High-precision machining equipment gear number difference clearance low-speed transmission device and monitoring method

Abstract

The present application belongs to the field of high-precision transmission technology, in particular to a gear number difference gap-eliminating low-speed transmission device for high-precision machining equipment and a monitoring method. The present application proposes the following scheme, which comprises an input shaft gear and an output spindle, and further comprises a gap-eliminating gear assembly installed on the output spindle. The gap-eliminating gear assembly comprises an output main gear, a secondary adjusting gear and a pre-tightening mechanism. The input shaft gear is simultaneously engaged with the output main gear and the secondary adjusting gear, and there is a gear number difference between the output main gear and the secondary adjusting gear. The secondary adjusting gear is installed on the output main gear in a clearance fit manner and can freely float in the radial direction. The pre-tightening mechanism comprises a gland and a circumferentially-distributed disc spring assembly. The present application utilizes the phase compensation effect generated by the gear number difference and the floating state, which is converted into continuous gap-eliminating force, so as to realize the automatic filling and elimination of the gear engagement side gap without manual adjustment.

Description

Technical Field

[0001] This invention relates to the field of high-precision transmission technology, and in particular to a low-speed transmission device and monitoring method for eliminating backlash in high-precision machining equipment. Background Technology

[0002] In gear transmission systems, to avoid jamming caused by manufacturing errors, thermal expansion, or poor lubrication, a small gap, known as backlash, must exist between the meshing surfaces of the gear pair. However, in applications requiring frequent forward and reverse rotation or extremely high motion and positioning accuracy, this backlash can cause delayed response of the driven gear, backlash errors, system vibration and noise, and severely degrade transmission performance.

[0003] The main methods for eliminating gaps in existing technologies include:

[0004] 1. Disc Spring Loaded Double Gear: This method uses two thin, rotatable disc gears, which are forced apart by a spring to ensure close contact with the two tooth surfaces of the mating gear. However, the spring force increases friction and wear, and the spring may fatigue and its backlash-eliminating force may decrease after long-term use.

[0005] 2. Adjusting the center distance of the eccentric bushing: Backlash is reduced by adjusting the center distance of a pair of gears. This method is cumbersome, and excessively tight meshing may lead to decreased efficiency and excessive temperature rise.

[0006] 3. Shim adjustment: The gear position is adjusted by grinding and adding shims. This is a one-time adjustment, and the wear cannot be automatically compensated. It also requires extremely high assembly precision.

[0007] These methods generally suffer from problems such as inconvenience in adjustment, inability to automatically compensate, or introduction of additional frictional losses. Summary of the Invention

[0008] Based on the technical problems in the background art, the present invention proposes a low-speed transmission device and monitoring method for eliminating backlash due to tooth number difference in high-precision machining equipment.

[0009] The high-precision machining equipment backlash-eliminating low-speed transmission device proposed in this invention includes an input shaft gear and an output spindle, and further includes a backlash-eliminating gear assembly mounted on the output spindle; the backlash-eliminating gear assembly includes an output main gear, a secondary adjusting gear, and a preload mechanism; the input shaft gear meshes with both the output main gear and the secondary adjusting gear, and there is a tooth number difference between the output main gear and the secondary adjusting gear; the secondary adjusting gear is mounted on the output main gear with a clearance fit and can float freely in the radial direction; the preload mechanism includes a pressure cap and a circumferentially distributed disc spring assembly, the preload mechanism is axially pressed against the end face of the secondary adjusting gear, providing a continuous axial preload force for the output main gear and the secondary adjusting gear, and the pressure cap is connected to the end face of the output main gear through the disc spring assembly.

[0010] Preferably, the disc spring clamping assembly includes a bushing, a disc spring assembly, and a screw assembly. The disc spring assembly is fitted onto the bushing in a preset arrangement and then inserted into the hole of the pressure cap. The disc spring assembly is then connected to the threaded hole on the end face of the output main gear through the screw assembly.

[0011] Preferably, the number of teeth meshing between the input shaft gear and the output main gear is the first number of teeth Z1, and the number of teeth meshing between the input shaft gear and the auxiliary adjusting gear is the second number of teeth Z2, and Z2 = Z1 ± n, where n is 1 or 2.

[0012] Preferably, the disc spring assembly has indicator rings at both ends, and the outer surface of the disc spring assembly is coated with a temperature-sensitive coating that displays different colors at different temperatures; it also includes a status indicator light group and an intelligent monitoring and control system: the status indicator light group is installed on the outer end face of the pressure cover or on the equipment operation panel, and includes multiple indicator lights of different colors; the intelligent monitoring and control system includes a temperature monitoring unit, a displacement monitoring unit, a visual monitoring unit, and a control unit.

[0013] According to the monitoring method of the backlash elimination low-speed transmission device for high-precision machining equipment, the control unit is specifically configured as follows: Step 1: The temperature monitoring unit collects the working temperature data of the disc spring assembly, the displacement monitoring unit collects the compression change data of the disc spring assembly and the floating clearance data of the auxiliary adjusting gear, and the visual monitoring unit is used to obtain the color information of the temperature-sensitive coating of the disc spring assembly through image recognition and convert it into a temperature estimate; Step 2: Based on the collected data, firstly, the expected length change value of the disc spring caused by the temperature change is calculated, then the deviation value between the actual measured disc spring compression change and the expected temperature change is calculated, then the preload health index is calculated based on the deviation value, and finally, the preload health index is correlated with the floating clearance value of the auxiliary adjusting gear to evaluate the health status of the automatic backlash elimination function; Step 3: According to the evaluation results, the system status is classified and corresponding control response measures are executed.

[0014] Preferably, the specific logic for calculating the preload health index based on the deviation value in step two is as follows: First, the deviation values ​​of multiple consecutive sampling periods are filtered to obtain stable deviation values. Then, the absolute value of the stable deviation value is compared with the preset maximum allowable deviation value, and the ratio between the two is calculated. Finally, the ratio is subtracted from one to obtain the preload health index. When the deviation value is negative, it indicates that the preload has decreased. When the deviation value is positive, it indicates that the preload has increased abnormally.

[0015] Preferably, the control response measures in step three include a graded response: when the automatic gap elimination function is healthy, the green indicator light is kept on to maintain normal operation; when the automatic gap elimination function is in a warning state, the blue indicator light is controlled to flash slowly to analyze the cause; when the automatic gap elimination function is damaged, the yellow indicator light is controlled to flash rapidly to increase the monitoring frequency and initiate detailed diagnosis; when the automatic gap elimination function is on the verge of failure, the red indicator light is controlled to flash rapidly to issue an emergency alarm and stop the machine for inspection.

[0016] The beneficial effects of this invention are as follows:

[0017] 1. In this invention, the phase compensation effect generated by the difference in the number of teeth and the floating state is converted into a continuous backlash-eliminating force, realizing the automatic filling and elimination of gear meshing backlash without manual adjustment. During operation, there is a continuous adjustment trend driven by the difference in the number of teeth, which can track and compensate for the backlash increased due to wear, realizing online automatic maintenance and greatly extending the maintenance-free cycle. The disc spring is used as the clamping element, and its force-displacement characteristics are approximately constant within the working range, providing stiffness and stability far exceeding other clamping elements.

[0018] 2. In this invention, by directly linking disc spring status monitoring with backlash elimination function evaluation, the transformation from monitoring component status to ensuring system function is realized. It can issue early warnings in the early stages of backlash elimination function decline, allowing for early maintenance measures to ensure transmission accuracy and reliability. Attached Figure Description

[0019] Figure 1 This is a schematic cross-sectional view of the shaft system structure of the low-speed transmission device for eliminating backlash in high-precision machining equipment proposed in this invention.

[0020] Figure 2 This is a partially enlarged cross-sectional view of the tooth number difference preset mechanism and disc spring clamping mechanism of the low-speed transmission device for tooth number difference elimination in high-precision machining equipment proposed in this invention.

[0021] Figure 3 This is a schematic diagram of the backlash elimination principle of the low-speed transmission device for eliminating backlash in high-precision machining equipment proposed in this invention.

[0022] In the diagram: 1-Input shaft gear; 2-Output main gear; 3-Secondary adjusting gear; 4-Guide rail belt; 5-Output main shaft; 6-Locking screw; 7-Granty cap; 8-Shaft sleeve; 9-Screw assembly; 10-Disc spring assembly; 11-Key. Detailed Implementation

[0023] Example 1: Refer to Figures 1-3A backlash elimination low-speed transmission device for high-precision machining equipment includes an input shaft gear 1, an output spindle 5, and a backlash elimination gear assembly mounted on the output spindle 5. The backlash elimination gear assembly is the core of the invention and consists of an output main gear 2, a secondary adjusting gear 3, an elastic element, and a pre-tightening mechanism. The output main gear 2 is positioned by a key 11 and is fixedly mounted on the output spindle 5 by circumferentially distributed locking screws 6 and tapered pins.

[0024] The key point is that the input shaft gear 1 meshes with the output main gear 2, and its number of teeth is designed to be Z1. The auxiliary adjusting gear 3 also meshes with the input shaft gear 1, and its number of teeth is designed to be Z2, and Z2=Z1±n, where n is a small integer, usually 1 or 2. That is, there is a small difference in the number of teeth between the output main gear 2 and the auxiliary adjusting gear 3.

[0025] In this invention, a guide belt 4 is attached to each of the annular grooves on both ends of the auxiliary adjusting gear 3. The guide belt 4 is made of polytetrafluoroethylene, which is a nano-polymer composite material. This material has the characteristics of high wear resistance, low coefficient of friction, self-lubrication, and shock absorption and noise reduction. The auxiliary adjusting gear 3 is installed with a clearance fit with the output main gear 2. The end face of the output main gear 2 is in contact with the soft belt surface, so the auxiliary adjusting gear 3 can float freely in the radial direction.

[0026] In this invention, the pre-tightening mechanism includes a pressure cap 7 and a circumferentially distributed disc spring assembly. The pre-tightening mechanism is axially pressed against the end face of the auxiliary adjusting gear 3 to provide a continuous axial pre-tightening force for the output main gear 2 and the auxiliary adjusting gear 3. The pressure cap 7 is connected to the end face of the output main gear 2 through the disc spring assembly. The disc spring pressing assembly includes a bushing 8, a disc spring group 10, and a screw assembly 9. The disc spring group 10 is fitted onto the bushing 8 in a preset arrangement and then inserted into the hole of the pressure cap 7. The disc spring group 10 is then connected to the threaded hole on the end face of the output main gear 2 through the screw assembly 9.

[0027] The specific implementation of the axial constraint mechanism is as follows: The output main gear 2 has circumferentially distributed threaded holes on its end face, which are connected and pressed by corresponding circumferentially distributed disc spring assemblies on the pressure cover 7; the disc springs are arranged in a certain way and sleeved on the bushing, and inserted into the circumferentially distributed holes of the pressure cover, and then connected to the output main gear 2 by the screw assembly 9; the disc spring assembly 10 generates continuous pressure through pre-tightening deformation, and when the screw loosens due to vibration or impact, the disc spring releases the stored potential energy to automatically compensate for the pressure loss, thereby maintaining a tight fastening effect.

[0028] In this invention, the backlash elimination principle is as follows: When the input shaft gear 1 rotates, the output main gear 2 meshes with the input shaft gear 1. Due to the presence of backlash, the tooth sides of the two gears naturally contact each other. Since the number of teeth of the auxiliary adjusting gear 3 differs from that of the output main gear 2 (Z1≠Z2), and the auxiliary adjusting gear 3 has guide rails 4 on both sides, it is in a relaxed and free floating state on the end face of the output main gear 2. Meanwhile, the auxiliary adjusting gear 3 is always pressed by the end face of the pre-tightening mechanism. Therefore, the meshing phase of the auxiliary adjusting gear 3 relative to the output main gear 2 and the input shaft gear 1 will accumulate and shift at a rate of one small difference per revolution, eventually pressing against the other side of the teeth of the input shaft gear 1. The two work together to achieve automatic filling and elimination of meshing backlash.

[0029] Working principle:

[0030] First, install the backlash-eliminating gear assembly on the output spindle 5 to ensure that the output main gear 2, the auxiliary adjusting gear 3, and the input shaft gear 1 are properly meshed. Then, connect the pressure cover 7 to the end face of the output main gear 2 and the corresponding circumferentially distributed threaded holes through the disc spring clamping assembly, and axially press the end face of the auxiliary adjusting gear 3. Then, adjust the pre-compression of the disc spring assembly 10 to ensure that the pre-compression of the multiple circumferentially distributed disc spring clamping assemblies is consistent.

[0031] like Figure 3 As shown, when the input shaft gear 1 rotates, the two meshing teeth of the output main gear 2 and the input shaft gear 1 contact each other on one side of the tooth flank. Because the number of teeth of the auxiliary adjusting gear 3 differs from that of the output main gear 2 (Z1≠Z2), and it is in a state of easy radial floating, the meshing phase of the auxiliary adjusting gear 3 relative to the output main gear 2 and the input shaft gear 1 accumulates at a rate of one small difference per revolution, eventually pressing against the other side of the tooth flank of the input shaft gear 1. The output main gear and the auxiliary adjusting gear mesh with both sides of the teeth of the input shaft gear 1, achieving the effect of eliminating backlash. When the gears wear down, i.e., the backlash increases, the meshing phase difference between the auxiliary adjusting gear 3 and the output main gear 2 and the input shaft gear 1 continues to accumulate until finally the output main gear 2 and the auxiliary adjusting gear 3 mesh with both sides of the teeth of the input shaft gear 1, maintaining the backlash elimination effect.

[0032] Example 2: Refer to Figures 1-3 Based on Example 1, and addressing the issue of backlash elimination failure caused by temperature rise and long-term fatigue in disc spring assembly preload, a monitoring method for a low-speed transmission device with tooth count difference backlash elimination for high-precision machining equipment is proposed. Indicator rings are installed at both ends of the disc spring assembly 10. These rings are associated with the compression state of the disc spring assembly. When the disc spring undergoes plastic deformation due to long-term fatigue, the relative position of the indicator rings will change visibly, providing an intuitive indication of the fatigue state. A temperature-sensitive coating is applied to the outer surface of the disc spring assembly 10. This coating displays different colors at different temperatures, providing an intuitive indication of the disc spring's operating temperature.

[0033] It should be noted that: during installation, pay attention to the initial position of the indicator ring to ensure that the mark is clearly visible; when adjusting the pre-compression, observe the position of the indicator ring simultaneously to ensure that the pre-compression state of all disc spring assemblies is consistent; record the color of the temperature-sensitive coating during installation as a temperature reference.

[0034] This invention also includes a status indicator light group and an intelligent monitoring and control system:

[0035] The status indicator light group is installed on the outer end face of the pressure cover 7 or on the equipment operation panel, and includes multiple indicator lights of different colors. The status indicator light group is connected to the main controller through the control circuit. The indicator light group includes four LEDs: green (normal), blue (caution), yellow (warning), and red (emergency). Each indicator light has a different flashing mode: constant, slow flashing, and fast flashing.

[0036] The intelligent monitoring and control system includes a temperature monitoring unit, a displacement monitoring unit, a visual monitoring unit, and a control unit;

[0037] Temperature monitoring unit: Three miniature temperature sensors are arranged at equal intervals around the disc spring assembly 10 to measure the working temperature of the disc spring; an ambient temperature sensor is arranged on the gearbox housing, and the sensor is embedded.

[0038] Displacement monitoring unit: A micro-displacement sensor is installed between the pressure cap 7 and the output main gear 2 to measure the change in the total compression of the disc spring assembly 10; a displacement sensor is installed on the end face of the auxiliary adjusting gear 3 to measure the floating clearance;

[0039] Visual monitoring unit: A small industrial camera is set up and aimed at the indicator ring and temperature-sensitive coating of disc spring assembly 10. The camera identifies the mark position and coating color through image processing and converts the coating color into a temperature estimate. The temperature estimate serves as a key parameter for verifying the accuracy of temperature sensor readings and monitoring the temperature of local hot spots.

[0040] Control unit: Used to process monitoring data and execute control decisions.

[0041] In this invention, the control unit is specifically configured as follows:

[0042] Step 1: Data Collection and Verification for Disc Spring Status Monitoring: Collect operating temperature data of disc spring assembly 10, compression change data of disc spring assembly 10, floating clearance data of auxiliary adjusting gear 3, and temperature estimation data for the color change of the temperature-sensitive coating obtained through visual monitoring; specifically:

[0043] 1.1 Temperature Data Acquisition: The operating temperature of the disc spring is collected every second. .

[0044] 1.2 Displacement Data Acquisition: Synchronous Measurement of Disc Spring Compression Changes and auxiliary adjusting gear floating clearance .

[0045] 1.3 Visual Data Acquisition: Images of the temperature-sensitive coating are acquired via camera and converted into temperature estimates. .

[0046] 1.4 Data Cross-Validation: Comparison The difference between the measured and direct temperature values ​​is used to calculate the verification error. ;

[0047] when At that time, the system flagged the temperature data as suspicious.

[0048] Step 2: Disc Spring Performance Analysis and Backlash Elimination Function Evaluation: Based on the collected data, firstly, the expected length change of the disc spring due to temperature changes is calculated. Then, the deviation between the actual measured change in disc spring compression and the expected temperature change is calculated. Next, the preload health index is calculated based on this deviation. Finally, the preload health index is correlated with the floating backlash value of the secondary adjusting gear 3 to evaluate the health status of the automatic backlash elimination function. Specifically:

[0049] 2.1 Disc Spring Temperature Performance Analysis: The weighted effective temperature is calculated using the following formula: ; It more accurately reflects the actual operating temperature of the disc spring, taking into account both internal temperature measurement and surface temperature information.

[0050] in ; based on The calculations show that this reflects the reliability of the visual temperature data. ;

[0051] Evaluate the effect of temperature on disc spring stiffness and estimate the trend of preload variation based on material property curves.

[0052] 2.2 Correlation Analysis of Disc Spring Displacement and Backlash Elimination: Calculation of Disc Spring Length Change Caused by Expected Temperature: ;in The coefficient of thermal expansion of the material. To record a stable ambient temperature during the initial installation and commissioning of the device, This is the initial length of the disc spring assembly at the reference temperature;

[0053] Calculate the deviation between the actual displacement and the expected temperature: ;

[0054] Establish Floating clearance with secondary adjusting gear Association model:

[0055] when When the value is negative and its absolute value increases, it indicates a decrease in the disc spring preload. At this time, the floating clearance should be monitored. Does it increase?

[0056] when If the increase exceeds the threshold, the system's automatic gap-reduction function may fail to function.

[0057] 2.3 Health assessment of gap elimination function:

[0058] Calculate the preload health index: ,in This is the maximum permissible deviation threshold;

[0059] Calculate the temperature-displacement compatibility factor: ;

[0060] Combination and Value assessment of gap elimination function status:

[0061] when and and Within the normal range, the gap elimination function is healthy;

[0062] when or or When the gap increases slightly, the gap-eliminating function is limited and the system is in a warning state.

[0063] when or or When the gap increases significantly, the gap-reducing function is impaired.

[0064] when or or When the gap is significantly increased, the gap-eliminating function is on the verge of failure.

[0065] Step 3: Intelligent Hierarchical Control and Backlash Elimination Function Guarantee: Based on the evaluation results of Step 2, the system executes targeted controls to ensure the automatic backlash elimination function; specifically:

[0066] when and and When the automatic gap elimination mechanism is working properly, no intervention is required. Maintain the current working state, record data every 10 minutes, and keep the indicator light green.

[0067] when or or When the gap increases slightly, the gap elimination function is limited and requires attention; the indicator light will flash blue slowly. Determine whether the positive or negative result is due to temperature or mechanical issues; if it is due to high temperature, calculate the cooling adjustment amount and adjust the cooling parameters automatically or manually; if it is due to preload reduction, calculate the preload compensation.

[0068] when or or When the fatigue level increases significantly, the indicator light flashes yellow rapidly; immediately increase the monitoring frequency to 10 times per second, analyze the indicator ring image, determine the degree of fatigue, and assess the risk of gap elimination failure based on the P_health decrease rate and d change trend.

[0069] when or or When the gap increases significantly, the indicator light flashes red rapidly, issuing an emergency alarm and immediately stopping the machine to prevent damage to the equipment caused by continued operation while the gap elimination function is in failure.

[0070] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A low-speed transmission device for high-precision machining equipment, comprising an input shaft gear (1) and an output main shaft (5), characterized in that, Further comprising a backlash gear assembly installed on the output main shaft (5); The backlash gear assembly comprises an output main gear (2), a secondary adjustment gear (3) and a pre-tightening mechanism; The input shaft gear (1) is in mesh with the output main gear (2) and the secondary adjustment gear (3) at the same time, and there is a difference in the number of teeth between the output main gear (2) and the secondary adjustment gear (3); The secondary adjustment gear (3) is installed on the output main gear (2) in a clearance fit manner and can freely float in the radial direction; The pre-tightening mechanism comprises a gland (7) and a circumferentially distributed disc spring assembly, and is axially pressed on the end face of the secondary adjustment gear (3) to provide a continuous axial pre-tightening force for the output main gear (2) and the secondary adjustment gear (3); the gland (7) is connected with the end face of the output main gear (2) through the disc spring assembly; the disc spring compression assembly comprises a shaft sleeve (8), a disc spring group (10) and a screw assembly (9), both ends of the disc spring group (10) are provided with indicating mark rings, the outer surface of the disc spring group (10) is coated with a temperature-sensitive coating, the temperature-sensitive coating displays different colors at different temperatures, and further comprising a state indicating lamp group and an intelligent monitoring control system: the state indicating lamp group is installed on the outer side end face of the gland (7) or the equipment operation panel and comprises a plurality of indicating lamps of different colors; the intelligent monitoring control system comprises a temperature monitoring unit, a displacement monitoring unit, a visual monitoring unit and a control unit.

2. The low speed gear device for high precision machining apparatus according to claim 1, characterized in that, The disc spring group (10) is inserted into the hole of the gland (7) after being sleeved on the shaft sleeve (8) in a preset arrangement manner, and the disc spring group (10) is connected with the threaded hole of the end face of the output main gear (2) through the screw assembly (9).

3. The low speed gear device with the difference in the number of teeth for eliminating backlash for high precision processing equipment according to claim 1, characterized in that, The number of teeth of the input shaft gear (1) meshing with the output main gear (2) is a first number of teeth Z1, the number of teeth of the input shaft gear (1) meshing with the secondary adjustment gear (3) is a second number of teeth Z2, and Z2=Z1±n, wherein n is 1 or 2.

4. The high-precision machining apparatus use gear number difference anti-backlash low speed transmission device according to any one of claims 1 to 3, characterized in that, Specifically, when the input shaft gear (1) rotates, the output main gear (2) contacts the tooth surface on one side of the input shaft gear (1), and the difference in the number of teeth between the output main gear (2) and the secondary adjustment gear (3) causes the secondary adjustment gear (3) to produce a phase cumulative offset relative to the output main gear (2); Under the action of the pre-tightening mechanism, the secondary adjustment gear (3) is pressed towards the tooth surface on the other side of the input shaft gear (1), so that the output main gear (2) and the secondary adjustment gear (3) are simultaneously meshed with the tooth surfaces on both sides of the input shaft gear (1), and the meshing gap is eliminated; When the gear wears and the gap increases, the secondary adjustment gear (3) continues to accumulate phase offset, re-meshes on both sides, and maintains the backlash effect.

5. The method of monitoring the number of teeth difference gap elimination low speed transmission device for high-precision machining equipment according to claim 2, wherein the number of teeth difference gap elimination low speed transmission device for high-precision machining equipment is characterized by, The control unit is specifically configured as: Step one, the temperature monitoring unit collects the working temperature data of the disc spring group (10), the displacement monitoring unit collects the compression amount change data of the disc spring group (10) and the floating gap data of the secondary adjustment gear (3), and the visual monitoring unit is used to obtain the color information of the temperature-sensitive coating of the disc spring group (10) through image recognition and convert it into a temperature estimate value; Step two, based on the collected data, first calculate the length change value of the disc spring expected to be caused by temperature change, then calculate the deviation value of the actual measured disc spring compression change and the temperature expected change, then calculate the preload health index based on the deviation value, and finally associate the preload health index with the secondary adjustment gear (3) floating gap value for analysis to evaluate the health status of the automatic clearance elimination function; Step three, classify the system state according to the evaluation results, and perform corresponding control response measures.

6. The monitoring method of the low-speed transmission device with a difference in the number of teeth and a backlash elimination for a high-precision processing equipment according to claim 5, characterized in that, The specific logic of calculating the preload health index based on the deviation value in step two is as follows: First, filter the deviation values of multiple consecutive sampling periods to obtain stable deviation values, then compare the absolute values of the stable deviation values with the preset maximum allowed deviation value, calculate the ratio of the two, and finally subtract the ratio from one to obtain the preload health index; When the deviation value is negative, it means that the preload is attenuated; When the deviation value is positive, it means that the preload is abnormally increased.

7. The method of claim 5, wherein the number of teeth difference low speed gear device for high precision machining equipment is characterized in that, In step two, when the calculated preload health index decreases, analyze whether the reason for the decrease of the index is temperature influence or disc spring state change; If it is temperature influence, adjust the evaluation standard of the health index based on the temperature change expected model; If it is disc spring state change, analyze the correlation between the decrease of the health index and the increase of the secondary adjustment gear (3) floating gap, so as to judge the specific degree and reason of the decline of the automatic clearance elimination function.

8. The monitoring method of the low-speed gear with a difference in the number of teeth and a backlash elimination for a high-precision machining apparatus according to claim 5, characterized in that, The control response measures in step three include hierarchical response: When the automatic clearance elimination function is healthy, control the green indicator light to be always on, maintain normal working state; When the automatic clearance elimination function is in pre-warning state, control the blue indicator light to flash slowly, analyze the reason; When the automatic clearance elimination function is damaged, control the yellow indicator light to flash quickly, increase the monitoring frequency and start detailed diagnosis; When the automatic clearance elimination function is close to failure, control the red indicator light to flash quickly, issue an emergency alarm and shut down for inspection.

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