Silicon carbide polishing slurry based on multimodal dispersion technology and method of making

By modifying silicon carbide micro powder using multimodal dispersion technology, the problems of dispersion stability and grinding damage in silicon carbide grinding slurry are solved, enabling efficient ultra-precision machining of silicon carbide, which is suitable for high-end optical communication devices.

CN121271506BActive Publication Date: 2026-06-09绍兴自远磨具有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
绍兴自远磨具有限公司
Filing Date
2025-10-21
Publication Date
2026-06-09

AI Technical Summary

Technical Problem

Existing silicon carbide polishing slurries suffer from poor dispersion stability and are prone to deep scratches and subsurface damage, making it difficult to meet the processing requirements of high-end devices.

Method used

A combination of mechanical stirring, ultrasonic dispersion, and high-pressure homogenization dispersion with chemical modification was employed. Silicon carbide micropowder was modified with a nitrogen crown ether silane coupling agent to form a stable solvation layer, reduce surface energy, and minimize particle collision and impact during the grinding process.

Benefits of technology

It significantly improves the dispersion stability of silicon carbide micro powder, reduces grinding damage, and enhances the smoothness and gloss of the ground surface, making it suitable for the manufacture of high-end optical communication devices.

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Abstract

The application discloses a kind of silicon carbide grinding slurry based on multimodal dispersion technology and preparation method thereof, belong to silicon carbide grinding slurry technical field.The method is combined by chemical modification and multi-physical dispersion means, realize the efficient stable dispersion of silicon carbide micro powder, while reducing surface damage in the process of grinding.The specific steps include: surface treatment of silicon carbide, preparation of nitrogen heterocyclic crown ether based silane coupling agent, preparation of surface modified silicon carbide, multimodal dispersion treatment.The application reduces the surface energy of silicon carbide by chemical modification, combined with multi-physical dispersion means to inhibit particle agglomeration, significantly improve the dispersion stability of slurry;At the same time, the flexible interface formed by modification layer can buffer the rigid collision in the process of grinding, reduce deep scratch and subsurface damage, improve the flatness and smoothness of the surface to be ground, suitable for high-end optical communication devices, power electronic devices and other fields of silicon carbide substrate ultra-precision grinding processing.
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Citation Information

Patent Citations

  • Preparing method for surface modified silicon carbide based on oil-based grinding and polishing agent

    CN105733311A

  • Silicon carbide ultrafine powder surface modification method

    CN116161963A