Single-line scribing simulation method and multi-line scanning simulation method based on pulse-by-pulse ablation

Abstract

This invention provides a single-row scribing simulation method and a multi-row scanning simulation method based on pulse-by-pulse ablation. These methods address the technical problem of existing pulsed laser processing simulations, which require consideration of the historical dependencies between pulses during global pulse-by-pulse calculations. This results in computation time increasing linearly or even non-linearly with the number of pulses, making them unsuitable for simulating ablation involving hundreds of thousands or even millions of pulses in actual processing. The single-row scribing simulation method and multi-row scanning simulation method provided by this invention decouple global pulse-by-pulse calculations into discrete, locally refined calculations. While ensuring computational accuracy, this significantly reduces the iterative solution range and the number of iterations, substantially lowering the computational dimensionality and time, achieving an order-of-magnitude improvement in computational efficiency. This enables rapid prediction and optimization of large-scale pulsed processing, providing key technical support for real-time process control in industrial applications.

Description

Technical Field

[0001] This invention relates to a simulation method for pulsed laser processing, and more particularly to a simulation method for single-line scribing and multi-line scanning based on pulse-by-pulse ablation. Background Technology

[0002] Pulsed laser processing is a non-contact, high-precision advanced manufacturing technology widely used in the fabrication of high-precision microstructures in aerospace, medical devices, and other fields. The processing involves complex multi-field coupling phenomena, including light-matter interactions, heat conduction, and material phase transitions. Due to the difficulty and high cost of experimental observation, numerical simulation has become a key method for studying processing mechanisms and optimizing process parameters.

[0003] Existing pulsed laser processing simulation methods mostly employ the finite element method or finite volume method, which simulate material ablation behavior under single-pulse or multi-pulse conditions by solving heat conduction equations or more complex multiphysics models. For multi-pulse processing, it is necessary to calculate the energy distribution, heat accumulation, and material evolution process at each pulse globally, pulse by pulse, and calculate the amount of material removed or redeposited according to the ablation simulation model. Although the ablation simulation model has high accuracy, the computation time increases linearly or even nonlinearly with the number of pulses because it needs to consider the historical dependence between pulses in global pulse-by-pulse calculations. This makes it difficult to apply to the simulation of ablation involving hundreds of thousands or even millions of pulses in actual processing. Summary of the Invention

[0004] The purpose of this invention is to solve the technical problem that existing pulsed laser processing simulation methods require consideration of the historical dependence between pulses during global pulse-by-pulse calculation, which leads to a linear or even nonlinear increase in calculation time with the number of pulses, making them difficult to apply to the ablation simulation of hundreds of thousands or even millions of pulses in actual processing. The invention provides a single-line scribing simulation method and a multi-line scanning simulation method based on pulse-by-pulse ablation.

[0005] To achieve the above objectives, the technical solution provided by the present invention is as follows:

[0006] A single-line scribing simulation method based on pulse-by-pulse ablation, characterized by the following steps:

[0007] Step 1: Define the middle segment of the single-line scribing trajectory as a stable segment, and the starting and ending segments as unstable segments;

[0008] Step 2: Calculation of the machining morphology at all pulse points in the stable segment;

[0009] Step 2.1: Discretize the single-line scribing trajectory corresponding to the stable segment into a set of pulse points;

[0010] Step 2.2: Select any pulse from the stable pulse point set as the current pulse, calculate the number of all pulses that overlap with the current pulse ablation area and redeposition area, and then perform iterative calculations using the pulse-by-pulse ablation model to obtain the processing morphology after the action of all pulses that overlap with the current pulse ablation area and redeposition area.

[0011] Step 2.3: Combining the optical axis direction vector of the current pulse, extract the processing morphology at the current pulse from all the processing morphologies obtained in Step 2.2 that overlap with the current pulse ablation area and redeposition area;

[0012] Step 2.4: Following the methods in Steps 2.2-2.3, traverse all pulses in the stable segment pulse point set and calculate the machining morphology at all pulses in the stable segment;

[0013] Step 3: Extract the preliminary machining morphology of all pulses at the starting pulse in the unstable segment from the machining morphology at the starting pulse in the stable segment; extract the preliminary machining morphology of all pulses at the ending pulse in the unstable segment from the machining morphology at the ending pulse in the stable segment; then perform coordinate transformation on the preliminary machining morphology of all pulses at the starting and ending pulses in the unstable segment to obtain the machining morphology of all pulses at the starting and ending pulses in the unstable segment.

[0014] Step 4: Perform Boolean operations on the machining morphology of all pulses in the stable segment and the machining morphology of all pulses in the starting and ending segments of the unstable segment to obtain the machining morphology of the workpiece surface.

[0015] Further, in step 2.2, the number of all pulses overlapping with the current pulse ablation region and redeposition region is calculated using the following formula: 2 :

[0016]

[0017] in, The laser repetition frequency, For the first pulse Processing speed, To along the processing speed The width of the maximum ablation zone in the direction of the ablation. This is the floor symbol.

[0018] Furthermore, step 3 specifically involves:

[0019] Step 3.1, let the pulse of the stable segment be... The pulse at the beginning of the unstable segment is The pulse of the termination segment in the unstable segment is ;

[0020] Start pulse from the stable segment Extract all pulses from the initial segment of the unstable segment in the processing morphology. The initial processing morphology at the location, terminating the pulse in the stable segment. Extract all pulses from the termination segment of the unstable segment in the processing morphology. Preliminary processing morphology at the location;

[0021] Step 3.2, according to the coordinate system To coordinate system The rotation transformation matrix and translation vector will transform all pulses in the initial segment of the unstable segment. The initial processing morphology at the location is transformed using coordinates to obtain all pulses on the initial segment of the unstable segment. The processing morphology at the location; where the coordinate system The origin is a pulse on the initial segment of the unstable segment. At the position on the workpiece surface, The y-axis represents the initial pulse in the stable segment. The corresponding processing speed, The z-axis represents the initial pulse in the stable segment. Normal to the surface of the workpiece x-axis Coordinate system The origin is the current pulse. At the position on the workpiece surface, The y-axis represents the current pulse. The corresponding processing speed, The z-axis represents the current pulse. Normal to the surface of workpiece S, x-axis ;

[0022] According to the coordinate system To coordinate system The rotation transformation matrix and translation vector will transform all pulses on the termination segment of the unstable segment. The initial machining morphology at the location is transformed using coordinates to obtain all pulses on the termination segment of the unstable segment. The processing morphology at the location; where the coordinate system The origin is a pulse in the termination segment of the unstable segment. At the position on the workpiece surface, The y-axis represents the termination pulse in the stable segment. The corresponding processing speed, The z-axis represents the termination pulse in the stable segment. Normal to the workpiece surface, x-axis Coordinate system The origin is the current pulse. At the position on the workpiece surface, The y-axis represents the current pulse. The corresponding processing speed, The z-axis represents the current pulse. Normal to the workpiece surface, x-axis .

[0023] Furthermore, in step 4, when performing Boolean operations on the processing morphology at all pulses in the stable segment and the processing morphology at all pulses in the starting and ending segments of the unstable segment, the removal morphology in all processing morphologies uses Boolean difference operation, and the redeposition morphology uses Boolean sum operation.

[0024] In addition, the present invention also provides a multi-row scanning simulation method based on pulse-by-pulse ablation, which is characterized by including the following steps:

[0025] Step 1: First, divide the multi-line scanning machining trajectory into starting line, stable line and ending line. Then, based on the stability of the pulse during single-line scribing, divide the starting line, stable line and ending line into starting segment, stable segment and ending segment respectively, forming the following segments: starting line starting segment, starting line stable segment, starting line ending segment, stable line starting segment, stable line stable segment, stable line ending segment, ending line starting segment, ending line stable segment, and ending line ending segment.

[0026] Step 2: Calculation of the machining morphology at all pulse points in the stable segment of the stable line;

[0027] Step 2.1: Discretize the multi-line processing trajectory corresponding to the stable segment of the stable line into a set of pulse points;

[0028] Step 2.2: Select any pulse from the stable segment pulse point set of the stable row as the current pulse, calculate the number of all pulses that overlap with the current pulse ablation area and redeposition area, and then combine the pulse-by-pulse ablation model to perform iterative calculation to obtain the processing morphology after all pulses that overlap with the current pulse ablation area and redeposition area.

[0029] Step 2.3: Combining the optical axis direction vector of the current pulse, extract the processing morphology at the current pulse from all the processing morphologies obtained in Step 2.2 that overlap with the current pulse ablation area and redeposition area;

[0030] Step 2.4: Following the methods in Steps 2.2-2.3, traverse all pulses in the pulse point set of the stable row and stable segment, and calculate the machining morphology at all pulses in the stable row and stable segment.

[0031] Step 3: Extract the machining features of all pulses in the starting stable segment from the machining features of all pulses in the first row of the stable segment; extract the machining features of all pulses in the ending stable segment from the machining features of all pulses in the last row of the stable segment.

[0032] From the machining morphology at the start pulse and end pulse of each row in the stable segment, the preliminary machining morphology at all pulses in the start and end segments of the stable row is extracted respectively; then the coordinate transformation is performed on the preliminary machining morphology at all pulses in the start and end segments of the stable row to obtain the machining morphology at all pulses in the start and end segments of the stable row.

[0033] From the machining morphologies at the start pulse, end pulse, start pulse, and end pulse of the first row in the stable segment of the stable row, the preliminary machining morphologies at all pulses on the start segment, end segment, start segment, and end segment of the start row are extracted respectively. Then, coordinate transformation is performed on the preliminary machining morphologies at all pulses on the start segment, end segment, start segment, and end segment of the start row to obtain the machining morphologies at all pulses on the start segment, end segment, start segment, and end segment of the start row.

[0034] Step 4: Perform Boolean operations on the machining morphology at all pulse points on the stable line stable segment, starting line stable segment, ending line stable segment, stable line starting segment, stable line ending segment, starting line starting segment, starting line ending segment, ending line starting segment, and ending line ending segment to obtain the machining morphology of the workpiece surface.

[0035] Further, in step 2.2, the calculation of the number of all pulses overlapping with the current pulse ablation region and redeposition region is specifically as follows:

[0036] Step A1, define the current pulse as the first pulse. Line number pulse , No. Line number pulse In order to be with the first Line number pulse The pulse corresponding to the column direction;

[0037] Step A2, according to the first Line number pulse Processing speed at the location Calculate the first Line number Number of overlapping pulses at each pulse ;

[0038] Step A3, define perpendicular to the first Line number pulse Processing speed The direction is Then the first Line number pulse Along direction Processing width ,in, For direction Same direction from the first Line number pulse Initial ablation width, For direction In the opposite direction from the first Line number pulse Initial ablation width, For direction Deposition width in the same direction, For direction Deposition width in the opposite direction; defined perpendicular to the first Line number pulse Processing speed The direction is Then the first Line number pulse Along direction Processing width ,in, For direction Same direction from the first Line number pulse Initial ablation width, For direction In the opposite direction from the first Line number pulse Initial ablation width, For direction Deposition width in the same direction, For direction Deposition width in opposite directions; definition For the first Before the line and the first Line number pulse The maximum number of overlapping rows. For the first After the line and the first Line number pulse The maximum number of rows with overlap;

[0039] when When the following condition is met, , :

[0040] ;

[0041] in, Indicates the first Line number One pulse, Indicates the first Line number One pulse;

[0042] Step A4, according to the Line number Number of overlapping pulses at each pulse , No. Before the line and the first Line number pulse Maximum number of overlapping rows and the After the line and the first Line number pulse Maximum number of overlapping rows , obtain with the Line number pulse The number of pulses overlaps between the ablation zone and the redeposition zone.

[0043] Furthermore, in step 4, when performing Boolean operations on the processing morphology at all pulse points on the stable row stable segment, the starting row stable segment, the ending row stable segment, the stable row starting segment, the stable row ending segment, the starting row starting segment, the starting row ending segment, the ending row starting segment, and the ending row ending segment, the Boolean difference operation is used for the removed morphology in all processing morphologies, and the Boolean sum operation is used for the redeposited morphology.

[0044] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0045] 1. The single-line scribing simulation method based on pulse-by-pulse ablation provided by this invention first divides the single-line scribing machining trajectory into stable and unstable segments, and then calculates the machining morphology at all pulses in both stable and unstable segments. When calculating the machining morphology at all pulses in the stable segment, the number of pulses overlapping with the ablation region and redeposition region of a certain pulse in the stable segment is first calculated. Based on this, the pulse-by-pulse ablation model is used for iterative calculation to obtain the machining morphology at that pulse. The machining morphology at all pulses in the unstable segment is extracted from the machining morphology at the corresponding pulse in the stable segment. This invention decouples the global pulse-by-pulse calculation into discrete local refined calculation. While ensuring the accuracy of the calculation, it significantly reduces the scope and number of iterations, greatly reduces the calculation dimension and time, and achieves an order-of-magnitude improvement in calculation efficiency. This makes rapid prediction and optimization of large-scale pulse machining possible, providing key technical support for real-time process control in industrial applications.

[0046] 2. The single-line scribing simulation method based on pulse-by-pulse ablation provided by this invention allows for independent calculation of the machining morphology at each pulse, enabling iterative calculations to be performed in parallel, which effectively improves the efficiency of iterative calculations.

[0047] 3. The multi-row scanning simulation method based on pulse-by-pulse ablation provided by this invention first divides the multi-row scanning machining trajectory into starting rows, stable rows, and ending rows. Then, based on the stability of the pulse during single-row scribing, the starting row, stable row, and ending row are further divided into starting segments, stable segments, and ending segments, respectively. When calculating the machining morphology at all pulse locations in the stable segment of a stable row, the number of pulses overlapping with the ablation region and redeposition region of a certain pulse in the stable segment of a stable row is first calculated. Based on this, an iterative calculation using a pulse-by-pulse ablation model is performed to obtain the machining morphology at that pulse location. The starting segment of the starting row, starting row... The machining features at all pulses in the stable segment, the starting line ending segment, the stable line starting segment, the stable line ending segment, the ending line starting segment, the ending line stable segment, and the ending line ending segment are extracted from the machining features at the corresponding pulses in the stable line stable segment. This invention decouples global pulse-by-pulse calculation into discrete local refined calculation. While ensuring calculation accuracy, it significantly reduces the need for iterative solutions, greatly reduces the calculation dimension and time, and achieves an order-of-magnitude improvement in calculation efficiency. This makes rapid prediction and optimization of large-scale pulse machining possible and provides key technical support for real-time process control in industrial applications.

[0048] 4. The multi-row scanning simulation method based on pulse-by-pulse ablation provided by this invention allows for independent calculation of the processing morphology at each pulse, enabling iterative calculations to be performed in parallel, which effectively improves the efficiency of iterative calculations. Attached Figure Description

[0049] Figure 1This is step 2 of the embodiment of the single-line scribing simulation method based on pulse-by-pulse ablation of the present invention. pulse A schematic diagram of the ablation zone;

[0050] Figure 2 In step 2 of the embodiment of the single-line scribing simulation method based on pulse-by-pulse ablation of the present invention, the first step is combined with the second step. pulse Optical axis direction vector In terms of processing morphology Extract the first pulse Processing morphology at the location A schematic diagram;

[0051] Figure 3 This is a schematic diagram of step 4 of the embodiment of the single-line scribing simulation method based on pulse-by-pulse ablation of the present invention, in which Boolean operation is performed on the machining morphology of the workpiece S surface at each pulse to obtain the machining morphology of the workpiece S surface.

[0052] Figure 4 A schematic diagram of the decomposition of the multi-row scanning machining trajectory in step 1 of the embodiment of the multi-row scanning simulation method based on pulse-by-pulse ablation of the present invention;

[0053] Figure 5 This is step 2 of the embodiment of the multi-row scanning simulation method based on pulse-by-pulse ablation of the present invention. Line number Schematic diagram of the pulse ablation area. Detailed Implementation

[0054] To make the advantages and features of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0055] A simulation method for single-line scribing based on pulse-by-pulse ablation specifically includes the following steps:

[0056] Step 1: Decompose the single-line scribing process trajectory.

[0057] Considering that during single-line scribing, the effective range of a certain pulse will not be transmitted indefinitely to the ablation area of ​​subsequent pulses, this invention divides the middle segment of the single-line scribing trajectory into a stable segment and the starting and ending segments into unstable segments based on the stability of the pulses during single-line scribing. Then, the surface morphology of the stable and unstable segments is calculated respectively.

[0058] Step 2: Calculation of the machining morphology at all pulse points in the stable segment.

[0059] For the multi-pulse ablation process, based on the laser repetition frequency and scanning speed, the single-line scribing trajectory corresponding to the stable segment acting on the surface of workpiece S is discretized into a set of pulse points, and the processing speed, optical axis direction vector, and surface normal vector at each pulse in the set of pulse points are calculated. The surface of workpiece S can be a plane or a curved surface with a radius of curvature greater than the radius of the single-pulse ablation pit.

[0060] Select the first pulse point in the stable segment set pulse Perform calculations, let For the first pulse The surface morphology of workpiece S after the ablation process is given by the iterative calculation expression of the pulse-by-pulse ablation model:

[0061] ( )

[0062] in, This represents the total number of pulses. Indicates the first pulse Surface morphology of workpiece S after action After the first pulse The surface morphology of the workpiece S formed after the action .when hour, The initial surface morphology of workpiece S.

[0063] If the surface of workpiece S is curved, the first... pulse The local curved surface acting on the surface of workpiece S is approximately a plane. For the first pulse The normal direction, and assume the first pulse Processing speed within this plane range Constant, and the direction vector of the optical axis If it remains unchanged, then the first pulse ablation areas such as Figure 1 As shown.

[0064] Definition of the first pulse The number of pulses near the ablation area is , No. pulse To the pulse distance It can be represented as:

[0065] ( )

[0066] in, This represents the laser repetition frequency.

[0067] The number of overlapping pulses in the material removal process is defined as follows: Then the number of overlapping pulses is 2. In order to be with the first Each pulse ablation region has an overlapping number of pulses. Along the processing speed... Maximum material removal width in the direction ,in, To match processing speed From the same direction, starting from the first pulse ablation width, To match processing speed From the opposite direction, from the first pulse Initial ablation width. This will increase along the processing speed. Maximum material removal width in the direction Substitution From this, we can obtain:

[0068] ( )

[0069] in, This is the floor symbol.

[0070] The number of overlapping pulses in the material redeposition process is defined as follows: Then the number of overlapping pulses In order to be with the first The number of pulses that overlap between the pulse ablation region and the redeposition region. Used to determine the impact on the pulse The local pulse range. Along the processing speed. Maximum ablation zone width in the direction ,in, To match processing speed Deposition width in the same direction, To match processing speed Deposition width in the opposite direction. This will be along the processing speed. Maximum ablation zone width in the direction Substitution From this, we can obtain:

[0071] ( )

[0072] When performing single-line scribing, considering the material redeposition process, the factors affecting the first line are defined. pulse The pulse set of all pulses for processing the morphology is That is, with the first The pulse set of all pulses that overlap in the pulse ablation region and the redeposition region is as follows: ,but N represents the set of natural numbers. The initial surface morphology of workpiece S... Based on this, the first pulse As the first pulse, the pulse As the final pulse, iterative calculations are performed using a pulse-by-pulse ablation model to obtain the pulse set. Post-processing morphology .like Figure 2 As shown, pulse set Post-processing morphology Including pulse sets Post-treatment removal morphology S1 and pulse set The redeposition morphology after treatment, S2.

[0073] Then combine the first pulse Optical axis direction vector This allows for the processing of morphology Extract the first pulse Processing morphology at the location ,like Figure 2 The green area is shown in the middle; among them, Indicates the first pulse The morphology of the removed area Indicates the first pulse The redeposition morphology at the location. The above steps completed the calculation of the processing morphology at one pulse point in the stable segment pulse point set.

[0074] The above method is used to traverse all pulses in the stable segment pulse point set and calculate the machining morphology at all pulses in the stable segment.

[0075] Step 3: Calculation of the machining morphology at all pulse points in the unstable segment.

[0076] For single-line scribing, let the pulse of the stable segment be... The pulse at the beginning of the unstable segment is The pulse of the termination segment in the unstable segment is ,in , , and From the formula Determined. Therefore, based on geometric relationships, it is easy to determine the initial pulse in the stable phase. Extract all pulses from the initial segment of the unstable segment in the processing morphology. Preliminary processing morphology of the site Simultaneously, the termination pulse in the stable phase Extract all pulses from the termination segment of the unstable segment in the processing morphology. Preliminary processing morphology of the site .

[0077] A pulse at the beginning of the unstable segment For example, its preliminary processing morphology In coordinate system Below, in which, coordinate system The origin is the pulse of the initial segment in the unstable segment. At the position on surface S of workpiece The y-axis represents the initial pulse of the stable segment. The corresponding processing speed, The z-axis represents the initial pulse of the stable segment. Normal to the surface of workpiece S, x-axis The current pulse The corresponding processing speed and its normal on the surface of workpiece S This may be related to the initial pulse in the stable segment. The corresponding processing speed and its normal on the surface of workpiece S They are not in the same direction; therefore, according to the geometric transformation relationship, the current pulse... The machining morphology after mapping on the surface of workpiece S should be as follows: That is, the current pulse The processing morphology at the location is ,in coordinate system To coordinate system The rotation transformation matrix, coordinate system To coordinate system The translation vector, where the coordinate system is... The origin is the current pulse. At the position on surface S of workpiece The y-axis represents the current pulse. The corresponding processing speed, The z-axis represents the current pulse. Normal to the surface of workpiece S, x-axis .

[0078] Based on the above method, the preliminary machining morphology of all pulse points on the starting and ending segments of the unstable segment is first extracted, and then coordinate transformation is performed to obtain the machining morphology of all pulse points on the starting and ending segments of the unstable segment. Thus, the machining morphology of each pulse point on the surface of workpiece S is obtained.

[0079] Step 4: Perform Boolean operations on the machining morphology at each pulse point on the surface of workpiece S to obtain the machining morphology of the surface of workpiece S, such as... Figure 3 As shown. It is worth noting that when performing Boolean operations on the machining morphology at each pulse on the surface of workpiece S, Boolean difference operations are used for morphology removal, and Boolean sum operations are used for morphology re-deposition.

[0080] In addition, the present invention also provides a multi-row scanning simulation method based on pulse-by-pulse ablation, which specifically includes the following steps:

[0081] Step 1: Decompose the multi-line scanning process trajectory.

[0082] In multi-row scanning machining, the pulse ablation result at a specified location is affected not only by adjacent pulses within the same row, but also by pulses from adjacent rows. Therefore, as... Figure 4 As shown, the present invention first divides the multi-line scanning machining trajectory into starting line, stable line and ending line according to the row. Then, according to the stability of the pulse during single-line scribing machining, the starting line, stable line and ending line are respectively divided into starting segment, stable segment and ending segment, forming the starting segment of starting line ⑥, starting segment of starting line ②, starting segment of starting line ⑦, starting segment of stable line ④, stable segment of stable line ①, stable segment of stable line ⑤, starting segment of ending line ⑧, stable segment of ending line ③, and ending segment of ending line ⑨.

[0083] Define initial behavior stable behavior Terminate the behavior The pulse corresponding to the starting segment of each line is The pulse corresponding to the stable segment is The pulse corresponding to the termination segment is ,but:

[0084] The pulse corresponding to the stable segment ① of the stable line is ;

[0085] The pulse corresponding to the initial stable segment ② is ;

[0086] The pulse corresponding to the terminating stable segment ③ is ;

[0087] The pulse corresponding to the stable line start segment ④ is ;

[0088] The pulse corresponding to the stable line termination segment ⑤ is ;

[0089] The pulse corresponding to the first segment ⑥ of the starting line is ;

[0090] The pulse corresponding to the start and end segments ⑦ is ;

[0091] The pulse corresponding to the starting segment ⑧ of the terminating line is ;

[0092] The pulse corresponding to the terminating segment ⑨ of the terminated line is .

[0093] Step 2: Calculation of the machining morphology at all pulse points on the stable segment ① of the stable line.

[0094] Discretize the multi-line machining trajectory corresponding to the stable segment ① of the stable line into a set of pulse points. First, select the first pulse point from the set. Line number pulse Perform the calculation.

[0095] Define the impact on the stable segment ① within the stable line. Line number pulse The pulse set of all pulses in the ablation region is That is, with the first Line number pulse The pulse set of all pulses that overlap in the ablation region and the redeposition region is as follows: ,but , For the first Before the line and the first Line number pulse The maximum number of overlapping rows. For the first After the line and the first Line number pulse The maximum number of overlapping rows; Line number pulse and the Line number pulse Corresponding in the column direction, For the first In the middle and the first The number of overlapping pulses. Assume a pulse set. The optical axis direction vector and processing speed of each row of pulses are constant, but the optical axis direction vector and processing speed of the inter-row pulses can vary. Then, the... row and number The number of overlapping pulses corresponding to each row are respectively and .

[0096] Among them, according to the first Line number pulse Processing speed at the location The first one can be determined according to equation (4). In the middle and the first Number of pulses overlapping And in order to obtain the first Before the line and the first Line number pulse Maximum number of overlapping rows and the After the line and the first Line number The maximum number of overlapping pulses Defined perpendicular to the first Line number pulse Processing speed The direction is , , For the first Line number The normal of the nth pulse, then the nth pulse... Line number pulse Along direction Processing width ,in, For direction Same direction from the first Line number pulse Initial ablation width, For direction In the opposite direction from the first Line number pulse Initial ablation width, For direction Deposition width in the same direction, For direction The deposition width in the opposite direction. Accordingly, the width perpendicular to the first... Line number pulse Processing speed The direction is , Then the first Line number pulse Along direction Processing width ,in, For direction Same direction from the first Line number pulse Initial ablation width, For direction In the opposite direction from the first Line number pulse Initial ablation width, For direction Deposition width in the same direction, For direction Deposition width in opposite directions.

[0097] So, when When the following conditions are met, the first The pulse to the first The line has an impact:

[0098] (5)

[0099] in, Indicates the first Line number One pulse, Indicates the first Line number One pulse.

[0100] Therefore, under the condition of satisfying equation (5), we can obtain , .

[0101] Define the initial surface morphology of workpiece S as follows: In order to further obtain the first Line number pulse The machining morphology at the initial workpiece S surface morphology. Based on the first arrive The order of the rows, in the pulse set The pulse set is obtained by iteratively calculating line by line and pulse by pulse using a pulse-by-pulse ablation model. Post-processing morphology .like Figure 5 As shown, pulse set Post-processing morphology Includes pulse sets Post-treatment removal morphology S1′ and pulse set The redeposition morphology S2′ after the action.

[0102] Then combine the first Line number pulse Optical axis direction vector This allows for the processing of morphology Extract the first Line number pulse Processing morphology at the location ,like Figure 5 As shown in the green area, Indicates the first Line number pulse The morphology of the removed area Indicates the first Line number pulse The redeposition morphology at the location. Generally, when the intra-row and inter-row pulse overlap rate reaches a certain level, the redeposition morphology... It may be completely removed, meaning there is no redeposition morphology. The above steps complete the calculation of the machining morphology at one pulse point within a pulse point set.

[0103] By traversing all pulses in the pulse point set of all pulse points in the stable row and stable segment ① according to the above method, the machining morphology at all pulse points in the stable row and stable segment ① is calculated.

[0104] Step 3: Calculation of the machining morphology at all pulse locations in the remaining positions.

[0105] From the stable line stable segment ① From the machining morphology at all pulse points in the row, the machining morphology at all pulse points on the stable segment ② of the starting row is extracted based on geometric relationships.

[0106] From the stable line stable segment ① From the machining morphology at all pulse points, the machining morphology at all pulse points on the stable segment ③ of the terminating line is extracted based on geometric relationships.

[0107] Acquisition of the machining morphology at all pulse points on the stable line start segment ④ and stable line end segment ⑤:

[0108] First, based on geometric relationships, extract the preliminary machining features of all pulses at the starting pulses of each row in the stable segment ① of the stable row. Then, based on geometric relationships, extract the preliminary machining features of all pulses at the ending pulses of each row in the stable segment ① of the stable row. Next, referring to the coordinate transformation method used in single-row scribing, perform coordinate transformation on the preliminary machining features of all pulses at the starting and ending pulses of the stable segment ④ and the ending pulses of the stable segment ⑤ to obtain the final machining features of all pulses at the starting and ending pulses of the stable segment ④ and the ending pulses of the stable segment ⑤.

[0109] Obtaining the machining morphology at all pulse points on the starting line start segment ⑥, starting line end segment ⑦, ending line start segment ⑧, and ending line end segment ⑨: First, obtain the machining morphology at the pulse points on the stable line stable segment ①. In the machining morphology at the starting point, the preliminary machining morphology at all pulse locations on the starting segment ⑥ of the starting row is extracted based on geometric relationships; in the pulse location on the stable segment ① of the stable row... In the machining morphology at the point, the preliminary machining morphology at all pulses on the starting and ending segments ⑦ is extracted based on geometric relationships; in the pulses of the stable segment ① of the stable line... In the machining morphology at the point, the preliminary machining morphology at all pulses on the starting segment ⑧ of the termination line is extracted based on geometric relationships; in the stable segment ① of the stable line... Based on the geometric relationships, the preliminary machining morphology of all pulse locations on the termination segment ⑨ of the termination row is extracted from the machining morphology. Then, referring to the coordinate transformation method in single-line scribing machining, the preliminary machining morphology of all pulse locations on the starting segment ⑥, the ending segment ⑦, the starting segment ⑧, and the ending segment ⑨ of the termination row is transformed to obtain the machining morphology of all pulse locations on the starting segment ⑥, the ending segment ⑦, the starting segment ⑧, and the ending segment ⑨ of the termination row.

[0110] Step 4: Perform Boolean operations on the machining morphology at all pulse points on the stable line stable segment ①, starting line stable segment ②, ending line stable segment ③, stable line starting segment ④, stable line ending segment ⑤, starting line starting segment ⑥, starting line ending segment ⑦, ending line starting segment ⑧, and ending line ending segment ⑨ to obtain the machining morphology of the workpiece S surface.

[0111] The above description is only used to illustrate the technical solutions of the present invention, and is not intended to limit them. For those skilled in the art, modifications can be made to the specific technical solutions described in the above embodiments, or equivalent substitutions can be made to some of the technical features. However, these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions protected by the present invention.

Claims

1. A simulation method for single-line scribing based on pulse-by-pulse ablation, characterized in that, Includes the following steps: Step 1: Define the middle segment of the single-line scribing trajectory as a stable segment, and the starting and ending segments as unstable segments; Step 2: Calculation of the machining morphology at all pulse points in the stable segment; Step 2.1: Discretize the single-line scribing trajectory corresponding to the stable segment into a set of pulse points; Step 2.2: Select any pulse from the stable pulse point set as the current pulse, calculate the number of all pulses that overlap with the current pulse ablation area and redeposition area, and then perform iterative calculations using the pulse-by-pulse ablation model to obtain the processing morphology after the action of all pulses that overlap with the current pulse ablation area and redeposition area. Step 2.3: Combining the optical axis direction vector of the current pulse, extract the processing morphology at the current pulse from all the processing morphologies obtained in Step 2.2 that overlap with the current pulse ablation area and redeposition area; Step 2.4: Following the methods in Steps 2.2-2.3, traverse all pulses in the stable segment pulse point set and calculate the machining morphology at all pulses in the stable segment; Step 3: Extract the preliminary machining morphology of all pulses at the starting pulse in the unstable segment from the machining morphology at the starting pulse in the stable segment; extract the preliminary machining morphology of all pulses at the ending pulse in the unstable segment from the machining morphology at the ending pulse in the stable segment; then perform coordinate transformation on the preliminary machining morphology of all pulses at the starting and ending pulses in the unstable segment to obtain the machining morphology of all pulses at the starting and ending pulses in the unstable segment. Step 4: Perform Boolean operations on the machining morphology of all pulses in the stable segment and the machining morphology of all pulses in the starting and ending segments of the unstable segment to obtain the machining morphology of the workpiece surface.

2. The single-line scribing simulation method based on pulse-by-pulse ablation according to claim 1, characterized in that: In step 2.2, the number of all pulses overlapping with the current pulse ablation region and redeposition region is calculated using the following formula: 2 : ； in, The laser repetition frequency, For the first pulse Processing speed, To along the processing speed The width of the maximum ablation zone in the direction of the ablation. This is the floor symbol.

3. The single-line scribing simulation method based on pulse-by-pulse ablation according to claim 2, characterized in that, Step 3 specifically involves: Step 3.1, let the pulse of the stable segment be... The pulse at the beginning of the unstable segment is The pulse of the termination segment in the unstable segment is ; , , and Determined by the following formula: ； Start pulse from the stable segment Extract all pulses from the initial segment of the unstable segment in the processing morphology. The initial processing morphology at the location, terminating the pulse in the stable segment. Extract all pulses from the termination segment of the unstable segment in the processing morphology. Preliminary processing morphology at the location; Step 3.2, according to the coordinate system To coordinate system The rotation transformation matrix and translation vector will transform all pulses in the initial segment of the unstable segment. The initial processing morphology at the location is transformed using coordinates to obtain all pulses on the initial segment of the unstable segment. The processing morphology at the location; where the coordinate system The origin is a pulse on the initial segment of the unstable segment. At the position on the workpiece surface, The y-axis represents the initial pulse in the stable segment. The corresponding processing speed, The z-axis represents the initial pulse in the stable segment. Normal to the surface of the workpiece x-axis Coordinate system The origin is the current pulse. At the position on the workpiece surface, The y-axis represents the current pulse. The corresponding processing speed, The z-axis represents the current pulse. Normal to the surface of workpiece S, x-axis ; According to the coordinate system To coordinate system The rotation transformation matrix and translation vector will transform all pulses on the termination segment of the unstable segment. The initial machining morphology at the location is transformed using coordinates to obtain all pulses on the termination segment of the unstable segment. The processing morphology at the location; where the coordinate system The origin is a pulse in the termination segment of the unstable segment. At the position on the workpiece surface, The y-axis represents the termination pulse in the stable segment. The corresponding processing speed, The z-axis represents the termination pulse in the stable segment. Normal to the surface of the workpiece x-axis Coordinate system The origin is the current pulse. At the position on the workpiece surface, The y-axis represents the current pulse. The corresponding processing speed, The z-axis represents the current pulse. Normal to the surface of the workpiece x-axis .

4. The single-line scribing simulation method based on pulse-by-pulse ablation according to claim 3, characterized in that: In step 4, when performing Boolean operations on the processing morphology at all pulses in the stable segment and the processing morphology at all pulses in the starting and ending segments of the unstable segment, Boolean difference operations are used for the removed morphology in all processing morphologies, and Boolean sum operations are used for the redeposition morphology.

5. A multi-row scanning simulation method based on pulse-by-pulse ablation, characterized in that, Includes the following steps: Step 1: First, divide the multi-line scanning machining trajectory into starting line, stable line and ending line. Then, based on the stability of the pulse during single-line scribing, divide the starting line, stable line and ending line into starting segment, stable segment and ending segment respectively, forming the following segments: starting line starting segment, starting line stable segment, starting line ending segment, stable line starting segment, stable line stable segment, stable line ending segment, ending line starting segment, ending line stable segment, and ending line ending segment. Step 2: Calculation of the machining morphology at all pulse points in the stable segment of the stable line; Step 2.1: Discretize the multi-line processing trajectory corresponding to the stable segment of the stable line into a set of pulse points; Step 2.2: Select any pulse from the stable segment pulse point set of the stable row as the current pulse, calculate the number of all pulses that overlap with the current pulse ablation area and redeposition area, and then combine the pulse-by-pulse ablation model to perform iterative calculation to obtain the processing morphology after all pulses that overlap with the current pulse ablation area and redeposition area. Step 2.3: Combining the optical axis direction vector of the current pulse, extract the processing morphology at the current pulse from all the processing morphologies obtained in Step 2.2 that overlap with the current pulse ablation area and redeposition area; Step 2.4: Following the methods in Steps 2.2-2.3, traverse all pulses in the pulse point set of the stable row and stable segment, and calculate the machining morphology at all pulses in the stable row and stable segment. Step 3: Extract the machining features of all pulses in the starting stable segment from the machining features of all pulses in the first row of the stable segment; extract the machining features of all pulses in the ending stable segment from the machining features of all pulses in the last row of the stable segment. From the machining morphology at the start pulse and end pulse of each row in the stable segment, the preliminary machining morphology at all pulses in the start and end segments of the stable row is extracted respectively; then the coordinate transformation is performed on the preliminary machining morphology at all pulses in the start and end segments of the stable row to obtain the machining morphology at all pulses in the start and end segments of the stable row. From the machining morphologies at the start pulse, end pulse, start pulse, and end pulse of the first row in the stable segment of the stable row, the preliminary machining morphologies at all pulses on the start segment, end segment, start segment, and end segment of the start row are extracted respectively. Then, coordinate transformation is performed on the preliminary machining morphologies at all pulses on the start segment, end segment, start segment, and end segment of the start row to obtain the machining morphologies at all pulses on the start segment, end segment, start segment, and end segment of the start row. Step 4: Perform Boolean operations on the machining morphology at all pulse points on the stable line stable segment, starting line stable segment, ending line stable segment, stable line starting segment, stable line ending segment, starting line starting segment, starting line ending segment, ending line starting segment, and ending line ending segment to obtain the machining morphology of the workpiece surface.

6. The multi-row scanning simulation method based on pulse-by-pulse ablation according to claim 5, characterized in that: In step 2.2, the calculation of the number of all pulses overlapping with the current pulse ablation region and redeposition region is specifically as follows: Step A1, define the current pulse as the first pulse. Line number pulse , No. Line number pulse In order to be with the first Line number pulse The pulse corresponding to the column direction; Step A2, according to the first Line number pulse Processing speed at the location Calculate the first Line number Number of overlapping pulses at each pulse ; Step A3, define perpendicular to the first Line number pulse Processing speed The direction is , , For the first Line number The normal of each pulse, For the first Line number pulse The processing speed, then the first Line number pulse Along direction Processing width ,in, For direction Same direction from the first Line number pulse Initial ablation width, For direction In the opposite direction from the first Line number pulse Initial ablation width, For direction Deposition width in the same direction, For direction Deposition width in the opposite direction; defined perpendicular to the first Line number pulse Processing speed The direction is Then the first Line number pulse Along direction Processing width ,in, For direction Same direction from the first Line number pulse Initial ablation width, For direction In the opposite direction from the first Line number pulse Initial ablation width, For direction Deposition width in the same direction, For direction Deposition width in opposite directions; definition For the first Before the line and the first Line number pulse The maximum number of overlapping rows. For the first After the line and the first Line number pulse The maximum number of rows with overlap; when When the following condition is met, , : ； in, Indicates the first Line number One pulse, Indicates the first Line number One pulse; Step A4, according to the Line number Number of overlapping pulses at each pulse , No. Before the line and the first Line number pulse Maximum number of overlapping rows and the After the line and the first Line number pulse Maximum number of overlapping rows , obtain with the Line number pulse The number of pulses overlaps between the ablation zone and the redeposition zone.

7. The multi-row scanning simulation method based on pulse-by-pulse ablation according to claim 6, characterized in that: In step 4, when performing Boolean operations on the processing morphology at all pulse points on the stable line stable segment, the starting line stable segment, the ending line stable segment, the stable line starting segment, the stable line ending segment, the starting line starting segment, the starting line ending segment, the ending line starting segment, and the ending line ending segment, the Boolean difference operation is used for the removed morphology in all processing morphologies, and the Boolean sum operation is used for the redeposited morphology.

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