A high-efficiency coating device for wafers

Abstract

The present application relates to wafer coating equipment technical field, mainly relates to a kind of high-efficiency coating equipment for wafer, including the umbrella stand for wafer placement, the umbrella stand isomagnetically arranged with several planes, and recess for wafer placement is opened in plane, further including the placement frame for wafer installation, the placement frame is opened with the clamping slot corresponding to recess, the umbrella stand is opened with the alignment hole, and the placement frame is fixed with the butt joint column corresponding to the alignment hole, and rotating installation is held in the placement frame, the placement frame is fixed with arc rail plate, the installation mode between traditional wafer and umbrella stand is optimized in the present application, utilize the placement frame and the holding frame on placement frame designed, personnel can very conveniently with the umbrella stand one plane all wafer disassembly and placement, utilize the design of butt joint and positioning element to realize quick installation, to improve installation efficiency.

Description

Technical Field

[0001] This invention relates to the field of wafer coating equipment technology, specifically to a high-efficiency coating equipment for wafers. Background Technology

[0002] Wafer coating is one of the core processes in semiconductor manufacturing and advanced electronic device production. It refers to the process of depositing one or more thin films with specific functions on the surface of a wafer through physical, chemical or physicochemical methods.

[0003] Evaporation coating is a type of physical vapor deposition. It uses high temperature to evaporate the film material, which then turns into atomic / ionic vapor and diffuses in all directions. In a vacuum chamber, the vapor rises to the wafer on the scaffold, where it is deposited as a film, thus completing the coating process.

[0004] The existing umbrella frame has multiple sloping surfaces at the bottom. The traditional method of wafer installation involves manual fixing of the wafer to the sloping surface at the bottom of the umbrella frame by personnel using clips or mounting brackets. Since the umbrella frame usually has a number of wafers installed at different angles, this requires personnel to repeatedly disassemble and install the wafers, resulting in a large amount of labor. Summary of the Invention

[0005] The purpose of this invention is to provide a high-efficiency coating equipment for wafers, so as to solve the problem mentioned in the background art that the large number of wafers required for placement and removal before and after coating results in a long installation and removal time.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a high-efficiency coating equipment for wafers, comprising an umbrella frame for placing wafers, wherein the umbrella frame has several planes arranged at equal angles, and grooves for placing wafers are formed on the planes; a placement frame for wafer mounting is also included, wherein the placement frame has slots corresponding to the grooves; an alignment hole is formed on the umbrella frame, and a docking post adapted to the alignment hole is fixed on the placement frame; and a holding frame rotatably mounted on the placement frame is included, wherein an arc-shaped rail plate is fixed on the placement frame, and an arc-shaped groove is formed on the arc-shaped rail plate; a positioning element adapted to the arc-shaped groove is installed at the tail end of the holding frame; and a docking part for docking the placement frame and the umbrella frame is installed on the holding frame.

[0007] Preferably, a mating plate is fixed on the umbrella frame, and the mating plate is adapted to the outer end of the display stand.

[0008] Preferably, the holding frame includes a rotating seat that is rotatably connected to the placement frame, a rod is slidably inserted on the rotating seat, and a swing seat is slidably inserted on the rod, the docking part is installed on the rod, and the positioning member is installed on the swing seat.

[0009] Preferably, the positioning element includes a positioning rod slidably inserted into the swing seat, an end plate fixed on the positioning rod that abuts against the swing seat, and the bottom of the positioning rod being adapted to the arc-shaped groove. A compression spring fixed to the outside of the positioning rod and fixed to the end plate and the swing seat is fixed to the outside of the end plate, and a linkage element adapted to the insertion rod is fixed to the outside of the end plate.

[0010] Preferably, the docking part includes a handle fixed to the insertion rod, a connecting plate fixed to the handle, and a docking rod fixed to the connecting plate. A docking cylinder adapted to the docking rod is fixed to the umbrella frame, and a push-opening spring that abuts against the handle and the rotating seat is sleeved on the outside of the insertion rod.

[0011] Preferably, the linkage component includes a linkage end fixed to the outer end of the insertion rod, and an inclined block adapted to the linkage end is fixed to the outer end of the end plate.

[0012] Preferably, the two ends of the arc-shaped groove are provided with positioning holes that are adapted to the positioning rod.

[0013] Preferably, the card slot has an opening, and the opening is connected to the card slot.

[0014] Preferably, the outer side of the insertion rod has at least one flat surface, so that the insertion rod will not rotate when it moves on the rotating seat.

[0015] Preferably, a limit ring is fixed to the outer side of the positioning rod.

[0016] Compared with the prior art, the beneficial effects of the present invention are:

[0017] This invention optimizes the traditional installation method between wafers and umbrella stands. By using a designed placement rack and a holding rack on the placement rack, personnel can easily disassemble and place all wafers on a plane of the umbrella stand. The designed docking part and positioning parts enable quick installation, thereby improving installation efficiency. Attached Figure Description

[0018] Figure 1 This is a schematic diagram showing the docking of one of the display stands with the bottom of the umbrella stand according to the present invention;

[0019] Figure 2 This is a schematic diagram of the structure of the display stand after it is detached from the umbrella frame.

[0020] Figure 3 This is a schematic diagram of the placement rack and wafer docking in this invention;

[0021] Figure 4 This is a schematic diagram of the bottom holding frame structure of the display rack of the present invention;

[0022] Figure 5 for Figure 4 Enlarged view of point A in the middle;

[0023] Figure 6 This is a side view of the display rack of the present invention;

[0024] Figure 7 for Figure 6 Enlarged view of section B in the middle.

[0025] In the diagram: 1. Umbrella frame; 2. Groove; 3. Display rack; 4. Slot; 5. Alignment hole; 6. Connecting post; 7. Curved rail plate; 8. Curved groove; 9. Holding frame; 10. Positioning component; 11. Connecting part; 12. Abutting plate; 13. Rotating seat; 14. Insert rod; 15. Swinging seat; 16. Positioning rod; 17. End plate; 18. Compression spring; 19. Linkage component; 20. Handle; 21. Connecting rod; 22. Connecting cylinder; 23. Push-open spring; 24. Linkage end; 25. Inclined block; 26. Positioning hole; 27. Opening; 28. Limiting ring. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] Example 1: Please refer to Figures 1-4 The figure shows a high-efficiency coating equipment for wafers, including an umbrella frame 1 for placing wafers. The umbrella frame 1 has several planes at equal angles, and grooves 2 for placing wafers are opened on the planes. It also includes a placement rack 3 for wafer mounting. The placement rack 3 has slots 4 corresponding to the grooves 2. The umbrella frame 1 has alignment holes 5. The placement rack 3 has docking posts 6 that are adapted to the alignment holes 5. The holding rack 9 is rotatably mounted on the placement rack 3. The placement rack 3 has an arc-shaped rail plate 7. The arc-shaped rail plate 7 has an arc-shaped groove 8. The tail end of the holding rack 9 is equipped with a positioning part 10 that is adapted to the arc-shaped groove 8. The holding rack 9 has a docking part 11 for docking the placement rack 3 and the umbrella frame 1.

[0028] In this embodiment, multiple wafers are placed using the designed placement rack 3. Then, the operator holds the holding frame 9 and places the placement rack 3 on a plane of the umbrella frame 1. After the docking post 6 aligns with the alignment hole 5, the operator rotates the holding frame 9 along the arc groove 8 until the positioning part 10 is positioned at one end of the arc groove 8. The docking part 11 is then aligned with the plane of the umbrella frame 1, thus achieving quick placement and positioning of multiple wafers at once.

[0029] After the coating is completed, the operator holds the holding frame 9 and rotates it to open the two holding frames 9. Then, it is positioned by the positioning component 10 and the other end of the arc groove 8. The operator can quickly disassemble and reassemble multiple wafers at one time by holding the holding frame 9. Compared with the traditional single wafer installation and removal method, the installation and removal efficiency is high and more labor-saving.

[0030] It should also be noted that, in order to ensure that the docking post 6 on the display rack 3 is accurately inserted into the alignment hole 5, a mating plate 12 is fixed on the umbrella frame 1. The mating plate 12 is arc-shaped and is adapted to the outer end of the display rack 3.

[0031] For further details, please refer to [link / reference]. Figure 3 - Figure 6 The holding frame 9 includes a rotating seat 13 that is rotatably connected to the placement frame 3. A rod 14 is slidably inserted on the rotating seat 13, and a swing seat 15 is slidably inserted on the rod 14. The docking part 11 is installed on the rod 14, and the positioning part 10 is installed on the swing seat 15.

[0032] In this embodiment, the insert rod 14 on the holding frame 9 can move accordingly as the positioning member 10 moves, and the swing seat 15 can swing accordingly in the arc groove 8 as the rotating seat 13 rotates.

[0033] The positioning component 10 includes a positioning rod 16 that is slidably inserted into the swing seat 15. An end plate 17 that abuts against the swing seat 15 is fixed on the positioning rod 16. The bottom of the positioning rod 16 is adapted to the arc groove 8. A compression spring 18 that is fixed to the end plate 17 and the swing seat 15 is fixed on the outside of the positioning rod 16. A linkage component 19 that is adapted to the insertion rod 14 is fixed on the outer end of the end plate 17.

[0034] It should be noted that, in order to enable the positioning rod 16 to be positioned at both ends of the arc groove 8, positioning holes 26 adapted to the positioning rod 16 are provided at both ends of the arc groove 8.

[0035] For further details, please refer to [link / reference]. Figure 5 - Figure 7 The docking part 11 includes a handle 20 fixed on the insertion rod 14, a connecting plate fixed on the handle 20, a docking rod 21 fixed on the connecting plate, a docking cylinder 22 adapted to the docking rod 21 fixed on the umbrella frame 1, and a push-opening spring 23 that abuts against the handle 20 and the rotating seat 13 on the outside of the insertion rod 14.

[0036] Also see Figure 5 and Figure 7 The linkage component 19 includes a linkage end 24 fixed to the outer end of the insertion rod 14, and an inclined block 25 adapted to the linkage end 24 is fixed to the outer end of the end plate 17.

[0037] In this embodiment, the principle of convenient installation and removal of the display shelf 3 is utilized by the holding frame 9:

[0038] First, the operator places several wafers into the slots 4 on the placement rack 3. Then, the placement rack 3 with the wafers placed is aligned with a plane of the umbrella frame 1, so that the outer end of the placement rack 3 is aligned with the abutment plate 12. Then, the docking post 6 is inserted into the alignment hole 5. Next, the operator rotates the two holding frames 9 so that their positioning parts 10 move along the arc groove 8 to the positioning hole 26 at one end. Before rotating to the positioning hole 26, the operator moves the handle 20 along the insertion rod 14 so that the insertion rod 14 on the handle 20 drives the linkage end 24 to disengage from the inclined block 25. Then, it is moved to the end of the arc groove 8. The operator releases the handle 20. Under the action of the push spring 23, the handle 20 moves outward along the insertion rod 14 and inserts the docking rod 21 into the docking cylinder 22 to achieve docking. At the same time, the linkage end 24 will squeeze the inclined block 25 so that the positioning rod 16 is engaged in the positioning hole 26.

[0039] During subsequent wafer removal, the operator only needs to push the handle 20 to disengage the docking rod 21 from the docking cylinder 22. Then, under the action of the compression spring 18, the positioning rod 16 disengages from the positioning hole 26. The operator then rotates the handle 20 to move the positioning rod 16 along the arc groove 8 to the other end. The operator then stops pushing the handle 20 and, under the action of the push-open spring 23, the handle 20 moves the insertion rod 14 outward and pushes the linkage end 24 to compress the inclined block 25. The inclined block 25 then causes the positioning rod 16 to engage with another positioning hole 26. The operator then lifts the rack 3 with both hands to achieve the operation of installing and removing multiple wafers at once.

[0040] In this embodiment, when the holding frame 9 is in the open state, the positioning member 10 is engaged with the positioning hole 26 at one end of the arc groove 8. At this time, the personnel can hold the holding frame 9 to lift and remove the display rack 3.

[0041] After the personnel place the placement frame 3 onto the plane of the umbrella frame 1, they adjust the holding frame 9 so that the two holding frames 9 are in a parallel state. At this time, the two horizontally placed holding frames 9 do not affect the wafer coating operation.

[0042] It should also be noted that, in order to facilitate personnel handling when taking out the coated wafer, an opening 27 is provided on the card slot 4, and the opening 27 is connected to the card slot 4.

[0043] Example 2: Please refer to Figure 6 and Figure 7 This embodiment further explains the first embodiment, the difference being that the insertion rod 14 and the positioning rod 16 are optimized, making them more stable during use.

[0044] Specifically, the outer side of the insertion rod 14 has at least one flat surface, so that the insertion rod 14 will not rotate when it moves on the rotating seat 13. At the same time, the outer side of the positioning rod 16 is fixed with a limit ring 28, which ensures that the positioning rod 16 is inserted into the positioning hole 26 after being squeezed by the linkage end 24, but will not detach from the placement frame 3, so that it will fit more tightly with the plane of the umbrella frame 1 later.

[0045] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0046] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-efficiency coating equipment for wafers, comprising: an umbrella frame (1) for wafer placement, the umbrella frame (1) being provided with a plurality of planes at equal angles, and the planes being provided with grooves (2) for wafer placement; characterized in that it further comprises: a placement frame (3) for wafer installation, the placement frame (3) being provided with clamping grooves (4) corresponding to the grooves (2), the umbrella frame (1) being provided with alignment holes (5), and the placement frame (3) being fixed with butt-joint columns (6) matching the alignment holes (5), and a holding frame (9) rotatably installed on the placement frame (3), the placement frame (3) being fixed with an arc-shaped rail plate (7), and the arc-shaped rail plate (7) being provided with an arc-shaped groove (8), the tail end of the holding frame (9) being installed with a positioning member (10) matching the arc-shaped groove (8), and the holding frame (9) being installed with a butt-joint part (11) for butt joint of the placement frame (3) and the umbrella frame (1); the umbrella frame (1) being fixed with a counter plate (12) matching the outer end of the placement frame (3); the holding frame (9) comprising a rotating seat (13) rotatably connected with the placement frame (3), the rotating seat (13) being slidably inserted with a plug rod (14), and the plug rod (14) being slidably inserted with a swing seat (15), the butt-joint part (11) being installed on the plug rod (14), and the positioning member (10) being installed on the swing seat (15); the positioning member (10) comprising a positioning rod (16) slidably inserted in the swing seat (15), the positioning rod (16) being fixed with an end plate (17) abutting against the swing seat (15), the bottom of the positioning rod (16) matching the arc-shaped groove (8), the outer side of the positioning rod (16) being fixed with an extrusion spring (18) fixed with the end plate (17) and the swing seat (15), and the outer end of the end plate (17) being fixed with a linkage member (19) matching the plug rod (14); the butt-joint part (11) comprising a handle (20) fixed on the plug rod (14), the handle (20) being fixed with a connecting plate, and the connecting plate being fixed with a butt-joint rod (21), the umbrella frame (1) being fixed with a butt-joint cylinder (22) matching the butt-joint rod (21), and the outer side of the plug rod (14) being sleeved with a push-away spring (23) abutting against the handle (20) and the rotating seat (13); the linkage member (19) comprising a linkage end (24) fixed on the outer end of the plug rod (14), and the outer end of the end plate (17) being fixed with an inclined block (25) matching the linkage end (24); both ends of the arc-shaped groove (8) being provided with positioning holes (26) matching the positioning rod (16). 2.The high-efficiency coating equipment for wafers of claim 1, wherein: the clamping groove (4) being provided with an opening (27) communicating with the clamping groove (4).

3. The high-efficiency coating device for wafers according to claim 1, characterized in that: the outer side of the plug rod (14) being provided with at least one plane, so that the plug rod (14) does not rotate when moving on the rotating seat (13).

4. The high-efficiency coating device for wafers according to claim 1, characterized in that: the outer side of the positioning rod (16) being fixed with a limiting ring (28).

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