Rotating cathode
By designing a structure in which cables and shafts are arranged in parallel within the rotating cathode, and by using a main connector and an electromagnet connector for cable positioning, the problems of cable tangling and short circuits are solved, and waterproofing and stable operation of the rotating cathode are achieved.
Patent Information
- Application Number
- CN202510778476.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2024-07-18
- Filing Date
- 2025-06-11
- Publication Date
- 2026-01-20
AI Technical Summary
In existing rotating cathode sputtering equipment, it is difficult to achieve waterproofing of cables and connectors, and cable tangling or short circuits are prone to occur when the target and electromagnet assembly rotate independently.
A rotating cathode structure was designed in which the cable is arranged parallel to the shaft. By setting the main connector and the electromagnet connector on the shaft, the cable is positioned and waterproofed, and the cable is kept parallel and aligned with the shaft during rotation to avoid tangling or short circuit.
Waterproofing of the rotating cathode in the sputtering device was achieved, avoiding cable tangling and short circuit problems and ensuring stable operation of the device.
Smart Images
Figure CN121362945A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present invention relates to a rotary cathode. BACKGROUND
[0002] The rotary cathode can be used in a sputtering device. The rotary cathode can be rotatable about a rotation axis. The rotary cathode can be connected to an end block and an end cap. The rotary cathode is arranged to be rotatable between the end block and the end cap.
[0003] For the rotary cathode electromagnet, the portion constituting the appearance of the product can be structurally waterproofed. However, the portion to which power is supplied to the electromagnet, i.e., the connection portion of the cable and the connector, is not easily waterproofed. In addition, current needs to be applied when the target and the electromagnet assembly are independently rotated, which can cause problems such as entanglement or short circuit of the cable. There is an urgent need for a technology that solves the above problems.
[0004] The above background art is what the inventor found or learned in the course of developing the present invention, and should not be understood as necessarily being the general prior art publicly known before the filing of the present invention. SUMMARY
[0005] Technical problem to be solved
[0006] According to an embodiment, the object is to provide a rotary cathode.
[0007] Technical solution to the problem
[0008] The rotary cathode according to an embodiment for a sputtering device and composed of an end block, an end cap, an electromagnet assembly, and a target, can include: a target rotatably connected to the end block and the end cap, respectively; a shaft rotatable about a rotation axis; a head connector arranged at a front end of the shaft; a body connector arranged at a side of the shaft; a cable arranged inside the shaft and connecting the head connector and the body connector; an electromagnet arranged in parallel with the shaft; and an electromagnet connector arranged at the electromagnet and detachably provided at the body connector.
[0009] In an embodiment, the cable and the rotation axis of the shaft can be arranged in parallel.
[0010] In an embodiment, the shaft can include: a shaft body accommodating the cable; a shaft head connected at a front end of the shaft body and supporting the head connector; and a shaft disc connected to the shaft body and having a surface facing the end block.
[0011] In an embodiment, the shaft can further include a shaft arm connected to the shaft body and supporting the electromagnet assembly.
[0012] In an embodiment, the shaft can further include a shaft guide connected to the shaft body, having a shape protruding from an outer surface of the shaft body, and used to be inserted into the end block.
[0013] In an embodiment, the body connector can include a body connector plate disposed in the shaft, and a connector arm connected to the body connector plate, a portion of the connector arm being disposed in a state of being inserted into an inside of the shaft and supporting the cable.
[0014] In an embodiment, the connector arm can be disposed in a pair, and the pair of connector arms can include a first connector arm connected to the body connector plate, and a second connector arm having one end connected to the shaft and the other end connected to the first connector arm.
[0015] In an embodiment, the cable can be supported by the first connector arm and the second connector arm.
[0016] In an embodiment, a portion of the cable connected to the first connector arm and the second connector arm can be located on a rotation axis of the shaft.
[0017] In an embodiment, the body connector can further include a plurality of connector buffers disposed on the body connector plate.
[0018] In an embodiment, the body connector can further include a connector socket disposed on the body connector plate and connected to the connector arm.
[0019] In an embodiment, a portion of the cable connected to the head connector can be located on a rotation axis of the shaft.
[0020] In an embodiment, the electromagnet connector can include an electromagnet connector plate disposed in the electromagnet, and an electromagnet terminal connected to the electromagnet connector plate and insertable into the body connector.
[0021] Effects of Invention
[0022] The rotary cathode according to an embodiment can easily implement a waterproof process by providing a body connector on a shaft, an electromagnet connector on an electromagnet, and positioning a cable connecting the shaft connector and the head connector inside the shaft while connecting the two connectors to each other.
[0023] The rotary cathode according to an embodiment can eliminate a cable entanglement or short circuit problem that can occur when the rotary cathode rotates by substantially aligning the cable with a rotation axis of the shaft. BRIEF DESCRIPTION OF DRAWINGS
[0024] Figure 1is a schematic side view of a rotary cathode according to an embodiment.
[0025] Figure 2 is a schematic side view of a portion of a rotary cathode according to an embodiment.
[0026] Figure 3 is a perspective view of a body connector according to an embodiment.
[0027] Figure 4 is a perspective view of an electromagnet connector according to an embodiment.
[0028] Figure 5 is a schematic cross-sectional view of a rotary cathode connected to an end cap according to an embodiment. DETAILED DESCRIPTION
[0029] Hereinafter, example embodiments will be described with reference to the accompanying drawings. The following description is one of several aspects of the embodiments, and the following description constitutes a part of the detailed description. In describing example embodiments, when it is determined that a detailed description of related known structures or functions will unnecessarily obscure the present disclosure, a detailed description is omitted.
[0030] However, various changes can be made to the example embodiments. In this document, the present disclosure is not limited to the example embodiments. The example embodiments should be understood to include all changes equating to the spirit and technical scope of the present disclosure, and equivalents or substitutes thereof.
[0031] Also, the terms or words used in the present specification and claims should not be interpreted as having their commonly used meanings or dictionary meanings, but should be interpreted as having meanings and concepts corresponding to the technical idea of the present disclosure based on a principle in which the inventor can properly define the concept of the terms to most appropriately describe the present disclosure.
[0032] In the event that the content is not specifically described, the singular forms "a," "an," and "the" are intended to include the plural forms as well. In the present specification, the terms "include" and / or "have" and the like used herein are intended to denote the existence of the stated features, numbers, steps, operations, elements, components, and / or a combination thereof but do not preclude the existence or addition of one or more other features, numbers, steps, operations, elements, components, and / or a combination thereof.
[0033] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this example belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
[0034] In describing example embodiments, the same numbers are used to represent the same components throughout the specification and the figures. When the term "comprising" is used in the specification, it is taken to mean that the specification can include, but does not exclude, other components. Similarly, the term "comprising" is also taken to mean that the specification can include, but does not exclude, other steps. It will be understood by those within the art that any term nearly equivalent to "comprising", such as "including", "containing" or "having" are also to be interpreted as "comprising". As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.
[0035] Also, the terms "first", "second", "A", "B", "a", "b", etc. can be used in this specification to describe components. These terms are used only to distinguish one component from another component. The terms "first", "second", "A", "B", "a", "b", etc. should not be construed as indicating a specific order or sequence. Unless otherwise specified, the use of the terms first and second to describe a particular component should not be interpreted to indicate that a one component is in front of or comes before the other component. These terms are used to distinguish one component from another. When a component is "connected", "coupled", or "attached" to another component, it can be directly connected, coupled, or attached to the other component, or it can be "connected", "coupled", or "attached" to the other component via a third component.
[0036] When a component (for example, a first component) is described as including an element, the element encompasses the possibility of a plurality of elements. When a component is described as including an element, it means that the component can further include other elements, unless otherwise specified.
[0037] Reference Figure 1 The rotary cathode can be equipped with a rotary cathode. The rotary cathode can include a cooling water supply part 95 for supplying cooling water to the inside of the rotary target 100, a target rotating part 18 for rotating the target, and a shaft rotating part 19 for rotating the electromagnet assembly 200.
[0038] The electromagnet assembly 200 is located between the end block 92 and the end cover 93, and can be disposed inside the rotary target 100 in a rotatable manner. A joint 94 can be equipped between the rotary target 100 and the end block 92. The rotary target 100 can be rotated about a rotary shaft.
[0039] The rotary target 100 can be rotated by receiving power from the target rotating part 18. For example, one end of the target can be supported by the joint 94 rotatably mounted to the end block 92, and the other end of the target can be rotatably supported on the end cover 93. The target rotating part 18 can include a target bridge 181 mounted on a flange and a target motor 182 that generates power to rotate the target.
[0040] The electromagnet assembly 200 can receive power from the shaft rotating part 19 to rotate. For example, one end of the electromagnet assembly 200 can be supported by the joint 94 rotatably mounted to the end block 92, and the other end of the rotating target 100 can be rotatably supported on the end cover 93. The shaft rotating part 19 can include a shaft bridge 191 mounted on a flange, and a shaft motor 192 generating power for rotating the rotating target 100.
[0041] The electromagnet assembly 200 can rotate about a rotation axis disposed in parallel with the x-axis direction.
[0042] Figure 2 is a schematic side view of a portion of a rotating cathode according to an embodiment. Figure 3 is a perspective view of a body connector according to an embodiment. Figure 4 is a perspective view of an electromagnet connector according to an embodiment.
[0043] Referring to Figures 2 to 4 , the rotating cathode ( Figure 1 ) can include a shaft 11, a head connector 12, a body connector 13, a cable 14, an electromagnet 15, and an electromagnet connector 16.
[0044] The shaft 11 can be disposed to rotate about a rotation axis. The rotation axis of the shaft 11 can be parallel to the x-axis. The shaft 11 can have a hollow inside. The shaft 11 can accommodate the cable 14 inside. The shaft 11 can support a plurality of connectors. The cable 14 can connect the two connectors to each other. The shaft 11 can include a shaft body 111, a shaft head 112, a shaft disc 113, a shaft arm 114, and a shaft guide 115.
[0045] The shaft body 111 can have a cylindrical shape. The shaft body 111 can accommodate cooling water or a cable inside. The shaft body 111 can accommodate the cable 14.
[0046] The shaft head 112 can be connected to a front end of the shaft body 111. The shaft head 112 can support the head connector 12. The shaft head 112 can be detachably disposed on the shaft body 111.
[0047] The shaft disc 113 can be connected to the shaft body 111 and can have a surface facing the end block. The shaft disc 113 can be closely fitted to the end block.
[0048] The shaft arm 114 can be connected to the shaft body 111. The shaft arm 114 can be disposed at a position separated from the shaft disc 113. The shaft arm 114 can support the electromagnet 15 and the permanent magnet.
[0049] The shaft guide 115 can be connected to the shaft body 111. The shaft guide 115 can have a shape protruding from an outer surface of the shaft body 111. At least a portion of the shaft guide 115 can be inserted into the end block.
[0050] The head connector 12 can be disposed at the front end of the shaft 11. The head connector 12 can support one end of the cable 14. The head connector 12 can be electrically connected with the end block when the rotating target 100 is fastened to the end block. Power can be transmitted from the end block to the cable 14 through the head connector 12.
[0051] The body connector 13 can be disposed at the side of the shaft 11. The body connector 13 can include a body connector plate 131, a pair of connector arms 132, a connector socket 134, and a first fixing member 135.
[0052] The body connector plate 131 can be disposed on the shaft 11. The body connector plate 131 can have a cuboid shape. It is noted that the shape of the body connector plate 131 is not limited thereto. The body connector plate 131 can support the electromagnet 15. The electromagnet connector 16 can be connected to the body connector plate 131.
[0053] The pair of connector arms 132 are connected to the body connector plate 131 and can support the cable 14. The pair of connector arms 132 can be configured in a manner of being inserted into the inside of the shaft 11.
[0054] The connector socket 134 is disposed on the body connector plate 131 and can be connected to the electromagnet connector 16. The connector socket 134 can accommodate at least a portion of the electromagnet connector 16.
[0055] The first fixing member 135 can fix the body connector plate 131 to the shaft 11. For example, the first fixing member 135 can be a screw.
[0056] The cable 14 can be disposed inside the shaft 11. The cable 14 can connect the head connector 12 and the body connector 13. The cable 14 can be disposed in parallel with the rotation axis of the shaft 11.
[0057] The electromagnet 15 can be disposed in parallel with the shaft 11.
[0058] The electromagnet connector 16 can be disposed on the electromagnet. The electromagnet connector 16 can be detachably configured on the body connector 13. The electromagnet connector 16 can include an electromagnet connector plate 161, an electromagnet terminal 162, and a second fixing member 165.
[0059] The electromagnet terminal 162 can be connected to the electromagnet connector plate 161. The electromagnet terminal 162 can be provided in a manner of being insertable into the body connector 13.
[0060] The second fixing member 165 can fix the electromagnet connector plate 161. For example, the second fixing member 135 can be a screw.
[0061] According to such a structure, the electromagnet 15 and the head connector 12 can be electrically connected through the cable 14 by fixing the electromagnet 15 to the shaft 11 only. In addition, even during rotation of the rotating target 100, the cable 14 is prevented from being entangled by being kept parallel to the rotation axis of the shaft 11.
[0062] Figure 5 is a schematic cross-sectional view of an electromagnet assembly according to an embodiment and a state in which a target is connected to an end block.
[0063] Referring to Figure 5 The shaft 11 can be connected to the end block 92. The cable 14 is disposed in a position parallel to the rotation axis of the shaft 11 and can be located inside the shaft 11. The shaft head 112 can be connected to the shaft body 111. The shaft disc 113 can be tightly coupled to the end block 92. The shaft 11 can include a shaft cover 119 disposed on the shaft body 111.
[0064] While the present embodiments include specific examples, it will be apparent to one of ordinary skill in the art that various changes in form and details can be made without departing from the spirit and scope of the claims and their equivalents. The examples described herein are to be considered in a descriptive sense only and not for purposes of limitation. Therefore, the spirit and scope of the application are not limited to the described embodiments, but rather are encompassed by the appended claims, the equivalents thereof, and their equivalents.
Claims
1. A rotary cathode for a sputtering apparatus, and comprising an end block, an end cap, an electromagnet assembly, and a target, the rotary cathode comprising: a target rotatably connected to the end block and the end cap, respectively; a shaft rotatable about a rotational axis of the shaft; a head connector disposed at a front end of the shaft; a body connector disposed at a side of the shaft; a cable disposed inside the shaft and connecting the head connector and the body connector; an electromagnet disposed in parallel with the shaft; and an electromagnet connector disposed at the electromagnet and detachably provided at the body connector.
2. The rotary cathode of claim 1, wherein: the cable is disposed in parallel with the rotational axis of the shaft.
3. The rotary cathode of claim 1, wherein: the shaft comprises: a shaft body accommodating the cable; a shaft head connected at a front end of the shaft body and supporting the head connector; and a shaft disk connected to the shaft body and having a surface facing the end block.
4. The rotary cathode of claim 3, wherein: the shaft further comprises: a shaft arm connected to the shaft body and supporting the electromagnet and the permanent magnet.
5. The rotary cathode of claim 4, wherein: the shaft further comprises: a shaft guide connected to the shaft body, having a shape protruding from an outer surface of the shaft body, and being used for insertion into the end block.
6. The rotary cathode of claim 1, wherein: the body connector comprises: a body connector plate disposed at the shaft; and a connector arm connected to the body connector plate, a portion of the connector arm being disposed in a state of being inserted into an inside of the shaft and supporting the cable.
7. The rotary cathode of claim 6, wherein: the connector arm is disposed in a pair, the pair of connector arms comprises: a first connector arm connected to the body connector plate; and a second connector arm having one end connected to the shaft and the other end connected to the first connector arm.
8. The rotary cathode of claim 7, wherein: the cable is supported by the first connector arm and the second connector arm.
9. The rotary cathode of claim 7, wherein: a portion of the cable connected to the first connector arm and the second connector arm is located on the rotational axis of the shaft.
10. The rotary cathode of claim 6, wherein: the body connector further comprises: a plurality of connector buffers disposed on the body connector plate.
11. The rotary cathode of claim 6, wherein: the body connector further comprises: a connector socket disposed on the body connector plate and connected to the connector arm.
12. The rotary cathode of claim 1, wherein: a portion of the cable connected to the head connector is located on the rotational axis of the shaft.
13. The rotary cathode of claim 1, wherein: the electromagnet connector comprises: An electromagnet connector plate is arranged at the electromagnet; and An electromagnet terminal is connected to the electromagnet connector plate and is insertable into the main body connector.