Substrate sorting machine

Abstract

The invention relates to the technical field of semiconductor manufacturing, and provides a substrate sorting machine which comprises a push rod mechanism, a stock bin, a clamping mechanism, a product positioning runner, a carrying mechanism, a tray transferring runner, a classification runner and a feeding tray runner. The stock bin can convey a material box loaded with a base plate to a to-be-taken station of the clamping mechanism and convey the material box to a material pushing station through the clamping mechanism, and the push rod mechanism can push the base plate in the material box to a product positioning runner. The feeding tray flow channel provides empty trays, substrates can be placed in the empty trays in a classified mode through the carrying mechanism, and then the trays with the substrates are conveyed into the classification flow channel through the tray transferring flow channel. The multi-axis mechanical arm is matched with the end effector to take out the substrate from the carrier, then the substrate is positioned and sorted to a target area, compatibility is good, the service life is long, assembly is easy, maintenance is convenient, one person can operate multiple machines, and waste of human resources is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to a substrate sorting machine. BACKGROUND

[0002] In the semiconductor industry chain, the substrate is the core carrier of chip manufacturing and packaging. With the increase of the integration of semiconductor devices, the production precision, size diversity and functional complexity of the substrate are significantly increased. In the later packaging and testing and wafer manufacturing links, the substrate needs to go through cutting, testing, cleaning, mounting and other processes. The sorting machine, as the key equipment connecting each process, plays a crucial role, but the existing substrate sorting machine has the following problems: 1. Low efficiency, complex mechanical arm movement path and slow speed.

[0003] 2. Poor compatibility, unable to accommodate substrates of different sizes.

[0004] Based on the problems of low efficiency and poor compatibility in the prior art, a new structure is urgently needed to solve the above defects. SUMMARY

[0005] In view of the defects in the prior art, the purpose of the present application is to provide a substrate sorting machine.

[0006] According to the substrate sorting machine provided by the present application, the substrate sorting machine comprises a push rod mechanism, a hopper, a clamping mechanism, a product positioning flow channel, a carrying mechanism, a tray transfer flow channel, a classification flow channel and a loading tray flow channel. The hopper can transport a substrate-loaded tray to a taking station of the clamping mechanism and transport the tray on the taking station to a pushing station by the clamping mechanism, and the push rod mechanism can push the substrate in the tray on the pushing station to the product positioning flow channel. The loading tray flow channel provides an empty tray, which is transported to a loading position by the tray transfer flow channel, and the carrying mechanism can classify the substrate on the product positioning flow channel and place it into the empty tray at the loading position, and then the tray with the substrate is transported to the classification flow channel by the tray transfer flow channel.

[0007] Preferably, the hopper comprises a hopper support, an upper layer feeding area and a lower layer discharging area, the upper layer feeding area and the lower layer discharging area are arranged on the hopper support, and the upper layer feeding area is arranged above the lower layer discharging area, the upper layer feeding area is used for inputting the tray, and the lower layer discharging area is used for outputting the tray.

[0008] Preferably, the upper layer feeding area comprises a first synchronous belt, an upper layer motor, the upper layer feeding area is used for inputting a material box, and the upper layer motor is in driving connection with the first synchronous belt; the lower layer discharging area comprises a second synchronous belt, a lower layer motor, and the lower layer motor is in driving connection with the second synchronous belt; The upper layer motor drives the first synchronous belt to move linearly and drives the material box to be transmitted to the taking position of the clamping mechanism, a first arrival signal is generated when the material box moves to the taking position of the clamping mechanism, and the upper layer motor stops running at this time, and the material box is accurately positioned. After the substrate in the material box on the taking position is completely taken out, the clamping mechanism transports the empty material box to the receiving position of the second synchronous belt, a second arrival signal is generated when the empty material box reaches the receiving position, and the lower layer motor is triggered to start running to drive the second synchronous belt to discharge the empty material box.

[0009] Preferably, the clamping mechanism comprises a Y-axis linear assembly and a first Z-axis linear assembly. The Y-axis linear assembly comprises a first cylinder, a linear guide rail and a support plate, the support plate is slidably arranged on the linear guide rail, and the first cylinder is in driving connection with the support plate. The first Z-axis linear assembly comprises a first support body, a Z-axis motor, a first lead screw, a clamping jaw seat and a clamping jaw, the bottom end of the first support body is arranged on the support plate, the Z-axis motor is arranged at the top end of the first support body, the first lead screw is arranged in the first support body and is in driving connection with the Z-axis motor, the inner side end of the clamping jaw seat is sleeved on the first lead screw and is in threaded connection with the first lead screw to realize driving connection, and the clamping jaw is arranged on the outer side end of the clamping jaw seat. When the Z-axis motor rotates, the first lead screw is driven to rotate, and the clamping jaw seat and the clamping jaw are driven to move along the axial direction of the first lead screw, and the clamping jaw is used for clamping or releasing the material box.

[0010] Preferably, the push rod mechanism comprises a first support seat, a push rod, a guide rod, a push rod sensor, a baffle, a spring, a driving plate and a push rod motor. The push rod, the guide rod, the driving plate and the push rod motor are arranged on the first support seat, the push rod sensor, the baffle and the spring are arranged on the driving plate, the guide rod penetrates through the driving plate, the push rod motor can drive the driving plate to slide along the guide rod, and the push rod is driven to move forward or backward, and the rear end of the push rod is sequentially provided with the spring, the baffle and the push rod sensor, and the push rod sensor monitors resistance feedback in real time.

[0011] Preferably, the product positioning flow channel comprises a first motor, a first flow channel sliding rail, a first flow channel support, a first threaded rod, a first flow channel width adjusting plate, a third motor, a third synchronous belt, a first blocking air cylinder and a first flow channel body; The first motor is arranged on one side of the first flow channel sliding rail, and the first flow channel support is slidably arranged on the first flow channel sliding rail and can slide along the first flow channel sliding rail under the drive of the first motor. The first flow channel width adjusting plate and the first flow channel body are arranged on the first flow channel support, the first threaded rod is drivingly connected with the first flow channel width adjusting plate, and rotation of the first threaded rod can drive the first flow channel width adjusting plate to move in the axial direction of the first threaded rod, so as to adjust the distance between the first flow channel width adjusting plate and the first flow channel body, thereby matching substrates of different widths. The third synchronous belt is arranged on the pulley on the side surface of the first flow channel body and is drivingly connected with the third motor, and the first blocking air cylinder is arranged at the front end of the third synchronous belt, and the first blocking air cylinder is used to realize the blocking positioning of the substrate.

[0012] Preferably, the conveying mechanism comprises a conveying support body, a second Z-axis linear assembly, an X-axis linear assembly, a suction cup and a code reader, the X-axis linear assembly is arranged on the second Z-axis linear assembly, the second Z-axis linear assembly is arranged on the conveying support body, the suction cup and the code reader are arranged on the second Z-axis linear assembly, the X-axis linear assembly can drive the second Z-axis linear assembly to move in the left-right direction, and the second Z-axis linear assembly can drive the suction cup to move in the up-down direction.

[0013] Preferably, the tray transplanting flow channel comprises a Y-axis belt module, a flat belt transmission module and a second blocking air cylinder. The Y-axis belt module comprises a sixth motor, a second flow channel sliding rail, a fourth lead screw, an end support and a second flow channel support, the sixth motor and the second flow channel sliding rail are arranged on the end support, the fourth lead screw is arranged on the second flow channel sliding rail, the fourth lead screw is drivingly connected with the second flow channel support, the fourth lead screw can drive the second flow channel support to move in the axial direction of the fourth lead screw when the fourth lead screw rotates, and the sixth motor is drivingly connected with the fourth lead screw through a fourth synchronous belt. The flat-belt conveying module comprises a seventh motor, a second threaded rod, a second flow channel width adjusting plate, an eighth motor, a fifth synchronous belt and a second flow channel body, the seventh motor, the second flow channel width adjusting plate and the second flow channel body are arranged on the second flow channel support, the second flow channel width adjusting plate is slidably arranged on the second flow channel support and can move along the axial direction of the second threaded rod under the driving of the seventh motor, thereby the distance between the second flow channel width adjusting plate and the second flow channel body can be adjusted to match the substrates with different widths, the fifth synchronous belt is arranged on the pulley on the side surface of the second flow channel body and is connected with the eighth motor, when the eighth motor rotates, the fifth synchronous belt can be driven to rotate through the pulley, thereby the substrate conveying is realized, and a second blocking cylinder is arranged at the front end of the fifth synchronous belt.

[0014] Preferably, the feeding disc flow channel has a buffer area, a laminated material distribution area and an eighth synchronous belt, a separation cylinder, a ball screw, a bottom support, a guide column and a lifting motor. The buffer area and the laminated material distribution area are sequentially connected and are both provided with an eighth synchronous belt and a separation cylinder, the ball screw, the bottom support, the guide column and the lifting motor are all arranged below the laminated material distribution area, the lifting motor is connected with the ball screw through a seventh synchronous belt, the ball screw penetrates through the bottom support and is threadedly connected with the bottom support, when the lifting motor rotates, the ball screw is driven to rotate through the seventh synchronous belt, thereby the bottom support can be driven to move upward or downward, a plurality of guide columns penetrate through the bottom support and guide the movement of the bottom support, a plurality of separation cylinders are arranged on one side of the eighth synchronous belt and can clamp and position the feeding disc, a whole stack of empty feeding discs are conveyed to the eighth synchronous belt at the bottom of the laminated material distribution area through the eighth synchronous belt at the bottom of the buffer area, and a single feeding disc is conveyed to the feeding disc transfer flow channel through the eighth synchronous belt at the bottom of the laminated material distribution area.

[0015] Preferably, the classification flow channel is used to receive the feeding disc loaded with different substrates conveyed from the feeding disc transfer flow channel. The classification flow channel is divided into a material receiving area and a material discharging area, the material receiving area is connected with the feeding disc transfer flow channel, and the feeding disc on the feeding disc transfer flow channel is conveyed to the material discharging area through a ninth synchronous belt at the bottom of the material receiving area.

[0016] Compared with the prior art, the present application has the following advantages: The present application forms a modular assembly by arranging the push rod mechanism, the material bin, the clamping mechanism, the product positioning flow channel, the carrying mechanism, the feeding disc transfer flow channel, the classification flow channel and the feeding disc flow channel, adopts a multi-axis mechanical arm cooperating with an end effector, takes out the substrate from the carrier, positions and sorts the substrate to the target area, and has stable detection, high efficiency, good compatibility, long service life, simple assembly, convenient maintenance, one-man multi-machine operation and reduced waste of human resources. Attached Figure Description

[0017] Other features, objects, and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings: Figure 1 This is a top view schematic diagram of the substrate sorting machine. Figure 2 This is a schematic diagram of the silo structure; Figure 3 This is a bottom view of the silo structure; Figure 4 This is a schematic diagram of the clamping mechanism. Figure 5 This is a schematic diagram of the push rod mechanism; Figure 6 A schematic diagram of the flow channel for product positioning; Figure 7 This is a schematic diagram of the structure in front of the conveying mechanism; Figure 8 This is a schematic diagram of the structure behind the conveying mechanism; Figure 9 This is a schematic diagram of the material tray transfer channel when viewed from the top side. Figure 10 This is a schematic diagram of the material tray transfer channel when viewed from the lower side. Figure 11 This is a schematic diagram of the feeding tray flow channel; Figure 12 This is a schematic diagram of the structure of the classification flow channel.

[0018] The diagram shows: Push rod mechanism 1; substrate 101; Material box 102; Material tray 103; First support seat 11; Putter 12; Guide rod 13; Push rod sensor 14; baffle 15; Spring 16; Driver board 17; 2 silos; 21. Material hopper support; First synchronous belt 22; Second synchronous belt 23; Lower motor 24; Clamping mechanism 3; Y-axis linear assembly 31; Cylinder 311; Linear guide rail 312; Support plate 313; First Z-axis linear assembly 32; First support body 321; Z-axis motor 322; Clamping jaw seat 323; Clamping jaw 324; Product positioning flow channel 4; First motor 41; First flow channel sliding rail 42; First flow channel support 43; Second motor 44; First threaded rod 45; First flow channel width adjusting plate 46; First flow channel main body 461; Third motor 47; First synchronous belt 48; First blocking air cylinder 49; Carrying mechanism 5; Carrying support main body 51; Second Z-axis linear assembly 52; Fourth motor 521; Second support body 522; Second support seat 523; X-axis linear assembly 53; Fifth motor 531; Third support body 532; Third support seat 533; Suction cup 54; Code reader 55; Tray transfer flow channel 6; Y-axis belt module 61; Sixth motor 611; Second flow channel sliding rail 612; Second flow channel support 613; End support 614; Flat belt transmission module 62; Seventh motor 621; Second threaded rod 622; Second flow channel width adjusting plate 623; Eighth motor 624; Fifth synchronous belt 625; Second flow channel main body 626; Second blocking air cylinder 63; Classification flow channel 7; Material receiving area 71; Material discharging area 72; The upper feeding disc flow channel 8; The buffer area 801; The laminated distribution area 802; The eighth synchronous belt 81; The separation cylinder 82; The ball screw 83; The guide column 84; The lifting motor 85. DETAILED DESCRIPTION

[0019] The application will be described in detail below with specific embodiments. The following embodiments will help those skilled in the art to further understand the application, but do not limit the application in any form. It should be pointed out that those skilled in the art can make several changes and improvements without departing from the concept of the application. These are within the scope of the application.

[0020] The application provides a substrate sorting machine, which comprises a push rod mechanism 1, a stock bin 2, a clamping mechanism 3, a product positioning flow channel 4, a carrying mechanism 5, a tray transfer flow channel 6, a classification flow channel 7, and an upper feeding disc flow channel 8, as shown in the figure. Figure 1 The stock bin 2 can transport the tray 102 loaded with the substrate 101 to the waiting position of the clamping mechanism 3, and transport the tray 102 to the pushing position through the clamping mechanism 3, push the substrate 101 in the tray 102 at the pushing position to the product positioning flow channel 4 through the push rod mechanism 1, provide the empty tray through the upper feeding disc flow channel 8, and transport the empty tray to the feeding position through the tray transfer flow channel 6, classify and place the substrate 101 on the product positioning flow channel 4 into the empty tray 103 at the feeding position through the carrying mechanism 5, then transport the tray 103 loaded with the substrate 101 to the classification flow channel 7 through the tray transfer flow channel 6, and finally complete the classification and placement of the substrate 101.

[0021] Specifically, the stock bin 2 is a material management module of the substrate sorting machine, and mainly functions to realize the supply of the substrate 101 and the recovery of the tray 102, adopts a double-layer independent partition layout, comprises a stock bin support 21, an upper feeding area, and a lower feeding area, is provided with a high-precision synchronous belt driving mechanism, and the upper feeding area and the lower feeding area are directly driven by motors and do not interfere with each other.

[0022] Specifically, as shown in the figure, Figure 2 , Figure 3As shown, the upper layer feeding area and the lower layer discharging area are arranged on the silo support 21, and the upper layer feeding area is arranged above the lower layer discharging area, the upper layer feeding area includes a first synchronous belt 22, an upper layer motor, the upper layer feeding area is used for inputting the magazine 102, the upper layer motor can drive the first synchronous belt 22 to rotate and then convey the magazine 102, the lower layer discharging area includes a second synchronous belt 23, a lower layer motor 24, the lower layer discharging area is used for outputting the magazine 102, and the lower layer motor 24 can drive the second synchronous belt 23 to rotate and then output the empty magazine 102, and in specific operation, the magazine 102 is placed on the first synchronous belt 22 of the upper layer feeding area by manual operation, the first synchronous belt 22 is driven to rotate by the upper layer motor to convey the magazine 102 into the equipment, and the specific working process is as follows: Firstly, the operator places the full magazine 102 loaded with the substrate 101 on the preset initial station of the first synchronous belt 22 of the upper layer feeding area.

[0023] Secondly, the upper layer motor at the bottom of the upper layer feeding area drives the first synchronous belt 22 to move linearly, and drives the magazine 102 to be transmitted to the waiting station of the clamping mechanism 3 in the equipment, when the magazine 102 moves to the waiting station of the clamping mechanism 3, the first sensor is triggered to generate a first arrival signal, at this time, the upper layer motor stops running, and the magazine 102 completes accurate positioning.

[0024] Finally, after the substrate 101 in the magazine 102 is completely taken out, the clamping mechanism 3 transports the empty magazine 102 to the receiving station of the second synchronous belt 23 in the lower layer discharging area, when the empty magazine 102 reaches the receiving station, the second sensor is triggered to generate a second arrival signal, and the lower layer motor 24 is triggered to start running to drive the second synchronous belt 23 to send out the empty magazine 102.

[0025] As shown in the figure, Figure 4 The clamping mechanism 3 clamps the magazine 102 to stay at the pushing position, and the push rod mechanism 1 can push the products in the magazine 102 layer by layer from top to bottom, and the action from top to bottom is realized through the first Z-axis linear assembly 32 of the clamping mechanism 3. The clamping mechanism 3 is a material transfer module of the substrate sorting machine, and the main function is to realize the grabbing, carrying and positioning of the magazine 102.

[0026] Further, the clamping mechanism 3 adopts a multi-axis cooperative driving layout, including a Y-axis linear assembly 31 and a first Z-axis linear assembly 32. The Y-axis linear assembly 31 includes a first cylinder 311, a linear guide rail 312, and a support plate 313. The support plate 313 is slidably arranged on the linear guide rail 312. The first cylinder 311 is drivingly connected with the support plate 313. The first cylinder 311 can drive the support plate 313 to slide on the linear guide rail 312. The first Z-axis linear assembly 32 includes a first support body 321, a Z-axis motor 322, a first lead screw, a clamping jaw seat 323, and a clamping jaw 324. The bottom end of the first support body 321 is arranged on the support plate 313. The Z-axis motor 322 is arranged at the top end of the first support body 321. The first lead screw is arranged in the first support body 321 and drivingly connected with the Z-axis motor 322. The inner side end of the clamping jaw seat 323 is sleeved on the first lead screw and drivingly connected with the first lead screw in a threaded manner. The clamping jaw 324 is arranged on the outer side end of the clamping jaw seat 323. When the Z-axis motor 322 rotates, the first lead screw is driven to rotate, thereby driving the clamping jaw seat 323 and the clamping jaw 324 to move along the axial direction of the first lead screw, i.e., to move upward or downward. The clamping mechanism 3 is driven by the first cylinder 311 and the Z-axis motor 322 to complete the grabbing work of the clamping jaw 324.

[0027] Further, the clamping jaw 324 is used for clamping the material box 102 located at the to-be-taken work position of the material bin 2 or loosening the empty material box 102 so that the empty material box 102 falls on the receiving work position of the material bin 2. The clamping jaw 324 includes a second cylinder, a first clamping end, and a second clamping end. The first clamping end is fixed. The second clamping end is drivingly connected with the second cylinder. When the second cylinder drives the second clamping end to move, the second clamping end can move close to or away from the first clamping end, thereby realizing the actions of clamping or loosening.

[0028] The working process of the clamping mechanism 3 is as follows: Firstly, after receiving the full material box 102 to position signal, the clamping mechanism 3 drives the support plate 313 through the first cylinder 311 to adjust the position of the first Z-axis linear assembly 32 in the Y-axis direction. At the same time, the clamping mechanism 3 drives the clamping jaw seat 323 through the Z-axis motor 322 to drive the clamping jaw 324 to adjust the position of the clamping jaw 324 in the Z-axis direction, to the to-be-taken work position of the upper feeding area of the material bin 2.

[0029] Secondly, the clamping jaw 324 buckles the material box 102 and moves to the material pushing work position. The clamping mechanism 3 performs accurate step-down movement through the first Z-axis linear assembly 32, so that each layer of the substrate 101 is aligned with the push rod mechanism 1 in height in sequence, thereby realizing layered material pushing.

[0030] Finally, after the substrate 101 is completely pushed out, the clamping mechanism 3 sends the empty material box 102 to the receiving work position of the lower discharging area of the material bin 2. The clamping jaw 324 is loosened, and the placing is completed.

[0031] The push rod mechanism 1 is a material pushing module of the substrate sorting machine, and mainly functions to realize pushing and stopping alarm of the substrate 101. The push rod mechanism 1 pushes the product from the magazine 102 to the product positioning flow channel 4, and after the product positioning is completed, the code reader on the carrying mechanism 5 reads the product two-dimensional code, and according to the information of the two-dimensional code, the product is carried to the tray transfer flow channel 6.

[0032] As shown in Figure 5 The push rod mechanism 1 adopts a reciprocating linear motion type layout, and includes a first support seat 11, a push rod 12, a guide rod 13, a push rod sensor 14, a baffle 15, a spring 16, a driving plate 17 and a push rod motor. The push rod 12, the guide rod 13, the driving plate 17 and the push rod motor are all arranged on the first support seat 11, the push rod sensor 14, the baffle 15 and the spring 16 are all arranged on the driving plate 17, the guide rod 13 penetrates through the driving plate 17, the push rod motor can drive the driving plate 17 to slide along the guide rod 13, thereby driving the push rod 12 to move forward or backward, the front end of the push rod 12 is a push head, and the rear end of the push rod 12 is sequentially arranged with the spring 16, the baffle 15 and the push rod sensor 14. The push rod sensor 14 monitors resistance feedback in real time.

[0033] The working process of the push rod mechanism 1 is specifically as follows: Firstly, the push rod mechanism 1 is aligned in height with the full-load magazine 102 gripped by the clamping mechanism 3, the baffle 15, the spring 16 and the push rod 12 are driven by the push rod motor to move forward along the guide rod 13, and the substrate 101 at the bottom layer in the magazine 102 is pushed out to the product positioning flow channel 4.

[0034] Secondly, the push rod motor is reversed, the driving plate 17 drives the push rod 12 to retreat until it returns to the initial position.

[0035] Finally, the clamping mechanism 3 drives the magazine 102 to descend by one layer, so that the substrate 101 at the next layer is aligned with the push head, the push rod mechanism 1 repeats the above pushing and retreating actions, and the process is repeated until all the substrates 101 are pushed out one by one. In the whole pushing process, when the push head contacts the substrate 101, resistance exists, if the resistance is abnormally increased due to the jamming of the substrate 101 and other reasons, the spring 16 will be compressed, so that the push head retreats and triggers the baffle 15, the push rod sensor 14 behind the baffle 15 senses the signal, and the push rod 12 stops running, thereby protecting the substrate 101 and the mechanism from being damaged; when the resistance is normal, the spring 16 remains rigid, and the system continues to run.

[0036] Specifically, the product positioning flow channel 4 is a material positioning module of the substrate sorting machine, and mainly functions to realize positioning and transmission of the substrate 101. As shown in Figure 6As shown, the product positioning flow channel 4 adopts an adjustable width flow channel transmission layout, including a first motor 41, a first flow channel sliding rail 42, a first flow channel support 43, a second motor 44, a first threaded rod 45, a first flow channel width adjusting plate 46, a third motor 47, a third synchronous belt 48, a first blocking air cylinder 49, and a first flow channel main body 461. The first motor 41 is arranged on one side of the first flow channel sliding rail 42. The first flow channel support 43 is slidably arranged on the first flow channel sliding rail 42 and can slide along the first flow channel sliding rail 42 under the drive of the first motor 41, thereby adjusting the position of the first flow channel support 43. The second motor 44, the first flow channel width adjusting plate 46, and the first flow channel main body 461 are all arranged on the first flow channel support 43. The second motor 44 is drivingly connected to the first flow channel width adjusting plate 46 through the first threaded rod 45. The movement of the first flow channel width adjusting plate 46 in the axial direction of the first threaded rod 45 under the rotation of the first threaded rod 45 driven by the second motor 44 can adjust the distance between the first flow channel width adjusting plate 46 and the first flow channel main body 461, thereby matching the substrates 101 of different widths. The third synchronous belt 48 is arranged on the pulley on the side surface of the first flow channel main body 461 and is drivingly connected to the third motor 47. The first blocking air cylinder 49 is arranged at the front end of the third synchronous belt 48. The first blocking air cylinder 49 can realize the blocking positioning of the substrate 101.

[0037] It should be noted that the driving force of the rotation of the first threaded rod 45 is preferably driven by the second motor 44. In a variant, the second motor 44 is omitted, and the rotation of the first threaded rod 45 is driven by manual operation of workers, which can also adjust the distance between the first flow channel width adjusting plate 46 and the first flow channel main body 461.

[0038] The working process of the product positioning flow channel 4 is as follows: First, before sorting different substrates 101, the operator manually adjusts or drives the first threaded rod 45 by the second motor 44 to adjust the distance between the first flow channel width adjusting plate 46 and the first flow channel main body 461, so as to adjust the flow channel width to match the size of the substrate 101.

[0039] Secondly, during the operation of the equipment, the third motor 47 drives the third synchronous belt 48 to rotate, and the substrate 101 pushed by the push rod mechanism 1 is transmitted.

[0040] Finally, the first blocking air cylinder 49 extends to block the substrate 101 in the transportation, and the first motor 41 drives the adjustment of the position of the first flow channel support 43, thereby completing the accurate positioning of the substrate 101 and facilitating the code scanning and carrying of the carrying mechanism 5.

[0041] As Figure 7 , Figure 8As shown, the carrying mechanism 5 is a material sorting module of the substrate sorting machine, and the main function is to realize the classification and carrying of the substrate 101. The carrying mechanism 5 adopts a gantry multi-axis linkage layout, including a carrying support main body 51, a second Z-axis linear assembly 52, an X-axis linear assembly 53, a suction cup 54 and a code reader 55. The X-axis linear assembly 53 is arranged on the second Z-axis linear assembly 52, the second Z-axis linear assembly 52 is arranged on the carrying support main body 51, the code reader 55 is arranged on the second Z-axis linear assembly 52, and the suction cup 54 is arranged at the bottom of the second Z-axis linear assembly 52. The suction cup 54 adopts a vacuum suction cup.

[0042] Further, the X-axis linear assembly 53 includes a fifth motor 531, a third support body 532, a third support seat 533 and a third lead screw. The third support body 532 is arranged on the carrying support main body 51, the fifth motor 531 is arranged at the end of the third support body 532 and connected with the third lead screw drive arranged on the third support body 532, and the third support seat 533 is connected with the third lead screw drive. When the fifth motor 531 drives the third lead screw to rotate, the third support seat 533 can be driven to move along the axial direction of the third lead screw. The second Z-axis linear assembly 52 includes a fourth motor 521, a second support body 522, a second support seat 523 and a second lead screw. The second support body 522 is arranged on the third support seat 533, the fourth motor 521 is arranged at the end of the second support body 522 and connected with the second lead screw drive arranged on the second support body 522, and the second support seat 523 is connected with the second lead screw drive. When the fourth motor 521 drives the second lead screw to rotate, the second support seat 523 can be driven to move along the axial direction of the second lead screw, thereby realizing the upward or downward movement of the second support seat 523. The suction cup 54 and the code reader 55 are arranged on the second support seat 523.

[0043] The working process of the carrying mechanism 5 is as follows: Firstly, after the substrate 101 is accurately positioned in the product positioning flow channel 4, the code reader 55 on the carrying mechanism 5 is moved above the substrate 101 through the X-axis linear assembly 53, reads the two-dimensional code on the surface of the substrate 101 and classifies the substrate 101.

[0044] Secondly, the second Z-axis linear assembly 52 drives the suction cup 54 to suck the substrate 101 downward, and then lifts to a safe height.

[0045] Finally, the X-axis linear assembly 53 moves horizontally, accurately positions, carries and releases the substrate 101 to the tray moving and transplanting flow channel 6.

[0046] The tray moving and transplanting flow channel 6 is a material classification module of the substrate sorting machine, and the main function is to realize the tray loading and classification of the substrate 101. For example, Figure 9As shown, the tray transplanting flow channel 6 adopts a linear multi-position moving layout, including a Y-axis belt module 61, a flat belt transmission module 62, and a second blocking cylinder 63.

[0047] Specifically, the Y-axis belt module 61 includes a sixth motor 611, a second flow channel sliding rail 612, a fourth lead screw, an end support 614, and a second flow channel support 613, as shown in the figure. Figure 10 As shown, the sixth motor 611 and the second flow channel sliding rail 612 are arranged on the end support 614, the fourth lead screw is arranged on the second flow channel sliding rail 612, and the fourth lead screw is preferably arranged inside the second flow channel sliding rail 612. The fourth lead screw is drivingly connected to the second flow channel support 613. When the fourth lead screw rotates, it can drive the second flow channel support 613 to move in the axial direction of the fourth lead screw. The sixth motor 611 is drivingly connected to the fourth lead screw through a fourth synchronous belt. The ends of the fourth lead screw and the sixth motor 611 are provided with belt pulleys, and the two ends of the fourth synchronous belt are sleeved on the two belt pulleys to achieve transmission.

[0048] Further, as shown in the figure, Figure 9 The flat belt transmission module 62 includes a seventh motor 621, a second threaded rod 622, a second flow channel width adjustment plate 623, an eighth motor 624, a fifth synchronous belt 625, and a second flow channel main body 626. The seventh motor 621, the second flow channel width adjustment plate 623, and the second flow channel main body 626 are arranged on the second flow channel support 613. The second flow channel width adjustment plate 623 is slidably arranged on the second flow channel support 613 and can move in the axial direction of the second threaded rod 622 under the drive of the seventh motor 621, thereby adjusting the position of the second flow channel support 613. Specifically, when the seventh motor 621 rotates, it can drive the second threaded rod 622 to rotate. The second threaded rod 622 is threadedly connected to the second flow channel width adjustment plate 623. Therefore, when the second threaded rod 622 rotates, the second flow channel width adjustment plate 623 moves in the axial direction of the second threaded rod 622, thereby adjusting the distance between the second flow channel width adjustment plate 623 and the second flow channel main body 626 to match the different widths of the substrate 101. The fifth synchronous belt 625 is arranged on the belt pulley on the side of the second flow channel main body 626 and is drivingly connected to the eighth motor 624. When the eighth motor 624 rotates, it can drive the fifth synchronous belt 625 to rotate through the belt pulley, thereby achieving the transportation of the substrate 101. A second blocking cylinder 63 is arranged at the front end of the fifth synchronous belt 625. The second blocking cylinder 63 can achieve the blocking positioning of the substrate 101.

[0049] It should be noted that the driving force for rotating the second threaded rod 622 is preferably driven by the seventh motor 621. In a variant, the seventh motor 621 is omitted, and the driving of the rotation of the second threaded rod 622 is manually operated by workers, which can also achieve the adjustment of the distance between the second flow channel width adjustment plate 623 and the second flow channel main body 626.

[0050] The working principle of the tray transfer channel 6 is as follows: First, the Y-axis belt module 61 of the tray transfer channel 6 drives the tray receiving station of the tray feeding channel 8 on the flat belt transmission module 62; the eighth motor 624 drives the synchronous wheel to rotate the fifth synchronous belt 625, and receives the single empty tray 103 separated from the stacking and separating area 802.

[0051] Secondly, after the empty tray 103 is transmitted to the preset position of the channel, the second blocking cylinder 63 is lifted to block and complete positioning, and at the same time, the channel is moved to the corresponding tray placing position of the carrying mechanism 5 with the flat belt transmission module 62, so as to ensure that the substrate 101 is accurately placed in the tray 103.

[0052] Finally, the channel is moved to the corresponding classification channel 7 with the flat belt transmission module 62, the flat belt transmission module 62 is started, the tray 103 is transmitted to the tray receiving area of the classification channel 7, and the tray 103 is classified and placed in the tray 103.

[0053] As shown in Figure 11 The tray feeding channel 8 has a buffer area 801, a stacking and separating area 802, an eighth synchronous belt 81, a separating cylinder 82, a ball screw 83, a bottom support, a guide column 84, and a lifting motor 85. The buffer area 801 and the stacking and separating area 802 are connected in sequence and are both provided with the eighth synchronous belt 81 and the separating cylinder 82. The ball screw 83, the bottom support, the guide column 84, and the lifting motor 85 are all arranged below the stacking and separating area 802. The lifting motor 85 is driven by the seventh synchronous belt and connected with the ball screw 83. The ball screw 83 penetrates the bottom support and is threadedly connected with the bottom support. When the lifting motor 85 rotates, it drives the ball screw 83 to rotate through the seventh synchronous belt, and in turn drives the bottom support to move upward or downward. A plurality of guide columns 84 penetrate the bottom support and guide the movement of the bottom support. A plurality of separating cylinders 82 are arranged on one side of the eighth synchronous belt 81 and can clamp and position the tray 103. A whole stack of empty trays 103 is transmitted to the eighth synchronous belt 81 at the bottom of the stacking and separating area 802 through the eighth synchronous belt 81 at the bottom of the buffer area 801. A single tray 103 is transmitted to the tray transfer channel 6 through the eighth synchronous belt 81 at the bottom of the stacking and separating area 802.

[0054] The separation principle of the single tray 103 is as follows: The ball screw 83 is driven to rotate by lifting the motor 85, and the ball screw 83 drives the bottom support to move upward. The guide column 84 penetrates the bottom support, and the bottom support slides along the guide column 84 when moving. When the bottom support contacts the lowermost tray 103 and moves upward by a distance of the thickness of one tray 103, the separating cylinder 82 stops. At this time, the guide column 84 drives the bottom support to descend by the height of one tray 103, and the lowermost tray 103 falls on the eighth synchronous belt 81 at the bottom of the layered separating area 802, and one tray 103 is successfully separated. The separated tray 103 is transported to the tray transfer flow channel 6 by the eighth synchronous belt 81.

[0055] The classification flow channel 7 has a total of four, which are used to receive the trays 103 containing different substrates 101 transmitted from the tray transfer flow channel 6, as shown in the figure. Figure 12 As shown, the classification flow channel 7 is divided into a receiving area 71 and a discharging area 72. The receiving area 71 is connected to the tray transfer flow channel 6. The tray 103 on the tray transfer flow channel 6 is transmitted to the discharging area 72 through the ninth synchronous belt at the bottom of the receiving area 71, and then the whole stack of trays 103 in the discharging area 72 is removed.

[0056] It should be noted that the right side of the substrate sorting machine is provided with five flow channels. One of them is the tray loading flow channel 8, and the other four are classification flow channels 7. A stack of trays 103 is manually carried and placed in the buffer area 801 of the tray loading flow channel 8. The bottom of the buffer area 801 is provided with an eighth synchronous belt 81, which is used to convey the whole stack of trays 103 to the layered separating area 802. One tray 103 is separated through the layered separating area 802, and the bottom of the tray 103 is conveyed to the tray transfer flow channel 6 through the synchronous belt. The bottom of the tray transfer flow channel 6 is provided with a belt module, which can move along the Y-axis direction to realize the conveying of the tray 103.

[0057] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0058] The specific embodiments of the present application have been described above. It should be understood that the present application is not limited to the above specific embodiments, and those skilled in the art can make various changes or modifications within the scope of the claims, which does not affect the essential content of the present application. The embodiments of the present application and the features in the embodiments can be arbitrarily combined with each other without conflict.

Claims

1. A substrate sorting machine, characterized in that, It includes a push rod mechanism (1), a hopper (2), a clamping mechanism (3), a product positioning channel (4), a conveying mechanism (5), a material tray transfer channel (6), a sorting channel (7), and a loading tray channel (8); The hopper (2) can transport the cassette (102) carrying the substrate (101) to the waiting station of the clamping mechanism (3) and transport the cassette (102) located at the waiting station to the pushing station through the clamping mechanism (3). The push rod mechanism (1) can push the substrate (101) in the cassette (102) located at the pushing station to the product positioning channel (4). The loading tray channel (8) provides empty trays, and the tray transfer channel (6) transports the empty trays to the unloading position. The conveying mechanism (5) can classify the substrates (101) on the product positioning channel (4) and place them into the empty trays at the unloading position. Then, the trays containing the substrates (101) are transported to the classification channel (7) by the tray transfer channel (6).

2. The substrate sorting machine according to claim 1, characterized in that, The hopper (2) includes a hopper support (21), an upper feeding area and a lower discharging area. The upper feeding area and the lower discharging area are both arranged on the hopper support (21), and the upper feeding area is arranged above the lower discharging area. The upper feeding area is used to input the material box (102), and the lower discharging area is used to output the material box (102).

3. The substrate sorting machine according to claim 2, characterized in that, The upper feeding area includes a first synchronous belt (22) and an upper motor. The upper feeding area is used to input the material box (102). The upper motor can be driven and connected to the first synchronous belt (22). The lower discharging area includes a second synchronous belt (23) and a lower motor (24). The lower motor (24) is driven and connected to the second synchronous belt (23). The upper motor drives the first synchronous belt (22) to move linearly and drives the material box (102) to be picked up at the clamping mechanism (3). When the material box (102) moves to the pick-up position of the clamping mechanism (3), the first sensor is triggered to generate the first positioning signal. At this time, the upper motor stops running and the material box (102) completes precise positioning. After the substrate (101) in the material box (102) on the waiting station is completely removed, the clamping mechanism (3) transports the empty material box (102) to the receiving station of the second synchronous belt (23). When the empty material box (102) arrives at the receiving station, the second sensor is triggered to generate a second arrival signal, which triggers the lower motor (24) to start running and drives the second synchronous belt (23) to send the empty material box (102) out.

4. The substrate sorting machine according to claim 1, characterized in that, The clamping mechanism (3) includes a Y-axis linear assembly (31) and a first Z-axis linear assembly (32); The Y-axis linear assembly (31) includes a first cylinder (311), a linear guide rail (312), and a support plate (313). The support plate (313) is slidably disposed on the linear guide rail (312), and the first cylinder (311) is drivenly connected to the support plate (313). The first Z-axis linear assembly (32) includes a first support body (321), a Z-axis motor (322), a first lead screw, a gripper seat (323), and a gripper (324). The bottom end of the first support body (321) is disposed on the support plate (313). The Z-axis motor (322) is disposed on the top end of the first support body (321). The first lead screw is disposed inside the first support body (321) and is driven and connected to the Z-axis motor (322). The inner end of the gripper seat (323) is fitted onto the first lead screw and is threadedly connected to the first lead screw to achieve a drive connection. The gripper (324) is disposed on the outer end of the gripper seat (323). When the Z-axis motor (322) rotates, it can drive the first lead screw to rotate, thereby driving the gripper seat (323) and the gripper (324) to move along the axial direction of the first lead screw. The gripper (324) is used to grip or release the material box (102).

5. The substrate sorting machine according to claim 1, characterized in that, The push rod mechanism (1) includes a first support base (11), a push rod (12), a guide rod (13), a push rod sensor (14), a baffle (15), a spring (16), a drive plate (17), and a push rod motor; The push rod (12), guide rod (13), drive plate (17) and push rod motor are all mounted on the first support base (11). The push rod sensor (14), baffle (15) and spring (16) are all mounted on the drive plate (17). The guide rod (13) passes through the drive plate (17). The push rod motor can drive the drive plate (17) to slide along the guide rod (13) and thus drive the push rod (12) to move forward or backward. The spring (16), baffle (15) and push rod sensor (14) are arranged sequentially at the rear end of the push rod (12). The push rod sensor (14) monitors the resistance feedback in real time.

6. The substrate sorting machine according to claim 1, characterized in that, The product positioning channel (4) includes a first motor (41), a first channel slide rail (42), a first channel support (43), a first threaded rod (45), a first channel width adjustment plate (46), a third motor (47), a third synchronous belt (48), a first blocking cylinder (49), and a first channel body (461). The first motor (41) is disposed on one side of the first flow channel slide rail (42), and the first flow channel support (43) is slidably disposed on the first flow channel slide rail (42) and can slide along the first flow channel slide rail (42) under the drive of the first motor (41). The first flow channel width adjustment plate (46) and the first flow channel body (461) are both disposed on the first flow channel support (43). The first threaded rod (45) is driven to connect with the first flow channel width adjustment plate (46). By driving the first threaded rod (45) to rotate, the first flow channel width adjustment plate (46) can be driven to move along the axial direction of the first threaded rod (45), thereby adjusting the distance between the first flow channel width adjustment plate (46) and the first flow channel body (461) to match substrates (101) of different widths. The third synchronous belt (48) is disposed on the pulley on the side of the first flow channel body (461) and is driven and connected to the third motor (47). A first blocking cylinder (49) is disposed at the front end of the third synchronous belt (48). The first blocking cylinder (49) is used to realize the blocking positioning of the substrate (101).

7. The substrate sorting machine according to claim 1, characterized in that, The transport mechanism (5) includes a transport support body (51), a second Z-axis linear assembly (52), an X-axis linear assembly (53), a suction cup (54), and a barcode reader (55). The X-axis linear assembly (53) is disposed on the second Z-axis linear assembly (52), and the second Z-axis linear assembly (52) is disposed on the transport support body (51). The suction cup (54) and the barcode reader (55) are both disposed on the second Z-axis linear assembly (52). The X-axis linear assembly (53) can drive the second Z-axis linear assembly (52) to move in the left-right direction, and the second Z-axis linear assembly (52) can drive the suction cup (54) to move in the up-down direction.

8. The substrate sorting machine according to claim 1, characterized in that, The material tray transfer channel (6) includes a Y-axis belt module (61), a flat belt transmission module (62), and a second blocking cylinder (63). The Y-axis belt module (61) includes a sixth motor (611), a second flow channel slide rail (612), a fourth lead screw, an end support (614), and a second flow channel support (613). The sixth motor (611) and the second flow channel slide rail (612) are both arranged on the end support (614). The fourth lead screw is arranged on the second flow channel slide rail (612). The fourth lead screw is driven to the second flow channel support (613). When the fourth lead screw rotates, it can drive the second flow channel support (613) to move along the axial direction of the fourth lead screw. The sixth motor (611) is driven to the fourth lead screw through a fourth synchronous belt. The flat belt transmission module (62) includes a seventh motor (621), a second threaded rod (622), a second flow channel width adjustment plate (623), an eighth motor (624), a fifth synchronous belt (625), and a second flow channel body (626). The seventh motor (621), the second flow channel width adjustment plate (623), and the second flow channel body (626) are all configured on the second flow channel support (613). The second flow channel width adjustment plate (623) is slidably configured on the second flow channel support (613) and can be driven by the seventh motor (621) along its lower edge. The axial movement of the second threaded rod (622) can adjust the distance between the second flow channel width adjustment plate (623) and the second flow channel body (626) to match substrates (101) of different widths. The fifth synchronous belt (625) is arranged on the pulley on the side of the second flow channel body (626) and is driven and connected to the eighth motor (624). When the eighth motor (624) rotates, it can drive the fifth synchronous belt (625) to rotate through the pulley, thereby realizing the transportation of the substrate (101). A second blocking cylinder (63) is arranged at the front end of the fifth synchronous belt (625).

9. The substrate sorting machine according to claim 1, characterized in that, The feeding tray channel (8) includes a buffer area (801), a stacked material distribution area (802), an eighth synchronous belt (81), a separation cylinder (82), a ball screw (83), a base, a guide column (84), and a lifting motor (85). The buffer area (801) and the stacked material distribution area (802) are connected in sequence and are each equipped with an eighth synchronous belt (81) and a separation cylinder (82). The ball screw (83), the base, the guide column (84), and the lifting motor (85) are all located below the stacked material distribution area (802). The lifting motor (85) is driven and connected to the ball screw (83) through the seventh synchronous belt. The ball screw (83) passes through the base and is threaded into the base. When the lifting motor (85) rotates, it drives the ball screw (83) to rotate through the seventh synchronous belt. The base can be driven to move up or down. Multiple guide posts (84) pass through the base and guide the movement of the base. Multiple separation cylinders (82) are arranged on one side of the eighth synchronous belt (81) and can clamp and position the tray (103). The entire stack of empty trays (103) is transferred to the eighth synchronous belt (81) at the bottom of the stacked material distribution area (802) through the eighth synchronous belt (81) at the bottom of the buffer area (801). A single tray (103) is then transferred to the tray transfer channel (6) through the eighth synchronous belt (81) at the bottom of the stacked material distribution area (802).

10. The substrate sorting machine according to claim 1, characterized in that, The sorting channel (7) is used to receive a tray (103) containing different substrates (101) transferred from the tray transfer channel (6). The sorting channel (7) is divided into a receiving area (71) and a discharging area (72). The receiving area (71) is connected to the tray transfer channel (6). The tray (103) located on the tray transfer channel (6) is transferred to the discharging area (72) through the ninth synchronous belt at the bottom of the receiving area (71).

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