Intelligent control system of lens processing equipment

Abstract

The application relates to the technical field of optical manufacturing and processing control, in particular to an intelligent control system of a lens processing equipment, which comprises a process relationship prestorage module, a pressure distribution acquisition module, a surface shape error prediction module, a pressure compensation decision module, an actuator control module and a processing effect verification module; wherein: the process relationship prestorage module: a pressure-removal rate relationship mapping table is established; the pressure distribution acquisition module: used for acquiring pressure distribution data; the surface shape error prediction module: used for predicting surface shape error data generated by a lens; the pressure compensation decision module: used for generating regionalized pressure compensation amounts; and the actuator control module: used for dynamically adjusting the pressure applied by a polishing head to different regions of the lens. According to the application, through the construction of a pressure-removal rate mapping and a closed-loop self-calibration mechanism, intelligent pressure regulation and control and dynamic correction of surface shape errors in the lens polishing process are realized, and the processing precision and stability are significantly improved.

Description

Technical Field

[0001] This invention relates to the field of optical manufacturing and processing control technology, and in particular to an intelligent control system for lens processing equipment. Background Technology

[0002] In the field of high-precision optical lens processing, the polishing process has a decisive impact on surface accuracy, especially in the large-scale manufacturing of freeform and aspherical lenses, where higher requirements are placed on processing accuracy and consistency. Traditional lens polishing equipment mostly relies on experience to set processing parameters and uses constant pressure or constant trajectory methods for polishing, lacking the ability to dynamically perceive and control the local material removal behavior. Due to the nonlinear response characteristics of lens materials and the difficulty in equalizing pressure distribution in real time, the surface error after processing often fails to meet design requirements, increasing the number of corrections and manufacturing costs.

[0003] Current technologies lack a closed-loop control system capable of dynamic pressure adjustment, error feedforward prediction, and feedback self-calibration. This makes it difficult to establish a precise mapping between polishing pressure and material removal rate, and also hinders the handling of high-order error compensation issues related to complex lens shapes. Therefore, an intelligent control system for lens processing equipment is urgently needed to improve the precision and intelligence of lens processing. Summary of the Invention

[0004] To achieve the above objectives, the present invention provides an intelligent control system for lens processing equipment.

[0005] An intelligent control system for lens processing equipment includes a process relationship pre-storage module, a pressure distribution acquisition module, a surface shape error prediction module, a pressure compensation decision module, an actuator control module, and a processing effect verification module; wherein:

[0006] Process relationship pre-storage module: used to establish and store a pressure-removal rate relationship mapping table based on calibration experiments before processing;

[0007] Pressure distribution acquisition module: used to acquire pressure distribution data in the contact area between the polishing pad and the lens in real time;

[0008] Surface shape error prediction module: used to query the pressure-removal rate relationship mapping table based on pressure distribution data to predict the surface shape error data that the lens will generate;

[0009] Pressure compensation decision module: used to generate regionalized pressure compensation amounts based on predicted surface error data;

[0010] Actuator control module: used to drive the airbag array according to the pressure compensation amount, dynamically adjust the pressure applied by the polishing head to different areas of the lens, so as to balance the pressure distribution data;

[0011] Processing effect verification module: used to measure the actual surface shape of the lens during the polishing interval and feed the actual surface shape data back to the process relationship pre-store module to calibrate the pressure-removal rate relationship mapping table.

[0012] Optionally, the process relationship pre-storage module includes a calibration sample setting unit, a pressure control unit, a removal rate measurement unit, and a mapping relationship generation unit; wherein:

[0013] Calibration sample setting unit: used to select multiple sets of lens samples with standard surface shape before processing, and set the initial surface parameters and division area position of each set of samples;

[0014] Pressure control unit: used to control the polishing device to apply different gradient pressures to different areas of the sample, and to record the correspondence between the value of each pressure group and the corresponding area number;

[0015] Removal rate measurement unit: After pressure treatment, it is used to measure the material removal thickness per unit time in each area by interferometer, obtain the thickness change corresponding to the removal rate data, and then calculate the removal rate;

[0016] Mapping relationship generation unit: used to perform paired analysis of the pressure of each region with the corresponding removal rate, form a quantitative correspondence, and store the generated pressure-removal rate relationship mapping table.

[0017] Optionally, the pressure distribution acquisition module includes a pressure sensor array unit, a signal acquisition unit, a data synchronization unit, and a pressure distribution reconstruction unit; wherein:

[0018] Pressure sensor array unit: It is evenly distributed on the surface of the polishing pad and forms a corresponding relationship with the lens contact area through a multi-point array structure. Each sensing node senses the force state of the lens in real time and outputs the corresponding contact pressure signal.

[0019] Signal acquisition unit: used to synchronously acquire and convert analog electrical signals output by each sensing node to digital, generate digital pressure sampling dataset, and record the corresponding node spatial coordinate information;

[0020] Data synchronization unit: used to timestamp and calibrate pressure sampling data;

[0021] Pressure distribution reconstruction unit: Based on node coordinates and digital pressure sampling dataset, spatial interpolation algorithm is used to reconstruct the pressure values ​​of discrete nodes into a continuous two-dimensional pressure distribution matrix, forming real-time contact pressure distribution data between the polishing pad and the lens.

[0022] Optionally, the surface error prediction module includes a removal amount calculation unit, a surface deviation modeling unit, an error accumulation analysis unit, and an error output unit; wherein:

[0023] Removal amount calculation unit: It is used to receive the pressure distribution data output by the pressure distribution acquisition module, and call the pressure-removal rate relationship mapping table in the process relationship pre-store module. Based on the pressure value corresponding to each area, it matches its material removal rate to obtain the local removal amount distribution on the lens surface.

[0024] Surface shape deviation modeling unit: used to map the removal amount distribution to the initial surface shape model of the lens, and model the surface height change after local removal based on the lens geometry and polishing trajectory to generate predicted surface shape data;

[0025] Error accumulation analysis unit: used to compare the predicted surface shape data with the target design surface shape of the lens point by point, calculate the height deviation of each area, and form a complete surface shape error distribution;

[0026] Error output unit: Used to normalize the surface error distribution results and generate standardized surface error data.

[0027] Optionally, the surface deviation modeling unit includes:

[0028] Geometric parameter extraction subunit: used to extract the geometric parameter information of the lens from the initial surface model of the lens, including basic parameters such as radius of curvature, aperture size, edge thickness and center thickness, and to establish the lens surface coordinate system to form the initial surface geometric matrix;

[0029] The trajectory mapping subunit is used to receive the motion trajectory information of the polishing device, map the movement path, feed speed and rotation angle parameters of the polishing head to the coordinate system of the lens surface, establish the correspondence between the trajectory action area and the coordinate points, and obtain the trajectory distribution matrix.

[0030] Surface change calculation subunit: Based on the local removal amount distribution output by the removal amount calculation unit, the material removal depth of each region is superimposed onto the corresponding trajectory action area to calculate the surface height change value of the lens at different coordinate points;

[0031] Predictive surface shape generation sub-unit: used to superimpose the surface height change value onto the initial surface shape geometry matrix to generate an updated predicted surface shape data model, and output it in the form of a three-dimensional matrix.

[0032] Optionally, the error accumulation analysis unit includes:

[0033] Target surface shape import subunit: Used to import the target design surface shape model of the lens and convert it into the same format as the predicted surface shape data;

[0034] Coordinate registration sub-unit: used to register the coordinate grids of the target surface shape and the predicted surface shape, and to establish a one-to-one correspondence between the predicted surface shape and the design surface shape;

[0035] Point-by-point difference calculation subunit: Used to perform point-by-point difference calculation between the predicted surface height and the target surface height at the registered coordinate points, and obtain the height deviation value of each coordinate point.

[0036] Optionally, the pressure compensation decision module includes an error threshold judgment unit, a region marking unit, and a compensation amount calculation unit; wherein:

[0037] Error threshold judgment unit: used to receive standardized surface error data generated by the error output unit in the surface error prediction module, and judge the height deviation value of each coordinate point to filter out the error area that exceeds the preset compensation threshold range;

[0038] Region labeling unit: used to cluster continuous coordinate points whose error values ​​exceed the threshold, aggregate them into several independent pressure compensation regions according to spatial location, and assign a unique number and location range to each compensation region.

[0039] Compensation Calculation Unit: Based on the average height deviation and material removal rate of each compensation zone, the required pressure increase or decrease is derived in reverse to obtain the pressure compensation amount for each zone.

[0040] Optionally, the compensation calculation unit includes:

[0041] Error mean extraction sub-unit: used to average the height deviation value of each marked compensation area and calculate the average surface error value of the area;

[0042] Removal rate matching subunit: used to call the pressure-removal rate relationship mapping table in the process relationship pre-store module, and find the corresponding material removal rate value based on the current average pressure value applied in the corresponding compensation area;

[0043] Pressure Increment Back-Calculation Subunit: Based on the average surface error value of the compensation area and the current removal rate, combined with the unit polishing time, the pressure increment that the area should be adjusted is calculated in reverse. ;

[0044] Compensation Amount Summary Sub-unit: Used to integrate the pressure increment results calculated from each compensation zone into a set of spatial mapping tables.

[0045] Optionally, the actuator control module includes a compensation instruction parsing unit, an array address mapping unit, and a gas pressure regulation drive unit; wherein:

[0046] Compensation command parsing unit: used to receive the pressure compensation amount of each compensation area output by the pressure compensation decision module, and parse it into pressure increase or pressure decrease commands corresponding to each spatial position on the polishing head surface, and generate command matrix;

[0047] Array address mapping unit: used to establish the spatial mapping relationship between each airbag in the airbag array and the coordinate point on the lens surface according to the contact coordinate system between the polishing pad and the lens, so as to realize the one-to-one correspondence between the compensation command and the airbag control unit;

[0048] Air pressure regulation drive unit: Based on the mapped command matrix, it applies the corresponding air pressure regulation amount to the airbag unit in the corresponding airbag array.

[0049] Optionally, the processing effect verification module includes a surface shape measurement unit, a data comparison unit, and a mapping calibration unit; wherein:

[0050] Surface shape measurement unit: used to measure the height distribution of the lens surface using an interferometer during polishing breaks to obtain actual surface shape data;

[0051] Data comparison unit: used to compare the actual surface shape data with the predicted surface shape data output by the surface shape error prediction module point by point, and calculate the corresponding deviation matrix;

[0052] Mapping calibration unit: used to correct the pressure-removal rate relationship mapping table in the pre-stored process relationship module according to the deviation matrix, and adjust the removal rate under different pressures to make it consistent with the actual processing results.

[0053] The beneficial effects of this invention are:

[0054] This invention achieves quantitative modeling and dynamic control of the polishing process by establishing a pressure-removal rate relationship mapping table. The system can collect pressure distribution data between the polishing pad and the lens in real time and predict the surface shape change trend based on the mapping relationship, thereby identifying potential processing deviations in advance, realizing feedforward control of surface shape errors, and significantly improving polishing accuracy and surface consistency.

[0055] This invention utilizes a closed-loop mechanism of pressure compensation and processing effect verification to detect the actual surface shape and calibrate the mapping model during the polishing interval, enabling the system to have self-learning and self-adaptive capabilities. This effectively reduces the number of repeated corrections and improves processing efficiency and long-term stability. Attached Figure Description

[0056] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0057] Figure 1 This is a schematic diagram of the intelligent control system according to an embodiment of the present invention;

[0058] Figure 2This is a schematic diagram of the surface error prediction module according to an embodiment of the present invention. Detailed Implementation

[0059] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments. It should also be noted that, to make the embodiments more comprehensive, the following embodiments are the best and preferred embodiments, and those skilled in the art can use other alternative methods to implement some well-known technologies; moreover, the accompanying drawings are only for more specific description of the embodiments and are not intended to specifically limit the present invention.

[0060] It should be noted that the use of terms such as "an embodiment," "an embodiment," "an exemplary embodiment," and "some embodiments" in the specification indicates that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments (whether explicitly described or not) should be within the knowledge of those skilled in the art.

[0061] Generally, terms can be understood at least partly from their use in context. For example, depending at least partly on the context, the term "one or more" as used herein can be used to describe any feature, structure, or characteristic in a singular sense, or a combination of features, structures, or characteristics in a plural sense. Additionally, the term "based on" can be understood not necessarily to convey an exclusive set of factors, but rather, alternatively, depending at least partly on the context, to allow for the presence of other factors that are not necessarily explicitly described.

[0062] like Figures 1-2 As shown, an intelligent control system for lens processing equipment includes a process relationship pre-storage module, a pressure distribution acquisition module, a surface shape error prediction module, a pressure compensation decision module, an actuator control module, and a processing effect verification module; wherein:

[0063] Process relationship pre-storage module: used to establish and store a pressure-removal rate relationship mapping table based on calibration experiments before processing. This mapping table defines the quantitative correspondence between polishing pressure and material removal rate.

[0064] Pressure distribution acquisition module: used to acquire pressure distribution data in the contact area between the polishing pad and the lens in real time;

[0065] Surface shape error prediction module: used to query the pressure-removal rate relationship mapping table based on pressure distribution data to predict the surface shape error data that the lens will generate;

[0066] Pressure compensation decision module: used to generate regionalized pressure compensation amounts based on predicted surface error data;

[0067] Actuator control module: used to drive the airbag array according to the pressure compensation amount, dynamically adjust the pressure applied by the polishing head to different areas of the lens, so as to balance the pressure distribution data;

[0068] Processing effect verification module: used to measure the actual surface shape of the lens during the polishing interval and feed the actual surface shape data back to the process relationship pre-store module to calibrate the pressure-removal rate relationship mapping table.

[0069] The process relationship pre-storage module includes a calibration sample setting unit, a pressure control unit, a removal rate measurement unit, and a mapping relationship generation unit; wherein:

[0070] Calibration sample setting unit: used to select multiple sets of lens samples with standard surface shape before processing, and set the initial surface parameters and division area position of each set of samples;

[0071] Pressure control unit: Used to control the polishing device to apply different gradient pressures to different areas of the sample, ensuring that each pressure level acts stably on the designated area, and recording the correspondence between the value of each pressure group and the corresponding area number;

[0072] Removal rate measurement unit: Used to measure the material removal thickness per unit time in each area after pressure treatment using an interferometer, obtaining the thickness change corresponding to the removal rate data, and then calculating the removal rate. The formula is: ,in, Indicates the region Removal rate under corresponding pressure, Indicates the thickness of the material removed. The pressure application time is constant;

[0073] The mapping relationship generation unit is used to pair and analyze the pressure of each region with the corresponding removal rate to form a quantitative correspondence, and to store the generated pressure-removal rate relationship mapping table for subsequent surface error prediction module to call. The above unit establishes a quantitative pressure-removal rate mapping table by setting standard sample and gradient pressure conditions, combined with regional measurement and formula calculation, and realizes calibration for actual lens materials and regional characteristics.

[0074] Table 1. Pressure-Removal Rate Relationship Mapping Table

[0075]

[0076] In Table 1 above, the pressure number and area number are used to identify the number of each pressure point in the calibration experiment and its spatial position on the surface of the lens sample, ensuring that the mapping relationship has positional correspondence; the applied pressure represents the polishing pressure applied in a specific area, in kPa, and is one of the input variables of the mapping table; the material removal rate represents the average thickness of material removed per unit time, in nm / min, and is the core output variable of the mapping table, used to reflect the response characteristics of pressure to the material removal rate.

[0077] The pressure distribution acquisition module includes a pressure sensor array unit, a signal acquisition unit, a data synchronization unit, and a pressure distribution reconstruction unit; wherein:

[0078] Pressure sensor array unit: It is evenly distributed on the surface of the polishing pad and forms a corresponding relationship with the lens contact area through a multi-point array structure. Each sensing node senses the force state of the lens in real time and outputs the corresponding contact pressure signal.

[0079] Signal acquisition unit: used to synchronously acquire and convert analog electrical signals output by each sensing node to digital, generate digital pressure sampling dataset, and record the corresponding node spatial coordinate information;

[0080] Data synchronization unit: used to timestamp and calibrate the pressure sampling data to ensure that the collected signals at different nodes correspond to the same lens position under the same time reference during the rotation of the polishing head;

[0081] Pressure distribution reconstruction unit: Based on node coordinates and digital pressure sampling dataset, a spatial interpolation algorithm is used to reconstruct the pressure values ​​of discrete nodes into a continuous two-dimensional pressure distribution matrix, forming real-time contact pressure distribution data between the polishing pad and the lens, and outputting it to the surface error prediction module; through the design of the above unit, real-time, high-precision acquisition and spatial reconstruction of multi-point pressure information during lens processing can be realized, providing complete pressure field input data for subsequent surface error prediction.

[0082] The steps of using the spatial interpolation algorithm are as follows:

[0083] S1: First, obtain the spatial coordinates of each node from the pressure sensor array. and their corresponding pressure values These data constitute a set of discrete sample points, where the node coordinates reflect the position distribution of the sensor on the polishing pad, and the pressure value represents the magnitude of the contact force between the lens and the polishing pad at that position.

[0084] S2: Establish a regular two-dimensional computational grid within the lens contact area, dividing the entire area into several rectangular or triangular grid units; each grid node represents a pressure point to be calculated; the grid density is set according to the number of sensor nodes and the processing resolution to ensure efficient computation without losing spatial details;

[0085] S3: At each grid node, the interpolated pressure value is calculated using the inverse distance weighting method based on its spatial distance to several surrounding sensor nodes. Its expression is: The weight Defined as ,in, Let be the Euclidean distance between the grid node and the sensor node. As a weighted index, The total number of nodes; this algorithm uses an inverse distance weighting method to make neighboring nodes have a greater impact on the interpolation results, thereby achieving a smooth transition of the pressure field;

[0086] S4: Calculate for each node in the entire grid region This can form a complete two-dimensional pressure matrix.

[0087] The surface error prediction module includes a removal amount calculation unit, a surface deviation modeling unit, an error accumulation analysis unit, and an error output unit; among which:

[0088] Removal amount calculation unit: It is used to receive the pressure distribution data output by the pressure distribution acquisition module, and call the pressure-removal rate relationship mapping table in the process relationship pre-store module. Based on the pressure value corresponding to each area, it matches its material removal rate to obtain the local removal amount distribution on the lens surface.

[0089] Surface shape deviation modeling unit: used to map the removal amount distribution to the initial surface shape model of the lens, and model the surface height change after local removal based on the lens geometry and polishing trajectory to generate predicted surface shape data;

[0090] Error accumulation analysis unit: used to compare the predicted surface shape data with the target design surface shape of the lens point by point, calculate the height deviation of each area, and form a complete surface shape error distribution;

[0091] Error output unit: It is used to normalize the surface shape error distribution results, generate standardized surface shape error data, and output it to the pressure compensation decision module for subsequent regional pressure adjustment. Through the above unit, based on the physical correspondence between pressure and removal amount, it can realize feedforward prediction of lens surface morphology changes, and provide accurate error quantification basis for subsequent compensation control.

[0092] The surface deviation modeling unit includes:

[0093] Geometric parameter extraction subunit: used to extract the geometric parameter information of the lens from the initial surface model of the lens, including basic parameters such as radius of curvature, aperture size, edge thickness and center thickness, and to establish the lens surface coordinate system to form the initial surface geometric matrix;

[0094] The trajectory mapping subunit is used to receive the motion trajectory information of the polishing device, map the movement path, feed speed and rotation angle parameters of the polishing head to the coordinate system of the lens surface, establish the correspondence between the trajectory action area and the coordinate points, and obtain the trajectory distribution matrix.

[0095] Surface Change Calculation Subunit: Based on the local removal amount distribution output by the removal amount calculation unit, this subunit superimposes the material removal depth of each region onto the corresponding trajectory action area to calculate the surface height change value of the lens at different coordinate points; the formula is: ,in, Represents coordinate points The change in surface height at that location; The material removal rate at the corresponding point. The time the trajectory stays at the corresponding point;

[0096] Predicted surface shape generation sub-unit: Used to superimpose surface height variation values ​​onto the initial surface shape geometry matrix, generating an updated predicted surface shape data model, and outputting it in three-dimensional matrix form for subsequent point-by-point comparison and evaluation of surface shape errors; the formula for calculating the predicted surface shape value is:

[0097] ,in, Indicates the predicted face height. This represents the original height value of the point in the initial surface model. Through the structure of the above sub-units, the surface deviation modeling unit realizes dynamic morphology reconstruction based on the lens geometric characteristics and polishing trajectory parameters, enabling the predicted surface data to have spatial consistency and physical traceability, and providing accurate geometric basis for subsequent error analysis and compensation control.

[0098] The error accumulation analysis unit includes:

[0099] Target surface shape import sub-unit: Used to import the target design surface shape model of the lens and convert it into the same format as the predicted surface shape data, ensuring that the surface shape data are comparable in the same coordinate system;

[0100] Coordinate registration sub-unit: used to register the coordinate grid of the target surface shape and the predicted surface shape, eliminate spatial offset caused by measurement viewpoint, resolution or sampling deviation, and establish a one-to-one correspondence between the predicted surface shape and the design surface shape;

[0101] Point-by-point difference calculation subunit: Used to perform point-by-point difference calculation between the predicted surface height and the target surface height at the registered coordinate points, obtaining the height deviation value at each coordinate point; the formula is:

[0102] ,in, This indicates the coordinates of the predicted surface shape and the target surface shape. The height deviation value at that location, To design the surface height value; through the above sub-unit design, the point-by-point difference assessment between the predicted and target surface shapes in space was realized, and surface error data with physical meaning and geometric consistency was constructed, providing accurate error input basis for the next step of pressure compensation decision.

[0103] The pressure compensation decision module includes an error threshold judgment unit, a region marking unit, and a compensation amount calculation unit; wherein:

[0104] Error threshold judgment unit: used to receive standardized surface error data generated by the error output unit in the surface error prediction module, and judge the height deviation value of each coordinate point to filter out the error area that exceeds the preset compensation threshold range;

[0105] Region labeling unit: used to cluster continuous coordinate points whose error values ​​exceed the threshold, aggregate them into several independent pressure compensation regions according to spatial location, and assign a unique number and location range to each compensation region.

[0106] Compensation Calculation Unit: Based on the average height deviation and material removal rate of each compensation zone, the required pressure increase or decrease is derived in reverse to obtain the pressure compensation amount for each zone.

[0107] The compensation calculation unit includes:

[0108] Error mean extraction subunit: used to average the height deviation value of each marked compensation area to calculate the average surface error value of the area, which is used as the input for subsequent compensation calculation;

[0109] Removal rate matching subunit: used to call the pressure-removal rate relationship mapping table in the process relationship pre-store module, and find the corresponding material removal rate value based on the current average pressure value applied in the corresponding compensation area;

[0110] Pressure Increment Back-Calculation Subunit: Based on the average surface error value of the compensation area and the current removal rate, combined with the unit polishing time, the pressure increment that the area should be adjusted is calculated in reverse. The calculation formula is as follows: ,in, Indicates the first The pressure increase in each compensation area; This represents the average height deviation in this area; The unit of time is the duration of action; This represents the inverse solution process of deriving the required pressure from the material removal rate;

[0111] The compensation amount summarization subunit is used to integrate the pressure increment results calculated from each compensation area into a set of spatial mapping tables, which guide the subsequent actuator control module to implement pressure adjustment at the specified location. Through the above structural design, the compensation amount calculation unit can derive a quantitative regional pressure adjustment amount based on the relationship between standardized surface error and actual material response, realizing closed-loop control driven by prediction error, and significantly improving the control capability of lens surface consistency and processing accuracy.

[0112] The actuator control module includes a compensation instruction parsing unit, an array address mapping unit, and a gas pressure regulation drive unit; wherein:

[0113] Compensation command parsing unit: used to receive the pressure compensation amount of each compensation area output by the pressure compensation decision module, and parse it into pressure increase or pressure decrease commands corresponding to each spatial position on the polishing head surface, and generate command matrix;

[0114] Array address mapping unit: used to establish the spatial mapping relationship between each airbag in the airbag array and the coordinate point on the lens surface according to the contact coordinate system between the polishing pad and the lens, so as to realize the one-to-one correspondence between the compensation command and the airbag control unit;

[0115] Air pressure regulation drive unit: Based on the mapped command matrix, it applies the corresponding air pressure regulation amount to the airbag unit in the corresponding airbag array, driving it to expand or contract, so as to realize the dynamic increase or decrease of the pressure applied in each area; The above unit achieves efficient conversion of compensation amount into physical air pressure regulation through the coordinated design of command parsing, array mapping and air pressure drive, so that the multi-point airbag array can accurately control the pressure output of the polishing head to different lens areas, thereby improving the spatial accuracy and dynamic response capability of surface shape control.

[0116] The processing effect verification module includes a surface shape measurement unit, a data comparison unit, and a mapping calibration unit; among which:

[0117] Surface shape measurement unit: used to measure the height distribution of the lens surface using an interferometer during polishing breaks to obtain actual surface shape data;

[0118] Data comparison unit: used to compare the actual surface shape data with the predicted surface shape data output by the surface shape error prediction module point by point, and calculate the corresponding deviation matrix;

[0119] Mapping calibration unit: It is used to correct the pressure-removal rate relationship mapping table in the pre-stored process relationship module according to the deviation matrix, and adjust the removal rate under different pressures to make it consistent with the actual processing results. The above unit realizes the dynamic correction of the pressure-removal rate mapping relationship by performing surface shape detection and model calibration during the polishing interval, so that the system can continuously optimize the processing accuracy and maintain long-term stable error prediction capability.

[0120] This invention encompasses any substitutions, modifications, equivalent methods, and solutions made within the spirit and scope of this invention. To provide the public with a thorough understanding of this invention, specific details are described in detail in the following preferred embodiments; however, those skilled in the art will fully understand the invention even without these details. Furthermore, to avoid unnecessary misunderstanding of the essence of this invention, well-known methods, processes, procedures, components, and circuits are not described in detail.

[0121] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. An intelligent control system for lens processing equipment, characterized in that, It includes a process relationship pre-storage module, a pressure distribution acquisition module, a surface shape error prediction module, a pressure compensation decision module, an actuator control module, and a processing effect verification module; among which: Process relationship pre-storage module: used to establish and store a pressure-removal rate relationship mapping table based on calibration experiments before processing; The process relationship pre-storage module includes a calibration sample setting unit, a pressure control unit, a removal rate measurement unit, and a mapping relationship generation unit; wherein: Calibration sample setting unit: used to select multiple sets of lens samples with standard surface shape before processing, and set the initial surface parameters and division area position of each set of samples; Pressure control unit: used to control the polishing device to apply different gradient pressures to different areas of the sample, and to record the correspondence between the value of each pressure group and the corresponding area number; Removal rate measurement unit: After pressure treatment, it is used to measure the material removal thickness per unit time in each area by interferometer, obtain the thickness change corresponding to the removal rate data, and then calculate the removal rate; Mapping relationship generation unit: used to perform paired analysis of the pressure of each region with the corresponding removal rate, form a quantitative correspondence, and store the generated pressure-removal rate relationship mapping table; Pressure distribution acquisition module: used to acquire pressure distribution data in the contact area between the polishing pad and the lens in real time; The pressure distribution acquisition module includes a pressure sensor array unit, a signal acquisition unit, a data synchronization unit, and a pressure distribution reconstruction unit; wherein: Pressure sensor array unit: It is evenly distributed on the surface of the polishing pad and forms a corresponding relationship with the lens contact area through a multi-point array structure. Each sensing node senses the force state of the lens in real time and outputs the corresponding contact pressure signal. Signal acquisition unit: used to synchronously acquire and convert analog electrical signals output by each sensing node to digital, generate digital pressure sampling dataset, and record the corresponding node spatial coordinate information; Data synchronization unit: used to timestamp and calibrate pressure sampling data; Pressure distribution reconstruction unit: Based on node coordinates and digital pressure sampling dataset, spatial interpolation algorithm is used to reconstruct the pressure values ​​of discrete nodes into a continuous two-dimensional pressure distribution matrix, forming real-time contact pressure distribution data between the polishing pad and the lens; Surface shape error prediction module: used to query the pressure-removal rate relationship mapping table based on pressure distribution data to predict the surface shape error data that the lens will generate; The surface error prediction module includes a removal amount calculation unit, a surface deviation modeling unit, an error accumulation analysis unit, and an error output unit; wherein: Removal amount calculation unit: It is used to receive the pressure distribution data output by the pressure distribution acquisition module, and call the pressure-removal rate relationship mapping table in the process relationship pre-store module. Based on the pressure value corresponding to each area, it matches its material removal rate to obtain the local removal amount distribution on the lens surface. Surface shape deviation modeling unit: used to map the removal amount distribution to the initial surface shape model of the lens, and model the surface height change after local removal based on the lens geometry and polishing trajectory to generate predicted surface shape data; Error accumulation analysis unit: used to compare the predicted surface shape data with the target design surface shape of the lens point by point, calculate the height deviation of each area, and form a complete surface shape error distribution; Error output unit: used to normalize the surface error distribution results and generate standardized surface error data; Pressure compensation decision module: used to generate regionalized pressure compensation amounts based on predicted surface error data; Actuator control module: used to drive the airbag array according to the pressure compensation amount, dynamically adjust the pressure applied by the polishing head to different areas of the lens, so as to balance the pressure distribution data; Processing effect verification module: used to measure the actual surface shape of the lens during the polishing interval and feed the actual surface shape data back to the process relationship pre-store module to calibrate the pressure-removal rate relationship mapping table.

2. The intelligent control system for a lens processing equipment according to claim 1, characterized in that, The surface deviation modeling unit includes: Geometric parameter extraction subunit: used to extract the geometric parameter information of the lens from the initial surface model of the lens, including basic parameters such as radius of curvature, aperture size, edge thickness and center thickness, and to establish the lens surface coordinate system to form the initial surface geometric matrix; The trajectory mapping subunit is used to receive the motion trajectory information of the polishing device, map the movement path, feed speed and rotation angle parameters of the polishing head to the coordinate system of the lens surface, establish the correspondence between the trajectory action area and the coordinate points, and obtain the trajectory distribution matrix. Surface change calculation subunit: Based on the local removal amount distribution output by the removal amount calculation unit, the material removal depth of each region is superimposed onto the corresponding trajectory action area to calculate the surface height change value of the lens at different coordinate points; Predictive surface shape generation sub-unit: used to superimpose the surface height change value onto the initial surface shape geometry matrix to generate an updated predicted surface shape data model, and output it in the form of a three-dimensional matrix.

3. The intelligent control system for a lens processing equipment according to claim 2, characterized in that, The error accumulation analysis unit includes: Target surface shape import subunit: Used to import the target design surface shape model of the lens and convert it into the same format as the predicted surface shape data; Coordinate registration sub-unit: used to register the coordinate grids of the target surface shape and the predicted surface shape, and to establish a one-to-one correspondence between the predicted surface shape and the design surface shape; Point-by-point difference calculation subunit: Used to perform point-by-point difference calculation between the predicted surface height and the target surface height at the registered coordinate points, and obtain the height deviation value of each coordinate point.

4. The intelligent control system for a lens processing equipment according to claim 1, characterized in that, The pressure compensation decision module includes an error threshold judgment unit, a region marking unit, and a compensation amount calculation unit; wherein: Error threshold judgment unit: used to receive standardized surface error data generated by the error output unit in the surface error prediction module, and judge the height deviation value of each coordinate point to filter out the error area that exceeds the preset compensation threshold range; Region labeling unit: used to cluster continuous coordinate points whose error values ​​exceed the threshold, aggregate them into several independent pressure compensation regions according to spatial location, and assign a unique number and location range to each compensation region. Compensation Calculation Unit: Based on the average height deviation and material removal rate of each compensation zone, the required pressure increase or decrease is derived in reverse to obtain the pressure compensation amount for each zone.

5. The intelligent control system for a lens processing equipment according to claim 4, characterized in that, The compensation calculation unit includes: Error mean extraction sub-unit: used to average the height deviation value of each marked compensation area and calculate the average surface error value of the area; Removal rate matching subunit: used to call the pressure-removal rate relationship mapping table in the process relationship pre-store module, and find the corresponding material removal rate value based on the current average pressure value applied in the corresponding compensation area; Pressure Increment Back-Calculation Subunit: Based on the average surface error value of the compensation area and the current removal rate, combined with the unit polishing time, the pressure increment that the area should be adjusted is calculated in reverse. ; Compensation Amount Summary Sub-unit: Used to integrate the pressure increment results calculated from each compensation zone into a set of spatial mapping tables.

6. The intelligent control system for a lens processing equipment according to claim 1, characterized in that, The actuator control module includes a compensation instruction parsing unit, an array address mapping unit, and a gas pressure regulation drive unit; wherein: Compensation command parsing unit: used to receive the pressure compensation amount of each compensation area output by the pressure compensation decision module, and parse it into pressure increase or pressure decrease commands corresponding to each spatial position on the polishing head surface, and generate command matrix; Array address mapping unit: used to establish the spatial mapping relationship between each airbag in the airbag array and the coordinate point on the lens surface according to the contact coordinate system between the polishing pad and the lens, so as to realize the one-to-one correspondence between the compensation command and the airbag control unit; Air pressure regulation drive unit: Based on the mapped command matrix, it applies the corresponding air pressure regulation amount to the airbag unit in the corresponding airbag array.

7. The intelligent control system for a lens processing equipment according to claim 1, characterized in that, The processing effect verification module includes a surface shape measurement unit, a data comparison unit, and a mapping calibration unit; wherein: Surface shape measurement unit: used to measure the height distribution of the lens surface using an interferometer during polishing breaks to obtain actual surface shape data; Data comparison unit: used to compare the actual surface shape data with the predicted surface shape data output by the surface shape error prediction module point by point, and calculate the corresponding deviation matrix; Mapping calibration unit: used to correct the pressure-removal rate relationship mapping table in the pre-stored process relationship module according to the deviation matrix, and adjust the removal rate under different pressures to make it consistent with the actual processing results.

Images