Adsorption platform of voltage film tearing machine

Abstract

The invention discloses an adsorption platform of a voltage film tearing machine, and belongs to the technical field of film tearing machines, a power switch, a mode switching piece, an adsorption button and an air blowing button are transversely distributed on the upper side of an equipment box, an adsorption plate is mounted at the top of the equipment box, and a first adsorption cavity and a second adsorption cavity are symmetrically formed in the adsorption plate; micro adsorption cavities are distributed in the outer rings of the first adsorption cavity and the second adsorption cavity in the adsorption plate, an adsorption platform is installed on the top of the adsorption plate, outward-unfolding discharging assemblies are symmetrically installed on the two sides of an adsorption platform frame body, each outward-unfolding discharging assembly is composed of a telescopic folding rod, an outer folding pair, a discharging table and an inner folding pair, and the inner folding pairs are symmetrically installed on the outer side of the equipment box; a telescopic folding rod is installed on the inner folding pair in a folding mode, an outer folding pair is installed at the output end of the telescopic folding rod, and the outer folding pair is installed at the bottom of the discharging table. The film tearing machine develops towards a precise subsystem which is more intelligent, flexible and high in cleanliness, and through the improvement, the performance and reliability of the film tearing machine can be remarkably improved, and the application range of the film tearing machine can be remarkably widened.

Description

TECHNICAL FIELD

[0001] The application relates to an adsorption platform, in particular to a voltage film tearing machine adsorption platform, and belongs to the technical field of film tearing machines. BACKGROUND

[0002] The voltage film tearing machine adsorption platform is a core bearing and positioning component for precisely fixing a film to be torn workpiece in a voltage film tearing machine, guaranteeing the stability and precision of the film tearing process. The core is to realize non-damage and controllable fixing of the workpiece through voltage regulated adsorption (mostly electrostatic adsorption) or combined vacuum adsorption.

[0003] The vacuum adsorption principle is simple and reliable, and is a very mature and widely used technology in modern manufacturing industry. Compared with mechanical clamping, vacuum adsorption can avoid physical damage or indentation to the product edge, and is particularly suitable for high surface finish and easily damaged products (such as glass, wafer, polished metal). Through design and replacement of jigs (clamps) with different hole patterns, different sizes and shapes of products can be quickly adapted, and the replacement is relatively convenient. Reasonably designed adsorption hole layout can make the adsorption force evenly distributed on the entire product bottom, effectively prevent the product from warping or shifting during the film tearing process, ensure the film tearing precision, and accurately control the timing of adsorption and vacuum breaking through electromagnetic valves and vacuum sensors, which is easy to integrate into an automatic production line.

[0004] If the product itself has a through hole, an uneven or not smooth surface, it will cause vacuum leakage and insufficient adsorption force, resulting in adsorption failure. In the edge area of the product, due to the small sealing range, the adsorption force will be significantly weakened, which is exactly the key area for film tearing initiation, and is easy to cause product displacement or film tearing failure due to poor adsorption. High-speed airflow near the adsorption hole may roll up small particles, polluting the product surface (especially in the semiconductor and display industries with extremely high cleanliness requirements). The traditional platform vacuum is usually one or several large areas controlled uniformly. For products smaller than the platform, energy waste will be caused, and different areas cannot be controlled differently. Excessive vacuum suction force may cause slight local deformation (micro-indentation) of very thin or soft products (such as flexible PCB and some thin films), which does not affect film tearing but may affect the subsequent performance of the product.

[0005] In order to overcome the above problems, a voltage film tearing machine adsorption platform is needed to optimize the above deficiencies. SUMMARY

[0006] The main purpose of the present application is to prevent vacuum leakage, insufficient adsorption, and adsorption failure caused by product itself with through holes, uneven surface or insufficient smoothness, and to significantly weaken the adsorption force in the edge area of the product due to the small sealing range, which is the key area of film tearing, and to easily cause product displacement or film tearing failure due to poor adsorption, and to cause small particles to be rolled up near the adsorption hole by high-speed airflow, and to contaminate the product surface, especially in the semiconductor and display industries with extremely high cleanliness requirements, and to waste energy for products smaller than the platform, and to be unable to control different areas differently, and to cause slight local deformation (micro-indentation) of very thin or soft products such as flexible PCB and some films by excessive vacuum suction force, although it does not affect film tearing, but it may affect the subsequent performance of the product, and to provide a voltage film tearing machine adsorption platform to achieve the following functions: The present application only activates the vacuum chamber covered by the product, and can set a higher vacuum degree for the partition of the edge area of the product to compensate for the loss of edge effect, and can flexibly combine different partitions to automatically adapt to products of different sizes and shapes, and achieve ''one platform for multiple purposes''. The entire surface is covered with micron-sized small holes to form a uniform ''air floatation'' effect, and the adsorption force is extremely uniform, avoiding local stress concentration, effectively preventing deformation of thin and soft products, and greatly reducing particle contamination caused by high-speed airflow, such as silicone, polyurethane or Teflon coating, which can not only adapt to the slight unevenness of the product to improve sealing, but also protect the product surface from scratching, and use a uniform electrostatic field to adsorb the product flat on the platform surface without particle contamination risk, and use lower power vacuum adsorption as auxiliary fixation, compared with the prior art, the present application is more intelligent, flexible, and high-purity precision subsystem development, through the above improvements, the performance, reliability and application range of the film tearing machine can be significantly improved.

[0007] The purpose of the present application can be achieved by adopting the following technical solutions: The voltage film tearing machine adsorption platform comprises an adsorption platform frame body for limiting, and bottom feet are installed at the bottom corners of the adsorption platform frame body. A device box is installed on the middle and upper section of the adsorption platform frame body, and a power switch, a mode switching piece, an adsorption button and a blowing button are horizontally distributed on the upper side of the device box. An adsorption plate is installed on the top of the device box, and a first adsorption cavity and a second adsorption cavity are symmetrically formed on the adsorption plate, and micro adsorption cavities are distributed on the outer circle of the first adsorption cavity and the second adsorption cavity on the adsorption plate, and an adsorption platform is installed on the top of the adsorption plate. Outer expansion feeding assemblies are symmetrically installed on both sides of the adsorption platform frame body.

[0008] Preferably, the outward feeding assembly consists of a telescopic folding rod, an outer folding joint, a feeding platform, and an inner folding joint; The outer side of the equipment box is symmetrically equipped with an inner folding pair, and a telescopic folding rod is folded and installed on the inner folding pair. An outer folding pair is installed at the output end of the telescopic folding rod, and the outer folding pair is installed at the bottom of the feeding platform.

[0009] Preferably, the telescopic folding rod pulls the material unloading platform to expand laterally and retract downwards.

[0010] Preferably, the bottom feet of the adsorption platform frame are lifting structures.

[0011] Preferably, the telescopic folding rod is a telescopic structure, and the telescopic folding rod is used in conjunction with the outer folding pair and the feeding platform.

[0012] Preferably, the adsorption platform has a mesh structure, and the adsorption plate is used in conjunction with the adsorption platform.

[0013] Preferably, the power switch, mode switch, adsorption button, and blower button are used in conjunction with the equipment inside the equipment box.

[0014] Preferably, the equipment box has an openable structure, and a baffle is installed on one side of the main body of the adsorption platform frame.

[0015] Beneficial technical effects of the present invention: The voltage-operated film-peeling machine adsorption platform provided by this invention This application only activates the vacuum chamber of the area covered by the product. It can set a higher vacuum level for the partitions of the product edge area to compensate for the loss of edge effect. Different partitions can be flexibly combined to automatically adapt to products of different sizes and shapes, realizing "one platform for multiple uses". The entire surface is covered with micron-sized pores, forming a uniform "air flotation" effect. The adsorption force is distributed very evenly, avoiding local stress concentration, effectively preventing deformation of thin and soft products, and greatly reducing particulate contamination caused by high-speed airflow. Materials such as silicone, polyurethane, or Teflon coatings can adapt to the slight unevenness of the product, improve sealing, and protect the product surface from scratches. The product is flatly adsorbed onto the platform surface with a uniform electrostatic field, eliminating the risk of particulate contamination. Low-power vacuum adsorption is then used as an auxiliary fixation. Compared with existing technologies, this application develops towards a more intelligent, flexible, and high-cleanliness precision subsystem. Through the above improvements, the performance, reliability, and applicability of the film peeling machine can be significantly improved. The telescopic folding rod is pushed according to the size of the membrane to unfold the feeding platforms on both sides of the adsorption platform frame. During the unfolding process, multiple membranes are supported to prevent slippage and inconvenience to operation. When the feeding platform is not needed, the telescopic folding rod is activated to pull the feeding platform downward to retract it for easy storage. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 The overall structure of the device of a preferred embodiment of the voltage film tearing machine adsorption platform according to the present application is shown schematically; Figure 2 The front side of a preferred embodiment of the voltage film tearing machine adsorption platform according to the present application is shown schematically; Figure 3 The top view of a preferred embodiment of the voltage film tearing machine adsorption platform according to the present application is shown schematically; Figure 4 The right side of a preferred embodiment of the voltage film tearing machine adsorption platform according to the present application is shown schematically; Figure 5 The structure of the adsorption platform frame body and the adsorption plate of a preferred embodiment of the voltage film tearing machine adsorption platform according to the present application is shown schematically.

[0017] In the figure: 1, adsorption platform frame body; 101, adsorption plate; 102, first adsorption cavity; 103, second adsorption cavity; 104, micro adsorption cavity; 2, telescopic folding rod; 201, inner folding pair; 3, outer folding pair; 4, material placing table; 5, equipment box; 6, power switch; 7, mode switching piece; 8, adsorption plate button; 9, air blowing button; 10, adsorption plate platform; 11, baffle; 12, bottom foot. DETAILED DESCRIPTION

[0018] To make the technical solution of the present application clearer and more explicit to those skilled in the art, the present application will be described in further detail below in conjunction with the embodiments and the drawings, but the embodiments of the present application are not limited thereto.

[0019] Example 1 As shown in Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 , the voltage film tearing machine adsorption platform provided in the present embodiment includes an adsorption platform frame body 1 for limiting, the bottom corners of the adsorption platform frame body 1 are provided with bottom feet 12; A equipment box 5 is installed on the middle upper segment of the adsorption platform frame body 1, and the upper side of the equipment box 5 is transversely provided with a power switch 6, a mode switching piece 7, an adsorption button 8 and an air blowing button 9; The top of the equipment box 5 is provided with an adsorption plate 101, and a first adsorption cavity 102 and a second adsorption cavity 103 are symmetrically arranged on the adsorption plate 101, and a plurality of micro adsorption cavities 104 are arranged around the first adsorption cavity 102 and the second adsorption cavity 103 on the adsorption plate 101, and an adsorption platform 10 is arranged on the top of the adsorption plate 101. The adsorption platform frame body 1 is symmetrically provided with an outwardly extending material placing assembly on both sides.

[0020] The adsorption platform is divided into a plurality of independent small vacuum chambers, each chamber can be independently controlled, the adsorption surface uses microporous ceramic or sintered porous material, and a flexible sealing material is attached to the surface of the jig; The robot precisely places the workpiece on the electrostatic chuck, the controller issues an instruction, the high-voltage power supply applies a direct-current high voltage such as +1000V and -1000V to the electrode of the chuck, and sufficient adsorption force can be generated within 1 second, during the film tearing process, the power supply is continuously supplied to maintain the adsorption force, after the processing is completed, the controller cuts off the high-voltage power supply, and performs a key step of charge neutralization; Generally, the method of short-circuiting the positive and negative electrodes to release the charge in the chuck is adopted, and the release step is crucial, if the charge is not completely neutralized, the workpiece will be "stuck" on the chuck or suddenly pop out due to residual electrostatic force, causing damage or failure to take the piece; The present application only activates the vacuum chambers in the area covered by the product, and can set a higher vacuum degree for the partition area of the edge of the product to compensate for the loss of the edge effect, and can flexibly combine different partitions to automatically adapt to products of different sizes and shapes, realizing "one platform for multiple uses"; The entire surface is covered with micron-sized small holes, forming a uniform "air floating" effect, the adsorption force is extremely uniform, local stress concentration is avoided, thin and soft products can be effectively prevented from deforming, and particle pollution caused by high-speed airflow can be greatly reduced, such as silicone, polyurethane or Teflon coating, these materials can not only adapt to the slight unevenness of the product to improve the sealing performance, but also protect the surface of the product from being scratched, the product is evenly adsorbed on the platform surface by a uniform electrostatic field without the risk of particle pollution, and a lower-power vacuum adsorption is used as an auxiliary fixation, compared with the prior art, the present application is more intelligent, flexible, and high-purity, and is developed in the direction of a precise subsystem, through the above improvements, the performance, reliability and application range of the film tearing machine can be significantly improved.

[0021] Embodiment 2 The scheme in embodiment 1 will be further introduced in combination with a specific working mode, and details are described below: As Figure 1 , Figure 2 , Figure 4 and Figure 5As shown, as a preferred embodiment, on the basis of the above mode, further, the outwardly extending feeding assembly is composed of a telescopic folding rod 2, an outer folding auxiliary 3, a feeding table 4 and an inner folding auxiliary 201; The inner folding auxiliary 201 is symmetrically installed outside the equipment box 5, the telescopic folding rod 2 is foldably installed on the inner folding auxiliary 201, the outer folding auxiliary 3 is installed at the output end of the telescopic folding rod 2, and the outer folding auxiliary 3 is installed at the bottom of the feeding table 4.

[0022] The telescopic folding rod 2 pulls the feeding table 4 to be transversely unfolded and downwardly stored.

[0023] The telescopic folding rod 2 is of a telescopic structure, and is used in cooperation with the outer folding auxiliary 3 and the feeding table 4.

[0024] The adsorption platform 10 is of a net structure, and the adsorption plate 101 is used in cooperation with the adsorption platform 10. As shown in Figure 1 , Figure 2 , Figure 4 and Figure 5 , according to the size of the film, the telescopic folding rod 2 is pushed to unfold the feeding table 4 on both sides of the adsorption platform frame body 1, and the multiple films support during the unfolding process, preventing the problem of sliding and causing inconvenience to operation, and when the feeding table 4 is not needed, the telescopic folding rod 2 is started to pull the feeding table 4 to be downwardly stored, realizing the function of convenient storage.

[0025] The above is only a further embodiment of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can make equivalent replacement or change according to the technical scheme and concept of the present application within the disclosed range, which belongs to the protection scope of the present application.

Claims

1. A voltage film tearing machine adsorption platform, comprising an adsorption platform frame body (1) for limiting, and bottom feet (12) are installed at the bottom corners of the adsorption platform frame body (1); Characterized in that: A device box (5) is installed on the middle upper section of the adsorption platform frame body (1), and a power switch (6), a mode switching piece (7), an adsorption button (8) and a blowing button (9) are horizontally distributed on the upper side of the device box (5); A suction plate (101) is installed on the top of the device box (5), first and second suction cavities (102 and 103) are symmetrically formed on the suction plate (101), micro suction cavities (104) are distributed on the outer circle of the first and second suction cavities (102 and 103) on the suction plate (101), and an adsorption platform (10) is installed on the top of the suction plate (101); Outer expansion feeding assemblies are symmetrically installed on both sides of the adsorption platform frame body (1).

2. The voltage film tearer suction platform according to claim 1, wherein: The outer expansion feeding assembly comprises a telescopic folding rod (2), an outer folding vice (3), a feeding table (4) and an inner folding vice (201); The inner folding vice (201) is symmetrically installed on the outer side of the device box (5), the telescopic folding rod (2) is foldably installed on the inner folding vice (201), the outer folding vice (3) is installed at the output end of the telescopic folding rod (2), and the outer folding vice (3) is installed at the bottom of the feeding table (4).

3. The voltage film tearer suction platform of claim 1, wherein: The telescopic folding rod (2) pulls the feeding table (4) to expand horizontally and to be stored downward.

4. The voltage film tearer suction platform according to claim 3, wherein: The bottom feet (12) at the bottom of the adsorption platform frame body (1) are of a lifting structure.

5. The voltage film tearer suction platform according to claim 4, wherein: The telescopic folding rod (2) is of a telescopic structure, and is used in cooperation with the outer folding vice (3) and the feeding table (4).

6. The voltage film tearer suction platform of claim 2, wherein: The adsorption platform (10) is of a mesh structure, and is used in cooperation with the suction plate (101).

7. The voltage film tearer suction platform of claim 1, wherein: The power switch (6), the mode switching piece (7), the adsorption button (8) and the blowing button (9) are used in cooperation with devices in the device box (5).

8. The voltage film tearer suction platform according to claim 7, wherein: The device box (5) is of an opening and closing structure, and a baffle (11) is installed on one side of the adsorption platform frame body (1).

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