A micropore detection device for a semiconductor equipment spray head

Abstract

This invention discloses a micropore detection device for a semiconductor equipment spray head, belonging to the field of micropore detection technology. It includes a main body structure, on which are a detection mechanism for detecting micropores on the semiconductor spray head and an insertion mechanism for placing the semiconductor spray head to be tested below the detection mechanism. The insertion mechanism of this invention enables parallel operation of detection and loading / unloading. When the detection mechanism is detecting one spray head, the operator can simultaneously remove the already inspected workpiece at an external workstation and install the next workpiece to be tested, significantly improving overall detection efficiency. The coordinated movement of the detection mechanism and the placement module in this invention involves, on the one hand, a rotating motor within the placement module driving the spray head to rotate slowly, and on the other hand, a pusher cylinder pushing the air pipe to slide radially. The combination of these two movements allows the air nozzle to cover the entire end face of the spray head.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of micropore detection, and particularly relates to a semiconductor equipment shower head micropore detection device. BACKGROUND

[0002] In the semiconductor manufacturing process, key processes such as plasma etching, chemical vapor deposition, etc. need to be carried out in a vacuum reaction chamber. The showerhead is one of the core components of such process equipment, which is used to uniformly and stably disperse the process gas to the wafer surface. The showerhead is usually densely covered with thousands of precise micropores, and the smoothness and consistency of these micropores directly determine the uniformity of the process gas distribution, which in turn affects the success or yield of wafer processing. Therefore, after the completion of the showerhead manufacturing or maintenance, comprehensive and efficient detection of the micropores is a key link to ensure the performance and product quality of semiconductor equipment. At present, the common methods for detecting the micropores of the showerhead include manual visual inspection, flow testing or simple detection based on the pressure difference principle. Manual visual inspection is inefficient and easily affected by subjective factors, and it is difficult to accurately judge internal blockage or partial blockage. The existing automated detection equipment often has the following technical pain points: most of the equipment can only load and detect one showerhead at a time. During the detection process, the operator needs to wait for the current showerhead to be detected before unloading and loading the next workpiece. This results in a large amount of idle waiting time for the equipment, which cannot meet the demand for high efficiency of modern production lines. The lack of automatic workpiece transfer system makes the entire detection process unable to form a closed loop, making it difficult to achieve seamless integration of fully automated production lines. Different types of showerheads have different micropore distributions and sizes, and many existing devices lack modules for quickly switching detection tools or probes, resulting in long changeover time and poor flexibility. In addition, during the detection process, how to ensure that the detection probe can cover every micropore on the showerhead, especially the micropores in the edge area, is a technical difficulty. Simple fixed probe combined with single rotation of the workpiece may have detection dead zones and cannot achieve 100% micropore coverage detection. The Chinese utility model patent with publication number CN214767030U discloses a semiconductor chip active feeding double-station detection device, which includes a platform plate, a support is welded to the top outer wall of the platform plate, a crossbeam is welded to the top end of the support, a stepper motor is fixedly installed on the top outer wall of the crossbeam through bolts, a turntable is drivingly connected to the output shaft of the stepper motor through a rotating rod, a plurality of rotating arms are welded to the side wall of the turntable at equal distances, a telescopic rod is fixedly installed on the top outer wall of the end of the rotating arm away from the turntable through bolts, a suction gripper is fixedly installed on the bottom end of the telescopic rod through bolts, a classification box is arranged on the top outer wall of the platform plate, a guide plate is rotatably connected between the inner walls of the classification box through a rotating rod, and a hydraulic cylinder is rotatably connected to the inner wall of one side of the platform plate. However, it cannot realize automatic picking and placing of the detected pieces and adaptive detection. Therefore, there is an urgent need in the industry for a semiconductor equipment showerhead micropore detection device that can realize efficient, fully automatic, high coverage and strong adaptability to solve the problems existing in the above-mentioned prior art. SUMMARY

[0003] In view of the above technical problems, the technical scheme adopted by the present application is as follows: a semiconductor device shower head micro-hole detection device, comprising a main body mechanism, the main body mechanism comprises a shell, the main body mechanism is provided with a detection mechanism for detecting the micro-hole on the semiconductor shower head and a placing mechanism for placing the semiconductor shower head to be detected below the detection mechanism.

[0004] The main body mechanism comprises an inner frame fixedly installed in the shell, two placing modules are arranged on the shell, one placing module is located on the outer side of the shell, and the other placing module is located below the detection mechanism.

[0005] Further, the main body mechanism further comprises a top driving cylinder fixedly installed on the inner frame, and a top head is fixedly installed on the output end of the top driving cylinder.

[0006] Further, the placing module comprises a placing frame fixedly installed on the shell, a butt joint plate is placed on the placing frame, a butt joint pin is fixedly installed below the butt joint plate, four grooves matched with the butt joint pin are arranged on the placing frame, four taking holes are arranged on the butt joint plate, a rotating ring is rotatably installed on the butt joint plate, a self-rotation gear is fixedly installed on the rotating ring, a rotating motor is fixedly installed below the butt joint plate, a motor gear is fixedly installed on the motor shaft of the rotating motor, the motor gear is engaged with the self-rotation gear, and the semiconductor shower head is placed on the rotating ring of the placing module located on the outer side of the shell.

[0007] Further, the placing mechanism comprises an inner bottom frame fixedly installed on the shell, a lower cylinder is fixedly installed on the inner bottom frame, a lower lifting plate is fixedly installed on the output end of the lower cylinder, a center motor is fixedly installed on the lower lifting plate, a rotating frame is fixedly installed on the motor shaft of the center motor, an upper cylinder is fixedly installed on the rotating frame, and a lifting block is fixedly installed on the output end of the upper cylinder.

[0008] Further, the rotating frame is provided with two outer pushing modules, the outer pushing module comprises a fixed guide column fixedly installed on the rotating frame, an inclined top block is slidably installed on the fixed guide column, a rotating rod is rotatably installed on the lifting block, the rotating rod is rotatably installed with the inclined top block, two fixed rails are fixedly installed on the two sides of the rotating frame, an outer sliding block is slidably installed in the fixed rail, a rotating column is rotatably installed on the outer sliding block, two inclined surfaces are arranged on the inclined top block, the rotating column is in contact with the inclined surfaces of the inclined top block, a reset spring is arranged between the outer sliding block and the rotating frame, and two inclined sliding grooves are arranged on the outer sliding block.

[0009] Further, the rotating frame is provided with two docking modules below, the docking module comprises four lower insertion sleeve pipes fixedly installed below the rotating frame, a descending disc is slidingly installed in the lower insertion sleeve pipe, a descending inner column and an outer push head are fixedly installed on the descending disc, a guide column is fixedly installed on the descending inner column, the guide column slides in the inclined sliding groove, a compression spring is arranged between the descending disc and the lower insertion sleeve pipe, two clamping hooks are rotatably installed at the bottom of the lower insertion sleeve pipe, the clamping hooks are in contact with the outer push head, and a rubber ring is wound outside the two clamping hooks.

[0010] Further, the detection mechanism comprises a lifting electric cylinder fixedly installed on the inner frame, a stand column is slidingly installed on the inner frame, a lifting table is fixedly installed below the stand column, the lifting table is fixedly installed with the output end of the lifting electric cylinder, a differential pressure gauge is fixedly installed on the side surface of the lifting table, an external connecting pipe and an internal connecting pipe are fixedly installed on the differential pressure gauge, an environment pipe and an air inlet pipe are fixedly installed on the external connecting pipe, the air inlet pipe is connected with an external air source, two air passages are arranged in the air inlet pipe, one air passage is communicated with the environment pipe, a test hose is fixedly installed on the internal connecting pipe, the test hose is fixedly installed with the air inlet pipe, and the other air passage of the air inlet pipe is communicated with the test hose.

[0011] Further, a fixed sliding table is fixedly installed on the lifting table, a sliding block is slidingly installed on the fixed sliding table, a sliding motor is fixedly installed on the lifting table, a motor bevel gear is fixedly installed on the motor shaft of the sliding motor, a lead screw is rotatably installed on the lifting table, a lead screw bevel gear is fixedly installed on the lead screw, the lead screw bevel gear is meshed with the motor bevel gear, the sliding block is in threaded transmission with the lead screw, a fixed frame is fixedly installed below the lifting table, five inner blocks are fixedly installed in the fixed frame, five sub-blocks are fixedly installed on the inner blocks, five connecting ports are arranged below the five sub-blocks, the five sub-blocks are fixedly installed with the sliding block, an end sliding block is slidingly installed in the inner block, a sliding block spring is arranged between the end sliding block and the inner block, a blowing pipe is fixedly installed on the end sliding block, the blowing pipe is communicated with the five connecting ports of the five sub-blocks through an end hose, and an air nozzle is fixedly installed below the blowing pipe.

[0012] Further, one air passage of the air inlet pipe, the environment pipe and the external connecting pipe are communicated, one air passage of the air inlet pipe, the internal connecting pipe and the test hose are communicated, the test hose, the sliding block, the five sub-blocks, the end hose and the blowing pipe are communicated, an opening electric cylinder is fixedly installed on the sliding block, a closed cone head is fixedly installed on the output end of the opening electric cylinder, and a ball valve is arranged on the blowing pipe.

[0013] Compared with the prior art, the present application has the following beneficial effects: (1) The putting mechanism provided by the present application realizes parallel operation of detection and feeding and discharging, when the detection mechanism detects a spray head, the operator can simultaneously take out the detected workpiece at an external station and install the next workpiece to be detected, eliminating the waiting time in the feeding and discharging process of the traditional equipment, maximizing the utilization rate of the equipment, and greatly improving the overall detection efficiency; (2) The putting mechanism provided by the present application realizes automatic grabbing, lifting, transferring and placing of the workpiece through the precise cooperation of the lower sleeve, the hook and the taking hole on the docking plate, which not only reduces the labor intensity and the risk of human operation errors, but also avoids damage to the precision workpiece caused by manual handling; (3) The cooperative movement of the detection mechanism and the placing module provided by the present application realizes comprehensive scanning of all the micro-holes on the surface of the spray head, on the one hand, the rotating motor in the placing module drives the spray head to rotate slowly, on the other hand, the air blowing pipe is pushed to slide radially by the top driving cylinder, the combination of the two movements enables the air nozzle to cover the entire end face of the spray head, completely eliminating the detection dead zone and greatly improving the reliability and comprehensiveness of the detection; (4) The present application can quickly adapt to different models and different micro-hole distribution of the spray head by setting multiple selectable air blowing pipes, the corresponding air blowing pipe can be moved to the working position, and the opening of the cylinder controls the on-off of the corresponding air path, this modular design makes the model change operation very convenient, without the need to replace mechanical parts, greatly shortening the equipment preparation time and expanding the application range of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present application.

[0015] Figure 2 It is a schematic diagram of the main body mechanism structure of the present application. Figure One .

[0016] Figure 3 It is a schematic diagram of the main body mechanism structure of the present application. Figure Two .

[0017] Figure 4 It is a schematic diagram of the putting mechanism structure of the present application. Figure One .

[0018] Figure 5 It is a schematic diagram of the putting mechanism structure of the present application. Figure Two .

[0019] Figure 6 It is a schematic diagram of the putting mechanism structure of the present application. Figure Three .

[0020] Figure 7 It is a schematic diagram of the detection mechanism structure of the present application. Figure One .

[0021] Figure 8Structure diagram of detection mechanism of the present application Figure Two .

[0022] Figure 9 Structure diagram of detection mechanism of the present application Figure Three .

[0023] Figure 10 Structure diagram of detection mechanism of the present application Figure Four .

[0024] Reference signs: 101 - shell; 102 - inner frame; 103 - top electric cylinder; 104 - top head; 105 - placing frame; 106 - butt joint plate; 107 - butt joint pin; 108 - rotating ring; 109 - self-rotation gear; 110 - rotating motor; 111 - motor gear; 112 - taking hole; 201 - inner bottom frame; 202 - lower electric cylinder; 203 - lower lifting plate; 204 - center motor; 205 - rotating frame; 206 - upper electric cylinder; 207 - lifting block; 208 - rotating rod; 209 - inclined top block; 210 - fixed guide column; 211 - fixed track; 212 - outer sliding block; 213 - rotating column; 214 - reset spring; 215 - inclined sliding groove; 216 - lower insertion sleeve pipe; 217 - descending inner column; 218 - guide column; 219 - descending disc; 220 - compression spring; 221 - outer push head; 222 - clamping hook; 223 - rubber ring; 301 - lifting electric cylinder; 302 - lifting table; 303 - stand column; 304 - differential pressure gauge; 305 - air inlet pipe; 306 - environment pipe; 307 - external connecting pipe; 308 - test hose; 309 - internal connecting pipe; 310 - fixed sliding table; 311 - sliding motor; 312 - motor bevel gear; 313 - screw rod; 314 - screw rod bevel gear; 315 - sliding block; 316 - opening electric cylinder; 317 - closed conical head; 318 - five-part block; 319 - fixed frame; 320 - inner block; 321 - end hose; 322 - end sliding block; 323 - sliding block spring; 324 - blowing pipe; 325 - ball valve; 326 - air nozzle; 4 - semiconductor nozzle. DETAILED DESCRIPTION

[0025] The specific embodiments of the present application are further described below in conjunction with the accompanying drawings.

[0026] Embodiment: Reference Figures 1-10 A semiconductor device nozzle spray head micro-hole detection device, comprising a main body mechanism, the main body mechanism comprising a shell 101, the main body mechanism being provided with a detection mechanism for detecting micro-holes on a semiconductor nozzle 4 and a placing mechanism for placing the semiconductor nozzle 4 to be detected below the detection mechanism;

[0027] The main body mechanism comprises an inner frame 102 fixedly installed in the shell 101, and two placing modules are arranged on the shell 101, one of which is located on the outer side of the shell 101 and the other of which is located below the detection mechanism.

[0028] As shown in Figure 2 , Figure 3 , the main body mechanism further comprises a top driving cylinder 103 fixedly installed on the inner frame 102, and a top head 104 is fixedly installed on the output end of the top driving cylinder 103.

[0029] As shown in Figure 2 , Figure 3 , the placing module comprises a placing frame 105 fixedly installed on the shell 101, and a butt joint plate 106 is placed on the placing frame 105, a butt joint pin 107 is fixedly installed below the butt joint plate 106, four grooves matched with the butt joint pin 107 are arranged on the placing frame 105, four taking holes 112 are arranged on the butt joint plate 106, a rotating ring 108 is rotatably installed on the butt joint plate 106, a self-rotation gear 109 is fixedly installed on the rotating ring 108, a rotating motor 110 is fixedly installed below the butt joint plate 106, a motor gear 111 is fixedly installed on the motor shaft of the rotating motor 110, the motor gear 111 is engaged with the self-rotation gear 109, and the semiconductor nozzle 4 is placed on the rotating ring 108 of the placing module located on the outer side of the shell 101.

[0030] The butt joint plate 106 on the placing frame 105 of the placing module located on the outer side is taken together with the semiconductor nozzle 4 through the putting mechanism and is placed on the placing frame 105 located below the detection mechanism, the butt joint pin 107 is positioned in the four grooves on the placing frame 105, the rotating motor 110 drives the motor gear 111 to rotate when the semiconductor nozzle 4 is detected, the motor gear 111 drives the self-rotation gear 109 and the rotating ring 108 to rotate, thereby driving the semiconductor nozzle 4 to rotate together, the top driving cylinder 103 is elongated to drive the top head 104 to extend, the top head 104 pushes the air blowing pipe 324 and the end sliding block 322 located in front of the top head 104 to slide along the inner block 320, the sliding block spring 323 is compressed, the end sliding block 322 and the air blowing pipe 324 slide along the inner block 320 to match the self-rotation of the semiconductor nozzle 4, and comprehensive detection of all the micro-holes on the semiconductor nozzle 4 is realized.

[0031] As shown in Figures 4-6 , the putting mechanism comprises an inner bottom frame 201 fixedly installed on the shell 101, a lower cylinder 202 is fixedly installed on the inner bottom frame 201, a lower lifting plate 203 is fixedly installed on the output end of the lower cylinder 202, a center motor 204 is fixedly installed on the lower lifting plate 203, a rotating frame 205 is fixedly installed on the motor shaft of the center motor 204, an upper cylinder 206 is fixedly installed on the rotating frame 205, and a lifting block 207 is fixedly installed on the output end of the upper cylinder 206.

[0032] As shown in Figures 4-6 two outer push modules are arranged on the rotating frame 205, the outer push module comprises a fixed guide column 210 fixedly installed on the rotating frame 205, an inclined top block 209 is slidingly installed on the fixed guide column 210, a rotating rod 208 is rotatably installed on the lifting block 207, the rotating rod 208 is rotatably installed with the inclined top block 209, two fixed rails 211 are fixedly installed on the two sides of the rotating frame 205, an outer sliding block 212 is slidingly installed in the fixed rail 211, a rotating column 213 is rotatably installed on the outer sliding block 212, two inclined surfaces are arranged on the inclined top block 209, the rotating column 213 is in contact with the inclined surface of the inclined top block 209, a reset spring 214 is arranged between the outer sliding block 212 and the rotating frame 205, and two inclined sliding grooves 215 are arranged on the outer sliding block 212.

[0033] As shown in Figures 4-6 two butt joint modules are arranged below the rotating frame 205, the butt joint module comprises four lower insertion sleeve pipes 216 fixedly installed below the rotating frame 205, a descending disc 219 is slidingly installed in the lower insertion sleeve pipe 216, a descending inner column 217 and an outer push head 221 are fixedly installed on the descending disc 219, a guide column 218 is fixedly installed on the descending inner column 217, the guide column 218 is slidingly installed in the inclined sliding groove 215, a compression spring 220 is arranged between the descending disc 219 and the lower insertion sleeve pipe 216, two clamping hooks 222 are rotatably installed at the bottom of the lower insertion sleeve pipe 216, the clamping hook 222 is in contact with the outer push head 221, and a rubber ring 223 is wound outside the two clamping hooks 222.

[0034] When the semiconductor shower head 4 is placed, the central motor 204 rotates to drive the rotating frame 205 to rotate by 90 degrees, so that the four lower insertion sleeves 216 reach above the taking holes 112 of the placement modules located on the outer side, the four lower insertion sleeves 216 reach above the taking holes 112 of the placement modules located below the detection mechanism, then the lower cylinder 202 retracts to drive the lower lifting plate 203 and the rotating frame 205 to descend, so that the four lower insertion sleeves 216 are inserted into the taking holes 112 of the placement modules located on the outer side, the four lower insertion sleeves 216 are inserted into the taking holes 112 of the placement modules located below the detection mechanism, and the clamping hooks 222 are below the lower surface of the docking plate 106, then the upper cylinder 206 retracts to drive the lifting block 207 to descend, drive the two inclined top blocks 209 to slide outward along the fixed guide posts 210, the inclined top blocks 209 drive the outer sliding blocks 212 to move outward through the rotating posts 213, the compression springs 214 are compressed, the guide posts 218, the descending inner posts 217, the descending discs 219 and the outer push heads 221 are driven to descend through the inclined sliding grooves 215, the compression springs 220 are compressed, the outer push heads 221 descend to drive the two clamping hooks 222 to rotate outward, the rubber rings 223 are stretched, so that the lower ends of the clamping hooks 222 hold the docking plate 106, then the lower cylinder 202 extends to drive the lower lifting plate 203 and the rotating frame 205 to ascend, drive the two docking plates 106 on the placement modules to ascend together with the semiconductor shower head 4 through the clamping hooks 222, so that the two docking plates 106 on the placement modules are separated from the placement frame 105, then the central motor 204 drives the rotating frame 205 to rotate by 180 degrees, so that the semiconductor shower head 4 to be detected moves below the detection mechanism, and the semiconductor shower head 4 after detection is completed reaches above the placement module on the outer side, then the lower cylinder 202 retracts to drop the docking plate 106 with the semiconductor shower head 4 to be detected onto the placement frame 105 of the placement module below the detection mechanism, and drop the docking plate 106 with the semiconductor shower head 4 after detection onto the placement frame 105 of the placement module on the outer side, then the upper cylinder 206 extends to drive the lifting block 207 to ascend, drive the inclined top blocks 209 to slide inward through the rotating rods 208, the compression springs 214 rebound to drive the outer sliding blocks 212 to move inward with the inclined sliding grooves 215, the compression springs 220 rebound to drive the guide posts 218, the descending discs 219 and the outer push heads 221 to ascend, then the rubber rings 223 rebound to drive the clamping hooks 222 to rotate inward, so that the clamping hooks 222 no longer hold the docking plate 106, then the lower cylinder 202 extends to pull out the lower insertion sleeves 216 from the taking holes 112, then the central motor 204 drives the rotating frame 205 to rotate by 90 degrees to return to the initial position, at this time, the semiconductor shower head 4 to be detected is detected, and at the same time, the semiconductor shower head 4 after detection on the placement module on the outer side is taken away by artificial, and the next semiconductor shower head 4 to be detected is placed, so that the taking and placing of the semiconductor shower head 4 are performed at the same time as the detection of the previous semiconductor shower head 4, which improves the detection efficiency.

[0035] As Figures 7-10 shown, the detection mechanism includes a lifting cylinder 301 fixedly installed on the inner frame 102, a stand 303 slidingly installed on the inner frame 102, a lifting platform 302 fixedly installed below the stand 303, the lifting platform 302 being fixedly installed with a differential pressure gauge 304, the differential pressure gauge 304 being fixedly installed with an external connecting pipe 307 and an internal connecting pipe 309, the external connecting pipe 307 being fixedly installed with an environment pipe 306 and an air inlet pipe 305, the air inlet pipe 305 being connected with an external air source, two air passages being provided in the air inlet pipe 305, one of the air passages being communicated with the environment pipe 306, the internal connecting pipe 309 being fixedly installed with a test hose 308, the test hose 308 being fixedly installed with the air inlet pipe 305, the other air passage of the air inlet pipe 305 being communicated with the test hose 308.

[0036] As Figures 7-10 shown, the lifting platform 302 is fixedly installed with a fixed sliding platform 310, the fixed sliding platform 310 is slidingly installed with a sliding block 315, the lifting platform 302 is fixedly installed with a sliding motor 311, a motor bevel gear 312 is fixedly installed on a motor shaft of the sliding motor 311, a lead screw 313 is rotatably installed on the lifting platform 302, a lead screw bevel gear 314 is fixedly installed on the lead screw 313, the lead screw bevel gear 314 is engaged with the motor bevel gear 312, the sliding block 315 is in threaded transmission with the lead screw 313, a fixed frame 319 is fixedly installed below the lifting platform 302, five inner blocks 320 are fixedly installed in the fixed frame 319, five sub-blocks 318 are fixedly installed on the inner blocks 320, five connecting ports are provided below the five sub-blocks 318, the five sub-blocks 318 are fixedly installed with the sliding block 315, an end sliding block 322 is slidingly installed in the inner block 320, a sliding block spring 323 is provided between the end sliding block 322 and the inner block 320, a blowing pipe 324 is fixedly installed on the end sliding block 322, the blowing pipe 324 is communicated with the five connecting ports of the five sub-blocks 318 through an end hose 321, an air nozzle 326 is fixedly installed below the blowing pipe 324.

[0037] As Figures 7-10 shown, one air passage of the air inlet pipe 305, the environment pipe 306 and the external connecting pipe 307 are communicated, one air passage of the air inlet pipe 305, the internal connecting pipe 309 and the test hose 308 are communicated, the test hose 308, the sliding block 315, the five sub-blocks 318, the end hose 321 and the blowing pipe 324 are communicated, the sliding block 315 is fixedly installed with an opening cylinder 316, a closed cone head 317 is fixedly installed on an output end of the opening cylinder 316, a ball valve 325 is provided on the blowing pipe 324.

[0038] According to different types of semiconductor nozzle 4 selection different gas nozzle 326 detection, sliding motor 311 drive motor bevel gear 312 rotation, drive screw 313 and screw bevel gear 314 rotation, thus drive sliding block 315 along the fixed sliding table 310 sliding, thus drive the required blowing pipe 324 to the front of the top head 104, only the use of blowing pipe 324 on the ball valve 325 open, the remaining four ball valve 325 are closed.

[0039] When detection, lifting cylinder 301 elongation drive lifting platform 302 down, so that the gas nozzle 326 is located above the micro hole of semiconductor nozzle 4, open cylinder 316 shrink drive closed cone head 317 rise, inlet pipe 305 gas, environment pipe 306 and environment communication, inlet pipe 305 into the gas through the test hose 308 into the sliding block 315, then the gas into five block 318, then the gas through the end hose 321 into the blowing pipe 324, through the gas nozzle 326 blowing into the micro hole of semiconductor nozzle 4, if the micro hole has the situation of blockage, then the differential pressure gauge 304 can detect the pressure difference between the external connection pipe 307 and the internal connection pipe 309, and through the connection of the environment pipe 306 and the external environment, as a control group, to better carry out the micro hole detection, when a micro hole detection is completed, through the extension and contraction of the jacking cylinder 103 and the self rotation of the semiconductor nozzle 4, the detection of all micro holes on the semiconductor nozzle 4 is realized, after the detection is completed, the lifting cylinder 301 is retracted, which is convenient for the action of the mechanism.

[0040] The above is only the preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this, any skilled person in the art, according to the technical solution and the inventive concept of the present application, makes equivalent replacement or change within the technical scope of the present application, which should be covered in the protection scope of the present application.

Claims

1. A semiconductor device showerhead orifice inspection apparatus comprising a body mechanism, characterized by: The main body mechanism comprises a shell (101), a detection mechanism for detecting micro-holes on a semiconductor showerhead (4) and a putting mechanism for putting the semiconductor showerhead (4) to be detected under the detection mechanism are arranged on the shell (101); The main body mechanism comprises an inner frame (102) fixedly installed in the shell (101), two placing modules are arranged on the shell (101), one of the placing modules is located outside the shell (101) and the other of the placing modules is located below the detection mechanism; The putting mechanism comprises an inner bottom frame (201) fixedly installed on the shell (101), a lower electric cylinder (202) is fixedly installed on the inner bottom frame (201), a lower lifting plate (203) is fixedly installed on an output end of the lower electric cylinder (202), a center electric motor (204) is fixedly installed on the lower lifting plate (203), a rotating frame (205) is fixedly installed on a motor shaft of the center electric motor (204), an upper electric cylinder (206) is fixedly installed on the rotating frame (205), and a lifting block (207) is fixedly installed on an output end of the upper electric cylinder (206); The placing module comprises a placing frame (105) fixedly installed on the shell (101), a butt joint plate (106) is placed on the placing frame (105), a butt joint pin (107) is fixedly installed below the butt joint plate (106), four grooves matched with the butt joint pin (107) are arranged on the placing frame (105), four taking holes (112) are arranged on the butt joint plate (106), a rotating ring (108) is rotatably installed on the butt joint plate (106), a self-rotation gear (109) is fixedly installed on the rotating ring (108), a rotating electric motor (110) is fixedly installed below the butt joint plate (106), a motor gear (111) is fixedly installed on a motor shaft of the rotating electric motor (110), and the motor gear (111) is engaged with the self-rotation gear (109); The detection mechanism comprises a lifting electric cylinder (301) fixedly installed on the inner frame (102), a stand column (303) is slidably installed on the inner frame (102), a lifting table (302) is fixedly installed below the stand column (303), the lifting table (302) is fixedly installed with the output end of the lifting electric cylinder (301), a differential pressure gauge (304) is fixedly installed on a side surface of the lifting table (302), an external connecting pipe (307) and an internal connecting pipe (309) are fixedly installed on the differential pressure gauge (304), an environment pipe (306) and an air inlet pipe (305) are fixedly installed on the external connecting pipe (307), the air inlet pipe (305) is connected with an external air source, two air passages are arranged in the air inlet pipe (305), one of the air passages is communicated with the environment pipe (306), a test hose (308) is fixedly installed on the internal connecting pipe (309), the test hose (308) is fixedly installed with the air inlet pipe (305), and the other air passage of the air inlet pipe (305) is communicated with the test hose (308). The lifting platform (302) is fixedly installed with a fixed sliding platform (310), the fixed sliding platform (310) is slidably installed with a sliding block (315), the lifting platform (302) is fixedly installed with a sliding motor (311), a motor shaft of the sliding motor (311) is fixedly installed with a motor bevel gear (312), the lifting platform (302) is rotatably installed with a lead screw (313), the lead screw (313) is fixedly installed with a lead screw bevel gear (314), the lead screw bevel gear (314) is engaged with the motor bevel gear (312), the sliding block (315) is in threaded transmission with the lead screw (313), the lifting platform (302) is fixedly installed below with a fixed frame (319), the fixed frame (319) is fixedly installed with five inner blocks (320) inside, the inner blocks (320) are fixedly installed with five sub-blocks (318) above, five connecting ports are arranged below the five sub-blocks (318), the five sub-blocks (318) are fixedly installed with the sliding block (315), the inner blocks (320) are slidably installed with end sliding blocks (322) inside, sliding block springs (323) are arranged between the end sliding blocks (322) and the inner blocks (320), the end sliding blocks (322) are fixedly installed with air blowing pipes (324) above, the air blowing pipes (324) are communicated with the five connecting ports of the five sub-blocks (318) through end hoses (321), and air nozzles (326) are fixedly installed below the air blowing pipes (324).

2. The semiconductor device showerhead micro-hole detection device according to claim 1, wherein: The main body mechanism further comprises a top driving electric cylinder (103) fixedly installed on the inner frame (102), and a top head (104) fixedly installed on an output end of the top driving electric cylinder (103).

3. The semiconductor device showerhead micro-hole inspection apparatus of claim 1, wherein: The rotating frame (205) is provided with two outer pushing modules, the outer pushing module comprises a fixed guide column (210) fixedly installed on the rotating frame (205), and an inclined surface top block (209) slidably installed on the fixed guide column (210), the lifting block (207) is rotatably installed with a rotating rod (208), the rotating rod (208) is rotatably installed with the inclined surface top block (209), two fixed rails (211) are fixedly installed on the two sides of the rotating frame (205), an outer sliding block (212) is slidably installed in the fixed rail (211), the outer sliding block (212) is rotatably installed with a rotating column (213), two inclined surfaces are arranged on the inclined surface top block (209), the rotating column (213) is in contact with the inclined surfaces of the inclined surface top block (209), a reset spring (214) is arranged between the outer sliding block (212) and the rotating frame (205), and two inclined sliding grooves (215) are arranged on the outer sliding block (212).

4. The semiconductor device showerhead micro-hole inspection apparatus according to claim 3, characterized by: The rotating frame (205) is provided with two docking modules below, the docking module comprises four lower inserting sleeve pipes (216) fixedly installed below the rotating frame (205), the lower inserting sleeve pipes (216) are slidably installed with a descending disc (219), the descending disc (219) is fixedly installed with a descending inner column (217) and an outer push head (221), the descending inner column (217) is fixedly installed with a guide column (218), the guide column (218) slides in the inclined sliding groove (215), the descending disc (219) and the lower inserting sleeve pipe (216) are provided with a compression spring (220), the lower inserting sleeve pipe (216) is rotatably installed with two clamping hooks (222) at the bottom, the clamping hooks (222) are in contact with the outer push head (221), and the two clamping hooks (222) are externally wound with rubber rings (223).

5. The semiconductor device showerhead micro-hole inspection apparatus of claim 1, wherein: One air channel of the air inlet pipe (305), the environment pipe (306) and the external connecting pipe (307) are communicated, one air channel of the air inlet pipe (305), the internal connecting pipe (309) and the test hose (308) are communicated, the test hose (308), the sliding block (315), the five-part block (318), the end hose (321) and the blowing pipe (324) are communicated, the sliding block (315) is fixedly installed with an opening electric cylinder (316), the output end of the opening electric cylinder (316) is fixedly installed with a closing cone head (317), and the blowing pipe (324) is provided with a ball valve (325).

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