or more other preloading connection structures 153 are respectively connected to the other end of the first preloading structure 151 and the other end of the second preloading structure 152 to form a substantially "square" - shaped structure.

[0080] Based on the connection of the preloading connection structure 153 and the configuration of applying pre-pressure through the elastic force of the preloading structure 15 as a whole, the same preloading structure 15 can simultaneously provide pre-pressure to two piezoelectric driving units (i.e., the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132) without arranging independent preloading mechanisms for the two piezoelectric driving units respectively.

[0081] [[ID=十二]]Since the first preloading structure 151 and the second preloading structure 152 respectively provide pre-pressure to the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 based on the tendency of opposite movement, the pre-pressure applied to the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 can be equal or substantially equal, which is beneficial to the control of the two piezoelectric driving units. In some related usage scenarios, for example, in the usage scenario where the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 are coaxially and symmetrically arranged, the pre-pressure applied by the preloading structure to the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 is equal.

[0082] In some embodiments, the first piezoelectric driving unit 131 is capable of driving the first pre-pressing structure 151 to move in a positive direction of its corresponding direction (e.g. the first direction X or the second direction Y). In some embodiments, the second piezoelectric driving unit 132 is capable of driving the second pre-pressing structure 152 to move in a negative direction of its corresponding direction (e.g. the first direction X or the second direction Y). In some embodiments, the first piezoelectric driving unit 131 or the second piezoelectric driving unit 132 is capable of stretching or contracting in its corresponding direction to drive the pre-pressing structure 15 to move in its corresponding direction.

[0083] In some embodiments, the first piezoelectric driving unit 131 stretches while the second piezoelectric driving unit 132 contracts, or the first piezoelectric driving unit 131 contracts while the second piezoelectric driving unit 132 stretches, so that the pre-pressing structure 15 as a whole moves in a positive direction of its corresponding direction (e.g. the first direction X or the second direction Y) or in a negative direction of its corresponding direction. During the movement, the pre-pressing connecting structure 153 moves synchronously due to the synchronous movement of the first pre-pressing structure 151 and the second pre-pressing structure 152, and thus the overall shape of the first pre-pressing structure 151, the second pre-pressing structure 152 and the pre-pressing connecting structure 153 does not change, i.e. the overall shape of the first pre-pressing structure 151, the second pre-pressing structure 152 and the pre-pressing connecting structure 153 remains unchanged, so that the pre-pressing force applied on the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 remains unchanged, which is beneficial for the control of the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132.

[0084] In addition, due to the overall shape of the first pre-pressing structure 151, the second pre-pressing structure 152 and the pre-pressing connecting structure 153 remaining unchanged, the position (point, line or surface) and direction of the pre-pressing force applied on the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 remain unchanged, the displacement linearity of the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 is better, the control accuracy is higher, and the force and direction output from the first pre-pressing structure 151 and the second pre-pressing structure 152 to the first decoupling element 141 and the second decoupling element 142 can also remain unchanged.

[0085] In some embodiments, the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 can be piezoelectric actuators (e.g. piezoelectric stacks or pre-stressed packaged piezoelectric ceramic components). Piezoelectric actuators have a large compressive force but a small tensile force. A single piezoelectric actuator usually only outputs an outward pushing force, but not an inward pulling force, so a pre-stressing mechanism is needed to provide a pre-stressing force. In some related embodiments, the configuration of a single piezoelectric actuator and a pre-stressing mechanism is not consistent in the output effect in the positive direction and the negative direction in the process of outputting an external force. In the positive direction, it is the outward pushing force of the piezoelectric actuator, and in the negative direction, it is the inward pulling force of the pre-stressing mechanism, so the output forces in the positive direction and the negative direction are two different forms of forces.

[0086] In one or more embodiments of the present specification, the force in the positive direction can be provided by at least one of the outward pushing force of the first piezoelectric driving unit 131 in the driving mechanism (e.g. the first driving mechanism 1 or the second driving mechanism 2) and the pushing force provided by the third driving unit 133, and the force in the negative direction can be provided by at least one of the outward pushing force of the second piezoelectric driving unit 132 in the driving mechanism (e.g. the first driving mechanism 1 or the second driving mechanism 2) and the pushing force provided by the third driving unit 133. In one or more embodiments described above, the pre-stressing mechanism 15 only provides a pre-stressing force but does not provide an output force in the negative direction, the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132 output the same form of force in the positive direction and the negative direction of their respective directions, and the third driving unit 133 also outputs the same form of force in the positive direction and the negative direction of its respective direction, so the displacement device has higher displacement accuracy.

[0087] In one or more embodiments of the present specification, one of the first pre-stressing mechanism 151 and the first piezoelectric driving unit 131 provides a first convex curved surface, and the other of the first pre-stressing mechanism 151 and the first piezoelectric driving unit 131 provides a first flat surface matching the first convex curved surface. In some embodiments, one of the second pre-stressing mechanism 152 and the second piezoelectric driving unit 132 provides a second convex curved surface, and the other of the second pre-stressing mechanism 152 and the second piezoelectric driving unit 132 provides a second flat surface matching the second convex curved surface.

[0088] For example, referring to Figure 11As shown, the first pre-pressing structure 151 is arranged with a first protruding member 1511, one end of the first protruding member 1511 is fixedly connected with the first pre-pressing structure 151, and the other end of the first protruding member 1511 provides a first convex arc surface. The other end of the first protruding member 1511 abuts against a first plane provided by the first piezoelectric driving unit 131 (for example, the plane of the left end of the first piezoelectric driving unit 131). The contact area (or contact point) between the first convex arc surface and the first plane is located on the central axis of the first piezoelectric driving unit 131.

[0089] Similarly, continuing to refer to Figure 11 As shown, the second pre-pressing structure 152 is arranged with a second protruding member 1521, one end of the second protruding member 1521 is fixedly connected with the second pre-pressing structure 152, and the other end of the second protruding member 1521 provides a second convex arc surface. The other end of the second protruding member 1521 abuts against a second plane provided by the second piezoelectric driving unit 132 (for example, the plane of the right end of the second piezoelectric driving unit 132). The contact area (or contact point) between the second convex arc surface and the second plane is located on the central axis of the second piezoelectric driving unit 132.

[0090] On the other hand, for example, the surface of the first pre-pressing structure 151 facing the first piezoelectric driving unit 131 can also be shaped as an arc surface, at least a portion of the arc surface provides the above-mentioned first convex arc surface. The surface of the second pre-pressing structure 152 facing the second piezoelectric driving unit 132 can also be shaped as an arc surface, at least a portion of the arc surface provides the above-mentioned second convex arc surface.

[0091] In one or more embodiments of the present specification, one of the first pre-pressing structure 151 and the first piezoelectric driving unit 131 provides the first convex arc surface, and the other of the first pre-pressing structure 151 and the first piezoelectric driving unit 131 provides a first concave arc surface matched with the first convex arc surface. In some embodiments, one of the second pre-pressing structure 152 and the second piezoelectric driving unit 132 provides the second convex arc surface, and the other of the second pre-pressing structure 152 and the second piezoelectric driving unit 132 provides a second concave arc surface matched with the second convex arc surface.

[0092] For example, referring to Figure 12 As shown, the end of the first piezoelectric driving unit 131 (for example, the left end thereof) is shaped as a first convex arc surface. The top end of the first convex arc surface can be located on the central axis of the first piezoelectric driving unit 131. A first concave arc surface is formed on the first pre-pressing structure 151, and the first convex arc surface is arranged inside the first concave arc surface. The curvature of the first concave arc surface can be less than or equal to the curvature of the first convex arc surface, so as to allow the first convex arc surface to abut against the first concave arc surface and displace or rotate relative to the first concave arc surface. The contact area (or contact point) between the first convex arc surface and the first concave arc surface is located on the central axis of the first piezoelectric driving unit 131.

[0093] Similarly, continuing to refer to Figure 12 As shown, the end of the second piezoelectric driving unit 132 (e.g. the right end thereof) is shaped as a second convex arc surface. The top end of the second convex arc surface can be located on the central axis of the second piezoelectric driving unit 132. The second pre-pressing structure 152 is provided with a second concave arc surface, and the second convex arc surface is arranged inside the second concave arc surface. The curvature of the second concave arc surface can be less than or equal to the curvature of the second convex arc surface, so as to allow the second convex arc surface to abut against the second concave arc surface and displace or rotate relative to the second concave arc surface. The contact area (or contact point) between the second convex arc surface and the second concave arc surface is located on the central axis of the second piezoelectric driving unit 132.

[0094] Based on the cooperation between the convex arc surface and the flat surface, or the cooperation between the convex arc surface and the concave arc surface, the pre-pressing force provided by the pre-pressing structure 15 to the first piezoelectric driving unit 131 and the pre-pressing force provided by the pre-pressing structure 15 to the second piezoelectric driving unit 132 can act on the central axis of the piezoelectric driving unit (e.g. the first piezoelectric driving unit 131 and / or the second piezoelectric driving unit 132), avoiding the pre-pressing force provided by the pre-pressing structure 15 from acting on the corner of the columnar structure of the piezoelectric driving unit (e.g. the edge of the end surface of the columnar structure) due to the deformation of the pre-pressing structure 15. On the other hand, when the piezoelectric driving unit is elongated, the force outputted outwardly by the piezoelectric driving unit can also be outputted via the acting surface or the acting point located at the central axis. Both of them can ensure the working center of the piezoelectric driving unit to be stable, preventing the piezoelectric driving unit from deflecting or bending during the elongation or retraction process, and improving the displacement linearity of the piezoelectric driving unit.

[0095] In one or more embodiments of the present specification, refer to Figures 10 to 14 As shown, the first housing 11 is provided with a first hole 111 for accommodating the first piezoelectric driving unit 131 and a second hole 112 for accommodating the second piezoelectric driving unit 132, and the first hole 111 and the second hole 112 are opposite to each other. In some embodiments, a spacing portion 113 is formed between the first hole 111 and the second hole 112. In some embodiments, the number of spacing portions 113 can be one or more.

[0096] In some embodiments, one of the spacing portion 113 and the first piezoelectric driving unit 131 is provided with a third convex arc surface, and the other of the spacing portion 113 and the first piezoelectric driving unit 131 is provided with a third concave arc surface matched with the third convex arc surface. In some embodiments, one of the spacing portion 113 and the second piezoelectric driving unit 132 is provided with a fourth convex arc surface, and the other of the spacing portion 113 and the second piezoelectric driving unit 132 is provided with a fourth concave arc surface matched with the fourth convex arc surface.

[0097] Exemplarily, refer to Figure 13As shown, an end portion (e.g. the right end) of the first piezoelectric driving unit 131 is shaped as a third convex arc surface. The top end of the third convex arc surface can be located on the central axis of the first piezoelectric driving unit 131. A third concave arc surface is formed on the spacer 113, and the third convex arc surface is located inside the third concave arc surface. The curvature of the third concave arc surface can be less than or equal to the curvature of the third convex arc surface, so as to allow the third convex arc surface to abut against the third concave arc surface and displace or rotate relative to the third concave arc surface. The contact area (or contact point) between the third convex arc surface and the third concave arc surface is located on the central axis of the first piezoelectric driving unit 131.

[0098] Similarly, continuing to refer to FIG. 1, Figure 13 As shown, an end portion (e.g. the left end) of the second piezoelectric driving unit 132 is shaped as a fourth convex arc surface. The top end of the fourth convex arc surface can be located on the central axis of the second piezoelectric driving unit 132. A fourth concave arc surface is formed on the spacer 113, and the fourth convex arc surface is located inside the fourth concave arc surface. The curvature of the fourth concave arc surface can be less than or equal to the curvature of the fourth convex arc surface, so as to allow the fourth convex arc surface to abut against the fourth concave arc surface and displace or rotate relative to the fourth concave arc surface. The contact area (or contact point) between the fourth convex arc surface and the fourth concave arc surface is located on the central axis of the second piezoelectric driving unit 132.

[0099] In some embodiments, one of the spacer 113 and the first piezoelectric driving unit 131 provides the third convex arc surface, and the other of the spacer 113 and the first piezoelectric driving unit 131 provides a third flat surface matching the third convex arc surface. In some embodiments, one of the spacer 113 and the second piezoelectric driving unit 132 provides the fourth convex arc surface, and the other of the spacer 113 and the second piezoelectric driving unit 132 provides a fourth flat surface matching the fourth convex arc surface.

[0100] For example, referring to FIG. 1, Figure 14 As shown, one side of the spacer 113 is arranged with a third protruding member 1131, one end of the third protruding member 1131 is fixedly connected with the spacer 113, and the other end of the third protruding member 1131 provides the third convex arc surface. The other end of the third protruding member 1131 abuts against the third flat surface (e.g. the flat surface of the right end of the first piezoelectric driving unit 131) provided by the first piezoelectric driving unit 131. The contact area (or contact point) between the third convex arc surface and the third flat surface is located on the central axis of the first piezoelectric driving unit 131.

[0101] Similarly, continuing to refer to FIG. 1, Figure 14As shown, the other side of the interval part 113 is arranged with a fourth protruding member 1132, one end of the fourth protruding member 1132 is fixedly connected with the interval part 113, and the other end of the fourth protruding member 1132 provides a fourth convex arc surface. The other end of the fourth protruding member 1132 abuts against a fourth plane (for example, the plane of the left end of the second piezoelectric driving unit 132) provided by the second piezoelectric driving unit 132. Among them, the contact area (or contact point) between the fourth convex arc surface and the fourth plane is located on the central axis of the second piezoelectric driving unit 132.

[0102] Based on the cooperation between the convex arc surface and the plane, or the cooperation between the convex arc surface and the concave arc surface, the action force between the first piezoelectric driving unit 131 and the interval part 113 and the action force between the second piezoelectric driving unit 132 and the interval part 113 can be on the central axis of the piezoelectric driving unit, avoiding the displacement of the stress point when the piezoelectric driving unit is subjected to the pre-pressure or the reaction force acting on the interval part 113 due to its own elongation, and improving the displacement linearity of the piezoelectric driving unit.

[0103] In one or more embodiments of the present specification, the driving center line of the first piezoelectric driving unit 131, the driving center line of the second piezoelectric driving unit 132, and the driving center line of the third driving unit 133 coincide. In some related use scenarios, a driving mechanism with two different strokes and accuracies usually needs two or more driving units to be compounded. In the process of driving unit compounding, the mover of one driving unit needs to be connected to the stator of another driving unit, and the connection mode can include connection through a radially arranged member or axial direct connection. Among them, when the connection through the radially arranged member is adopted, the driving center lines of the two driving units do not coincide, and the radially arranged member needs to bear a large shear force under the work of the two driving units, and the radially arranged member is easy to bend and affect the accuracy, and even break. When the axial direct connection is adopted, it will cause the overall size of the driving mechanism in the axial direction to be too large. In one or more embodiments of the present specification, the second housing 12 is sleeved outside the first housing 11, and the third driving unit 133 is arranged between the second housing 12 and the first housing 11, and the driving center line of the third driving unit 133 coincides with the driving center line of the first piezoelectric driving unit 131 and the second piezoelectric driving unit 132. No radial member is arranged, and the axial length of the overall driving mechanism is also not stacked.

[0104] In one or more embodiments of the present specification, referring to Figure 15 、 Figure 16As shown, the third driving mechanism 3 comprises a third housing 31, a fourth housing 32 sleeved outside the third housing 31, a sixth driving unit 333 for driving the third housing 31 to move relative to the fourth housing 32, and a third decoupling member 34. In some embodiments, the sixth driving unit 333 is configured to drive the third housing 31 and each component connected to the third housing 31 to move relative to the fourth housing 32 along the third direction Z. In some embodiments, the sixth driving unit 333 can be an inchworm piezoelectric driving unit. In some embodiments, the stroke of the sixth driving unit 333 can be in millimeter level.

[0105] In some embodiments, the third housing 31 is connected to the stator 200 through the third decoupling member 34, so as to drive the whole of the rotor 100 and the stator 200 to move relative to the substrate 300 along the third direction Z. In some embodiments, the third decoupling member 34 is configured to be flexible in the first direction X and the second direction Y.

[0106] In some embodiments, the third decoupling member 34 is configured to be capable of flexible deformation to achieve decoupling when the whole of the rotor 100 and the stator 200 rotates relative to the substrate 300 around the first direction X or when the whole of the rotor 100 and the stator 200 rotates relative to the substrate 300 around the second direction Y. For example, the third decoupling member 34 can be a rod-shaped structure with various cross-sectional shapes (e.g., a circular rod or a rectangular rod).

[0107] In some embodiments, the third decoupling member 34 can have a certain rigidity in its axial direction, for transmitting power in the third direction Z. In some use scenarios, when the third decoupling member 34 is deformed flexibly, its length in the third direction Z can change due to the bending of the third decoupling member 34, so as to adapt to the rotation of the whole of the rotor 100 and the stator 200 relative to the substrate 300 around the first direction X and / or the second direction Y. The third decoupling member 34 has a large follow-up stroke, which has the ability to follow the stroke of the rotor 100 and / or the stator 200 in the XY plane while ensuring decoupling in the third direction Z. In some use scenarios, although the third decoupling member 34 can be bent, the third decoupling member 34 can still transmit power in the third direction Z based on its certain rigidity in the axial direction.

[0108] In some embodiments, the third decoupling member 34 is directly or indirectly connected to the third housing 31 and at least a part of the third decoupling member 34 protrudes from the third housing 31. In some embodiments, referring to Figure 15 、 Figure 16As shown, the third housing 31 has a blind hole in the interior, and the third decoupling member 34 is arranged in the blind hole and protrudes from the blind hole at one end. In other embodiments, the third housing 31 has a solid structure, and the third decoupling member 34 is directly connected to the surface of the third housing 31.

[0109] In one or more embodiments of the present disclosure, referring to Figures 17 to 19 As shown, the third driving mechanism 3 further comprises a fourth piezoelectric driving unit 331 and a fifth piezoelectric driving unit 332 arranged in the interior of the third housing 31, a vertical pre-pressing structure 35 connected to the fourth piezoelectric driving unit 331 and the fifth piezoelectric driving unit 332 and providing a pre-pressing force, and the third decoupling member 34 connected to the vertical pre-pressing structure 35.

[0110] In some embodiments, the sixth driving unit 333 drives the third housing 31, the fourth piezoelectric driving unit 331, the fifth piezoelectric driving unit 332, the vertical pre-pressing structure 35, and the third decoupling member 34 connected to the vertical pre-pressing structure 35 to move along the third direction Z. In some embodiments, the fourth piezoelectric driving unit 331 and the fifth piezoelectric driving unit 332 drive the vertical pre-pressing structure 35 and the third decoupling member 34 connected to the vertical pre-pressing structure 35 to move along the third direction Z. The sixth driving unit 333 has a different stroke from the fourth piezoelectric driving unit 331 and the fifth piezoelectric driving unit 332 to meet different working accuracy requirements. In some embodiments, the stroke of the sixth driving unit 333 can be in the order of millimeters, and the strokes of the fourth piezoelectric driving unit 331 and the fifth piezoelectric driving unit 332 can be in the order of tens or hundreds of micrometers.

[0111] In some embodiments, the structures of the fourth piezoelectric driving unit 331 and the fifth piezoelectric driving unit 332 are similar to those of the aforementioned first piezoelectric driving unit 131 and the second piezoelectric driving unit 132, respectively, and thus will not be described again. In some embodiments, the structure of the vertical pre-pressing structure 35 is similar to that of the aforementioned pre-pressing structure 15, and thus will not be described again.

[0112] In some embodiments, the cooperation relationship between the fourth piezoelectric driving unit 331, the fifth piezoelectric driving unit 332, and the vertical pre-pressing structure 35 is similar to the cooperation relationship between the first piezoelectric driving unit 131, the second piezoelectric driving unit 132, and the pre-pressing structure 15, and thus will not be described again.

[0113] In some embodiments, the structure of the third decoupling member 34 is similar to that of the aforementioned first decoupling member 141 and / or the second decoupling member 142, and thus will not be described again.

[0114] In one or more embodiments of the present disclosure, referring to Figures 17 to 19As shown, the vertical pre-press structure 35 can include a vertical first pre-press structure 351 connected with the fourth piezoelectric driving unit 331, a vertical second pre-press structure 352 connected with the fifth piezoelectric driving unit 332, and one or more vertical pre-press connecting structures 353 connecting the vertical first pre-press structure 351 and the vertical second pre-press structure 352.

[0115] In some embodiments, referring to Figure 17 As shown, the vertical first pre-press structure 351 is arranged towards the stator 200, and the third decoupling piece 34 can be arranged on the vertical first pre-press structure 351.

[0116] In some other embodiments, referring to Figure 18 As shown, the third decoupling piece 34 can be arranged on the vertical pre-press connecting structure 353.

[0117] In some other embodiments, referring to Figure 19 As shown, the third driving mechanism 3 can include one or more flexible guide structures 361 and flexible guide springs 362 corresponding to the flexible guide structures 361. In this embodiment, the third driving mechanism 3 can include one flexible guide structure 361 corresponding to two flexible guide springs 362. In this embodiment, the third driving mechanism 3 can also include one flexible guide structure 361 corresponding to one flexible guide spring 362, or one flexible guide structure 361 corresponding to more than two flexible guide springs 362. In this embodiment, the third driving mechanism 3 can further include multiple flexible guide structures 361, each corresponding to one or more flexible guide springs 362, and the number of flexible guide springs 362 corresponding to each flexible guide structure 361 can be the same or different.

[0118] Continuing to refer to Figure 19 As shown, in this embodiment, the flexible guide structure 361 is connected with the third housing 31, and the flexible guide spring 362 connects the flexible guide structure 361 and the vertical pre-press structure 35, for example, connects the flexible guide structure 361 and the vertical pre-press connecting structure 353. In this embodiment, the vertical pre-press connecting structure 353 is located outside the fourth housing 32, the flexible guide spring 362 penetrates the fourth housing 32, and the fourth housing 32 is provided with a hole for the flexible guide spring 362 to penetrate.

[0119] Continuing to refer to Figure 19As shown, in some embodiments, the flexible guide spring 362 is configured to be flexible in the third direction Z and rigid in the first direction X and the second direction Y perpendicular to the third direction Z. The flexible guide spring 362 can be used to guide the movement of the third housing 31 relative to the fourth housing 32. The flexible guide spring 362 can also be used to limit the position of the vertical pre-pressing structure 35 as a whole in the first direction X and the second direction Y.

[0120] In some possible use scenarios, the stator 200 (or the whole of the mover 100 and the stator 200) driven by the third driving mechanism 3 can be impacted by a force in a direction other than the third direction Z, which can be transmitted to the vertical pre-pressing structure 35 through the third decoupler 34, so that the fourth piezoelectric driving unit 331 and the fifth piezoelectric driving unit 332 are also impacted laterally and can be damaged. The flexible guide spring 362 can reduce or avoid such impact, allowing only the whole of the vertical pre-pressing structure 35 to move in the third direction Z, thereby protecting the fourth piezoelectric driving unit 331 and the fifth piezoelectric driving unit 332 without hindering the operation of the third driving mechanism 3.

[0121] In some embodiments, the third decoupler 34 can be arranged on the flexible guide structure 361 and the flexible guide spring 362. In some embodiments, a part of the third decoupler 34 can be directly opposite the flexible guide spring 362. In some possible use scenarios, the flexible guide structure 361 and the flexible guide spring 362 can support the third decoupler 34.

[0122] In one or more embodiments of the present specification, referring to Figure 1 , Figure 2 , Figure 5 , Figure 7 As shown, the stator 200 is provided with a first accommodating space for accommodating the first driving mechanism 1 and a second accommodating space for accommodating the second driving mechanism 2. In some embodiments, referring to Figure 2 As shown, the mover 100 is provided with a first driving connection part 101 and a second driving connection part 102, a part of the first driving connection part 101 is arranged in the first accommodating space, and a part of the second driving connection part 102 is arranged in the second accommodating space.

[0123] In some embodiments, the first decoupling member 141 and / or the second decoupling member 142 of the first driving mechanism 1 is connected with the first driving connection 101, and the first decoupling member 141 and / or the second decoupling member 142 of the second driving mechanism 2 is connected with the second driving connection 102. The first driving mechanism 1 can drive the first driving connection 101 through the first decoupling member 141 and the second decoupling member 142 to drive the mover 100 to move, and the second driving mechanism 2 can drive the second driving connection 102 through the first decoupling member 141 and the second decoupling member 142 to drive the mover 100 to move.

[0124] In some embodiments, the first driving connection 101 includes two first driving connection members 1011, and the first driving mechanism 1 is arranged between the two first driving connection members 1011, and the first decoupling member 141 and the second decoupling member 142 of the first driving mechanism 1 are respectively connected with the two first driving connection members 1011. In some embodiments, the second driving connection 102 includes two second driving connection members 1021, and the second driving mechanism 2 is arranged between the two second driving connection members 1021, and the first decoupling member 141 and the second decoupling member 142 of the second driving mechanism 2 are respectively connected with the two second driving connection members 1021.

[0125] The first driving mechanism 1 is located between the two first driving connection members 1011, and the first driving mechanism 1 can drive the mover 100 to move in the positive direction of the first direction X through one of the first driving connection members 1011, and drive the mover 100 to move in the negative direction of the first direction X through the other first driving connection member 1011. Thus, balanced driving effect is provided in the positive direction and the negative direction of the first direction X. Similarly, the second driving mechanism 2 is located between the two second driving connection members 1021, and the second driving mechanism 2 can drive the mover 100 to move in the positive direction of the second direction Y through one of the second driving connection members 1021, and drive the mover 100 to move in the negative direction of the second direction Y through the other second driving connection member 1021. Thus, balanced driving effect is provided in the positive direction and the negative direction of the second direction Y.

[0126] In some embodiments, the first driving mechanism 1 or the second driving mechanism 2 is configured to translate the first housing 11 to drive the two first driving connection members 1011 to translate based on the first decoupling member 141 and the second decoupling member 142, or drive the two second driving connection members 1021 to translate based on the first decoupling member 141 and the second decoupling member 142, respectively.

[0127] In some embodiments, the mover 100 can be substantially rectangular, two first driving connectors 1011 are disposed at one edge of the mover 100, and two second driving connectors 1021 are disposed at another edge of the mover 100, which is adjacent to the one edge. In some embodiments, the first driving connectors 1011 can be perpendicular to the edge of the mover 100. In some embodiments, the second driving connectors 1021 can be perpendicular to the edge of the mover 100. In some embodiments, the first driving connectors 1011 and the second driving connectors 1021 can be plate-like structures.

[0128] Having described the basic concepts, it is obvious to those skilled in the art that the above detailed disclosure is merely exemplary and does not limit the present specification. Although not explicitly stated herein, various modifications, improvements, and corrections can be made by those skilled in the art to the present specification. Such modifications, improvements, and corrections are taught in the present specification, so such modifications, improvements, and corrections still belong to the spirit and scope of the exemplary embodiments of the present specification.

Claims

1. A displacement device, characterized in that, include: A mover, a stator surrounding the mover, a first drive mechanism for driving the mover to move relative to the stator in a first direction, and a second drive mechanism for driving the mover to move relative to the stator in a second direction; Both the first driving mechanism and the second driving mechanism include: a first housing, a second housing sleeved outside the first housing, a third driving unit for driving the first housing to move relative to the second housing, a first decoupling member directly or indirectly connected to one end of the first housing, and a second decoupling member directly or indirectly connected to the other end of the first housing; The first housing of the first drive mechanism is configured to be able to translate along the positive or negative direction of the first direction, and the first decoupling member and the second decoupling member of the first drive mechanism are configured to be able to translate synchronously along the positive or negative direction of the first direction based on the first housing of the first drive mechanism. The first housing of the second drive mechanism is configured to be able to translate along the positive or negative direction of the second direction, and the first decoupling member and the second decoupling member of the second drive mechanism are configured to be able to translate synchronously along the positive or negative direction of the second direction based on the first housing of the second drive mechanism. Both the first drive mechanism and the second drive mechanism further include: a first piezoelectric drive unit and a second piezoelectric drive unit disposed inside the first housing, and a pre-pressure structure that is respectively connected to the first piezoelectric drive unit and the second piezoelectric drive unit and provides pre-pressure; Both the first decoupling component and the second decoupling component are connected to the pre-compression structure. The first decoupling component is located at the first piezoelectric drive unit, and the second decoupling component is located at the second piezoelectric drive unit.

2. The displacement device according to claim 1, characterized in that, Also includes: A substrate, a third driving mechanism for driving the mover or the mover and the stator together to move relative to the substrate in a third direction, and a first flexible guiding mechanism connecting the substrate and the stator; The third direction is perpendicular to the first direction and the second direction; The first flexible guide mechanism is configured to be flexible in the third direction and rigid in the first and second directions.

3. The displacement device according to claim 2, characterized in that, The second housing is connected to the stator, or the second housing is connected to the substrate.

4. The displacement device according to claim 1, characterized in that, The pre-compression structure includes: a first pre-compression structure connected to the first piezoelectric drive unit, a second pre-compression structure connected to the second piezoelectric drive unit, and one or more pre-compression connection structures connecting the first pre-compression structure and the second pre-compression structure; The first piezoelectric drive unit and the second piezoelectric drive unit are disposed between the first pre-pressure structure and the second pre-pressure structure. The first pre-pressure structure and the second pre-pressure structure are configured to have a tendency to move in opposite directions to provide pre-pressure to the first piezoelectric drive unit and the second piezoelectric drive unit.

5. The displacement device according to claim 4, characterized in that, One of the first pre-compression structure and the first piezoelectric drive unit provides a first convex arc surface, and the other of the first pre-compression structure and the first piezoelectric drive unit provides a first concave arc surface or a first plane that matches the first convex arc surface; One of the second pre-pressing structure and the second piezoelectric drive unit provides a second convex arc surface, and the other of the second pre-pressing structure and the second piezoelectric drive unit provides a second concave arc surface or a second plane that matches the second convex arc surface.

6. The displacement device according to claim 4, characterized in that, The first housing has a first hole for accommodating the first piezoelectric drive unit and a second hole for accommodating the second piezoelectric drive unit, the first hole and the second hole being back to back; A gap is formed between the first hole and the second hole; One of the spacer and the first piezoelectric drive unit provides a third convex arc surface, and the other of the spacer and the first piezoelectric drive unit provides a third concave arc surface or a third plane that matches the third convex arc surface; One of the spacer portion and the second piezoelectric drive unit provides a fourth convex arc surface, and the other of the spacer portion and the second piezoelectric drive unit provides a fourth concave arc surface or a fourth plane that matches the fourth convex arc surface.

7. The displacement device according to claim 1, characterized in that, The drive center line of the first piezoelectric drive unit, the drive center line of the second piezoelectric drive unit, and the drive center line of the third drive unit coincide.

8. The displacement device according to claim 2, characterized in that, The third driving mechanism includes: a third housing, a fourth housing sleeved outside the third housing, a sixth driving unit for driving the third housing to move relative to the fourth housing, and a third decoupling component; The third decoupling element is directly or indirectly connected to the third housing and at least a portion of it protrudes from the third housing; The third decoupling element is configured to be flexible in both the first and second directions.

9. The displacement device according to claim 8, characterized in that, The third drive mechanism further includes: a fourth piezoelectric drive unit and a fifth piezoelectric drive unit disposed inside the third housing, and a vertical preload structure that is connected to the fourth piezoelectric drive unit and the fifth piezoelectric drive unit respectively and provides preload; The third decoupling component is connected to the vertical preload structure.

10. The displacement device according to claim 1, characterized in that, The stator has a first accommodating space for accommodating the first driving mechanism and a second accommodating space for accommodating the second driving mechanism; The mover has a first drive connection part and a second drive connection part, a portion of the first drive connection part is disposed in the first accommodating space, and a portion of the second drive connection part is disposed in the second accommodating space; The first decoupling member and / or the second decoupling member of the first drive mechanism are connected to the first drive connection part, and the first decoupling member and / or the second decoupling member of the second drive mechanism are connected to the second drive connection part.

11. The displacement device according to claim 10, characterized in that, The first drive connection part includes two first drive connectors, the first drive mechanism is disposed between the two first drive connectors, and the first decoupling member and the second decoupling member of the first drive mechanism are respectively connected to the two first drive connectors. The second drive connection part includes two second drive connectors, and the second drive mechanism is disposed between the two second drive connectors. The first decoupling member and the second decoupling member of the second drive mechanism are respectively connected to the two second drive connectors.

12. The displacement device according to claim 11, characterized in that, The first drive mechanism or the second drive mechanism is configured such that: the first housing translates to drive the two first drive connectors to translate based on the first decoupling member and the second decoupling member respectively, or drives the two second drive connectors to translate based on the first decoupling member and the second decoupling member respectively.

13. The displacement device according to claim 1, characterized in that, A second flexible guiding mechanism is also provided between the moving part and the stator; The second flexible guide mechanism is configured to be rigid in a third direction and flexible in the first and second directions.

14. The displacement device according to claim 1, characterized in that, The first decoupling member and the second decoupling member of the first drive mechanism are connected to the mover and are configured to deform based on the movement of the mover along the second direction; The first decoupling member and the second decoupling member of the second drive mechanism are connected to the mover and are configured to deform based on the movement of the mover along a first direction.

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