Photomask taking device of chip photoetching machine

Abstract

The invention discloses a photomask material taking device of a chip photoetching machine, and particularly relates to the technical field of material taking and transportation, the photomask material taking device comprises a material taking disc, a plurality of suction cups, a front strip, an inclined insertion rod, a moving seat, a driving piece and a limiting piece, the suction cups are used for sucking and transporting a photomask; the front strip is located on one side of the suction cup, and a driving piece is installed on the front strip. The inclined inserting rod is arranged on one side of the front strip, a limiting piece is arranged on the outer wall of the inclined inserting rod, and a movable base is arranged on one side of the inclined inserting rod. The self-checking piece, the driving piece and the limiting piece are adopted for linkage control, manual forced mistaken material taking and conveying are eradicated, the situation that personnel factors are difficult to control completely is avoided, and the non-compliant material taking and conveying situation is eradicated, so that the problems that due to the fact that operation links are complex, personnel factors are difficult to control completely, and the labor intensity is low are solved. And the non-compliant material taking and transporting conditions are still difficult to eradicate.

Description

Technical Field

[0001] This invention relates to the field of material handling and transportation technology, and more specifically, to a photomask handling device for a chip lithography machine. Background Technology

[0002] After picking up the photomask, the photomask picking device of the chip lithography machine achieves stable transportation through precise mechanical structure and automated control. This ensures that the photomask and silicon wafer are accurately aligned, avoids contamination or mechanical damage during transportation, reduces human intervention, and thus improves production efficiency and product yield, providing a key guarantee for high-precision chip manufacturing.

[0003] In existing publicly available literature, patent publication number CN106672616A discloses an automatic feeding and unloading device for photomasks in a chip lithography machine. This technology uses a first or second suction plate driven by an opening and closing power device. Both the first and second suction plates have clearance recesses on opposite sides. The automatic feeding and unloading device allows the photomask to enter from both sides and directly adsorb the photomask through the opening and closing of the first and second suction plates. The first and second suction plates do not contact the photomask film, thus avoiding wear or tearing of the film. However, this technology still has the following problems.

[0004] In chip lithography machines, the picking and transport of photomasks is often accomplished using a suction cup mechanism. However, due to the variety of photomask models, the model selected during picking and transport may not match the actual requirements, leading to incorrect picking and transport. Some operators, for the sake of convenience, force incorrect picking, which can easily cause serious consequences. Not only does the photomask fall due to improper picking, but it is also damaged during transport due to collisions caused by incorrect paths. Such incorrect operations not only damage the photomask itself but also throw the entire picking and transport process into chaos. Although certain management measures have been taken, the complexity of the operation and the difficulty in fully controlling human factors make it difficult to completely eliminate such non-compliant picking and transport situations. Summary of the Invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides the following technical solution: a photomask picking device for a chip lithography machine, comprising a picking tray and a plurality of suction cups disposed below it, wherein the suction cups are used to pick up the photomask and transport it; A front strip, located on one side of the suction cup, has a drive component mounted on it; An inclined insertion rod is provided on one side of the front strip. A limiting member is provided on the outer wall of the inclined insertion rod, and a movable seat is provided on one side of the inclined insertion rod. A spacer is installed on the upper surface of the inclined insertion rod, and the spacer is connected to multiple suction cups; The self-inspection component is located on the outer wall of the material handling tray; The self-testing component is used to detect the photomask model. If the model does not match the set model, the front strip is driven to rotate by the driving component to limit the front of the material picking tray from moving downward. When the front strip rotates, it presses against the inclined insert rod, causing the inclined insert rod to insert into the moving seat. The inclined insert rod drives the limiting member to insert into the moving seat, thereby limiting the rear of the picking tray from moving downward. The inclined insertion rod simultaneously drives the spacer to move, increasing the distance between the multiple suction cups and the photomask.

[0006] In a preferred embodiment, the driving element includes: A groove is formed above the front bar, and a drive shaft is rotatably mounted inside the groove. The bottom end of the drive shaft is fixedly connected to the front bar. A servo motor is mounted on the top of the drive shaft. The output end of the servo motor is used to drive the drive shaft to rotate. The movable base is fixedly connected to the servo motor.

[0007] In a preferred embodiment, the cross-sectional area of ​​the groove is larger than the cross-sectional area of ​​the front bar, and the drive shaft is perpendicular to the front bar.

[0008] In a preferred embodiment, the limiting element includes: A support frame slides on the outer wall of the inclined insertion rod, the support frame is used to guide the movement of the inclined insertion rod, and the support frame is fixedly connected to the material picking tray; A sleeve block slides on the inner wall of the support frame. The sleeve block is fixedly connected to the inclined rod. A support block is fixed on one side of the outer wall of the support frame. A spring piece is fixed between the support block and the sleeve block, and the spring piece is used to provide elastic force to the sleeve block. A diagonal bar is fixed to the outer wall of the diagonal insert rod and away from the front bar. A side rod is fixed to one side of the diagonal bar, and the side rod is used to insert into the movable seat.

[0009] In a preferred embodiment, the inclined insertion rod is inclined and there is an angle between the inclined insertion rod and the front strip.

[0010] In a preferred embodiment, a gap is provided between the side rod and the inclined insertion rod, and the length of the side rod is less than the length of the inclined insertion rod.

[0011] In a preferred embodiment, the spacer includes: A sliding block is fixed to the upper surface of the inclined insertion rod, and the sliding block is used to slide along the inner wall of the material picking tray; A guide rod is installed on the inner wall of the sliding block and is fixedly connected to the material receiving plate. The guide rod is used to guide the sliding block to slide. A linkage bar is fixed to the upper surface of the sliding block, and a lifting frame is fixed to the top of the linkage bar; A linkage rod slides on the inner wall of a lifting frame, which is inclined and used to press the linkage rod, causing the linkage rod to move upward. A grooved rod is fixed to one end of a linkage rod. A ring tube is fixed to the bottom end of the grooved rod. Multiple suction tubes are fixedly connected to the lower surface of the ring tube. The suction tubes are slidably connected to the material picking plate and are connected to the suction cup.

[0012] In a preferred embodiment, a plurality of the suction tubes are arranged in a circumferential distribution. A valve is connected to the upper surface of the annular tube, and a negative pressure hose is threaded to the top of the valve. A negative pressure fan is installed at one end of the negative pressure hose, and the negative pressure fan is used to create a negative pressure state for the air inside the negative pressure hose.

[0013] In a preferred embodiment, the self-test component includes: The barcode recognition sensor is installed on the outer wall of the feeding tray.

[0014] In a preferred embodiment, a pressure sensor is installed on the upper surface of the material receiving tray near its center point. An electric cylinder is installed on the sensing end of the pressure sensor. The output end of the electric cylinder is fixedly connected to the sensing end of the pressure sensor. The output end of the electric cylinder is used to push the pressure sensor to move. The electric cylinder is fixedly connected to the moving base. A threaded sleeve is fixed to the bottom of the feeding disc, a screw is threaded to the inner wall of the threaded sleeve, and an installation frame is installed on the outer wall of the threaded sleeve. The installation frame is used to guide the sliding of the threaded sleeve. The servo motor is mounted at one end of the mounting frame and is used to drive the screw to rotate. A wireless controller is provided on one side of the threaded sleeve, and the wireless controller is electrically connected to the servo motor.

[0015] The technical effects and advantages of the present invention.

[0016] 1. This invention employs a linkage control system involving self-testing components, driving components, and limiting components. A barcode recognition sensor detects the photomask model in real time. When the model does not match the set value, a servo motor immediately drives the transmission shaft to rotate the front strip, causing it to block the front of the material-picking tray and prevent it from moving downwards. Simultaneously, the front strip pushes the inclined insertion rod into the moving seat, and drives the side rod to insert in coordination, forming a double-point tilt limit, effectively preventing the rear of the material-picking tray from moving downwards. This fully automated process from identification to mechanical limitation eliminates the risk of human error in material handling and transportation, ensuring the safety of the photomask, preventing chaos in the material handling and transportation process, and avoiding situations where complex operations or human factors make complete control difficult, thus eliminating such non-compliant material handling and transportation.

[0017] 2. When the photomask model does not match the setting, the inclined insertion rod drives the sliding block to move along the guide rod, and then pushes the lifting frame to tilt upward through the linkage bar. The compression linkage rod drives the groove rod and the ring tube to rise, so that the suction tube and suction cup are lifted as a whole, increasing the distance between them and the photomask. When the mismatch is detected, the distance between multiple suction cups and the photomask is automatically increased to prevent multiple suction cups from being accidentally sucked up, causing the material pick-up tray to fall or be damaged. This ensures that only the photomask with the matching model can be picked up. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the main structure of the photomask feeding device of the chip lithography machine of the present invention.

[0019] Figure 2 This is a bottom view of the photomask feeding device of the chip lithography machine of the present invention.

[0020] Figure 3 This is a partial structural diagram of the connection between the moving base and the servo motor of the present invention.

[0021] Figure 4 This is a partial structural diagram of the connection between the material receiving tray and the support frame of the present invention.

[0022] Figure 5 This is a partial structural diagram of the vertical cross-section of the connection between the movable seat and the electric cylinder of the present invention.

[0023] Figure 6 For the present invention Figure 5 Enlarged structural diagram at point A in the middle.

[0024] Figure 7 This is a partial structural diagram of the connection between the suction cup and the suction tube of the present invention, viewed from below.

[0025] Figure 8 This is a schematic diagram of a partial cut-off structure of the material handling disc of the present invention.

[0026] The attached diagram is labeled as follows: 1. Feeding tray; 2. Suction cup; 3. Front strip; 4. Angled insert rod; 5. Moving seat; 6. Groove; 7. Drive shaft; 8. Servo motor; 9. Support frame; 10. Sleeve block; 11. Spring piece; 12. Support block; 13. Angled strip; 14. Side rod; 15. Sliding sleeve block; 16. Guide rod; 17. Linkage bar; 18. Lifting frame; 19. Linkage rod; 20. Groove rod; 21. Ring pipe; 22. Suction pipe; 23. Wireless controller; 24. Valve; 25. Negative pressure hose; 26. Negative pressure fan; 27. Barcode recognition sensor; 28. Electric cylinder; 29. ​​Pressure sensor; 30. Threaded sleeve; 31. Mounting frame; 32. Screw; 33. Servo motor. Detailed Implementation

[0027] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0028] The present invention will be further described in detail below with reference to the accompanying drawings.

[0029] Example 1: like Figure 1 - Figure 2 The illustrated chip lithography machine's photomask picking device includes a picking tray 1 and multiple suction cups 2 located below it. The suction cups 2 are used to pick up and transport the photomask. A front bar 3 is located on one side of the suction cups 2, and a driving component is mounted on the front bar 3. A slanted insertion rod 4 is located on one side of the front bar 3, and a limiting component is provided on the outer wall of the slanted insertion rod 4. A movable seat 5 is provided on one side of the slanted insertion rod 4. A spacer is installed on the upper surface of the slanted insertion rod 4 and is connected to the multiple suction cups 2. A self-testing component is located on the outer wall of the picking tray 1. The self-testing component is used to detect the photomask model. If the model does not match the set model, the driving component drives the front bar 3 to rotate, thereby limiting the downward movement of the front part of the picking tray 1. When the front bar 3 rotates, it squeezes the slanted insertion rod 4, causing the slanted insertion rod 4 to insert into the movable seat 5. The slanted insertion rod 4 drives the limiting component to insert into the movable seat 5, thereby limiting the downward movement of the rear part of the picking tray 1. The slanted insertion rod 4 simultaneously drives the spacer to move, increasing the distance between the multiple suction cups 2 and the photomask.

[0030] The implementation principle of this embodiment is as follows: The self-inspection component detects the photomask model. If the model does not match the set model, the drive component will drive the front strip 3 to rotate. This detection is followed by material handling and transportation, which greatly improves the high accuracy of material handling and transportation. Then, the front strip 3 will rotate to restrict the front of the material handling tray 1. At this time, the front of the material handling tray 1 is restricted to move downward. At the same time, when the front strip 3 rotates, it squeezes the inclined insertion rod 4, making full use of the power of the front strip 3 to convert into the squeezing force of the inclined insertion rod 4, so that the inclined insertion rod 4 is inserted into the moving seat 5. In this way, the inclined insertion rod 4 and the moving seat 5 form an integral state. The angled insert rod 4 restricts the downward movement of the support frame 9, which in turn restricts the downward movement of the picking tray 1. Furthermore, during the driving process of the angled insert rod 4, the limiting component is inserted into the moving seat 5 to restrict the rear of the picking tray 1 from moving downward, making full use of the rotational force of the front strip 3. At the same time, the angled insert rod 4 also drives the spacer to move, increasing the distance between the multiple suction cups 2 and the photomask, preventing the suction cups 2 from accidentally picking up a photomask that does not conform to the set model. This ensures that the photomask being picked up and transported is consistent with the photomask that conforms to the set model before it can be picked up and transported, thus eliminating such non-compliant picking and transport situations.

[0031] Example 2: Based on Example 1, this example discloses a photomask feeding device for a chip lithography machine: In this embodiment, as Figure 3 - Figure 8As shown, the driving component includes: a groove 6, located above the front strip 3, with a drive shaft 7 rotatably mounted inside the groove 6, the bottom end of the drive shaft 7 being fixedly connected to the front strip 3; a servo motor 8, mounted on the top of the drive shaft 7, the output end of the servo motor 8 being used to drive the drive shaft 7 to rotate; and a movable base 5 being fixedly connected to the servo motor 8. The cross-sectional area of ​​the groove 6 is larger than the cross-sectional area of ​​the front strip 3, and the drive shaft 7 is perpendicular to the front strip 3.

[0032] The implementation principle of this embodiment is as follows: when the photomask model does not conform to the set model, the servo motor 8 can be activated by the wireless controller 23. The output of the servo motor 8 will drive the transmission shaft 7 to rotate. In this way, the transmission shaft 7 rotates inside the material pick-up tray 1, and the transmission shaft 7 can also rotate inside the trough 6. This causes the transmission shaft 7 to drive the front strip 3 to rotate clockwise, ensuring that the upper surface of the front strip 3 is limited to the lower surface of the material pick-up tray 1. At the same time, the front strip 3 is no longer perpendicular to the trough 6, but instead forms an angled area between the front strip 3 and the trough 6. In this way, the front strip 3 can restrict the front area of ​​the lower surface of the material pick-up tray 1, preventing the material pick-up tray 1 from moving downward.

[0033] In this embodiment, as Figure 4 As shown, the limiting components include: a support frame 9, which slides on the outer wall of the inclined insertion rod 4, and guides the movement of the inclined insertion rod 4; the support frame 9 is fixedly connected to the material receiving tray 1; a sleeve block 10, which slides on the inner wall of the support frame 9, and is fixedly connected to the inclined insertion rod 4; a support block 12 is fixed to one side of the outer wall of the support frame 9; a spring piece 11 is fixed between the support block 12 and the sleeve block 10, and the spring piece 11 provides elastic force to the sleeve block 10; and an inclined bar 13, which is fixed to the outer wall of the inclined insertion rod 4 and located away from the front bar 3; a side rod 14 is fixed to one side of the inclined bar 13, and the side rod 14 is used to insert into the moving seat 5. The inclined insertion rod 4 is inclined, and there is an angle between the inclined insertion rod 4 and the front bar 3. There is a gap between the side rod 14 and the inclined insertion rod 4, and the length of the side rod 14 is less than the length of the inclined insertion rod 4.

[0034] The implementation principle of this embodiment is as follows: During the clockwise rotation of the front bar 3, the front bar 3 will press the inclined surface of the end of the inclined rod 4. As the front bar 3 continues to rotate and press the inclined rod 4, the inclined rod 4 will tilt and move to the right after being subjected to force. The inclined rod 4 will tilt and move to the right stably along the inner wall of the support frame 9. The inclined rod 4 will drive the sleeve block 10 to tilt and move to the right. The sleeve block 10 will press on the spring piece 11. At this time, the spring piece 11 will form a pressing operation on the support block 12, thereby providing a pressing elastic force to the sleeve block 10. At the same time, the inclined rod 4 will drive the inclined bar 13 to tilt and move to the right. The inclined bar 13 will drive the side rod 14 to tilt and move to the right. The side rod 14 will be inserted into the moving seat 5. At the same time, the inclined rod 4 will also be inserted into the moving seat 5. In this way, the inclined rod 4 and the side rod 14 can be inserted into the moving seat 5 in an inclined state, forming a double-point tilt restriction. Thus, the rear part of the material picking tray 1 will be tilted and moved downward by the inclined rod 4 and the side rod 14.

[0035] Example 3: Based on Example 2, this example discloses a photomask feeding device for a chip lithography machine: In this embodiment, as Figure 5 - Figure 7 As shown, the spacer includes: a sliding block 15, fixed to the upper surface of the inclined rod 4, the sliding block 15 being used to slide along the inner wall of the material receiving tray 1; a guide rod 16, installed on the inner wall of the sliding block 15, the guide rod 16 being fixedly connected to the material receiving tray 1, the guide rod 16 being used to guide the sliding block 15 to slide; and a linkage bar 17, fixed to the upper surface of the sliding block 15, the top end of the linkage bar 17 being fixed with a lifting frame 18. Linkage rod 19 slides on the inner wall of lifting frame 18. Lifting frame 18 is inclined and used to squeeze linkage rod 19, causing linkage rod 19 to move upward. Groove rod 20 is fixed to one end of linkage rod 19. A ring tube 21 is fixed to the bottom end of groove rod 20. Multiple suction tubes 22 are fixedly connected to the lower surface of ring tube 21. Suction tubes 22 are slidably connected to material feeding plate 1 and connected to suction cup 2.

[0036] The implementation principle of this embodiment is as follows: When the inclined insertion rod 4 is subjected to force and tilts to the right, it will cause the sliding block 15 to tilt to the right. The sliding block 15 moves along the outer wall of the guide rod 16 to ensure that the sliding block 15 tilts to the right stably. The sliding block 15 will cause the linkage bar 17 to tilt to the right, and the linkage bar 17 will cause the lifting frame 18 to tilt to the right. Due to the tilted setting, the inclined surface of the inner wall of the lifting frame 18 will squeeze the linkage rod 19, causing the linkage rod 19 to start to move upward. At the same time, the linkage rod 19 drives... The groove rod 20 moves upward, which in turn drives the ring tube 21 to move upward, increasing the distance between the ring tube 21 and the material picking tray 1. At the same time, the ring tube 21 drives multiple suction tubes 22 to move upward, so that the multiple suction tubes 22 are lifted upward along the inside of the material picking tray 1. Simultaneously, the suction tubes 22 cause the suction cups 2 to move upward, increasing the distance between the multiple suction cups 2 and the photomask. This ensures that the multiple suction cups 2 will not be accidentally or operated by other personnel to pick up the photomask. At this time, the photomask model does not match the set model, thus preventing such non-compliant material picking and transportation.

[0037] Example 4: Based on Example 3, this example discloses a photomask feeding device for a chip lithography machine: In this embodiment, as Figure 3 - Figure 5 As shown, the self-test component includes a barcode recognition sensor 27, installed on the outer wall of the material handling tray 1. The barcode recognition sensor 27 can sense and identify the barcode model value on the photomask. If the identified value differs from the photomask barcode value set internally in the wireless controller 23, the wireless controller 23 activates the servo motor 8 to prevent accidental material handling. The wireless controller 23 also wirelessly transmits the incorrect material handling information to a back-end computer for monitoring by supervisors. The servo motor 8 can only be controlled wirelessly remotely by supervisors. If the barcode value identified by the barcode recognition sensor 27 matches the photomask barcode value set internally in the wireless controller 23, the wireless controller 23 does not need to activate the servo motor 8, and can instead activate the electric cylinder 28 for material handling and transport.

[0038] In this embodiment, as Figure 5 - Figure 8As shown, multiple suction tubes 22 are arranged in a circular pattern. A valve 24 is connected to the upper surface of the ring tube 21, and a negative pressure hose 25 is threaded to the top of the valve 24. A negative pressure fan 26 is installed at one end of the negative pressure hose 25. The negative pressure fan 26 is used to create a negative pressure state for the air inside the negative pressure hose 25. A threaded sleeve 30 is fixed to the bottom of the feeding tray 1. A screw 32 is threaded to the inner wall of the threaded sleeve 30. An installation frame 31 is installed on the outer wall of the threaded sleeve 30. The installation frame 31 is used to guide the sliding of the threaded sleeve 30. A servo motor 33 is installed at one end of the installation frame 31. The servo motor 33 is used to drive the screw 32 to rotate. A wireless controller 23 is provided on one side of the threaded sleeve 30. The wireless controller 23 is electrically connected to the servo motor 33. A pressure sensor 29 is installed on the upper surface of the material receiving tray 1 near its center point. An electric cylinder 28 is installed on the sensing end of the pressure sensor 29. The output end of the electric cylinder 28 is fixedly connected to the sensing end of the pressure sensor 29. The output end of the electric cylinder 28 is used to push the pressure sensor 29 to move. The electric cylinder 28 is fixedly connected to the moving base 5.

[0039] The implementation principle of this embodiment is as follows: When the material picking and transporting operation is performed, the pressure sensor 29 is pushed down by the electric cylinder 28. The pressure sensor 29 drives the picking tray 1 to move down. At this time, the front strip 3 and the groove 6 are vertically aligned. Therefore, the picking tray 1 can move down along the outside of the front strip 3. The groove 6 passes through the outside of the front strip 3 and moves down. The multiple suction tubes 22 on the picking tray 1 can move down. The suction tubes 22 cause the suction cup 2 to be pressed on the photomask. At the same time, the sensing end of the pressure sensor 29 is squeezed by the output end of the electric cylinder 28. When the pressure value sensed by the sensing end of the pressure sensor 29 is the pressure value set by the wireless controller 23, the electric cylinder 28 is turned off by the wireless controller 23.

[0040] At this time, the wireless controller 23 opens the valve 24 and starts the negative pressure fan 26. The negative pressure fan 26 generates negative pressure inside the negative pressure hose 25, valve 24, suction tube 22, and suction cup 2, thus creating negative pressure to pick up the photomask. After picking up, the electric cylinder 28 drives the pressure sensor 29 to move upward. The pressure sensor 29 drives the picking plate 1 to move upward. At the same time, the servo motor 33 is started, which drives the screw 32 to rotate. The screw 32 rotates stably inside the mounting frame 31. The screw 32 drives the threaded sleeve 30 to move to the left under the action of the thread meshing force. The threaded sleeve 30 drives the picking plate 1 to move to the left until the picking plate 1 moves to the designated transportation position, ensuring that the photomask on the suction cup 2 can be picked up and transported.

[0041] All contents not described in detail in the specification are existing technologies known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited; conventional equipment can be used. Electrical control components not mentioned in this technical solution are not shown in the figures because they are existing technologies, and will not be described here.

[0042] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A photomask feeding device for a chip lithography machine, comprising a feeding tray (1) and a plurality of suction cups (2) disposed below it, characterized in that: The suction cup (2) is used to pick up the photomask and transport it; The front strip (3) is located on one side of the suction cup (2), and a drive component is mounted on the front strip (3); An inclined rod (4) is provided on one side of the front strip (3). A limiting member is provided on the outer wall of the inclined rod (4). A movable seat (5) is provided on one side of the inclined rod (4). A spacer is installed on the upper surface of the inclined rod (4), and the spacer is connected to a plurality of suction cups (2); The self-inspection component is installed on the outer wall of the material handling tray (1); The self-testing component is used to detect the photomask model. If the model does not match the set model, the front strip (3) is driven to rotate by the driving component to limit the front of the material picker (1) from moving downward. When the front strip (3) rotates, it presses the inclined insertion rod (4) so ​​that the inclined insertion rod (4) is inserted into the moving seat (5), and the inclined insertion rod (4) drives the limiting member to be inserted into the moving seat (5) to limit the rear of the picking plate (1) from moving downward. The inclined rod (4) simultaneously drives the spacer to move, increasing the distance between the multiple suction cups (2) and the photomask.

2. The photomask feeding device for a chip lithography machine according to claim 1, characterized in that: The driving component includes: The groove (6) is opened above the front strip (3), and a drive shaft (7) is rotatably installed inside the groove (6). The bottom end of the drive shaft (7) is fixedly connected to the front strip (3). A servo motor (8) is mounted on the top of a drive shaft (7). The output end of the servo motor (8) is used to drive the drive shaft (7) to rotate. The movable seat (5) is fixedly connected to the servo motor (8).

3. The photomask feeding device for a chip lithography machine according to claim 2, characterized in that: The cross-sectional area of ​​the groove (6) is larger than that of the front bar (3), and the drive shaft (7) is perpendicular to the front bar (3).

4. The photomask feeding device for a chip lithography machine according to claim 1, characterized in that: The limiting element includes: The support frame (9) slides on the outer wall of the inclined rod (4). The support frame (9) is used to guide the movement of the inclined rod (4). The support frame (9) is fixedly connected to the material picking plate (1). Sleeve block (10) slides on the inner wall of support frame (9). Sleeve block (10) is fixedly connected to inclined rod (4). Support block (12) is fixed on one side of the outer wall of support frame (9). Support block (12) is fixed to sleeve block (10) by spring piece (11). Spring piece (11) is used to provide elastic force to sleeve block (10). An oblique bar (13) is fixed to the outer wall of the oblique insertion rod (4) and located away from the front bar (3). A side rod (14) is fixed to one side of the oblique bar (13), and the side rod (14) is used to insert into the interior of the movable seat (5).

5. The photomask feeding device for a chip lithography machine according to claim 4, characterized in that: The inclined insertion rod (4) is set at an angle, and there is an angle between the inclined insertion rod (4) and the front strip (3).

6. The photomask feeding device for a chip lithography machine according to claim 4, characterized in that: There is a gap between the side rod (14) and the inclined rod (4), and the length of the side rod (14) is less than the length of the inclined rod (4).

7. The photomask feeding device for a chip lithography machine according to claim 1, characterized in that: The spacer includes: A sliding block (15) is fixed to the upper surface of the inclined insertion rod (4), and the sliding block (15) is used to slide along the inner wall of the material taking plate (1); A guide rod (16) is installed on the inner wall of the sliding block (15). The guide rod (16) is fixedly connected to the material receiving plate (1). The guide rod (16) is used to guide the sliding block (15) to slide. Linkage bar (17) is fixed on the upper surface of sliding block (15), and lifting frame (18) is fixed at the top of linkage bar (17). Linkage rod (19) slides on the inner wall of lifting frame (18), which is inclined and is used to squeeze linkage rod (19) so that linkage rod (19) moves upward; The groove rod (20) is fixed at one end of the linkage rod (19). The bottom end of the groove rod (20) is fixed with a ring tube (21). The lower surface of the ring tube (21) is fixedly connected with multiple suction tubes (22). The suction tubes (22) are slidably connected to the material picking plate (1). The suction tubes (22) are connected to the suction cup (2).

8. The photomask feeding device for a chip lithography machine according to claim 7, characterized in that: Multiple suction tubes (22) are arranged in a circular distribution. A valve (24) is connected to the upper surface of the ring tube (21), and a negative pressure hose (25) is threaded to the top of the valve (24). A negative pressure fan (26) is installed at one end of the negative pressure hose (25). The negative pressure fan (26) is used to create a negative pressure state for the air inside the negative pressure hose (25).

9. The photomask feeding device for a chip lithography machine according to claim 1, characterized in that: The self-test component includes: A barcode recognition sensor (27) is installed on the outer wall of the feeding tray (1).

10. The photomask feeding device for a chip lithography machine according to claim 1, characterized in that: A pressure sensor (29) is installed on the upper surface of the feeding tray (1) and near its center point. An electric cylinder (28) is installed on the sensing end of the pressure sensor (29). The output end of the electric cylinder (28) is fixedly connected to the sensing end of the pressure sensor (29). The output end of the electric cylinder (28) is used to push the pressure sensor (29) to move. The electric cylinder (28) is fixedly connected to the moving seat (5). The bottom end of the feeding disc (1) is fixed with a threaded sleeve (30), the inner wall of the threaded sleeve (30) is threaded with a screw (32), and the outer wall of the threaded sleeve (30) is equipped with an installation frame (31), which is used to guide the threaded sleeve (30) to slide. The servo motor (33) is installed at one end of the mounting frame (31). The servo motor (33) is used to drive the screw (32) to rotate. A wireless controller (23) is provided on one side of the threaded sleeve (30). The wireless controller (23) is electrically connected to the servo motor (33).

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