Spectrum calibration method, device, equipment and system for monochromator

Abstract

The invention discloses a spectrum calibration method, device, equipment and system for a monochromator, and the method comprises the steps: controlling a first diaphragm and a second diaphragm to move reversely on a focal plane of a first-stage light path along a first direction perpendicular to an optical axis until a first distance exists between the first diaphragm and the second diaphragm; the first diaphragm and the second diaphragm are controlled to be kept relatively static, the whole diaphragm moves in the first direction, and meanwhile first spectral information in the moving process is collected; determining a reference spectrum according to the first spectrum information; the first diaphragm and the second diaphragm are controlled to be kept relatively static at different preset intervals in sequence, the whole diaphragm moves in the first direction, and meanwhile second spectral information in the moving process is collected; and according to the comparison result of the second spectrum information and the reference spectrum, determining the corresponding relationship between the positions of the first diaphragm and the second diaphragm and the wavelength and the bandwidth. An additional calibration light source and any hardware operation are not needed, the monochromator can work in a closed environment for a long time, and high-precision automatic calibration can be achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of spectral instrument technology, and in particular to a monochromator spectral calibration method, device, equipment and system. BACKGROUND

[0002] The monochromator is a kind of spectrometer, and a monochromator based on dispersion spectrometry principle is composed of an entrance slit, a collimator, a dispersion element, a focusing mirror and an exit slit. The basic function is to separate the incident polychromatic light by the dispersion element and output different center wavelengths and bandwidths as needed.

[0003] Due to the characteristics of high precision and high sensitivity, the stress release after long-term use or the mechanical structure position drift in the transportation process of the monochromator will cause changes in the optical path and cause the shift of wavelength or bandwidth. Therefore, spectral calibration needs to be performed regularly. The commonly used spectral calibration is to use standard calibration light sources such as mercury argon lamp, xenon lamp or filter, to obtain a fitting function of the relationship between the known characteristic wavelength and the actual position of the light spot, so as to realize spectral calibration.

[0004] When integrated in a complex optical system, additional calibration light paths and calibration standard light sources need to be considered due to the inability to perform offline calibration, which increases the cost and system complexity. Therefore, the traditional calibration scheme cannot adapt to the integrated and modular monochromator application scenario. SUMMARY

[0005] The present application provides a monochromator spectral calibration method, device, equipment and system, which does not require additional calibration light sources and any hardware operation, and can realize high-precision automatic calibration even when the monochromator works in a closed environment for a long time.

[0006] In a first aspect, the present application provides a monochromator spectral calibration method. The monochromator has a double-cascade structure and includes a first-stage light path, a second-stage light path, a first light stop and a second light stop. The first light stop and the second light stop are located on the focal plane of the first-stage light path. A first light beam incident into the monochromator is moved by the first light stop and the second light stop driven by a motor after passing through the first-stage light path, and then the wavelength and bandwidth are selected. After passing through the second-stage light path, the first light beam is emitted from the monochromator and is collected by a spectrometer.

[0007] The monochromator spectral calibration method includes the following steps:

[0008] The first light stop and the second light stop are controlled to move reversely along a first direction perpendicular to the optical axis on the focal plane of the first-stage light path until a first interval exists between the first light stop and the second light stop. When the first interval exists between the first light stop and the second light stop, the spectrometer can recognize the spectrum.

[0009] controlling the first aperture and the second aperture to keep relatively static between each other and move as a whole in the first direction while collecting first spectral information during the movement;

[0010] determining a reference spectrum according to the first spectral information;

[0011] controlling the first aperture and the second aperture to keep relatively static between each other with different preset interval distance in sequence and move as a whole in the first direction while collecting second spectral information during the movement;

[0012] determining the corresponding relationship between the positions of the first aperture and the second aperture and the wavelength and bandwidth according to the comparison result of the second spectral information and the reference spectrum.

[0013] Optionally, the determining the reference spectrum according to the first spectral information comprises:

[0014] splicing the spectra in the first spectral information to determine the reference spectrum.

[0015] Optionally, the determining the corresponding relationship between the positions of the first aperture and the second aperture and the wavelength and bandwidth according to the comparison result of the second spectral information and the reference spectrum comprises:

[0016] comparing the spectra in the second spectral information with the reference spectrum to determine the corresponding wavelength and bandwidth under all positions of the first aperture and the second aperture;

[0017] functionally fitting the positions of the first aperture and the second aperture with the corresponding wavelength and bandwidth to determine the corresponding relationship between the positions of the first aperture and the second aperture and the wavelength and bandwidth.

[0018] Optionally, the comparing the spectra in the second spectral information with the reference spectrum to determine the corresponding wavelength and bandwidth under all positions of the first aperture and the second aperture comprises:

[0019] subtracting a to-be-calculated spectrum in the second spectral information from the reference spectrum to determine a difference spectrum; superimposing the difference spectrum with the to-be-calculated spectrum to determine first and second spectral intersection points of the difference spectrum and the to-be-calculated spectrum; wherein the abscissa of the first spectral intersection point is smaller than the abscissa of the second spectral intersection point;

[0020] determining the abscissa of the first spectral intersection point as a start wavelength of the to-be-calculated spectrum and the abscissa of the second spectral intersection point as a cut-off wavelength of the to-be-calculated spectrum;

[0021] A result of subtracting the abscissa of the first spectral intersection point from the abscissa of the second spectral intersection point is a bandwidth of the spectrum to be calculated.

[0022] In a second aspect, the embodiments of the present application further provide a spectral calibration device of a monochromator, comprising:

[0023] The diaphragm control module is configured to control the first diaphragm and the second diaphragm to move reversely along a first direction perpendicular to the optical axis on the focal plane of the first-order light path until a first interval exists between the first diaphragm and the second diaphragm; and when the first interval exists between the first diaphragm and the second diaphragm, the spectrometer can recognize a spectrum.

[0024] The spectral information acquisition module is configured to acquire first spectral information in a moving process while the first diaphragm and the second diaphragm are controlled by the diaphragm control module to keep relatively static and move as a whole in the first direction.

[0025] The reference spectrum determination module is configured to determine a reference spectrum according to the first spectral information.

[0026] The spectral information acquisition module is further configured to acquire second spectral information in a moving process while the first diaphragm and the second diaphragm are controlled by the diaphragm control module to keep relatively static and move as a whole in the first direction in sequence with different preset intervals.

[0027] The corresponding relationship determination module is configured to determine a corresponding relationship between positions of the first diaphragm and the second diaphragm and wavelengths and bandwidths according to a comparison result of the second spectral information and the reference spectrum.

[0028] Optionally, the corresponding relationship determination module comprises:

[0029] The difference spectrum determination unit is configured to determine a difference spectrum by subtracting the spectrum to be calculated from the reference spectrum; and the second spectral information comprises the spectrum to be calculated.

[0030] The spectral intersection point determination unit is configured to determine a first spectral intersection point and a second spectral intersection point of the difference spectrum and the spectrum to be calculated by superimposing the difference spectrum and the spectrum to be calculated; and the abscissa of the first spectral intersection point is smaller than the abscissa of the second spectral intersection point.

[0031] The wavelength determination unit is configured to determine that the abscissa of the first spectral intersection point is a starting wavelength of the spectrum to be calculated, and the abscissa of the second spectral intersection point is a cutoff wavelength of the spectrum to be calculated.

[0032] The bandwidth determination unit is configured to determine that a result of subtracting the abscissa of the first spectral intersection point from the abscissa of the second spectral intersection point is a bandwidth of the spectrum to be calculated.

[0033] In a third aspect, the embodiments of the present application further provide a spectral calibration device of a monochromator, the spectral calibration device comprising: at least one processor; and a memory communicatively connected to the at least one processor; wherein

[0034] The memory stores a computer program executable by the at least one processor, and the computer program is executed by the at least one processor to enable the at least one processor to execute the spectral calibration method of the first aspect.

[0035] In a fourth aspect, the embodiments of the present application further provide a spectral calibration system of a monochromator, wherein the spectral calibration system of the monochromator is calibrated by the spectral calibration method of the first aspect.

[0036] The spectral calibration system of the monochromator comprises a monochromator and a spectrometer.

[0037] The monochromator has a double-cascade structure, and comprises a first-stage light path, a second-stage light path, a first light diaphragm, and a second light diaphragm; the first light diaphragm and the second light diaphragm are located on a focal plane of the first-stage light path.

[0038] A first light beam incident to the inside of the monochromator is selected in wavelength and bandwidth by moving the first light diaphragm and the second light diaphragm driven by a motor after passing through the first-stage light path, and then exits the monochromator after passing through the second-stage light path, and is collected by the spectrometer.

[0039] Optionally, the first-stage light path and the second-stage light path each comprise a first reflecting element, a dispersive element, a focusing mirror, and a second reflecting element.

[0040] The first light beam incident to the inside of the monochromator is reflected by the first reflecting element to the focusing mirror, focused by the focusing mirror to the dispersive element to be dispersed, and then focused by the focusing mirror to the second reflecting element to be imaged after being reflected by the second reflecting element.

[0041] Optionally, the spectral calibration system of the monochromator further comprises a post optical system.

[0042] The first light beam exiting the monochromator is collected by the spectrometer after passing through the post optical system.

[0043] The technical scheme of the embodiment of the present application can determine the corresponding relationship between the positions of the first light barrier and the second light barrier and the wavelength and bandwidth by controlling the first light barrier and the second light barrier to be relatively stationary at different preset intervals in sequence and moving as a whole in the first direction, collecting the second spectral information in the moving process, and comparing with the reference spectrum, thereby solving the problem that the prior art cannot calibrate the integrated modular monochromator. The spectral wavelength and bandwidth calibration method is improved, so that the monochromator based on the dispersion principle and applied in a modular manner can realize spectral calibration without a calibration light source. Without an additional calibration light source and any hardware operation, the monochromator can work in a closed environment for a long time and also realize high-precision automatic calibration.

[0044] It should be understood that the content described in this part is not intended to identify key or important features of the embodiments of the present application, nor is it used to limit the scope of the present application. Other features of the present application will become apparent from the following description. BRIEF DESCRIPTION OF DRAWINGS

[0045] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0046] Figure 1 is a structural schematic diagram of a monochromator provided by the embodiment of the present application;

[0047] Figure 2 is a flowchart of a spectral calibration method of a monochromator provided by the embodiment of the present application;

[0048] Figure 3 is a flowchart of another spectral calibration method of a monochromator provided by the embodiment of the present application;

[0049] Figure 4 is a reference spectrum diagram provided by the embodiment of the present application;

[0050] Figure 5 is a to-be-calculated spectrum diagram provided by the embodiment of the present application;

[0051] Figure 6 is a difference spectrum diagram provided by the embodiment of the present application;

[0052] Figure 7 is a spectrum diagram obtained by superimposing the difference spectrum and the to-be-calculated spectrum provided by the embodiment of the present application;

[0053] Figure 8 is a structural schematic diagram of a spectral calibration device of a monochromator provided by the embodiment of the present application;

[0054] Figure 9 is a structural schematic diagram of a spectral calibration device of a monochromator provided by an embodiment of the present application;

[0055] Figure 10 is a structural schematic diagram of a spectral calibration system of a monochromator provided by an embodiment of the present application. DETAILED DESCRIPTION

[0056] In order to enable persons skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by persons skilled in the art without creative work should fall within the scope of protection of the present application.

[0057] It should be noted that the terms "first", "second", and the like in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily indicate a specific order or a chronological sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device that includes a series of steps or units does not have to be limited to only those steps or units clearly listed, but can include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0058] Figure 1 is a structural schematic diagram of a monochromator provided by an embodiment of the present application, Figure 2 is a flowchart of a spectral calibration method of a monochromator provided by an embodiment of the present application. The embodiment can be applicable to automatic calibration of a monochromator. The method can be executed by a spectral calibration device of the monochromator. The spectral calibration device of the monochromator can be realized in the form of hardware and / or software. The spectral calibration device of the monochromator can be configured in a spectral calibration device of the monochromator.

[0059] Reference Figure 1The monochromator 1 is a double cascade structure, and the monochromator 1 comprises a first-stage light path 11, a second-stage light path 12, a first light diaphragm 13 and a second light diaphragm 14; the first light diaphragm 13 and the second light diaphragm 14 are located on a focal plane of the first-stage light path 11; a first light beam incident into the monochromator 1, after passing through the first-stage light path 11, is selected in wavelength and bandwidth by moving the first light diaphragm 13 and the second light diaphragm 14 driven by a motor (not shown in the drawings), and then exits the monochromator 1 after passing through the second-stage light path 12, and is collected by a spectrometer.

[0060] Reference Figure 2 The spectral calibration method of the monochromator comprises:

[0061] S210, control the first light diaphragm and the second light diaphragm to move reversely in a first direction perpendicular to an optical axis on the focal plane of the first-stage light path until a first interval exists between the first light diaphragm and the second light diaphragm; wherein when the first interval exists between the first light diaphragm and the second light diaphragm, the spectrometer can recognize the spectrum.

[0062] Wherein the optical axis is the optical axis of the light beam exiting the monochromator.

[0063] It should be noted that in the embodiment of the present application, the spectral bandwidth of the light beam exiting the monochromator is determined by the interval between the first light diaphragm 13 and the second light diaphragm 14, the larger the interval between the first light diaphragm 13 and the second light diaphragm 14, the larger the spectral bandwidth of the light beam exiting the monochromator. The position of the first light diaphragm 13 and the second light diaphragm 14 as a whole on the focal plane of the first-stage light path determines the upper limit and the lower limit of the wavelength of the spectrum of the light beam exiting the monochromator.

[0064] It can be understood that the first interval is the minimum interval between the first light diaphragm and the second light diaphragm that can enable the spectrometer to recognize the spectrum.

[0065] S220, control the first light diaphragm and the second light diaphragm to keep relatively stationary and move as a whole in the first direction, while collecting first spectral information in the moving process; wherein the first spectral information comprises spectral information of all designed wavebands of the light beam exiting the monochromator.

[0066] It can be understood that the first light diaphragm and the second light diaphragm keep relatively stationary and move as a whole in the first direction, which can scan the entire spectral band of the monochromator, so as to obtain spectral information covering the entire designed waveband of the light beam exiting the monochromator.

[0067] S230, determine a reference spectrum according to the first spectral information.

[0068] Wherein the spectra in the first spectral information can be spliced to determine the reference spectrum.

[0069] S240, control the first diaphragm and the second diaphragm to be kept relatively static in turn with different preset interval distances, and move as a whole in the first direction, and collect the second spectrum information in the moving process.

[0070] It can be understood that the first diaphragm and the second diaphragm are kept relatively static in turn with different preset interval distances, and move as a whole in the first direction, which can be scanned along the spectral band direction of the monochromator exit beam, so that the spectrum information of the first diaphragm and the second diaphragm at different positions and interval distances can be obtained.

[0071] S250, according to the comparison result of the second spectrum information and the reference spectrum, determine the corresponding relationship between the position of the first diaphragm and the second diaphragm and the wavelength and bandwidth.

[0072] It should be noted that the comparison between the second spectrum information and the reference spectrum is that the plurality of to-be-calculated spectrums collected when the first diaphragm and the second diaphragm are kept relatively static in turn with different preset interval distances and move as a whole in the first direction are compared with the reference spectrum respectively, so that the spectral wavelength and bandwidth of the monochromator exit beam corresponding to all positions of the first diaphragm and the second diaphragm can be determined. The function fitting of the position of the first diaphragm and the second diaphragm and the wavelength or bandwidth can obtain the wavelength and bandwidth information of the exit beam at any diaphragm position.

[0073] The embodiment of the present application can determine the corresponding relationship between the position of the first diaphragm and the second diaphragm and the wavelength and bandwidth by controlling the first diaphragm and the second diaphragm to be kept relatively static in turn with different preset interval distances, moving as a whole in the first direction, collecting the second spectrum information in the moving process, and comparing with the reference spectrum, thereby solving the problem that the existing technology cannot calibrate the integrated modular monochromator. By improving the spectrum wavelength and bandwidth calibration method, the monochromator based on the dispersion principle for modular application can realize spectrum calibration without calibration light source. Without additional calibration light source and any hardware operation, the monochromator can work in a closed environment for a long time, and high-precision automatic calibration can also be realized.

[0074] Figure 3 is a flowchart of another spectrum calibration method of a monochromator provided by the embodiment of the present application, referring to Figure 3 The method comprises the following steps:

[0075] S310, control the first diaphragm and the second diaphragm to move in the first direction perpendicular to the optical axis on the focal plane of the first-order light path in the reverse direction until the first diaphragm and the second diaphragm have a first interval distance; wherein when the first diaphragm and the second diaphragm have the first interval distance, the spectrometer can recognize the spectrum.

[0076] S320, control the first light barrier and the second light barrier to keep relatively static between the whole in the first direction, while collecting the first spectrum information in the moving process; wherein, the first spectrum information includes the spectrum information of all design wave bands of monochromator exit beam.

[0077] S330, the spectrum in the first spectrum information is spliced to determine the reference spectrum.

[0078] Optionally, on the basis of the above embodiment, the step S230 of the above embodiment can include step S330.

[0079] S340, control the first light barrier and the second light barrier to keep relatively static between the whole in the first direction, while collecting the first spectrum information in the moving process; wherein, the first spectrum information includes the spectrum information of all design wave bands of monochromator exit beam.

[0080] S351, the spectrum in the second spectrum information and the reference spectrum are compared to determine the corresponding wavelength and bandwidth of all positions of the first light barrier and the second light barrier.

[0081] S352, the position of the first light barrier and the second light barrier is functionally fitted with the corresponding wavelength and bandwidth to determine the corresponding relationship between the position of the first light barrier and the second light barrier and the wavelength and bandwidth.

[0082] Specifically, the position of the first light barrier and the second light barrier can be functionally fitted with the corresponding wavelength and bandwidth by using a polynomial function.

[0083] Optionally, on the basis of the above embodiment, the step S250 of the above embodiment can include step S351 and step S352.

[0084] Optionally, on the basis of the above embodiment, continue to refer to Figure 3 , step S351 includes: step S3511~step S3514.

[0085] S3511, the reference spectrum is subtracted from the second spectrum information to determine the difference spectrum.

[0086] Exemplarily, Figure 4 is a reference spectrum diagram provided by an embodiment of the application, Figure 5 is a to-be-calculated spectrum diagram provided by an embodiment of the application, Figure 6 is a difference spectrum diagram provided by an embodiment of the application, referring to Figure 4 to Figure 6 , the reference spectrum in Figure 4 is subtracted from the to-be-calculated spectrum in Figure 5 , and the difference spectrum in Figure 6 can be obtained.

[0087] It can be understood that the second spectral information includes a plurality of to-be-calculated spectra collected when the first diaphragm and the second diaphragm are kept relatively stationary at different preset interval intervals in sequence and the whole moves in the first direction. Figure 5 One to-be-calculated spectrum in the second spectral information is shown.

[0088] S3512, superimpose the difference spectrum and the to-be-calculated spectrum to determine a first spectral intersection point and a second spectral intersection point of the difference spectrum and the to-be-calculated spectrum; wherein the abscissa of the first spectral intersection point is less than the abscissa of the second spectral intersection point.

[0089] An exemplary, Figure 7 is a spectral diagram after superimposing the to-be-calculated spectrum in Figure 5 to Figure 7 and the difference spectrum in Figure 5 , which can obtain the superimposed spectral diagram in Figure 6 . Referring to Figure 7 , the difference spectrum and the to-be-calculated spectrum after superimposition exist a first spectral intersection point A and a second spectral intersection point B. Figure 7

[0090] S3513, determine that the abscissa of the first spectral intersection point is the start wavelength of the to-be-calculated spectrum, and the abscissa of the second spectral intersection point is the cut-off wavelength of the to-be-calculated spectrum.

[0091] S3514, determine that the result of subtracting the abscissa of the first spectral intersection point from the abscissa of the second spectral intersection point is the bandwidth of the to-be-calculated spectrum.

[0092] It can be understood that comparing all to-be-calculated spectra and reference spectra in the second spectral information can determine the corresponding wavelengths and bandwidths at all positions of the first diaphragm and the second diaphragm, thereby determining the corresponding relationship between the positions of the first diaphragm and the second diaphragm and the wavelengths and bandwidths.

[0093] In summary, the embodiments of the present application can determine the corresponding relationship between the positions of the first diaphragm and the second diaphragm and the wavelengths and bandwidths by controlling the first diaphragm and the second diaphragm to keep relatively stationary at different preset interval intervals in sequence and move as a whole in the first direction, simultaneously collecting the second spectral information in the moving process, and comparing with the reference spectrum, thereby solving the problem that the prior art cannot calibrate the integrated modular monochromator. By improving the spectral wavelength and bandwidth calibration method, the monochromator based on the dispersion principle for modular application can realize spectral calibration without a calibration light source. Without additional calibration light sources and any hardware operation, the monochromator can work in a closed environment for a long time and also realize high-precision automatic calibration.

[0094] Figure 8 is a structural schematic diagram of a spectral calibration device of a monochromator provided by the embodiments of the present application, referring to​Figure 8 The device comprises a diaphragm control module 810, a spectrum information acquisition module 820, a reference spectrum determination module 830, and a corresponding relationship determination module 840.

[0095] In the embodiment of the present application, the diaphragm control module 810 is configured to control the first diaphragm and the second diaphragm to move reversely along a first direction perpendicular to the optical axis on the focal plane of the first-order light path until a first interval exists between the first diaphragm and the second diaphragm; wherein the spectrometer can identify the spectrum when the first interval exists between the first diaphragm and the second diaphragm; the spectrum information acquisition module 820 is configured to acquire the first spectrum information during the movement while the first diaphragm and the second diaphragm are controlled by the diaphragm control module 810 to keep relatively static and move as a whole in the first direction; the reference spectrum determination module 830 is configured to determine the reference spectrum according to the first spectrum information; the spectrum information acquisition module 820 is further configured to acquire the second spectrum information during the movement while the first diaphragm and the second diaphragm are controlled by the diaphragm control module 820 to keep relatively static and move as a whole in the first direction in turn with different preset intervals; and the corresponding relationship determination module 840 is configured to determine the corresponding relationship between the positions of the first diaphragm and the second diaphragm and the wavelength and the bandwidth according to the comparison result of the second spectrum information and the reference spectrum.

[0096] Figure 9 is a structural schematic diagram of another monochromator spectrum calibration device provided by the embodiment of the present application. Optionally, on the basis of the above-mentioned embodiment, reference is made to Figure 9 The device further comprises a difference spectrum determination unit 841, a spectrum intersection determination unit 842, a wavelength determination unit 843, and a bandwidth determination unit 844.

[0097] In the embodiment of the present application, the difference spectrum determination unit 841 is configured to subtract the to-be-calculated spectrum from the reference spectrum to determine the difference spectrum; wherein the second spectrum information comprises the to-be-calculated spectrum; the spectrum intersection determination unit 842 is configured to superimpose the difference spectrum and the to-be-calculated spectrum to determine the first spectrum intersection and the second spectrum intersection of the difference spectrum and the to-be-calculated spectrum; wherein the abscissa of the first spectrum intersection is less than the abscissa of the second spectrum intersection; the wavelength determination unit 843 is configured to determine that the abscissa of the first spectrum intersection is the starting wavelength of the to-be-calculated spectrum, and the abscissa of the second spectrum intersection is the cutoff wavelength of the to-be-calculated spectrum; and the bandwidth determination unit 844 is configured to determine that the result of subtracting the abscissa of the first spectrum intersection from the abscissa of the second spectrum intersection is the bandwidth of the to-be-calculated spectrum.

[0098] The monochromator spectrum calibration device provided by the embodiment of the present application can execute the monochromator spectrum calibration method provided by any embodiment of the present application, has the function modules and beneficial effects corresponding to the execution method. The contents not described in detail in the embodiments of the present application can be referred to the monochromator spectrum calibration method provided by the above-mentioned embodiments.

[0099] This invention also provides a spectral calibration device for a monochromator, the spectral calibration device comprising: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores a computer program executable by the at least one processor, the computer program being executed by the at least one processor to enable the at least one processor to process the spectral calibration method provided in the above embodiments.

[0100] Figure 10 This is a schematic diagram of a monochromator spectral calibration system provided in an embodiment of the present invention. This spectral calibration system uses the spectral calibration method for monochromators provided in the above embodiment for spectral calibration. (Reference) Figure 10 The spectral calibration system of the monochromator includes a monochromator 1 and a spectrometer 2. The monochromator 1 has a dual-cascade structure and includes a first-stage optical path 11, a second-stage optical path 12, a first aperture 13, and a second aperture 14. The first aperture 13 and the second aperture 14 are located on the focal plane of the first-stage optical path 11. The first light beam incident into the monochromator 1 passes through the first-stage optical path 11 and is then moved by a motor to select the wavelength and bandwidth. After passing through the second-stage optical path 12, the light beam exits the monochromator 1 and is collected by the spectrometer 2.

[0101] The first beam incident into the monochromator 1 can be broadband polychromatic light. After the beam emitted from the monochromator 1 is collected by the spectrometer 2, the spectral information is output to the host computer for processing. The spectrometer 2 can analyze the spectral wavelength and corresponding light intensity information carried by the beam output from the monochromator 1.

[0102] Optionally, based on the above embodiments, continue to refer to... Figure 10 The first-stage optical path 11 and the second-stage optical path 12 both include: a first reflecting element 111, a dispersive element 112, a focusing mirror 113, and a second reflecting element 114; the first beam incident into the monochromator 1 is reflected by the first reflecting element 111 to the focusing mirror 113, focused by the focusing mirror 113 to the dispersive element 112 and dispersed, and then focused by the focusing mirror 113 to the second reflecting element 114, and then reflected by the second reflecting element 114 to form an image.

[0103] The function of the dispersive element 112 is to decompose polychromatic light into monochromatic light. The dispersive element 112 includes, but is not limited to, diffraction gratings, beam splitters, and other elements.

[0104] Optionally, based on the above embodiments, the spectral calibration system of the monochromator 1 further includes a rear optical system 3; the first beam exits the monochromator 1, passes through the rear optical system 3, and is then collected by the spectrometer 2.

[0105] It should be understood that the various forms of flow shown above can be used to reorder, add, or remove steps. For example, the steps recited in the present application can be performed in parallel, in series, or in a different order, as long as the desired results of the technical solutions of the present application can be achieved, which are not limited herein.

[0106] The above detailed description does not constitute a limitation on the protection scope of the present application. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A method of spectral calibration of a monochromator, characterized in that, The monochromator is a double cascade structure, and the monochromator comprises a first-stage light path, a second-stage light path, a first diaphragm and a second diaphragm; the first diaphragm and the second diaphragm are located on a focal plane of the first-stage light path; a first light beam incident into the monochromator, after passing through the first-stage light path, is selected in wavelength and bandwidth by moving the first diaphragm and the second diaphragm driven by a motor, and then exits the monochromator after passing through the second-stage light path and is collected by a spectrometer; The spectral calibration method of the monochromator comprises: controlling the first diaphragm and the second diaphragm to move reversely in a first direction perpendicular to an optical axis on the focal plane of the first-stage light path until a first interval exists between the first diaphragm and the second diaphragm; wherein, when the first interval exists between the first diaphragm and the second diaphragm, the spectrometer can identify a spectrum; controlling the first diaphragm and the second diaphragm to keep relatively static and move as a whole in the first direction, while collecting first spectral information in the moving process; wherein, the first spectral information comprises spectral information of all designed wavelength bands of the light beam exiting the monochromator; determining a reference spectrum according to the first spectral information; controlling the first diaphragm and the second diaphragm to keep relatively static with different preset intervals in turn and move as a whole in the first direction, while collecting second spectral information in the moving process; determining a corresponding relationship between positions of the first diaphragm and the second diaphragm and wavelength and bandwidth according to a comparison result of the second spectral information and the reference spectrum.

2. The method of spectral calibration of a monochromator according to claim 1, characterized in that, The determining a reference spectrum according to the first spectral information comprises: splicing the spectra in the first spectral information to determine the reference spectrum.

3. The method of spectral calibration of a monochromator according to claim 1 or 2, characterized in that, The determining a corresponding relationship between positions of the first diaphragm and the second diaphragm and wavelength and bandwidth according to a comparison result of the second spectral information and the reference spectrum comprises: comparing the spectra in the second spectral information with the reference spectrum to determine corresponding wavelength and bandwidth under all positions of the first diaphragm and the second diaphragm; functionally fitting the positions of the first diaphragm and the second diaphragm with the corresponding wavelength and bandwidth to determine the corresponding relationship between the positions of the first diaphragm and the second diaphragm and wavelength and bandwidth.

4. The method of spectral calibration of a monochromator according to claim 3, characterized in that, The comparing the spectra in the second spectral information with the reference spectrum to determine corresponding wavelength and bandwidth under all positions of the first diaphragm and the second diaphragm comprises: subtracting a to-be-calculated spectrum in the second spectral information from the reference spectrum to determine a difference spectrum; superimposing the difference spectrum and the to-be-calculated spectrum to determine first and second spectral intersection points of the difference spectrum and the to-be-calculated spectrum; wherein, an abscissa of the first spectral intersection point is smaller than an abscissa of the second spectral intersection point; determining the abscissa of the first spectral intersection point as a start wavelength of the to-be-calculated spectrum, and the abscissa of the second spectral intersection point as a cut-off wavelength of the to-be-calculated spectrum; determining a result of subtracting the abscissa of the first spectral intersection point from the abscissa of the second spectral intersection point as a bandwidth of the to-be-calculated spectrum.

5. A spectral calibration device for a monochromator, characterized by comprises: The diaphragm control module is configured to control the first diaphragm and the second diaphragm to move reversely along a first direction perpendicular to the optical axis on the focal plane of the first light path until a first interval exists between the first diaphragm and the second diaphragm; and when the first interval exists between the first diaphragm and the second diaphragm, the spectrometer can identify a spectrum; The spectrum information acquisition module is configured to acquire first spectrum information during movement while the first diaphragm and the second diaphragm are controlled by the diaphragm control module to keep relatively static and move as a whole in the first direction; and the first spectrum information includes spectrum information of all designed wavebands of the monochromator exit beam; The reference spectrum determination module is configured to determine a reference spectrum according to the first spectrum information; The spectrum information acquisition module is further configured to acquire second spectrum information during movement while the first diaphragm and the second diaphragm are controlled by the diaphragm control module to keep relatively static and move as a whole in the first direction in sequence with different preset intervals; The corresponding relationship determination module is configured to determine a corresponding relationship between positions of the first diaphragm and the second diaphragm and wavelengths and bandwidths according to a comparison result of the second spectrum information and the reference spectrum.

6. The apparatus for spectral calibration of a monochromator according to claim 5, characterized in that The corresponding relationship determination module includes: A difference spectrum determination unit is configured to subtract a to-be-calculated spectrum from the reference spectrum to determine a difference spectrum; and the second spectrum information includes the to-be-calculated spectrum; A spectrum intersection determination unit is configured to superimpose the difference spectrum and the to-be-calculated spectrum to determine a first spectrum intersection and a second spectrum intersection of the difference spectrum and the to-be-calculated spectrum; and an abscissa of the first spectrum intersection is less than an abscissa of the second spectrum intersection; A wavelength determination unit is configured to determine that the abscissa of the first spectrum intersection is a start wavelength of the to-be-calculated spectrum, and the abscissa of the second spectrum intersection is a cutoff wavelength of the to-be-calculated spectrum; A bandwidth determination unit is configured to determine that a result of subtracting the abscissa of the first spectrum intersection from the abscissa of the second spectrum intersection is a bandwidth of the to-be-calculated spectrum.

7. A spectral calibration apparatus for a monochromator, characterized by The spectrum calibration device includes at least one processor and a memory connected in communication with the at least one processor; and The memory stores a computer program executable by the at least one processor, and the computer program is executed by the at least one processor to enable the at least one processor to execute the spectrum calibration method in any one of claims 1-4.

8. A spectral calibration system for a monochromator, characterized by, The spectrum calibration method of the monochromator in any one of claims 1-4 is used for spectrum calibration; The spectrum calibration system of the monochromator includes the monochromator and the spectrometer; The monochromator has a double-cascade structure, and includes a first light path, a second light path, a first diaphragm, and a second diaphragm; and the first diaphragm and the second diaphragm are located on a focal plane of the first light path. The first light beam incident to the inside of the monochromator is emitted from the monochromator after passing through the first light path, the second light path and the first diaphragm and the second diaphragm driven by the motor to move to select the wavelength and the bandwidth, and is collected by the spectrometer.

9. The spectral calibration system for a monochromator of claim 8, wherein, The first light path and the second light path each comprise a first reflecting element, a dispersive element, a focusing mirror and a second reflecting element. The first light beam incident to the inside of the monochromator is reflected by the first reflecting element to the focusing mirror, focused by the focusing mirror to the dispersive element to be dispersed, focused by the focusing mirror to the second reflecting element, and imaged after being reflected by the second reflecting element.

10. The spectral calibration system for a monochromator of claim 8, wherein, The spectral calibration system of the monochromator further comprises a post optical system. The first light beam is emitted from the monochromator and collected by the spectrometer after passing through the post optical system.

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