Boron trifluoride production waste gas multi-stage alkali washing adsorption purification system

Abstract

The invention discloses a boron trifluoride production waste gas multistage alkali wash adsorption purification system, which comprises an arranged spray tower, the side end of the spray tower is provided with a liquid storage tower for storing an alkaline solution, the outer side of the spray tower is provided with a first heating mantle for keeping constant temperature, the side end of the first heating mantle is connected with a second heating mantle through a slide block, and the second heating mantle is connected with a third heating mantle through a slide block. And the second heating cover sleeves the outer side of the adsorption tower. According to the boron trifluoride production waste gas multistage alkali washing adsorption purification system, waste gas sprayed by the spraying tower enters the adsorption tower and makes contact with heating renewable adsorption particles in the adsorption tower, deep purification of the waste gas is achieved, the spraying tower is sleeved with the first heating cover, a stable temperature control environment is provided for spraying waste gas treatment, and the waste gas treatment efficiency is improved. And the second heating cover sleeves the outer side of the adsorption tower, so that the adsorption activity of the adsorption particles is ensured, conditions are created for subsequent particle regeneration, and the cyclic utilization of the adsorption particles is realized.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of boron trifluoride production, in particular to a multi-stage alkali washing and adsorption purification system for boron trifluoride production waste gas. BACKGROUND

[0002] Boron trifluoride is an inorganic compound with strong corrosive and toxic properties. Due to its high reactivity, boron trifluoride gas has strong reactivity and corrosivity. Existing waste gas treatment devices mostly use a single alkali absorption combined with activated carbon adsorption treatment process, so the overall treatment efficiency is low and the operating cost is high.

[0003] In order to overcome the above defects, the existing technology one (Chinese patent with publication number CN219091608U and publication date 2023.05.30) is a vegetable oil soap foot acidification waste gas purification tower, which comprises: a gas collecting cover with a structure of wide at the bottom and narrow at the top; a connecting pipe with an L-shaped structure composed of a first sub-pipe and a second sub-pipe; a containing space is arranged at the corner of the connecting pipe, liquid nitrogen is arranged in the containing space, an alkali washing tower is arranged at the output end of the connecting pipe, a packed absorption tower is arranged at the output end of the alkali washing tower; an activated carbon adsorber fan is arranged at the output end of the packed absorption tower, and an exhaust fan is arranged at the end of the waste gas purification path. The vegetable oil soap foot acidification waste gas purification tower has the advantages of simple structure and is suitable for vegetable oil soap foot acidification waste gas purification. The purified waste gas can be directly discharged. The existing technology two (Chinese patent with publication number CN219072573U and publication date 2023.05.26) is a purification device for waste gas containing chlorine, belonging to the technical field of waste gas treatment, comprising a plurality of first air pipes, a pre-cooling system, an alkali washing tower, a reduction tower, a dry chemical adsorption tower, a fan and an exhaust cylinder; the pre-cooling system, the alkali washing tower, the reduction tower, the dry chemical adsorption tower, the fan and the exhaust cylinder are connected in sequence through the first air pipes; the alkali washing tower is used for neutralizing and treating the pre-cooled waste gas; the reduction tower is used for removing chlorine in the waste gas; the dry chemical adsorption tower is used for filtering mist and secondary dechlorination; the waste gas containing chlorine is pre-cooled by the pre-cooling system, so that the flue gas is in a humidity saturation state; the cooled flue gas enters the alkali washing tower to undergo a neutralization reaction for chemical absorption; the absorbed flue gas enters the reduction tower after demisting, and undergoes a reduction reaction for chemical absorption; the absorbed flue gas enters the chemical adsorption tower after demisting to filter dust and mist and undergoes chemical adsorption.

[0004] The prior art improves the overall waste gas treatment efficiency by cooperation of the alkali washing tower, the reduction tower and the adsorption tower, but the alkali washing tower and the reduction tower are easily affected by temperature fluctuation, leading to unstable purification effect, and the adsorption tower relies on the adsorption effect of the filler surface to remove harmful substances in the waste gas, but the adsorption capacity of the filler is limited, and once the adsorption material is saturated, it needs to be replaced or regenerated regularly, which not only increases the maintenance cost of the equipment, but also reduces the long-term stability of the system.

[0005] In view of the above problems, it is urgent to make innovative design on the basis of the original multi-stage alkali washing and adsorption purification system for boron trifluoride production waste gas, therefore, the multi-stage alkali washing and adsorption purification system for boron trifluoride production waste gas can well solve the above problems. SUMMARY

[0006] The purpose of the present application is to provide a multi-stage alkali washing and adsorption purification system for boron trifluoride production waste gas to solve the problem of unstable purification effect caused by temperature fluctuation of the alkali washing tower and the reduction tower, and the problem of limited adsorption capacity of the filler in the adsorption tower.

[0007] To achieve the above purpose, the present application provides the following technical scheme: a multi-stage alkali washing and adsorption purification system for boron trifluoride production waste gas, comprising a spray tower, the input end of the spray tower is connected to the boron trifluoride production waste gas pipeline through a pipeline, the output end of the spray tower is connected to the inside of the adsorption tower through a pipeline, the side end of the spray tower is provided with a liquid storage tower for storing alkaline solution, a conveying assembly is installed on the liquid storage tower, the conveying assembly comprises a conveying pipeline installed in the liquid storage tower, a spraying assembly is connected to the output end of the conveying pipeline, the spraying assembly comprises a first sleeve installed at the output end of the conveying pipeline, the first sleeve is located in the inside of the spray tower, a first rotating shaft is connected to the inside of the first sleeve through a bearing, the inner cavity of the first rotating shaft is connected to the inner cavity of the first sleeve, the first sleeve is connected to a cleaning assembly through a pipeline, a first heating cover is installed outside the spray tower to keep constant temperature, a slide rod is arranged outside the spray tower, a slide block is installed at the side end of the first heating cover, the slide block is slidably sleeved outside the slide rod, a second heating cover is installed at the side end of the slide block, the second heating cover is sleeved outside the adsorption tower, and heat-regeneratable adsorption particles are arranged in the inside of the adsorption tower.

[0008] Preferably, the conveying assembly comprises a first motor mounted on the liquid storage tower, a rotating shaft is arranged at the output end of the first motor, and a stirring piece is arranged outside the rotating shaft, a conveying pump is mounted on the liquid storage tower, the rotating shaft inside the conveying pump is connected with the rotating shaft at the output end of the first motor, and a conveying pipeline is arranged inside the conveying pump.

[0009] Preferably, the cleaning assembly comprises a second sleeve in communication with the first sleeve through a pipeline, a second rotating shaft is connected with the bearing inside the second sleeve, the inner cavity of the second sleeve is in communication with the inner cavity of the second rotating shaft, a cleaning cylinder is mounted at the bottom of the second rotating shaft, cleaning pipelines are symmetrically arranged on the cleaning cylinder, and pressurized nozzles are mounted on the cleaning pipelines.

[0010] Preferably, a rotating assembly is mounted at the side end of the spray tower, the rotating assembly comprises a second motor mounted at the side end of the spray tower, a half gear is connected with the output end of the second motor, full gears are meshingly connected on both sides of the half gear, the full gears are mounted outside the first rotating shaft, and a torsional spring for rotation is arranged outside the first rotating shaft.

[0011] Preferably, a third motor is mounted at the top of the spray tower, and a first output end of the third motor is connected with the top end of the second rotating shaft.

[0012] Preferably, a second output end of the third motor is connected with a lifting assembly, the lifting assembly comprises a forward and reverse screw rod mounted at the second output end of the third motor, a lifting block is threadedly connected outside the forward and reverse screw rod, a storage cavity is arranged inside the lifting block, and a ball matched with the external thread of the forward and reverse screw rod is mounted inside the storage cavity, first and second conveying cylinders are mounted at the top of the spray tower, a piston is penetratingly connected inside the first and second conveying cylinders, the top end of the piston is mounted at the side end of the lifting block, and the first conveying cylinder is in communication with the inner cavity of the liquid storage tower through a second pipeline.

[0013] Preferably, a first pipeline is connected with the output end of the first conveying cylinder, a moving structure is connected with the end of the first pipeline, the moving structure comprises a support cylinder mounted at the top end of the spray tower, a moving rod is movably connected to the inner bottom of the support cylinder, and a first spring is arranged outside the support cylinder and the moving rod.

[0014] Preferably, a lifting plate is arranged at the bottom of the moving rod, the lifting plate is connected with the top of the first heating cover through a connecting rod, a guide rod is penetratingly connected inside the lifting plate, and a second spring is arranged outside the guide rod.

[0015] Preferably, a magnetic ring is mounted at the top of the forward and reverse screw rod, the magnetic ring is electrically connected with an electromagnetic structure through a wire, the electromagnetic structure comprises auxiliary magnetic blocks and an electromagnetic block, the electromagnetic block is mounted at the bottom end of the guide rod, and the bottom of the lifting plate is provided with an auxiliary magnetic block matched with the electromagnetic block.

[0016] Compared with the prior art, the beneficial effects of the present application are: the multi-stage alkali washing adsorption purification system for boron trifluoride production waste gas, after the waste gas sprayed by the spray tower enters the adsorption tower and contacts with the heated renewable adsorption particles in the tower, the waste gas is deeply purified, the first heating cover is sleeved outside the spray tower to provide a stable temperature control environment for the spray waste gas treatment, avoiding the influence of temperature fluctuation on the alkali washing reaction rate and effect, the second heating cover is sleeved outside the adsorption tower to ensure the adsorption activity of the adsorption particles and create conditions for subsequent particle regeneration, realizing the recycling of the adsorption particles, and the specific contents are as follows: The output shaft of the first motor drives the stirring part and the delivery pump in the liquid storage tower to rotate, the stirring part ensures the uniformity of the concentration of the alkaline solution, avoids the fluctuation of the purification efficiency caused by local concentration deviation, and the delivery pump accurately supplies liquid through the delivery pipeline to ensure the continuous and stable spraying.

[0017] The second motor drives the half gear to alternately mesh with the full gears on both sides, and cooperates with the torsional spring to realize the reciprocating rotation of the first rotating shaft, so that the alkaline solution sprayed from the spray port forms a dynamic coverage area. Compared with the fixed spraying mode, the contact area is enlarged, and the overall processing efficiency is improved.

[0018] The third motor drives the second rotating shaft to rotate, and through the communication structure of the second sleeve and the first sleeve, the alkaline solution is introduced into the cleaning cylinder and sprayed out at high pressure through the pressurized nozzle. The overall self-cleaning reduces the downtime maintenance time and labor cost, prolongs the service life of the equipment.

[0019] The lifting plate synchronously drives the first heating cover and the second heating cover to move through the connecting rod, and realizes smooth sliding by means of the cooperation of the sliding block and the sliding rod, thereby providing a global constant temperature environment for the spray tower and the adsorption tower, and improving the overall processing stability of the system.

[0020] The magnetic ring at the top of the positive and negative screw rod is powered by an electromagnetic structure, so that the electromagnetic block at the bottom of the guide rod and the auxiliary magnetic block of the lifting plate are adsorbed, realizing stable positioning of the heating cover. After stopping power supply, the elastic potential energy of the second spring drives the lifting plate to automatically reset, without the need for additional driving equipment, reducing the labor intensity and improving the convenience and reliability of the system operation. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present application; Figure 2 It is a schematic diagram of the internal structure of the adsorption tower of the present application; Figure 3 It is a schematic diagram of the internal structure of the liquid storage tower of the present application; Figure 4 It is a schematic diagram of the connection structure of the delivery pump and the delivery pipeline of the present application; Figure 5 It is a schematic diagram of the internal structure of the spray tower of the present application; Figure 6 It is the schematic view of the third motor and the positive and negative screw connection structure of the application. Figure 7 It is the schematic view of the first sleeve and the first rotating shaft connection structure of the application. Figure 8 It is the schematic view of the second sleeve and the second rotating shaft connection structure of the application. Figure 9 It is the schematic view of the internal structure of the first conveying cylinder of the application. Figure 10 It is the schematic view of the internal structure of the second conveying cylinder of the application. Figure 9 It is the schematic view of the enlarged structure at A of the application.

[0022] In the figure: 1, spray tower; 2, adsorption tower; 3, liquid storage tower; 4, first motor; 5, conveying pump; 6, conveying pipeline; 7, stirring part; 8, first sleeve; 9, first rotating shaft; 10, second sleeve; 11, second rotating shaft; 12, cleaning cylinder; 13, cleaning pipeline; 14, pressurized nozzle; 15, first heating cover; 16, sliding block; 17, sliding rod; 18, second heating cover; 19, second motor; 20, half gear; 21, full gear; 22, torsional spring; 23, third motor; 24, positive and negative screw; 25, lifting block; 26, ball; 27, piston; 28, first conveying cylinder; 29, first pipeline; 30, moving structure; 3001, support cylinder; 3002, moving rod; 3003, first spring; 31, magnetic ring; 32, wire; 33, electromagnetic structure; 34, guide rod; 35, second spring; 36, lifting plate; 37, second conveying cylinder; 38, second pipeline. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the application will be clearly and completely described below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the application.

[0024] In this embodiment, the first heating cover 15 is sleeved outside the spray tower 1 to provide a stable temperature control environment for spray waste gas treatment, avoid temperature fluctuation affecting the alkali washing reaction rate and effect, and ensure efficient neutralization reaction of acid pollutants and alkaline solution, such as Figures 1-8The technical scheme comprises a spray tower 1, an input end of the spray tower 1 is connected with a boron trifluoride production waste gas pipeline through a pipeline, an output end of the spray tower 1 is connected with the inside of an adsorption tower 2 through a pipeline, a liquid storage tower 3 for storing an alkaline solution is arranged at the side end of the spray tower 1, a conveying assembly is installed on the liquid storage tower 3, the conveying assembly comprises a conveying pipeline 6 installed in the inside of the liquid storage tower 3, a spraying assembly is connected with the output end of the conveying pipeline 6, the spraying assembly comprises a first sleeve 8 installed at the output end of the conveying pipeline 6, the first sleeve 8 is located in the inside of the spray tower 1, a first rotating shaft 9 is bearing-connected in the inside of the first sleeve 8, the inside cavity of the first rotating shaft 9 is connected with the inside cavity of the first sleeve 8, the first sleeve 8 is connected with a cleaning assembly through a pipeline, a first heating cover 15 for keeping constant temperature is installed outside the spray tower 1, a slide rod 17 is arranged outside the spray tower 1, a slide block 16 is installed at the side end of the first heating cover 15, the slide block 16 is slidingly sleeved outside the slide rod 17, a second heating cover 18 is installed at the side end of the slide block 16, the second heating cover 18 is sleeved outside the adsorption tower 2, heatable renewable adsorption particles are arranged in the inside of the adsorption tower 2, the conveying assembly comprises a first motor 4 installed on the liquid storage tower 3, a rotating shaft is arranged at the output end of the first motor 4, and stirring pieces 7 are arranged outside the rotating shaft, a conveying pump 5 is installed on the liquid storage tower 3, the rotating shaft in the inside of the conveying pump 5 is connected with the rotating shaft at the output end of the first motor 4, the conveying pipeline 6 is arranged in the inside of the conveying pump 5, the cleaning assembly comprises a second sleeve 10 connected with the first sleeve 8 through a pipeline, a second rotating shaft 11 is bearing-connected in the inside of the second sleeve 10, the inside cavity of the second sleeve 10 is connected with the inside cavity of the second rotating shaft 11, a cleaning cylinder 12 is installed at the bottom of the second rotating shaft 11, cleaning pipelines 13 are symmetrically arranged on the cleaning cylinder 12, pressure nozzles 14 are installed on the cleaning pipelines 13, the boron trifluoride production waste gas enters the spray tower 1 through a pipeline, thereby realizing the centralized introduction of the waste gas, the liquid storage tower 3 is arranged for storing the alkaline solution, the first motor 4 is started, the rotating shaft at the output end of the first motor 4 drives the stirring pieces 7 to rotate, the stirring pieces 7 stir the solution in the liquid storage tower 3, thereby ensuring the uniformity of the concentration of the alkaline solution and avoiding the influence of the local concentration that is too high or too low on the purification effect, improving the stability and consistency of the alkaline washing reaction, the rotating shaft in the inside of the conveying pump 5 is driven to rotate by the output end of the first motor 4, thereby realizing power sharing, reducing the number of driving devices, and reducing the energy consumption and equipment maintenance cost, the conveying pump 5 accurately conveys the alkaline solution to the spraying assembly through the conveying pipeline 6, thereby ensuring the continuous and stable supply of the solution and meeting the continuous demand of the spraying purification, after the solution enters the first sleeve 8, it flows into the first rotating shaft 9 connected with the inside cavity of the first sleeve 8, the through holes outside the first rotating shaft 9 can uniformly spray the alkaline solution into the waste gas, thereby expanding the contact area of the solution and the waste gas, after the sprayed waste gas enters the adsorption tower 2, it contacts with the heatable renewable adsorption particles in the tower, the particles further adsorb the residual pollutants in the waste gas, thereby realizing the deep purification of the waste gas, greatly reducing the pollutant emission concentration, reaching the environmental protection emission standard, the first heating cover 15 is sleeved outside the spray tower 1, thereby providing a stable temperature control environment for the spraying waste gas treatment, avoiding the influence of temperature fluctuation on the alkaline washing reaction rate and effect,To ensure the efficient neutralization reaction of acidic pollutants and alkaline solution, the second heating cover 18 is sleeved outside the adsorption tower 2 to provide a suitable heating environment for the adsorption particles, which not only ensures the adsorption activity of the adsorption particles and improves the adsorption efficiency, but also creates conditions for subsequent particle regeneration, realizes the recycling of the adsorption particles, and reduces the cost of consumables.

[0025] In this embodiment, the second rotating shaft 11 drives the cleaning cylinder 12 to rotate to clean the inside of the spray tower 1, ensuring the long-term stable operation of the spray system, reducing the frequency of manual cleaning and the workload of maintenance, as shown in Figures 1-8 The spray tower 1 is provided with a rotating assembly at the side end, which includes a second motor 19 installed at the side end of the spray tower 1. The output end of the second motor 19 is connected with a half gear 20, and the half gear 20 is meshingly connected with full gears 21 on both sides. The full gears 21 are installed outside the first rotating shaft 9, and a torsional spring 22 for rotation is sleeved outside the first rotating shaft 9. A third motor 23 is installed at the top of the spray tower 1, and the first output end of the third motor 23 is connected to the top end of the second rotating shaft 11. The second motor 19 is started to drive the half gear 20 to rotate, and the half gear 20 alternately meshes with the full gears 21 on both sides to make the first rotating shaft 9 reciprocate and rotate, and cooperate with the torsional spring 22 outside to realize the rotation reset, so that the solution is uniformly sprayed from the spray port of the first rotating shaft 9, improving the coverage and uniformity of the solution spray, and making the alkaline solution fully contact with the waste gas, significantly enhancing the neutralization and absorption effect of the acidic components in the waste gas. The first output end of the third motor 23 is started to drive the second rotating shaft 11 to rotate. The second sleeve 10 is connected with the first sleeve 8 through a pipeline, and the alkaline solution can flow into the second sleeve 10 and enter the inner cavity of the second rotating shaft 11, and finally be delivered to the cleaning cylinder 12. The solution is sprayed from the pressurized nozzle 14 at high pressure through the cleaning pipeline 13, and the second rotating shaft 11 drives the cleaning cylinder 12 to rotate to clean the inside of the spray tower 1, ensuring the long-term stable operation of the spray system, reducing the frequency of manual cleaning and the workload of maintenance, and prolonging the service life of the equipment. Therefore, the cleaning assembly not only facilitates the introduction of alkaline solution and the full treatment of waste gas, but also facilitates self-cleaning in the later period.

[0026] In this embodiment, the electromagnetic block installed at the bottom end of the guide rod 34 interacts with the auxiliary magnetic block at the bottom of the lifting plate 36, so that the two magnetic blocks are attracted after the lifting plate 36 moves down, realizing the stable positioning of the lifting plate 36, as shown in Figure 5 、 Figure 9 and Figure 10As shown, it is disclosed that: the second output end of the third motor 23 is connected with the lifting assembly, the lifting assembly comprises the positive and negative screw rod 24 installed on the second output end of the third motor 23, the lifting block 25 is threadedly connected to the outer side of the positive and negative screw rod 24, the lifting block 25 is internally provided with the storage cavity, and the storage cavity is internally provided with the ball 26 matched with the outer thread of the positive and negative screw rod 24, the first conveying cylinder 28 and the second conveying cylinder 37 are installed on the top of the spray tower 1, the piston 27 is connected through the inside of the first conveying cylinder 28 and the second conveying cylinder 37, the upper end of the piston 27 is installed on the side end of the lifting block 25, the first conveying cylinder 28 is connected with the inner cavity of the liquid storage tower 3 through the second pipeline 38, the output end of the first conveying cylinder 28 is connected with the first pipeline 29, the end of the first pipeline 29 is connected with the moving structure 30, the moving structure 30 comprises the support cylinder 3001 installed on the upper end of the spray tower 1, the movable rod 3002 is movably connected to the inner bottom of the support cylinder 3001, the first spring 3003 is arranged on the outer side of the support cylinder 3001 and the movable rod 3002, the lifting plate 36 is arranged on the bottom of the movable rod 3002, the lifting plate 36 is connected with the top of the first heating cover 15 through the connecting rod, the guide rod 34 is connected through the inside of the lifting plate 36, the second spring 35 is arranged on the outer side of the guide rod 34, the magnetic ring 31 is arranged on the top of the positive and negative screw rod 24, the magnetic ring 31 is electrically connected with the electromagnetic structure 33 through the wire 32, the electromagnetic structure 33 comprises the auxiliary magnetic block and the electromagnetic block, the electromagnetic block is arranged on the bottom end of the guide rod 34, the auxiliary magnetic block matched with the electromagnetic block is arranged on the bottom of the lifting plate 36, the second output end of the third motor 23 drives the positive and negative screw rod 24 to rotate, so that the lifting block 25 threadedly connected to the outer side moves up and down, the ball 26 in the lifting block 25 reduces the friction and the mechanical loss, the lifting block 25 drives the piston 27 to move up and down in the first conveying cylinder 28 and the second conveying cylinder 37, the second conveying cylinder 37 extracts the solution in the liquid storage tower 3 through the second pipeline 38 and circulates, further assists the solution to mix, and ensures that the concentration of the alkaline solution is uniform, when the device is self-cleaned, the second conveying cylinder 37 extracts the solution in the liquid storage tower 3 through the second pipeline 38 and circulates, facilitates the preparation of new alkaline solution, the second conveying cylinder 37 sends the internal gas to the moving structure 30 through the first pipeline 29, the gas is sent to the inside of the support cylinder 3001, so that the movable rod 3002 on the inner bottom of the support cylinder 3001 pushes the lifting plate 36 to move downward, at this time, the lifting plate 36 stably moves on the guide rod 34, the first heating cover 15 moves along the sliding rod 17 through the sliding block 16, and the second heating cover 18 is linked with the first heating cover 15, so that the spray tower 1 and the adsorption tower 2 are uniformly heated, the temperature of the reaction area is uniform, the efficiency of the alkaline washing reaction and the adsorption process is improved, the magnetic ring 31 on the top of the positive and negative screw rod 24 supplies power to the electromagnetic structure 33 through the wire 32, the electromagnetic block arranged on the bottom end of the guide rod 34 interacts with the auxiliary magnetic block on the bottom of the lifting plate 36, so that the two magnetic blocks are adsorbed after the lifting plate 36 moves downward, the stable positioning of the lifting plate 36 is realized, and the positions of the second heating cover 18 and the first heating cover 15 are fixed,The stability of the constant temperature environment is maintained, the second spring 35 outside the guide rod 34 is stretched at this time, the length of the moving rod 3002 at the bottom of the supporting barrel 3001 is smaller than the moving distance of the lifting plate 36, after the lifting plate 36 is adsorbed by the magnetic block, the moving rod 3002 is rebounded by the first spring 3003, so as to avoid that the moving rod 3002 causes excessive extrusion to the lifting plate 36, ensure that when the third motor 23 continues to rotate, the movement of the lifting block 25 does not affect the stable state of the lifting plate 36, and the coherence of the equipment operation is guaranteed, when the lifting plate 36 needs to move, the third motor 23 only needs to be stopped, after the magnetic force disappears, the lifting plate 36 is rebounded by the second spring 35 outside the guide rod 34, automatic reset is realized, the whole does not need additional driving equipment, the operation process is simplified, the energy consumption is reduced, and the stability and convenience of the system operation are guaranteed without modifying the whole working process.

[0027] Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements to part of the technical features, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A multi-stage caustic washing adsorption purification system for waste gas produced in the production of boron trifluoride, comprising a spray tower (1) arranged, characterized in that, The spray tower (1) input end is connected with the boron trifluoride production exhaust pipe through the pipeline, the spray tower (1) output end is connected with the inside of the adsorption tower (2) through the pipeline, the spray tower (1) side end is provided with the liquid storage tower (3) for storing the alkaline solution, the liquid storage tower (3) is installed with the conveying assembly, the conveying assembly includes the conveying pipeline (6) installed in the inside of the liquid storage tower (3), the conveying pipeline (6) output end is connected with the spray assembly, the spray assembly includes the first sleeve (8) installed in the conveying pipeline (6) output end, the first sleeve (8) is located in the inside of the spray tower (1), the first sleeve (8) inside bearing is connected with the first rotating shaft (9), the first rotating shaft (9) inner cavity is connected with the first sleeve (8) inner cavity, the first sleeve (8) is connected with the cleaning assembly through the pipeline, the spray tower (1) outside is installed with the first heating cover (15) that keeps constant temperature, the spray tower (1) outside is provided with the slide bar (17), the first heating cover (15) side end is installed with the sliding block (16), the sliding block (16) is slidably arranged on the outside of the slide bar (17), the sliding block (16) side end is installed with the second heating cover (18), the second heating cover (18) is arranged on the outside of the adsorption tower (2), the adsorption tower (2) inside is provided with the heating renewable adsorption particles.

2. The multi-stage caustic washing and adsorption purification system for waste gas produced in boron trifluoride production according to claim 1, characterized in that: The conveying assembly includes the first motor (4) installed on the liquid storage tower (3), the first motor (4) output end is provided with the rotating shaft, and the rotating shaft outside is provided with the stirring piece (7), the liquid storage tower (3) is installed with the conveying pump (5), the conveying pump (5) inside rotating shaft is connected with the first motor (4) output end rotating shaft, the conveying pump (5) inside is provided with the conveying pipeline (6).

3. The multi-stage caustic washing and adsorption purification system for waste gas produced in boron trifluoride production according to claim 1, characterized in that: The cleaning assembly includes the second sleeve (10) connected with the first sleeve (8) through the pipeline, the second sleeve (10) inside bearing is connected with the second rotating shaft (11), the second sleeve (10) inner cavity is connected with the second rotating shaft (11) inner cavity, the second rotating shaft (11) bottom is installed with the cleaning cylinder (12), the cleaning cylinder (12) is symmetrically provided with the cleaning pipeline (13), and the cleaning pipeline (13) is installed with the pressure nozzle (14).

4. The multi-stage caustic washing and adsorption purification system for waste gas produced in boron trifluoride production according to claim 1, characterized in that: The spray tower (1) side end is installed with the rotating assembly, the rotating assembly includes the second motor (19) installed on the spray tower (1) side end, the second motor (19) output end is connected with the half gear (20), the half gear (20) both sides are engagedly connected with the full gear (21), the full gear (21) is installed on the outside of the first rotating shaft (9), and the first rotating shaft (9) outside is sleeved with the torsional spring (22) for rotation.

5. The multi-stage caustic washing and adsorption purification system for waste gas produced in boron trifluoride production according to claim 1, characterized in that: The spray tower (1) top is installed with the third motor (23), and the third motor (23) first output end is connected at the top end of the second rotating shaft (11).

6. The multi-stage caustic washing and adsorption purification system for waste gas produced in boron trifluoride production according to claim 5, characterized in that: The second output end of the third motor (23) is connected with a lifting assembly, the lifting assembly comprises a forward and reverse screw rod (24) installed at the second output end of the third motor (23), the outer side of the forward and reverse screw rod (24) is threadedly connected with a lifting block (25), the inside of the lifting block (25) is provided with a storage cavity, and the inside of the storage cavity is provided with a ball (26) matched with the outer thread of the forward and reverse screw rod (24), the top of the spray tower (1) is provided with a first conveying cylinder (28) and a second conveying cylinder (37), the inside of the first conveying cylinder (28) and the second conveying cylinder (37) is penetrated and connected with a piston (27), the upper end of the piston (27) is installed at the side end of the lifting block (25), and the first conveying cylinder (28) is connected with the inner cavity of the liquid storage tower (3) in communication through a second pipeline (38).

7. The multi-stage caustic washing and adsorption purification system for waste gas produced in boron trifluoride production according to claim 6, characterized in that: The output end of the first conveying cylinder (28) is connected with a first pipeline (29), the end of the first pipeline (29) is connected with a moving structure (30), the moving structure (30) comprises a supporting cylinder (3001) installed at the upper end of the spray tower (1), the inside bottom of the supporting cylinder (3001) is movably connected with a moving rod (3002), and the outer side of the supporting cylinder (3001) and the moving rod (3002) is sleeved with a first spring (3003).

8. The multi-stage caustic washing and adsorption purification system for waste gas produced in boron trifluoride production according to claim 7, characterized in that: The bottom of the moving rod (3002) is provided with a lifting plate (36), the top of the lifting plate (36) is connected with the first heating cover (15) through a connecting rod, the inside of the lifting plate (36) is penetrated and connected with a guide rod (34), and the outer side of the guide rod (34) is sleeved with a second spring (35).

9. The multi-stage caustic washing and adsorption purification system for waste gas produced in boron trifluoride production according to claim 8, characterized in that: The top of the forward and reverse screw rod (24) is provided with a magnetic ring (31), the magnetic ring (31) is electrically connected with an electromagnetic structure (33) through a wire (32), the electromagnetic structure (33) comprises an auxiliary magnetic block and an electromagnetic block, and the electromagnetic block is installed at the bottom end of the guide rod (34), and the bottom of the lifting plate (36) is provided with an auxiliary magnetic block matched with the electromagnetic block.

Images